CN211111045U - Electronic grade high-purity hydrogen purification device - Google Patents
Electronic grade high-purity hydrogen purification device Download PDFInfo
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- CN211111045U CN211111045U CN201921549045.9U CN201921549045U CN211111045U CN 211111045 U CN211111045 U CN 211111045U CN 201921549045 U CN201921549045 U CN 201921549045U CN 211111045 U CN211111045 U CN 211111045U
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- purification box
- purification
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- cylinder
- wall
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- 238000000746 purification Methods 0.000 title claims abstract description 130
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 43
- 239000001257 hydrogen Substances 0.000 title claims abstract description 43
- 238000009434 installation Methods 0.000 claims abstract description 17
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000012528 membrane Substances 0.000 claims abstract description 8
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 8
- 238000007791 dehumidification Methods 0.000 claims description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 230000000149 penetrating effect Effects 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims description 11
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 9
- 239000002808 molecular sieve Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000000741 silica gel Substances 0.000 claims description 7
- 229910002027 silica gel Inorganic materials 0.000 claims description 7
- 238000009423 ventilation Methods 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 4
- 239000012535 impurity Substances 0.000 description 6
- 150000001335 aliphatic alkanes Chemical class 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The utility model discloses a high pure hydrogen purification device of electron level, including first purification box, bearing platform board, second purification box and third purification box, first purification box is installed to the one end on bearing platform board top, and the bottom horizontal installation of first purification box one side lateral wall has the first inlet pipe of running through first purification box lateral wall, first valve is installed to first inlet pipe outer wall, second purification box is installed on the bearing platform board top of first purification box one side, and the top horizontal installation that first purification box is close to second purification box one side lateral wall has the third inlet pipe that runs through first purification box lateral wall and extend to second purification box inside, the second purification box is kept away from the bearing platform top of first purification box one side and is installed the third purification box. The electronic grade high-purity hydrogen purification device can obtain hydrogen with the purity of 99.99-99.9999% by purifying through a palladium membrane under the action of concentration difference, so that the purity of hydrogen purification is improved.
Description
Technical Field
The utility model relates to a hydrogen purification technical field specifically is an electronic level high-purity hydrogen purification device.
Background
The hydrogen purification technology is to obtain high-purity hydrogen from various industrial gas raw materials through catalytic deoxidization, adsorption drying and filtration dedusting, and the traditional electronic grade high-purity hydrogen purification device can basically meet the use requirements of people, but still has certain problems, and the specific problems are as follows:
1. most of electronic grade high-purity hydrogen purification devices in the current market are not convenient for removing impurities such as alkanes and oils;
2. most of electronic grade high-purity hydrogen purification devices on the market at present are not convenient for removing water vapor in gas;
3. most of electronic grade high-purity hydrogen purification devices in the current market have too low purification precision and cannot meet the high-purity requirement.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an electronic level high-purity hydrogen purification device to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: an electronic grade high-purity hydrogen purification device comprises a first purification box body, a bearing plate, a second purification box body and a third purification box body, wherein the first purification box body is installed at one end of the top end of the bearing plate, a first feeding pipe penetrating through the side wall of the first purification box body is horizontally installed at the bottom end of the side wall of one side of the first purification box body, a first valve is installed on the outer wall of the first feeding pipe, the second purification box body is installed at the top end of the bearing plate of one side of the first purification box body, a third feeding pipe penetrating through the side wall of the first purification box body and extending into the second purification box body is horizontally installed at the top end of the side wall of one side, close to the second purification box body, of the first purification box body, the third purification box body is installed at the top end of the bearing plate of one side, far away from the first purification box body, of the second purification box body, a second feeding pipe penetrating through the side wall of the second purification box body and, the top horizontal installation that second purification box one side lateral wall was kept away from to third purification box has the discharging pipe, and the second valve is installed to the discharging pipe outer wall.
Preferably, universal wheels are installed on the periphery of the bottom end of the bearing plate, and a braking mechanism is arranged inside each universal wheel.
Preferably, the bottom of the interior of the first purification box body is uniformly and vertically provided with an activated carbon plate, and the middle position of the top end of the first purification box body is provided with a single chip microcomputer.
Preferably, humidity transducer is installed to the intermediate position department of the inside bottom of second purification box, and the even horizontal installation of lower extreme of second purification box both sides inner wall has the molecule sieve, the even horizontal installation of second purification box both sides inner wall above the molecule sieve has the silica gel board.
Preferably, the bottom end inside the third purifying box body is uniformly and vertically provided with a palladium membrane, the middle position of the top end of the third purifying box body is horizontally provided with a vacuum pump, and the output end of the vacuum pump is provided with a first air pipe penetrating through the top end of the third purifying box body.
Preferably, the cylinder is passed through base horizontal installation to the one end that second purification box top is close to third purification box, and the cylinder keeps away from second purification box top intermediate position department horizontal installation of third purification box one side and has the dehumidification box, cylinder output horizontal installation has the hydraulic stem that runs through dehumidification box lateral wall, and the vertical rubber buffer of installing of one end that the cylinder was kept away from to the hydraulic stem.
Preferably, the middle position department of the inside bottom of dehumidification box vertically installs the baffle, and the inside of baffle evenly is provided with the ventilation hole.
Preferably, the baffle is kept away from the even vertical hot plate of installing in the inside bottom of the dehumidification box of cylinder one side, and the dehumidification box keeps away from cylinder one side lateral wall intermediate position department and installs the second tuber pipe that runs through second purification box top, humidity transducer's output passes through the wire and is connected with the singlechip input electricity, and the output of singlechip all is connected with cylinder and hot plate input electricity through the wire.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the first valve is opened, hydrogen is introduced into the first purification box body through the first feeding pipe, and alkane and oil impurities in the hydrogen are removed under the action of the activated carbon plate;
2. meanwhile, the device is provided with a third feeding pipe, a second purification box body, a silica gel plate and a molecular sieve plate, filtered hydrogen is introduced into the second purification box body through the third feeding pipe, and water in the hydrogen is removed under the action of the silica gel plate and the molecular sieve plate;
3. meanwhile, the device is provided with a second feeding pipe, a third purifying box body and a palladium membrane, the dehydrated hydrogen enters the third purifying box body through the second feeding pipe, and the hydrogen with the purity of 99.99-99.9999% can be obtained through purification by the palladium membrane under the action of concentration difference, so that the purity of hydrogen purification is improved;
4. meanwhile, the device is provided with a first valve, a second valve, a first feeding pipe, a discharging pipe, a vacuum pump and a first air pipe, the first feeding pipe and the discharging pipe are closed through the first valve and the second valve before purification, the vacuum pump is started to vacuumize the interior of the electronic grade high-purity hydrogen purification device under the action of the first air pipe, and air impurities are prevented from being mixed in during hydrogen purification;
5. the device is through installing the high pure hydrogen purification device of second purification box simultaneously, humidity transducer, the singlechip, the cylinder, the dehumidification box, the hydraulic stem, the rubber buffer, the ventilation hole, the second tuber pipe, first inlet pipe and discharging pipe, when the inside humidity concentration of second purification box is too big, humidity transducer in time detects out and gives the singlechip with signal transmission, singlechip control hot plate and cylinder start, thereby the hot plate circular telegram produces the heat and heats the inside air of dehumidification box, thereby it moves about thereby to drive the rubber buffer and remove under the effect of ventilation hole and second tuber pipe to drive the hydraulic stem flexible thereby remove the inside air exchange rate of dehumidification box and second purification box with higher speed under the effect of ventilation hole and second tuber pipe, thereby make the moisture separate out this high pure hydrogen purification device of electron level through first inlet pipe and discharging pipe.
Drawings
FIG. 1 is a front view of the cross-sectional structure of the present invention;
FIG. 2 is a schematic top view of the present invention;
FIG. 3 is an enlarged view of the portion A of FIG. 1 according to the present invention;
fig. 4 is a schematic diagram of the internal circuit structure of the present invention.
In the figure: 1. an activated carbon plate; 2. a first purification box; 3. a first valve; 4. a first feed tube; 5. a universal wheel; 6. a bearing plate; 7. a molecular sieve plate; 8. a humidity sensor; 9. a second purification box; 10. a second feed tube; 11. a palladium membrane; 12. a third purifying box body; 13. a discharge pipe; 14. a second valve; 15. a vacuum pump; 16. a first air duct; 17. a cylinder; 18. a hydraulic lever; 19. a rubber plug; 20. a silica gel plate; 21. a dehumidification box body; 22. a second air duct; 23. a third feed pipe; 24. a single chip microcomputer; 25. heating plates; 26. a baffle plate; 27. a vent hole.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides an embodiment: an electronic grade high-purity hydrogen purification device comprises a first purification box body 2, a bearing plate 6, a second purification box body 9 and a third purification box body 12, wherein the first purification box body 2 is installed at one end of the top end of the bearing plate 6;
the bottom end in the first purifying box body 2 is uniformly and vertically provided with the activated carbon plate 1, the middle position of the top end of the first purifying box body 2 is provided with the single chip microcomputer 24, and the type of the single chip microcomputer 24 can be an HT66F018 single chip microcomputer, so that alkane and oil impurities can be conveniently removed;
a first feeding pipe 4 penetrating through the side wall of the first purifying box body 2 is horizontally arranged at the bottom end of the side wall of the first purifying box body 2, a first valve 3 is arranged on the outer wall of the first feeding pipe 4, and a second purifying box body 9 is arranged at the top end of a bearing plate 6 at one side of the first purifying box body 2;
a humidity sensor 8 is arranged in the middle of the bottom end in the second purifying box 9, the type of the humidity sensor 8 can be YEH-410 air humidity sensor, the lower ends of the inner walls of the two sides of the second purifying box 9 are uniformly and horizontally provided with a molecular sieve plate 7, and the inner walls of the two sides of the second purifying box 9 above the molecular sieve plate 7 are uniformly and horizontally provided with silica gel plates 20 for facilitating water removal;
an air cylinder 17 is horizontally arranged at one end, close to the third purifying box 12, of the top end of the second purifying box 9 through a base, the type of the air cylinder 17 can be ACQ50X5, a dehumidifying box 21 is horizontally arranged at the middle position of the top end of the second purifying box 9 at one side, far away from the third purifying box 12, of the air cylinder 17, a hydraulic rod 18 penetrating through the side wall of the dehumidifying box 21 is horizontally arranged at the output end of the air cylinder 17, and a rubber plug 19 is vertically arranged at one end, far away from the air cylinder 17, of the hydraulic rod 18, so that dehumidification is facilitated;
a baffle 26 is vertically arranged in the middle of the bottom end in the dehumidification box body 21, and vent holes 27 are uniformly formed in the baffle 26, so that dehumidification is facilitated;
the bottom end of the inner part of the dehumidifying box body 21 on one side of the baffle 26 far away from the air cylinder 17 is uniformly and vertically provided with a heating plate 25, the middle position of the side wall of the dehumidifying box body 21 far away from the air cylinder 17 is provided with a second air pipe 22 penetrating through the top end of the second purifying box body 9, the output end of the humidity sensor 8 is electrically connected with the input end of the singlechip 24 through a wire, and the output end of the singlechip 24 is electrically connected with the air cylinder 17 and the input end of the heating plate 25 through wires, so;
a third feeding pipe 23 which penetrates through the side wall of the first purifying box body 2 and extends into the second purifying box body 9 is horizontally arranged at the top end of the side wall of the first purifying box body 2 close to the second purifying box body 9, and a third purifying box body 12 is arranged at the top end of a bearing plate 6 of the second purifying box body 9 far away from the first purifying box body 2;
the bottom end inside the third purifying box body 12 is uniformly and vertically provided with palladium membranes 11, the middle position of the top end of the third purifying box body 12 is horizontally provided with a vacuum pump 15, the type of the vacuum pump 15 can be a 2X-70A rotary vane vacuum pump, and the output end of the vacuum pump 15 is provided with a first air pipe 16 penetrating through the top end of the third purifying box body 12, so that purification is facilitated;
and the bottom horizontal installation that second purification box 9 is close to third purification box 12 one side lateral wall has the second inlet pipe 10 that runs through second purification box 9 lateral wall and extend to the inside of third purification box 12, and the top horizontal installation that second purification box 9 one side lateral wall was kept away from to third purification box 12 has discharging pipe 13, and discharging pipe 13 outer wall installs second valve 14.
The working principle is as follows: when the electronic grade high-purity hydrogen purification device is used, the electronic grade high-purity hydrogen purification device is moved to a proper position through the universal wheel 5, then an external power supply is switched on, the first valve 3 is opened, hydrogen is introduced into the first purification box 2 through the first feed pipe 4, alkane and oil impurities in the hydrogen are removed under the action of the activated carbon plate 1, the filtered hydrogen is introduced into the second purification box 9 through the third feed pipe 23, moisture in the hydrogen is removed under the action of the silica gel plate 20 and the molecular sieve plate 7, the dehydrated hydrogen enters the third purification box 12 through the second feed pipe 10, the hydrogen with the purity of 99.99-99.9999% can be obtained through purification of the palladium membrane 11 under the action of concentration difference, the purity of the purified hydrogen is improved, the first feed pipe 4 and the discharge pipe 13 are closed through the first valve 3 and the second valve 14 before purification, the vacuum pump 15 is started to vacuumize the interior of the electronic grade high-purity hydrogen purification device under the action of the first air pipe 16 Air impurity sneaks into when avoiding hydrogen purification, when the inside humidity concentration of second purification box 9 is too big, humidity transducer 8 in time detects out and gives singlechip 24 with the signal transmission, singlechip 24 control hot plate 25 and cylinder 17 start, thereby hot plate 25 circular telegram produces the heat and heats the inside air of dehumidification box 21, thereby it removes the inside air exchange rate of dehumidification box 21 and second purification box 9 to drive 18 flexible controls under the effect of cylinder 17 and remove about driving rubber buffer 19 of hydraulic stem, thereby make the moisture through first inlet pipe 4 and discharging pipe 13 isolate this high pure hydrogen purification device of electron level, it does to go up the utility model discloses a whole theory of operation.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (8)
1. The utility model provides an electronic level high-purity hydrogen purification device, includes first purification box (2), bolster board (6), second purification box (9) and third purification box (12), its characterized in that: the device is characterized in that a first purification box body (2) is installed at one end of the top end of a bearing plate (6), a first feeding pipe (4) penetrating through the side wall of the first purification box body (2) is horizontally installed at the bottom end of the side wall of one side of the first purification box body (2), a first valve (3) is installed on the outer wall of the first feeding pipe (4), a second purification box body (9) is installed at the top end of the bearing plate (6) of one side of the first purification box body (2), a third feeding pipe (23) penetrating through the side wall of the first purification box body (2) and extending to the inside of the second purification box body (9) is horizontally installed at the top end of the bearing plate (6) of one side of the second purification box body (2) in a mode, a third purification box body (12) is installed at the top end of the bearing plate (6) of one side of the second purification box body (9) far away from the first purification box body (2), and a second purification box body (9) penetrating through the The lateral wall and extend to inside second inlet pipe (10) of third purification box (12), the top horizontal installation that second purification box (9) one side lateral wall was kept away from in third purification box (12) has discharging pipe (13), and second valve (14) are installed to discharging pipe (13) outer wall.
2. The electronic grade high-purity hydrogen purification device according to claim 1, wherein: universal wheels (5) are mounted on the periphery of the bottom end of the bearing plate (6), and a braking mechanism is arranged inside each universal wheel (5).
3. The electronic grade high-purity hydrogen purification device according to claim 1, wherein: the bottom of the interior of the first purification box body (2) is uniformly and vertically provided with an activated carbon plate (1), and a single chip microcomputer (24) is arranged in the middle of the top end of the first purification box body (2).
4. The electronic grade high-purity hydrogen purification device according to claim 1, wherein: humidity transducer (8) are installed to the intermediate position department of the inside bottom of second purification box (9), and the even horizontal installation of lower extreme of second purification box (9) both sides inner wall has molecular sieve (7), the even horizontal installation of second purification box (9) both sides inner wall of molecular sieve (7) top has silica gel plate (20).
5. The electronic grade high-purity hydrogen purification device according to claim 1, wherein: the bottom of the inside of the third purifying box body (12) is uniformly and vertically provided with a palladium membrane (11), the middle position of the top end of the third purifying box body (12) is horizontally provided with a vacuum pump (15), and the output end of the vacuum pump (15) is provided with a first air pipe (16) penetrating through the top end of the third purifying box body (12).
6. The apparatus of claim 4, wherein the apparatus comprises: one end that second purification box (9) top is close to third purification box (12) has cylinder (17) through base horizontal installation, and cylinder (17) keep away from second purification box (9) top intermediate position department horizontal installation of third purification box (12) one side has dehumidification box (21), cylinder (17) output horizontal installation has hydraulic stem (18) that runs through dehumidification box (21) lateral wall, and hydraulic stem (18) keep away from the one end vertical installation of cylinder (17) and have rubber buffer (19).
7. The apparatus according to claim 6, wherein the apparatus comprises: baffle (26) are vertically installed to the intermediate position department of the inside bottom of dehumidification box (21), and the inside of baffle (26) evenly is provided with ventilation hole (27).
8. The apparatus according to claim 7, wherein the apparatus comprises: baffle (26) are kept away from the even vertical hot plate (25) of installing in the inside bottom of dehumidification box (21) of cylinder (17) one side, and dehumidification box (21) keep away from cylinder (17) one side lateral wall intermediate position department and install second tuber pipe (22) that run through second purification box (9) top, the output of humidity transducer (8) passes through the wire and is connected with singlechip (24) input electricity, and the output of singlechip (24) all is connected with cylinder (17) and hot plate (25) input electricity through the wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921549045.9U CN211111045U (en) | 2019-09-18 | 2019-09-18 | Electronic grade high-purity hydrogen purification device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921549045.9U CN211111045U (en) | 2019-09-18 | 2019-09-18 | Electronic grade high-purity hydrogen purification device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211111045U true CN211111045U (en) | 2020-07-28 |
Family
ID=71719043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921549045.9U Active CN211111045U (en) | 2019-09-18 | 2019-09-18 | Electronic grade high-purity hydrogen purification device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211111045U (en) |
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2019
- 2019-09-18 CN CN201921549045.9U patent/CN211111045U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 314400 No.38 Anjiang Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province Patentee after: Zhejiang yingdesai semiconductor materials Co.,Ltd. Address before: 314400 No.38 Anjiang Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province Patentee before: HAINING INDUSAIR ELECTRONICS Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |