CN215050859U - External PBN baking furnace heat insulation device - Google Patents
External PBN baking furnace heat insulation device Download PDFInfo
- Publication number
- CN215050859U CN215050859U CN202120532421.4U CN202120532421U CN215050859U CN 215050859 U CN215050859 U CN 215050859U CN 202120532421 U CN202120532421 U CN 202120532421U CN 215050859 U CN215050859 U CN 215050859U
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- pbn
- tubular structure
- heat insulation
- furnace
- external
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- 238000009413 insulation Methods 0.000 title claims abstract description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 27
- 239000010453 quartz Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 12
- 239000000919 ceramic Substances 0.000 claims description 8
- 229920000742 Cotton Polymers 0.000 claims description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- 239000004964 aerogel Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 239000013078 crystal Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 210000000038 chest Anatomy 0.000 abstract description 2
- 238000010030 laminating Methods 0.000 abstract description 2
- 238000005090 crystal field Methods 0.000 abstract 1
- 239000011819 refractory material Substances 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 208000021760 high fever Diseases 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000006213 oxygenation reaction Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- 239000012494 Quartz wool Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910000888 goloid Inorganic materials 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model belongs to the semiconductor crystal field of making specifically discloses an external PBN toasts thorax heat insulating device, heat insulating device is the inclosed tubular structure in both ends that high stability refractory material made, tubular structure's outer pipe wall and the laminating of furnace exit inner wall set up, tubular structure's both ends are outer end and inner respectively, the outer end is the apron, the apron size is greater than furnace exit size, the inner size is not more than furnace exit size, fill thermal-insulated medium in tubular structure's inner chamber, tubular structure's inner chamber is equipped with the through-hole that runs through both ends, tubular structure's outer end apron is equipped with the handle. The heat insulation device of the utility model effectively reduces the temperature difference between the head and the tail of the furnace chamber in the PBN baking process, meets the temperature requirements of PBN crucibles at different positions in the furnace chamber, improves the crystal growth success rate when the PBN crucibles are used for producing crystals, and improves the production efficiency of crystal growth; meanwhile, the utilization rate of heat in the PBN baking process is improved, the power consumption of the baking furnace equipment is reduced, and the power consumption cost is saved.
Description
Technical Field
The utility model relates to a semiconductor crystal makes the field, concretely relates to external PBN toasts thorax heat-proof device.
Background
PBNs need to be loaded into a clean quartz furnace during baking. The quartz hearth structure must have an opening to accommodate the PBN. The bottom of the quartz hearth is in a hemispherical sealing state, so that a ceramic fiber blanket can be placed at the position of the hearth outside the bottom of the quartz hearth to prevent heat loss. However, the head of the quartz hearth is an open structure, and ceramic fiber filling cannot be used for preventing heat loss. As shown in figure 1, a large amount of heat is dissipated at the outlet of the hearth, so that the outlet temperature of the tube hearth is very low and far reaches 900 degrees required by oxidation of the PBN crucible, and the PBN heteronuclear goloid probability is greatly increased due to insufficient oxidation furnace temperature at the front section of the PBN.
Disclosure of Invention
To the problem that exists among the prior art, the utility model aims at providing an external PBN toasts furnace heat-proof device, furnace inner head, afterbody temperature difference in the reducible use of the device satisfy the requirement of different positions PBN crucibles in the furnace to the temperature.
The specific scheme is as follows:
the external PBN baking furnace heat insulation device is arranged at a furnace outlet, the heat insulation device is a tubular structure which is made of high-stability high-temperature-resistant materials and is sealed at two ends, the outer tube wall of the tubular structure is attached to the inner wall of the furnace outlet, the two ends of the tubular structure are respectively the outer end and the inner end, the outer end is a cover plate, the size of the cover plate is larger than that of the furnace outlet, the size of the inner end is not larger than that of the furnace outlet, heat insulation media are filled in an inner cavity of the tubular structure, a through hole penetrating through the two ends is formed in the inner cavity of the tubular structure, and a handle is arranged on an outer end cover plate of the tubular structure.
The utility model discloses heat-proof device is with high temperature resistant material seal package of high stability, need not worry the pollution of the heat-proof medium of the inside, and heat-proof device can carry out the soaking washing that relapses with liquid medicines such as acidizing fluid simultaneously, keeps the cleanliness factor. And simultaneously, the utility model discloses heat-proof device's simple structure, manufacturing cost is low relatively, and is more convenient than the structure that has the lid when wasing, and reduces the structure damage that the corner collided with and leads to in the transport cleaning process.
Simultaneously, when PBN toasted, it is excessive in order to prevent that furnace has the oxygen stream of high fever, the utility model discloses be provided with the apron that the size is greater than furnace exit size, the apron can block that insulator and PBN toast the high fever oxygen stream in furnace inner wall clearance excessive, reduces the thermally conductive risk of structural body bridging, avoids the handle to receive the influence of high temperature hot gas flow on the apron.
Further, the utility model discloses in PBN toasts technology, the long-term high temperature condition of toasting up to 900~1000 ℃ to and the required high-purity pollution-free environment of semiconductor production, the utility model discloses a high stability high temperature resistant material is preferred preferably high-purity quartz, metal platinum etc. considers the following good characteristics of high-purity quartz: a. And (4) high temperature resistance. The softening point temperature of the quartz glass is about 1730 ℃, the quartz glass can be used for a long time at 1100 ℃, and the maximum service temperature in a short time can reach 1450 ℃; b. and (4) corrosion resistance. Except hydrofluoric acid, quartz glass hardly reacts with other acid substances, the acid corrosion resistance of the quartz glass is 30 times better than that of acid-resistant ceramic and 150 times better than that of stainless steel, and the chemical stability at high temperature is incomparable with that of any other engineering materials; c. the thermal stability is good. The quartz glass has extremely low thermal expansion coefficient, can bear severe temperature change, is heated to about 1100 ℃ and cannot be cracked when being placed in normal-temperature water. Therefore, the high-stability high-temperature-resistant material of the present invention is preferably high-purity quartz.
Further, preferably, a pair of side-by-side handles is arranged, so that the heat insulation device can be conveniently placed and taken out, and the handles are preferably made of quartz materials.
Further, the heat insulation medium is quartz wool, ceramic heat insulation wool, aerogel and the like, and preferably ceramic fiber wool.
As the preferred scheme, the utility model discloses creative proposed uses high-purity quartz parcel ceramic fiber cotton, and the cotton heat transfer coefficient of pottery 0.2~0.4w/cm.k of pottery is an effectual insulation material, and the skin is high-purity quartz, and the surface is smooth, can rinse repeatedly, keeps the surface clean. The middle of the heat insulation device is provided with a through small hole, a glass thin tube required by convenient oxygenation can extend into the quartz tube to discharge oxygen, and the whole heat insulation device is a sealing structure.
Further, in the baking process of the PBN, a quartz tube furnace is commonly used, and the tubular structure is preferably set to be a circular tube structure and matched with the inner wall of a hearth of the quartz tube furnace.
Further, tubular structure is totally closed integral structure, the utility model discloses use high temperature resistant material especially high-purity quartz material, make totally closed integral structure, on the one hand, can rinse the use repeatedly, guarantee the required cleanliness of technology, on the other hand, because totally closed structure, avoided the interior PBN crucible of interior filling's miropowder dirt pollution pipe.
For further improving the heat preservation effect, the inner cavity of the tubular structure is in a vacuum state or close to the vacuum state.
Furthermore, the through holes are arranged along the symmetrical central axis of the tubular structure, so that a glass thin tube required by convenient oxygenation can extend into the quartz tube to discharge oxygen.
Further, the inner end of the tubular structure is a convex hemispherical structure, a planar structure or a structure with a chamfer on the concave surface, and the convex hemispherical structure is preferably adopted in view of manufacturing convenience.
Compared with the prior art, the invention has the beneficial effects that:
the heat insulation device of the utility model effectively reduces the temperature difference between the head and the tail of the furnace chamber in the PBN baking process, meets the temperature requirements of PBN crucibles at different positions in the furnace chamber, improves the crystal growth success rate when the PBN crucibles are used for producing crystals, and improves the production efficiency of crystal growth; meanwhile, the utilization rate of heat in the PBN baking process is improved, the power consumption of the baking furnace equipment is reduced, and the power consumption cost is saved.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention.
FIG. 1 is a diagram of a PBN baking furnace chamber structure and an internal measured furnace temperature in the prior art.
FIG. 2 is a first structural view of the external PBN baking oven chamber heat-insulating device in the embodiment 1.
FIG. 3 is a second structure diagram of the external PBN baking oven chamber heat insulation device in the embodiment 1.
FIG. 4 is a view showing the structure of a PBN baking oven chamber in example 1.
Detailed Description
The present invention will now be described in detail with reference to the drawings, which are given by way of illustration and explanation only and should not be construed to limit the scope of the present invention in any way. Furthermore, features from embodiments in this document and from different embodiments may be combined accordingly by a person skilled in the art from the description in this document.
Example 1
Referring to fig. 2-4, the embodiment discloses an external PBN baking hearth heat insulation device arranged at an opening of a quartz tube.
The both ends inclosed pipe structure 1 that this embodiment heat-proof device main part was made for high-purity quartz material, pipe structure 1 sets up for totally closed vacuum integration, and pipe structure 1's outer pipe wall sets up with the laminating of furnace exit inner wall the inner chamber of pipe structure is filled ceramic thermal-insulated cotton 2, the symmetry axis of pipe structure 1 is equipped with the through-hole 3 that runs through inner chamber and both ends, and 3 apertures of through-hole set up to 15~25mm in this embodiment, and pipe structure 1 both ends are inner and outer end respectively, and its outer end is circular apron 4, 4 diameters of circular apron are greater than pipe structure 1's diameter and furnace internal diameter, circular apron 4 is equipped with a pair of handle 5 side by side, and this handle 5 is the quartz material. The inner end of the circular tube structure 1 is of a hemispherical structure protruding towards the bottom of the hearth.
The heat insulation device of the embodiment effectively reduces the temperature difference between the head and the tail of the furnace hearth in the PBN baking process, meets the temperature requirements of PBN crucibles at different positions in the furnace hearth, improves the crystal growth success rate produced by using the PBN crucibles, and improves the crystal growth production efficiency; meanwhile, the utilization rate of heat in the PBN baking process is improved, the power consumption of the baking furnace equipment is reduced, and the power consumption cost is saved.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. The external PBN baking furnace heat insulation device is arranged at a furnace outlet and is characterized in that the heat insulation device is a tubular structure which is made of high-stability high-temperature-resistant materials and is sealed at two ends, the outer tube wall of the tubular structure is attached to the inner wall of the furnace outlet, the two ends of the tubular structure are respectively the outer end and the inner end, the outer end is a cover plate, the size of the cover plate is larger than that of the furnace outlet, the size of the inner end is not larger than that of the furnace outlet, heat insulation media are filled in the inner cavity of the tubular structure, through holes penetrating through the two ends are formed in the inner cavity of the tubular structure, and a handle is arranged on an outer end cover plate of the tubular structure.
2. The external PBN baking furnace hearth heat insulation device according to claim 1, wherein the high-stability and high-temperature resistant material is high-purity quartz or metal platinum.
3. The external PBN roaster furnace heat insulation device of claim 1, wherein the handle is made of quartz.
4. The external PBN baking furnace cavity heat insulation device as claimed in claim 1, wherein the heat insulation medium is ceramic heat insulation cotton, quartz cotton, aerogel.
5. The external PBN baking oven chamber heat insulation device of claim 1, wherein the tubular structure is a circular tube structure.
6. The external PBN baking oven hearth heat insulation device of claim 1, wherein the tubular structure is a fully closed integral structure.
7. The external PBN baking oven chamber heat insulation device of claim 1, wherein the tubular structure inner cavity is in vacuum state or near vacuum state.
8. The external PBN baking oven muffle insulation of claim 1, wherein the through holes are arranged along a central axis of symmetry of the tubular structure.
9. The external PBN baking oven chamber heat insulation device of claim 1, wherein the inner end of the tubular structure is a convex hemispherical structure, a planar structure or a structure with a chamfer on the concave surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120532421.4U CN215050859U (en) | 2021-03-15 | 2021-03-15 | External PBN baking furnace heat insulation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120532421.4U CN215050859U (en) | 2021-03-15 | 2021-03-15 | External PBN baking furnace heat insulation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215050859U true CN215050859U (en) | 2021-12-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120532421.4U Active CN215050859U (en) | 2021-03-15 | 2021-03-15 | External PBN baking furnace heat insulation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215050859U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111348936A (en) * | 2018-12-21 | 2020-06-30 | 汉能新材料科技有限公司 | Crucible oxidation device and oxidation method |
-
2021
- 2021-03-15 CN CN202120532421.4U patent/CN215050859U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111348936A (en) * | 2018-12-21 | 2020-06-30 | 汉能新材料科技有限公司 | Crucible oxidation device and oxidation method |
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