CN214174184U

CN214174184U - Defect detection imaging device

Info

Publication number: CN214174184U
Application number: CN202023290233.XU
Authority: CN
Inventors: 邢志广; 王丽艳
Original assignee: Luster LightTech Co Ltd
Current assignee: Luster LightTech Co Ltd
Priority date: 2020-12-30
Filing date: 2020-12-30
Publication date: 2021-09-10
Anticipated expiration: 2030-12-30

Abstract

The application discloses a defect detection imaging device, which comprises a machine table base, wherein a working machine table is supported by the machine table base; the first driving mechanism is arranged on the working machine table and can generate translational motion in a horizontal plane determined by an X axis and a Y axis; the first driving mechanism supports a detection platform which can move in a translation way along with the first driving mechanism, and a display screen to be detected can be placed on the detection platform; the working machine table is also provided with a hoisting support, the hoisting support is provided with a second driving mechanism, and the second driving mechanism can perform translational motion in the vertical direction determined by the Z axis; the second driving mechanism is connected with an imaging component which can move vertically along with the second driving mechanism, and the imaging component is opposite to the detection platform. The structural design of the defect detection imaging device can effectively improve the crack defect detection efficiency, saves labor cost and has high detection accuracy.

Description

Defect detection imaging device

Technical Field

The application relates to the technical field of defect detection imaging, in particular to a defect detection imaging device.

Background

When the flexible OLED product is subjected to laser cutting and curved surface CG (CG refers to cover glass and cover plate glass) attachment, a PI (polyimide) substrate is broken due to uneven stress, and the Crack is called Crack. The specific morphology of Crack can be seen in fig. 1, which is an enlarged view of Crack defects under a microscope in fig. 1.

The Crack mainly occurs in the R angle, the reserved sea, the round hole, the arc edge and other areas of the OLED product, the width is about 1-5 mu m, and the length is less than 100 mu m. The organic matter of the OLED with the Crack defect is oxidized by water vapor and air at the later stage and gradually loses efficacy, so that the service life of the OLED display screen is influenced. Crack is a defect that must be detected during the production of OLED products. However, due to the small size of the Crack defect, OLED screen manufacturers generally adopt a high-power microscope to perform manual sampling inspection at present, about 10 minutes is needed for completing single-chip inspection, and the inspection efficiency is very low; meanwhile, the detection accuracy is difficult to guarantee due to the fact that manual detection is influenced by subjective factors, visual fatigue is detected for a long time and the like.

SUMMERY OF THE UTILITY MODEL

The technical problem that this application will be solved is for providing a defect detection image device, and this defect detection image device's structural design can effectively promote the efficiency that the crack defect detected, saves the cost of labor to the rate of accuracy of detection is high.

In order to solve the technical problem, the application provides a defect detection imaging device for detecting the crack defect on a display screen, wherein the imaging device comprises a machine base, and a working machine is supported on the machine base; the first driving mechanism is arranged on the working machine table and can generate translational motion in a horizontal plane determined by an X axis and a Y axis; the first driving mechanism supports a detection platform which can move in a translation way along with the first driving mechanism, and a display screen to be detected can be placed on the detection platform;

the working machine table is also provided with a hoisting support, the hoisting support is provided with a second driving mechanism, and the second driving mechanism can perform translational motion in the vertical direction determined by the Z axis; the second driving mechanism is connected with an imaging component which can move vertically along with the second driving mechanism, and the imaging component is opposite to the detection platform.

In one embodiment of the present invention, the substrate is,

and the working machine table is also provided with a third driving mechanism, and the third driving mechanism is connected with the detection platform so as to drive the detection platform to rotate around the X axis.

In one embodiment of the present invention, the substrate is,

and the working machine table is also provided with a fourth driving mechanism, and the fourth driving mechanism is connected with the detection platform so as to drive the detection platform to rotate around the Z axis.

In one embodiment of the present invention, the substrate is,

first actuating mechanism supports there is U type detection frame, third actuating mechanism is for rotating the support and is in first pivot on two lateral walls of U type detection frame, the axis of first pivot with the X axle syntropy, testing platform support in first pivot.

In one embodiment of the present invention, the substrate is,

the fourth driving mechanism is a second rotating shaft arranged on the first rotating shaft, and the axis of the second rotating shaft is in the same direction as the Z axis; the second rotating shaft is arranged between the detection platform and the first rotating shaft, and the detection platform is supported on the second rotating shaft.

In one embodiment of the present invention, the substrate is,

the imaging device further comprises a shock insulation pad, and the machine table base supports the working machine table through the shock insulation pad.

In one embodiment of the present invention, the substrate is,

the imaging component comprises a camera and a lens connected with the camera; the imaging device further comprises a camera support connected with the camera, and the second driving mechanism is fixedly connected with the camera support.

In one embodiment of the present invention, the substrate is,

a point light source interface is arranged on the side wall of the lens, and a coaxial light source is inserted into the point light source interface; and a semi-transparent and semi-reflective mirror is obliquely arranged in the lens, so that light rays of the coaxial light source are reflected by the semi-transparent and semi-reflective mirror to irradiate on a display screen to be detected, and further imaging light rays of the display screen to be detected enter the camera through the semi-transparent and semi-reflective mirror.

In one embodiment of the present invention, the substrate is,

the lens is also sleeved with an annular light source below the coaxial light source; the light of the annular light source irradiates the display screen to be detected in an inclined direction; the annular light source is provided with a plurality of annular subarea light source blocks, and the annular subarea light source blocks can be independently controlled to be on or off.

The technical effects of the embodiments of the present application are described below:

in one embodiment, a defect detection imaging device for detecting a crack defect on a display screen comprises a machine base supporting a working machine; the first driving mechanism is arranged on the working machine table and can generate translational motion in a horizontal plane determined by an X axis and a Y axis; the first driving mechanism supports a detection platform which can move in a translation mode along with the first driving mechanism, and a display screen to be detected can be placed on the detection platform.

In the above structure, the base of the machine station provides a bottom support, and the structure of the machine station can be a frame or other structures. The base of the machine table supports a working machine table, which is a working plane for placing the testing platform and the components, and needs to have strict levelness and stability. A first driving mechanism is arranged on the working machine table and can generate translational motion in a horizontal plane determined by an X axis and a Y axis. The first driving mechanism supports a detection platform which can move in a translation mode along with the first driving mechanism, and a display screen to be detected can be placed on the detection platform. That is, the detection platform can perform horizontal translation in any direction in the plane of the working machine.

The hoisting bracket is an inverted U-shaped bracket and is mainly used for placing a second driving structure. The second driving mechanism is used for providing driving force for moving up and down. Specifically, the second driving mechanism can generate translational motion in a vertical direction determined by a Z axis; the second driving mechanism is connected with an imaging component which can move vertically along with the second driving mechanism, and the imaging component is opposite to the detection platform. Therefore, the imaging component moves up and down along with the up-and-down movement of the second driving mechanism, so that the distance between the imaging component and the display screen to be detected is adjusted, a proper distance is found, and clear imaging is realized.

In the prior art, OLED screen manufacturers generally adopt high-power microscope manual sampling inspection at present, about 10 minutes is needed for completing single-chip inspection, and the inspection efficiency is very low; meanwhile, the detection accuracy is difficult to guarantee due to the fact that manual detection is influenced by subjective factors, visual fatigue is detected for a long time and the like. In the application, the defect detection can be completed quickly through the imaging device, and imaging is completed automatically. Therefore, the structural design of the defect detection imaging device can effectively improve the crack defect detection efficiency, save labor cost and ensure high detection accuracy.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is an enlarged view under a microscope of a Crack defect;

FIG. 2 is a schematic diagram of a defect inspection imaging device according to an embodiment of the present application;

FIG. 3 is a schematic structural diagram of a portion of the defect inspection imaging apparatus of FIG. 2;

FIG. 4 is a schematic diagram of the imaging assembly of the defect inspection imaging apparatus of FIG. 2;

FIG. 5 is a schematic optical path diagram of the imaging assembly of FIG. 4;

FIG. 6 is a schematic view of the annular light source of the imaging assembly of FIG. 4.

In fig. 2 to 6, the correspondence between the component names and the reference numerals is:

a machine base 101; a working machine 102; a first drive mechanism 103; an inspection platform 104; a display screen to be detected 105; hoisting the bracket 106; a second driving mechanism 107; a U-shaped detection frame 108; a first rotating shaft 109; a second rotating shaft 110; a vibration-isolating pad 111;

an imaging section 200; a camera 201; a lens 202; a point light source interface 203; a coaxial light source 204; a half mirror 205; an annular light source 206; the light source blocks 207 are annularly partitioned.

Detailed Description

In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.

In some of the flows described in the specification and claims of this application and in the above-described figures, a number of operations are included that occur in a particular order, but it should be clearly understood that these operations may be performed out of order or in parallel as they occur herein, the number of operations, e.g., 101, 102, etc., merely being used to distinguish between various operations, and the number itself does not represent any order of performance. Additionally, the flows may include more or fewer operations, and the operations may be performed sequentially or in parallel. It should be noted that, the descriptions of "first", "second", etc. in this document are used for distinguishing different messages, devices, modules, etc., and do not represent a sequential order, nor limit the types of "first" and "second" to be different.

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Referring to fig. 2 and 3, fig. 2 is a schematic structural diagram of a defect inspection imaging device according to an embodiment of the present application; FIG. 3 is a schematic structural diagram of a portion of the defect inspection imaging apparatus shown in FIG. 2.

In one embodiment, as shown in FIG. 2, a defect detection imaging apparatus for detecting a crack defect on a display screen includes a stage base 101, the stage base 101 supporting a work stage 102; a first driving mechanism 103 is arranged on the working machine table 102, and the first driving mechanism 103 can generate translational motion in a horizontal plane determined by an X axis and a Y axis; the first driving mechanism 103 supports a detection platform 104 which can move in translation along with the first driving mechanism, and a display screen to be detected can be placed on the detection platform 104.

In the above structure, the machine base 101 provides a bottom support, and the structure may be a frame or other structures. The base 101 supports a work table 102. the work table 102 is used to provide a working plane for placing the testing platform 104 and components, and needs to have strict levelness and stability. The first driving mechanism 103 is provided on the working machine 102, and the first driving mechanism 103 can perform a translational motion in a horizontal plane defined by an X-axis and a Y-axis. The first driving mechanism 103 supports a detection platform 104 which can move in translation along with the first driving mechanism, and a display screen to be detected can be placed on the detection platform 104. That is, the detection platform 104 can horizontally translate in any direction within the plane of the work machine 102.

The directions of the X-axis and the Y-axis are explained as follows:

as shown in fig. 2, the X-axis direction is a direction extending left and right in the plane of the work table 102, and the Y-axis direction is a direction extending back and forth in the plane of the work table 102; similarly, the direction of the Z-axis is perpendicular to the plane of the working platform 102.

As shown in fig. 2, the working machine 102 is further provided with a hoisting support 106, the hoisting support 106 is provided with a second driving mechanism 107, and the second driving mechanism 107 can perform translational motion in the vertical direction determined by the Z axis; the second driving mechanism 107 is connected with an imaging part 200 which can move vertically along with the second driving mechanism, and the imaging part 200 is opposite to the detection platform 104.

As shown in fig. 2, the lifting bracket 106 is an inverted U-shaped bracket, the purpose of which is primarily to accommodate the second drive structure. The second driving mechanism 107 is used to provide a driving force for moving up and down. Specifically, as shown in fig. 2, the second driving mechanism 107 can perform translational movement in the vertical direction determined by the Z-axis; the second driving mechanism 107 is connected with an imaging part 200 which can move vertically along with the second driving mechanism, and the imaging part 200 is opposite to the detection platform 104. Thus, as the second driving mechanism 107 moves up and down, the imaging section 200 also moves up and down, thereby adjusting the distance between the imaging section 200 and the display screen 105 to be inspected, thereby finding a suitable distance and achieving clear imaging.

Referring to fig. 3, fig. 3 is a schematic structural diagram of a portion of the defect inspection imaging device shown in fig. 2.

In the above-described embodiments, further improvements can be made. For example, as shown in fig. 3, the working platform 102 further has a third driving mechanism, and the third driving mechanism is connected to the detecting platform 104 so as to drive the detecting platform 104 to rotate around the X-axis. In this embodiment, the detection platform 104 is rotated around the X-axis, so as to provide the imaging component 200 with a better detection view angle, for example, at the edge curved portion of the arc screen or the screen, thereby achieving better detection.

Furthermore, as shown in fig. 3, a fourth driving mechanism is further disposed on the working platform 102, and the fourth driving mechanism is connected to the detecting platform 104 so as to drive the detecting platform 104 to rotate around the Z-axis. In this embodiment, the fourth driving mechanism rotates the detecting platform 104 around the Z-axis, so that the imaging component 200 can be aligned with various parts of the display screen and at a proper angle for clear imaging.

It should be noted that, in the above two embodiments, the present application does not limit the specific structure of the third driving mechanism and the fourth driving mechanism, and only can achieve the corresponding rotation purpose, and both should be within the protection scope of the present application.

Of course, as an example, the present application provides a specific rotational structure. For example, as shown in fig. 3, the first driving mechanism 103 supports a U-shaped inspection frame 108, the third driving mechanism is a first rotating shaft 109 rotatably supported on two side walls of the U-shaped inspection frame 108, the axis of the first rotating shaft 109 is the same as the X-axis, and the inspection platform 104 is supported on the first rotating shaft 109.

As shown in fig. 3, in this structure, the first driving mechanism 103 supports a U-shaped inspection frame, and the third driving mechanism is a first rotating shaft 109 rotatably supported on both side walls of the U-shaped inspection frame 108. That is, in this structure, the U-shaped detecting frame 108 provides a selective supporting frame to rotatably support the first rotating shaft 109 at both ends thereof, and then the first rotating shaft 109 can be rotated by a motor or other driving mechanism. Thereby achieving the purpose of rotation of the detection platform 104 around the X-axis.

Further, as shown in fig. 3, the fourth driving mechanism is a second rotating shaft 110 disposed on the first rotating shaft 109, and an axis of the second rotating shaft 110 is in the same direction as the Z axis; the second shaft 110 is disposed between the detecting platform 104 and the first shaft 109, and the detecting platform 104 is supported on the second shaft 110.

In this structure, as shown in fig. 3, the second rotating shaft 110 is disposed between the detecting platform 104 and the first rotating shaft 109, and the detecting platform 104 is supported on the second rotating shaft 110. That is, in this structure, the second rotating shaft 110 rotates to drive the detecting platform 104 to rotate around the Z-axis, so as to achieve the corresponding rotating purpose. The rotation of the second shaft 110 may be a motor or other driving mechanism, etc.

It should be noted that, in the above two embodiments, the application is not limited to the driving mechanism for the rotation of the first rotating shaft 109 and the second rotating shaft 110, and only can achieve the corresponding purpose of rotation, and both should be within the scope of the application.

In addition, it should be noted that, because the imaging accuracy of the system is micron to submicron, and the detection field of the imaging system is limited, for a measured object, it is necessary to divide the measured object into several regions for detection respectively. The implementation scheme is as follows: firstly, fixing a measured object and moving an imaging system; fixing the imaging system and moving the object to be measured; and combining the above 2 modes. That is, the above-mentioned translation and rotation modes can be moved in a combined manner according to specific situations, and finally the purpose of being most beneficial to imaging detection is achieved.

In addition, in an embodiment, as shown in fig. 2, the imaging device further includes a vibration isolation pad 111, and the machine base 101 supports the work machine 102 through the vibration isolation pad 111. Specifically, the vibration isolation pads 111 are provided in four directions of the working machine 102 for supporting and absorbing vibration, so as to provide stability for the working machine 102.

In particular, the depth of field of the imaging system is small (several micrometers to tens of micrometers). The vibration of the surrounding environment can affect the focusing of the imaging system, so that the shot image is in virtual focus and CRACK cannot be detected. Therefore, an air floatation shock insulation module is added for shock insulation.

Referring to fig. 4, 5 and 6, fig. 4 is a schematic structural diagram of an imaging component 200 of the defect inspection imaging device in fig. 2; FIG. 5 is a schematic optical path diagram of the imaging assembly 200 of FIG. 4; FIG. 6 is a schematic diagram of the annular light source 206 of the imaging assembly 200 of FIG. 4.

In any of the embodiments described above, further improvements are made to arrive at another embodiment of the present application. Specifically, as shown in fig. 4, the imaging section 200 includes a camera 201 and a lens 202 connected to the camera 201; the imaging device further comprises a camera 201 support connected with the camera 201, and the second driving mechanism 107 is fixedly connected with the camera 201 support. Specifically, a point light source interface 203 is arranged on the side wall of the lens 202, and a coaxial light source 204 is inserted into the point light source interface 203; the lens 202 is provided with a half mirror 205 in an inclined manner, so that light of the coaxial light source 204 is reflected by the half mirror 205 and irradiates the display screen 105 to be detected, and further, imaging light of the display screen 105 to be detected enters the camera 201 through the half mirror 205.

In the present application, since the defect size is small (width is 1-5 μm), the imaging system uses a microscopic imaging system, and the object to be measured is imaged by using a combined illumination mode of coaxial illumination and annular light dark field illumination, and the illumination mode is as shown in fig. 5.

Specifically, as shown in fig. 4 and 5, a point light source interface 203 is disposed on a side wall of the lens 202, and a coaxial light source 204 is inserted into the point light source interface 203; the lens 202 is provided with a half mirror 205 in an inclined manner, so that light of the coaxial light source 204 is reflected by the half mirror 205 and irradiates the display screen 105 to be detected, and further, imaging light of the display screen 105 to be detected enters the camera 201 through the half mirror 205. Below the coaxial light source 204, the lens 202 is further sleeved with an annular light source 206; the light of the annular light source 206 irradiates the display screen 105 to be detected in an inclined direction; as shown in FIG. 6, the annular light source 206 is provided with a plurality of annular partitioned light source blocks 207, and each annular partitioned light source block 207 can be controlled to be on or off individually.

In the above structure, since Crack is specifically directional: when the illumination direction of light is parallel to the Crack, the Crack is imaged weakly, and even the Crack is not imaged; when the illumination direction of the light is perpendicular to the Crack, the Crack imaging is obvious. In order to improve the detection rate of the Crack defect, as shown in fig. 6, the annular light is designed to be a partitioned design, that is, one annular light source 206 is divided into N independent regions, each region can independently control the on/off and the brightness adjustment, and meanwhile, the on/off control of any combination can be realized.

As shown in fig. 6, the light emitted from the annular light source 206 by the sub-regions is perpendicular to the extending direction of Crack, so that Crack (Crack) in the direction in the figure is easier to image, and the light from other sub-regions contributes less to the image of Crack (Crack), and the contrast of Crack image is reduced. Therefore, in order to better be compatible with Crack imaging in different extending directions, the more the partitions of the light source are, the better the partitions are, and simultaneously, in the detection process, each partition of the light source is respectively lighted up to image the detection area.

In addition, it should be noted that,

firstly, the imaging system uses a microscopic imaging system due to the small defect size (width 1-5 μm). The realization mode is that the area-array camera is matched with a high-power lens to realize the imaging of 0.05-1 micron to submicron order of optical resolution.

Secondly, in order to be compatible with the Crack imaging of various sizes and directions, a coaxial illumination and partition annular light illumination mode is used. The partitioned annular light source is divided into N independent small light source modules, and each module can be independently controlled to be on or off and can be randomly combined for lighting control. And the imaging rate of the Crack defects is improved, the Crack imaging contrast is improved, and the Crack defect detection is facilitated.

Thirdly, the imaging precision is micron to submicron due to the limited pixel number of the area-array camera, so that the detection field of view of the camera is limited. Therefore, an object to be measured needs to be divided into a plurality of regions for respective detection. The scheme is realized as shown in fig. 6, and the imaging system moves along the Z axis; on a Stage (Stage) on which the material to be measured is placed, the translation of X, Y, the rotation around the X axis and the pitching adjustment of the Stage (Stage) are controlled.

Fourthly, as the depth of field of the imaging system is smaller, a shock insulation scheme needs to be configured. In the scheme, air floatation shock insulation is used.

The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and the parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.

Reference throughout this specification to "embodiments," "some embodiments," "one embodiment," or "an embodiment," etc., means that a particular feature, component, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, appearances of the phrases "in various embodiments," "in some embodiments," "in at least one other embodiment," or "in an embodiment," or the like, throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, components, or characteristics may be combined in any suitable manner in one or more embodiments. Thus, without limitation, a particular feature, component, or characteristic illustrated or described in connection with one embodiment may be combined, in whole or in part, with a feature, component, or characteristic of one or more other embodiments. Such modifications and variations are intended to be included within the scope of the present application.

Moreover, those skilled in the art will appreciate that aspects of the present application may be illustrated and described in terms of several patentable species or situations, including any new and useful combination of processes, machines, manufacture, or materials, or any new and useful improvement thereon. Accordingly, various aspects of the present application may be embodied entirely in hardware, entirely in software (including firmware, resident software, micro-code, etc.) or in a combination of hardware and software. The above hardware or software may be referred to as "data block," module, "" engine, "" terminal, "" component, "or" system. Furthermore, aspects of the present application may be represented as a computer product, including computer readable program code, embodied in one or more computer readable media.

It is to be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The foregoing are merely exemplary embodiments of the present application and are presented to enable those skilled in the art to understand and practice the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions in the embodiments of the present application.

Claims

1. A defect detection imaging device is used for detecting the crack defect on a display screen and is characterized by comprising a machine table base, wherein a working machine table is supported by the machine table base; the first driving mechanism is arranged on the working machine table and can generate translational motion in a horizontal plane determined by an X axis and a Y axis; the first driving mechanism supports a detection platform which can move in a translation way along with the first driving mechanism, and a display screen to be detected can be placed on the detection platform;

2. The apparatus as claimed in claim 1, wherein the worktable further comprises a third driving mechanism, the third driving mechanism is connected to the inspection platform for driving the inspection platform to rotate around the X-axis.

3. The defect inspection imaging device of claim 2, wherein said work table further comprises a fourth driving mechanism, said fourth driving mechanism is connected to said inspection platform for driving said inspection platform to rotate around the Z-axis.

4. The apparatus as claimed in claim 3, wherein the first driving mechanism supports a U-shaped inspection frame, the third driving mechanism is a first rotating shaft rotatably supported on two sidewalls of the U-shaped inspection frame, the axis of the first rotating shaft is coaxial with the X-axis, and the inspection platform is supported on the first rotating shaft.

5. The defect detection imaging device according to claim 4, wherein said fourth driving mechanism is a second rotating shaft disposed on said first rotating shaft, and the axis of said second rotating shaft is in the same direction as said Z axis; the second rotating shaft is arranged between the detection platform and the first rotating shaft, and the detection platform is supported on the second rotating shaft.

6. The apparatus according to any of claims 1-5, further comprising a vibration isolation pad, wherein the machine base supports the work machine through the vibration isolation pad.

7. The defect inspection imaging device according to any one of claims 1 to 5, wherein said imaging means comprises a camera and a lens connected to the camera; the imaging device further comprises a camera support connected with the camera, and the second driving mechanism is fixedly connected with the camera support.

8. The defect detection imaging device according to claim 7, wherein the side wall of the lens is provided with a point light source interface, and the point light source interface is inserted with a coaxial light source; and a semi-transparent and semi-reflective mirror is obliquely arranged in the lens, so that light rays of the coaxial light source are reflected by the semi-transparent and semi-reflective mirror to irradiate on a display screen to be detected, and further imaging light rays of the display screen to be detected enter the camera through the semi-transparent and semi-reflective mirror.

9. The defect detection imaging device according to claim 8, wherein said lens further houses an annular light source below said coaxial light source; the light of the annular light source irradiates the display screen to be detected in an inclined direction; the annular light source is provided with a plurality of annular subarea light source blocks, and the annular subarea light source blocks can be independently controlled to be on or off.