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CN211603608U - Femtosecond laser direct-writing fiber grating preparation device based on machine learning image recognition - Google Patents

Femtosecond laser direct-writing fiber grating preparation device based on machine learning image recognition Download PDF

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CN211603608U
CN211603608U CN202020205854.4U CN202020205854U CN211603608U CN 211603608 U CN211603608 U CN 211603608U CN 202020205854 U CN202020205854 U CN 202020205854U CN 211603608 U CN211603608 U CN 211603608U
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femtosecond laser
image recognition
fiber
engraved
visible light
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施进丹
冯宪
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Jiangsu Normal University
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Jiangsu Normal University
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Abstract

The utility model discloses a femto second laser directly writes fiber grating preparation facilities based on machine learning image recognition, directly write optical path system including femto second laser, the real-time imaging system of visible light, orientation module and image recognition program control module, femto second laser directly writes optical path system, the real-time imaging system of visible light and orientation module all with image recognition program control module electric connection, according to waiting to carve the picture of carving of optic fibre, image recognition program control module treats through orientation module that carves optic fibre and fixes a position, and directly write optical path system through femto second laser and carve the optic fibre of carving after fixing a position, observe the imaging picture of carving the optic fibre of waiting to carve after carving through the real-time imaging system of visible light simultaneously. The utility model discloses can fix a position optic fibre Bragg grating orbit, realize by the micron order of magnitude to the fiber grating of the arbitrary length in the meter level scope, also can realize the Bragg fiber grating of arbitrary type.

Description

基于机器学习图像识别的飞秒激光直写光纤光栅制备装置Fabrication device for femtosecond laser direct writing fiber grating based on machine learning image recognition

技术领域technical field

本实用新型涉及飞秒激光直写制备光纤布拉格光栅技术领域,尤其涉及一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置。The utility model relates to the technical field of femtosecond laser direct writing fiber Bragg grating preparation, in particular to a femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition.

背景技术Background technique

光纤光栅具有体积小、波长选择性好、易于与光纤器件及系统耦合集成、便于使用和维护等特点,是光纤通信、光纤激光器和光纤传感等领域非常重要的光纤器件。光纤光栅的制备方法主要有基于紫外波段激光的双光束干涉法和相位掩膜板制备法,以及基于近红外飞秒激光的直写法和相位掩膜板制备法。前者需要光纤纤芯具有一定的光敏性,后者克服了前者在光纤方面的局限性,可以在任意类型的石英玻璃光纤中制备出光纤光栅。此外,相位掩膜板制备法所得的光纤光栅长度和类型取决于所用相位掩膜板的长度和类型,制备成本较高。然而,基于近红外飞秒激光的直写制备法避免了相位掩膜板的限制,通过精确控制光纤或者飞秒激光聚焦光束的移动速度和飞秒激光的重复频率,可以灵活地制备出不同长度和任意类型的光纤光栅,且成本低。因此,近年来,近红外飞秒激光直写光纤光栅制备技术越来越受到国内外工业界和学术界的关注和青睐。Fiber Bragg gratings have the characteristics of small size, good wavelength selectivity, easy coupling and integration with optical fiber devices and systems, and easy use and maintenance. The preparation methods of fiber gratings mainly include two-beam interference method and phase mask preparation method based on ultraviolet band laser, and direct writing method and phase mask preparation method based on near-infrared femtosecond laser. The former requires the fiber core to have a certain photosensitivity, while the latter overcomes the limitation of the former in terms of optical fibers, and can prepare fiber gratings in any type of silica glass fiber. In addition, the length and type of the fiber grating obtained by the phase mask manufacturing method depend on the length and type of the phase mask used, and the manufacturing cost is relatively high. However, the direct writing method based on the near-infrared femtosecond laser avoids the limitation of the phase mask. By precisely controlling the moving speed of the optical fiber or the femtosecond laser focusing beam and the repetition frequency of the femtosecond laser, different lengths can be flexibly prepared. and any type of fiber grating, and the cost is low. Therefore, in recent years, the preparation technology of near-infrared femtosecond laser direct writing fiber grating has attracted more and more attention and favor from domestic and foreign industrial and academic circles.

飞秒激光直写法制备光纤光栅是将入射飞秒激光束聚焦到光纤纤芯内部,并沿着光纤轴向进行逐点曝光,使得纤芯的折射率沿轴向形成周期性分布的光栅结构。利用可见光成像技术和高精度XYZ三维位移平台控制技术,聚焦光束能够精确地聚焦到纤芯中央,同时通过高精度移动激光束或光纤,在纤芯中形成遵循一定轨迹的光栅结构。当该光栅轨迹与光纤中心轴线相重合,光栅的耦合效率最高且背光损耗最低。当光栅轨迹偏离光纤中心轴线时,会导致光栅的耦合效率低、产生不必要的包层模和光栅插入损耗等问题。因此,光栅轨迹的精确准直是飞秒激光直写法制备高质量光纤光栅的重要前提。The femtosecond laser direct writing method to fabricate fiber grating is to focus the incident femtosecond laser beam into the fiber core and expose it point by point along the fiber axis, so that the refractive index of the fiber core forms a periodically distributed grating structure along the axis. Using visible light imaging technology and high-precision XYZ three-dimensional displacement platform control technology, the focused beam can be accurately focused to the center of the fiber core, and at the same time, by moving the laser beam or fiber with high precision, a grating structure that follows a certain trajectory is formed in the fiber core. When the grating track coincides with the central axis of the fiber, the coupling efficiency of the grating is the highest and the backlight loss is the lowest. When the grating track deviates from the central axis of the fiber, it will cause problems such as low coupling efficiency of the grating, unnecessary cladding modes and grating insertion loss. Therefore, the precise alignment of grating tracks is an important prerequisite for the preparation of high-quality fiber gratings by femtosecond laser direct writing.

实用新型内容Utility model content

实用新型目的:针对飞秒激光直写法制备光纤光栅技术中,现有的基于两点固定法得到光纤的实际轨迹是非线性的,从而导致光栅耦合效率低、重复性差,甚至无法制备出一定长度的光纤光栅的问题,本实用新型提出一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置。Purpose of the utility model: For the preparation of fiber gratings by the femtosecond laser direct writing method, the actual trajectory of the fiber obtained by the existing two-point fixation method is nonlinear, resulting in low coupling efficiency and poor repeatability of the grating, and it is even impossible to prepare a certain length of fiber grating. To solve the problem of fiber grating, the utility model proposes a femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition.

技术方案:为实现本实用新型的目的,本实用新型所采用的技术方案是:Technical scheme: in order to realize the purpose of the present utility model, the technical scheme adopted by the present utility model is:

一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,所述飞秒激光直写光纤光栅制备装置包括有飞秒激光直写光路系统、可见光实时成像系统、定位模块和图像识别程序控制模块,所述飞秒激光直写光路系统、可见光实时成像系统和定位模块均和图像识别程序控制模块电性连接,根据待刻光纤的待刻图片,所述图像识别程序控制模块通过定位模块对待刻光纤进行定位,并通过所述飞秒激光直写光路系统对定位后的待刻光纤进行刻写,同时通过所述可见光实时成像系统观察刻写后的待刻光纤的成像图片。A femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition, the femtosecond laser direct writing fiber grating preparation device includes a femtosecond laser direct writing optical path system, a visible light real-time imaging system, a positioning module and an image recognition program The control module, the femtosecond laser direct writing optical path system, the visible light real-time imaging system and the positioning module are all electrically connected with the image recognition program control module. The optical fiber to be inscribed is positioned, and the positioned optical fiber to be inscribed is inscribed by the femtosecond laser direct writing optical path system, and the imaging picture of the inscribed optical fiber to be inscribed is observed by the visible light real-time imaging system.

进一步地讲,所述待刻光纤包括有纤芯、包层和涂敷层,所述纤芯设置在待刻光纤的中心,所述包层设置在纤芯的外部,所述涂敷层设置在包层的外部,同时所述纤芯和包层的材料折射率范围均为:1.44-2.5。Further, the optical fiber to be engraved includes a core, a cladding layer and a coating layer, the core is arranged in the center of the optical fiber to be engraved, the cladding layer is arranged outside the core, and the coating layer is arranged On the outside of the cladding, both the core and the cladding have a refractive index range of 1.44-2.5.

进一步地讲,所述飞秒激光直写光路系统包括有近红外飞秒激光器或放大器、电子快门、组合透镜、二向色镜和聚焦透镜,所述近红外飞秒激光器或放大器发出飞秒激光光束,所述飞秒激光光束通过电子快门和组合透镜发送至二向色镜中进行高反,所述高反后的飞秒激光光束通过聚焦透镜聚焦在待刻光纤中,对所述待刻光纤进行刻写。Further, the femtosecond laser direct writing optical path system includes a near-infrared femtosecond laser or amplifier, an electronic shutter, a combination lens, a dichroic mirror and a focusing lens, and the near-infrared femtosecond laser or amplifier emits a femtosecond laser. The femtosecond laser beam is sent to a dichroic mirror through an electronic shutter and a combined lens for high reflection, and the high reflection femtosecond laser beam is focused on the fiber to be engraved through a focusing lens, and the Optical fiber for writing.

进一步地讲,所述组合透镜包括有半波片Ⅰ、格兰激光波片和半玻片Ⅱ,所述格兰激光波片设置在半波片Ⅰ和半玻片Ⅱ的中部,同时所述半波片Ⅰ、格兰激光波片和半玻片Ⅱ的焦心处于同一水平面上。Further, the combined lens includes a half-wave plate I, a Glan laser wave plate and a half glass plate II, the Glan laser wave plate is arranged in the middle of the half-wave plate I and the half glass plate II, and the The focal centers of half-wave plate I, Glan laser wave plate and half-glass plate II are on the same horizontal plane.

进一步地讲,所述可见光实时成像系统包括有可见光光源和CCD相机,所述可见光光源发出可见光光束,所述可见光光束穿过待刻光纤进入聚焦透镜中,通过所述聚焦透镜聚焦在二向色镜中,同时通过所述二向色镜的高透进入CCD相机中,在所述CCD 相机中得到待刻光纤的成像图片。Further, the visible light real-time imaging system includes a visible light source and a CCD camera, the visible light source emits a visible light beam, the visible light beam passes through the optical fiber to be engraved into a focusing lens, and is focused on a dichroic by the focusing lens. At the same time, it enters the CCD camera through the high transmittance of the dichroic mirror, and the imaging picture of the fiber to be engraved is obtained in the CCD camera.

进一步地讲,所述定位模块包括有三维位移平台,在所述三维位移平台上,通过三维调整架的夹具固定有U型槽组装件,所述待刻光纤通过光纤夹具设置在U型槽组装件的内部。Further, the positioning module includes a three-dimensional displacement platform, on the three-dimensional displacement platform, a U-shaped groove assembly is fixed by a clamp of a three-dimensional adjustment frame, and the optical fiber to be engraved is arranged in the U-shaped groove assembly by an optical fiber clamp. inside of the piece.

进一步地讲,所述U型槽组装件包括有U型槽、盖玻片和折射率匹配液,所述待刻光纤放置在U型槽的中部,所述折射率匹配液设置在待刻光纤和U型槽的内侧之间,所述盖玻片设置在U型槽的上表面。Further, the U-shaped groove assembly includes a U-shaped groove, a cover glass and a refractive index matching liquid, the optical fiber to be engraved is placed in the middle of the U-shaped groove, and the refractive index matching liquid is arranged on the optical fiber to be engraved. Between the inner side of the U-shaped groove, the cover glass is arranged on the upper surface of the U-shaped groove.

进一步地讲,所述图像识别程序控制模块包括有计算机和数据线,所述计算机通过数据线电性连接电子快门、CCD相机和三维位移平台。Further, the image recognition program control module includes a computer and a data line, and the computer is electrically connected to the electronic shutter, the CCD camera and the three-dimensional displacement platform through the data line.

本实用新型的工作原理:The working principle of the present utility model:

S1:通过所述飞秒激光直写光路系统和可见光实时成像系统,使得飞秒激光入射光路与可见光成像光路共轴共焦;S1: Through the femtosecond laser direct writing optical path system and the visible light real-time imaging system, the femtosecond laser incident optical path and the visible light imaging optical path are coaxial and confocal;

S2:打开所述电子快门,所述近红外飞秒激光器或放大器发出飞秒激光光束,同时通过所述计算机打开CCD相机中的成像软件,所述CCD相机开启实时捕捉模式,并调节所述近红外飞秒激光器或放大器的功率,直至在所述成像软件中看到一个亮的光斑,同时在所述计算机的显示屏上标记好该亮光斑的位置;S2: Open the electronic shutter, the near-infrared femtosecond laser or amplifier emits a femtosecond laser beam, and simultaneously open the imaging software in the CCD camera through the computer, the CCD camera enables the real-time capture mode, and adjusts the near-infrared femtosecond laser beam. The power of the infrared femtosecond laser or amplifier until a bright spot is seen in the imaging software, and the position of the bright spot is marked on the display screen of the computer;

S3:关闭所述电子快门(3),调整所述三维位移平台(16)的位置,使得所述可见光光源(9)发出可见光光束(10)时,在所述CCD相机(11)中得到成像图片,并确认所述标记的亮光斑位置是否位于成像图片的纤芯(12.1)中心,若位于,则保持不变,若不位于,则移动所述三维位移平台(16),直至将所述标记的亮光斑位置位于成像图片的纤芯(12.1)中心位置;S3: Close the electronic shutter (3), and adjust the position of the three-dimensional displacement platform (16), so that when the visible light source (9) emits a visible light beam (10), an image is obtained in the CCD camera (11) Picture, and confirm whether the marked bright spot position is located in the center of the fiber core (12.1) of the imaging picture, if so, keep it unchanged, if not, move the three-dimensional displacement platform (16) until the The marked bright spot is located at the center of the fiber core (12.1) of the imaging picture;

S4:寻找待刻光纤光栅区域的光纤中心轴线轨迹;S4: Find the optical fiber central axis track of the fiber grating region to be engraved;

S5:将所述三维位移平台的X轴、Y轴和Z轴均返回至待刻光纤光栅起点位置处,同时设置所述三维位移平台的X轴移动速度,并根据所述光纤中心轴线轨迹,设置所述三维位移平台的Y轴和Z轴位移量;S5: Return the X-axis, Y-axis and Z-axis of the three-dimensional displacement platform to the starting position of the fiber grating to be engraved, and set the X-axis movement speed of the three-dimensional displacement platform at the same time, and according to the optical fiber center axis trajectory, Set the Y-axis and Z-axis displacement of the three-dimensional displacement platform;

S6:设置所述近红外飞秒激光器或放大器输出功率,并打开所述电子快门,启动刻写程序,直至所述三维位移平台的X轴到达待刻光纤光栅终点位置处,关闭所述电子快门,结束所述待刻光纤光栅的制备。S6: Set the output power of the near-infrared femtosecond laser or amplifier, open the electronic shutter, start the writing program, and close the electronic shutter until the X-axis of the three-dimensional displacement platform reaches the end position of the fiber grating to be inscribed. Finish the preparation of the fiber grating to be engraved.

进一步地讲,在所述步骤S1中,使得所述飞秒激光入射光路与可见光成像光路共轴共焦,具体如下:Further, in the step S1, the incident light path of the femtosecond laser and the visible light imaging light path are made coaxial and confocal, as follows:

S1.1:将所述飞秒激光光束垂直通过电子快门和组合透镜的中心,同时45°入射所述二向色镜的中心,所述飞秒激光光束经过二向色镜高反后垂直进入三维位移平台,并垂直入射聚焦透镜;S1.1: Pass the femtosecond laser beam vertically through the center of the electronic shutter and the combined lens, and at the same time enter the center of the dichroic mirror at 45°, the femtosecond laser beam passes through the high reflection of the dichroic mirror and enters vertically Three-dimensional displacement platform, and normal incidence focusing lens;

S1.2:将所述可见光光束经过聚焦透镜和二向色镜后,垂直入射进入所述CCD相机的成像芯片中心。S1.2: After the visible light beam passes through a focusing lens and a dichroic mirror, it is vertically incident into the center of the imaging chip of the CCD camera.

有益效果:与现有技术相比,本实用新型的技术方案具有以下有益技术效果:Beneficial effects: Compared with the prior art, the technical solution of the present utility model has the following beneficial technical effects:

(1)本实用新型可以精准定位光纤布拉格光栅轨迹,并根据位移平台的移动范围和实际需要进行定制,可以实现由微米量级到米级范围内任意长度的光纤光栅,也可以通过程序控制飞秒脉冲的重复频率、移动速率和在光纤中的位置分布,实现均匀布拉格光纤光栅、啁啾布拉格光纤光栅、切趾布拉格光纤光栅、相移布拉格光纤光栅和取样布拉格光纤光栅,即可以实现任意类型的布拉格光纤光栅;(1) The present utility model can precisely locate the fiber Bragg grating trajectory, and can be customized according to the moving range and actual needs of the displacement platform, and can realize the fiber grating of any length in the range from the micron level to the meter level, and can also control the fly by the program. The repetition frequency, movement rate and position distribution of the second pulse in the fiber can realize uniform fiber Bragg grating, chirped fiber Bragg grating, apodized fiber Bragg grating, phase-shifted fiber Bragg grating and sampled fiber Bragg grating, that is, any type of fiber Bragg grating can be realized. fiber Bragg grating;

(2)本实用新型的光纤尺寸、材料和类型均不受限制,无需进行预处理,同时光纤涂敷层也不受限制,可以带涂敷层进行刻写,从而增强了光纤布拉格光栅的鲁棒性,也提高了光纤制备的效率和可重复性,降低了投入成本。(2) The size, material and type of the optical fiber of the present invention are not limited, no pretreatment is required, and the coating layer of the optical fiber is also not limited, and can be written with the coating layer, thereby enhancing the robustness of the fiber Bragg grating It also improves the efficiency and repeatability of optical fiber preparation, and reduces the input cost.

附图说明Description of drawings

图1是本实用新型基于机器学习图像识别的飞秒激光直写光纤光栅制备装置图;1 is a diagram of a femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition of the present utility model;

图2是本实用新型的待刻光纤在三维位移平台中待刻光纤光栅结构示意图;Fig. 2 is the structural schematic diagram of the fiber grating to be engraved in the three-dimensional displacement platform of the present invention;

图3是本实用新型的待刻光纤放置在U型槽中的横截面示意图;3 is a schematic cross-sectional view of the optical fiber to be engraved of the present invention placed in a U-shaped groove;

图4是本实用新型在G652D和UHNA3光纤中轴线上刻写光栅后的显微镜图片;Fig. 4 is the microscope picture after the utility model writes grating on the central axis of G652D and UHNA3 optical fibers;

图5是本实用新型的50毫米长G652D光纤均匀布拉格光栅透射光谱图;5 is a 50 mm long G652D fiber uniform Bragg grating transmission spectrum diagram of the present invention;

图6是本实用新型的50毫米长UHNA3光纤均匀布拉格光栅透射光谱图;6 is a 50 mm long UHNA3 fiber uniform Bragg grating transmission spectrum diagram of the present invention;

图中标号对应部件名称:The label in the figure corresponds to the name of the part:

1、近红外飞秒激光器或放大器;2、飞秒激光光束;3、电子快门;4、半波片;5、格兰激光波片;6、半玻片;7、二向色镜;8、聚焦透镜;9、可见光光源;10、可见光光束;11、CCD相机;12、待刻光纤;12.1、纤芯;12.2、包层;12.3、涂敷层;13、光纤夹具;14、U型槽组装件;14.1、U型槽;14.2、盖玻片;14.3、折射率匹配液;15、三维调整架的夹具;16、三维位移平台;17、计算机;18、数据线;19、待刻光纤光栅。1. Near-infrared femtosecond laser or amplifier; 2. Femtosecond laser beam; 3. Electronic shutter; 4. Half-wave plate; 5. Glan laser wave plate; 6. Half-glass; 7. Dichroic mirror; 8 , focusing lens; 9, visible light source; 10, visible light beam; 11, CCD camera; 12, fiber to be engraved; 12.1, fiber core; 12.2, cladding; 12.3, coating layer; 13, fiber fixture; 14, U-shaped Tank assembly; 14.1, U-shaped groove; 14.2, Cover glass; 14.3, Refractive index matching liquid; 15, Fixture of 3D adjustment frame; 16, 3D displacement platform; 17, Computer; 18, Data cable; 19, To be engraved fiber grating.

具体实施方式Detailed ways

为使本实用新型实施例的目的、技术方案和优点更加清楚,下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述。其中,所描述的实施例是本实用新型一部分实施例,而不是全部的实施例。因此,以下对在附图中提供的本实用新型的实施例的详细描述并非旨在限制要求保护的本实用新型的范围,而是仅仅表示本实用新型的选定实施例。In order to make the purposes, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions in the embodiments of the present utility model will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present utility model. Among them, the described embodiments are part of the embodiments of the present invention, but not all of the embodiments. Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention.

实施例1Example 1

参考图1,本实施例提供了一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,该飞秒激光直写光纤光栅制备装置由飞秒激光直写光路系统、可见光实时成像系统、定位模块和图像识别程序控制模块四部分组成。其中飞秒激光直写光路系统、可见光实时成像系统和定位模块均和图像识别程序控制模块电性连接,根据待刻光纤12 的待刻图片,图像识别程序控制模块通过定位模块对待刻光纤12进行定位,并通过飞秒激光直写光路系统对定位后的待刻光纤12进行刻写,同时通过可见光实时成像系统观察刻写后的待刻光纤12的成像图片。Referring to FIG. 1, this embodiment provides a femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition. The femtosecond laser direct writing fiber grating preparation device is composed of a femtosecond laser direct writing optical path system and a visible light real-time imaging system. It consists of four parts: positioning module and image recognition program control module. Among them, the femtosecond laser direct writing optical path system, the visible light real-time imaging system and the positioning module are all electrically connected with the image recognition program control module. Position, and use the femtosecond laser direct writing optical path system to inscribe the positioned optical fiber 12 to be inscribed, and observe the imaging picture of the inscribed optical fiber 12 to be inscribed through the visible light real-time imaging system.

参考图2,待刻光纤12包括有纤芯12.1、包层12.2和涂敷层12.3,在本实施例中,待刻光纤12指横截面为中心对称的实芯光纤。其中纤芯12.1设置在待刻光纤12的中心,且纤芯12.1外面被包层12.2所包围,包层12.2外面被涂敷层12.3所包围,即涂敷层12.3 的直径大于包层12.2的直径,包层12.2的直径大于纤芯12.1的直径。具体地讲,纤芯 12.1的层数为1,包层12.2的层数为1或2,涂敷层12.3的层数为0-3,其中当涂敷层 12.3的层数为0时,则表示待刻光纤12中不含有涂敷层12.3。2 , the optical fiber 12 to be engraved includes a core 12.1, a cladding 12.2 and a coating layer 12.3. In this embodiment, the optical fiber 12 to be engraved refers to a solid core optical fiber with a centrally symmetric cross section. The core 12.1 is arranged in the center of the optical fiber 12 to be engraved, and the outer surface of the core 12.1 is surrounded by a cladding layer 12.2, and the outer surface of the cladding layer 12.2 is surrounded by a coating layer 12.3, that is, the diameter of the coating layer 12.3 is larger than that of the cladding layer 12.2. , the diameter of the cladding 12.2 is greater than the diameter of the core 12.1. Specifically, the number of layers of the core 12.1 is 1, the number of layers of the cladding layer 12.2 is 1 or 2, and the number of layers of the coating layer 12.3 is 0-3. When the number of layers of the coating layer 12.3 is 0, then It means that the optical fiber 12 to be engraved does not contain the coating layer 12.3.

同时纤芯12.1和包层12.2的材料折射率范围均为:1.44-2.5,是基于石英玻璃、氟化物玻璃、硅酸盐玻璃、磷酸盐玻璃、硼硅酸盐玻璃、硫化物玻璃、碲酸盐玻璃,以及这些玻璃基质的混合物制备而成的光纤。纤芯12.1直径范围为:0.5微米-100微米,包层12.2直径范围为:50微米-2毫米。At the same time, the refractive index range of the core 12.1 and the cladding 12.2 is 1.44-2.5, which are based on quartz glass, fluoride glass, silicate glass, phosphate glass, borosilicate glass, sulfide glass, telluric acid Salt glasses, and optical fibers made from mixtures of these glass matrices. The diameter of the core 12.1 is in the range of 0.5 microns to 100 microns, and the diameter of the cladding 12.2 is in the range of 50 microns to 2 mm.

在飞秒激光直写光路系统中,飞秒激光直写光路系统包括有近红外飞秒激光器或放大器1、电子快门3、组合透镜、二向色镜7和聚焦透镜8,其中组合透镜包括有半波片Ⅰ4、格兰激光波片5和半玻片Ⅱ6。具体地讲,近红外飞秒激光器或放大器1为飞秒激光光源,其发出飞秒激光光束2,且飞秒激光光源的中心波长范围为:780纳米-1080纳米,脉冲宽度范围为:25飞秒-220飞秒,重复频率范围为:1Hz—100MHz。电子快门3用于控制光栅刻写时飞秒激光脉冲的开和关,组合透镜用于调整飞秒激光的功率和偏振态,二向色镜7用于对入射飞秒激光实现高反,对入射可见光实现高透,聚焦透镜8用于将汇聚光斑聚焦到微米量级,为10X,20X,30X,40X,50X,60X,70X,80X,90X和100X的显微透镜或油镜。In the femtosecond laser direct writing optical path system, the femtosecond laser direct writing optical path system includes a near-infrared femtosecond laser or amplifier 1, an electronic shutter 3, a combined lens, a dichroic mirror 7 and a focusing lens 8, wherein the combined lens includes a Half wave plate I4, Glan laser wave plate 5 and half glass plate II6. Specifically, the near-infrared femtosecond laser or amplifier 1 is a femtosecond laser light source, which emits a femtosecond laser beam 2, and the center wavelength range of the femtosecond laser light source is: 780 nm-1080 nm, and the pulse width range is: 25 femtoseconds Second-220 femtoseconds, repetition frequency range: 1Hz-100MHz. The electronic shutter 3 is used to control the on and off of the femtosecond laser pulse when the grating is written, the combined lens is used to adjust the power and polarization state of the femtosecond laser, and the dichroic mirror 7 is used to achieve high reflection of the incident femtosecond laser, and to the incident femtosecond laser. The visible light achieves high transparency, and the focusing lens 8 is used to focus the converging light spot to the micron level, which is a microlens or oil lens of 10X, 20X, 30X, 40X, 50X, 60X, 70X, 80X, 90X and 100X.

飞秒激光光束2依次通过电子快门3、半波片Ⅰ4、格兰激光波片5和半玻片Ⅱ6后,进入二向色镜7中进行高反,且高反后的飞秒激光光束2通过聚焦透镜8聚焦在待刻光纤12中,对待刻光纤12进行刻写。值得注意的是,格兰激光波片5设置在半波片Ⅰ4 和半玻片Ⅱ6的中部,同时半波片Ⅰ4、格兰激光波片5和半玻片Ⅱ6的焦心处于同一水平面上。After the femtosecond laser beam 2 passes through the electronic shutter 3, the half-wave plate I4, the Glan laser wave plate 5 and the half-glass plate II6 in sequence, it enters the dichroic mirror 7 for high reflection, and the high-reflection femtosecond laser beam 2 The optical fiber 12 to be inscribed is focused on the optical fiber 12 to be inscribed by the focusing lens 8, and the optical fiber 12 to be inscribed is inscribed. It is worth noting that the Glan laser wave plate 5 is arranged in the middle of the half wave plate I4 and the half glass plate II6, and the focal centers of the half wave plate I4, the Glan laser wave plate 5 and the half glass plate II6 are on the same horizontal plane.

在可见光实时成像系统中,可见光实时成像系统包括有可见光光源9和CCD相机11,其中可见光光源9发出接近平行光的可见光光束10,该可见光光源9可以是可见光 LED,也可以是宽谱可见光光源,譬如:卤素光源。CCD相机11则可以是工业级或者科研级高分辨率的彩色或黑白相机。In the visible light real-time imaging system, the visible light real-time imaging system includes a visible light source 9 and a CCD camera 11, wherein the visible light source 9 emits a visible light beam 10 that is close to parallel light, and the visible light source 9 can be a visible light LED or a broad-spectrum visible light source , for example: halogen light sources. The CCD camera 11 can be an industrial-grade or scientific-grade high-resolution color or black-and-white camera.

可见光光束10会穿过待刻光纤12进入聚焦透镜8中,通过聚焦透镜8的聚焦,可见光光束10聚焦在二向色镜7中,通过二向色镜7的高透进入CCD相机11中,在CCD 相机11中得到待刻光纤12的成像图片。The visible light beam 10 will pass through the optical fiber 12 to be engraved into the focusing lens 8, through the focusing of the focusing lens 8, the visible light beam 10 will be focused in the dichroic mirror 7, and enter the CCD camera 11 through the high transmittance of the dichroic mirror 7, The imaging picture of the optical fiber 12 to be engraved is obtained in the CCD camera 11 .

参考图3,在定位模块中,定位模块包括有三维位移平台16,在三维位移平台16 上设置有光纤夹具13和U型槽组装件14,其中U型槽组装件14由上到下分别由U型槽14.1、盖玻片14.2和折射率匹配液14.3构成。具体地讲,通过三维调整架的夹具15 将U型槽组装件14固定在三维位移平台16上,通过光纤夹具13将待刻光纤12放置在 U型槽14.1的中部,U型槽14.1的内侧结构可以是U型结构,也可以是V型结构,还可以是其他结构,其内径不小于待刻光纤12的外径,且在待刻光纤12和U型槽14.1 的内侧之间设置有折射率匹配液14.3,在U型槽14.1的上表面设置有盖玻片14.2,其厚度范围为:80微米—150微米。其中折射率匹配液14.3的折射率范围为:1.33—2.5,可以是食用油、商用或科研用的折射率匹配油等。三维位移平台16控制精度为1纳米,移动速度范围为:0.0001毫米/秒—10米/秒。Referring to FIG. 3, in the positioning module, the positioning module includes a three-dimensional displacement platform 16, and the three-dimensional displacement platform 16 is provided with an optical fiber clamp 13 and a U-shaped groove assembly 14, wherein the U-shaped groove assembly 14 is composed of The U-shaped groove 14.1, the cover glass 14.2 and the refractive index matching liquid 14.3 are formed. Specifically, the U-shaped groove assembly 14 is fixed on the three-dimensional displacement platform 16 by the clamp 15 of the three-dimensional adjustment frame, and the optical fiber 12 to be engraved is placed in the middle of the U-shaped groove 14.1 by the optical fiber clamp 13. The inner side of the U-shaped groove 14.1 The structure can be a U-shaped structure, a V-shaped structure, or other structures, the inner diameter of which is not less than the outer diameter of the optical fiber 12 to be engraved, and a refraction is provided between the optical fiber 12 to be engraved and the inner side of the U-shaped groove 14.1. The rate matching solution 14.3 is provided with a cover glass 14.2 on the upper surface of the U-shaped groove 14.1, and its thickness ranges from 80 microns to 150 microns. The refractive index range of the refractive index matching liquid 14.3 is: 1.33-2.5, which can be edible oil, refractive index matching oil for commercial use or scientific research, and the like. The control precision of the three-dimensional displacement platform 16 is 1 nanometer, and the moving speed range is: 0.0001 mm/s-10 m/s.

在图像识别程序控制模块中,图像识别程序控制模块包括有计算机17和数据线18,且计算机17通过数据线18电性连接电子快门3、CCD相机11和三维位移平台16。In the image recognition program control module, the image recognition program control module includes a computer 17 and a data line 18 , and the computer 17 is electrically connected to the electronic shutter 3 , the CCD camera 11 and the three-dimensional displacement platform 16 through the data line 18 .

本实施例还提供了一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置的制备方法,该制备方法具体包括如下步骤:This embodiment also provides a preparation method of a femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition, and the preparation method specifically includes the following steps:

步骤S1:完成飞秒激光入射光路和可见光成像光路的准备工作,即通过飞秒激光直写光路系统和可见光实时成像系统,使得飞秒激光入射光路与可见光成像光路共轴共焦,具体如下:Step S1: Complete the preparation for the femtosecond laser incident optical path and the visible light imaging optical path, that is, through the femtosecond laser direct writing optical path system and the visible light real-time imaging system, make the femtosecond laser incident optical path and the visible light imaging optical path coaxial and confocal, as follows:

步骤S1.1:将飞秒激光光束2垂直通过电子快门3和组合透镜的中心,同时45°入射进入二向色镜7的中心,飞秒激光光束2经过二向色镜7高反后,垂直进入三维位移平台16的XY平面中,并垂直入射聚焦透镜8。Step S1.1: The femtosecond laser beam 2 vertically passes through the center of the electronic shutter 3 and the combined lens, and enters the center of the dichroic mirror 7 at a 45° angle. After the femtosecond laser beam 2 passes through the dichroic mirror 7, the Entering the XY plane of the three-dimensional displacement stage 16 perpendicularly, and entering the focusing lens 8 perpendicularly.

步骤S1.2:将可见光光束10经过聚焦透镜8和二向色镜7后,垂直入射进入CCD 相机11的成像芯片中心。Step S1.2: After the visible light beam 10 passes through the focusing lens 8 and the dichroic mirror 7, it is vertically incident into the center of the imaging chip of the CCD camera 11.

步骤S2:打开电子快门3,近红外飞秒激光器或放大器1发出飞秒激光光束2,同时通过计算机17打开CCD相机11中的成像软件,并开启实时捕捉模式,由小到大地调节近红外飞秒激光器或放大器1的功率,直至在成像软件中看到一个亮的光斑为止,同时在计算机17的显示屏上标记好该亮光斑的位置,该标记的为止表明飞秒激光光束2 通过聚焦透镜8之后焦点的成像位置。Step S2: Open the electronic shutter 3, the near-infrared femtosecond laser or the amplifier 1 emits the femtosecond laser beam 2, and at the same time, the imaging software in the CCD camera 11 is opened through the computer 17, and the real-time capture mode is turned on, and the near-infrared flying is adjusted from small to large. The power of the second laser or amplifier 1, until a bright spot is seen in the imaging software, and the position of the bright spot is marked on the display screen of the computer 17, and the mark indicates that the femtosecond laser beam 2 passes through the focusing lens Imaging position of the focus after 8.

步骤S3:关闭电子快门3,调整三维位移平台16的位置,使得可见光光源9发出可见光光束10时,在CCD相机11中得到成像图片,并确认步骤S2中标记的亮光斑位置是否位于成像图片的纤芯中心,若位于,则保持不变。Step S3: close the electronic shutter 3, adjust the position of the three-dimensional displacement platform 16, so that when the visible light source 9 emits the visible light beam 10, the imaging picture is obtained in the CCD camera 11, and confirm whether the bright spot position marked in step S2 is located in the imaging picture. The core center, if located, remains unchanged.

若不位于,则以1纳米的精度移动三维位移平台16的Y轴,直至标记的亮光斑位置位于成像图片的纤芯12.1中心位置,进而得到待刻光纤12在纤芯12.1中心的成像图片及其特征曲线。If it is not located, move the Y axis of the three-dimensional displacement platform 16 with an accuracy of 1 nanometer until the marked bright spot is located at the center of the fiber core 12.1 of the imaging picture, and then obtain the image of the fiber to be engraved 12 in the center of the fiber core 12.1. its characteristic curve.

步骤S4:寻找待刻光纤光栅19区域的光纤中心轴线轨迹。Step S4: Find the optical fiber central axis track in the area of the fiber grating 19 to be engraved.

步骤S5:将三维位移平台16的X轴、Y轴和Z轴均返回至待刻光纤光栅19的起点位置处,同时设置三维位移平台16的X轴移动速度,并根据步骤S4中得到的光纤中心轴线轨迹,设置三维位移平台16的Y轴和Z轴位移量。Step S5: Return the X-axis, Y-axis and Z-axis of the three-dimensional displacement platform 16 to the starting position of the fiber grating 19 to be engraved, and set the X-axis movement speed of the three-dimensional displacement platform 16 at the same time, and according to the optical fiber obtained in step S4 The trajectory of the central axis is used to set the displacement amounts of the Y-axis and Z-axis of the three-dimensional displacement platform 16 .

在本实施例中,光纤布拉格光栅特征公式具体为:In this embodiment, the characteristic formula of the fiber Bragg grating is specifically:

m·λFBG=2·neff·Λm·λ FBG =2·n eff ·Λ

其中:m为光纤布拉格光栅阶数,λFBG为光纤布拉格光栅的中心波长,neff为待刻光纤的有效折射率,Λ为光纤布拉格光栅周期。Where: m is the order of the fiber Bragg grating, λ FBG is the center wavelength of the fiber Bragg grating, n eff is the effective refractive index of the fiber to be engraved, and Λ is the period of the fiber Bragg grating.

具体地讲,光纤布拉格光栅周期Λ具体为:Specifically, the fiber Bragg grating period Λ is specifically:

Λ=v/fΛ=v/f

其中:Λ为光纤布拉格光栅周期,v为待刻光纤沿着三维位移平台的X轴移动速度,f为飞秒激光的重复频率。Among them: Λ is the fiber Bragg grating period, v is the moving speed of the fiber to be engraved along the X axis of the three-dimensional displacement platform, and f is the repetition frequency of the femtosecond laser.

步骤S6:设置近红外飞秒激光器或放大器1的输出功率,并打开所述电子快门3,启动刻写程序,直至所述三维位移平台16的X轴到达待刻光纤光栅19终点位置处,关闭所述电子快门3,结束所述待刻光纤光栅19的制备。Step S6: set the output power of the near-infrared femtosecond laser or amplifier 1, and open the electronic shutter 3, start the writing program, until the X-axis of the three-dimensional displacement platform 16 reaches the end position of the fiber grating 19 to be engraved, close all The electronic shutter 3 is finished, and the preparation of the fiber grating 19 to be engraved is completed.

光纤光栅制备完成后,通过光谱仪测试所制备的光纤光栅的反射和透射光谱,用光学显微镜检测所制备的光栅在纤芯中的形貌和轨迹等,完成对光纤光栅的表征。After the preparation of the fiber grating is completed, the reflection and transmission spectra of the prepared fiber grating are tested by a spectrometer, and the morphology and trajectory of the prepared fiber grating in the fiber core are detected by an optical microscope to complete the characterization of the fiber grating.

参考图4,其中G652D光纤光栅的入射飞秒激光单脉冲能量为200nJ,UHNA3光纤光栅的入射飞秒激光单脉冲能量为86nJ,X轴移动速度为v=1.08毫米/秒。在此条件下,制备得到50毫米长的均匀布拉格光纤光栅,采用0.02nm的波长精度测得透射光谱如图5和图6所示,由图可知,G652D光纤光栅的中心波长为1556.82nm,光栅中心波长反射率为99.98%,UHNA3光纤光栅的中心波长为1564.85nm,光栅中心波长反射率为99.76%。Referring to Figure 4, the incident femtosecond laser pulse energy of G652D fiber grating is 200nJ, the incident femtosecond laser pulse energy of UHNA3 fiber grating is 86nJ, and the X-axis moving speed is v=1.08 mm/s. Under these conditions, a uniform fiber Bragg grating with a length of 50 mm was prepared, and the transmission spectrum was measured with a wavelength accuracy of 0.02 nm, as shown in Figures 5 and 6. It can be seen from the figures that the center wavelength of the G652D fiber grating is 1556.82 nm, and the grating The reflectivity at the center wavelength is 99.98%, the center wavelength of the UHNA3 fiber grating is 1564.85nm, and the reflectivity at the center wavelength of the grating is 99.76%.

以上示意性的对本实用新型及其实施方式进行了描述,该描述没有限制性,附图中所示的也只是本实用新型的实施方式之一,实际的结构和方法并不局限于此。所以,如果本领域的普通技术人员受其启示,在不脱离本实用新型创造宗旨的情况下,不经创造性的设计出与该技术方案相似的结构方式及实施例,均属于本实用新型的保护范围。The present invention and its embodiments have been schematically described above, and the description is not restrictive, and what is shown in the accompanying drawings is only one of the embodiments of the present invention, and the actual structure and method are not limited thereto. Therefore, if those of ordinary skill in the art are inspired by it, without departing from the purpose of creation of the present utility model, without creative design of the structural mode and embodiment similar to the technical solution, all belong to the protection of the present utility model. scope.

Claims (8)

1.一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,其特征在于,所述飞秒激光直写光纤光栅制备装置包括有飞秒激光直写光路系统、可见光实时成像系统、定位模块和图像识别程序控制模块,所述飞秒激光直写光路系统、可见光实时成像系统和定位模块均和图像识别程序控制模块电性连接,根据待刻光纤(12)的待刻图片,所述图像识别程序控制模块通过定位模块对待刻光纤(12)进行定位,并通过所述飞秒激光直写光路系统对定位后的待刻光纤(12)进行刻写,同时通过所述可见光实时成像系统观察刻写后的待刻光纤(12)的成像图片。1. a femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition, is characterized in that, described femtosecond laser direct writing fiber grating preparation device includes femtosecond laser direct writing optical path system, visible light real-time imaging system, The positioning module and the image recognition program control module, the femtosecond laser direct writing optical path system, the visible light real-time imaging system and the positioning module are all electrically connected with the image recognition program control module, and according to the to-be-engraved picture of the optical fiber (12) to be engraved, all the The image recognition program control module locates the optical fiber (12) to be engraved through the positioning module, and inscribes the optical fiber (12) to be engraved after the positioning through the femtosecond laser direct writing optical path system, and simultaneously passes through the visible light real-time imaging system. Observe the imaging picture of the optical fiber (12) to be inscribed after inscription. 2.根据权利要求1所述的一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,其特征在于,所述待刻光纤(12)包括有纤芯(12.1)、包层(12.2)和涂敷层(12.3),所述纤芯(12.1)设置在待刻光纤(12)的中心,所述包层(12.2)设置在纤芯(12.1)的外部,所述涂敷层(12.3)设置在包层(12.2)的外部,同时所述纤芯(12.1)和包层(12.2)的材料折射率范围均为:1.44-2.5。2. A device for preparing femtosecond laser direct writing fiber grating based on machine learning image recognition according to claim 1, wherein the optical fiber (12) to be engraved comprises a fiber core (12.1), a cladding (12.1) 12.2) and a coating layer (12.3), the core (12.1) is arranged in the center of the optical fiber (12) to be engraved, the cladding layer (12.2) is arranged outside the core (12.1), the coating layer (12.3) is arranged on the outside of the cladding (12.2), and the refractive indices of the core (12.1) and the cladding (12.2) are both in the range of 1.44-2.5. 3.根据权利要求1或2所述的一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,其特征在于,所述飞秒激光直写光路系统包括有近红外飞秒激光器或放大器(1)、电子快门(3)、组合透镜、二向色镜(7)和聚焦透镜(8),所述近红外飞秒激光器或放大器(1)发出飞秒激光光束(2),所述飞秒激光光束(2)通过电子快门(3)和组合透镜发送至二向色镜(7)中进行高反,所述高反后的飞秒激光光束(2)通过聚焦透镜(8)聚焦在待刻光纤(12)中,对所述待刻光纤(12)进行刻写。3. a kind of femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition according to claim 1 or 2, is characterized in that, described femtosecond laser direct writing optical path system comprises a near-infrared femtosecond laser or An amplifier (1), an electronic shutter (3), a combination lens, a dichroic mirror (7) and a focusing lens (8), the near-infrared femtosecond laser or amplifier (1) emits a femtosecond laser beam (2), so The femtosecond laser beam (2) is sent to a dichroic mirror (7) through an electronic shutter (3) and a combined lens for high reflection, and the high reflection femtosecond laser beam (2) passes through a focusing lens (8) Focusing on the optical fiber (12) to be inscribed, and inscription on the optical fiber (12) to be inscribed. 4.根据权利要求3所述的一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,其特征在于,所述组合透镜包括有半波片Ⅰ(4)、格兰激光波片(5)和半玻片Ⅱ(6),所述格兰激光波片(5)设置在半波片Ⅰ(4)和半玻片Ⅱ(6)的中部,同时所述半波片Ⅰ(4)、格兰激光波片(5)和半玻片Ⅱ(6)的焦心处于同一水平面上。4. A device for preparing femtosecond laser direct writing fiber grating based on machine learning image recognition according to claim 3, wherein the combined lens comprises a half-wave plate I (4), a Glan laser wave plate (5) and half glass plate II (6), the Glan laser wave plate (5) is arranged in the middle of half wave plate I (4) and half glass plate II (6), while the half wave plate I ( 4) The focal centers of the Glan laser wave plate (5) and the half glass plate II (6) are on the same horizontal plane. 5.根据权利要求3所述的一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,其特征在于,所述可见光实时成像系统包括有可见光光源(9)和CCD相机(11),所述可见光光源(9)发出可见光光束(10),所述可见光光束(10)穿过待刻光纤(12)进入聚焦透镜(8)中,通过所述聚焦透镜(8)聚焦在二向色镜(7)中,同时通过所述二向色镜(7)的高透进入CCD相机(11)中,在所述CCD相机(11)中得到待刻光纤(12)的成像图片。5. A femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition according to claim 3, wherein the visible light real-time imaging system comprises a visible light source (9) and a CCD camera (11) , the visible light source (9) emits a visible light beam (10), and the visible light beam (10) passes through the optical fiber (12) to be engraved and enters the focusing lens (8), and is focused on the two-way through the focusing lens (8). In the chromatic mirror (7), the high transmittance of the dichroic mirror (7) enters the CCD camera (11) at the same time, and the imaging picture of the optical fiber (12) to be engraved is obtained in the CCD camera (11). 6.根据权利要求5所述的一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,其特征在于,所述定位模块包括有三维位移平台(16),在所述三维位移平台(16)上,通过三维调整架的夹具(15)固定有U型槽组装件(14),所述待刻光纤(12)通过光纤夹具(13)设置在U型槽组装件(14)的内部。6. A femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition according to claim 5, wherein the positioning module comprises a three-dimensional displacement platform (16), and the three-dimensional displacement platform On (16), the U-shaped groove assembly (14) is fixed by the clamp (15) of the three-dimensional adjustment frame, and the optical fiber (12) to be engraved is arranged on the U-shaped groove assembly (14) by the fiber clamp (13). internal. 7.根据权利要求6所述的一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,其特征在于,所述U型槽组装件(14)包括有U型槽(14.1)、盖玻片(14.2)和折射率匹配液(14.3),所述待刻光纤(12)放置在U型槽(14.1)的中部,所述折射率匹配液(14.3)设置在待刻光纤(12)和U型槽(14.1)的内侧之间,所述盖玻片(14.2)设置在U型槽(14.1)的上表面。7. The device for preparing femtosecond laser direct writing fiber grating based on machine learning image recognition according to claim 6, wherein the U-shaped groove assembly (14) comprises a U-shaped groove (14.1), A cover glass (14.2) and a refractive index matching liquid (14.3), the optical fiber (12) to be engraved is placed in the middle of the U-shaped groove (14.1), and the refractive index matching liquid (14.3) is arranged on the optical fiber (12) to be engraved ) and the inner side of the U-shaped groove (14.1), the cover glass (14.2) is arranged on the upper surface of the U-shaped groove (14.1). 8.根据权利要求6所述的一种基于机器学习图像识别的飞秒激光直写光纤光栅制备装置,其特征在于,所述图像识别程序控制模块包括有计算机(17)和数据线(18),所述计算机(17)通过数据线(18)电性连接电子快门(3)、CCD相机(11)和三维位移平台(16)。8. A femtosecond laser direct writing fiber grating preparation device based on machine learning image recognition according to claim 6, wherein the image recognition program control module comprises a computer (17) and a data line (18) , the computer (17) is electrically connected to the electronic shutter (3), the CCD camera (11) and the three-dimensional displacement platform (16) through a data line (18).
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