CN215568509U - Medium conduit through-wall sealing structure and vacuum chamber - Google Patents
Medium conduit through-wall sealing structure and vacuum chamber Download PDFInfo
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- CN215568509U CN215568509U CN202121198161.8U CN202121198161U CN215568509U CN 215568509 U CN215568509 U CN 215568509U CN 202121198161 U CN202121198161 U CN 202121198161U CN 215568509 U CN215568509 U CN 215568509U
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- medium conduit
- heat
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- 238000007789 sealing Methods 0.000 title claims abstract description 188
- 230000003068 static effect Effects 0.000 claims abstract description 48
- 239000007769 metal material Substances 0.000 claims abstract description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims 1
- 229910052755 nonmetal Inorganic materials 0.000 description 7
- 239000003566 sealing material Substances 0.000 description 4
- 238000009835 boiling Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920001973 fluoroelastomer Polymers 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
本实用新型提供一种介质导管穿墙密封结构和真空室，涉及密封领域，包括介质导管、密封静法兰、密封动法兰、紧固件和金属材料制成的密封阻热筒；密封静法兰、密封动法兰和密封阻热筒依次套装于介质导管的外部；密封静法兰为凸面法兰，密封动法兰为凹面法兰；密封阻热筒的一端密封连接于介质导管的外管壁，密封阻热筒的另一端沿径向向外延伸形成延伸部，紧固件将延伸部紧固于密封静法兰的密封凸面和密封动法兰的密封凹面之间。本实用新型缓解了现有技术中向真空室内某些装置中导入低温或超低温介质时，介质导管穿墙处因密封结构低温丧失弹性从而密封失效，导致介质泄漏的技术问题。
The utility model provides a wall-penetrating sealing structure for a medium conduit and a vacuum chamber, which relate to the field of sealing and include a medium conduit, a sealing static flange, a sealing dynamic flange, a fastener and a sealing heat-resisting cylinder made of metal materials; The flange, the sealing dynamic flange and the sealing heat-resisting cylinder are sequentially sleeved on the outside of the medium conduit; the sealing static flange is a convex flange, and the sealing dynamic flange is a concave flange; one end of the sealing heat-resisting cylinder is sealed and connected to the medium conduit. The outer tube wall and the other end of the sealing heat-resisting cylinder extend radially outward to form an extension, and the fastener fastens the extension between the sealing convex surface of the sealing static flange and the sealing concave surface of the sealing dynamic flange. The utility model alleviates the technical problem in the prior art that when a low-temperature or ultra-low-temperature medium is introduced into some devices in a vacuum chamber, the medium conduit through the wall loses elasticity due to the low temperature of the sealing structure, thereby causing the sealing failure and leading to medium leakage.
Description
Technical Field
The utility model relates to the field of sealing, in particular to a medium conduit through-wall sealing structure and a vacuum chamber.
Background
When introducing low-temperature or ultralow-temperature medium into some devices in a vacuum chamber, a medium guide pipe penetrates through the wall of the vacuum chamber, and the part, through which the medium guide pipe penetrates, needs to be sealed.
The traditional sealing structure at the through-wall position of the vacuum chamber medium conduit is to seal the space between the wall of the medium conduit and the wall of the through-wall hole by adopting a non-metal sealing material such as a fluororubber material, but the non-metal sealing material loses elasticity and loses sealing performance along with the reduction of temperature, so that the medium leaks from the through-wall position, for example, when liquid oxygen (boiling point temperature-183 ℃) or liquid nitrogen (boiling point temperature-196.5 ℃) or liquid hydrogen (boiling point temperature-253 ℃) or other low-temperature or ultralow-temperature media are introduced into the vacuum chamber, the sealing performance of the sealing structure at the through-wall position of the vacuum chamber medium conduit is lost, and the medium leaks at any moment.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a medium conduit through-wall sealing structure and a vacuum chamber, which are used for relieving the technical problem of medium leakage caused by sealing failure due to the fact that the sealing structure loses elasticity at low temperature at the through-wall part of a medium conduit when low-temperature or ultralow-temperature media are introduced into some devices in the vacuum chamber.
In order to achieve the above purpose, the embodiment of the utility model adopts the following technical scheme:
in a first aspect, an embodiment of the present invention provides a medium conduit through-wall sealing structure, including a medium conduit, a static sealing flange, a dynamic sealing flange, a fastener, and a sealing heat-blocking cylinder made of a metal material;
the static sealing flange, the dynamic sealing flange and the heat-blocking sealing cylinder are sequentially sleeved outside the medium guide pipe;
the static sealing flange is a convex flange, and the dynamic sealing flange is a concave flange;
one end of the sealing heat-resisting cylinder is connected with the outer pipe wall of the medium guide pipe in a sealing mode, the other end of the sealing heat-resisting cylinder extends outwards in the radial direction to form an extending portion, and the extending portion is fastened between the sealing convex surface of the sealing static flange and the sealing concave surface of the sealing dynamic flange through the fastening piece.
In an alternative embodiment, the sealing convex surface of the static sealing flange is provided with a sealing convex part protruding from the sealing convex surface.
In an alternative embodiment, the sealing boss includes a plurality of annular flanges extending circumferentially around the convex sealing surface, and two adjacent annular flanges are spaced apart from each other.
In an alternative embodiment, one end of the sealed heat-resisting cylinder far away from the sealed static flange is soldered and connected with the outer pipe wall of the medium conduit in a sealing manner.
In an alternative embodiment, the fastener comprises a screw.
In an alternative embodiment, one end of the sealing heat-resisting cylinder, which is far away from the sealing static flange, is provided with a reducing part, and the reducing part is gradually reduced from the part close to the sealing static flange to the direction extending away from the sealing static flange.
In an alternative embodiment, the sealed heat resistant cartridge is made of oxygen free copper.
In an alternative embodiment, the static seal flange, the dynamic seal flange and the fastener are all made of metal materials.
In a second aspect, an embodiment of the present invention provides a vacuum chamber, wherein a wall of the vacuum chamber is provided with the medium conduit through-wall sealing structure in any one of the foregoing embodiments; wherein: the medium guide pipe penetrates through the wall of the vacuum chamber, the static sealing flange, the dynamic sealing flange, the fastener and the heat-blocking sealing cylinder are all located outside the vacuum chamber, and the static sealing flange is fixedly connected to the outer surface of the wall of the vacuum chamber.
In an alternative embodiment, the sealing static flange is welded to an outer surface of a wall of the vacuum chamber.
The embodiment of the utility model can realize the following beneficial effects:
in a first aspect, an embodiment of the present invention provides a medium conduit through-wall sealing structure, including a medium conduit, a static sealing flange, a dynamic sealing flange, a fastener, and a sealing heat-blocking cylinder made of a metal material; the static sealing flange, the dynamic sealing flange and the heat-resistant sealing cylinder are sequentially sleeved outside the medium guide pipe; the static sealing flange is a convex flange, and the dynamic sealing flange is a concave flange; one end of the sealing heat-resisting cylinder is connected with the outer pipe wall of the medium guide pipe in a sealing mode, the other end of the sealing heat-resisting cylinder extends outwards in the radial direction to form an extending portion, and the extending portion is fastened between the sealing convex surface of the sealing static flange and the sealing concave surface of the sealing dynamic flange through the fastening piece.
In the embodiment of the utility model, the sealing heat-blocking cylinder made of the metal material is adopted, and compared with other non-metal materials such as rubber and the like, the metal material is not easy to lose elasticity in a low-temperature environment, so that the problem of medium leakage caused by the elastic failure of the sealing structure arranged at the wall perforation position in the process of introducing the low-temperature or ultralow-temperature medium into the vacuum chamber through the medium guide pipe can be solved, and the structure of the embodiment can be suitable for the condition that most low-temperature or ultralow-temperature media are introduced into the vacuum chamber; in addition, compared with the sealing structure adopting a non-metal material in the prior art, the sealing structure of the embodiment also has the advantages of difficult aging, long use effective time and the like.
A second aspect of an embodiment of the present invention further provides a vacuum chamber, including the medium conduit through-wall sealing structure provided in the first aspect; the vacuum chamber provided by the embodiment of the utility model comprises the medium conduit through-wall sealing structure provided by the first aspect, so that the vacuum chamber provided by the embodiment of the utility model can achieve all the beneficial effects which can be achieved by the medium conduit through-wall sealing structure provided by the first aspect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic overall structural view of a medium conduit through-wall sealing structure provided in an embodiment of the present invention, which is installed in a wall state at a viewing angle;
fig. 2 is a schematic overall structural view of the medium conduit through-wall sealing structure provided in the embodiment of the present invention, which is installed at another viewing angle in a wall state;
FIG. 3 is a sectional view taken along line A-A of FIG. 2;
FIG. 4 is an enlarged view of a portion B of FIG. 3;
fig. 5 is a schematic structural diagram of an overall sealing static flange in a medium conduit through-wall sealing structure provided by an embodiment of the utility model;
FIG. 6 is a schematic view of the overall structure of the static sealing flange from the perspective of FIG. 2;
fig. 7 is a schematic overall structural view of a sealing movable flange in the medium conduit through-wall sealing structure provided by the embodiment of the utility model;
FIG. 8 is a schematic diagram of the overall structure of a sealing heat-blocking cylinder in the through-wall sealing structure of the medium conduit according to the embodiment of the present invention;
fig. 9 is an overall structure view of the sealed heat-resistant cylinder in the view of fig. 2.
Icon: 1-a medium conduit; 2-sealing a static flange; 21-sealing convex surface; 211-sealing boss; 3-sealing the movable flange; 31-sealing concave surface; 4-a fastener; 5-sealing the heat-blocking cylinder; 51-an extension; 52-a reduced diameter portion; 6-wall.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "inside" and "outside" are used for indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings or the orientation or positional relationship which is usually placed when the utility model is used, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or the element which is referred to must have a specific orientation, be constructed in a specific orientation and operation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," and "connected" are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Some embodiments of the utility model are described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.
Example one
The present embodiment provides a medium conduit through-wall sealing structure, which comprises a medium conduit 1, a sealing static flange 2, a sealing dynamic flange 3, a fastening member 4 and a sealing heat-resistant cylinder 5 made of a metal material, referring to fig. 1 to 9. The static sealing flange 2, the dynamic sealing flange 3 and the heat-resisting sealing cylinder 5 are sequentially sleeved outside the medium guide pipe 1. The static sealing flange 2 is a convex flange, and the dynamic sealing flange 3 is a concave flange; one end of the sealing heat-resisting cylinder 5 is connected with the outer pipe wall of the medium guide pipe 1 in a sealing mode, the other end of the sealing heat-resisting cylinder 5 extends outwards in the radial direction to form an extension part 51, and the extension part 51 is fastened between the convex sealing surface 21 of the static sealing flange 2 and the concave sealing surface 31 of the dynamic sealing flange 3 through the fastening piece 4.
In the traditional sealing structure at the through-wall position of the vacuum chamber medium conduit, a nonmetal sealing material such as a fluororubber material is adopted to seal the space between the wall of the medium conduit and the wall of the through-wall hole, but the nonmetal sealing material loses elasticity along with the reduction of temperature, so that the sealing performance is lost, and the medium is leaked; in addition, compared with the sealing structure adopting a non-metal material in the prior art, the sealing structure of the embodiment also has the advantages of difficult aging, long use effective time and the like.
It should be noted that, in this embodiment, the length of the heat-resistant sealing cylinder 5 is not particularly limited, and the length thereof may be set according to the temperature of the medium during practical manufacturing, and more specifically:
for a uniform metal bar having a length L and a cross-sectional area S, when the temperature difference between the two ends is stabilized at Δ T, the heat quantity Δ Q transferred from the high temperature end to the low temperature end in the time Δ T satisfies the relation:
therefore, in order to reduce the heat conduction quantity of the sealing heat-resistant cylinder 5, under the condition that the cross section area of the sealing heat-resistant cylinder 5 is not changed, the length of the sealing heat-resistant cylinder 5 can be set to be longer when the medium temperature is lower, and therefore the delta Q is smaller; if the medium temperature is not particularly low, the sealing heat-resisting cylinder 5 does not need to be lengthened, at the moment, the sealing heat-resisting cylinder 5 can be made shorter in terms of saving materials, the specific length value can be set according to actual needs and the cross-sectional area of the sealing heat-resisting cylinder 5, and only one design idea of the length of the sealing heat-resisting cylinder 5 is provided.
Further, referring to fig. 3-6, in an alternative embodiment of this embodiment, it is preferable that the convex sealing surface 21 of the static sealing flange 2 is provided with a convex sealing portion 211 protruding from the convex sealing surface 21, and the convex sealing portion 211 has a plurality of alternative structural forms, including but not limited to, as shown in fig. 3-6, the convex sealing surface 211 includes a plurality of annular flanges extending around the circumferential direction of the convex sealing surface 21, and two adjacent annular flanges are spaced apart from each other.
In addition, in the alternative embodiment of the present embodiment, it is preferable that one end of the sealing heat-blocking cylinder 5 away from the sealing static flange 2 is soldered and hermetically connected to the outer pipe wall of the medium conduit 1.
In alternative embodiments of the present embodiment, the fastening element 4 preferably comprises a screw, but the fastening element 4 may be other fastening structures, such as, but not limited to, a pin.
With continued reference to fig. 1 to 3 and fig. 8 and 9, in an alternative embodiment of the present embodiment, it is preferable that an end of the seal heat-blocking cylinder 5 away from the seal static flange 2 is provided with a reduced diameter portion 52, and the reduced diameter portion 52 is gradually reduced from the end close to the seal static flange 2 toward the direction extending away from the seal static flange 2.
In this embodiment, the sealing heat-blocking cylinder 5 may be made of, but not limited to, oxygen-free copper or other metal materials; the static sealing flange 2, the dynamic sealing flange 3 and the fastening piece 4 are preferably, but not limited to, made of metal materials.
Example two
The present embodiment provides a vacuum chamber, and a wall 6 of the vacuum chamber is provided with a medium conduit through-wall sealing joint provided in any one of the optional embodiments of the first embodiment.
Wherein: the medium guide pipe 1 penetrates through the wall 6 of the vacuum chamber, the static sealing flange 2, the dynamic sealing flange 3, the fastening piece 4 and the heat-blocking sealing cylinder 5 are positioned outside the vacuum chamber, and the static sealing flange 2 is fixedly connected to the outer surface of the wall 6 of the vacuum chamber; preferably, but not exclusively, the sealing flange 2 is welded to the outer surface of the wall 6 of the vacuum chamber.
Since the vacuum chamber provided by this embodiment includes the medium conduit through-wall sealing structure described in the first embodiment, the vacuum chamber provided by this embodiment can achieve all the advantages that can be achieved by the medium conduit through-wall sealing structure in the first embodiment, and the specific structure and the achievable effects thereof can be obtained with reference to each optional or preferred embodiment in the first embodiment.
Finally, it should be noted that: the embodiments in the present description are all described in a progressive manner, each embodiment focuses on the differences from the other embodiments, and the same and similar parts among the embodiments can be referred to each other; the above embodiments in the present specification are only used for illustrating the technical solutions of the present invention, and not for limiting the same; while the utility model has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121198161.8U CN215568509U (en) | 2021-05-31 | 2021-05-31 | Medium conduit through-wall sealing structure and vacuum chamber |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121198161.8U CN215568509U (en) | 2021-05-31 | 2021-05-31 | Medium conduit through-wall sealing structure and vacuum chamber |
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| Publication Number | Publication Date |
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| CN215568509U true CN215568509U (en) | 2022-01-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113309904A (en) * | 2021-05-31 | 2021-08-27 | 北京电子科技职业学院 | Medium conduit through-wall sealing structure and vacuum chamber |
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- 2021-05-31 CN CN202121198161.8U patent/CN215568509U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113309904A (en) * | 2021-05-31 | 2021-08-27 | 北京电子科技职业学院 | Medium conduit through-wall sealing structure and vacuum chamber |
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