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CN212378945U - Pressure measuring device using GMR giant magnetoresistance effect - Google Patents

Pressure measuring device using GMR giant magnetoresistance effect Download PDF

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Publication number
CN212378945U
CN212378945U CN202021408759.0U CN202021408759U CN212378945U CN 212378945 U CN212378945 U CN 212378945U CN 202021408759 U CN202021408759 U CN 202021408759U CN 212378945 U CN212378945 U CN 212378945U
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China
Prior art keywords
substrate
giant magnetoresistance
magnetoresistance effect
support ring
diaphragm
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CN202021408759.0U
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Chinese (zh)
Inventor
胡小炳
何必胥
陈显锋
张卫航
林庆枢
林庆维
林庆俊
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Shanghai Prevision Automotive Sensor Co ltd
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Shanghai Prevision Automotive Sensor Co ltd
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Abstract

The utility model discloses a pressure measuring device utilizing GMR giant magnetoresistance effect, which comprises an upper shell and a lower shell which are connected together; a plug terminal is arranged in the upper shell; a support ring is arranged at the joint of the upper shell and the lower shell, and a substrate is arranged at the top of the support ring; the upper surface of the substrate is provided with a substrate terminal, and the substrate terminal is connected with the plug terminal through an electric connecting piece; the lower surface of the substrate is provided with a giant magnetoresistance film, the bottom of the support ring is provided with a groove, a diaphragm is assembled in the groove, and the middle part of the upper surface of the diaphragm is provided with a permanent magnet; and a sealing ring is arranged between the diaphragm and the lower shell. The utility model discloses the resistance value that utilizes huge magneto resistor can produce the principle of violent change under faint magnetic field variation and measure, and the pressure measurement huge magneto resistance effect of this structure can make the sensitivity of sensor improve 1-2 orders of magnitude, and temperature characteristic is good moreover, and the linearity is good.

Description

Pressure measuring device using GMR giant magnetoresistance effect
Technical Field
The utility model relates to a pressure measurement device field particularly, relates to an utilize pressure measurement device of GMR giant magnetoresistance effect.
Background
The pressure sensor is the most commonly used sensor in industrial practice, is widely applied to various industrial automatic control environments, and relates to a plurality of lines such as water conservancy and hydropower, railway traffic, intelligent buildings, production automatic control, aerospace, military industry, petrifaction, oil wells, electric power, ships, machine tools, pipelines and the like.
The pressure sensor is used for measuring by realizing power-electricity conversion by a detection device, and the sensitivity and the resolution of the pressure sensor are very important. The existing pressure sensor has the defects that the indexes such as the detection sensitivity, the resolution ratio and the like reach the limit state of the detection of a sensitive area due to the miniaturization and the integration, so that the further improvement of the detection precision of the pressure sensor is limited, and the requirements of modern military and civil equipment are difficult to meet.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an utilize GMR giant magnetoresistance effect's pressure measurement device has solved the problem of current product.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a pressure measuring device using GMR giant magnetoresistance effect includes an upper case and a lower case connected together; a plug terminal is arranged in the upper shell; the method is characterized in that: a support ring is arranged at the joint of the upper shell and the lower shell, and a substrate is arranged at the top of the support ring; the upper surface of the substrate is provided with a substrate terminal, and the substrate terminal is connected with the plug terminal through an electric connecting piece; the lower surface of the substrate is provided with a giant magnetoresistance film, the bottom of the support ring is provided with a groove, a diaphragm is assembled in the groove, and the middle part of the upper surface of the diaphragm is provided with a permanent magnet; and a sealing ring is arranged between the diaphragm and the lower shell.
Preferably, the substrate terminal is installed in a circular hole reserved in the substrate and connected between the giant magnetoresistance film and the electrical connector.
Preferably, the electrical connector is a flexible circuit board made of PI material.
Preferably, the substrate is a circuit board made of a ceramic material, a plastic material, a metal material or an FR material.
Preferably, the giant magnetoresistance film is positioned and bonded on the lower surface of the substrate by an adhesive.
Preferably, the giant magnetoresistance film is packaged in an IC chip and positioned on the lower surface of the substrate through a soldering process.
Preferably, the support ring is annular, and is made of ferrous material with good magnetic permeability.
Owing to adopted above-mentioned technical scheme, compare with prior art, the beneficial effects of the utility model are that:
the utility model relates to an use GMR giant magnetoresistance film and based on the pressure measurement device of GMR giant magnetoresistance effect, the resistance value that utilizes giant magnetoresistance can produce the principle of violent change under faint magnetic field variation and measure, the pressure measurement giant magnetoresistance effect of this structure can make the sensitivity of sensor improve 1-2 orders of magnitude, and temperature characteristic is good moreover, and the linearity is good.
Drawings
Fig. 1 is a schematic cross-sectional view of the first embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
As shown in fig. 1, the pressure measuring device using the GMR giant magnetoresistance effect includes an upper case 1 and a lower case 9 coupled together. A plug terminal 2 is provided in the upper case 1. The upper shell, the lower shell and the plug terminal are made of the prior art, and the material, the action and the position relation belong to the prior art and are not described again.
A support ring 10 is arranged at the joint of the upper shell and the lower shell, and a base plate 4 is arranged on the top of the support ring 10. The upper surface of the substrate 4 is provided with a substrate terminal 11, and the substrate terminal 11 is connected with the plug terminal through an electric connecting piece.
The lower surface of the substrate 4 is provided with a giant magnetoresistance film 5, the bottom of the support ring 10 is provided with a groove, a diaphragm 7 is assembled in the groove, and the middle part of the upper surface of the diaphragm 7 is provided with a permanent magnet 6. And a sealing ring 8 is arranged between the diaphragm and the lower shell.
The specific design of each part is as follows:
the substrate terminal is arranged in a reserved round hole of the substrate and connected between the giant magnetoresistance film and the electric connecting piece.
The electric connector uses a PI flexible circuit board.
The substrate can be made of hard materials such as ceramics, plastics or metals, and can be further simplified into a PCB made of FR materials when necessary.
The giant magnetoresistance film has two mounting modes. The first mounting method is to position and adhere to the lower surface of the substrate with an adhesive. The second mounting method is that the giant magnetoresistance film is packaged in an IC chip and positioned on the lower surface of the substrate through a soldering process.
The support ring is annular and is made of an iron material with good magnetic permeability.
The diaphragm is made of tantalum, niobium, titanium, stainless steel and other alloy materials with excellent medium corrosion resistance and high yield strength. The septum forms an adhesive ring against it using an adhesive, positions it within the lower circular groove of the support ring, and cures the adhesive. If necessary, the diaphragm and the support ring may further use one integral independent metal member instead of using the support ring and the diaphragm separately. The membrane must be impermeable and durable.
The sealing ring is arranged on the lower side of the diaphragm in the groove on the lower side of the support ring. And after the product assembly is assembled, the product assembly is compressed with the bottom plane of the cavity in the base in an interference manner, so that the medium is isolated and sealed. The seal ring is made of HNBR materials with medium corrosion resistance and temperature resistance.
During measurement, the diaphragm can be jacked up along with the increase of the medium pressure and can also be reset along with the decrease of the medium pressure, and the permanent magnet can also be jacked up or reset. The GMR giant magneto-resistance film can sense the change of a magnetic field in the movement process of the permanent magnet, so that the resistance value of the GMR giant magneto-resistance film changes, the resistance value change of the GMR giant magneto-resistance film is converted into the change of a voltage signal under the action of the flexible circuit board, and finally the pressure value is obtained through measurement.
The utility model relates to an use GMR giant magnetoresistance film and based on the pressure measurement device of GMR giant magnetoresistance effect, the resistance value that utilizes giant magnetoresistance can produce the principle of violent change under faint magnetic field variation and measure, the pressure measurement giant magnetoresistance effect of this structure can make the sensitivity of sensor improve 1-2 orders of magnitude, and temperature characteristic is good moreover, and the linearity is good.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (7)

1. A pressure measuring device using GMR giant magnetoresistance effect includes an upper case and a lower case connected together; a plug terminal is arranged in the upper shell;
the method is characterized in that:
a support ring is arranged at the joint of the upper shell and the lower shell, and a substrate is arranged at the top of the support ring;
the upper surface of the substrate is provided with a substrate terminal, and the substrate terminal is connected with the plug terminal through an electric connecting piece;
the lower surface of the substrate is provided with a giant magnetoresistance film, the bottom of the support ring is provided with a groove, a diaphragm is assembled in the groove, and the middle part of the upper surface of the diaphragm is provided with a permanent magnet; and a sealing ring is arranged between the diaphragm and the lower shell.
2. The pressure measurement device using the GMR giant magnetoresistance effect according to claim 1, wherein: and the substrate terminal is arranged in a reserved round hole of the substrate and connected between the giant magnetoresistance film and the electric connecting piece.
3. The pressure measurement device using the GMR giant magnetoresistance effect according to claim 2, wherein: the electric connecting piece is a flexible circuit board made of PI materials.
4. A pressure measuring device utilizing the GMR giant magnetoresistance effect according to claim 3, wherein: the substrate is a circuit board made of ceramic materials, plastic materials, metal materials or FR materials.
5. The pressure measurement device using the GMR giant magnetoresistance effect according to claim 4, wherein: the giant magnetoresistance film is positioned and bonded on the lower surface of the substrate by an adhesive.
6. The pressure measurement device using the GMR giant magnetoresistance effect according to claim 4, wherein: the giant magnetoresistance film is packaged in the IC chip and positioned on the lower surface of the substrate through a soldering process.
7. The pressure measurement device using the GMR giant magnetoresistance effect according to claim 5 or 6, wherein: the support ring is annular and is made of an iron material with good magnetic permeability.
CN202021408759.0U 2020-07-16 2020-07-16 Pressure measuring device using GMR giant magnetoresistance effect Active CN212378945U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021408759.0U CN212378945U (en) 2020-07-16 2020-07-16 Pressure measuring device using GMR giant magnetoresistance effect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021408759.0U CN212378945U (en) 2020-07-16 2020-07-16 Pressure measuring device using GMR giant magnetoresistance effect

Publications (1)

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CN212378945U true CN212378945U (en) 2021-01-19

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111678637A (en) * 2020-07-16 2020-09-18 上海感先汽车传感器有限公司 Pressure measurement device using GMR giant magnetoresistance effect

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111678637A (en) * 2020-07-16 2020-09-18 上海感先汽车传感器有限公司 Pressure measurement device using GMR giant magnetoresistance effect

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