CN214937122U - Purification system of electron-level purity acetylene - Google Patents
Purification system of electron-level purity acetylene Download PDFInfo
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Abstract
The utility model discloses a purification system of electron level purity acetylene belongs to special gas production technical field, fill the dress device including consecutive adsorption tower, absorption tower, analytic tower, high pressure drying tower and gas, adopt the adsorptive separation method separation purification acetylene according to the adsorption characteristic difference of acetylene and partial impurity, through absorption, absorption and analytic process, purify the acetylene, when adopting this purification system to carry out the acetylene purification, the waste liquid production is few, can not lead to the fact the corruption to equipment, and but absorption solvent cyclic utilization. The purification system can be used for obtaining 4N electronic-grade acetylene products, and has high economic benefit and low equipment investment cost.
Description
Technical Field
The utility model belongs to the technical field of the special gas production, concretely relates to purification system of electron level purity acetylene.
Background
The electronic-grade purity (volume fraction 99.99%, 4N grade for short) acetylene belongs to a special gas, is mainly applied to the preparation of amorphous carbon masks in the semiconductor industry, and can form stable amorphous carbon film by adopting a plasma enhanced chemical vapor deposition process to construct a carbon hard mask for a photoetching process. In addition, electronic grade purity acetylene can be used for metal part processing, and can be used in a low-pressure carburization process as compared with C in a carburization process3H8And CH4And acetylene has the characteristics of easy cracking under low pressure, high carbon utilization rate, difficult carbon deposition and coking and the like. Thus, electronic grade purity acetylene has an irreplaceable position in the semiconductor industry.
However, acetylene generally used in the industry at present has a purity of only 98-99.5% (volume fraction), mainly due to low purity of raw materials in the acetylene production process and difficulty in removing more impurities by a purification process. There are two main methods for the production of acetylene: (1) calcium carbide method and (2) natural gas cracking method. The calcium carbide method is characterized in that calcium carbide and water are subjected to chemical reaction to obtain crude acetylene gas, the natural gas cracking method is to carry out oxidative cracking on natural gas to obtain crude acetylene gas, the crude acetylene gas is purified, compressed and dried, then dissolved in acetone and stored in a gas cylinder filled with porous fillers, and the acetylene gas obtained by the method is called dissolved acetylene gas. The dissolved acetylene gas has the advantages of convenient use, good safety, low raw material consumption, no environmental pollution and the like, thereby having wide application in the aspects of gas welding, gas cutting and the like.
At present, the calcium carbide method is generally adopted in China to produce acetylene, although the concentration of acetylene gas obtained by the calcium carbide method is high, the purity is low, and when the calcium carbide reacts with water to produce the acetylene gas, impurities and water can also reactMany side reactions occur to produce impurities such as phosphine, hydrogen sulfide, arsine, etc. These impurities have the following hazards: (1) the method comprises the following steps of (1) compromising safety and use, (2) influencing the quality of acetylene cylinder filling, (3) easily deteriorating the quality of welding seams when the method is applied to gas welding, (4) causing errors to an analytical instrument, (5) easily poisoning and losing efficacy of a catalyst, and (6) harmful impurities in an amorphous carbon mask of a carburizing process and an integrated circuit when the method is applied to the semiconductor industry, and influencing the quality of the mask. Therefore, these impurities must be removed in production to be shipped out of the factory. For the natural gas cracking method, the volume fraction of acetylene in cracked gas prepared by cracking the natural gas by a partial oxidation method is only 8-15%, and the rest is impurities. In acetylene raw material gas obtained by a natural gas cracking method, impurities mainly comprise (1) light components: mainly comprises hydrogen, nitrogen, oxygen, methane, carbon monoxide, ethane, ethylene and the like, (2) heavy components: mainly comprises carbon dioxide, propane, propylene, methylacetylene, 1, 3-butadiene, 1, 2-butadiene, vinylacetylene, ethylacetylene, C6+And the like. The impurities have great influence on the downstream processing and utilization of acetylene, the light components can reduce the acetylene conversion rate, and the heavy components are easy to deposit carbon and coke in the amorphous carbon mask and carburization process, so that the carbon mask deposition process cannot be normally carried out.
At present, the purity of acetylene, whether calcium carbide acetylene or natural gas cracking acetylene, can not meet the requirement of the semiconductor industry on the purity of acetylene, and the acetylene contains impurity components harmful to the amorphous carbon mask preparation, so the acetylene can not be directly used in the amorphous carbon mask preparation and carburizing process in the semiconductor industry, and therefore, the raw materials can be used after being purified and removed of harmful impurities.
In the chinese patent application CN201710280535.2 (a process for producing acetylene by using a high efficiency calcium carbide method), a decreasing mode is adopted for the feeding speed of calcium carbide, a mixture of saturated saline and alkaline aqueous solution is used to perform a chemical reaction with calcium carbide, and the dosage ratio between reactants is controlled, the purity of the acetylene gas obtained by using the method is more than 99%, and the requirement of 4N-level electronic purity cannot be met. In chinese patent application No. cn201410769462.x (a device and a purification method for purifying industrial acetylene into high-purity acetylene), at normal temperature and pressure, a bottled industrial acetylene gas is purified by three adsorption towers filled with different dry adsorbents to obtain high-purity acetylene, however, the purity of the high-purity acetylene obtained by the method is 3.5N, and the requirement of electronic grade purity of 4N grade cannot be met.
With the continuous development of the carburizing process and the semiconductor industry, in order to obtain a high-quality carbon film, higher requirements are put forward on the purity of acetylene serving as a raw material, and the impurity components in the acetylene must be reduced to the minimum degree to meet the process requirements. The acetylene purity obtained by the acetylene gas production and purification method in the prior art can not meet the requirements of the carburizing process and the semiconductor industry on the acetylene purity, so the prior acetylene gas production and purification process needs to be improved.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a purification system of electron level purity acetylene to solve the technical problem who mentions in the background art.
In order to realize the aim, the utility model discloses an electronic grade purity acetylene purification system, which comprises an adsorption tower, an absorption tower, a desorption tower, a high-pressure drying tower and a gas filling device which are connected in sequence; the tower bottom inlet of the adsorption tower is connected with an acetylene raw material gas pipeline, the tower top outlet of the adsorption tower is connected with the tower bottom inlet of the absorption tower, the tower bottom outlet of the absorption tower is connected with the tower top inlet of the desorption tower, the tower top outlet of the desorption tower is connected with the tower bottom inlet of the high-pressure drying tower, and the tower top outlet of the high-pressure drying tower is communicated with the gas inlet of the gas filling device; the top inlet of the absorption tower is connected with an absorption solvent pipeline, and the bottom of the desorption tower is provided with a reboiler of the desorption tower.
The acetylene raw material gas is natural gas cracking acetylene raw material gas at normal temperature and normal pressure. In the adsorption tower, the inlet flow of acetylene raw material gas is 6-15 kg/h, the adsorption temperature in the adsorption tower is 25 ℃, and the adsorption pressure is normal pressure.
In the absorption tower, the absorption temperature is controlled to be-50-0 ℃, preferably-40-10 ℃, and the absorption pressure is 5-10 bar, preferably 6-8 bar. And (3) allowing the solvent discharged from the bottom of the absorption tower to enter the desorption tower through an absorption tower kettle pump, wherein the flow rate is 184-190 kg/h. The flow rate of the absorption solvent in the absorption solvent pipeline is 1-3 kg/h, preferably 1-2 kg/h, the temperature is-60-50 ℃, and the pressure is 6-8 bar.
The temperature in the desorption tower is 10-40 ℃, preferably 20-30 ℃, the desorption pressure is 1.1-1.5 bar, preferably 1.1-1.2 bar, and the flow rate of the purified acetylene obtained at the top of the desorption tower is 3-8 kg/h. In the high-pressure drying tower, the temperature in the tower is 0-30 ℃, preferably 0-8 ℃, and the adsorption pressure is 1.8-2.2 MPa, preferably 1.8-2 MPa.
Furthermore, the purification system comprises a stripping tower, the stripping tower is positioned between the desorption tower and the absorption tower, the outlet at the bottom of the desorption tower is connected with the inlet at the top of the stripping tower, the outlet at the bottom of the stripping tower is connected with the adsorbent pipeline, and the inlet at the bottom of the stripping tower is connected with the hot nitrogen pipeline. High-temperature nitrogen is introduced into the hot nitrogen pipeline and is used for extracting heavy component impurities from the solvent. And (3) the solvent dissolved with heavy component impurities and discharged from the bottom of the desorption tower enters the stripping tower through a desorption tower kettle pump, and the flow rate is 181-182 kg/h.
The operating temperature of the stripping tower is 50-140 ℃, preferably 80-120 ℃, the pressure is 1.05-1.5 bar, preferably 1.05-1.1 bar, the temperature of hot nitrogen at the bottom of the stripping tower is 50-140 ℃, preferably 80-120 ℃, the pressure is 1.1-1.5 bar, preferably 1.1-1.4 bar, the flow rate is 100-300L/min, preferably 100-200L/min.
Furthermore, the purification system comprises a tail gas treatment device, and the tower top outlet of the absorption tower and the tower top outlet of the stripping tower are connected with the tail gas treatment device. Discharging light component impurities with low solubility from the top of the absorption tower, wherein the discharge flow is 2-5 kg/h;
further, a low-pressure compressor is arranged between the adsorption tower and the absorption tower.
Further, an absorption tower kettle pump is arranged between the absorption tower and the analysis tower.
Further, a high-pressure compressor is arranged between the desorption tower and the high-pressure drying tower.
Furthermore, a desorption tower kettle pump is arranged between the desorption tower and the stripping tower, and a stripping tower kettle pump is arranged between the stripping tower and the absorption solvent pipeline.
Furthermore, an adsorbent is arranged in the adsorption tower, the adsorbent is sodium hydroxide, potassium hydroxide, lithium hydroxide or calcium hydroxide, and the particle size of the adsorbent is 3-5 mm.
Further, the absorption solvent in the absorption tower is methanol, ethanol, ethylene glycol, N-methylpyrrolidone, N-dimethylformamide or tetrahydrofuran.
Furthermore, a drying adsorbent is arranged in the high-pressure drying tower, the drying adsorbent is a 3A molecular sieve, a 4A molecular sieve, a 5A molecular sieve, a 13X molecular sieve, alumina or silica gel, and the particle size of the drying adsorbent is 3-5 mm.
Adopt the utility model discloses an electron level purity acetylene purification system is in the purification processing of acetylene, and acetylene raw material gas gets into adsorption tower, absorption tower, analytic tower and high pressure drying tower in proper order after, and the electron level purity acetylene after obtaining the purification gets into and fills the dress to the gas cylinder among the gas filling device, obtains the acetylene product after the purification. Carbon dioxide can be adsorbed and removed in the adsorption tower, light component impurities with low solubility can be removed in the adsorption tower, heavy component impurities can be removed in the desorption tower through the desorption process, purified acetylene gas is obtained, and the purification of acetylene is realized through the adsorption, absorption and desorption processes in the whole process.
The existing acetylene purification technology only can obtain 98-99.5% of acetylene by adopting a sodium hypochlorite solution or concentrated sulfuric acid process, and cannot enter the semiconductor industry for use; in addition, available chlorine in the sodium hypochlorite solution purification process is volatile, sodium hypochlorite needs to be continuously supplemented, sodium hypochlorite consumption is large, a large amount of waste liquid needs to be treated, the concentrated sulfuric acid purification process seriously corrodes equipment, waste acid generated after use is difficult to treat, and the concentrated sulfuric acid is used, so that the requirement on the use operation level is high, and the danger coefficient of the operation process is large.
The utility model discloses technical scheme adopts the natural gas schizolysis acetylene of generally accepted in the trade to purify as the raw materials, adopts the adsorption separation method separation and purification acetylene according to acetylene and partial impurity's the adsorption characteristic difference to adopt the analytic method of absorption to separate the purification acetylene according to light component and heavy component impurity component in the acetylene and acetylene the difference of solubility in the solvent, will absorb analytic scheme and adsorption scheme and jointly go on can obtaining 4N electronic level acetylene product.
Compared with the prior art, the utility model discloses a purification system of electron level purity acetylene has following advantage:
(1) the utility model discloses a purification system is through adsorbing, absorption and analytic process, purifies the back to the acetylene, and the purity of acetylene can reach 4N level, can satisfy customer's higher demand.
(2) Adopt the utility model discloses a when the purification system carries out acetylene purification, need not to use reagents such as sodium hypochlorite, concentrated sulfuric acid, can not produce the waste liquid that many are difficult to handle, also can not cause the corruption to equipment simultaneously, the operating safety is good.
(3) The utility model discloses an among the purification system, the absorption solvent can be through cyclic utilization after purifying, has reduced material cost.
(4) The price of common acetylene gas is very low, and the 4N electronic grade acetylene after the purification of the purification system of the utility model has high price, thereby having great economic benefit.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the purification system for electronic-grade purity acetylene in the first embodiment.
Wherein: 1-an adsorption column; 2-an absorption column; 3-a resolving tower; 4-high pressure drying tower; 5-a gas filling device; 6-a stripper column; 7-a tail gas treatment device; 11-acetylene feed gas line; 12-a low pressure compressor; 21-an absorption solvent conduit; 22-absorption tower kettle pump; 31-stripper reboiler; 32-a resolving tower kettle pump; 33-a high pressure compressor; 51-a gas cylinder; 52-pneumatic stop valve; 61-hot nitrogen line; 62-stripper kettle pump; 81-flame arrestors; 82-backpressure valve; 83-a stop valve; 84-a one-way valve; 85-metallic rotameter; 86-gas mass flow controller.
Detailed Description
The technical solution of the present invention will be explained in detail by the following embodiments.
Example one
As shown in fig. 1, a schematic diagram of the overall structure of the system for purifying acetylene with electronic grade purity in the present embodiment is shown.
The purification system of the electronic-grade purity acetylene comprises an adsorption tower 1, an absorption tower 2, a desorption tower 3, a high-pressure drying tower 4 and a gas filling device 5 which are connected in sequence.
The tower bottom inlet of the adsorption tower 1 is connected with the acetylene raw material gas pipeline 11, the tower top outlet of the adsorption tower 1 is connected with the tower bottom inlet of the absorption tower 2, the tower bottom outlet of the absorption tower 2 is connected with the tower top inlet of the analysis tower 3, the tower top outlet of the analysis tower 3 is connected with the tower bottom inlet of the high-pressure drying tower 4, and the tower top outlet of the high-pressure drying tower 4 is communicated with the gas inlet of the gas filling device 5.
An absorption solvent pipeline 21 is connected to the inlet of the top of the absorption tower 2, and a reboiler 31 for the desorption tower is arranged at the bottom of the desorption tower 3.
The purification system further comprises a stripping tower 6, wherein the stripping tower 6 is positioned between the desorption tower 3 and the absorption tower 2, the outlet at the bottom of the desorption tower 3 is connected with the inlet at the top of the stripping tower 6, the outlet at the bottom of the stripping tower 6 is connected with the adsorption solvent pipeline 21, and the inlet at the bottom of the stripping tower 6 is connected with a hot nitrogen pipeline 61.
A low-pressure compressor 12 is provided between the adsorption tower 1 and the absorption tower 2, an absorption tower kettle pump 22 is provided between the absorption tower 2 and the desorption tower 3, an desorption tower kettle pump 32 is provided between the desorption tower 3 and the stripping tower 4, a high-pressure compressor 33 is provided between the desorption tower 3 and the high-pressure drying tower 4, and a stripping tower kettle pump 62 is provided between the stripping tower 6 and the absorption solvent pipeline 21.
In this embodiment 1, the gas filling apparatus 5 is configured to fill two stations, and two gas cylinders 51 are provided in parallel, so that acetylene gas can be simultaneously filled in the two gas cylinders 51.
The purification system also comprises a tail gas treatment device 7, and the outlet at the top of the absorption tower 2 and the outlet at the top of the stripping tower 6 are both connected with the tail gas treatment device 7; a back pressure valve 82, a gas mass flow controller 86, a one-way valve 84 and a flame arrester 81 are sequentially arranged on a gas pipeline between the absorption tower 2 and the tail gas treatment device 7 and a gas pipeline between the stripping tower 6 and the tail gas treatment device 7.
A back pressure valve 82, a gas mass flow controller 86, a one-way valve 84 and a flame arrester 81 are sequentially arranged on a gas pipeline between the outlet of the top of the analysis tower 3 and the high-pressure drying tower 4; a flame arrester is arranged on a gas pipeline between the high-pressure drying tower 4 and the gas filling device 5; in the gas filling device 5, a check valve, a stop valve, a pneumatic stop valve 52 and a flame arrester are arranged on a gas filling pipeline; in the gas charging apparatus 5, an electronic scale 52 with an alarm function is provided below each gas cylinder 51, and the electronic scale 52 is connected to the pneumatic stop valve.
As shown in fig. 1, one or more of a flame arrester, a back pressure valve, a stop valve 83, a check valve, a metal rotameter 85, and a gas mass flow controller are provided in other pipes of the purification system according to actual control and flow conditions of the gas or the absorption solvent, and all parts are not marked in fig. 1 due to space limitations, but the same reference numerals denote the same parts.
The method for purifying the electronic-grade acetylene by adopting the purification system comprises the following steps:
(1) acetylene raw material gas obtained by cracking natural gas enters an adsorption tower 1 through an acetylene raw material gas pipeline 11 under the state of normal temperature and normal pressure, the gas entering flow is 6-15 kg/h, the adsorption temperature in the adsorption tower 1 is 25 ℃, the adsorption pressure is normal pressure, and carbon dioxide is removed in the adsorption tower 1; the adsorbent in the adsorption tower 1 is one or a mixture of several of sodium hydroxide, potassium hydroxide, lithium hydroxide, calcium hydroxide and the like, and the particle size of the adsorbent is 3-5 mm.
(2) Pressurizing the gas without carbon dioxide to 5-10 bar by a low-pressure compressor 12, then sending the gas into an absorption tower 2, wherein the absorption temperature of the absorption tower 2 is-40-10 ℃, the absorption pressure is 6-8 bar, and after absorption, discharging light component impurities with low solubility from the top of the absorption tower 2, wherein the discharge flow is 2-5 kg/h; the method comprises the following steps of (1) discharging a solvent absorbing acetylene and heavy component impurities from the bottom of an absorption tower 2, feeding the solvent discharged from the bottom of the absorption tower 2 into an analytical tower 3 through an absorption tower kettle pump 22, wherein the flow rate is 184-190 kg/h, and the absorption solvent in the absorption tower 2 is one or a mixture of more of methanol, ethanol, ethylene glycol, N-methylpyrrolidone, N-dimethylformamide, tetrahydrofuran and the like;
supplementing an absorption solvent at the top of the absorption tower 2 through an absorption solvent pipeline 21, wherein the flow of the absorption solvent is 1-2 kg/h, the temperature is-60-50 ℃, and the pressure is 6-8 bar.
(3) The method comprises the following steps of enabling a solvent which is discharged from the bottom of an absorption tower 2 and absorbs acetylene and heavy component impurities to enter an analytic tower 3, enabling the solvent to enter the analytic tower 3 from the upper part of the analytic tower 3, enabling the temperature in the analytic tower 3 to be 20-30 ℃, enabling the analytic pressure to be 1.1-1.2 bar, obtaining purified electronic-grade acetylene at the top of the analytic tower 3, enabling the solvent which is discharged from the bottom of the analytic tower 3 and dissolved with the heavy component impurities to enter a stripping tower 6 through an analytic tower kettle pump 32, and enabling the flow rate to be 181-182 kg/h.
(4) The purified electronic-grade acetylene obtained from the top of the desorption tower 3 is pressurized to 1.8-2.2 MPa by a high-pressure compressor 33, enters a high-pressure drying tower 4, is dried and dehydrated in the high-pressure drying tower 4, and then enters a gas filling device 5.
In a high-pressure drying tower 4, the temperature is 0-8 ℃, the pressure is 1.8-2 MPa, the drying adsorbent is one or a mixture of more of a 3A molecular sieve, a 4A molecular sieve, a 5A molecular sieve, a 13X molecular sieve, alumina, silica gel and the like, and the particle size of the adsorbent is 3-5 mm.
(5) In the gas filling device 5, the gas bottle 51 is filled with gas through a gas filling pipeline, and a 4N electronic-grade acetylene gas product is obtained.
(6) The method comprises the following steps of (1) enabling a solvent dissolved with heavy component impurities and discharged from the bottom of an analytical tower 3 to enter a stripping tower 6, introducing hot nitrogen into the bottom of the stripping tower 6 through a hot nitrogen pipeline 61, separating the heavy component impurity gases in the solvent and discharging the heavy component impurity gases from an outlet at the top of the stripping tower 6, enabling the discharge flow of the heavy component impurity gases to be 2-5 kg/h, enabling the purified solvent to enter an absorption solvent pipeline 21 for recycling after being pressurized to 6-8 bar from the bottom of the stripping tower 6 through a stripping tower kettle pump 62, and enabling the flow of the solvent discharged from the bottom of the stripping tower 6 to be 177-179 kg/h; the operating temperature of the stripping tower 6 is 80-120 ℃, and the pressure is 1.05-1.1 bar; the temperature of hot nitrogen at the bottom of the tower is 80-120 ℃, the pressure is 1.1-1.4 bar, and the flow is 100-200L/min.
(7) And (3) discharging light component impurity gas with low solubility from the top of the absorption tower 2 in the step (2) and discharging heavy component impurity gas from the top of the stripping tower 2 in the step (6), respectively inputting the light component impurity gas and the heavy component impurity gas into a tail gas treatment device 7 through gas conveying pipelines, and discharging the light component impurity gas and the heavy component impurity gas to the outside of the purification system after tail gas treatment.
In this embodiment 1, the acetylene raw material gas is obtained by cracking natural gas, and after passing through the adsorption tower 1, the absorption tower 2, the desorption tower 3, and the high-pressure drying tower 4, the acetylene raw material gas with high impurity content is purified into a 4N electronic-grade acetylene product, and table 1 shows the acetylene raw material gas and the components in the purified 4N electronic-grade acetylene product, and it can be seen that the impurity content in the purified 4N electronic-grade acetylene product is greatly reduced.
TABLE 1 acetylene feed gas and gas composition in purified 4N electronic grade acetylene product
The above description is only the preferred embodiment of the present invention, and is not intended to limit the present invention, any modification, equivalent replacement, or improvement made within the design concept of the present invention should be included within the protection scope of the present invention.
Claims (10)
1. A purification system of electronic grade purity acetylene which is characterized in that: comprises an adsorption tower, an absorption tower, an analysis tower, a high-pressure drying tower and a gas filling device which are connected in sequence; the tower bottom inlet of the adsorption tower is connected with an acetylene raw material gas pipeline, the tower top outlet of the adsorption tower is connected with the tower bottom inlet of the absorption tower, the tower bottom outlet of the absorption tower is connected with the tower top inlet of the desorption tower, the tower top outlet of the desorption tower is connected with the tower bottom inlet of the high-pressure drying tower, and the tower top outlet of the high-pressure drying tower is communicated with the gas inlet of the gas filling device; the top inlet of the absorption tower is connected with an absorption solvent pipeline, and the bottom of the desorption tower is provided with a reboiler of the desorption tower.
2. The system for purifying electronic grade purity acetylene according to claim 1, wherein: the purification system comprises a stripping tower, the stripping tower is positioned between an analysis tower and an absorption tower, a tower bottom outlet of the analysis tower is connected with a tower top inlet of the stripping tower, a tower bottom outlet of the stripping tower is connected with an adsorbent pipeline, and a tower bottom inlet of the stripping tower is connected with a hot nitrogen pipeline.
3. The system for purifying electronic grade purity acetylene according to claim 2, wherein: the purification system comprises a tail gas treatment device, and the tower top outlet of the absorption tower and the tower top outlet of the stripping tower are connected with the tail gas treatment device.
4. The system for purifying electronic grade purity acetylene according to claim 1, wherein: a low-pressure compressor is arranged between the adsorption tower and the absorption tower.
5. The system for purifying electronic grade purity acetylene according to claim 1, wherein: an absorption tower kettle pump is arranged between the absorption tower and the analysis tower.
6. The system for purifying electronic grade purity acetylene according to claim 1, wherein: a high-pressure compressor is arranged between the desorption tower and the high-pressure drying tower.
7. The system for purifying electronic grade purity acetylene according to claim 2, wherein: an analysis tower kettle pump is arranged between the analysis tower and the stripping tower, and a stripping tower kettle pump is arranged between the stripping tower and the absorption solvent pipeline.
8. The system for purifying electronic grade purity acetylene according to claim 1, wherein: an adsorbent is arranged in the adsorption tower, the adsorbent is sodium hydroxide, potassium hydroxide, lithium hydroxide or calcium hydroxide, and the particle size of the adsorbent is 3-5 mm.
9. The system for purifying electronic grade purity acetylene according to claim 1, wherein: the absorption solvent in the absorption tower is methanol, ethanol, ethylene glycol, N-methyl pyrrolidone, N-dimethylformamide or tetrahydrofuran.
10. The system for purifying electronic grade purity acetylene according to claim 1, wherein: the high-pressure drying tower is internally provided with a drying adsorbent, the drying adsorbent is a 3A molecular sieve, a 4A molecular sieve, a 5A molecular sieve, a 13X molecular sieve, alumina or silica gel, and the particle size of the drying adsorbent is 3-5 mm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113563151A (en) * | 2021-08-23 | 2021-10-29 | 苏州金宏气体股份有限公司 | 4N electronic-grade acetylene purification device and purification process |
| CN117658762A (en) * | 2024-02-01 | 2024-03-08 | 大连科利德光电子材料有限公司 | Method for purifying electronic grade acetylene gas |
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2021
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113563151A (en) * | 2021-08-23 | 2021-10-29 | 苏州金宏气体股份有限公司 | 4N electronic-grade acetylene purification device and purification process |
| CN113563151B (en) * | 2021-08-23 | 2024-09-17 | 金宏气体股份有限公司 | 4N electronic-grade acetylene purification device and purification process |
| CN117658762A (en) * | 2024-02-01 | 2024-03-08 | 大连科利德光电子材料有限公司 | Method for purifying electronic grade acetylene gas |
| CN117658762B (en) * | 2024-02-01 | 2024-05-10 | 大连科利德光电子材料有限公司 | Method for purifying electronic grade acetylene gas |
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Address after: 215152 Anmin Road, Panyang Industrial Park, Huangdai Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee after: Jinhong Gas Co.,Ltd. Address before: 215152 No. 6 Anmin Road, Panyang Industrial Park, Huangdi Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee before: SUZHOU JINHONG GAS Co.,Ltd. |
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