CN215685930U - Nitrogen cabinet and wafer management system - Google Patents
Nitrogen cabinet and wafer management system Download PDFInfo
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- CN215685930U CN215685930U CN202121786047.7U CN202121786047U CN215685930U CN 215685930 U CN215685930 U CN 215685930U CN 202121786047 U CN202121786047 U CN 202121786047U CN 215685930 U CN215685930 U CN 215685930U
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Abstract
The application discloses a nitrogen cabinet and a wafer management system, wherein the nitrogen cabinet comprises a cabinet body and a main control module arranged in the cabinet body, the cabinet body comprises a plurality of material storage layers, each material storage layer comprises at least one material storage area, each material storage area is provided with a radio frequency identification module, and each radio frequency identification module is connected with the main control module; each radio frequency identification module is used for reading information in the material electronic tag and sending the information to the main control module; the main control module is used for receiving information in the material electronic tags, comparing the information in the electronic tags with prestored material information, determining state information of the materials, and responding to a first operation instruction sent by the upper computer to control opening or closing of a cabinet door of the nitrogen cabinet. This application can read the information in the material electronic tags automatically, need not artifical manual operation, can automatic control open or close the cabinet door of nitrogen gas cabinet, has reduced a large amount of costs of labor, has realized the digital processing to materials such as wafer.
Description
Technical Field
The utility model relates to the technical field of semiconductor testing, in particular to a nitrogen cabinet and a wafer management system.
Background
With the rapid development of the semiconductor industry, the demand of chips is also gradually increasing. In order to avoid that the chip is not oxidized in the packaging process and prevent static electricity from damaging the chip, the research on the storage position and the temperature and humidity of materials such as wafers and the like is very critical. Wherein, the wafer can be stored in a grounded nitrogen environment with a specific temperature and humidity.
At present, can adopt conventional model nitrogen cabinet to preserve the wafer, manually open or close the nitrogen cabinet door by the operator when the test and realize manual material loading or unloading, however, this conventional model nitrogen cabinet needs artifical manual operation, extravagant a large amount of artificial time cost, can't realize the digital management of storage wafer moreover.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned shortcomings or drawbacks of the prior art, it is desirable to provide a nitrogen cabinet and a wafer management system.
In a first aspect, the nitrogen cabinet provided by the embodiment of the application comprises a cabinet body and a main control module arranged inside the cabinet body, wherein the cabinet body comprises a plurality of material storage layers, each material storage layer comprises at least one material storage area, each material storage area is provided with a radio frequency identification module, and each radio frequency identification module is connected with the main control module;
each radio frequency identification module is used for reading information in the material electronic tag and sending the information to the main control module;
the main control module is used for receiving the information in the material electronic tag, comparing the information in the electronic tag with prestored material information, determining the state information of the material, and responding to a first operation instruction sent by an upper computer to control the opening or closing of the cabinet door of the nitrogen cabinet.
In another embodiment of this application, the internal portion of cabinet is provided with temperature and humidity sensor, temperature and humidity sensor with host system connects, temperature and humidity sensor is used for detecting the inside temperature information and the humidity information of nitrogen gas cabinet send to host system.
In another embodiment of the present application, the main control module is further configured to control to supplement nitrogen gas into the nitrogen gas cabinet according to the temperature information and the humidity information of the nitrogen gas cabinet when detecting that the cabinet door of the nitrogen gas cabinet is in a closed state; and the nitrogen gas supplementing device is used for controlling to stop supplementing nitrogen gas into the nitrogen gas cabinet when the cabinet door of the nitrogen gas cabinet is detected to be in an open state.
In another embodiment of the present application, the main control module is further configured to generate a first control signal when detecting that the temperature information in the nitrogen gas cabinet is not within a preset temperature threshold range or when detecting that the humidity information in the nitrogen gas cabinet is not within a preset humidity threshold range.
In another embodiment of the present application, the main control module is further configured to generate a second control signal when detecting that the temperature and humidity sensor is abnormal.
In another embodiment of this application, the internal portion of cabinet still is provided with alarm module, alarm module with host system connects, alarm module is used for receiving the first control signal that host system sent, responds to first control signal is in order to produce first warning suggestion, and is used for receiving the second control signal that host system sent, respond to the second control signal is in order to produce second warning suggestion.
In another embodiment of the application, each material storage area is further provided with a photoelectric sensor, and the photoelectric sensors are used for detecting whether materials exist in the material storage areas or not.
In another embodiment of this application, still be provided with display module on the cabinet body, display module is used for showing temperature information, humidity information in the nitrogen cabinet or the status information of material.
In a second aspect, the present application provides a wafer management system, which includes the nitrogen cabinet, an upper computer and a robot as described in the second aspect, wherein the upper computer is connected to the nitrogen cabinet and the robot respectively;
the upper computer is used for generating a first operation instruction and sending the first operation instruction to the nitrogen gas cabinet when detecting that the robot arrives or leaves the carrying position, and is used for generating a second operation instruction according to the state information of the materials and sending the second operation instruction to the robot;
the robot is used for receiving and responding to a second operation instruction sent by the upper computer and arriving or leaving the conveying position.
In another embodiment of this application, the host computer still is used for when nitrogen cabinet's cabinet door is in the open mode, generates third control instruction and sends to the robot, in order to control the robot is followed get in the nitrogen cabinet and put the material.
To sum up, the nitrogen cabinet and wafer management system that this application embodiment provided, this nitrogen cabinet includes the cabinet body and sets up the host system at the internal portion of cabinet, this cabinet body includes that a plurality of materials deposit the layer, every material is deposited the layer and is included at least one material and deposit the region, every material is deposited the region and is provided with the radio frequency identification module, every radio frequency identification module is connected with host system, every radio frequency identification module is used for reading the interior information of material electronic tags and sends to host system, host system is used for receiving the interior information of material electronic tags, compare the information in the electronic tags with the material information that prestores, confirm the state information of material, and be used for responding to the first operating command that the host computer sent, with the cabinet door of control opening or closing nitrogen cabinet. This nitrogen gas cabinet deposits the region through every material in the layer at every material and sets up the radio frequency identification module, can read the information in the material electronic tags automatically, need not artifical manual operation, can automatic control open or close the cabinet door of nitrogen gas cabinet, has reduced a large amount of costs of labor, has realized the digital processing to materials such as wafer.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
fig. 1 is a schematic structural diagram of a nitrogen gas cabinet provided in an embodiment of the present application;
FIG. 2 is a schematic diagram of an overall structure of a nitrogen gas holder provided in an embodiment of the present application;
fig. 3 is a schematic internal structural diagram of a material storage layer according to an embodiment of the present disclosure;
FIG. 4 is a diagram illustrating an interface of a display screen provided in an embodiment of the present application;
FIG. 5 is a schematic front view of a nitrogen cabinet provided in an embodiment of the present application;
FIG. 6 is a schematic side view of a nitrogen cabinet according to an embodiment of the present disclosure;
fig. 7 is a schematic structural diagram of a wafer management system according to an embodiment of the present disclosure.
Description of reference numerals:
the system comprises a nitrogen cabinet, a host computer, a robot, a cabinet body 10, a material storage layer 11, a material storage area 12, a main control module 20, a radio frequency identification module 30, a temperature and humidity sensor 40, an alarm module 50, a photoelectric sensor 60, a display module 70, a power module 80, an indicator lamp 100, an EMO key 101, a main power switch 102, a nitrogen gas access pipeline 103, a nitrogen gas access valve 104, an IPC105, an IPC 106 main control panel 107, a sub-control panel and a driving motor 108.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not to be construed as limiting the utility model. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
It is understood that a wafer refers to a silicon wafer used in the fabrication of silicon semiconductor circuits, and that a silicon ingot is ground, polished, and sliced to form a silicon wafer. During the rapid development of the semiconductor industry, it is necessary to keep the wafers in a nitrogen atmosphere at a specific temperature and humidity and at ground. At present, can adopt conventional model nitrogen cabinet to preserve the wafer, open or close the nitrogen cabinet by the operator is manual when the test and realize manual material loading or unloading, however, this conventional model nitrogen cabinet needs artifical manual operation, extravagant a large amount of artificial time costs, can't realize the digital management of storage wafer moreover.
Based on above-mentioned defect, the nitrogen cabinet and wafer management system that this application provided, deposit the region through every material in every material deposit layer and set up the radio frequency identification module, can read the information in the electronic tags automatically, need not artifical manual operation, can automatic control open or close nitrogen cabinet door, reduced a large amount of cost of labor, realized the digital processing to materials such as wafer.
The nitrogen cabinet provided by the embodiment can be applied to the technical fields of microelectronics, semiconductors and the like, can realize the functions of moisture resistance and oxidation resistance by using nitrogen, has a nitrogen feeding and exhausting passage, and is one of equipment in the industries of industry, national defense, microelectronics and semiconductors. The nitrogen-containing gas storage tank is mainly used for storing optical parts, semiconductor components, precision machinery, parts and elements which are inconvenient to refrigerate, and harmful substances such as oxygen, water vapor, carbon dioxide, dust and the like are isolated by flowing nitrogen.
For convenience of understanding and explanation, the nitrogen gas cabinet and the wafer management system provided by the embodiment of the present application are explained in detail below by using fig. 1 to 7.
Fig. 1 is a schematic structural diagram of a nitrogen cabinet provided in an embodiment of the present application, and as shown in fig. 1, the nitrogen cabinet includes: the cabinet body 10 and the main control module 20 arranged inside the cabinet body 10, the cabinet body 10 comprises a plurality of material storage layers 11, each material storage layer 11 comprises at least one material storage area 12, each material storage area 12 is provided with a radio frequency identification module 30, and each radio frequency identification module 30 is connected with the main control module 20. Each rfid module 30 is used for reading information in the electronic tag of the material and sending the information to the main control module 20.
In this embodiment, the cabinet body 10 of the nitrogen cabinet may have a square structure or a circular structure, and may be any structure capable of storing materials such as wafers, the cabinet body may be made of stainless steel, metal or acrylic material, and the acrylic material has good transparency, chemical stability and weather resistance.
Referring to fig. 2 and 3, the cabinet may include a plurality of material storage layers 11, fig. 2 is a schematic diagram of an internal structure of a single material storage layer, each material storage layer 11 may be the same or different in size, each material storage layer 11 includes at least one material storage area 12, and each material storage area 12 may be the same or different in size.
In order to acquire the information of the materials stored in the cabinet body in real time, the radio frequency identification module 30 is arranged in each material storage area, and when the materials need to be stored in the nitrogen cabinet, the radio frequency identification module 30 can be used for reading the information in the material electronic tags and sending the information to the main control module 20. The RFID module 30 may be an RFID module, and may use a non-contact automatic identification technology to automatically identify the material through the radio frequency signal to obtain the related information of the material, so as to automatically detect the related information of the material, where the related information may be information of the type and state of the material.
The main control module 20 is configured to receive information in the electronic tag of the material, compare the information in the electronic tag with prestored material information, and determine state information of the material. The state information of the material may be, for example, a state of a measured material, a state of an unmeasured material, a state of an abnormal material, or the like. It should be noted that the pre-stored material information may be information pre-stored in the MES manufacturing execution system.
Wherein, the nitrogen cabinet passes through wireless communication's mode with the host computer and establishes being connected, and the host computer can send first operating command to the nitrogen cabinet for the main control module 20 of nitrogen cabinet responds to this first operating command, with the control cabinet door of opening or closing the nitrogen cabinet.
Optionally, please continue to refer to fig. 1, a temperature and humidity sensor 40 is further disposed inside the cabinet, the temperature and humidity sensor 40 is connected to the main control module 20, and the temperature and humidity sensor 40 is configured to detect temperature information and humidity information inside the nitrogen cabinet and send the temperature information and humidity information to the main control module 20.
The temperature and humidity sensors may be uniformly distributed at a plurality of positions inside the cabinet, for example, may be distributed at three positions inside the cabinet, and then three corresponding temperature information and humidity information are detected and obtained, and the average value of the temperature information and the average value of the humidity information are obtained by performing weighted summation on the three temperature information and humidity information, so that the average value of the temperature information and the average value of the humidity information are used as the temperature information and the humidity information of the nitrogen gas cabinet.
In this embodiment, through being provided with temperature and humidity sensor in cabinet internal portion, can acquire the temperature information and the humidity information of nitrogen cabinet in real time, realize the record and the control to the humiture, and then realize the digital management to materials such as storage wafer.
The main control module 20 is further configured to control to supplement nitrogen gas into the nitrogen gas cabinet according to temperature information and humidity information of the nitrogen gas cabinet when detecting that the cabinet door of the nitrogen gas cabinet is in a closed state, and the main control module 20 is further configured to control to stop supplementing nitrogen gas into the nitrogen gas cabinet when detecting that the cabinet door of the nitrogen gas cabinet is in an open state.
Wherein, according to the temperature information and the humidity information of nitrogen gas cabinet, the in-process of control supplementing nitrogen gas in the nitrogen gas cabinet can be when the cabinet door of nitrogen gas cabinet is in the closed condition, and when the temperature information and the humidity information of nitrogen gas cabinet reached the nitrogen gas and supplyed the condition, main control module control flowed in the pipeline through nitrogen gas and supplyed nitrogen gas in to the nitrogen gas cabinet.
According to the embodiment, the nitrogen is automatically controlled to be supplemented into the nitrogen cabinet according to the opening or closing state information of the cabinet door of the nitrogen cabinet, so that the control of the nitrogen amount in the nitrogen cabinet is realized, and the better storage of materials such as wafers is ensured.
Further, the main control module 20 is further configured to generate a first control signal when detecting that the temperature information in the nitrogen gas cabinet is not within the preset temperature threshold range or when detecting that the humidity information in the nitrogen gas cabinet is not within the preset humidity threshold range, and send the first control signal to the alarm module, where the first control signal is used to indicate that the temperature information or the humidity information in the nitrogen gas cabinet is abnormal. The first control signal generated when the temperature information is abnormal can be different from the first control signal generated when the humidity information is abnormal, so that the temperature information and the humidity information in the nitrogen cabinet can be conveniently controlled.
Further, the main control module 20 is further configured to generate a second control signal when detecting that the temperature and humidity sensor is abnormal, and send the second control signal to the alarm module, where the second control signal is used to indicate that the temperature and humidity sensor in the nitrogen gas cabinet is abnormal.
The alarm module 50 is further disposed inside the cabinet 10, the alarm module 50 is connected to the main control module 20, and the alarm module 50 is configured to receive a first control signal sent by the main control module 20, generate a first alarm prompt in response to the first control signal, receive a second control signal sent by the main control module, and generate a second alarm prompt in response to the second control signal.
It should be noted that the first alarm prompt and the second alarm prompt may be different from each other, so as to distinguish the reason of the abnormality, and facilitate timely handling of the abnormality.
Optionally, the alarm prompt may be a sound alarm prompt, an indicator light alarm prompt, or a display screen alarm prompt.
As an implementation manner, please refer to fig. 5, it may be that the indication lamp 100 is disposed on the exterior of the cabinet, the number of the indication lamps 100 may be multiple, and the indication lamps may be linearly arranged on the exterior of the cabinet, and the indication lamps may be connected to the main control module through a digital circuit board to ensure that the control signals sent from the main control module are received. Illustratively, the main control module generates a first control signal when detecting that the temperature information in the nitrogen gas cabinet is not within the preset temperature threshold range or when detecting that the humidity information in the nitrogen gas cabinet is not within the preset humidity threshold range, and sends the first control signal to the indicator lamp, so that the indicator lamp receives and responds to the first control signal to control the number of the indicator lamp which is lighted. When the temperature information in the nitrogen gas cabinet is detected not to be in the preset temperature threshold range, controlling to light two indicator lamps; and when detecting that the humidity information in the nitrogen cabinet is not in the preset humidity threshold range, controlling to light three indicator lamps.
As another implementation manner, a buzzer is arranged on the digital circuit board inside the cabinet body, the buzzer is coupled with the digital circuit board, the buzzer is used for generating an audible alarm prompt in response to the second control signal sent by the main control module, and the audible alarm prompt is used for indicating that the temperature and humidity sensor is abnormal. Optionally, the buzzer may be a piezoelectric buzzer or an electromagnetic buzzer, and mainly comprises an oscillator, an electromagnetic coil, a magnet, a vibrating diaphragm, a housing, and the like. Illustratively, when detecting that the temperature and humidity sensor is abnormal, the main control module generates a second control signal and sends the second control signal to the buzzer, and the buzzer generates an audible alarm prompt in response to the second control signal, so that the user is prompted that the temperature and humidity sensor is abnormal through the audible alarm.
Further, each material storage area in the nitrogen gas tank is also provided with a photoelectric sensor 60, which can convert the measured change into a change of an optical signal based on a photoelectric effect, and then further convert a non-electrical signal into an electrical signal by means of a photoelectric element, so as to detect whether the material storage area has the material.
The cabinet body is further provided with a display module 70, and the display module 70 is used for displaying temperature information, humidity information or material state information in the nitrogen cabinet. This display module can be provided with the touch-control screen that every material deposited the layer and correspond in cabinet body outside, a temperature information for showing the material that every material deposited the regional deposit of every material in every material deposits the layer, the status information of humidity information or material, the status information of this material includes that the material is not surveyed, has been surveyed, unusual etc., its interface display picture can refer to shown in figure 4, the cabinet number including the nitrogen cabinet on this interface display picture, user login account number and password, the temperature information of nitrogen cabinet, humidity information and nitrogen gas volume, every material is deposited the layer and is corresponded and have a plurality of materials and deposit the region, wherein, material is deposited the region and is grey and represents this region and deposit the material, be white and represent this region and not deposit the material, for example, 4 # and 7 number region deposit the material. The user can input a login account and a corresponding password on the touch interface, so that the digital management is carried out on the materials in the nitrogen cabinet in real time.
Optionally, as shown in fig. 5, an EMO key 101 may be disposed outside the nitrogen cabinet, where the EMO key 101 is an emergency stop switch in the industry standard, that is, an emergency stop and power off button. A main power switch 102 may also be disposed outside the nitrogen gas cabinet, and the main power switch 102 is used to control the power off and supply of the nitrogen gas cabinet.
Further, referring to fig. 6, fig. 6 is a structural diagram of a circuit control system inside the nitrogen cabinet, the nitrogen cabinet is further provided with a nitrogen inflow pipeline 103 and a nitrogen inflow valve 104, when the main control module detects that the cabinet door of the nitrogen cabinet is in a closed state, the nitrogen inflow valve 104 is controlled to be opened according to temperature information and humidity information of the nitrogen cabinet, and nitrogen is supplemented into the nitrogen cabinet through the nitrogen inflow pipeline 103. The nitrogen cabinet can also comprise a main control board 106 and a sub-control board 107, wherein the main control board is used for issuing or receiving instructions to each sub-control board, the sub-control boards store RFID and Raeder indicator lamp control boards of each layer corresponding to each material storage layer, a driving motor 108 of each layer is arranged, and the nitrogen cabinet is powered by an industrial personal computer IPC105 and the driving motor 108 to work.
In this embodiment, the nitrogen cabinet further includes a power module 80 for supplying power to each module in the nitrogen cabinet, wherein the power module may be connected to the digital circuit board through a power interface, and the power interface may be an embedded power interface or a high-definition multimedia interface.
The nitrogen cabinet that this embodiment provided, including the cabinet body and the host system of setting in the internal portion of cabinet, this cabinet body includes that a plurality of materials deposit the layer, every material is deposited the layer and is included that at least one material deposits the region, every material is deposited the region and is provided with the radio frequency identification module, every radio frequency identification module is connected with host system, every radio frequency identification module is used for reading the interior information of material electronic tags and sends to host system, host system is used for receiving the interior information of material electronic tags, compare the interior information of electronic tags with the material information that prestores, confirm the state information of material, and be used for responding to the first operating instruction that the host computer sent, with the cabinet door of control opening or closing nitrogen cabinet. This nitrogen gas cabinet deposits the region through every material in the layer at every material and sets up the radio frequency identification module, can read the information in the material electronic tags automatically, need not artifical manual operation, can automatic control open or close the cabinet door of nitrogen gas cabinet, has reduced a large amount of costs of labor, has realized the digital processing to materials such as wafer.
On the other hand, the present application further provides a wafer management system, please refer to fig. 7, which includes the nitrogen cabinet 1, the upper computer 2 and the robot 3, where the upper computer 2 is connected to the nitrogen cabinet 1 and the robot 3, respectively.
The upper computer 2 is used for generating a first operation instruction and sending the first operation instruction to the nitrogen gas cabinet 1 when detecting that the robot 3 arrives or leaves the carrying position, and is used for generating a second operation instruction and sending the second operation instruction to the robot 3 according to the state information of the material. The robot 3 is used for receiving a second operation instruction sent by the upper computer 2 and arriving or leaving a carrying position.
Optionally, the upper computer, the robot and the nitrogen cabinet can be in wireless connection. The robot can comprise a mechanical arm and a travelling wheel, wherein the mechanical arm is used for taking and placing materials from the nitrogen cabinet, and the travelling wheel is used for reaching or leaving a carrying position through movement.
The upper computer 2 is also used for generating a third control instruction and sending the third control instruction to the robot 3 when the cabinet door of the nitrogen cabinet 1 is in an open state so as to control the robot 3 to take and place materials from the nitrogen cabinet 1.
When a photoelectric sensor in the nitrogen cabinet detects that a material storage area is empty, sending state information of the material to a main control module, wherein the state information of the material can comprise a material storage area identifier, the main control module sends the state information of the material to an upper computer, the upper computer generates a second operation instruction according to the state information of the material and sends the second operation instruction to a robot, the robot receives and responds to the second operation instruction sent by the upper computer and arrives at a carrying position, when the upper computer detects that the robot arrives at the carrying position, the upper computer generates a first operation instruction and sends the first operation instruction to the nitrogen cabinet, the nitrogen cabinet receives and responds to the first operation instruction to control opening of a cabinet door of the nitrogen cabinet, when the cabinet door of the nitrogen cabinet is in an open state, a third control instruction is generated according to the material storage area identifier and sent to the robot, and the robot is controlled to store the material into the material storage area corresponding to the material storage area identifier of the nitrogen cabinet, thereby realizing the operation of storing materials in the nitrogen gas cabinet.
After the host computer detects that the material is deposited, send first operating command to the nitrogen cabinet to make the nitrogen cabinet respond to this first operating command, the control closes the cabinet door of nitrogen cabinet, and send second operating command to the robot, so that the robot responds to this second operating command, leaves the handling position.
The wafer management system that provides in this embodiment can be according to opening and closing of instruction control nitrogen gas cabinet door that the host computer sent through being provided with host computer and robot to the action of automatic getting of putting the material is accomplished to automatic cooperation robot, and the automated processing of commodity circulation about realizing has saved the manpower, has improved material handling efficiency.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be understood by those skilled in the art that the scope of the present invention is not limited to the specific combination of the above-mentioned features, but also covers other embodiments formed by any combination of the above-mentioned features or their equivalents without departing from the spirit of the present invention. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (10)
1. A nitrogen cabinet is characterized by comprising a cabinet body and a main control module arranged in the cabinet body, wherein the cabinet body comprises a plurality of material storage layers, each material storage layer comprises at least one material storage area, each material storage area is provided with a radio frequency identification module, and each radio frequency identification module is connected with the main control module;
each radio frequency identification module is used for reading information in the material electronic tag and sending the information to the main control module;
the main control module is used for receiving the information in the material electronic tag, comparing the information in the electronic tag with prestored material information, determining the state information of the material, and responding to a first operation instruction sent by an upper computer to control the opening or closing of the cabinet door of the nitrogen cabinet.
2. The nitrogen cabinet according to claim 1, wherein a temperature and humidity sensor is arranged inside the cabinet body and connected with the main control module, and the temperature and humidity sensor is used for detecting temperature information and humidity information inside the nitrogen cabinet and sending the temperature information and humidity information to the main control module.
3. The nitrogen cabinet according to claim 2, wherein the main control module is further configured to control nitrogen gas to be supplemented into the nitrogen cabinet according to temperature information and humidity information of the nitrogen cabinet when detecting that a cabinet door of the nitrogen cabinet is in a closed state; and the nitrogen gas supplementing device is used for controlling to stop supplementing nitrogen gas into the nitrogen gas cabinet when the cabinet door of the nitrogen gas cabinet is detected to be in an open state.
4. The nitrogen cabinet of claim 2, wherein the main control module is further configured to generate the first control signal when detecting that the temperature information in the nitrogen cabinet is not within a preset temperature threshold range or when detecting that the humidity information in the nitrogen cabinet is not within a preset humidity threshold range.
5. The nitrogen cabinet of claim 2, wherein the main control module is further configured to generate a second control signal when detecting that the temperature and humidity sensor is abnormal.
6. The nitrogen cabinet as claimed in claim 4, wherein an alarm module is further disposed inside the cabinet body, the alarm module is connected to the main control module, and the alarm module is configured to receive a first control signal sent by the main control module, generate a first alarm prompt in response to the first control signal, and receive a second control signal sent by the main control module, and generate a second alarm prompt in response to the second control signal.
7. The nitrogen cabinet as recited in claim 1, wherein each material storage area is further provided with a photoelectric sensor for detecting whether material is present in the material storage area.
8. The nitrogen cabinet according to claim 1, wherein a display module is further arranged on the cabinet body, and the display module is used for displaying temperature information, humidity information or state information of the materials in the nitrogen cabinet.
9. A wafer management system, characterized in that the wafer management system comprises the nitrogen cabinet, the upper computer and the robot according to any one of the claims 1 to 8, wherein the upper computer is respectively connected with the nitrogen cabinet and the robot;
the upper computer is used for generating a first operation instruction and sending the first operation instruction to the nitrogen gas cabinet when detecting that the robot arrives or leaves the carrying position, and is used for generating a second operation instruction according to the state information of the materials and sending the second operation instruction to the robot;
the robot is used for receiving and responding to a second operation instruction sent by the upper computer and arriving or leaving the conveying position.
10. The wafer management system of claim 9, wherein the upper computer is further configured to generate a third control instruction and send the third control instruction to the robot when the cabinet door of the nitrogen cabinet is in an open state, so as to control the robot to take and place the material from the nitrogen cabinet.
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| CN202121786047.7U CN215685930U (en) | 2021-08-02 | 2021-08-02 | Nitrogen cabinet and wafer management system |
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| CN202121786047.7U CN215685930U (en) | 2021-08-02 | 2021-08-02 | Nitrogen cabinet and wafer management system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116152999A (en) * | 2023-02-22 | 2023-05-23 | 广东利扬芯片测试股份有限公司 | Intelligent material management system and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116152999A (en) * | 2023-02-22 | 2023-05-23 | 广东利扬芯片测试股份有限公司 | Intelligent material management system and method |
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