CN216262411U - A stable operation of ultrasonic cleaning device - Google Patents

Abstract

An ultrasonic cleaning device with stable operation relates to the technical field of ultrasonic cleaning devices, and solves the technical problem that an ultrasonic generator cannot run stably. There is a jet cavity, one end is connected with a drainage part, a liquid storage cavity and a drainage pipeline are arranged in the drainage part, and the liquid storage cavity is communicated with the injection cavity through the drainage pipeline; sensor. The beneficial effect of the utility model is that in the process of introducing the high-frequency oscillating cleaning liquid in the ejection cavity into the liquid storage cavity by the drainage pipeline, it will be restricted by the opening of the bell-shaped structure of the drainage pipeline and its relatively small diameter. The formation of the outflow and laminar jet state of the orifice makes the liquid level of the cleaning liquid entering the liquid storage chamber more stable, which is beneficial for the sensor to stably sense the liquid level, so that the ultrasonic generator can run stably and the cleaning effect is better.

Description

A stable operation of ultrasonic cleaning device

technical field

The utility model relates to the technical field of ultrasonic cleaning devices, in particular to an ultrasonic cleaning device capable of continuous and stable operation.

Background technique

Existing ultrasonic cleaning devices used in the field of semiconductor manufacturing use ultrasonic generators to send high-frequency alternating current signals of ultrasonic or megasonic frequencies, and transmit them to ultrasonic transducers through radio frequency lines. The high-frequency alternating current signal is converted into the high-frequency mechanical vibration of the piezoelectric component, so that the high-frequency vibration of the piezoelectric component of the ultrasonic transducer is used to drive the semiconductor cleaning liquid pumped into the spray cavity of the cleaning machine body to vibrate violently, and the semiconductor cleaning solution is used to clean The pumping pressure of the liquid itself and the driving force of the ultrasonic transducer eject the cleaning liquid at a high speed through the ejection port of the ejection cavity, thereby realizing efficient cleaning of the surface of the semiconductor device.

In order to carry out automatic control, reduce power consumption and prevent dry burning of existing ultrasonic cleaning devices, a photoelectric sensor is generally installed on the main body of the cleaning machine to detect the change of the cleaning liquid level in the spray chamber, and the photoelectric sensor is used to control the operation of the ultrasonic generator. It is connected to the running controller for reporting the liquid level detection signal in the ejection chamber to it. When the photoelectric sensor detects that there is a sufficient amount of cleaning fluid in the ejection chamber, the operation controller will automatically control the ultrasonic generator to run continuously, so as to continuously superimpose the kinetic energy of high-frequency oscillation for the cleaning fluid continuously pumped into the ejection chamber. When the photoelectric sensor detects that the cleaning liquid content in the ejection chamber is low or there is no cleaning liquid, the operation controller automatically controls the ultrasonic generator to stop, so as to avoid the continuous operation of the ultrasonic transducer in the absence of cleaning liquid, and prevent it from drying out due to dry burning. damage caused.

However, most of the photoelectric sensors installed on the existing ultrasonic cleaning devices have one end of the sensing probe directly installed in the ejection cavity, and the cleaning liquid in the ejection cavity will oscillate violently at high frequency after being energized by the ultrasonic transducer, causing the The liquid level fluctuates up and down, which seriously interferes with the stability and accuracy of the photoelectric sensor for the detection of the cleaning liquid level, and the operation controller cannot detect the actual cleaning liquid in the ejection chamber according to the received liquid level detection signal. Judging the liquid level causes the operation controller to control the ultrasonic generator to perform discontinuous, high-frequency, intermittent repeated startup or shutdown according to the received liquid level detection signal, which can easily cause the ultrasonic generator to malfunction or be damaged.

In addition, if the ultrasonic generator runs in a discontinuous and intermittent abnormal state during the actual cleaning process, it will also cause the cleaning liquid pumped into the jet cavity during the shutdown period of the ultrasonic generator to be unable to be added to the kinetic energy of high-frequency oscillation in time. , thereby affecting the stability of the high-energy cleaning liquid flow ejected from the main body of the cleaning machine, and cannot guarantee that the ejected cleaning liquid flow can clean the surface of the semiconductor device with the same firing speed and kinetic energy, which seriously reduces the cleaning effect of the ultrasonic cleaning device and cannot realize the semiconductor device. for surface cleaning purposes.

Therefore, the existing ultrasonic cleaning devices need to be improved to overcome the above problems.

Utility model content

To sum up, the purpose of this utility model is to solve the unreasonable design of the existing ultrasonic cleaning device, and the high-frequency oscillation of the cleaning liquid level in the ejection cavity interferes with the accurate detection of the photoelectric sensor, thereby causing the ultrasonic generator to fail or be damaged or cleaned. The technology with poor effect is insufficient, but an ultrasonic cleaning device that can accurately detect the liquid level change of the cleaning liquid to realize continuous and stable operation during use is provided.

In order to solve the technical deficiencies proposed by the present utility model, the technical scheme adopted is:

An ultrasonic cleaning device with stable operation, comprising a cleaning machine body, an ultrasonic or megasonic wave generator and an operation controller, the operation controller is electrically connected with the ultrasonic wave or megasonic wave generator to control its operation; The main body of the cleaning machine is provided with a spray cavity for pumping and spraying cleaning liquid, and the spray cavity is provided with a transducer electrically connected with an ultrasonic or megasonic wave generator to drive the pump to spray The cleaning liquid in the cavity oscillates and is ejected through the ejection port of the ejection cavity; it is characterized in that a drainage part is connected to one end of the main body of the cleaning machine, and the drainage part is vertically provided with a liquid storage cavity with an upper opening, and a longitudinally connected liquid storage cavity is arranged in the drainage part. The drainage pipeline is located at the lower part of the liquid storage cavity, and the drainage pipeline is corresponding to the outer side of the end of the injection cavity and communicates with it; the diameter of the drainage pipeline is smaller than the cavity inner diameter of the liquid storage cavity, and its end communicated with the injection cavity The opening is in the shape of a bell mouth, which is used to smoothly drain the oscillating cleaning fluid in the ejection chamber into the liquid storage chamber; a photoelectric sensor electrically connected to the operation controller is vertically connected to the drainage part. One end of the sensing probe of the photoelectric sensor extends through the opening on the upper part of the liquid storage chamber, and is used to sense the liquid level change of the cleaning liquid in the liquid storage chamber and send a liquid level sensing signal to the operation controller.

Further, the upper end surface of the drainage portion is screwed and fixedly connected with an end cap portion for sealing the upper opening thereof, and a fixing screw hole for fixing the photoelectric sensor is opened in the middle position of the end cap portion. , a soft rubber sealing ring located on the periphery of the fixing screw hole is sealed and clamped between the end faces of the end cover part and the drainage part abutting against.

Further, the bottom of the liquid storage cavity is provided with a downwardly concave conical groove, and the opening communicating with the drainage pipe and the liquid storage cavity is located at the connection between the conical groove and the side wall of the liquid storage cavity.

Further, the drainage portion has an L-shaped structure, and its longitudinal end is threadedly connected to the main body of the cleaning machine, the liquid storage chamber is arranged in the vertical end portion, and the drainage pipe is arranged in the main body of the cleaning machine. inside the longitudinal ends.

Further, the spray cavity is longitudinally arranged along the length direction of the main body of the washing machine, and has a V-shaped strip cavity structure with a wide upper part and a narrow lower part, and the upper part of one side wall is longitudinally provided with an inlet for pumping cleaning liquid. The liquid port has a relatively wide upper longitudinal opening with a transducing port, and a relatively narrow lower longitudinal opening with the spray port, and the transducer is longitudinally sealed on the transducing port.

Further, one end of the injection cavity corresponding to the drainage portion is provided with an outwardly expanding overflow cavity, and the transverse cross-sectional width of the overflow cavity is larger than the transverse cross-sectional width of the V-shaped strip cavity structure of the injection cavity, One end of the overflow chamber is communicated with the injection chamber, and the other end is communicated with the drainage pipe.

Further, the spray port is longitudinally opened on the lower end surface of the main body of the washing machine.

The beneficial effects of the present utility model are:

One end of the sensing probe of the photoelectric sensor of the utility model is not directly installed in the spray cavity of the main body of the cleaning machine, but is installed in the liquid storage cavity of the drainage part at one end of the main body of the cleaning machine, and the cleaning liquid oscillating at high frequency in the spray cavity is Introduced into the liquid storage cavity through the drainage pipeline, because the diameter of the drainage pipeline itself is smaller than the cavity internal diameter of the liquid storage cavity, and the end of the drainage pipeline connected to the injection cavity has a bell-shaped structure that is closed inward, therefore, the drainage pipeline A damping hole outflow structure is formed between the jet chamber and the jet chamber. The cleaning liquid oscillating at high frequency in the jet chamber will be restricted by the closed bell-mouth structure to reduce its flow rate and oscillation frequency, so that the cleaning liquid flows into the drainage relatively smoothly in a laminar flow state. inside the pipeline. Then, the cleaning liquid enters the liquid storage cavity with a large inner diameter from the drainage pipe with a small diameter in a laminar jet state. At this time, the lateral flow rate of the cleaning liquid is very small, and the liquid level can maintain a relatively stable state, which is convenient for The photoelectric sensor continuously, stably and accurately detects the change of the liquid level of the cleaning liquid in the liquid storage chamber, which ensures that the operation controller can continuously and stably control the ultrasonic generator according to the real liquid level of the cleaning liquid during the use of the device of the utility model. The operation of the ultrasonic generator solves the problem that the ultrasonic generator is intermittently switched on and off repeatedly due to the fluctuation of the cleaning liquid level in the liquid storage chamber during the operation of the existing device, which is beneficial to reduce the failure rate of the ultrasonic generator and prevent its damage.

Moreover, the operation controller of the present utility model can accurately and instantly know the lack or absence of cleaning liquid in the injection chamber through the photoelectric sensor, and timely control the stop of the ultrasonic generator to prevent the transducer from drying out, effectively protecting the transducer and preventing it from drying out. The service life of the utility model is improved, and the power consumption of the utility model is also reduced.

In addition, the cleaning liquid level in the liquid storage chamber of the present invention has high stability and can be continuously, stably and accurately sensed by the photoelectric sensor. Therefore, the operation controller of the present invention can The liquid level sensing signal controls the continuous and stable operation of the ultrasonic generator and the transducer, thus ensuring the stability and continuity of the flow rate and kinetic energy of the cleaning liquid sprayed from the main body of the cleaning machine during the cleaning process, and the cleaning effect is better. .

Description of drawings

1 is a schematic diagram of the overall structure of the device of the present invention;

Fig. 2 is the bottom structure schematic diagram of the main body of the cleaning machine of the present utility model;

Fig. 3 is the longitudinal cross-sectional structural schematic diagram of the main body of the cleaning machine of the present invention;

Fig. 4 is the structural partial enlarged schematic diagram of the longitudinal section of the main body of the washing machine of the utility model;

Fig. 5 is the structural schematic diagram of the transverse section of the main body of the cleaning machine of the present invention;

FIG. 6 is a schematic exploded view of the structure of the main body of the cleaning machine of the present invention.

In the picture: 1. The main body of the cleaning machine, 101. The second fixing screw hole, 2. The megasonic generator, 3. The injection cavity, 31. The injection port, 32. The liquid inlet, 4. The radio frequency line, 5. The transducer , 51. Resonant sheet, 52. Piezoelectric ceramic sheet, 53. Teflon sealing ring, 6. Drainage part, 61. Liquid storage chamber, 611. Conical groove, 62. Drainage pipe, 63. End cap, 631 .First fixing screw hole, 64. Soft rubber sealing ring, 65. Connecting solenoid, 7. Photoelectric sensor, 8. Transducing cavity, 81. Pressing mechanism, 9. Liquid cloth cavity, 10. Liquid injection pipe, 11 . Overflow chamber, 12. Cover, 13. Cable plug connector, 14. Quick release connector for liquid injection pipe.

Detailed ways

The structure of the present utility model will be further described below with reference to the accompanying drawings and the preferred specific embodiments of the present utility model.

1 to 2, the utility model:

A stable operation ultrasonic cleaning device, comprising a cleaning machine main body 1, a megasonic wave generator 2 and an operation controller (not shown in the figure), and the operation controller is preferably arranged on the megasonic wave generator 2. The inside of the casing is electrically connected with the main control module of the megasonic wave generator 2 for controlling the operation of the megasonic wave generator 2 .

Specifically, as shown in FIGS. 3 to 5 , the cleaning machine main body 1 has a cuboid structure, and its interior is longitudinally provided with a spray chamber 3 for pumping and spraying cleaning liquid along its length direction. The upper part is provided with a transducer 5 that is electrically connected to the output end of the megasonic wave generator 2 through a number of radio frequency lines 4 (as shown in Figure 1 ), which is used to drive the cleaning liquid pumped into the jet chamber 3 to oscillate at a high frequency and generate vibration. The jets are ejected at a high speed through the jetting port 31 arranged at the lower part of the jetting chamber 3 and longitudinally at the lower portion of the cleaning machine main body 1 .

Specifically, as shown in FIGS. 3 and 4 , a drainage portion 6 of an L-shaped structure is screwed and fixedly connected to the lower part of the left end face of the cleaning machine main body 1 , and the drainage portion 6 of the L-shaped structure has a vertical end inside the vertical end. Towards the liquid storage chamber 61 with the upper opening, its horizontal end is longitudinally provided with a drainage pipe 62 connected to the lower part of the liquid storage chamber 61 and corresponding to the outer side of the left end of the ejection chamber 3, and the liquid storage chamber 61 flows through the drainage pipe 62. The conduit 62 communicates with the injection chamber 3 .

Specifically, the diameter of the drainage pipe 62 is smaller than the inner diameter of the cavity of the liquid storage chamber 61 , and the opening at one end of the drainage pipe 62 that communicates with the injection chamber 3 has a bell-shaped structure that is closed inward, which is used to make the injection chamber 3 in an oscillating state. The cleaning liquid is smoothly drained into the liquid storage chamber 61 .

Specifically, a photoelectric sensor 7 electrically connected to the operation controller is fixedly connected with vertical threads on the drainage portion 6, and one end of the sensing probe of the photoelectric sensor 7 extends into the upper opening of the liquid storage chamber 61 for sensing the storage liquid. Changes in the liquid level of the cleaning liquid in the cavity 61 and sends a liquid level sensing signal to the operation controller.

In actual use, first, the semiconductor cleaning liquid is pumped into the spray chamber 3 of the cleaning machine main body 1 at a pressure of 0.35Mpa, and the semiconductor cleaning liquid is preferably ID water. Then the megasonic wave generator 2 is turned on, and its operation is controlled by the operation controller to generate a high-frequency alternating current that reaches the frequency of the megasonic wave. 4 is transmitted to the transducer 5 on the upper part of the ejection chamber 3, and then uses the electrical and physical properties of the transducer 5 to convert the high-frequency alternating electrical energy into mechanical energy to drive the cleaning fluid pumped into the ejection chamber 3 to vibrate violently. After superimposing the oscillating kinetic energy of the megasonic frequency, the cleaning liquid is ejected from the injection port 31 under the main body 1 of the cleaning machine in a state of high firing rate and high kinetic energy under the action of its own pumping pressure, gravity and the driving force of the transducer 5. High-energy cleaning fluid flow to thoroughly remove contaminants from the surface of semiconductor devices.

During actual use, a part of the cleaning liquid oscillating at high frequency in the ejection chamber 3 will enter the liquid storage chamber 61 of the drainage part 6 from the left end of the ejection chamber 3 through the drainage pipe 62, and enter the liquid storage chamber 61 of the liquid storage chamber 61. The liquid level of the cleaning liquid is relatively stable, which is convenient for the photoelectric sensor 7 arranged on the drainage part 6 to detect the change of its liquid level state stably and continuously, which ensures the accuracy and stability of the liquid level detection signal sent by the photoelectric sensor 7 to the operation controller. and continuity.

After adopting the above technical scheme, the utility model has the following beneficial effects.

One end of the sensing probe of the photoelectric sensor 7 of the present invention is not directly installed in the spray chamber 3 of the main body 1 of the cleaning machine, but is installed in the liquid storage chamber 61 of the drainage part 6 at one end of the main body 1 of the cleaning machine. The high-frequency oscillating cleaning liquid is introduced into the liquid storage chamber 61 through the drainage pipe 62 , because the diameter of the drainage pipe 62 itself is smaller than the inner diameter of the liquid storage chamber 61 , and the end of the drainage pipe 62 that communicates with the injection chamber 3 is in the direction of the cavity. The inner bell-shaped structure is closed. Therefore, a damping hole outflow structure is formed between the drainage pipe 62 and the injection cavity 3, and the cleaning liquid oscillating at high frequency in the injection cavity 3 will be restricted by the closed bell-shaped structure to reduce its flow and vibration. frequency, so that the cleaning liquid flows into the drainage pipe 62 relatively smoothly in a laminar flow state. Then, the cleaning liquid enters the liquid storage chamber 61 with a large inner diameter from the drainage pipe 62 with a small diameter in a laminar jet state. At this time, the lateral flow rate of the cleaning liquid is very small, and the liquid level can maintain a relatively stable state. Therefore, it is convenient for the photoelectric sensor 7 to continuously, stably and accurately detect the change of the liquid level of the cleaning liquid in the liquid storage chamber 61, and it is ensured that the operation controller can continuously and stably control the actual liquid level of the cleaning liquid during the use of the utility model. The operation of the ultrasonic generator solves the problem of intermittent repeated switching of the ultrasonic generator due to the fluctuation of the cleaning liquid level in the liquid storage chamber 61 during the operation of the existing device, which is beneficial to reduce the failure rate of the ultrasonic generator and prevent its damaged.

Moreover, the operation controller of the present invention can accurately and instantly know the lack or absence of cleaning liquid in the injection chamber 3 through the photoelectric sensor 7, and timely control the stop of the ultrasonic generator to prevent the transducer 5 from drying out, effectively protecting the replacement The energy device 5 is improved and its service life is improved, and it is also beneficial to reduce the power consumption of the present invention.

In addition, the cleaning liquid level in the liquid storage chamber 61 of the present invention has high stability and can be continuously and stably sensed accurately by the photoelectric sensor 7. Therefore, the operation controller of the present invention can , The precise liquid level sensing signal controls the continuous and stable operation of the ultrasonic generator and the transducer 5, thereby ensuring the stability and continuity of the flow rate and kinetic energy of the cleaning liquid jetted from the main body 1 of the cleaning machine during the cleaning process. The cleaning effect is better.

As a further improvement of the technical solution for solving the technical problem proposed by the present invention, the following technical means are also included.

Further, as shown in FIG. 4 and FIG. 6 , the upper end surface of the drainage portion 6 of the present invention is fixedly connected with an end cover portion 63 for blocking the upper opening of the drainage portion 6 by means of a screw. The outer circumference of the part 6 is matched in size, and a first fixing screw hole 631 for screwing the photoelectric sensor 7 is formed through the middle position. A soft rubber sealing ring 64 on the periphery of the first fixing screw hole 631 is also sealed and clamped between the end surfaces of the end cover part 63 and the drainage part 6 abutting against.

During actual assembly, the photoelectric sensor 7 is sealed and fixedly connected in the first fixing screw hole 631 with downward thread, so that one end of the sensing probe thereof protrudes downward through the first fixing screw hole 631 . Then, the end cap 63 is threadedly connected to the upper end surface of the drainage portion 6 by screws, so as to clamp and fix the soft rubber sealing ring 64 and make one end of the sensing probe of the photoelectric sensor 7 protrude into the liquid storage chamber 61 .

The photoelectric sensor 7 of the present invention is sealed and fixedly connected to the drainage portion 6 through the end cover portion 63, which is more convenient to install and disassemble, and the fixing screw holes provided on the end cover portion 63 are conducive to adjusting the position of the sensing probe of the photoelectric sensor 7. According to the actual situation, the photoelectric sensor 7 can be conveniently rotated in or out to ensure the accuracy and reliability of detection. In addition, a soft rubber sealing ring 64 is sealed and clamped between the end cover part 63 and the drainage part 6, and the sealing effect is good.

Specifically, as shown in FIGS. 4 and 6 , one end of the drainage portion 6 extending horizontally and longitudinally of the present invention is provided with a connecting coil 65 with an external thread. Correspondingly, the lower part of the left end face of the cleaning machine main body 1 is provided with a second fixing screw hole 101 that communicates with the left end of the spray chamber 3. During actual assembly, the connecting screw 65 on the drainage part 6 is screwed and connected to the above. In the second fixing screw hole 101 of the cleaning machine, the connection between the drainage part 6 and the main body 1 of the cleaning machine is realized, and the spray chamber 3 and the liquid storage chamber 61 are communicated.

The drainage part 6 of the present invention is fixedly assembled on the main body 1 of the cleaning machine through the connecting screw 65 and the second fixing screw hole 101, and has a simple structure, convenient disassembly and assembly, and high connection reliability.

Further, as shown in FIG. 4 , the bottom of the liquid storage cavity 61 of the drainage part 6 of the present invention is provided with a downwardly concave conical groove 611 , the conical groove 611 is coaxial with the liquid storage cavity 61 , and the drainage pipe 62 The opening communicated with the liquid storage chamber 61 is located at the connection between the conical groove 611 and the side wall of the liquid storage chamber 61 .

The conical groove 611 provided at the bottom of the liquid storage chamber 61 of the present invention can further reduce the flow rate and oscillation amplitude of the cleaning liquid flowing into the liquid storage chamber 61 from the drainage pipe 62, and further ensure the cleaning liquid level in the liquid storage chamber 61. The smoothness of the photoelectric sensor 7 further improves the accuracy, stability and continuity of the liquid level detection of the photoelectric sensor 7.

Further, as shown in FIG. 1 , the main body 1 of the cleaning machine of the present invention has a rectangular parallelepiped structure, and the spray chamber 3 is longitudinally arranged on the front side of the interior along its length direction.

Specifically, as shown in FIG. 3 to FIG. 5 , the ejection cavity 3 has a V-shaped strip cavity structure with a wide upper part and a narrow lower part, and a longitudinal opening on the upper part of the rear side wall close to the transducer 5 is used for the The liquid inlet 32 for pumping cleaning liquid into the cavity has a relatively wide upper longitudinal opening for the transducer 5 to drive the cleaning liquid to vibrate (not marked in the figure), and its relatively narrow lower longitudinal opening is provided with The jetting port 31 is directly opposite to the transducer port, so that the cleaning liquid driven and oscillated by the transducer 5 can be jetted downward through the jetting port 31 with high speed and high energy.

Specifically, as shown in FIGS. 5 to 6 , in the main body 1 of the cleaning machine, there is also longitudinally provided with a transduction chamber 8 corresponding to the upper part of the injection chamber 3 and communicated with the injection chamber 3 through the transduction port. The device 5 is fixedly connected to the bottom of the transducing cavity 8 through the pressing mechanism 81 and is sealed and covered on the transducing port.

Further, as shown in FIG. 5 to FIG. 6 , the transducer 5 includes a resonant sheet 51 that is sealed and covered on the transducer port, and four piezoelectric ceramics with rectangular structures are arranged longitudinally on the upper surface of the resonant sheet 51 . The sheet 52, the four piezoelectric ceramic sheets 52 are respectively electrically connected to the output end of the megasonic wave generator 2 through a radio frequency line 4.

In actual assembly, one end of the radio frequency wire 4 that is electrically connected to the piezoelectric ceramic sheet 52 is longitudinally arranged in the transducer cavity 8 and fixed to prevent external forces from pulling the part of the radio frequency wire 4 that is exposed outside the cleaning machine body 1. The radio frequency wire 4 and the piezoelectric The ceramic sheet 52 is disconnected and separated to ensure the reliability of the connection between the radio frequency line 4 and the piezoelectric ceramic sheet 52 .

Preferably, the resonance sheet 51 is made of titanium alloy material, so that the resonance sheet 51 has high structural strength and rigidity, and can effectively transmit the mechanical energy of the piezoelectric ceramic sheet 52 . In addition, the titanium alloy material itself is resistant to acid and alkali, corrosion resistance, and has a good hydroelectric isolation effect. It is used to block the transducer port to ensure the service life of the transducer 5 and has higher reliability.

In actual use, the piezoelectric ceramic sheet 52 receives the high-frequency alternating current generated by the megasonic wave generator 2 through the radio frequency line 4, and uses its own electrical and physical characteristics to convert the high-frequency alternating electrical energy into mechanical energy to drive the resonant sheet 51. It vibrates at high frequency and high speed, and then the cleaning liquid pumped in the injection chamber 3 is driven to vibrate at a high frequency through the vibration of the resonant sheet 51 to energize it.

Specifically, as shown in FIG. 5 to FIG. 6 , the width of the piezoelectric ceramic sheet 52 is smaller than the width of the resonant sheet 51 , and a Teflon on the periphery of the transducer port is provided between the bottom edge of the resonator sheet 51 and the bottom surface of the transducer cavity 8 The sealing ring 53, during the actual assembly, the pressing mechanism 81 is locked down and fixedly connected in the transducer cavity 8 by the fastener to press the resonant sheet 51 against the transducer port, and at the same time, the piezoelectric ceramic sheet 52 is limited and fastened. on the resonator plate 51 . After the pressing mechanism 81 is fixed, the bottom edge of the resonant sheet 51 abuts against the Teflon sealing ring 53 , so that the transducer chamber 8 and the injection chamber 3 are hermetically isolated by the resonance sheet 51 and the Teflon sealing ring 53 .

The utility model selects the piezoelectric ceramic sheet 52 as the piezoelectric component for the conversion of electrical energy and mechanical energy, which has high sensitivity, good frequency stability, wide application range, small size, no moisture absorption, strong anti-interference ability, and long service life. , which ensures the stability and reliability of the transducer 5 .

At the same time, the Teflon sealing ring 53 and the resonant sheet 51 made of titanium alloy are sealed and isolated between the transducer cavity 8 and the injection cavity 3. The Teflon material itself has poor ability to absorb sound waves, which effectively reduces the transducer 5 The loss of mechanical energy is conducive to improving the efficiency of the transducer 5 to drive the cleaning fluid to vibrate, and the titanium alloy material itself has high strength, good rigidity, good chemical stability, anti-corrosion and wear resistance, which ensures the efficiency of the mechanical energy transfer of the resonator plate 51. Reliability, high resistance to chemically corrosive substances in the cleaning solution, and improved reliability and service life of the transducer 5 .

Further, as shown in FIG. 5 , the cleaning machine main body 1 is also longitudinally provided with a liquid distribution chamber 9 corresponding to the upper part of the rear side of the spray chamber 3 and communicated with the spray chamber 3 through the liquid inlet 32 , The liquid distribution cavity 9 has a structure similar to an inverted V-shaped strip cavity with a wide rear side and a narrow front side. The upper part of the wider cavity on the rear side of the liquid distribution cavity 9 is longitudinally arranged and connected with four vertically arranged on the main body 1 of the washing machine. The liquid injection pipes 10 above are used to pump semiconductor cleaning liquid into the liquid distribution chamber 9 through the four liquid injection pipes 10 in actual use. One end of the cavity on the front side of the liquid distribution chamber 9 that is gradually tightened and narrowed has an arc-shaped upward throwing structure, and the opening on the front side communicating with the spray chamber 3 constitutes the liquid inlet 32 .

In actual use, the cavity structure of the liquid distribution cavity 9 can evenly spread the cleaning liquid pumped down from the four points at the same time, and introduce the cleaning liquid into the cavity with an arc-shaped upward throwing structure on the front side at a high speed. , and then use its arc-shaped upward throwing structure to project the cleaning liquid through the liquid inlet 32 to the bottom of the transducer 5 on the transducer port at high speed, so that the transducer 5 can drive the cleaning liquid to oscillate at high frequency.

The injection cavity 3 of the present invention is designed as a V-shaped strip cavity structure with a wide upper part and a narrow lower part, and the transducer 5 is sealed on the upper part of the transduction port. In actual use, it is pumped into the transduction port at a high speed through the liquid inlet 32. The cleaning liquid at the place is driven and energized by the piezoelectric ceramic sheet 52 and the resonant sheet 51 of the transducer 5 and vibrates violently, and is pumped down to the pump under the action of the pumping pressure of the cleaning liquid itself, the driving force of the transducer 5 and the gravity. The lower part of the spray chamber 3 is gradually narrowed, so that the cavity structure design of the spray chamber 3 is used to guide the cleaning liquid to accelerate from the spray port 31 to the outside of the cleaning machine body 1 in a high-frequency oscillation state, thereby forming a high-speed, high-energy Cleaning liquid flow, good cleaning effect.

Further, as shown in FIG. 4 and FIG. 6 , the left end of the ejection chamber 3 of the main body 1 of the cleaning machine 1 corresponding to the drainage portion 6 is further provided with an outwardly expanded overflow chamber 11 , and the overflow chamber 11 is a cylindrical chamber. The width of the transverse section is larger than that of the 3V-shaped strip cavity structure of the injection cavity. The holes 101 communicate with each other, so that the overflow chamber 11 is communicated with the liquid storage chamber 61 through the drainage pipe 62 .

The width of the transverse section of the overflow cavity 11 provided in the main body 1 of the cleaning machine of the present invention is larger than the width of the transverse section of the injection cavity 3 . The cleaning liquid will flow into the overflow chamber 11 in a jet state, and in the jet state, the lateral flow rate of the cleaning liquid is small and the longitudinal flow rate is faster. flow or mixed turbulent flow, so that the oscillations generated in some directions of the cleaning liquid can mutually restrain and cancel each other, which is beneficial to reduce the oscillation frequency of the cleaning liquid, and is beneficial for the drainage pipe 62 to further buffer the cleaning liquid entering through the overflow cavity 11, thereby The oscillation degree of the cleaning liquid is further slowed down, so that the liquid level of the cleaning liquid flowing into the liquid storage chamber 61 is more stable.

Specifically, as shown in FIGS. 1 and 6 , a cover 12 for closing the upper opening of the transducer cavity 8 is also screwed and fixedly connected to the front side of the upper end of the main body 1 of the cleaning machine. Four cable plug connectors 13 corresponding to the top of the four piezoelectric ceramic sheets 52 are arranged in an arrangement. In actual assembly, the front ends of the four radio frequency wires 4 respectively extend from the four cable plug connectors 13 into the transducer cavity 8 And it is locked and fixed by the cable plug connector 13 .

The utility model isolates the transducer chamber 8 from the outside air of the main body 1 of the cleaning machine through the cover 12, which plays the role of isolating the air and protecting the transducer 5, which is beneficial to avoid or slow down the corrosion of the transducer 5 by the external atmosphere and Oxidation is beneficial to improve the reliability and service life of the transducer 5 . In addition, the cable plug connector 13 can effectively lock and fix the end of the radio frequency wire 4 to prevent the radio frequency wire 4 from being disconnected and separated from the piezoelectric ceramic sheet 52 when being pulled by external force, and the reliability is higher.

Specifically, as shown in FIG. 1 , FIG. 5 and FIG. 6 , on the rear side of the upper end face of the cleaning machine main body 1 there are also four liquid injection pipes that are respectively screwed and connected to the upper openings of the four liquid injection pipes 10 . Quick release connector 14. In actual use, the cleaning liquid pumping device (not shown in the figure) is connected to the four liquid injection pipes 10 through four liquid injection pipes (not shown in the figure), and is used to pump the cleaning liquid into the cloth liquid chamber 9 Inside.

The above-mentioned embodiment is only to illustrate a specific embodiment of the present invention, and is not intended to limit the embodiment of the present invention. For those skilled in the art, according to the present utility model, it can be deduced and summed up that other cleaning machine main body 1, megasonic wave generator 2, operation controller, injection chamber 3, transducer 5, drainage part 6, liquid storage chamber 61. The adjustment or modification of the drainage pipe 62, the photoelectric sensor 7, etc., or some other usage methods derived and summarized on the basis of the present invention will not be listed here. Any modification, replacement or improvement made according to the spirit and principle of the present utility model shall be included in the protection scope of the claims of the present utility model.

Claims (7)

1. An ultrasonic cleaning device with stable operation, comprising a cleaning machine main body (1), an ultrasonic or megasonic wave generator and an operation controller, and the operation controller is electrically connected to the ultrasonic wave or megasonic wave generator In order to control its operation; the cleaning machine main body (1) is provided with a jet cavity (3) for pumping and ejecting cleaning liquid, and the jet cavity (3) is provided with an ultrasonic or megasonic generator. An electrically connected transducer (5) is used to drive the cleaning liquid pumped into the spray chamber (3) to oscillate and spray out through the spray port (31) of the spray chamber (3); it is characterized in that the cleaning machine main body ( One end of 1) is connected with a drainage portion (6), the drainage portion (6) is vertically provided with a liquid storage cavity (61) with an upper opening, and longitudinally there is a liquid storage cavity (61) connected to the lower part of the liquid storage cavity (61). Drainage pipeline (62), said drainage pipeline (62) is corresponding to the outer side of the end of jet cavity (3) and communicates with it; the diameter of drainage pipeline (62) is smaller than the cavity inner diameter of liquid storage cavity (61), The opening at one end that communicates with the ejection chamber (3) is in the shape of a bell mouth closed inward, and is used to smoothly drain the cleaning liquid in the oscillating state in the ejection chamber (3) into the liquid storage chamber (61); the drainage part (6) A photoelectric sensor (7) electrically connected to the operation controller is vertically connected to the top, and one end of the sensing probe of the photoelectric sensor (7) extends into the upper opening of the liquid storage chamber (61) for sensing Changes in the liquid level of the cleaning liquid in the liquid storage chamber (61) and sends a liquid level sensing signal to the operation controller. 2. A stable operation ultrasonic cleaning device according to claim 1, characterized in that, an end cover (63) for sealing the upper opening of the drainage portion (6) is screwed and fixedly connected to the upper end surface of the drainage portion (6). ), the middle position of the end cover part (63) is provided with a fixing screw hole for fixedly inserting the photoelectric sensor (7). A soft rubber sealing ring (64) on the periphery of the fixing screw hole is sealed and clamped. 3. The ultrasonic cleaning device with stable operation according to claim 1, characterized in that, the bottom of the liquid storage cavity (61) is provided with a downwardly concave conical groove (611), and the drainage pipe (611) 62) The opening communicating with the liquid storage chamber (61) is located at the connection between the conical groove (611) and the side wall of the liquid storage chamber (61). 4. A stable operation ultrasonic cleaning device according to claim 1, characterized in that, the drainage portion (6) is of an L-shaped structure, and one longitudinal end thereof is threadedly connected to the cleaning machine main body (1). ), the liquid storage chamber (61) is arranged in its vertical end, and the drainage pipe (62) is arranged in its longitudinal end. 5 . The ultrasonic cleaning device with stable operation according to claim 1 , wherein the spray chamber ( 3 ) is longitudinally arranged along the length direction of the cleaning machine main body ( 1 ), and is wide at the top and narrow at the bottom. 6 . The V-shaped strip cavity structure, the upper part of one side wall is longitudinally provided with a liquid inlet (32) for pumping cleaning liquid, the relatively wide upper part is longitudinally provided with a transduction port, and its relatively narrow lower part is provided with a transduction port. The ejection port (31) is longitudinally opened, and the transducer (5) is longitudinally sealed and covered on the transducer port. 6 . The ultrasonic cleaning device with stable operation according to claim 5 , wherein the spray chamber ( 3 ) is provided with an outward-expanded overflow chamber at one end corresponding to the drainage portion ( 6 ). 7 . (11), the transverse cross-sectional width of the overflow cavity (11) is larger than the transverse cross-sectional width of the V-shaped strip cavity structure of the injection cavity (3), one end of the overflow cavity (11) is communicated with the injection cavity (3), and the other is connected to the injection cavity (3). One end is communicated with the drainage pipe (62). 7 . The ultrasonic cleaning device with stable operation according to claim 5 , wherein the jetting port ( 31 ) is longitudinally opened on the lower end surface of the cleaning machine main body ( 1 ). 8 .

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