CN213402953U

CN213402953U - Micro resonator

Info

Publication number: CN213402953U
Application number: CN202022261968.3U
Authority: CN
Inventors: 郑泉水; 吴章辉; 向小健
Original assignee: Tsinghua University; Shenzhen Research Institute Tsinghua University
Current assignee: Tsinghua University; Shenzhen Research Institute Tsinghua University
Priority date: 2020-10-13
Filing date: 2020-10-13
Publication date: 2021-06-08
Anticipated expiration: 2030-10-13

Abstract

The utility model provides a micro-resonator, comprising a base, a driving part arranged in the base, an insulating layer arranged on the base and a sliding part arranged on the insulating layer, the sliding part and The insulating layer is in contact, and the sliding part is in contact with the atomically smooth surface of the bonding surface of the insulating layer, and a voltage is applied to the driving part, so that the sliding part can move horizontally on the insulating layer, and the sliding part and the driving part The relative position between them changes, the relative displacement of their movement is large, and the structure is adapted, so that the resonance function can be realized on the real micrometer scale. The resonant frequency of the resonator can be adjusted by adjusting the magnitude of the applied voltage. Due to the extremely low friction and no wear, lower driving voltage, extremely high service life and power handling capability can be achieved. The adjustment range is from 0 to 1000MHZ , can achieve 100% range frequency modulation, and long service life.

Description

Micro resonator

Technical Field

The utility model relates to a microelectronic technical field, concretely relates to microresonator.

Background

The resonator refers to an electronic component generating a resonance frequency, and mainly plays a role of frequency control. MEMS resonators are mechanical resonators that are fabricated on the basis of conventional semiconductor processes. Resonators have significant applications in the field of microelectronics, such as gyroscopes, accelerometers, filters, energy harvesters, clock signals, logic devices, and the like.

At present, the micro-resonator is divided into two types according to the principle: the quality factor of the electric micro-resonator is generally low, and the electric micro-resonator is difficult to apply to the field of high precision. In contrast, mechanical resonators, such as quartz resonators and micro-electromechanical system (MEMS) resonators, are based on linear elasticity. Quartz resonators are widely used due to their extremely high quality factor and extremely stable frequency. Quartz resonators are not compatible with micro-or nano-fabrication technology and are therefore difficult to integrate, creating serious limitations for applications in microsystems. While the MEMS resonator, because it produces displacement through strain, causes its relative displacement to be small, and the overall size is difficult to truly reduce to the order of micrometers.

Most electrical and mechanical resonators have fixed resonant frequencies and are difficult to tune. For example, a shift in the resonance frequency may be caused due to environmental or manufacturing errors, which may result in a resonator having poor characteristics. Therefore, resonators with tunable resonant frequencies are a way to improve performance uniformity and accuracy in order to achieve the desired frequency. Resonators with a wide range of tunable frequencies can be used as multiband filters, where one resonator can use one tunable resonator instead of a series of fixed frequency resonators to save cost, reduce volume and minimize equipment.

A wide range tunable resonator is expected to find wide application in the field of energy harvesting because it can adapt the resonant frequency to an external excitation frequency, which is typically changed more efficiently than a fixed resonant frequency resonator to harvest more energy. For logic devices and mechanical signal processing requiring signal tracking and frequency hopping, frequency tuning may need to be performed on a short time scale.

Several techniques have been proposed in the prior art to tune the resonance frequency of the resonator, but are currently based on conventional mechanical resonators, varying the stiffness by generating additional forces, piezoelectric, electrothermal or electrostatic principles. However, the resonators in the prior art have the disadvantages of narrow tunable resonance range and large energy consumption, and cannot achieve resonators with wide tunable resonance range.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a micro resonator to there is the narrow and big technical problem of energy consumption of tunable resonance scope in the syntonizer of solving among the prior art.

In order to achieve the above object, the utility model adopts the following technical scheme: the micro-resonator comprises a substrate, a driving part embedded in the substrate, an insulating layer laid on the substrate and a sliding part laid on the insulating layer, wherein the sliding part is in contact with the insulating layer, the joint surface of the sliding part and the insulating layer is in ultra-smooth contact, voltage is applied to the driving part towards the joint surface, and the sliding part can be driven by the driving part and can change the relative position of the sliding part and the driving part.

Further, the driving part includes a first driving part and a second driving part, and a voltage is applied between the first driving part and the second driving part to enable the sliding part to be driven to move in a horizontal direction in a plane.

Further, the first driving member and the second driving member are both driving electrodes.

Further, the insulating layer has a thickness of 2 to 100 nm.

Further, the first driving member and the second driving member are located at the same height, and a horizontal distance between the first driving member and the second driving member is 100 nanometers to 2 micrometers.

Further, the voltage applied to the driving part is adjustable, and the resonant frequency is adjusted from 0 to 1000 MHZ.

Further, the sliding component adopts a super-slip sheet, and at least one surface of the super-slip sheet is an atomically smooth surface.

Further, in the initial position, the slide member is aligned with all the drive members in the width direction, and the slide member simultaneously has a facing area with all the drive members.

Further, the first driving member and the second driving member are both longer than the sliding member.

The utility model provides a little syntonizer's beneficial effect lies in:

1. fundamentally changes MEMS device's motion mode, becomes the contact slidingtype from the suspension type vibrating, sets up drive unit in the basement inside to set up insulating layer and sliding part on the basement, form the super-slip pair between insulating layer and the sliding part, and can realize extremely low friction, the slip of wearless, can not take place the adhesion inefficacy because of the charge accumulation on the electrode, also can not take place "static actuation" phenomenon, can realize overlength life.

2. The voltage is applied to the driving part, so that the sliding part can horizontally slide on the insulating layer, the relative position between the sliding part and the driving part is changed, the relative displacement of the movement is large, the structure is adaptive, and the resonance function can be realized on a real micrometer scale. The resonance frequency of the resonator can be adjusted by adjusting the magnitude of the applied voltage, and due to the extremely low friction force and no abrasion, the low driving voltage, the extremely high service life and the power processing capacity can be realized, the adjustment range is from 0 to 1000MHZ, and the frequency modulation in the range of 100 percent can be realized.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a micro-resonator according to an embodiment of the present invention;

fig. 2 is a schematic top view of a microresonator provided by an embodiment of the present invention;

fig. 3 is a diagram illustrating a relationship between a driving force and a relative displacement of a sliding member of a micro-resonator according to an embodiment of the present invention.

Description of reference numerals:

1. a substrate; 2. a drive member; 3. an insulating layer; 4. a sliding member; 21. a first driving member; 22. a second driving member.

Detailed Description

The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.

Referring to fig. 1 and 2 together, a micro resonator according to the present invention will now be described. The micro-resonator comprises a substrate 1, a driving part 2 embedded in the substrate 1, an insulating layer 3 laid on the substrate 1 and a sliding part 4 arranged on the insulating layer 3, wherein the sliding part 4 is in contact with the insulating layer 3, and the driving part 2 and the sliding part 4 can be insulated through the insulating layer 3. The contact surfaces of the sliding component 4 and the insulating layer 3 are atomically smooth surfaces, ultra-smooth contact is realized between the sliding component 4 and the insulating layer 3, the sliding component 4 can slide on the surface of the insulating layer 3 with extremely low friction force and without abrasion, meanwhile, adhesion failure due to charge accumulation on an electrode can be avoided, the phenomenon of electrostatic attraction can be avoided, and the ultra-long service life can be realized.

Wherein, the sliding part 4 is generally a super-slip sheet, and at least one surface of the super-slip sheet is an atomically smooth surface. The ultra-sliding sheet is one part of an ultra-sliding pair, the insulating layer 3 forms the other part of the ultra-sliding pair, the ultra-sliding surfaces of the two contact ultra-sliding pairs are in ultra-sliding contact, the friction force is almost zero when the ultra-sliding pairs slide relatively, the friction coefficient is less than one thousandth, and the abrasion is zero.

Further, the substrate 1 is generally an insulating substrate 1 or a semiconductor substrate 1, and preferably a high-resistance silicon substrate 1. The insulating layer 3 is typically a nanoscale insulating layer 3, and the thickness d of the insulating layer 3 is controlled to be 2 to 100nm, so that the gap between the driving member 2 and the sliding member 4 can be sufficiently small, and the sliding member 4 can be placed on the insulating layer 3. In the initial position, the slide member 4 is aligned with all of the drive members 2 in the width direction, and the slide member 4 simultaneously has a facing area with all of the drive members 2. Thus, the excitation voltage can be kept small, and the sliding of the sliding member 4 can be driven.

Preferably, the first driving member 21 and the second driving member 22 are located at the same height, so as to meet the requirement of linear restoring force of the driving part 2, and the horizontal distance between the adjacent first driving member 21 and the second driving member 22 is 100 nanometers to 2 micrometers, and the distance needs to be smaller than the width of the sliding part 4, so as to ensure that the sliding part 4 has a facing area with the first driving member 21 and the second driving member 22.

Preferably, the length of each of the first driver 21 and the second driver 22 is greater than that of the sliding member 4. The sum of the lengths of the first driving part 21 and the gap is larger than the length of the sliding part 4, and the sum of the lengths of the second driving part 22 and the gap is larger than the length of the sliding part 4, so that the sliding part 4 can completely cover the first driving part 21 or the second driving part 22 during the movement, and the restoring force is nonlinear and greatly reduced.

Fig. 3 is a graph showing the relationship between the driving force of the driving member 2 to the sliding member 4 and the relative displacement of the sliding member 4, and curves are displacement relationship curves corresponding to the thicknesses d of the insulating layer 3 of 4nm, 20nm, 100nm and 500nm, and it is understood that the smaller the thickness d of the insulating layer 3, the more the theoretical prediction is satisfied, and the smaller the fringe effect is. Therefore, the smaller the thickness of the insulating layer 3, the better, the thickness thereof may be lower than 2 nm.

Further, a voltage is applied toward the driving part 2, the driving part 2 is a separate part that can be placed inside the substrate 1, the sliding part 4 can be driven to horizontally slide on the insulating layer 3 by a change in the electric field between the plurality of driving parts 2 and the sliding part 4, and the resonance frequency can be adjusted directly by adjusting the magnitude of the applied voltage.

The driving part 2 comprises a first driving member 21 and a second driving member 22, the first driving member 21 and the second driving member 22, preferably selected from driving electrodes, and a voltage is applied between the first driving member 21 and the second driving member 22, so that the sliding part 4 can be driven to slide in a horizontal direction in a plane. The moving principle is as follows:

a voltage V is applied between the first driver 21 and the second driver 22 such that C is formed between the first driver 21 and the sliding member 4₁C is formed between the second driver 22 and the sliding part 4₂Are related to the total electrostatic energy of the power supply system and to the position between the sliding parts 4. C can be changed by adjusting the magnitude of the voltage V applied between the first driver 21 and the second driver 22₁And C₂The two capacitors of (2) change the specific position of the sliding component 4, so that the resonance frequency of the resonator can be changed, and because the friction force is extremely low and has no abrasion, the low driving voltage, the high service life and the power processing capability can be realized, the adjustment range is from 0 to 1000MHZ, the frequency modulation in the range of 100% can be realized, and the service life is long.

As an alternative to the above embodiment, the driving part 2 may further include three or more driving parts, and a voltage is applied between any two driving parts to ensure that the sliding part 4 can stably slide on the insulating sheet, and the adjustment range of the resonant frequency may be larger than 1000 MHZ.

As an alternative to the above-described embodiment, the driving member 2 may not be a separate member provided inside the substrate 1, but may be an element capable of conducting electricity for electric charges injected toward the inside of the substrate 1.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.

Claims

1. A micro-resonator, comprising a base and a drive member arranged in the base, characterized in that: also comprising an insulating layer arranged on the substrate and a sliding member arranged on the insulating layer, the sliding member Contact with the insulating layer, and the contact surface between the sliding member and the insulating layer is in super-slip contact, and biasing is applied to the driving member, the two sides of the sliding member have a voltage difference, and the sliding member is driven. When the component moves, in the initial position, the sliding component is aligned with all the driving components in the width direction, and the sliding component has a facing area with all the driving components at the same time.

2. The microresonator according to claim 1, wherein the driving part comprises a first driving part and a second driving part, and a voltage is applied between the first driving part and the second driving part , so that the sliding member can be driven to move in the horizontal direction in the plane.

3. The microresonator of claim 2, wherein the first driving member and the second driving member are both driving electrodes.

4. The microresonator of claim 2, wherein the insulating layer has a thickness of 2 to 100 nanometers.

5. The micro-resonator of claim 2, wherein the first driving member and the second driving member are located at the same height, and the first driving member and the second driving member are horizontal The pitch is 100 nanometers to 2 micrometers.

6. The micro-resonator according to any one of claims 1 to 5, wherein the voltage applied to the driving component is adjustable, and the adjustment range of the resonance frequency is from 0 to 1000 MHZ.

7. The microresonator according to any one of claims 1 to 5, wherein the sliding member adopts a super-sliding sheet, and at least one surface of the super-sliding sheet is an atomically smooth surface.

8. The micro-resonator according to any one of claims 2 to 5, wherein the lengths of the first driving member and the second driving member are both longer than the sliding member.