CN211255271U - Chassis structure of 72-pair reduction rod polycrystalline silicon production reduction furnace - Google Patents
Chassis structure of 72-pair reduction rod polycrystalline silicon production reduction furnace Download PDFInfo
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- CN211255271U CN211255271U CN201921879434.8U CN201921879434U CN211255271U CN 211255271 U CN211255271 U CN 211255271U CN 201921879434 U CN201921879434 U CN 201921879434U CN 211255271 U CN211255271 U CN 211255271U
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 30
- 238000013461 design Methods 0.000 abstract description 12
- 239000000463 material Substances 0.000 abstract description 12
- 235000011299 Brassica oleracea var botrytis Nutrition 0.000 abstract description 4
- 240000003259 Brassica oleracea var. botrytis Species 0.000 abstract description 4
- 238000001816 cooling Methods 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000011033 desalting Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000002826 coolant Substances 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003910 SiCl4 Inorganic materials 0.000 description 1
- 229910003822 SiHCl3 Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010612 desalination reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 231100001228 moderately toxic Toxicity 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 235000013311 vegetables Nutrition 0.000 description 1
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Abstract
The utility model discloses a chassis structure of a 72-pair reduction rod polycrystalline silicon production reduction furnace, which comprises a reduction furnace chassis main body and 72-pair reduction rods; all the reducing rods are divided into six circles and distributed on a chassis main body of the reducing furnace, the six circles of reducing rods are sequentially a first reducing rod group, a second reducing rod group, a third reducing rod group, a fourth reducing rod group, a fifth reducing rod group and a sixth reducing rod group from inside to outside, the first reducing rod group, the second reducing rod group, the third reducing rod group, the fourth reducing rod group, the fifth reducing rod group and the sixth reducing rod group are concentrically distributed at the center of the top surface of the chassis main body of the reducing furnace, and the first reducing rod group, the second reducing rod group, the third reducing rod group, the fourth reducing rod group, the fifth reducing rod group and the sixth reducing rod group respectively have 3, 6, 9, 15, 18 and 21 pairs of reducing rods. The utility model has the advantages of scientific and reasonable design, it can effectively control reduction furnace inlet flow rate, interior gas field of stove and the interior temperature field of stove, reaches low power consumption, low cauliflower material proportion and high yield's purpose.
Description
Technical Field
The utility model relates to a chassis structure of a 72-pair reduction rod polycrystalline silicon production reduction furnace.
Background
With the enhancement of energy crisis and human environmental awareness in the 21 st century, countries around the world are concerned about the development of new energy. In recent years, the solar energy industry is rapidly developed in the world, the polysilicon industry serving as a basic raw material of the solar energy industry is also developed vigorously, and production lines with different sizes such as 100 tons, 300 tons, 1000 tons and the like exist in scale. The polycrystalline silicon production reduction furnace is core equipment of a production line, the production scale of a single production line of the existing polycrystalline silicon production reduction furnace is 1.5WT/a, the production cost of polycrystalline silicon is $ 10/kg, the production efficiency is low, and the energy consumption is high.
Therefore, designing a chassis structure of a 72-pair reduction rod polycrystalline silicon production reduction furnace to improve the production efficiency of polycrystalline silicon and reduce the production energy consumption becomes a technical problem to be solved urgently by technical personnel in the technical field.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is: provides a chassis structure of a 72-pair reduction rod polycrystalline silicon production reduction furnace, so as to achieve the purposes of low power consumption, low cauliflower proportion and high yield.
In order to achieve the above object, the utility model adopts the following technical scheme:
a chassis structure of a reducing furnace for producing polycrystalline silicon by 72 pairs of reducing rods comprises a disc-shaped and hollow reducing furnace chassis main body and 72 pairs of reducing rods distributed on the reducing furnace chassis main body; all the reducing rods are divided into six circles and distributed on the chassis main body of the reducing furnace, the six circles of reducing rods are sequentially a first reducing rod group, a second reducing rod group, a third reducing rod group, a fourth reducing rod group, a fifth reducing rod group and a sixth reducing rod group from inside to outside, the first reducing rod group, the second reducing rod group, the third reducing rod group, the fourth reducing rod group, the fifth reducing rod group and the sixth reducing rod group are concentrically distributed around the center of the top surface of the chassis main body of the reducing furnace, the first reducing rod group comprises 3 pairs of reducing rods which are equidistantly distributed in the circumferential direction, the second reducing rod group comprises 6 pairs of reducing rods which are equidistantly distributed in the circumferential direction, the third reducing rod group comprises 9 pairs of reducing rods which are equidistantly distributed in the circumferential direction, the fourth reducing rod group comprises 15 pairs of reducing rods which are equidistantly distributed in the circumferential direction, and the fifth reducing rod group comprises 18 pairs of reducing rods which are equidistantly distributed in the circumferential direction, the sixth reducing rod group comprises 21 pairs of reducing rods which are circumferentially distributed at equal intervals.
Further, the distance between two adjacent pairs of reduction rods in the first reduction rod group is 225 mm.
Further, the spacing between two adjacent pairs of reduction rods in the second reduction rod group is 247.05 mm.
Further, the distance between two adjacent pairs of reduction rods in the third reduction rod group is 254.93 mm.
Further, the distance between two adjacent pairs of reduction rods in the fourth reduction rod group is 225 mm.
Further, the distance between two adjacent pairs of the reduction rods in the fifth reduction rod group is 230.82 mm.
Further, the distance between two adjacent pairs of reduction rods in the sixth reduction rod group is 234.89 mm.
Further, each pair of reducing rods comprises two paired silicon cores.
Furthermore, the height of the silicon core is 3000mm, and the diameter is 15 multiplied by 15 mm.
Further, the distance between the same pair of silicon cores is 225 mm.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model has the advantages of simple structure and scientific and reasonable design, convenient to use, it can effective control reduction furnace inlet flow rate, stove internal gas field and stove internal temperature field, reaches low power consumption, low cauliflower material proportion and high yield's purpose.
The utility model discloses can realize that the single line productivity reaches 3WT/a to the maximum, compare in current 1.5WT/a of the biggest productivity, the productivity improves the twice, and corresponding equipment, factory building capital construction investment can descend 50%, and manufacturing cost can descend 20%.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Wherein, the names corresponding to the reference numbers are:
1-a reduction furnace chassis main body, 2-reduction rods, 3-a first reduction rod group, 4-a second reduction rod group, 5-a third reduction rod group, 6-a fourth reduction rod group, 7-a fifth reduction rod group, 8-a sixth reduction rod group and 9-a silicon core.
Detailed Description
The present invention will be further described with reference to the following description and examples, which include but are not limited to the following examples.
As shown in figure 1, the utility model provides a pair of 72 is to reduction bar polycrystalline silicon production reduction furnace chassis structure, simple structure, design scientific and reasonable, convenient to use, it can effectively control reduction furnace inlet flow rate, stove internal gas field and stove internal temperature field, reaches the purpose of low power consumption, low cauliflower material proportion and high yield. The utility model comprises a disc-shaped and hollow reducing furnace chassis main body 1 and 72 pairs of reducing rods 2 distributed on the reducing furnace chassis main body 1; all the reducing rods 2 are divided into six circles and distributed on the reducing furnace chassis main body 1, the six circles of reducing rods are sequentially a first reducing rod group 3, a second reducing rod group 4, a third reducing rod group 5, a fourth reducing rod group 6, a fifth reducing rod group 7 and a sixth reducing rod group 8 from inside to outside, the first reducing rod group 3, the second reducing rod group 4, the third reducing rod group 5, the fourth reducing rod group 6, the fifth reducing rod group 7 and the sixth reducing rod group 8 are concentrically distributed around the center of the top surface of the reducing furnace chassis main body 1, the first reducing rod group 3 comprises 3 pairs of reducing rods which are equidistantly distributed in the circumferential direction, the second reducing rod group 4 comprises 6 pairs of reducing rods which are equidistantly distributed in the circumferential direction, the third reducing rod group 5 comprises 9 pairs of reducing rods which are equidistantly distributed in the circumferential direction, and the fourth reducing rod group 6 comprises 15 pairs of reducing rods which are equidistantly distributed in the circumferential direction, the fifth reduction bar group 7 comprises 18 pairs of reduction bars which are distributed equidistantly in the circumferential direction, and the sixth reduction bar group 8 comprises 21 pairs of reduction bars which are distributed equidistantly in the circumferential direction. Each pair of said reduction rods comprises two pairs of silicon cores 9. The height of the silicon core 9 is 3000mm, and the diameter is 15 multiplied by 15 mm. The distance between the same pair of silicon cores 9 is 225 mm.
The distance between two adjacent pairs of reduction rods in the first reduction rod group 3 is 225 mm. The spacing between two adjacent pairs of reduction rods in the second reduction rod set 4 is 247.05 mm. The distance between two adjacent pairs of the reducing rods in the third reducing rod group 5 is 254.93 mm. The distance between two adjacent pairs of reduction rods in the fourth reduction rod group 6 is 225 mm. The distance between two adjacent pairs of the reducing rods in the fifth reducing rod group 7 is 230.82 mm. The distance between two adjacent pairs of the reduction rods in the sixth reduction rod group 8 is 234.89 mm.
The utility model discloses can realize that the single line productivity reaches 3WT/a to the maximum, compare in current 1.5WT/a of the biggest productivity, the productivity improves the twice, and corresponding equipment, factory building capital construction investment can descend 50%, and manufacturing cost can descend 20%.
The reduction rod reducing furnace of the utility model 72 uses 144 silicon cores per platform, the height of the silicon rod is 3000m, and the specification of the cross section of the silicon core is 15 multiplied by 15 mm; in the actual operation process, the surface temperature of the silicon core is 950-1250 ℃, the metal temperature of the furnace wall is 300 ℃ in the operation process, and the metal wall temperature of the inner cylinder body of the reducing furnace is 330 ℃.
The utility model discloses pressure in the reduction furnace intracavity: working pressure of-0.1-0.8 MPa/design pressure of-0.1-1.0 MPa (gauge pressure); external pressure calculation conditions of the inner cylinder of the reduction furnace: (a) 0.95Ma at 200 deg.c (the pressure difference between the inner cylinder and the jacket is 0.75MPa at maximum when the inner cylinder is started and vacuum is pumped for replacement). (b) 0.75a, 330 ℃ (after the silicon core breaks down and is filled with process gas).
The utility model discloses the silicon rod is arranged: 72 the silicon rods of the reduction rod reduction furnace are distributed in a concentric circle mode and are assisted by a corresponding number of nozzles, so that energy sources can be effectively saved, a temperature field can be balanced, a good gas field can be provided, the high-quality production of the silicon rods can be ensured, and the reduction furnace has the performances of high production capacity, high conversion rate and low energy consumption.
The utility model adopts double-path desalted water cooling, jacket cooling, desalting and water feeding (double-path feeding), the water feeding pressure is 0.76MPa (G), jacket cooling, desalting and water returning (double-path discharging), and the water returning pressure is 0.55MPa (G).
The utility model has about 40 degrees of reduction power consumption per 1 kilogram of polysilicon produced by the 72-pair rod reduction furnace, and can reduce the power consumption by 10-20 percent compared with the single power consumption of the existing 36-and 40-pair rod reduction furnaces; the yield of the polysilicon in each production period can reach 18-25 tons, and the diameter of the finished silicon rod is about 160-200 mm.
The height of the silicon core of the utility model reaches 3000mm, compared with the prior art, the yield of the deposited polysilicon of a single silicon core is increased by about 7-10%; 144 electrodes are arranged in a concentric circle in a limited space of the 72-pair rod reduction furnace, so that the reduction furnace can be more energy-saving, higher in yield and more economical; as shown in fig. 1, the 72-pair rod reduction furnace adopts double-loop furnace tube water protection equipment, and the inlet and outlet positions of furnace tube water are designed by fully combining the temperature gradient of the 72-pair rod reduction furnace, so that the silicon rods in the reduction furnace can grow more uniformly and compactly.
Adopt the utility model discloses the former furnace body that the chassis structure assembled comprises a columniform bell jar (oval head) and a chassis (this chassis structure), and cylindrical bell jar is surrounded by cooling jacket, and the chassis is hollow structure, and cooling medium is the desalinized water, and all surfaces with technology material medium direct contact all are stainless steel material or composite sheet material, and bell jar inner wall and chassis upper surface must be handled through electrolytic polishing, and roughness should be less than Ra0.2. The parameters of the reduction furnace are detailed in a reduction furnace parameter table 1-1.
Reduction furnace parameter Table 1-1
All materials used by the reduction furnace meet the requirement of producing the solar first-level polycrystalline silicon product, and all contact process materials on equipment are made of S31603. The material of the jacket and the chassis cooling water system is made of carbon steel, and the material of the electrode cooling water system is S30408. And the reduction furnace is provided with a sight glass for temperature measurement and observation, and the sight glass is cooled by cooling water or hydrogen blowing and cooling.
Each 72 pairs of rod reduction furnaces were assembled with I44 desalted water cooled electrodes. The main materials of the electrode are as follows: the main body is red copper (adopting TU1 oxygen-free copper), and the head is silver-plated with copper (the thickness is not less than 100 um). Each reducing furnace is at least provided with 1 observation port of an infrared thermometer. The starting mode of the reduction furnace is high-voltage starting, and the starting voltage is I2 kV. The number of 72 electrodes of the rod reduction furnace is 144, the length of the silicon core is 3000mm, the cross section of the silicon core is not more than 15mm X15mm, the maximum deposition diameter is 150-180mm, one cycle time (deposition time) is 120hours, the yield of polycrystalline silicon in each working cycle is not less than 18 tons, the yield of single furnace per year (minimum) is not less than 1000 tons, and the ratio of vegetable and flower materials is not more than 30%. The power consumption per kgSi is less than or equal to 42 kWH/kg.
The cooling conditions for the 72-pair rod reduction furnace are as follows:
jacket cooling, desalting and feeding (double-path feeding) at 133 deg.C and 0.75MPa (G); jacket cooling desalted backwater (two-way outlet) is 153 ℃, and the pressure is 0.55MPa (G); cooling the base plate, desalting and feeding water at 60-90 deg.C under 0.6MPa (G); the cooling, desalting and backwater of the chassis is 90-110 ℃, and the pressure is 0.3MPa (G); the water feeding for the electrode cooling desalination is 30-50 ℃, and the pressure is 0.4MPa (G); the desalted and backwater of the electrode cooling is 40-70 ℃, and the pressure is 0.3MPa (G).
The meteorological data parameters of the 72-pair rod reduction furnace are as follows:
the annual average atmospheric pressure is 93.4kPa, the annual average temperature is 7.5 ℃, the extreme highest temperature is 43.6 ℃, the extreme lowest temperature is-36.6 ℃, the average relative humidity is 52%, the annual prevailing wind direction is NW, the 10m height maximum wind speed is 21.3m/s, and the annual average wind speed is 2.8 m/s.
72 pairs of rod reduction furnace factories are fortified according to the VII degrees of earthquake intensity, 10000v/380v/220v/50HZ/3ph of power supply and parts, and the compressed air condition (oil-free): the pressure is 0.4-0.6 MPa (G), and the dew point is-60 ℃. Nitrogen conditions: the pressure is 0.6MPa (G)/0.8MPa (G) and the dew point is-60 ℃.
The technical data of the 72-pair rod reduction furnace are as follows:
the equipment comprises the following components: a whole set of reduction furnace reactors; medium in the device: h2，SiHCl3，SiCl4，SiH2C12HCl, etc., the media is corrosive and flammable. Explosive, moderately toxic (media types and classes according to SiHCl)3) Explosion protection grade Exd II CT4 o.
The number of silicon cores of the 72-pair rod reduction furnace is 144 per unit, the height of the silicon rod is 3000mm, and the specification of the cross section of the silicon core is 15mm X15 mm.
The silicon core temperature of the 72-pair rod reducing furnace is 950-1250 ℃, the metal temperature of the furnace wall is 300 ℃ during operation, and the designed metal wall temperature of the inner cylinder body is 330 ℃. The pressure in the reducing hearth of the 72-pair rod reducing furnace is-0.1-0.8 MPa, and the design pressure is-0.1-1 MPa (gauge pressure). Inner cylinder external pressure calculation conditions: (1) 0.95MPa and 200 ℃ (the maximum pressure difference between the inner cylinder and the jacket is 0.75MPa when the vehicle is started and the vacuum is pumped for replacement). (2) -0.75Mpa,330 ℃ (after the silicon core is broken down and the process gas is introduced).
72 pairs of rod reduction furnace cooling system (jacket, chassis). Clamping a sleeve: the cooling medium is desalted water, the inlet temperature is 133 ℃, the outlet temperature is less than or equal to 153 ℃, the design temperature of the jacket is 200 ℃, the working pressure of the jacket is 0.75MPa (gauge pressure), and the design pressure of the jacket is 0.85MPa (gauge pressure). A chassis: the cooling medium is desalted water, the inlet temperature is 60-90 ℃, the outlet temperature is 90-110 ℃, the design temperature of the chassis is 200 ℃, the working pressure of the chassis is 0.6MPa (gauge pressure), and the design pressure is 0.75MPa (gauge pressure).
72 silicon core electrode cooling of the rod reduction furnace: the cooling medium is cooling water (water quality: conductivity is less than or equal to 10us/cm, PH value is 6.5-8.0), inlet temperature is 30-50 ℃, outlet temperature is 40-70 ℃, design temperature is 90 ℃, working pressure is 0.4MPa (gauge pressure), and design pressure is 0.6MPa (gauge pressure).
The indoor temperature of a factory building of the 72-pair rod reduction furnace is more than 0 ℃, the equipment is placed in a closed workshop with the cleanliness of 10 ten thousand grade, and the explosion-proof grade of the room is Exd II CT 4.
The above embodiment is only one of the preferred embodiments of the present invention, and should not be used to limit the protection scope of the present invention, but all the insubstantial changes or modifications made in the spirit and the idea of the main design of the present invention, the technical problems solved by the embodiment are still consistent with the present invention, and all should be included in the protection scope of the present invention.
Claims (10)
1. A chassis structure of a 72-pair reduction rod polycrystalline silicon production reduction furnace is characterized in that: the device comprises a disc-shaped and hollow reduction furnace chassis main body (1) and 72 pairs of reduction rods (2) distributed on the reduction furnace chassis main body (1); all the reducing rods (2) are distributed on the reducing furnace chassis main body (1) in six circles, the six circles of reducing rods are sequentially a first reducing rod group (3), a second reducing rod group (4), a third reducing rod group (5), a fourth reducing rod group (6), a fifth reducing rod group (7) and a sixth reducing rod group (8) from inside to outside, the first reducing rod group (3), the second reducing rod group (4), the third reducing rod group (5), the fourth reducing rod group (6), the fifth reducing rod group (7) and the sixth reducing rod group (8) are concentrically distributed with the center of the top surface of the reducing furnace chassis main body (1), the first reducing rod group (3) comprises 3 pairs of reducing rods which are equidistantly distributed in the circumferential direction, the second reducing rod group (4) comprises 6 pairs of reducing rods which are equidistantly distributed in the circumferential direction, and the third reducing rod group (5) comprises 9 pairs of reducing rods which are equidistantly distributed in the circumferential direction, the fourth reduction rod group (6) comprises 15 pairs of reduction rods which are distributed at equal intervals in the circumferential direction, the fifth reduction rod group (7) comprises 18 pairs of reduction rods which are distributed at equal intervals in the circumferential direction, and the sixth reduction rod group (8) comprises 21 pairs of reduction rods which are distributed at equal intervals in the circumferential direction.
2. The chassis structure of the 72-pair reduction rod polycrystalline silicon production reduction furnace according to claim 1, is characterized in that: the distance between two adjacent pairs of reducing rods in the first reducing rod group (3) is 225 mm.
3. The chassis structure of the 72-pair reduction rod polycrystalline silicon production reduction furnace according to claim 2, is characterized in that: the distance between two adjacent pairs of the reducing rods in the second reducing rod group (4) is 247.05 mm.
4. The chassis structure of the 72-pair reduction rod polycrystalline silicon production reduction furnace according to claim 3, is characterized in that: the distance between every two adjacent pairs of the reducing rods in the third reducing rod group (5) is 254.93 mm.
5. The chassis structure of the 72-pair reduction rod polycrystalline silicon production reduction furnace according to claim 4, is characterized in that: the distance between two adjacent pairs of reduction rods in the fourth reduction rod group (6) is 225 mm.
6. The chassis structure of the 72-pair reduction rod polycrystalline silicon production reduction furnace according to claim 5, is characterized in that: the distance between every two adjacent pairs of the reducing rods in the fifth reducing rod group (7) is 230.82 mm.
7. The chassis structure of the 72-pair reduction rod polycrystalline silicon production reduction furnace according to claim 6, is characterized in that: the distance between every two adjacent pairs of the reducing rods in the sixth reducing rod group (8) is 234.89 mm.
8. The chassis structure of a 72-pair reduction rod polycrystalline silicon production reduction furnace according to any one of claims 1 to 7, characterized in that: each pair of reducing rods comprises two paired silicon cores (9).
9. The chassis structure of the 72-pair reduction rod polycrystalline silicon production reduction furnace according to claim 8, is characterized in that: the height of the silicon core (9) is 3000mm, and the diameter is 15 multiplied by 15 mm.
10. The chassis structure of the 72-pair reduction rod polycrystalline silicon production reduction furnace according to claim 9, is characterized in that: the distance between the same pair of silicon cores (9) is 225 mm.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7395793B1 (en) * | 2022-01-18 | 2023-12-11 | 株式会社トクヤマ | Reactor for manufacturing polycrystalline silicon rod, gas supply nozzle, method for manufacturing polycrystalline silicon rod, and polycrystalline silicon rod |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7395793B1 (en) * | 2022-01-18 | 2023-12-11 | 株式会社トクヤマ | Reactor for manufacturing polycrystalline silicon rod, gas supply nozzle, method for manufacturing polycrystalline silicon rod, and polycrystalline silicon rod |
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