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CN211467144U - Film cooling device for film blowing machine - Google Patents

Film cooling device for film blowing machine Download PDF

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Publication number
CN211467144U
CN211467144U CN201922261419.3U CN201922261419U CN211467144U CN 211467144 U CN211467144 U CN 211467144U CN 201922261419 U CN201922261419 U CN 201922261419U CN 211467144 U CN211467144 U CN 211467144U
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CN
China
Prior art keywords
air
wall
film
disc
annular
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Expired - Fee Related
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CN201922261419.3U
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Chinese (zh)
Inventor
许银生
王云峰
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Jiangsu Plet Plastic Packing Co ltd
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Jiangsu Plet Plastic Packing Co ltd
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Priority to CN201922261419.3U priority Critical patent/CN211467144U/en
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Abstract

The utility model discloses a film cooling device for a film blowing machine, which comprises an air ring, a splitter disc, an air inlet channel and a fan; the periphery of the wind ring is provided with a plurality of air inlets, and the center of the wind ring is provided with an annular blowing port which is communicated with the air inlets and used for blowing air to the film; the periphery of the flow distribution disc is provided with air outlets which are in one-to-one correspondence with the air inlets, the air outlets are connected with the corresponding air inlets, and the center of the flow distribution disc is provided with an air suction opening communicated with the air outlets; the air inlet channel is arranged underground, the fan is arranged in the air inlet channel, and an outlet of the fan is connected with the air suction opening, so that the fan can convey an air source in the air inlet channel to the flow distribution disc. The utility model discloses can blow off the moderate wind of temperature to the film, not receive the influence in season, improve the cooling rate of film, guarantee the production quality of film to can follow even all around of film and blow to the film, make the even cooling of film.

Description

Film cooling device for film blowing machine
Technical Field
The utility model relates to a film cooling device for film blowing machine.
Background
Currently, a film blowing machine is the main equipment for producing films, and the films produced just now need to be cooled by a cooling device which rapidly cools the films by blowing air to the films. However, in hot summer, the air temperature is high, so that the temperature of the air blown out by the cooling device is high, which is not enough to rapidly cool the film, and the production quality of the film is affected. In addition, when the existing cooling device blows air to the film from the periphery of the film, the air volume in each direction is not uniform enough, which is not beneficial to the uniform cooling of the film.
Disclosure of Invention
The utility model aims to solve the technical problem that overcome prior art's defect, provide a film cooling device for film blowing machine, it can blow off the moderate wind of temperature to the film, does not receive the influence in season, improves the cooling rate of film, guarantees the production quality of film to can follow the film evenly all around blow to the film, make the film evenly cool off.
In order to solve the technical problem, the technical scheme of the utility model is that: a film cooling apparatus for a film blowing machine, comprising:
the outer periphery of the air ring is provided with a plurality of air inlets, and the central part of the air ring is provided with an annular air blowing opening which is communicated with all the air inlets and used for blowing air to a film in the film blow molding machine;
the periphery of the flow distribution disc is provided with air outlets which are in one-to-one correspondence with the air inlets, the air outlets are connected with the corresponding air inlets through air supply pipelines, and the central part of the flow distribution disc is provided with air suction ports communicated with all the air outlets;
an air inlet channel arranged underground;
and the outlet of the fan is connected with the air suction opening through a connecting pipeline, so that the fan can convey the air source in the air inlet channel to the flow distribution disc.
In order to further enable the wind blowing to the film to be more uniform, an air inlet collecting cavity and a flow equalizing device are arranged in the air ring; wherein,
the air inlet collecting cavity is of an annular structure and is arranged in the peripheral part of the air ring, and the air inlet collecting cavity is communicated with all the air inlets;
the flow equalizing device is arranged between the air inlet collecting cavity and the air blowing port, and a flow equalizing channel which is used for communicating the air inlet collecting cavity with the air blowing port and enabling an air source in the air inlet collecting cavity to uniformly flow into the air blowing port is arranged in the flow equalizing device.
Further provides a concrete structure of the wind ring, wherein the wind ring comprises an upper end wall, a lower end wall, a side ring wall, an inner ring wall and an outer ring wall; wherein,
the upper end part of the side annular wall is connected with the peripheral part of the upper end wall;
the lower end part of the side annular wall is connected with the peripheral part of the lower end wall;
the outer annular wall is connected to the inner periphery of the upper end wall, and a gap is formed between the lower end part of the outer annular wall and the lower end wall;
the inner annular wall extends into the outer annular wall and is connected with the inner peripheral part of the lower end wall;
the air blowing port is arranged between the inner annular wall and the outer annular wall.
Furthermore, the air inlet is formed in the side annular wall.
Further provided is a specific scheme of the current sharing device, wherein the current sharing device comprises:
at least two lower wind baffles concentrically arranged on the lower end wall from inside to outside in sequence, a gap is formed between the upper end part of each lower wind baffle and the upper end wall, and a lower annular groove is formed between any two adjacent lower wind baffles;
the upper wind-shielding plates are in one-to-one correspondence with the lower annular grooves and connected to the upper end walls, the lower end portions of the upper wind-shielding plates extend into the corresponding lower annular grooves, gaps are reserved between the upper wind-shielding plates and the lower end walls, and the upper wind-shielding plates and the lower wind-shielding plates are matched to form the flow equalizing channels.
Further, in order to make the air blowing to the film more uniform, an air outlet collecting cavity and a shunting device are arranged in the shunting disc; wherein,
the air outlet collecting cavity is of an annular structure and is arranged in the peripheral part of the flow distribution disc, and the air outlet collecting cavity is communicated with all the air outlets;
the flow dividing device is arranged between the air outlet collecting cavity and the air suction opening, and a flow dividing channel which is used for communicating the air outlet collecting cavity with the air suction opening and enabling an air source accessed by the air suction opening to uniformly flow into the air outlet collecting cavity is arranged in the flow dividing device.
Further provided is a concrete structure of the diverter tray, wherein the diverter tray comprises an upper tray wall, a lower tray wall and a side tray wall; wherein,
the side disc wall is of an annular structure, the upper end part of the side disc wall is connected with the outer peripheral part of the upper disc wall, and the lower end part of the side disc wall is connected with the outer peripheral part of the lower disc wall; the air suction opening is formed in the central portion of the upper disc wall or the lower disc wall, and the air outlet is formed in the side disc wall.
Further provides a concrete scheme of the shunt device, and the shunt device comprises:
at least two upper flow distribution plates are sequentially concentrically arranged on the upper disc wall from inside to outside, a gap is formed between the lower end part of each upper flow distribution plate and the lower disc wall, and an upper annular groove is formed between any two adjacent upper flow distribution plates;
the upper distribution plates are in one-to-one correspondence with the upper annular grooves and connected to the lower disc wall, the upper end parts of the lower distribution plates extend into the corresponding upper annular grooves, gaps are reserved between the upper distribution plates and the upper disc wall, and the upper distribution plates and the lower distribution plates are matched to form the distribution channels;
the air suction opening is communicated with the inner side of the innermost upper splitter plate.
Further, the air inlets are uniformly distributed on the outer peripheral part of the air ring along the circumferential direction of the air ring, and the air outlets are uniformly distributed on the outer peripheral part of the diverter tray along the circumferential direction of the diverter tray.
After the technical scheme is adopted, the fan conveys the air source with lower temperature in the air inlet channel to the splitter disc, the air source uniformly enters the air outlet collecting cavity through the split of the upper splitter plate and the lower splitter plate, then enters the air inlet collecting cavity through the air supply pipeline, and then is uniformly blown to the film from the air blowing port through the secondary split of the upper wind shield plate and the lower wind shield plate. The air in the underground air inlet channel has lower temperature and is drier, the cooling speed of the film is improved when the air is blown to the film, the production quality of the film is ensured, and the air is not influenced by seasons; and the wind source passes through the upper splitter plate and the lower splitter plate after being split, and then passes through the upper wind baffle plate and the lower wind baffle plate for splitting, so that when the film is blown from the periphery of the film, the wind quantity in each direction is uniform enough, the uniformity of film cooling is improved, and the quality of the film is improved.
Drawings
FIG. 1 is a sectional view of a film cooling device for a film blowing machine according to the present invention;
fig. 2 is a schematic structural diagram of the film cooling device for the film blowing machine of the present invention.
Detailed Description
In order that the present invention may be more readily and clearly understood, the following detailed description of the present invention is provided in connection with the accompanying drawings.
As shown in fig. 1 and 2, a film cooling device for a film blowing machine includes:
the blowing device comprises an air ring 1, wherein a plurality of air inlets 2 are formed in the peripheral part of the air ring 1, and an annular air blowing port 3 which is communicated with all the air inlets 2 and used for blowing air to a film 200 in a film blowing machine 100 is formed in the central part of the air ring 1;
the air conditioner comprises a flow distribution disc 4, wherein air outlets 5 which are in one-to-one correspondence with the air inlets 2 are arranged on the peripheral part of the flow distribution disc 4, the air outlets 5 are connected with the corresponding air inlets 2 through air supply pipelines 6, and the central part of the flow distribution disc 4 is provided with air suction ports 7 which are communicated with all the air outlets 5;
an air inlet channel 8 arranged underground;
the fan 9 is arranged in the air inlet channel 8, an outlet of the fan 9 is connected with the air suction opening 7 through a connecting pipeline 10, so that the fan 9 can convey the air source in the air inlet channel 8 to the flow distribution plate 4, and then the air source uniformly enters the air ring 1 through the air supply pipeline 6 and blows towards the film 200 in the film blow molding machine 100 from the air blowing opening 3, and the film 200 can be rapidly cooled. The air inlet channel 8 is arranged underground so as to obtain a wind source with a lower temperature, particularly in summer, the air in a workshop is high in temperature and moist and is not beneficial to cooling the film 200, and the air in the air inlet channel 8 arranged underground is low in temperature and dry and is beneficial to cooling the film 200; in this embodiment, the diameter of the air inlet channel 8 may be 1m, and the specific structure of the film blow molding machine 100 is the prior art, which is not described in detail in this embodiment.
As shown in fig. 1 and 2, an air inlet collecting cavity 11 and a flow equalizing device may be arranged in the air ring 1; wherein,
the air inlet collecting cavity 11 is of an annular structure and is arranged in the outer peripheral part of the air ring 1, and the air inlet collecting cavity 11 is communicated with all the air inlets 2;
the flow equalizing device is arranged between the air inlet collecting cavity 11 and the air blowing port 3, and a flow equalizing channel used for communicating the air inlet collecting cavity 11 with the air blowing port 3 and enabling an air source in the air inlet collecting cavity 11 to uniformly flow into the air blowing port 3 is arranged in the flow equalizing device, so that air blowing from the periphery of the film 200 to the film 200 is more uniform, and the cooling uniformity of the film 200 is improved.
As shown in fig. 1 and 2, the wind ring 1 is configured, for example, but not limited to, including an upper end wall 12, a lower end wall 13, a side ring wall 14, an inner ring wall 15, and an outer ring wall 16; wherein,
the upper end of the side annular wall 14 is connected to the outer periphery of the upper end wall 12;
the lower end portion of the side annular wall 14 is connected to the outer peripheral portion of the lower end wall 13;
the outer annular wall 16 is connected to an inner peripheral portion of the upper end wall 12, and a gap is formed between a lower end portion of the outer annular wall 16 and the lower end wall 13;
the inner annular wall 15 extends into the outer annular wall 16 and is connected to the inner peripheral portion of the lower end wall 13;
the air blowing port 3 is arranged between the inner annular wall 15 and the outer annular wall 16;
the air inlet 2 is arranged on the side annular wall 14.
As shown in fig. 1 and 2, the flow equalizing device includes, for example but not limited to, the following structures:
at least two lower wind baffles 17 concentrically arranged on the lower end wall 13 from inside to outside in sequence, a gap is arranged between the upper end part of each lower wind baffle 17 and the upper end wall 12, and a lower annular groove is formed between any two adjacent lower wind baffles 17;
the upper wind-shielding plates 18 correspond to the lower annular grooves one by one and are connected to the upper end wall 12, the lower end portions of the upper wind-shielding plates 18 extend into the corresponding lower annular grooves, gaps are reserved between the upper wind-shielding plates 18 and the lower end wall 13, and the upper wind-shielding plates 18 and the lower wind-shielding plates 17 are matched to form the flow equalizing channel. Specifically, the upper wind deflector 18 and the lower wind deflector 17 are both of an annular structure, and all of the upper wind deflector 18 and all of the lower wind deflector 17 are arranged between the air inlet collecting cavity 11 and the air blowing port 3; in this embodiment, the lower wind guard 17 is provided with 2 pieces, and the upper wind guard 18 is provided with 1 piece.
As shown in fig. 1 and 2, an air outlet collecting cavity 19 and a flow dividing device may be provided in the flow dividing plate 4; wherein,
the air outlet collecting cavity 19 is of an annular structure and is arranged in the outer peripheral part of the flow distribution disc 4, and the air outlet collecting cavity 19 is communicated with all the air outlets 5;
the flow dividing device is arranged between the air outlet collecting cavity 19 and the air suction opening 7, and a flow dividing channel for communicating the air outlet collecting cavity 19 with the air suction opening 7 and enabling an air source accessed by the air suction opening 7 to uniformly flow into the air outlet collecting cavity 19 is arranged in the flow dividing device; the wind source is divided twice through the flow dividing channel and the flow equalizing channel, so that the uniformity of the wind blowing from the periphery of the film 200 to the film 200 is improved, and the cooling uniformity of the film 200 is further improved.
As shown in fig. 1 and 2, the diverter tray 4 is configured, for example and without limitation, to include an upper tray wall 20, a lower tray wall 21, and a side tray wall 22; wherein,
the side disc wall 22 is of an annular structure, the upper end part of the side disc wall 22 is connected with the outer peripheral part of the upper disc wall 20, and the lower end part of the side disc wall 22 is connected with the outer peripheral part of the lower disc wall 21; the air suction opening 7 is arranged at the central part of the upper tray wall 20 or the lower tray wall 21, and the air outlet 5 is arranged on the side tray wall 22.
As shown in fig. 1 and 2, the shunt device includes, for example and without limitation, the following structure:
at least two upper flow distribution plates 23 concentrically arranged on the upper disc wall 20 from inside to outside in sequence, a gap is arranged between the lower end part of each upper flow distribution plate 23 and the lower disc wall 21, and an upper annular groove is formed between any two adjacent upper flow distribution plates 23;
the lower flow distribution plates 24 correspond to the upper annular grooves one by one and are connected to the lower disc wall 21, the upper end parts of the lower flow distribution plates 24 extend into the corresponding upper annular grooves, a gap is reserved between the upper flow distribution plates and the upper disc wall 20, and the upper flow distribution plates 23 and the lower flow distribution plates 24 are matched to form the flow distribution channels;
the air suction opening 7 is communicated with the inner side of the innermost upper flow distribution plate 23; specifically, the upper splitter plate 23 and the lower splitter plate 24 are both of an annular structure, in this embodiment, the upper splitter plate 23 is provided with 3 blocks, and the lower splitter plate 24 is provided with 2 blocks.
As shown in fig. 1 and 2, the air inlets 2 are uniformly distributed on the outer circumferential portion of the air ring 1 along the circumferential direction of the air ring 1, and the air outlets 5 are uniformly distributed on the outer circumferential portion of the diverter tray 4 along the circumferential direction of the diverter tray 4; in this embodiment, the number of the air inlets 2 and the number of the air outlets 5 are 6.
The working principle of the utility model is as follows:
the fan 9 delivers the air source with lower temperature in the air inlet channel 8 to the splitter disc 4, the air source uniformly enters the air outlet collecting cavity 19 through the split of the upper splitter plate 23 and the lower splitter plate 24, then enters the air inlet collecting cavity 11 through the air supply pipeline 6, and then the air source uniformly blows from the air blowing port 3 to the film 200 through the re-split of the upper wind shield 18 and the lower wind shield 17. The air in the underground air inlet channel 8 has lower temperature and is drier, the cooling speed of the film 200 is improved when the air is blown to the film 200, the production quality of the film 200 is ensured, and the influence of seasons is avoided; and the wind source is shunted by the upper shunting plate 23 and the lower shunting plate 24 and then shunted by the upper wind baffle plate 18 and the lower wind baffle plate 17, so that when wind blows to the film 200 from the periphery of the film 200, the wind volume in each direction is uniform enough, the cooling uniformity of the film 200 is improved, and the quality of the film 200 is improved.
The above-mentioned embodiments further explain in detail the technical problems, technical solutions and advantages solved by the present invention, and it should be understood that the above only is a specific embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
In the description of the present invention, it is to be understood that the terms indicating orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of description, and do not indicate or imply that the equipment or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the present disclosure, unless otherwise expressly stated or limited, the first feature may comprise both the first and second features directly contacting each other, and also may comprise the first and second features not being directly contacting each other but being in contact with each other by means of further features between them. Also, the first feature being above, on or above the second feature includes the first feature being directly above and obliquely above the second feature, or merely means that the first feature is at a higher level than the second feature. A first feature that underlies, and underlies a second feature includes a first feature that is directly under and obliquely under a second feature, or simply means that the first feature is at a lesser level than the second feature.

Claims (9)

1. A film cooling device for a film blowing machine, comprising:
the film blowing device comprises an air ring (1), wherein a plurality of air inlets (2) are formed in the peripheral portion of the air ring (1), and an annular air blowing opening (3) communicated with all the air inlets (2) and used for blowing air to a film (200) in a film blowing machine (100) is formed in the central portion of the air ring (1);
the air conditioner comprises a flow distribution disc (4), wherein air outlets (5) which are in one-to-one correspondence with the air inlets (2) are formed in the peripheral part of the flow distribution disc (4), the air outlets (5) are connected with the corresponding air inlets (2) through air supply pipelines (6), and air suction ports (7) communicated with all the air outlets (5) are formed in the central part of the flow distribution disc (4);
an air inlet channel (8) arranged underground;
the fan (9) is arranged in the air inlet channel (8), and an outlet of the fan (9) is connected with the air suction opening (7) through a connecting pipeline (10), so that the fan (9) can convey an air source in the air inlet channel (8) to the flow distribution disc (4).
2. The film cooling device for the film blowing machine according to claim 1, characterized in that the air ring (1) is provided with an air inlet collecting cavity (11) and a flow equalizing device; wherein,
the air inlet collecting cavity (11) is of an annular structure and is arranged in the outer peripheral part of the air ring (1), and the air inlet collecting cavity (11) is communicated with all the air inlets (2);
the flow equalizing device is arranged between the air inlet collecting cavity (11) and the air blowing port (3), and a flow equalizing channel which is used for communicating the air inlet collecting cavity (11) with the air blowing port (3) and enabling an air source in the air inlet collecting cavity (11) to uniformly flow into the air blowing port (3) is arranged in the flow equalizing device.
3. The film cooling device for film blowing machines according to claim 2, characterized in that the air ring (1) comprises an upper end wall (12), a lower end wall (13), a side ring wall (14), an inner ring wall (15) and an outer ring wall (16); wherein,
the upper end part of the side annular wall (14) is connected with the peripheral part of the upper end wall (12);
the lower end part of the side annular wall (14) is connected with the peripheral part of the lower end wall (13);
the outer annular wall (16) is connected to the inner peripheral part of the upper end wall (12), and a gap is formed between the lower end part of the outer annular wall (16) and the lower end wall (13);
the inner annular wall (15) extends into the outer annular wall (16) and is connected with the inner peripheral part of the lower end wall (13);
the air blowing opening (3) is arranged between the inner annular wall (15) and the outer annular wall (16).
4. The film cooling device for a film blowing machine according to claim 3, characterized in that the air inlet opening (2) is provided in the side ring wall (14).
5. The film cooling device for a film blowing machine according to claim 3, wherein said flow equalizing device comprises:
at least two lower wind baffles (17) concentrically arranged on the lower end wall (13) from inside to outside in sequence, a gap is arranged between the upper end part of each lower wind baffle (17) and the upper end wall (12), and a lower annular groove is formed between any two adjacent lower wind baffles (17);
the upper wind shield plates (18) correspond to the lower annular grooves one by one and are connected to the upper end wall (12), the lower end portions of the upper wind shield plates (18) extend into the corresponding lower annular grooves, gaps are formed between the upper wind shield plates and the lower end wall (13), and the upper wind shield plates (18) and the lower wind shield plates (17) are matched to form the flow equalizing channel.
6. The film cooling device for the film blowing machine according to claim 1, characterized in that the splitter plate (4) is provided therein with an air outlet header chamber (19) and a splitter device; wherein,
the air outlet collecting cavity (19) is of an annular structure and is arranged in the peripheral part of the flow distribution disc (4), and the air outlet collecting cavity (19) is communicated with all the air outlets (5);
the flow dividing device is arranged between the air outlet collecting cavity (19) and the air suction opening (7), and a flow dividing channel which is used for communicating the air outlet collecting cavity (19) with the air suction opening (7) and enables an air source accessed by the air suction opening (7) to uniformly flow into the air outlet collecting cavity (19) is arranged in the flow dividing device.
7. The film cooling device for film blowing machines according to claim 6, characterized in that the diverter tray (4) comprises an upper tray wall (20), a lower tray wall (21) and a side tray wall (22); wherein,
the side disc wall (22) is of an annular structure, the upper end part of the side disc wall (22) is connected with the outer peripheral part of the upper disc wall (20), and the lower end part of the side disc wall (22) is connected with the outer peripheral part of the lower disc wall (21); the air suction opening (7) is formed in the central portion of the upper disc wall (20) or the lower disc wall (21), and the air outlet (5) is formed in the side disc wall (22).
8. The film cooling apparatus for film blowing machine according to claim 7, wherein said flow dividing means comprises:
at least two upper flow distribution plates (23) are sequentially concentrically arranged on the upper disc wall (20) from inside to outside, a gap is formed between the lower end part of each upper flow distribution plate (23) and the lower disc wall (21), and an upper annular groove is formed between any two adjacent upper flow distribution plates (23);
the upper distribution plates (24) correspond to the upper annular grooves one by one and are connected to the lower disc wall (21), the upper end parts of the lower distribution plates (24) extend into the corresponding upper annular grooves, gaps are reserved between the upper distribution plates and the upper disc wall (20), and the upper distribution plates (23) and the lower distribution plates (24) are matched to form the distribution channels;
the air suction opening (7) is communicated with the inner side of the innermost upper flow distribution plate (23).
9. The film cooling device for the film blowing machine according to claim 1, wherein the air inlets (2) are uniformly distributed on the outer circumferential portion of the air ring (1) in the circumferential direction of the air ring (1), and the air outlets (5) are uniformly distributed on the outer circumferential portion of the diverter tray (4) in the circumferential direction of the diverter tray (4).
CN201922261419.3U 2019-12-16 2019-12-16 Film cooling device for film blowing machine Expired - Fee Related CN211467144U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922261419.3U CN211467144U (en) 2019-12-16 2019-12-16 Film cooling device for film blowing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922261419.3U CN211467144U (en) 2019-12-16 2019-12-16 Film cooling device for film blowing machine

Publications (1)

Publication Number Publication Date
CN211467144U true CN211467144U (en) 2020-09-11

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116615324A (en) * 2021-03-31 2023-08-18 住友重机械工业株式会社 Film forming device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116615324A (en) * 2021-03-31 2023-08-18 住友重机械工业株式会社 Film forming device

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