CN211928061U - Testing device and system for photoresponse device - Google Patents
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Abstract
本实用新型涉及光响应器件的测试技术领域,具体公开了一种光响应器件的测试装置,其中,包括:瞬态光源装置、准直光路和测试平台,所述准直光路设置在所述瞬态光源装置和所述测试平台之间;所述瞬态光源装置用于发出能够激发待测试光响应器件的瞬态光源;所述准直光路能够将所述瞬态光源装置发出的瞬态光源的光斑能量均匀化;所述测试平台能够对所述准直光路的出射的瞬态光进行校正,根据校正后的瞬态光对待测试光响应器件进行测试得到测试信号,并将所述测试信号发送至上位机。本实用新型还公开了一种光响应器件的测试装置及系统。本实用新型提供的光响应器件的测试装置具有成本低且易于使用的优势。
The utility model relates to the technical field of testing light-responsive devices, and specifically discloses a testing device for light-responsive devices, which comprises: a transient light source device, a collimating light path and a test platform, wherein the collimating light path is arranged on the instantaneous light source. between the transient light source device and the test platform; the transient light source device is used to emit a transient light source that can excite the light response device to be tested; the collimated light path can convert the transient light source emitted by the transient light source device The light spot energy is uniformized; the test platform can correct the outgoing transient light of the collimated optical path, and test the optical response device to be tested according to the corrected transient light to obtain a test signal, and use the test signal sent to the host computer. The utility model also discloses a testing device and a system for the light response device. The testing device of the light-responsive device provided by the utility model has the advantages of low cost and easy use.
Description
技术领域technical field
本实用新型涉及光响应器件的测试技术领域,尤其涉及一种光响应器件的测试装置及包括该光响应器件的测试装置的光响应器件的测试系统。The utility model relates to the technical field of testing of light-responsive devices, in particular to a test device of a light-responsive device and a test system of a light-responsive device including the test device of the light-responsive device.
背景技术Background technique
通常光响应器件如光伏电池的内部动态特性的测量难以检测,尤其是体相的杂质缺陷、复合中心浓度等特征参量表征困难。目前常用的测试方法是使用化学腐蚀的方法由表面向内部腐蚀,通过腐蚀离子量或质量变化情况来计算缺陷杂质与复合中心浓度的情况,是一种不能持续、重复测试的方法;另一种方式是利用光学测试进行非接触测量,这种方法需要利用飞秒级别的脉冲激光,光强能量大、设备造价昂贵,不适合大规模推广应用。Usually, the measurement of the internal dynamic properties of light-responsive devices such as photovoltaic cells is difficult to detect, especially the characterization of characteristic parameters such as bulk impurity defects and recombination center concentration. At present, the commonly used test method is to use chemical corrosion method to corrode from the surface to the inside, and calculate the concentration of defect impurities and recombination center through the change of corrosion ion amount or mass, which is a method that cannot be continuously and repeatedly tested; another The method is to use optical testing for non-contact measurement. This method requires the use of femtosecond-level pulsed lasers. The light intensity and energy are large and the equipment is expensive, so it is not suitable for large-scale promotion and application.
因此,如何提供一种能够成本低、易使用的测量方式成为本领域技术人员亟待解决的技术问题。Therefore, how to provide a low-cost and easy-to-use measurement method has become an urgent technical problem to be solved by those skilled in the art.
发明内容SUMMARY OF THE INVENTION
本实用新型提供了一种光响应器件的测试装置及包括该光响应器件的测试装置的光响应器件的测试系统,解决相关技术中存在的测量方式成本高且不方便使用的问题。The utility model provides a test device for a light response device and a test system for a light response device including the test device for the light response device, which solves the problems of high cost and inconvenient use of the measurement method in the related art.
作为本实用新型的第一个方面,提供一种光响应器件的测试装置,其中,包括:瞬态光源装置、准直光路和测试平台,所述准直光路设置在所述瞬态光源装置和所述测试平台之间;As a first aspect of the present invention, a test device for a light-responsive device is provided, which includes: a transient light source device, a collimated optical path, and a test platform, wherein the collimated optical path is arranged between the transient light source device and the test platform. between the test platforms;
所述瞬态光源装置用于发出能够激发待测试光响应器件的瞬态光源;The transient light source device is used to emit a transient light source capable of exciting the light-responsive device to be tested;
所述准直光路能够将所述瞬态光源装置发出的瞬态光源的光斑能量均匀化;The collimated light path can homogenize the spot energy of the transient light source emitted by the transient light source device;
所述测试平台能够对所述准直光路的出射的瞬态光进行校正,根据校正后的瞬态光对待测试光响应器件进行测试得到测试信号,并将所述测试信号发送至上位机。The test platform can correct the outgoing transient light of the collimated optical path, test the photoresponse device to be tested according to the corrected transient light to obtain a test signal, and send the test signal to the host computer.
进一步地,所述测试平台包括信号采集系统、位移平台和夹具,所述夹具与所述信号采集系统连接,所述夹具和所述信号采集系统均设置在所述位移平台上,所述位移平台能够调整所述瞬态光在所述待测试光响应器件上的位置,所述夹具能够实现对所述待测试光响应器件的测试,所述信号采集系统能够采集所述待测试光响应器件的测试信号,并将所述测试信号发送至所述上位机。Further, the test platform includes a signal acquisition system, a displacement platform and a fixture, the fixture is connected to the signal acquisition system, the fixture and the signal acquisition system are both arranged on the displacement platform, and the displacement platform The position of the transient light on the photo-responsive device to be tested can be adjusted, the fixture can realize the test of the photo-responsive device to be tested, and the signal acquisition system can collect the optical response of the photo-responsive device to be tested. test signal, and send the test signal to the upper computer.
进一步地,所述测试平台还包括连接线路,所述信号采集系统与所述夹具之间、所述待测试光响应器件与所述夹具之间以及所述待测试光响应器件与所述信号采集系统之间均通过所述连接线路连接。Further, the test platform also includes connection lines, between the signal acquisition system and the fixture, between the light-responsive device to be tested and the fixture, and the light-responsive device to be tested and the signal acquisition The systems are all connected through the connection lines.
进一步地,所述连接线路包括同轴线缆。Further, the connection line includes a coaxial cable.
进一步地,所述准直光路包括沿光线出射方向依次设置的光阑、第一凸透镜和第二凸透镜。Further, the collimating light path includes a diaphragm, a first convex lens and a second convex lens arranged in sequence along the light exit direction.
作为本实用新型的另一个方面,提供一种光响应器件的测试系统,其中,包括:上位机和前文所述的光响应器件的测试装置,所述上位机与所述光响应器件的测试装置中的测试平台通信连接。As another aspect of the present invention, a test system for a light-responsive device is provided, which includes: a host computer and the aforementioned test device for the light-responsive device, the host computer and the test device for the light-responsive device The testbench communication connection in .
本实用新型提供的光响应器件的测试装置,利用光电转换效应的过程实现了光电子的检测,利用单位时间内电荷的变化量计算光响应器件内部的本征载流子浓度,通过改变光响应器件在电路中的瞬态电流计算器件内部的复合速率,本实用新型简化了测试过程,同时重复多次进行面扫描测量,具有低成本、易使用、响应快、准确等特点。The testing device for the photo-responsive device provided by the utility model realizes the detection of photoelectrons by utilizing the process of photoelectric conversion effect, and calculates the intrinsic carrier concentration inside the photo-responsive device by using the change of charge per unit time, and by changing the photo-responsive device The transient current in the circuit calculates the recombination rate inside the device, the utility model simplifies the testing process, repeats the surface scanning measurement for many times, and has the characteristics of low cost, easy use, fast response, accuracy and the like.
附图说明Description of drawings
附图是用来提供对本实用新型的进一步理解,并且构成说明书的一部分,与下面的具体实施方式一起用于解释本实用新型,但并不构成对本实用新型的限制。在附图中:The accompanying drawings are used to provide a further understanding of the present utility model, and constitute a part of the specification, and together with the following specific embodiments, are used to explain the present utility model, but do not constitute a limitation to the present utility model. In the attached image:
图1为本实用新型提供的光响应器件的测试装置的结构示意图。FIG. 1 is a schematic structural diagram of a testing device for a light-responsive device provided by the present invention.
图2为本实用新型提供的光响应器件的测试装置的具体实施方式结构示意图。FIG. 2 is a schematic structural diagram of a specific embodiment of a testing device for a light-responsive device provided by the present invention.
具体实施方式Detailed ways
需要说明的是,在不冲突的情况下,本实用新型中的实施例及实施例中的特征可以相互结合。下面将参考附图并结合实施例来详细说明本实用新型。It should be noted that the embodiments of the present invention and the features of the embodiments may be combined with each other under the condition of no conflict. The present utility model will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
为了使本领域技术人员更好地理解本实用新型方案,下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型一部分的实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本实用新型保护的范围。In order to make those skilled in the art better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described implementation The examples are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
需要说明的是,本实用新型的说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别类似的对象,而不必用于描述特定的顺序或先后次序。应该理解这样使用的数据在适当情况下可以互换,以便这里描述的本实用新型的实施例。此外,术语“包括”和“具有”以及他们的任何变形,意图在于覆盖不排他的包括,例如,包含了一系列步骤或单元的过程、方法、系统、产品或设备不必限于清楚地列出的那些步骤或单元,而是可包括没有清楚地列出的或对于这些过程、方法、产品或设备固有的其它步骤或单元。It should be noted that the terms "first" and "second" in the description and claims of the present invention and the above drawings are used to distinguish similar objects, and are not necessarily used to describe a specific sequence or sequence. . It should be understood that the data so used may be interchanged under appropriate circumstances for the embodiments of the invention described herein. Furthermore, the terms "comprising" and "having", and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those expressly listed Rather, those steps or units may include other steps or units not expressly listed or inherent to these processes, methods, products or devices.
在本实施例中提供了一种光响应器件的测试装置,图1是根据本实用新型实施例提供的光响应器件的测试装置的结构示意图,如图1所示,包括:In this embodiment, a test device for a light-responsive device is provided, and FIG. 1 is a schematic structural diagram of the test device for a light-responsive device provided according to an embodiment of the present invention, as shown in FIG. 1 , including:
瞬态光源装置1、准直光路2和测试平台3,所述准直光路2设置在所述瞬态光源装置1和所述测试平台3之间;A transient
所述瞬态光源装置1用于发出能够激发待测试光响应器件的瞬态光源;The transient
所述准直光路2能够将所述瞬态光源装置发出的瞬态光源的光斑能量均匀化;The collimating
所述测试平台3能够对所述准直光路的出射的瞬态光进行校正,根据校正后的瞬态光对待测试光响应器件进行测试得到测试信号,并将所述测试信号发送至上位机。The
本实用新型实施例提供的光响应器件的测试装置,利用光电转换效应的过程实现了光电子的检测,利用单位时间内电荷的变化量计算光响应器件内部的本征载流子浓度,通过改变光响应器件在电路中的瞬态电流计算器件内部的复合速率,本实用新型简化了测试过程,同时重复多次进行面扫描测量,具有低成本、易使用、响应快、准确等特点。The testing device for the photo-responsive device provided by the embodiment of the present utility model realizes the detection of photoelectrons by utilizing the process of photoelectric conversion effect, and calculates the intrinsic carrier concentration inside the photo-responsive device by using the change of charge per unit time. The recombination rate inside the device is calculated in response to the transient current of the device in the circuit, the utility model simplifies the testing process, repeats the surface scan measurement for many times, and has the characteristics of low cost, easy use, fast response and accuracy.
优选地,所述瞬态光源装置1包括激光器。Preferably, the transient
具体地,如图1和图2所示,所述测试平台3包括信号采集系统6、位移平台8和夹具4,所述夹具4与所述信号采集系统6连接,所述夹具4和所述信号采集系统6均设置在所述位移平台8上,所述位移平台8能够调整所述瞬态光在所述待测试光响应器件上的位置,所述夹具4能够实现对所述待测试光响应器件的测试,所述信号采集系统6能够采集所述待测试光响应器件的测试信号,并将所述测试信号发送至所述上位机。Specifically, as shown in FIGS. 1 and 2 , the
需要说明的是,所述夹具4具体可以采用专利号为ZL201821591722.9的专利文件中描述的一种钙钛矿太阳能电池的效率测试夹具。It should be noted that, the
优选地,所述信号采集系统6具体可以包括示波器。Preferably, the
优选地,所述位移平台8包括X-Y-Z位移平台。Preferably, the
具体地,如图1和图2所示,所述测试平台3还包括连接线路5,所述信号采集系统与所述夹具之间、所述待测试光响应器件与所述夹具之间以及所述待测试光响应器件与所述信号采集系统之间均通过所述连接线路连接。Specifically, as shown in FIG. 1 and FIG. 2 , the
优选地,所述连接线路包括同轴线缆。Preferably, the connection line includes a coaxial cable.
优选地,所述准直光路2包括沿光线出射方向依次设置的光阑、第一凸透镜和第二凸透镜。Preferably, the
本实用新型实施例提供的光响应器件的测试装置,瞬态光源装置1能够发出出射脉冲时间在纳秒至微秒量级的脉冲光源;瞬态光源出射后的经过准直光路2将光束准直并使光斑能量均匀化;所述测试平台3与夹具4对出射光路的能量进行校正并将测试样品接入检测回路;连接线路5将光响应样品的受激光电流连接进入信号采集系统6;测试信号由信号采集系统6传递给上位机采集并记录。In the testing device of the light response device provided by the embodiment of the present invention, the transient
作为本实用新型的另一实施例,提供一种光响应器件的测试系统,其中,包括:上位机和前文所述的光响应器件的测试装置,所述上位机与所述光响应器件的测试装置中的测试平台通信连接。As another embodiment of the present invention, a test system for a light-responsive device is provided, which includes: a host computer and the above-mentioned test device for the light-responsive device, and a test system between the host computer and the light-responsive device Test platform communication connection in the device.
本实用新型实施例提供的光响应器件的测试系统,由于采用了前文的光响应器件的测试装置,利用光电转换效应的过程实现了光电子的检测,利用单位时间内电荷的变化量计算光响应器件内部的本征载流子浓度,通过改变光响应器件在电路中的瞬态电流计算器件内部的复合速率,本实用新型简化了测试过程,同时重复多次进行面扫描测量,具有低成本、易使用、响应快、准确等特点。The test system of the photo-responsive device provided by the embodiment of the present invention adopts the test device of the photo-responsive device mentioned above, realizes the detection of photoelectrons by the process of photoelectric conversion effect, and calculates the photo-responsive device by using the change of charge per unit time. The internal intrinsic carrier concentration is calculated by changing the transient current of the photoresponse device in the circuit to calculate the recombination rate inside the device. Use, fast response, accurate and other characteristics.
可以理解的是,以上实施方式仅仅是为了说明本实用新型的原理而采用的示例性实施方式,然而本实用新型并不局限于此。对于本领域内的普通技术人员而言,在不脱离本实用新型的精神和实质的情况下,可以做出各种变型和改进,这些变型和改进也视为本实用新型的保护范围。It can be understood that the above embodiments are only exemplary embodiments adopted to illustrate the principle of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also regarded as the protection scope of the present invention.
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