CN211826081U - Optical waveguide multi-micro-channel detection system - Google Patents

Abstract

The utility model provides a many miniflow channels of optical waveguide detecting system, include: a microfluidic chip; the microfluidic chip includes: a microfluidic set comprising microfluidics; the microfluid comprises an optical waveguide group and a microchannel, wherein the optical waveguide group comprises an optical waveguide to guide light into the microchannel along the horizontal direction; further comprising: the waveguide layer is arranged on the substrate; the micro-channel penetrates through the upper cladding, the waveguide layer and the lower cladding from top to bottom and extends into the substrate; the lower cladding layer is made of silicon dioxide with the thickness of 2-3 mu m, the upper cladding layer is made of a high polymer material with the thickness of 15-30 mu m, and the micro-channel extends into the substrate by 10-15 mu m and has the width of 10-100 mu m. Has the advantages that: the structure of an integrated matrix of the optical waveguide and the multiple micro-channels is formed, the analysis performance higher than that of a traditional optical system is realized through the multiple micro-fluid channels and the large-scale matrixing optical waveguide, the chip-level on-chip optical detection and analysis system of the high-flux biological sample is quickly constructed, and the high-flux chip of biological detection under the micro-nano scale is realized.

Description

Optical waveguide multi-micro-channel detection system

Technical Field

The invention relates to an optical waveguide multi-micro-channel detection system, in particular to an optical waveguide multi-micro-channel biological detection system.

Background

In modern biochemical analysis procedures, high-throughput detection devices have been widely used. Most of these devices use biochips based on microfluidic technology or microwell arrays, loaded in high performance optical systems, to perform analysis of biological samples of different sizes, such as nucleic acids, proteins, viruses, bacteria, cells, etc. The design of these optical systems is usually based on complex geometric optics, which is bulky, costly, requires optical alignment, and is costly to maintain.

In the precise medical age, miniaturized, high-performance, low-cost and mobile integrated analysis systems are of great concern. In particular, the lab on chip concept has advanced a lot of progress in manipulating a biological sample based on a microfluidic technology after decades of development, but a real lab on chip system still lacks an integrated system for chip-level on-chip optical detection and analysis of a high-throughput biological sample on a micro-nano scale.

Disclosure of Invention

The device aims to solve a series of new requirements of miniaturization, mobility, integration and the like of the modern biochemical analysis instrument which is large in size and high in cost and meets the requirements of the precise medical era.

The invention provides an optical waveguide multi-micro-channel detection system, which comprises: microfluidic chips, microscopes, measurement devices and analysis devices; it is characterized in that the preparation method is characterized in that,

the microfluidic chip comprises a microfluidic set comprising a first quantity of microfluidics;

the micro fluid comprises an optical waveguide group and a micro channel, the optical waveguide group comprises a second number of optical waveguides, the optical waveguides are used for guiding light into the micro channel along the horizontal direction, the microscope is used for collecting optical signals in the micro channel and transmitting the optical signals to the measuring device, the measuring device is used for processing the optical signals, generating signals to be analyzed and transmitting the signals to be analyzed to the analyzing device, and the analyzing device analyzes the signals to be analyzed to form a spectrum;

the microfluidic chip further comprises: the substrate, the lower cladding, the waveguide layer, the upper cladding and the flow channel cover plate are arranged from bottom to top in sequence, the waveguide layer is made of silicon nitride materials and is used for forming the optical waveguide;

the micro-channel penetrates through the upper cladding, the waveguide layer and the lower cladding from top to bottom and extends into the substrate;

the flow channel cover plate covers the upper opening of the micro flow channel, and the micro flow channel cover plate comprises a liquid injection port for injecting a solution containing the biomolecules to be detected into the micro flow channel;

the lower cladding is silicon dioxide with the thickness of 2-3 mu m, the upper cladding is a high polymer material with the thickness of 15-30 mu m, the micro-channel extends into the substrate by 10-15 mu m, and the width of the micro-channel is 10-100 mu m.

Preferably, the optical waveguide module further comprises a light guide structure for providing a light source to the optical waveguide module.

Preferably, the optical waveguide group comprises a second number of optical waveguides parallel to each other to guide light into the micro flow channel, and the width of the optical waveguides is 300-600 nm.

Preferably, the second number is 1, and the whole or most of the waveguide layers corresponding to the microfluid form a sheet of the optical waveguide.

Preferably, the waveguide layer thickness is 150-1000 nm.

Preferably, the light guide structure includes a trunk light guide and a light guide group, the light guide group is led out from the trunk light guide, and the light guide group is optically connected to the optical waveguide group.

Preferably, the light guide group is led out from the trunk light guide by adopting a light splitting structure.

Preferably, the trunk light guide includes a first light guide, the light guide group includes a second light guide, and the first light guide and the second light guide are crossed by a cross-layer structure.

Preferably, the crossed cross-layer structure comprises a first light guiding overlap region and a second light guiding overlap region; the first light guide is disconnected at the intersection, and two acute-angle light guide end faces are formed at two opposite disconnected ends; the second light guide forms an acute angle light guide surface matched with the acute angle light guide end surface at the intersection; the first light guide overlapping area comprises an acute angle light guide end face and an acute angle light guide face matched with the acute angle light guide end face, and the second light guide overlapping area comprises an acute angle light guide end face and an acute angle light guide face matched with the acute angle light guide end face.

Preferably, the optical waveguide is a coupling optical waveguide;

the coupling optical waveguide comprises an incident grating to guide light above the upper cladding into the coupling optical waveguide until the light is guided into the microchannel; the incident grating protrudes out of the waveguide layer and extends upwards into the upper cladding layer, the thickness of the waveguide layer is 150-600 nm, and the width of the coupling optical waveguide is 300-600 nm.

The invention provides an optical waveguide multi-micro-channel detection system, which has the following beneficial effects: the chip-level optical detection and analysis system is produced by an integrated circuit mass production process, the function of the traditional optical system is realized by integrating an optical device or an on-chip optical device, the traditional desktop or even large-scale optical system can be reduced to the chip size, the equal or even more excellent analysis performance is ensured, the high-flux chip-level optical detection and analysis integrated system of the biological sample under the micro-nano scale is realized, and the system cost is greatly reduced. And a structure of an optical waveguide and multi-micro-channel integrated matrix is formed, higher-flux analysis performance than that of a traditional optical system is realized through multi-micro-fluid channels and large-scale matrixing optical waveguides, a chip-level on-chip optical detection and analysis integrated system of a high-flux biological sample under a micro-nano scale can be quickly constructed, and a high-flux chip for detecting the biological sample under the micro-nano scale is realized.

Drawings

FIG. 1 is a side view of an optical waveguide multi-microchannel detection system of the present invention;

FIG. 2 is a side view of a microfluidic device of the present invention;

FIG. 3 is a side view of another microfluidic device of the present invention;

FIG. 4 is a top view of FIG. 2 or FIG. 3;

FIG. 5 is a top view of the chip optical waveguide microfluidic of FIG. 1;

FIG. 6 is a schematic view of a light guide structure;

FIG. 7 is an enlarged view of A of FIG. 6;

FIG. 8 is an enlarged view of B of FIG. 6;

fig. 9 is a cross-sectional view of fig. 8.

Detailed Description

The following detailed description of embodiments of the invention refers to the accompanying drawings.

In the drawings, the dimensional ratios of layers and regions are not actual ratios for the convenience of description. When a layer (or film) is referred to as being "on" another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. In addition, when a layer is referred to as being "under" another layer, it can be directly under, and one or more intervening layers may also be present. In addition, when a layer is referred to as being between two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present. Like reference numerals refer to like elements throughout. In addition, when two components are referred to as being "connected," they include physical connections, including, but not limited to, electrical connections, contact connections, and wireless signal connections, unless the specification expressly dictates otherwise.

The invention provides a scheme of a horizontal optical waveguide and microfluidic channel integrated module, and simultaneously provides a scheme of a multi-microfluidic channel system matrixing, and a chip-level on-chip optical detection and analysis integrated system of a high-flux biological sample under a micro-nano scale is quickly constructed. The horizontal optical waveguide is an optical waveguide for guiding light into a microchannel in a horizontal direction

An optical waveguide multi-microchannel detection system, as shown in fig. 1, comprises: a microfluidic chip (not shown), a microscope 3, a measuring device 4 and an analyzing device 5;

the microfluidic chip comprises a microfluidic set comprising a first number of microfluids (not shown), as shown in fig. 1, the first number being m;

the microfluid comprises an optical waveguide set and a micro channel, and one microfluid shown in FIG. 2 comprises a waveguide set 131 and a micro channel 201; the optical waveguide group 131, 132 … 13m comprises a second number of optical waveguides, as shown in fig. 2 and 4, the second number being n, and the optical waveguide group 131 comprises n optical waveguides 1311, 1312 … 131n, to form an n × m matrixed detection system.

The optical waveguide 1311, 1312 … n is used for guiding light into the micro flow channel 201 along the horizontal direction, the microscope 3 is used for collecting optical signals in the micro flow channel 201, 202 … m and transmitting the optical signals to the measuring device 4, the measuring device 4 is used for processing the optical signals and generating signals to be analyzed and transmitting the signals to be analyzed to the analyzing device 5, and the analyzing device 5 analyzes the signals to be analyzed to form a spectrum;

the microfluidic chip further comprises: the substrate 11, the lower cladding layer 12, the waveguide layer 13, the upper cladding layer 14 and the flow channel cover plate 15 are sequentially arranged from bottom to top, the waveguide layer 13 is made of silicon nitride material, and the waveguide layer 13 is used for forming the optical waveguide group 131, 132 … 13 m;

the micro flow channel 201, 202 … 20m extends from top to bottom through the upper cladding layer 14, the waveguide layer 13 and the lower cladding layer 12 into the substrate 11;

the flow channel cover plate 15 covers the upper openings of the micro flow channels 201 and 202 … 20m, and the micro flow channel cover plate 15 comprises liquid injection ports 151 and 152 … 15m for injecting a solution containing biomolecules to be detected into the micro flow channels 201 and 202 … 20 m; it should be noted that, a liquid outlet (not shown) is further included to form a circulation system corresponding to the liquid injection port 151 one by one, and the liquid outlet may be an opening on the flow passage cover plate 15; the liquid outlet may also be an opening at both ends of the micro flow channel, and the invention is not limited herein.

The lower cladding 12 is silica with a thickness of 2-3 μm, the upper cladding 14 is a polymer material with a thickness of 15-30 μm, the micro flow channels 201, 202 … 20m extend into the substrate 11 by 10-15 μm, and the micro flow channels 201, 202 … 20m have a width of 10-100 μm; and forming a structure of an integrated matrix of the optical waveguide and the multiple microchannels, and quickly constructing a chip-level on-chip optical detection and analysis integrated system of the high-flux biological sample under the micro-nano scale.

It should be noted that the first number m of microfluids may form one microfluid group, and a microfluid matrix formed by a third number k of microfluid groups may be constructed, and the total number of the available optical waveguides is n × m × k matrixed detection systems; and forming a structure of an integrated matrix of the optical waveguide and the multiple microchannels, and quickly constructing a chip-level on-chip optical detection and analysis integrated system of the high-flux biological sample under the micro-nano scale.

It should be noted that the optical waveguide group includes a second number n of optical waveguides parallel to each other, as shown in fig. 1 and 4, the optical waveguide group 131 includes a second number n of optical waveguides 1311, 1312 … 131n parallel to each other to guide light into the micro channel 201 along the horizontal direction, and the width of the optical waveguides is 300-600 nm.

Wherein the light source directions are different according to the waveguide set 131, such as: fig. 2 shows that the light source is introduced from the left end of the optical waveguide set 131, and fig. 3 shows that the light source is introduced from above the optical waveguide set 131, in the multi-micro-channel, especially matrixed, detection system, the former needs to add the light guide structure shown in fig. 6 from the structure when manufacturing matrixed chip, and the latter does not need to add the light guide structure, which will be described below with reference to fig. 1-2, 4-9:

as shown in fig. 1 and 5, the optical waveguide sets 131, 132 … 13m may include only one optical waveguide, and the optical guide sets 601, 602 … 60m each include a light guide line to optically connect with the optical waveguide sets 131, 132 … 13 m; the whole or most of the waveguide layers 13 corresponding to one microfluid form a sheet waveguide 1311, and the excitation optical field introduced by the sheet waveguide 1311 can reduce the background light signal in the detection-labeled biomolecule, thereby greatly improving the detection rate of the small biomolecule.

As shown in fig. 1 and 4, the optical waveguide set 131 includes a plurality of, e.g., n, optical waveguides 1311, 1312 … 131n parallel to each other, and the optical waveguide set 601 optically connected thereto needs n corresponding optical lines to guide light into the microchannel 201 in a horizontal direction; in actual detection, for biomolecules containing different labels in the micro flow channel 201, the optical waveguides 1311, 1312 … 131n connected to the n optical lines one by one can respectively introduce light with different wavelengths λ 1, λ 2 … λ n into the micro flow channel 201 along the horizontal direction, the labeled biomolecules 21 with different labels excited by the light with different wavelengths can simultaneously identify the biomolecules, while the non-excited biomolecules 20 in the excitation light field introduced by the optical waveguides 1311, 1312 … 131n will not be identified, and the non-excited biomolecules 20 are normal biomolecules without labels or biomolecules labeled but located outside the light field and not excited; as shown in FIG. 3, the widths of the optical waveguides 1311, 1312 … 131n are 300-600 nm.

As shown in FIGS. 1-2, the waveguide layer 13 has a thickness of 150-1000nm, i.e., the optical waveguides 1311, 1312 … 131n in FIGS. 2 and 4-5 have a thickness of 150-1000 nm.

The light guide group is optically connected to the optical waveguide group 131, and further optically connected to the optical waveguides 1311, 1312 … 131n in the optical waveguide group 131.

As the main light guide 60 provides the light guide group 602 … 60m to the second miniflow channel 202 … to the mth miniflow channel 20m with n optical waveguides, the light guide lines are crossed, so that for the integrated optical waveguide multi-miniflow channel chip matrixed by the multi-channel monitoring system in fig. 1, a specific light guide structure (not shown) needs to be designed, as shown in fig. 6 to 9, for the detection system matrixed by n x m of the optical waveguide, the light guide structure as shown in fig. 6 is provided, which comprises the main light guide 60, and the light guide groups 601, 602 … 60m led out from the main light guide 60, so as to transmit light sources to the miniflow channels 201, 202 … 20m respectively; the trunk light guide 60 includes n first light guides 61, which transmit light with wavelengths λ 1, λ 2, λ 3 … λ n, that is, each light guide group includes n second light guides 62, which transmit light to the light guides 1311, 1312 … 131n of the light guide group 131, respectively. The leading-out node a of the light guide groups 601 and 602 … 60m leading out from the trunk light guide 60 and the light guide cross node B in the leading-out light guide and trunk light guide 60 need to be specially designed; the light guide groups 601 and 602 … 60m are vertically led out from the trunk light guide 60 by adopting a light splitting structure, as shown in fig. 7 to 8, the light splitting structure is a light splitting structure for leading out a node a, and the second light guide 62 in the light guide groups 601 and 602 … 60m is led out from the first light guide 61 in the trunk light guide 60; as shown in fig. 8, the light guide unit 60 is a cross-layer structure B with cross nodes, the light guide unit 601 includes a first light guide 61, the first light guide 61 and the second light guide 62 are crossed by the cross-layer structure; the cross-layer structure comprises a first light directing overlap region 610 and a second light directing overlap region 620; the first light guide 61 is broken at the intersection, and two acute angle light guide end faces are formed at two opposite ends which are broken; the second light guide 62 forms an acute angle light guide surface matched with the acute angle light guide end surface at the intersection; the first light guide overlapping region 610 includes the acute angle light guide end face and an acute angle light guide face matched with the acute angle light guide end face, and the distance between the acute angle light guide end face and the acute angle light guide face is less than 1 μm; the second light guide overlapping region 620 includes the acute angle light guide end face and an acute angle light guide face matched with the acute angle light guide end face, and the distance between the acute angle light guide end face and the acute angle light guide face is less than 1 μm; that is, the first light guide 61 is broken at the intersection, two acute angle light guide end faces are respectively formed at two opposite ends of the broken first light guide 61, two acute angle light guide faces which are matched with the two acute angle light guide end faces and have a distance less than 1 μm are formed at the intersection of the second light guide 62 led out from the trunk light guide 60, so that a first light guide overlapping area 610 and a second light guide overlapping area 620 are formed, and light transmitted from one end of the broken first light guide 61 enters the second light guide 62 through the first light guide overlapping area 610 and then enters the other end of the broken first light guide 61 through the second light guide overlapping area 620.

In the detection system in which the total number of optical waveguides is n × m × k matrix, the light source may be continuously transmitted to the next and kth microfluidic groups by using the light splitting structure a and the cross-layer structure B in each light guide group 601, 602 … 60 m.

The optical waveguide multi-micro-channel detection system with the light source introduced from the upper part of the optical waveguide group 131 does not need to be specially designed with a light guide structure:

as shown in fig. 3, an incident grating (not shown) of silicon nitride material is further included to form a coupling optical waveguide with the optical waveguides 1311, 1312 … 131n, and to guide light above the upper cladding layer 14 into the optical waveguides until the optical micro channels 201 are introduced, and the upper cladding layer 14 is a light-transmissive layer; the entrance grating protrudes from the waveguide layer 13 and extends up into the upper cladding layer 14.

As shown in fig. 3 and 4, a microfluidic device includes an optical waveguide group 131 including a plurality of, e.g., n, coupled optical waveguides parallel to each other to guide light into the microchannel 201 in a horizontal direction, in an actual detection, for biomolecules with different labels in the microchannel 201, the coupled optical waveguides can guide light with wavelengths λ 1 and λ 2 … λ n into the microchannel 201 in the horizontal direction, and the labeled biomolecules 21 with different labels excited by light with different wavelengths can simultaneously recognize the biomolecules without recognizing the non-excited biomolecules 20 in an excitation light field guided by the coupled optical waveguides, and the non-excited biomolecules 20 are normal biomolecules without labeling or biomolecules with labeling but outside the light field without excitation; wherein, as shown in FIG. 4, the width of the coupling optical waveguide is 300-600nm, and wherein, as shown in FIG. 3, the thickness of the waveguide layer 13 is 300-600 nm.

In the present invention, the substrate 11 is a silicon substrate; preferably, the substrate 11 is a 4, 8, 12 inch silicon wafer.

In the invention, the high polymer material is SU-8 resin, polyimide, polydimethylsilane, polyethylene or benzocyclobutene.

In the present invention, the silicon nitride waveguide layer 13 is a silicon nitride thin film layer having a thickness of 150nm to 500nm formed at a low deposition temperature of 25 to 150 ℃; the refractive index of the silicon nitride film is 1.75-2.2. The silicon nitride film may be a film having a uniform refractive index, or may be a film having a non-uniform refractive index, such as a silicon nitride film having a layered refractive index structure.

Circulating tumor cells are a general term for various tumor cells that leave the tumor tissue and enter the blood circulation system of the human body. By detecting trace circulating tumor cells in peripheral blood and monitoring the trend of the change of the types and the quantity of the circulating tumor cells, the tumor dynamics can be monitored in real time, the treatment effect can be evaluated, and the real-time individual treatment can be realized. Referring to fig. 1, an embodiment of detecting circulating tumor cells by using the above optical waveguide multi-microfluidic detection system in which the total number of optical waveguides is n × m × k matrix is described as follows:

the first step is as follows: sorting and enriching various tumor cells possibly existing in the collected m x k patient blood samples by adopting an immunomagnetic bead technology (such as immunomagnetic bead positive sorting) or a microfluidic technology to obtain a solution containing circulating tumor cells, or directly adopting the patient blood samples;

the second step is that: adding an antibody group which can be specifically combined with surface antigens of various tumor cells or an aptamer group which can be combined with the surfaces of various tumor cells into the solution or the blood sample containing the circulating tumor cells, wherein the antibody group and the aptamer group modify marks, and the antibody combined with specific tumor cells or the modified marks on the aptamer have uniqueness, so as to obtain the solution or the blood sample containing the marked circulating tumor cells; the labels are n, and can be target probes of fluorescent molecules;

the third step: as shown in fig. 1, the m × k solutions or blood samples obtained in the second step are respectively added to the micro flow channels 201 and 202 … 20m (not fully listed, total number of injection ports is m × k) from the injection ports 151 and 152 … 15m (not fully listed, total number of micro flow channels is m × k), and the light guide sets 601 and 602 … 60m (not fully listed, total number of light guide sets is m × k) introduce n different wavelengths of light corresponding to the n markers into n light guides (not fully listed, total number of light guides is m × k) in the light guide sets 131 and 132 … 13m (not fully listed, total number of light guides is m × k) and then into the micro flow channels 201 and 202 … 20m in the horizontal direction, as shown in fig. 1 and 4, n light guides 1 and 1312 … 131n in the light guide set 131 are incompletely listed, total number of light guides is n × k, and the light guides 13121 containing different fluorescent molecular markers are excited by the light of the biological molecules emitting light with specific wavelengths Fluorescence, microscope 3 are used for collecting the fluorescence (light signal) of specific wavelength and to measuring device 4 transmits, measuring device 4 handles the fluorescence (light signal) of collecting specific wavelength and produces the signal of waiting to analyze and to analytical device 5 transmits the signal of waiting to analyze, analytical device 5 analysis wait to analyze the spectrum of the fluorescence of signal formation specific wavelength, can judge the kind of circulation tumor cell in solution or blood sample through reading the spectrum, can once only detect the multiple tumor circulation cell of different diseases respectively, realize the high flux chip of multiple tumor cell detection under the micro-nano scale to real-time monitoring tumor developments, aassessment treatment effect realize real-time individual treatment.

The invention provides an optical waveguide multi-micro-channel detection system, which has the following beneficial effects: the structure of the optical waveguide and multi-micro-channel integrated matrix is formed, the analysis performance higher than that of a traditional optical system is realized through the multi-micro-fluid channel and the large-scale matrixing optical waveguide, the chip-level on-chip optical detection and analysis integrated system of the high-flux biological sample under the micro-nano scale can be quickly constructed, and the high-flux chip of the biological sample detection under the micro-nano scale is realized.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (10)

1. An optical waveguide multi-microchannel detection system comprising: microfluidic chips, microscopes, measurement devices and analysis devices; it is characterized in that the preparation method is characterized in that,

the microfluidic chip comprises a microfluidic set comprising a first quantity of microfluidics;

the micro fluid comprises an optical waveguide group and a micro channel, the optical waveguide group comprises a second number of optical waveguides, the optical waveguides are used for guiding light into the micro channel along the horizontal direction, the microscope is used for collecting optical signals in the micro channel and transmitting the optical signals to the measuring device, the measuring device is used for processing the optical signals, generating signals to be analyzed and transmitting the signals to be analyzed to the analyzing device, and the analyzing device analyzes the signals to be analyzed to form a spectrum;

the microfluidic chip further comprises: the substrate, the lower cladding, the waveguide layer, the upper cladding and the flow channel cover plate are arranged from bottom to top in sequence, the waveguide layer is made of silicon nitride materials and is used for forming the optical waveguide;

the micro-channel penetrates through the upper cladding, the waveguide layer and the lower cladding from top to bottom and extends into the substrate;

the flow channel cover plate covers the upper opening of the micro flow channel, and the micro flow channel cover plate comprises a liquid injection port for injecting a solution containing the biomolecules to be detected into the micro flow channel;

the lower cladding is silicon dioxide with the thickness of 2-3 mu m, the upper cladding is a high polymer material with the thickness of 15-30 mu m, the micro-channel extends into the substrate by 10-15 mu m, and the width of the micro-channel is 10-100 mu m.

2. The system of claim 1, further comprising a light guiding structure to provide a light source to the optical waveguide assembly.

3. The system as claimed in claim 2, wherein the optical waveguide assembly comprises a second number of optical waveguides parallel to each other for guiding light into the microchannel, the optical waveguides having a width of 300-600 nm.

4. The system of claim 2, wherein the second number is 1, and wherein the entire or a majority of the waveguide layers of the microfluidic array form a slab of the optical waveguide.

5. The system according to any of claims 2 to 4, wherein the thickness of the waveguide layer is 150nm and 1000 nm.

6. The system of claim 2, wherein the light guide structure comprises a trunk light guide and a light guide set, the light guide set being derived from the trunk light guide, the light guide set being optically connected to the light guide set.

7. The system of claim 6, wherein the light guide group is extracted from the trunk light guide using a light splitting structure.

8. The system of claim 7, wherein the trunk light guide comprises a first light guide, the set of light guides comprises a second light guide, and the first light guide intersects the second light guide through an intersecting cross-layer structure.

9. The system of claim 8, wherein the cross-layer structure comprises a first light directing overlap region and a second light directing overlap region; the first light guide is disconnected at the intersection, and two acute-angle light guide end faces are formed at two opposite disconnected ends; the second light guide forms an acute angle light guide surface matched with the acute angle light guide end surface at the intersection; the first light guide overlapping area comprises an acute angle light guide end face and an acute angle light guide face matched with the acute angle light guide end face, and the second light guide overlapping area comprises an acute angle light guide end face and an acute angle light guide face matched with the acute angle light guide end face.

10. The system of claim 1, wherein the optical waveguide is a coupling optical waveguide;

the coupling optical waveguide comprises an incident grating to guide light above the upper cladding into the coupling optical waveguide until the light is guided into the microchannel; the incident grating protrudes out of the waveguide layer and extends upwards into the upper cladding layer, the thickness of the waveguide layer is 150-600 nm, and the width of the coupling optical waveguide is 300-600 nm.

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