CN210968406U - Grinding main shaft for coarse grinding and accurate grinding integrated machine of crystal silicon - Google Patents
Grinding main shaft for coarse grinding and accurate grinding integrated machine of crystal silicon Download PDFInfo
- Publication number
- CN210968406U CN210968406U CN201921538605.0U CN201921538605U CN210968406U CN 210968406 U CN210968406 U CN 210968406U CN 201921538605 U CN201921538605 U CN 201921538605U CN 210968406 U CN210968406 U CN 210968406U
- Authority
- CN
- China
- Prior art keywords
- grinding
- main shaft
- rough
- finish
- crystal silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 28
- 239000010703 silicon Substances 0.000 title claims abstract description 28
- 239000013078 crystal Substances 0.000 title claims abstract description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims abstract description 26
- 230000006835 compression Effects 0.000 claims description 18
- 238000007906 compression Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 description 9
- 239000004575 stone Substances 0.000 description 6
- 229910001651 emery Inorganic materials 0.000 description 3
- 230000020347 spindle assembly Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
Images
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The utility model relates to a grinding main shaft for crystal silicon corase grind correct grinding all-in-one belongs to crystal silicon processing equipment technical field, including corase grind main shaft mechanism and correct grinding main shaft mechanism, corase grind main shaft mechanism includes corase grind head subassembly and the corase grind main shaft subassembly of being connected with the rough grind head subassembly, correct grinding main shaft mechanism includes correct grinding head subassembly and the correct grinding main shaft subassembly of being connected with the correct grinding head subassembly, correct grinding main shaft mechanism cover establish in corase grind main shaft mechanism and with drive assembly is connected for carry out corase grind and correct grinding to crystal silicon, can carry out corase grind and correct grinding processing in the same position of crystal silicon, the correct grinding process allowance is little, and efficiency improves greatly, has.
Description
Technical Field
The utility model belongs to the technical field of crystal silicon processing equipment, specifically speaking relates to a grinding main shaft for crystal silicon corase grind correct grinding all-in-one.
Background
The silicon crystal is before the section process, need all install a emery wheel (roughly grind emery wheel or accurate grinding emery wheel) on the bistrique main shaft unit to the monocrystalline silicon rod after the cutting, and the roughly grind that leads to the silicon rod certainly and the accurate grinding not in a position, because the change of processing position, need bigger accurate grinding allowance just can guarantee the processing of work piece when leading to the accurate grinding silicon rod, how can reduce the more efficient energy-conserving grinding to the silicon crystal of grinding allowance is the problem that we need solve.
SUMMERY OF THE UTILITY MODEL
Aiming at various defects in the prior art, the grinding main shaft with the accurate grinding main shaft mechanism sleeved in the rough grinding main shaft mechanism is provided.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a grinding main shaft for crystal silicon corase grind correct grinding all-in-one, includes corase grind main shaft mechanism and correct grinding main shaft mechanism, corase grind main shaft mechanism includes corase grind head subassembly and the corase grind main shaft subassembly of being connected with the rough grind head subassembly, correct grinding main shaft mechanism includes the correct grinding head subassembly and the correct grinding main shaft subassembly of being connected with the correct grinding head subassembly, and correct grinding main shaft mechanism cover is established in corase grind main shaft mechanism and is connected with drive assembly for carry out corase grind and correct grinding to crystal silicon.
Further, the corase grind main shaft subassembly includes the corase grind main shaft, the correct grinding main shaft subassembly includes correct grinding main shaft and eccentric shaft, in the corase grind main shaft is located to the correct grinding main shaft cover to with the coaxial rotation of corase grind main shaft, the end of corase grind main shaft is provided with the belt pulley, the correct grinding main shaft overcoat is equipped with main shaft compression spring, and it links firmly with the corase grind main shaft, the eccentric shaft sets up along the direction with corase grind main shaft and correct grinding main shaft looks vertically.
Furthermore, a spring fixing groove for accommodating a main shaft compression spring is formed in the rough grinding main shaft, one end of the main shaft compression spring is abutted against the spring fixing groove, and the other end of the main shaft compression spring is fixedly connected with the fine grinding main shaft.
Further, a thrust bearing is arranged at the tail end of the fine grinding main shaft, the eccentric shaft is matched with the thrust bearing for use, and a bearing end cover is arranged on the periphery of the thrust bearing.
Further, the finish grinding head assembly is sleeved in the rough grinding head assembly and comprises a finish grinding wheel, the rough grinding head assembly comprises a rough grinding wheel, the finish grinding wheel is fixedly connected with the finish grinding main shaft, and the rough grinding wheel is fixedly connected with the rough grinding main shaft.
Further, the drive assembly comprises a grinding wheel rotating motor and a fine grinding wheel telescopic control motor, the output end of the grinding wheel rotating motor is connected with the rough grinding main shaft and used for driving the rough grinding main shaft and the fine grinding main shaft to rotate, the output end of the fine grinding wheel telescopic control motor is connected with the eccentric shaft, the eccentric shaft is driven to rotate so as to push the tail end of the fine grinding main shaft to move towards one end far away from the eccentric shaft, and the fine grinding wheel protrudes out of the plane where the rough grinding head is located and is used for performing fine grinding operation on crystal silicon.
Further, the rough grinding main shaft and the fine grinding main shaft are driven to rotate through splines or flat keys.
Further, the fine grinding main shaft and the driving assembly are fixed on the fixed seat.
The utility model has the advantages that:
1. the accurate grinding main shaft is sleeved in the rough grinding main shaft, the accurate grinding main shaft and the rough grinding main shaft are synchronously driven to rotate through the belt pulley, crystalline silicon can be processed at the same position, and the precision of workpieces is greatly improved.
2. Can carry out corase grind and accurate grinding processing respectively to the same position of crystal silicon, the accurate grinding process allowance is little, and machining efficiency greatly improves.
3. The rough grinding wheel and the finish grinding wheel are switched by the finish grinding wheel telescopic control motor, and due to the high integration of the grinding positions, the design of the equipment is compact, the occupied area of the equipment is greatly reduced, and the layout of workshop equipment is facilitated.
4. The rotation of the rough grinding wheel and the fine grinding wheel only needs to be driven by a grinding wheel rotating motor, so that the cost is greatly reduced.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a cross-sectional view of the present invention.
In the drawings: 1-rough grinding head assembly, 101-rough grinding wheel, 2-rough grinding spindle assembly, 201-rough grinding spindle, 202-belt pulley, 3-fine grinding head assembly, 301-fine grinding wheel, 4-fine grinding spindle assembly, 401-fine grinding spindle, 402-eccentric shaft, 403-spindle compression spring, 404-spring fixing groove, 405-thrust bearing, 5-driving assembly, 501-grinding wheel rotating motor, 502-fine grinding wheel telescopic control motor and 6-fixing seat.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following description, together with the drawings of the present invention, clearly and completely describes the technical solution of the present invention, and based on the embodiments in the present application, other similar embodiments obtained by those skilled in the art without creative efforts shall all belong to the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.
The present invention will be further described with reference to the accompanying drawings and preferred embodiments.
Referring to fig. 1-2, a grinding main shaft for crystal silicon coarse grinding and accurate grinding all-in-one, including coarse grinding mechanism, accurate grinding mechanism and drive assembly 5, coarse grinding mechanism includes coarse grinding head subassembly 1 and the coarse grinding main shaft subassembly 2 of being connected with coarse grinding head subassembly 1, accurate grinding mechanism includes accurate grinding head subassembly 3 and the accurate grinding main shaft subassembly 4 of being connected with accurate grinding head subassembly 3, and accurate grinding mechanism cover is established in the coarse grinding mechanism and is connected with drive assembly 5 for carry out the coarse grinding and the accurate grinding to crystal silicon.
The fine grinding head assembly 3 is sleeved in the coarse grinding head assembly 1. The fine grinding head assembly 3 comprises a fine grinding wheel 301, the rough grinding head assembly 1 comprises a rough grinding wheel 101, and the fine grinding wheel 301 is sleeved in the rough grinding wheel 101.
Rough grinding main shaft assembly 2 includes rough grinding main shaft 201, accurate grinding main shaft assembly 4 includes accurate grinding main shaft 401 and eccentric shaft 402, accurate grinding main shaft 401 cover is located in rough grinding main shaft 201 and with the coaxial rotation of rough grinding main shaft 201, and both realize rotary drive through spline or flat key. The head end of the rough grinding main shaft 201 is connected with the rough grinding wheel 101, the tail end of the rough grinding main shaft is connected with the belt pulley 202, meanwhile, a tensioning sleeve is sleeved between the periphery of the rough grinding main shaft 201 and the belt pulley 202, namely, the belt pulley 202 drives the rough grinding main shaft 201 to rotate through the tensioning sleeve, and the rough grinding main shaft 201 drives the fine grinding main shaft 401 to rotate through a spline or a flat key. The head end of the fine grinding main shaft 401 is connected with the fine grinding wheel 301, and the tail end of the fine grinding main shaft is fixedly connected with the belt pulley 202 through the tensioning sleeve, so that the belt pulley 202 drives the rough grinding main shaft 201 and the fine grinding main shaft 401 to synchronously rotate. In this embodiment, the rough grinding spindle 201 and the finish grinding spindle 401 are rotationally driven by splines.
Specifically, a spring fixing groove 404 for accommodating the main shaft compression spring 403 is formed in the rough grinding main shaft 201, and the main shaft compression spring 403 is located in the spring fixing groove 404, so that the main shaft compression spring 403 can be effectively fixed without affecting the reset function of the main shaft compression spring 403. One end of the main shaft compression spring 403 is abutted against the rough grinding main shaft 201 through a spring fixing groove 404, and the other end thereof is fixedly connected with the fine grinding main shaft 401 through a baffle nut. That is, when the spindle compression spring 403 is compressed, the finish grinding spindle 401 moves in a direction close to the finish grinding stone 301, and the finish grinding stone 301 protrudes from the rough grinding stone, and when the spindle compression spring 403 is reset, the finish grinding spindle 401 moves in a direction away from the finish grinding stone 301, and the finish grinding stone 301 retracts into the rough grinding stone 101.
To facilitate the fine grinding operation of the fine grinding wheel 301, a thrust bearing 405 is provided at the end of the fine grinding main shaft 401, the thrust bearing 405 is located at the end of the fine grinding main shaft 401, and a bearing end cap is installed at the periphery thereof, and the eccentric shaft 402 is disposed in a direction perpendicular to the fine grinding main shaft 401 and the rough grinding main shaft 201. That is, the eccentric shaft 402 rotates through the thrust bearing 405, so that the main shaft compression spring 403 is compressed, and the fine grinding wheel 301 is pushed out to protrude out of the plane of the rough grinding wheel 101 and contact with the crystalline silicon for fine grinding; the eccentric shaft 402 stops rotating, the main shaft compression spring 403 resets, the accurate grinding main shaft 401 moves to one side close to the eccentric shaft 402, the accurate grinding wheel 301 retracts into the rough grinding wheel 101, and the rough grinding wheel 101 is firstly contacted with crystalline silicon for rough grinding.
The driving assembly 5 comprises a grinding wheel rotating motor 501 and a fine grinding wheel telescopic control motor 502, wherein the output end of the grinding wheel rotating motor 501 is connected with the rough grinding spindle 201 and is used for driving the rough grinding spindle 201 and the fine grinding spindle 401 to rotate. Specifically, the output end of the grinding wheel rotating motor 501 is connected to the pulley 202 via a belt. The output end of the fine grinding wheel telescoping control motor 502 is connected with the eccentric shaft 402, and drives the eccentric shaft 402 to rotate so as to push the tail end of the fine grinding main shaft 401 to move towards one end far away from the eccentric shaft 402, so that the fine grinding wheel 301 protrudes out of the plane where the coarse grinding wheel 101 is located, and is used for performing fine grinding operation on crystalline silicon. In this embodiment, the grinding wheel rotating motor 501 and the finish grinding wheel stretching control motor 502 are both servo motors.
In order to better fix the grinding main shaft for grinding, the rough grinding main shaft assembly 2 and the driving assembly 5 are fixed on a base 6.
At the initial state, the fine grinding wheel telescoping control motor 502 is not started, the main shaft compression spring 403 is in a free state, the fine grinding wheel 301 is located inside the rough grinding wheel 101, that is, during rough grinding, the fine grinding wheel 301 and the rough grinding wheel 101 are not located in the same plane, only the rough grinding wheel 101 is in contact with crystalline silicon, the grinding wheel rotating motor 501 is started, and the rough grinding wheel 101 performs rough grinding operation on the crystalline silicon. After the rough grinding is finished, the fine grinding wheel telescoping control motor 502 is started to drive the eccentric shaft 402 to rotate so as to push the fine grinding main shaft 401 to move towards one end close to the fine grinding wheel 301, at the moment, the fine grinding wheel 301 protrudes out of the plane where the rough grinding wheel 101 is located, and contacts with crystalline silicon to perform fine grinding on crystalline silicon, namely, only the fine grinding wheel 301 contacts with the crystalline silicon during the fine grinding.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the invention, i.e. the present invention is intended to cover all equivalent variations and modifications within the scope of the present invention.
Claims (8)
1. The utility model provides a grinding main shaft for crystal silicon corase grind correct grinding all-in-one, its characterized in that, includes corase grind main shaft mechanism and correct grinding main shaft mechanism, corase grind main shaft mechanism includes corase grind head subassembly (1) and corase grind main shaft subassembly (2) be connected with corase grind head subassembly (1), correct grinding main shaft mechanism includes correct grinding head subassembly (3) and correct grinding main shaft subassembly (4) be connected with correct grinding head subassembly (3), and correct grinding main shaft mechanism cover is established in corase grind main shaft mechanism and is connected with drive assembly (5) for carry out corase grind and correct grinding to crystal silicon.
2. A grinding main shaft for crystal silicon rough grinding and finish grinding all-in-one machine, according to claim 1, characterized in that the rough grinding main shaft assembly (2) comprises a rough grinding main shaft (201), the finish grinding main shaft assembly (4) comprises a finish grinding main shaft (401) and an eccentric shaft (402), the finish grinding main shaft (401) is sleeved in the rough grinding main shaft (201) and rotates coaxially with the rough grinding main shaft (201), a belt pulley (202) is arranged at the tail end of the rough grinding main shaft (201), a main shaft compression spring is sleeved outside the finish grinding main shaft (401) and fixedly connected with the rough grinding main shaft (201), and the eccentric shaft (402) is arranged along the direction perpendicular to the rough grinding main shaft (201) and the finish grinding main shaft (401).
3. A grinding spindle for a crystal silicon rough grinding and finish grinding integrated machine according to claim 2, characterized in that the rough grinding spindle (201) is provided with a spring fixing groove (404) for accommodating a spindle compression spring (403), one end of the spindle compression spring (403) is abutted against the spring fixing groove (404), and the other end is fixedly connected with the finish grinding spindle (401).
4. A grinding main shaft for a crystal silicon rough grinding and fine grinding integrated machine as claimed in claim 3, characterized in that the end of the fine grinding main shaft (401) is provided with a thrust bearing (405), the eccentric shaft (402) is matched with the thrust bearing (405), and the periphery of the thrust bearing (405) is provided with a bearing end cover.
5. A grinding main shaft for a crystal silicon rough grinding and finish grinding integrated machine according to claim 4, characterized in that the finish grinding head assembly (3) is sleeved in the rough grinding head assembly (1) and comprises a finish grinding wheel (301), the rough grinding head assembly (1) comprises a rough grinding wheel (101), the finish grinding wheel (301) is fixedly connected with the finish grinding main shaft (401), and the rough grinding wheel (101) is fixedly connected with the rough grinding main shaft (201).
6. A grinding spindle for a crystal silicon rough grinding and finish grinding integrated machine as claimed in claim 5, wherein the driving assembly (5) comprises a grinding wheel rotating motor (501) and a finish grinding wheel telescoping control motor (502), the output end of the grinding wheel rotating motor (501) is connected with the rough grinding spindle (201) for driving the rough grinding spindle (201) and the finish grinding spindle (401) to rotate, the output end of the finish grinding wheel telescoping control motor (502) is connected with the eccentric shaft (402), the eccentric shaft (402) is driven to rotate to push the tail end of the finish grinding spindle (401) to move towards the end far away from the eccentric shaft (402), and the finish grinding wheel (301) protrudes out of the plane of the rough grinding head assembly (1) for performing finish grinding operation on crystal silicon.
7. A grinding main shaft for a crystal silicon rough grinding and finish grinding integrated machine according to claim 6, characterized in that the rough grinding main shaft (201) and the finish grinding main shaft (401) are driven in rotation by a spline or a flat key.
8. A grinding main shaft for a crystal silicon rough grinding and finish grinding integrated machine according to claim 7, characterized in that the finish grinding main shaft (401) and the driving assembly (5) are both fixed on a fixed seat (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921538605.0U CN210968406U (en) | 2019-09-17 | 2019-09-17 | Grinding main shaft for coarse grinding and accurate grinding integrated machine of crystal silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921538605.0U CN210968406U (en) | 2019-09-17 | 2019-09-17 | Grinding main shaft for coarse grinding and accurate grinding integrated machine of crystal silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210968406U true CN210968406U (en) | 2020-07-10 |
Family
ID=71456217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921538605.0U Active CN210968406U (en) | 2019-09-17 | 2019-09-17 | Grinding main shaft for coarse grinding and accurate grinding integrated machine of crystal silicon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210968406U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110524414A (en) * | 2019-09-17 | 2019-12-03 | 青岛高测科技股份有限公司 | A kind of grinding spindle and its application method for roughly grinding fine grinding all-in-one machine for crystal silicon |
| WO2024066957A1 (en) * | 2022-09-30 | 2024-04-04 | 青岛高测科技股份有限公司 | Grinding machine and control method therefor |
-
2019
- 2019-09-17 CN CN201921538605.0U patent/CN210968406U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110524414A (en) * | 2019-09-17 | 2019-12-03 | 青岛高测科技股份有限公司 | A kind of grinding spindle and its application method for roughly grinding fine grinding all-in-one machine for crystal silicon |
| WO2024066957A1 (en) * | 2022-09-30 | 2024-04-04 | 青岛高测科技股份有限公司 | Grinding machine and control method therefor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5285416B2 (en) | Internal gear grinding machine and barrel threading tool dressing method | |
| CN110524414A (en) | A kind of grinding spindle and its application method for roughly grinding fine grinding all-in-one machine for crystal silicon | |
| CN210968406U (en) | Grinding main shaft for coarse grinding and accurate grinding integrated machine of crystal silicon | |
| CN111890151B (en) | Full-automatic circular saw blade double-sided grinding machine and working method thereof | |
| WO1999001253A1 (en) | External abrasive machine | |
| CN108927729B (en) | Multi freedom burnishing machine of angularly adjustable head mechanism of polishing | |
| CN216029815U (en) | Automatic burr-grinding device for blank | |
| CN113305715B (en) | Mould burnishing device for robot | |
| CN111469023B (en) | A belt sander for machine tools | |
| CN210335447U (en) | Angle-adjustable dovetail groove grinding mechanism | |
| CN210704255U (en) | A grinding head structure for grinding notebook shells | |
| CN114083409A (en) | Polishing mechanism with coarse and fine polishing integrated design | |
| CN208913769U (en) | A kind of bearing dustproof groove milling tools | |
| CN219358959U (en) | Sheet metal part deburring tool | |
| CN222114203U (en) | Compound milling machine | |
| JP4041225B2 (en) | Polishing equipment | |
| CN212794434U (en) | Internal and external circle composite grinding machine | |
| KR100610407B1 (en) | Lens grinder | |
| CN211966914U (en) | Grinding machine for deburring of bearing outer sleeve | |
| CN211414586U (en) | Grinding machine tool with movable cutter | |
| CN117773678B (en) | Air compressor machine cylinder grinder | |
| CN213380792U (en) | Quick polishing equipment | |
| CN221474692U (en) | Shaft part tail nail removing device | |
| CN216228808U (en) | Grinding machine with grinding wheel dressing function | |
| JPH0788750A (en) | Cage window grinder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |