CN210668271U - Mass spectrometer and sample injection mechanism thereof - Google Patents
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- CN210668271U CN210668271U CN201921080158.9U CN201921080158U CN210668271U CN 210668271 U CN210668271 U CN 210668271U CN 201921080158 U CN201921080158 U CN 201921080158U CN 210668271 U CN210668271 U CN 210668271U
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Abstract
本实用新型涉及一种质谱仪及其进样机构。进样机构包括粒子束形成装置以及粒子束阻挡装置。粒子束形成装置具有粒子束形成通道以及分别设于粒子束形成通道的两端的进样口和粒子束出口。粒子束阻挡装置包括挡板以及用于驱动挡板运动的驱动机构；挡板具有用于供粒子束穿过的第一通道。当挡板运动至第一通道与粒子束出口相对应时，粒子束穿过第一通道；当挡板运动至第一通道与粒子束出口错开时，粒子束由挡板阻挡。质谱仪包括该进样机构、粒子加速电极以及检测机构，使用该质谱仪能够准确检测超细颗粒物中单颗粒物的空气动力学粒径和化学组成。
The utility model relates to a mass spectrometer and a sampling mechanism thereof. The sample introduction mechanism includes a particle beam forming device and a particle beam blocking device. The particle beam forming device has a particle beam forming channel, and a sample inlet and a particle beam outlet respectively provided at both ends of the particle beam forming channel. The particle beam blocking device includes a baffle plate and a driving mechanism for driving the baffle plate to move; the baffle plate has a first passage for the particle beam to pass through. When the baffle moves to the point that the first channel corresponds to the particle beam outlet, the particle beam passes through the first channel; when the baffle moves to the point that the first channel is staggered from the particle beam outlet, the particle beam is blocked by the baffle. The mass spectrometer includes the sampling mechanism, the particle acceleration electrode and the detection mechanism, and the use of the mass spectrometer can accurately detect the aerodynamic particle size and chemical composition of the single particles in the ultrafine particles.
Description
Technical Field
The utility model relates to a particle detection field, concretely relates to mass spectrometer and sampling mechanism thereof.
Background
The adverse effects of fine particles in the air, especially ultrafine particles (particles having an aerodynamic particle size of 100nm or less) on human health and environmental processes such as global radiation balance are becoming increasingly significant. In order to solve such problems, it is necessary to know the physicochemical properties of the ultrafine particles in the air, such as the aerodynamic particle size and chemical composition of the single particles in the ultrafine particles. After the physicochemical properties of the single particles are known, the particles can be treated in a targeted manner. The current common detection means are difficult to accurately obtain the aerodynamic particle size and chemical composition of single particles in the ultrafine particles.
SUMMERY OF THE UTILITY MODEL
Based on this, it is necessary to provide a mass spectrometer and a sample injection mechanism thereof, which can accurately obtain the aerodynamic particle size and chemical composition of single particles in ultrafine particles.
A sample introduction mechanism of a mass spectrometer is characterized by comprising a particle beam forming device and a particle beam blocking device;
the particle beam forming device is provided with a particle beam forming channel, and a sample inlet and a particle beam outlet which are respectively arranged at two ends of the particle beam forming channel; the particle beam forming channel is used for gathering the particles to be detected into a particle beam and emitting the particle beam to the particle beam blocking device from the particle beam outlet;
the particle beam blocking device comprises a baffle and a driving mechanism for driving the baffle to move; the baffle has a first passage for the particle beam to pass through; when the baffle moves to the first channel corresponding to the particle beam outlet, the particle beam passes through the first channel; when the baffle moves to the position that the first channel is staggered with the particle beam outlet, the particle beam is blocked by the baffle.
In one embodiment, the particle beam forming device further comprises a critical hole and a buffer cavity which are arranged between the sample inlet and the particle beam forming channel; the particles to be detected sequentially pass through the injection port, the critical hole, the buffer cavity and the particle beam in sequence to form a channel.
In one embodiment, the driving mechanism drives the baffle plate to rotate.
In one embodiment, the sample injection mechanism of the mass spectrometer further comprises a vacuum chamber; the particle beam outlet and the baffle are both arranged in the vacuum chamber.
In one embodiment, a partition plate is arranged in the vacuum chamber; the partition divides the vacuum chamber into a first vacuum chamber and a second vacuum chamber.
In one embodiment, the particle beam outlet is disposed in the first vacuum chamber, and the baffle is disposed in the second vacuum chamber;
the partition board is provided with a second channel, the second channel corresponds to the particle beam outlet, and the particle beam emitted from the particle beam outlet passes through the second channel to move to the particle beam blocking device.
In one embodiment, the second channel has an inner diameter that gradually increases from the particle beam outlet to the first channel.
A mass spectrometer comprising a particle accelerating electrode, a detection mechanism and a sample introduction mechanism as described in any of the above embodiments;
the particle accelerating electrode is arranged corresponding to the sample feeding mechanism and is used for accelerating the particle beam after passing through the first channel;
the detection mechanism is arranged corresponding to the particle accelerating electrode and is used for detecting the particle beam accelerated by the particle accelerating electrode.
In one embodiment, the detection mechanism comprises an ionization laser, a cation reflective electrode, an anion reflective electrode, a cation detector and an anion detector;
the ionization laser is arranged corresponding to the particle accelerating electrode and is used for ionizing the particle beam entering the particle accelerating electrode;
the positive ion reflecting electrode and the negative ion reflecting electrode are respectively arranged corresponding to the particle accelerating electrode, positive ions formed after ionization move towards the positive ion reflecting electrode, and negative ions formed after ionization move towards the negative ion reflecting electrode;
the cation detector is arranged corresponding to the cation reflection electrode, and the anion detector is arranged corresponding to the anion reflection electrode.
In one embodiment, the mass spectrometer further comprises an analysis device; the analysis device is respectively electrically connected with the particle beam blocking device, the ionization laser, the cation detector and the anion detector.
The sample feeding mechanism of the mass spectrometer comprises a particle beam forming device and a particle beam blocking device. The particles to be detected form a particle beam in the particle beam forming device, and then the particle beam moves toward the particle beam blocking device. The particle beam blocking device comprises a baffle and a driving mechanism for driving the baffle to move, wherein the baffle is provided with a first channel for the particle beam to pass through. When the baffle moves to a position where the first channel corresponds to the particle beam outlet, the particle beam can pass through the first channel; when the baffle moves to the first channel and is staggered with the particle beam outlet, the particle beam is blocked by the baffle. The first passage is small relative to the baffle, and the time period during which the particle beam can pass through the first passage is short, so that the amount of particles passing through the first passage at a time during detection is small. And the movement cycle through adjusting the baffle can make do not have the influence each other between the particulate matter that passes through first passageway at every turn for can accurately acquire the aerodynamic particle size and the chemical composition of single particulate matter in the superfine particulate matter at the testing process.
The mass spectrometer comprises a particle accelerating electrode, a detection mechanism and the sample feeding mechanism. The particle beam is formed after the particle to be detected passes through the sample feeding mechanism, and the particle beam moves towards the particle accelerating electrode after passing through the first channel, and then enters the detection mechanism after passing through the particle accelerating electrode. In the detection process, no mutual influence exists between the particles, and the aerodynamic particle size and the chemical composition of single particles in the ultrafine particles can be accurately obtained.
Drawings
Fig. 1 is a schematic structural diagram of a mass spectrometer according to an embodiment of the present invention.
Fig. 2 is a top view of the particle beam blocking device of the mass spectrum corresponding to fig. 1.
Fig. 3 is a graph illustrating the relationship between the aerodynamic particle size of a single particle and the flight time according to an embodiment of the present invention.
The notation in the figure is: 10: a particle beam forming device; 11: a sample inlet; 12: a critical pore; 13: a buffer chamber; 14: a vacuum gauge; 15: a particle beam forming passage; 16: a particle beam outlet; 20: a particle beam blocking device; 21: a baffle plate; 22: a first channel; 30: a vacuum chamber; 31: a partition plate; 32: a first vacuum chamber; 33: a second vacuum chamber; 34: a third vacuum chamber; 35: a second channel; 40: a mass spectrometer; 41: a particle accelerating electrode; 42: an ionization laser; 43: a positive ion reflective electrode; 44: an anion reflective electrode; 45: a cation detector; 46: an anion detector; 47: an analysis device.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1, an embodiment of the present invention provides a mass spectrometer 40, which includes a particle accelerating electrode 41, a detecting mechanism and a sample feeding mechanism. The particle accelerating electrode 41 is disposed corresponding to the sample injection mechanism, and the particle accelerating electrode 41 is used for accelerating the particle beam after passing through the first channel 22. The detection mechanism is provided corresponding to the particle acceleration electrode 41, and detects the particle beam accelerated by the particle acceleration electrode 41.
In one particular example, the detection mechanism includes an ionization laser 42, a cation reflective electrode 43, an anion reflective electrode 44, a cation detector 45, and an anion detector 46.
The ionization laser 42 is provided corresponding to the particle accelerating electrode 41, and ionizes the particle beam entering the particle accelerating electrode 41.
The cation reflection electrode 43 and the anion reflection electrode 44 are provided corresponding to the particle acceleration electrode 41, respectively, and cations formed after ionization move toward the cation reflection electrode 43 and anions formed after ionization move toward the anion reflection electrode 44.
The cation detector 45 is provided corresponding to the cation reflection electrode 43, and the anion detector 46 is provided corresponding to the anion reflection electrode 44.
In this embodiment, the detection mechanism is a bipolar reflection time-of-flight mass analyzer, the particle beam is ionized in the ion accelerating electrode 41 to form cations and anions, and then the cations and the anions move to the cation reflecting electrode 43 and the anion reflecting electrode 44 respectively, so as to obtain a mass spectrum of a single particle in the particle to be detected through the cation detector 45 and the anion detector 46. It can be understood that the detection mechanism of the present invention may also be a single-stage reflection time-of-flight mass analyzer, that is, the detection mechanism includes a cation reflection electrode or an anion reflection electrode and a corresponding cation detector or anion detector, the particle beam is ionized in the ion acceleration electrode to form cations and anions, a mass spectrum of the single particle matter in the particle to be detected is obtained according to the cation detector or the anion detector, and then the chemical composition of the single particle matter in the particle to be detected is determined according to the mass spectrum.
In one particular example, the mass spectrometer 40 further comprises an analyzing device 47; the analyzer 47 is electrically connected to the particle beam blocking device 20, the ionization laser 42, the cation detector 45, and the anion detector 46, respectively.
The analysis means 47, electrically connected to the beam blocking means 20, are able to detect and record the time at which the beam reaches the first channel 22. The analysis device 47 is electrically connected to the ionization laser 42, and is capable of controlling the ionization laser 42 to emit laser light to ionize the particle beam entering the particle accelerating electrode 41, and detecting and recording an ionization laser trigger signal, wherein the time when the ionization laser trigger signal is detected is taken as the time when the particle beam enters the particle accelerating electrode 41. The flight time of the single particle is the time for the particle beam to move from the first passage 22 to the particle accelerating electrode 41, and the aerodynamic particle size of the single particle to be detected is determined based on the flight time.
In this embodiment, the analyzer 47 is electrically connected to the cation detector 45 and the anion detector 46, respectively, and obtains a mass spectrum of a single particle in the particle to be detected according to the cation detector 45 and the anion detector 46, and then determines the chemical composition of the single particle in the particle to be detected according to the mass spectrum.
The mass spectrometer in this embodiment includes a particle accelerating electrode 41, a detecting mechanism, and a sample injection mechanism. The particle to be detected forms a particle beam after passing through the sample injection mechanism, and the particle beam moves towards the particle acceleration electrode 41 after passing through the first channel 22, and then enters the detection mechanism after passing through the particle acceleration electrode 41. In the detection process, no mutual influence exists between the particles, and the aerodynamic particle size and the chemical composition of single particles in the ultrafine particles can be accurately obtained.
The sample injection mechanism of the mass spectrometer in this embodiment includes a particle beam forming device 10 and a particle beam blocking device 20.
The particle beam forming device 10 has a particle beam forming passage 15, and a sample inlet 11 and a particle beam outlet 16 respectively provided at both ends of the particle beam forming passage 15; the sample inlet 11 is used for adding particles to be detected, the particle beam forming channel 15 is used for gathering the particles to be detected into a particle beam, and the particle beam passes through the particle beam outlet 16 and then is emitted to the particle beam blocking device 10.
The particle beam blocking device 10 comprises a shutter 21 and a driving mechanism (not shown in the figure) for driving the shutter to move; the shutter 21 has a first passage 22 for the particle beam to pass through; when the shutter 21 is moved to the first passage 22 corresponding to the particle beam outlet 16, the particle beam passes through the first passage 22; when the shutter 21 moves to the position where the first passage 22 is offset from the particle beam exit 16, the particle beam is blocked by the shutter 21.
In this embodiment, the particle beam forming channel 15 employs an aerodynamic lens to condense the particles to be detected into a particle beam, and the aerodynamic lens has high working efficiency and can condense the particles to be detected into a particle beam quickly. It is understood that other devices with particle collecting function can be used to collect the particles to be detected into particle beams, for example, the devices with particle collecting function can be capillaries, focusing lenses, etc.
As shown in fig. 2, the baffle 21 in this embodiment is a circular baffle, and the first passage 22 is provided at the edge of the circular baffle. The particle beam passes through the particle beam outlet 16 after being formed in the particle beam forming passage 15, and then is directed to the particle beam blocking device 10. The shutter 21 is driven by the driving mechanism to move, when the shutter 21 moves to the first passage 22 corresponding to the particle beam outlet 16, the particle beam can pass through the first passage 22, and the particle beam after passing through the first passage 22 continues to move for subsequent acceleration and detection, thereby obtaining a required detection result. When the shutter 21 moves to the position where the first passage 22 is offset from the particle beam exit 16, the particle beam is blocked by the shutter 21, and the particle beam cannot pass through the first passage 22 for subsequent detection.
In the sample injection mechanism of the mass spectrometer of the present embodiment, the first channel 22 is smaller than the baffle 21, and the time period for the particle beam to pass through the first channel 22 is shorter, so that the number of particles passing through the first channel 22 each time in the detection process is smaller. And the movement period of the baffle 21 is adjusted, so that no mutual influence exists between the particles passing through the first channel 22 every time, and the aerodynamic particle size and chemical composition of the single particles can be accurately obtained in the detection process.
In a specific example, the particle beam forming device 10 further has a critical hole 12 and a buffer chamber 13 provided between the injection port 11 and the particle beam forming channel 15; the particles to be detected sequentially pass through the injection port 11, the critical hole 12, the buffer cavity 13 and the particle beam forming channel 15 in sequence.
Because the mass spectrometer is usually in a vacuum state in the detection process, it is required to ensure that the particles and the particle beams move in a vacuum environment. The critical hole 12 and the buffer cavity 13 are arranged between the sample inlet 11 and the particle beam forming channel 15, so that the vacuum degree of the sample introduction mechanism can be improved, and the requirement of the vacuum degree required by the particle beam forming channel 15 is met. After the particulate matter (such as aerosol) to be detected is added from the sample inlet 11, the particulate matter passes through the critical hole 12, the pressure loss is large at the moment, and the vacuum degree in the buffer cavity 13 can be improved. The movement speed of the particles after passing through the critical hole 12 is increased, and then the particles are buffered in the buffer cavity 13, so that the speed of the particles is reduced, and the speed of the particles meets the working condition of the particle beam forming channel 15. After the particles are buffered by the buffer cavity 13, the particle beam forming channel 15 can stably gather the particles, and the loss of the particles caused by wall collision can be reduced.
Preferably, a vacuum gauge 14 is provided on the buffer chamber 13. The vacuum gauge 14 can monitor the degree of vacuum inside the buffer chamber 13, and provides a reference for adjusting the speed and pressure of the particles so that the speed of the particles conforms to the operating conditions of the particle beam forming passage 15. It will be appreciated that the vacuum gauge 14 may be other devices capable of measuring vacuum or pressure, such as a vacuum gauge or the like.
In one particular example, the drive mechanism drives the flapper 21 in a rotational motion. Baffle 21 makes rotary motion, conveniently sets up the rotation cycle of baffle 21 for there is not mutual influence at every turn between the particulate matter through first passageway 22, makes aerodynamic particle diameter and the chemical composition that can accurately acquire single particulate matter at testing process.
In one specific example, the sample injection mechanism of the mass spectrometer further comprises a vacuum chamber 30; the particle beam outlet 16 and the shutter 21 are both provided in the vacuum chamber 30.
In a specific example, a partition plate 31 is provided in the vacuum chamber; the vacuum chamber is divided into a first vacuum chamber 32 and a second vacuum chamber 33 by a partition plate 31.
In a specific example, the particle beam outlet 16 is provided in a first vacuum chamber 32 and the shutter 21 is provided in a second vacuum chamber 33. The partition plate 31 is provided with a second passage 35, the second passage 35 corresponds to the particle beam outlet 16, and the particle beam emitted from the particle beam outlet 16 passes through the second passage 35 and moves to the particle beam blocking device 20.
Preferably, the first vacuum chamber 32 is divided into a plurality of sub-vacuum chambers. Dividing the first vacuum chamber 32 into a plurality of sub-vacuum chambers can improve the vacuum degree of the detection process of the mass spectrometer.
In a specific example, the inner diameter of the second channel 35 gradually increases from the particle beam outlet 16 to the first channel 22.
The number of the partition plates 31 is 2 in this embodiment, and the first vacuum chamber 32 is divided into 2 sub-vacuum chambers. It will be appreciated that in the design of the mass spectrometer, the first vacuum chamber can be divided into a plurality of sub-vacuum chambers so that the vacuum environment can meet the detection requirements of the mass spectrometer.
In this embodiment, the vacuum chamber 30 is divided into a first vacuum chamber 32, a second vacuum chamber 33, and a third vacuum chamber 34 by 2 partitions 31. The third vacuum chamber 34 is provided at the outer periphery of the first vacuum chamber 32. In order to meet the vacuum condition of the mass spectrometer detection process and monitor the vacuum condition, a first vacuum chamber 32, a second vacuum chamber 33 and a third vacuum chamber 34 are provided, and a vacuum gauge 14 is provided on each of the first vacuum chamber 32, the second vacuum chamber 33 and the third vacuum chamber 34. It will be appreciated that the vacuum gauge 14 may be other devices capable of measuring vacuum or pressure, such as a vacuum gauge or the like. It is understood that the first vacuum chamber 32, the second vacuum chamber 33 and the third vacuum chamber 34 are respectively connected to vacuum pumps (not shown in the drawings) by which vacuum environments of the vacuum chambers are provided.
In this embodiment, the 2 partition plates 31 are provided with second channels 35, the second channels 35 of the two partition plates 31 correspond to the particle beam outlet 16, and the particle beam passes through the second channels 35 after passing through the particle beam outlet 16. The second channel 35 is in this embodiment conical and the inner diameter of the second channel 35 gradually decreases from the first channel 22 to the particle beam outlet 16. The second channel 35 is tapered to reduce the divergence of particles at the edges of the particle beam and to reduce the loss of the particle beam during the evacuation of the vacuum chamber 30. It will be appreciated that the second channel 35 may also be of other shapes, such as cylindrical, as long as the beam passes smoothly through the baffle.
An embodiment of the utility model provides a detection method of single particulate matter still provides, adopts above-mentioned mass spectrometer 40, and detection method includes following step:
the particle to be detected is added from the sample inlet 11, then forms a particle beam after passing through the particle beam forming channel 15, the particle beam is accelerated by the particle accelerating electrode 41 after passing through the first channel 22, and the accelerated particle beam enters the detection mechanism for detection;
determining the aerodynamic particle size of the single particles to be detected according to the time for the particle beam to move from the first channel 22 to the particle accelerating electrode 41;
and determining the chemical composition of the single particles in the particles to be detected according to the mass spectrogram obtained by the detection mechanism.
Under the set mass spectrum condition, the aerodynamic particle size of the single particle has a certain fitting relation with the flight time. The aerodynamic particle size and the flight time of the single particles in this example are shown in FIG. 3. Here, the flight time refers to a time when the particle beam moves from the first passage 22 to the particle accelerating electrode 41.
In the present embodiment, in the process of detecting the aerodynamic particle size of the single particle, the analyzing device 47 can obtain the flight time of the particle beam, and according to the flight time, with reference to fig. 3, the aerodynamic particle size of the single particle in the particle to be detected is determined.
According to the embodiment, the mass spectrogram of the single particulate matter in the particles to be detected can be obtained through the detection mechanism, and then the chemical composition of the single particulate matter in the particles to be detected is determined according to the mass spectrogram.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
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| CN201921080158.9U CN210668271U (en) | 2019-07-11 | 2019-07-11 | Mass spectrometer and sample injection mechanism thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112216593A (en) * | 2019-07-11 | 2021-01-12 | 广州禾信仪器股份有限公司 | Mass spectrometer, sample injection mechanism thereof and single particle detection method |
| CN113871285A (en) * | 2020-06-30 | 2021-12-31 | 广州禾信仪器股份有限公司 | Aerosol mass spectrum sampling device with wide particle size range and aerosol mass spectrometer |
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2019
- 2019-07-11 CN CN201921080158.9U patent/CN210668271U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112216593A (en) * | 2019-07-11 | 2021-01-12 | 广州禾信仪器股份有限公司 | Mass spectrometer, sample injection mechanism thereof and single particle detection method |
| CN112216593B (en) * | 2019-07-11 | 2025-04-04 | 广州禾信仪器股份有限公司 | Mass spectrometer and sample injection mechanism thereof and single particle detection method |
| CN113871285A (en) * | 2020-06-30 | 2021-12-31 | 广州禾信仪器股份有限公司 | Aerosol mass spectrum sampling device with wide particle size range and aerosol mass spectrometer |
| WO2022000978A1 (en) * | 2020-06-30 | 2022-01-06 | 广州禾信仪器股份有限公司 | Aerosol mass spectrometry sampling device having wide particle size range, and aerosol mass spectrometer |
| CN113871285B (en) * | 2020-06-30 | 2023-02-24 | 广州禾信仪器股份有限公司 | Aerosol mass spectrum sampling device with wide particle size range and aerosol mass spectrometer |
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Address after: 510535 No. 16, Xinrui Road, Huangpu District, Guangzhou, Guangdong Patentee after: GUANGZHOU HEXIN INSTRUMENT Co.,Ltd. Address before: 510700 3 / F, building A3, science and technology enterprise accelerator, 11 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee before: GUANGZHOU HEXIN INSTRUMENT Co.,Ltd. |
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Granted publication date: 20200602 |