CN212527248U - Automatic grinding and processing machine tool for semiconductor silicon rod - Google Patents

Abstract

The utility model provides an automatic grinding machine tool of semiconductor silicon rod, extend the base that just the level set up including controlling, the middle part top of base is equipped with fixture device and drive the anchor clamps drive arrangement of fixture device motion, unloader is installed to the left part front side of base, the middle part front side of base is equipped with the corase grind device that is used for the coarse grinding of silicon rod and is used for the correct grinding device to the silicon rod finish grinding respectively, just corase grind device with be equipped with work piece size detection device between the correct grinding device, the middle part rear side of base is in the correct grinding device is just to installing crystal orientation detection device in department, the middle part rear side of base is in vertical bistrique device is just to department's installation to the corase device. The utility model discloses a to the processing that carries out corase grind, correct grinding, V-arrangement groove on a lathe, increased work efficiency and practiced thrift the cost.

Description

Automatic grinding and processing machine tool for semiconductor silicon rod

Technical Field

The utility model relates to a silicon rod grinding technical field particularly is an automatic grinding machine tool of semiconductor silicon rod.

Background

The existing silicon rod grinding machine tool is used for manual feeding and discharging, the silicon rod is manually centered during feeding and discharging, only one grinding head is arranged on the silicon rod grinding machine tool for grinding, after coarse grinding is finished, the silicon rod subjected to coarse grinding is placed into a fine grinding machine tool for continuous grinding, then V-shaped groove machining (grinding Nas groove) is carried out on the silicon rod subjected to fine grinding by feeding, and the silicon rod is required to be subjected to size detection, re-centering and re-accurate clamping during working on each machine tool. Therefore, the labor intensity of workers is high, the grinding precision of the workpiece is not high due to manual centering and feeding and discharging, and the processing time is too long.

SUMMERY OF THE UTILITY MODEL

According to the technical problem, the automatic grinding and processing machine tool for the semiconductor silicon rod is provided. The utility model discloses with corase grind, correct grinding, V-arrangement groove processing, go up unloader, centring means, fixture device, work piece size detection all set up on a lathe, and reasonable its work flow that sets up, reduced operating time, very high work efficiency to realized mechanical automatic centering, automatic clamp is got, has reduced workman's working strength.

The utility model discloses a technical means as follows:

an automatic grinding and processing machine tool for a semiconductor silicon rod comprises a base which extends left and right and is horizontally arranged, a clamp device which clamps the silicon rod and drives the silicon rod to rotate around the axis of the silicon rod and a clamp driving device which drives the clamp device to move left and right are arranged above the middle part of the base, the left front side of the base is provided with a feeding and discharging device, the middle front side of the base is respectively provided with a coarse grinding device for coarse grinding of the silicon rod and a fine grinding device for fine grinding of the silicon rod, and a workpiece size detection device for detecting the size of the silicon rod is arranged between the coarse grinding device and the fine grinding device, a silicon rod crystal orientation detection device for detecting the crystal orientation of the silicon rod is arranged at the position, right opposite to the fine grinding device, on the rear side of the middle part of the base, and a vertical grinding head device for processing a V-shaped groove on the silicon rod is arranged at the position, right opposite to the rough grinding device, of the rear side of the middle part of the base.

Further, anchor clamps drive arrangement includes to be installed through the mounting bracket drive lead screw that the level extends about and in the base top, just drive lead screw's input is connected with driving motor and drive reduction gear, drive lead screw's below is equipped with fixes drive guide rail that the level extends about and on the mounting bracket, drive guide rail bottom be connected with drive guide rail sliding connection's drive slip table, the top of drive slip table with drive lead screw's output fixed connection, the bottom of drive slip table is connected with anchor clamps device.

Further, the fixture device comprises a fixture mounting frame fixed at the bottom of the fixture driving device, and a fixture lead screw which is horizontally arranged and extends leftwards and rightwards, a fixture motor for driving the fixture lead screw to work and a fixture reducer are arranged on the fixture mounting frame;

one end of the bottom of the clamp mounting frame is rotatably connected with a floating chuck, and the floating chuck is connected with a chuck motor fixed on the clamp mounting frame and the output end of a chuck speed reducer;

and a movable chuck is fixed at the bottom of the output end of the clamp screw rod.

Further, the mobile chuck comprises a chuck body, and the chuck body is provided with a plurality of edge nails which are uniformly distributed around the axis of the chuck body;

the floating chuck comprises a clamping body, a central clamping unit is arranged in the center of the end face of one side, away from the chuck motor and the chuck reducer, of the clamping body, and a plurality of evenly distributed edge clamping units are arranged around the central clamping unit;

the central clamping unit comprises a central guide sleeve, one end of the central guide sleeve penetrates into the clamping body, the other end of the central guide sleeve is fixedly connected with the end face of the clamping body through a sealing cover and a bolt, one end of a central push rod penetrates into the central guide sleeve, a central through hole matched with the end of the central push rod is processed at one end of the central guide sleeve in the clamping body, a shaft shoulder bulge in contact connection with the sealing cover is processed at the part of the central push rod in the central guide sleeve, and a pre-tightening disc spring group sleeved on the central push rod is arranged between the shaft shoulder bulge and the outer edge of the central through hole; a middle clamping nail is fixed at one end of the central push rod, which is far away from the pre-tightening disc spring group;

a central spherical surface entering the clamping body is fixedly installed at one end, far away from the central clamping unit, of the clamping body, a floating support plate is arranged between the central spherical surface and the central clamping unit, a spherical surface groove matched with the central spherical surface is machined at one side, close to the central spherical surface, of the floating support plate, the central spherical surface is arranged in the spherical surface groove, and limiting surfaces matched with the edge clamping units in number are machined at the outer edge of the spherical surface groove;

the edge part clamping unit comprises an edge part guide sleeve, one end of the edge part guide sleeve penetrates into the clamping body, the other end of the edge part guide sleeve is fixedly connected with the clamping body, one end of an edge part push rod penetrates through the edge part guide sleeve, an edge part spherical surface is processed at the end of the edge part push rod and is in contact connection with the limiting surface, an edge part pre-tightening spring sleeved on the edge part push rod is arranged between one side of the edge part spherical surface, away from the limiting surface, and the outer edge of one end of the edge part guide sleeve in the clamping body, and the other end of the edge part push rod is arranged outside the clamping body and is fixedly provided with an edge part clamping nail;

the distance between one end of the central push rod outside the clamping body and the clamping body is greater than the distance between one end of the edge push rod outside the clamping body and the clamping body;

and a floating gap is arranged between the floating support plate and the central guide sleeve.

Further, the feeding and discharging device comprises a conveying mechanism which is arranged on the base and extends forwards and backwards, and a centering device which is arranged on the conveying mechanism and is used for centering and radially clamping the silicon rod;

the transportation mechanism comprises a transportation rail which is horizontally arranged and extends forwards and backwards, a transportation sliding table which is connected with the transportation rail in a sliding mode is arranged on the transportation rail, a transportation screw which is horizontally arranged and extends forwards and backwards is fixed on the base, the input end of the transportation screw is connected with a transportation motor and a transportation speed reducer, and the output end of the transportation screw is fixedly connected with the bottom of the transportation sliding table;

centring means is including fixing the centering platform at transportation slip table top, install centering lead screw and the drive that the level set up and extend around on the centering platform centering lead screw work's centering motor and centering reduction gear, the front portion and the rear portion of the lead screw of centering lead screw have soon to opposite screw thread, the front portion and the rear portion of the lead screw of centering lead screw have respectively with the lead screw matched with centering lead screw's of centering lead screw output, the top of the output of centering lead screw is fixed with the clamp splice that has V type breach, two be provided with between the clamp splice with centering platform fixed connection and top have the silicon rod standing groove of V type breach.

Further, the rough grinding device, the fine grinding device and the vertical grinding head device respectively comprise a fixed slide rail, a movable sliding table, a grinding lead screw, a feeding motor and a feeding speed reducer, wherein the fixed slide rail is horizontally arranged and extends forwards and backwards, the movable sliding table is arranged on the fixed slide rail and is connected with the fixed slide rail in a sliding manner, the grinding lead screw drives the movable sliding table to move along the fixed slide rail, and the feeding motor and the feeding speed reducer drive the grinding lead screw to work;

a movable sliding table of the coarse grinding device is provided with a coarse grinding head for coarse grinding of the silicon rod, and the axis of the coarse grinding head is horizontally arranged and extends forwards and backwards;

a vertical grinding head for grinding the V-shaped groove on the silicon rod is arranged on a moving sliding table of the vertical grinding head device, and the axis of the vertical grinding head is vertically arranged;

install the stand of vertical setting on the removal slip table of correct grinding device, just sliding connection has the correct grinding bistrique and the drive that is used for the correct grinding silicon rod on the stand follow the correct grinding bistrique the correct grinding cylinder that the stand reciprocated, just the axis level of correct grinding bistrique sets up and extends around.

Further, the workpiece size detection device comprises a detection head and a driving cylinder for driving the detection head to horizontally move back and forth.

In the use state: the silicon rod level and the placing that extends about just are in centering platform's silicon rod standing groove, and the transportation lead screw drives centering platform moves backward, and centering lead screw rotates, makes two the clamp splice moves to the silicon rod direction simultaneously, realizes pressing from both sides tightly and centering. And then a driving lead screw in the clamp driving device drives the driving sliding table to move to the upper part of the silicon rod, and the clamp lead screw drives the movable chuck to move towards the floating chuck, so that the silicon rod is clamped. Then the clamp lead screw drives the silicon rod to move to the workpiece size detection device for detection, the driving cylinder drives the detection head to detect the outer diameter size of the silicon rod, then the clamp lead screw drives the silicon rod to move to the coarse grinding device, the grinding lead screw drives the coarse grinding head to perform radial grinding, the clamp lead screw performs axial reciprocating motion (left and right), the chuck motor and the chuck reducer drive the chuck to uniformly rotate around the axis of the chuck motor, and coarse grinding of the whole outer surface of the silicon rod is achieved. After the coarse grinding is finished, the fixture lead screw drives the silicon rod to move to the workpiece size detection device for further detection, then the fixture lead screw drives the silicon rod to move to the fine grinding device, the fine grinding head achieves position adjustment under the driving of the fine grinding cylinder and the grinding lead screw, and then the silicon rod is finely ground. And after the finish grinding is finished, carrying out final size detection, after the silicon rod is qualified, driving the silicon rod to a silicon rod crystal orientation detection device by the fixture lead screw, carrying out crystal orientation detection on the silicon rod after the finish grinding, and determining that the silicon rod is driven to a vertical grinding head device by the fixture lead screw after the crystal orientation is finished to carry out V-shaped groove processing. And then the clamp screw conveys all the processed silicon rods back to the silicon rod placing groove, and then blanking is carried out to complete action circulation.

Compared with the prior art, the utility model has the advantages of it is following:

1. the utility model discloses a machinery automatic centering, material loading unloading, automatic clamp are got, have reduced workman's working strength.

2. The utility model discloses a to the processing that carries out corase grind, correct grinding, V-arrangement groove on a lathe, increased work efficiency.

3. The device saves cost, and only comprises a feeding and discharging device, a clamp driving device, a silicon rod crystal orientation detection device and a workpiece size detection device on one machine tool for rough grinding, fine grinding and V-shaped groove processing.

4. The silicon rod is accurately clamped by matching the floating chuck and the movable chuck, and the coincidence of the axis of the silicon rod and the axis of the chuck is ensured.

Based on the reason, the utility model discloses can extensively promote in fields such as silicon rod grinding.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.

Fig. 1 is a three-dimensional view of an automatic grinding and processing machine tool for a semiconductor silicon rod according to an embodiment of the present invention (removing a fixture device and a fixture driving device).

Fig. 2 is a front view of an automatic grinding machine tool for a semiconductor silicon rod according to an embodiment of the present invention.

Fig. 3 is a side view of an automatic grinding machine tool for a silicon rod of a semiconductor according to an embodiment of the present invention.

Fig. 4 is a side view and a top view of an automatic grinding and processing machine tool for a semiconductor silicon rod according to an embodiment of the present invention.

Fig. 5 is a front view of a driving device of a clamp according to an embodiment of the present invention.

Fig. 6 is a left side view of the centering device according to the embodiment of the present invention.

Fig. 7 is a schematic view of a floating clamp according to an embodiment of the present invention.

In the figure:

1. a base;

2. a clamp device; 201. a clamp mounting bracket; 202. a clamp screw; 203. a clamp motor and a clamp reducer; 204. a chuck motor and a chuck reducer; 205. moving the chuck; 206. a chuck body; 207. edge clamping nails;

3. a jig driving device; 301. a mounting frame; 302. driving a lead screw; 303. a drive motor and a drive reducer; 304. a drive rail; 305. driving the sliding table;

4. a loading and unloading device; 41. a transport mechanism; 411. a transportation track; 412. a transportation sliding table; 413. transporting the lead screw; 414. a transport motor and a transport decelerator; 42. a centering device; 421. a centering platform; 422. A centering lead screw; 423. a centering motor and a centering reducer; 424. a clamping block; 425. a silicon rod placing groove;

5. a rough grinding device; 501. fixing the slide rail; 502. moving the sliding table; 503. grinding the lead screw; 504. a feed motor and a feed reducer; 505. coarsely grinding a grinding head;

6. a finish grinding device; 601. a column; 602. finely grinding the grinding head; 603. a fine grinding cylinder;

7. a workpiece size detection device; 701. a detection head; 702. a driving cylinder;

8. a silicon rod crystal orientation detection device;

9. a vertical grinding head device; 901. a vertical grinding head;

10. a floating chuck; 1010. a clamping body; 1020. a central clamping unit; 1021. a central guide sleeve; 1022. sealing the cover; 1023. a center push rod; 1024. a central through hole; 1025. the shaft shoulder is raised; 1026. pre-tightening the disc spring group; 1027. the middle part is clamped by a nail; 1030. an edge clamping unit; 1031. an edge guide sleeve; 1032. An edge push rod; 1033. spherical surface of edge part; 1034. the edge part pre-tightening spring; 1035. edge clamping nails; 1040. a central spherical surface; 1050. a floating support plate; 1051. a limiting surface; 1060. a floating gap;

Detailed Description

It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

Unless specifically stated otherwise, the relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any specific values in all examples shown and discussed herein are to be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the orientation words such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom", etc. are usually based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and in the case of not making a contrary explanation, these orientation words do not indicate and imply that the device or element in question must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the scope of the present invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.

Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and if not stated otherwise, the terms have no special meaning, and therefore, the scope of the present invention should not be construed as being limited.

As shown in figures 1-7, an automatic grinding machine tool for semiconductor silicon rods comprises a base 1 extending horizontally, a silicon rod clamping device 2 and a clamp driving device 3 are arranged above the middle of the base 1, the silicon rod clamping device 2 drives the silicon rod to rotate around the axis of the silicon rod clamping device 2, the clamp driving device 3 drives the clamp device 2 to move left and right, a feeding and discharging device 4 is arranged on the front side of the left portion of the base 1, a coarse grinding device 5 used for coarse grinding the silicon rod and a fine grinding device 6 used for fine grinding the silicon rod are respectively arranged on the front side of the middle of the base 1, a workpiece size detection device 7 used for detecting the size of the silicon rod is arranged between the coarse grinding device 5 and the fine grinding device 6, a silicon rod crystal orientation detection device 8 used for detecting the crystal orientation of the silicon rod is arranged right opposite to the fine grinding device 6, and a vertical grinding head device 8 used for processing V-shaped grooves on the silicon rod is arranged right opposite to the coarse grinding device 5 9.

Further, anchor clamps drive arrangement 3 includes and installs through mounting bracket 301 drive lead screw 302 that the level extends about and above base 1, just drive lead screw 302's input is connected with driving motor and drive reduction gear 303, the below of drive lead screw 302 is equipped with fixes drive guide rail 304 that the level extends about and on mounting bracket 301, drive guide rail 304 bottom be connected with drive guide rail 304 sliding connection's drive slip table 305, the top of drive slip table 305 with the output fixed connection of drive lead screw 302, the bottom of drive slip table 305 is connected with anchor clamps device 2.

Further, the clamp device 2 comprises a clamp mounting frame 201 fixed at the bottom of the clamp driving device 3, and a clamp screw 202 horizontally arranged and extending from left to right, a clamp motor driving the clamp screw 202 to work and a clamp reducer 203 are mounted on the clamp mounting frame 201;

one end of the bottom of the clamp mounting frame 201 is rotatably connected with a floating clamp 10, and the floating clamp 10 is connected with a clamp motor fixed on the clamp mounting frame 20 and the output end of a clamp reducer 204;

a movable chuck 205 is fixed at the bottom of the output end of the clamp screw 202.

The moving chuck 205 comprises a chuck body 206, and one side of the chuck body 206 has a plurality of edge nails 207 uniformly distributed around the axis of the chuck body 206;

the floating chuck 10 comprises a clamping body 1010, a central clamping unit 1020 is arranged at the center of one side end surface of the clamping body 1010 far away from the chuck motor and the chuck reducer 203, and three evenly distributed edge clamping units 1030 are arranged around the central clamping unit 1020;

the central clamping unit 1020 comprises a central guide sleeve 1021 with one end penetrating into the clamping body 1010, the other end of the central guide sleeve 1021 is fixedly connected with the end face of the clamping body 1010 through a sealing cover 1022 and a bolt, one end of a central push rod 23 penetrates into the central guide sleeve 21, a central through hole 1024 matched with the end of the central push rod 23 is processed at one end of the clamping body 1010 of the central guide sleeve 21, a shoulder protrusion 1025 in contact connection with the sealing cover 1022 is processed at the part of the central push rod 1023 in the central guide sleeve 1021, and a pre-tightening disc spring set 1026 sleeved on the central push rod 1023 is arranged between the shoulder protrusion 1025 and the outer edge of the central through hole 1024;

a central spherical surface 1040 entering the clamping body 1010 is fixedly mounted at one end of the clamping body 1010 far away from the central clamping unit 1020, one end of the central spherical surface 1040 far away from the clamping body 1010 is rotatably connected with the clamp mounting frame 201, a floating support plate 1050 is arranged between the central spherical surface 1040 and the central clamping unit 1020, a spherical groove matched with the central spherical surface 1040 is machined at one side of the floating support plate 1050 close to the central spherical surface 1040, the central spherical surface 1040 is arranged in the spherical groove, and limiting surfaces 1051 matched with the edge clamping units 1030 in number are machined at the outer edge of the spherical groove;

the edge clamping unit 1030 comprises an edge guide sleeve 1031, one end of the edge guide sleeve 1031 penetrates into the clamping body 1010, the other end of the edge guide sleeve 1031 is fixedly connected with the clamping body 1010, one end of an edge push rod 1032 penetrates through the edge guide sleeve 1031, an edge spherical surface 1033 is machined at the end of the edge push rod 1032, the edge spherical surface 1033 is in contact connection with the limiting surface 1051, an edge pre-tightening spring 1034 sleeved on the edge push rod 1032 is arranged between one side of the edge spherical surface 1033, far away from the limiting surface 1051, and the outer edge of one end of the edge guide sleeve 1031 in the clamping body 1010, and the other end of the edge push rod 1032 is arranged outside the clamping body 1010.

The distance between the end of the center push bar 1023 outside the clamping body 1010 and the clamping body 1010 is greater than the distance between the end of the side push bar 1032 outside the clamping body 1010 and the clamping body 1010, about 2 mm.

The center push bar 1023 and the edge push bar 1032 are fixed with a middle clamping nail 1027 and an edge clamping nail 1035 at one ends outside the clamping body 1010, respectively.

A floating gap 1060 is provided between the floating support plate 1050 and the center guide sleeve 1021.

The floating support plate 1050 is clamped to the central spherical surface 1040 by the plurality of edge pre-tightening springs 1034 pushing the edge spherical surface 1033.

Further, the loading and unloading device 4 comprises a conveying mechanism 41 which is installed on the base 1 and extends forwards and backwards, and a centering device 42 which is arranged on the conveying mechanism 41 and is used for centering and radially clamping the silicon rod;

the transportation mechanism 41 comprises a transportation track 411 which is horizontally arranged and extends forwards and backwards, a transportation sliding table 412 which is connected with the transportation track 411 in a sliding manner is arranged on the transportation track 411, a transportation screw 413 which is horizontally arranged and extends forwards and backwards is fixed on the base 1, the input end of the transportation screw 413 is connected with a transportation motor and a transportation reducer 414, and the output end of the transportation screw 413 is fixedly connected with the bottom of the transportation sliding table 412;

centering device 42 is including fixing the centering platform 421 at transportation slip table 412 top, install centering lead screw 422 and the drive that the level set up and extend around on the centering platform 421 centering lead screw 422 work and centering reduction gear 423, the front portion and the rear portion of centering lead screw 422's lead screw have soon to opposite screw, the front portion and the rear portion of centering lead screw 422's lead screw have respectively with centering lead screw 422's lead screw matched with centering lead screw 422's output, the top of centering lead screw 422's output is fixed with the clamp splice 424 that has the V type breach, two be provided with between the clamp splice 424 with centering platform 421 fixed connection and top have the silicon rod standing groove 425 of the V type breach.

Further, each of the rough grinding device 5, the finish grinding device 6 and the vertical grinding head device 9 includes a fixed slide rail 501 horizontally arranged and extending back and forth, a movable sliding table 502 mounted on the fixed slide rail 501 and slidably connected with the fixed slide rail 501, a grinding lead screw 503 driving the movable sliding table 502 to move along the fixed slide rail 501, and a feeding motor and a feeding reducer 504 driving the grinding lead screw 503 to work;

a rough grinding head 505 for roughly grinding the silicon rod is arranged on a movable sliding table 502 of the rough grinding device 5, and the axis of the rough grinding head 505 is horizontally arranged and extends forwards and backwards;

a vertical grinding head 901 for grinding a V-shaped groove on the silicon rod is arranged on the movable sliding table 502 of the vertical grinding head device 9, and the axis of the vertical grinding head 901 is vertically arranged;

install the stand 601 of vertical setting on accurate grinding device 6's the removal slip table 502, just sliding connection has accurate grinding head 602 and the drive that is used for the accurate grinding silicon rod on stand 601 accurate grinding head 602 follows the accurate grinding cylinder 603 that stand 601 reciprocated, just the axis level of accurate grinding head 602 sets up and extends around.

Further, the workpiece size detection device 7 includes a detection head 701 and a drive cylinder 702 that drives the detection head 701 to move horizontally back and forth.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.

Claims (7)

1. An automatic grinding and processing machine tool for a semiconductor silicon rod comprises a base which extends left and right and is horizontally arranged, a clamp device which clamps the silicon rod and drives the silicon rod to rotate around the axis of the silicon rod and a clamp driving device which drives the clamp device to move left and right are arranged above the middle part of the base, a feeding and discharging device is arranged on the front side of the left part of the base, it is characterized in that the front side of the middle part of the base is respectively provided with a coarse grinding device for coarse grinding of the silicon rod and a fine grinding device for fine grinding of the silicon rod, and a workpiece size detection device for detecting the size of the silicon rod is arranged between the coarse grinding device and the fine grinding device, a silicon rod crystal orientation detection device for detecting the crystal orientation of the silicon rod is arranged at the position, right opposite to the fine grinding device, on the rear side of the middle part of the base, and a vertical grinding head device for processing a V-shaped groove on the silicon rod is arranged at the position, right opposite to the rough grinding device, of the rear side of the middle part of the base.

2. The automatic grinding and processing machine tool for the silicon rods of semiconductors according to claim 1, characterized in that the fixture driving device comprises a driving lead screw installed through a mounting rack above and horizontally extending from left to right of the base, the input end of the driving lead screw is connected with a driving motor and a driving reducer, the lower part of the driving lead screw is provided with a driving guide rail fixed on the mounting rack and horizontally extending from left to right, the bottom of the driving guide rail is connected with a driving sliding table connected with the driving guide rail in a sliding manner, the top of the driving sliding table is fixedly connected with the output end of the driving lead screw, and the bottom of the driving sliding table is connected with the fixture device.

3. The automatic grinding and processing machine tool for the silicon rods of the semiconductor as claimed in claim 1, wherein the clamp device comprises a clamp mounting frame fixed at the bottom of the clamp driving device, and a horizontally arranged clamp screw extending from left to right, a clamp motor driving the clamp screw and a clamp reducer are mounted on the clamp mounting frame;

one end of the bottom of the clamp mounting frame is rotatably connected with a floating chuck, and the floating chuck is connected with a chuck motor fixed on the clamp mounting frame and the output end of a chuck speed reducer;

and a movable chuck is fixed at the bottom of the output end of the clamp screw rod.

4. The automatic grinding and processing machine tool for the silicon rod as claimed in claim 3, wherein the movable chuck comprises a chuck body, and the chuck body is provided with a plurality of edge nails uniformly distributed around the axis of the chuck body;

the floating chuck comprises a clamping body, a central clamping unit is arranged in the center of the end face of one side, away from the chuck motor and the chuck reducer, of the clamping body, and a plurality of evenly distributed edge clamping units are arranged around the central clamping unit;

the central clamping unit comprises a central guide sleeve, one end of the central guide sleeve penetrates into the clamping body, the other end of the central guide sleeve is fixedly connected with the end face of the clamping body through a sealing cover and a bolt, one end of a central push rod penetrates into the central guide sleeve, a central through hole matched with the end of the central push rod is processed at one end of the central guide sleeve in the clamping body, a shaft shoulder bulge in contact connection with the sealing cover is processed at the part of the central push rod in the central guide sleeve, and a pre-tightening disc spring group sleeved on the central push rod is arranged between the shaft shoulder bulge and the outer edge of the central through hole; a middle clamping nail is fixed at one end of the central push rod, which is far away from the pre-tightening disc spring group;

a central spherical surface entering the clamping body is fixedly installed at one end, far away from the central clamping unit, of the clamping body, a floating support plate is arranged between the central spherical surface and the central clamping unit, a spherical surface groove matched with the central spherical surface is machined at one side, close to the central spherical surface, of the floating support plate, the central spherical surface is arranged in the spherical surface groove, and limiting surfaces matched with the edge clamping units in number are machined at the outer edge of the spherical surface groove;

the edge part clamping unit comprises an edge part guide sleeve, one end of the edge part guide sleeve penetrates into the clamping body, the other end of the edge part guide sleeve is fixedly connected with the clamping body, one end of an edge part push rod penetrates through the edge part guide sleeve, an edge part spherical surface is processed at the end of the edge part push rod and is in contact connection with the limiting surface, an edge part pre-tightening spring sleeved on the edge part push rod is arranged between one side of the edge part spherical surface, away from the limiting surface, and the outer edge of one end of the edge part guide sleeve in the clamping body, and the other end of the edge part push rod is arranged outside the clamping body and is fixedly provided with an edge part clamping nail;

the distance between one end of the central push rod outside the clamping body and the clamping body is greater than the distance between one end of the edge push rod outside the clamping body and the clamping body;

and a floating gap is arranged between the floating support plate and the central guide sleeve.

5. The automatic grinding and processing machine tool for the silicon rod of the semiconductor as recited in claim 1, wherein the loading and unloading device comprises a transport mechanism mounted on the base and extending forwards and backwards and a centering device arranged on the transport mechanism for centering and radially clamping the silicon rod;

the transportation mechanism comprises a transportation rail which is horizontally arranged and extends forwards and backwards, a transportation sliding table which is connected with the transportation rail in a sliding mode is arranged on the transportation rail, a transportation screw which is horizontally arranged and extends forwards and backwards is fixed on the base, the input end of the transportation screw is connected with a transportation motor and a transportation speed reducer, and the output end of the transportation screw is fixedly connected with the bottom of the transportation sliding table;

centring means is including fixing the centering platform at transportation slip table top, install centering lead screw and the drive that the level set up and extend around on the centering platform centering lead screw work's centering motor and centering reduction gear, the front portion and the rear portion of the lead screw of centering lead screw have soon to opposite screw thread, the front portion and the rear portion of the lead screw of centering lead screw have respectively with the lead screw matched with centering lead screw's of centering lead screw output, the top of the output of centering lead screw is fixed with the clamp splice that has V type breach, two be provided with between the clamp splice with centering platform fixed connection and top have the silicon rod standing groove of V type breach.

6. The automatic grinding and processing machine tool for the silicon rods of the semiconductor of claim 1, wherein the rough grinding device, the fine grinding device and the vertical grinding head device comprise a fixed slide rail, a movable sliding table, a grinding screw, a feeding motor and a feeding reducer, the fixed slide rail is horizontally arranged and extends forwards and backwards, the movable sliding table is mounted on the fixed slide rail and is connected with the fixed slide rail in a sliding manner, the grinding screw drives the movable sliding table to move along the fixed slide rail, and the feeding motor and the feeding reducer drive the grinding screw to work;

a movable sliding table of the coarse grinding device is provided with a coarse grinding head for coarse grinding of the silicon rod, and the axis of the coarse grinding head is horizontally arranged and extends forwards and backwards;

a vertical grinding head for grinding the V-shaped groove on the silicon rod is arranged on a moving sliding table of the vertical grinding head device, and the axis of the vertical grinding head is vertically arranged;

install the stand of vertical setting on the removal slip table of correct grinding device, just sliding connection has the correct grinding bistrique and the drive that is used for the correct grinding silicon rod on the stand follow the correct grinding bistrique the correct grinding cylinder that the stand reciprocated, just the axis level of correct grinding bistrique sets up and extends around.

7. The automatic grinding and processing machine tool for the silicon rod of the semiconductor as claimed in claim 1, wherein the workpiece size detection device comprises a detection head and a driving cylinder for driving the detection head to move horizontally back and forth.

Images