CN213845228U - Device for inspecting position of silicon wafer - Google Patents

Abstract

The utility model provides a device of inspection silicon wafer position for carry out the inspection of silicon wafer position, thereby ensure the accuracy of silicon wafer position in the silicon wafer box. The device comprises a bottom plate, a bearing seat, an LED lamp box and a silicon wafer box fixing seat; the bottom plate is used for placing a bearing seat; the LED lamp box and the silicon wafer box fixing seat are placed on the bearing seat; the LED lamp box is used for observing the position of the silicon wafer in the silicon wafer box; the silicon wafer box fixing seat is used for fixing the silicon wafer box. The position of the silicon wafer in the silicon wafer box is required to be checked after the final cleaning process and before the product is packaged, and whether the silicon wafer box cover meets the packaging requirement is checked, so that the scratches of the silicon wafer due to dislocation and the silicon wafer box cover are reduced, and the yield of the product is improved.

Description

Device for inspecting position of silicon wafer

Technical Field

The utility model relates to a process for inspecting silicon wafers; specifically, an apparatus for inspecting the position of a silicon wafer in a silicon wafer cassette is designed.

Background

In recent years, the development of the electronic industry is rapidly advanced, and various portable electronic products such as smart phones, tablet computers and the like are integrated into the lives of general residents, so that the lives of people are more and more convenient. The development of the electronic industry has led to the development of the semiconductor integrated circuit industry. Silicon wafers produced by semiconductor processes can be widely used in various fields such as civilian, military, and biotechnology, and the yield of the wafers directly determines the quality of the final products, so that a lot of experimental studies are conducted in various fields of the materials and the production methods of the silicon wafers to ensure the quality.

During the silicon wafer processing, after the final cleaning process and before packaging and shipping, the silicon wafers in the silicon wafer box need to be inspected. The silicon wafer box comprises an upper cover, a flower basket and a lower cover. The flower basket is provided with clamping grooves for placing each silicon wafer independently, and a certain distance is kept between the clamping grooves, so that the silicon wafers are prevented from colliding with each other and being damaged. The silicon wafer box upper cover is provided with a clamping groove corresponding to the clamping basket, so that the silicon wafer is fixed in position, the silicon wafer is not easy to shift, and the silicon wafer is protected. The silicon wafer box can be provided with a certain number of silicon wafers, when workers finally load the silicon wafers, due to the fact that position errors of the silicon wafers are prone to occur in manual operation, abnormal phenomena such as silicon wafer lamination, dislocation and the like occur, the silicon wafers are damaged when the silicon wafer box shakes, and the yield of final products is affected. The silicon wafers are held in the silicon wafer cassette with each silicon wafer held in a corresponding pocket of the silicon wafer cassette. The apparatus is designed to more effectively inspect the position of the silicon wafer in the silicon wafer cassette, improve inspection efficiency, and reduce damage to products.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a device of inspection silicon wafer position can inspect effectively whether the position of silicon wafer in the silicon wafer box meets the requirements, reduces the silicon wafer because the scratch that lamination and dislocation arouse to improve the production yield of silicon wafer.

To achieve the above object, the present invention discloses an apparatus for inspecting a position of a silicon wafer, comprising:

a base plate;

a bearing seat arranged on the bottom plate;

an LED lamp box located between the bearing seat and the silicon wafer box fixing device;

a silicon wafer box fixing seat which is arranged on the LED lamp box.

Based on the foregoing, the utility model discloses an advantage and characteristics are whether the position of silicon wafer meets the requirements in the inspection silicon wafer box, use the device can be effectively and quick inspection silicon wafer box in the position of silicon wafer appear unusual circumstances such as lamination, dislocation, avoid the silicon wafer scratch to improve the product yield.

Drawings

Fig. 1 is a schematic front view of an apparatus for inspecting the position of a silicon wafer.

Fig. 2 is a schematic top view of an apparatus for inspecting the position of a silicon wafer.

Fig. 3 is a schematic side view of an apparatus for inspecting the position of a silicon wafer.

The reference numbers illustrate:

1 base plate

2 bearing seat

3 LED lamp box

4 silicon wafer box fixing seat

5 silicon wafer box

Detailed Description

Before final packaging and shipment of the silicon wafers, inspection is carried out, wherein the inspection comprises the steps of checking whether the positions of the silicon wafers in the silicon wafer box are accurate or not and whether the silicon wafer box cover is matched with the silicon wafers or not. When the silicon wafer position is inspected, the direction can be adjusted by the bearing seat, so that the silicon wafer position of different angles can be inspected.

The utility model discloses combine silicon wafer processing procedure technology needs, improve the mode of current inspection silicon wafer position, through this inspection device, can be when the position of inspection silicon wafer in the silicon wafer box, by original visual inspection, improve for using this inspection device. The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings.

Example (b): placing a silicon wafer box 5 to be inspected on a silicon wafer box fixing seat 4 through a clamping groove in the silicon wafer box fixing seat 4, connecting the silicon wafer box fixing seat 4 with an LED lamp box 3, enabling the bottom of the silicon wafer box 5 to be inspected to abut against the LED lamp box 3, connecting the LED lamp box 3 with a bearing seat 2, and placing the bearing seat 2 on a bottom plate 1; when examining silicon wafer position in the silicon wafer box 5, bearing frame 2 is rotatable for place LED lamp house 3 and the horizontal desktop on bearing frame 2 and form certain angle, make the light that the LED lamp shines in the LED lamp house 2 can be refracted to the silicon wafer box 5 that need inspect on, LED lamp house 3 chooses for use the black PVC material of adiacticity, thereby whether the light and shade through light in the LED lamp house 3 in the silicon wafer box 5 silicon wafer is in the draw-in groove position that corresponds.

The device for inspecting the position of the silicon wafer is provided with a bottom plate 1 for placing a bearing seat 2, and the bottom plate 1 needs to be inclined to a certain angle when the silicon wafer is inspected;

a plurality of clamping grooves are formed in a silicon wafer box fixing seat 4 of the device for checking the position of the silicon wafer, and the silicon wafer boxes 5 with different sizes are placed in the corresponding clamping grooves, so that the silicon wafer boxes 5 are matched with the silicon wafer boxes to achieve the fixing effect;

the device for inspecting the position of the silicon wafer is provided with a bearing seat 2, the bearing seat 2 can rotate in 360 degrees, different rotating directions can be adjusted according to inspection requirements, and the bearing seat 2 is connected with an LED lamp box 3 and a silicon wafer box fixer 4;

the device for inspecting the position of the silicon wafer is provided with an LED lamp box 3, wherein the LED lamp box comprises a certain number of LED lamps and provides certain light for inspecting the position of the silicon wafer in the silicon wafer box 5;

the LED lamp box 3 of the device for inspecting the position of the silicon wafer uses an opaque black PVC material to enhance the illumination effect during inspection;

the utility model discloses an inspection device combines current technology needs, has solved the problem of inspection silicon wafer position accuracy in the silicon wafer box. The device checks whether the silicon wafers in the silicon wafer box are stacked, dislocated or abnormal, can also check whether the position of the silicon wafer box meets the requirements of packaging and delivery, and has the advantages of wide use and check range and convenient use. The position of the silicon wafer in the silicon wafer box needs to be checked before the product is delivered and packaged after the final cleaning process, and the checking efficiency can be improved by using the device. The silicon wafer box is prevented from being shaken to cause damage to the silicon wafer, and the yield of final products is prevented from being influenced.

Claims (7)

1. An apparatus for inspecting the position of a silicon wafer for performing inspection of the position of the silicon wafer in a silicon wafer cassette, characterized in that the inspection apparatus comprises:

a base plate;

a bearing seat arranged on the bottom plate;

an LED lamp box located between the bearing seat and the silicon wafer box fixing device;

a silicon wafer box fixing seat which is arranged on the LED lamp box.

2. An apparatus for inspecting the position of a silicon wafer as set forth in claim 1, wherein the apparatus for inspecting the position of a silicon wafer has a base plate for placing the bearing holder, and the base plate is inclined to a certain angle when inspecting the position of a silicon wafer.

3. The apparatus for inspecting the position of a silicon wafer as set forth in claim 1, wherein said apparatus for inspecting the position of a silicon wafer has a bearing housing rotatable by 360 ° for adjusting the direction of inspecting the silicon wafer and carrying the LED lamp box and the silicon wafer box holder.

4. An apparatus for inspecting the position of a silicon wafer as set forth in claim 1, wherein said apparatus for inspecting the position of a silicon wafer has an LED lamp box, and the position of a silicon wafer in the silicon wafer box is observed and inspected by illuminating the LED lamp box.

5. The apparatus for inspecting the position of a silicon wafer as set forth in claim 1, wherein the LED lamp box of the apparatus for inspecting the position of a silicon wafer uses opaque black PVC material to enhance the illumination effect at the time of inspection.

6. An apparatus for inspecting the position of a silicon wafer as set forth in claim 1, wherein the apparatus for inspecting the position of a silicon wafer has a silicon wafer cassette holder in which a silicon wafer cassette to be inspected is placed to hold the silicon wafer cassette.

7. The apparatus for inspecting the position of a silicon wafer as set forth in claim 1, wherein the silicon wafer cassette holder of the apparatus for inspecting the position of a silicon wafer has a plurality of card slots therein, and the different-sized silicon wafer cassettes select the different-position card slots.

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