CN210638664U - A platform leveling control device - Google Patents
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Abstract
本申请公开了一种平台调平控制装置，包括：参考光光源、图像采集部件、显微镜、被测样品、平台、平台驱动部件和控制终端；图像采集部件与显微镜的出口端连接，与显微镜的干涉物镜位于同一光路；参考光源与显微镜的入口端连接，与显微镜的干涉物镜位于同一光路；被测样品平放于平台上，且位于干涉物镜的下方；平台驱动部件位于平台下方，与平台驱动部件通过运动副连接；控制终端与平台驱动部件电连接。本申请提供的一种平台调平控制装置，可根据平台的位移偏移控制平台驱动部件对平台进行调平，能够替代人工对平台进行调平。
The present application discloses a platform leveling control device, comprising: a reference light source, an image acquisition component, a microscope, a sample to be tested, a platform, a platform driving component and a control terminal; the image acquisition component is connected to the outlet end of the microscope and is The interference objective lens is located in the same optical path; the reference light source is connected to the entrance end of the microscope, and is located in the same optical path as the interference objective lens of the microscope; the sample to be tested is placed on the platform, and is located below the interference objective lens; the platform driving component is located under the platform and is driven by the platform The components are connected through the motion pair; the control terminal is electrically connected with the platform driving component. The present application provides a platform leveling control device, which can control the platform drive components to level the platform according to the displacement and offset of the platform, and can replace the manual leveling of the platform.
Description
Technical Field
The application belongs to the technical field of optical measurement, and particularly relates to a platform leveling control device.
Background
The white light interference measurement technology is an important non-contact optical measurement technology for surface microscopic features, solves the problem of phase ambiguity of the laser interference measurement technology in measuring discontinuous surfaces, is widely applied to the fields of mechanical industry, electronic industry, modern industry and the like, and can be used for measuring the surface roughness of elements, the micro-electromechanical system (MEMS) microscopic surface features, the thickness of transparent films and the like.
Because the white light interferometry is an object with the size of micro-nano magnitude, the planeness, the platform planeness and the levelness of the substrate of the measured sample and the contact quality between the measured sample and the platform contact surface can influence the posture of the measured sample, and the posture of the measured sample has great influence on the measuring process and result, and the influence is shown as follows: in the measurement process of white light interference, an objective lens or a measured sample needs to be controlled to perform vertical scanning, so that interference fringe scanning covers the whole measurement field of view. When the measured sample is inclined, a larger vertical scanning range is needed to ensure that the interference fringes can scan and cover the whole measuring field of view, but the measurement efficiency is reduced by adjusting the larger vertical scanning range; and when the measured sample is inclined, the optical path difference between continuous areas of the measured surface is changed greatly in the scanning process, so that interference fringes in the collected white light interference image are thin and dense, and the measurement precision and the reliability of the measurement result are influenced.
The attitude of the sample to be measured needs to be leveled prior to measurement. In the prior art, the platform is adjusted manually, and the measured sample is leveled by manually observing the thickness change of the stripes. However, the process of leveling by manpower is complicated in operation and low in precision, and further the measurement efficiency is influenced.
SUMMERY OF THE UTILITY MODEL
In view of this, the present application provides a platform leveling control device, which extracts a white light interference fringe by obtaining a white light interference fringe pattern of a measured sample on a platform, calculates an oblique direction angle and a yaw angle of the measured sample according to the white light interference fringe, and calculates a displacement offset of the platform according to the direction angle and the yaw angle, that is, controls a platform driving component to level the platform according to the displacement offset of the platform, so as to replace manual leveling of the platform.
The application provides a platform leveling control device, includes:
the device comprises a reference light source, an image acquisition component, a microscope, a sample to be detected, a platform driving component and a control terminal;
the image acquisition component is connected with the outlet end of the microscope and is positioned on the same optical path with the interference objective lens of the microscope;
the reference light source is connected with the inlet end of the microscope and is positioned on the same optical path with the interference objective lens of the microscope;
the tested sample is horizontally placed on the platform and is positioned below the interference objective lens;
the platform driving part is positioned below the platform and is connected with the platform driving part through a kinematic pair;
the control terminal is electrically connected with the platform driving part.
Preferably, the platform driving part comprises a first platform driving part, a second platform driving part and a third platform driving part, and the position points of the first platform driving part, the second platform driving part and the third platform driving part are connected in pairs to form a regular triangle.
Preferably, the platform driving device further comprises a controller, and the controller is electrically connected with the platform driving part and the control terminal respectively.
Preferably, the image acquisition means comprises a camera.
Preferably, the reference light source comprises a white light source.
Preferably, the microscope comprises a compact microscope.
Preferably, the control terminal comprises a computer.
To sum up, the present application provides a platform leveling control device, includes: the device comprises a reference light source, an image acquisition component, a microscope, a sample to be detected, a platform driving component and a control terminal; the image acquisition component is connected with the outlet end of the microscope and is positioned on the same optical path with the interference objective lens of the microscope; the reference light source is connected with the inlet end of the microscope and is positioned on the same optical path with the interference objective lens of the microscope; the tested sample is horizontally placed on the platform and is positioned below the interference objective lens; the platform driving part is positioned below the platform and is connected with the platform driving part through a kinematic pair; the control terminal is electrically connected with the platform driving part.
The application provides a platform leveling control device, through the white light interference fringe picture that obtains the sample of being surveyed on the platform, extract white light interference fringe, calculate the direction angle and the yaw angle of the sample of being surveyed according to white light interference fringe, calculate the displacement skew of platform according to direction angle and yaw angle again, can level the platform according to the displacement skew control platform drive part of platform, can replace the manual work to level the platform.
Drawings
Fig. 1 is a schematic structural diagram of a platform leveling control device according to an embodiment of the present disclosure;
fig. 2 is a schematic diagram of a coordinate system of a platform leveling control device according to an embodiment of the present disclosure;
reference numerals: a white light source 1; a compact microscope 2; an interference objective 3; a sample to be measured 4; a platform 5; a first drive member 6; a second drive member 7; a third drive member 8; a controller 9; a computer 10; a camera 11.
Detailed Description
The application provides a platform leveling control device, which extracts white light interference fringes by obtaining a white light interference fringe image of a tested sample on a platform, calculates the inclination direction angle and the deflection angle of the tested sample according to the white light interference fringes, calculates the displacement deviation of the platform according to the direction angle and the deflection angle, controls a platform driving part to level the platform according to the displacement deviation of the platform, and can replace manpower to level the platform.
The technical solutions of the embodiments of the present application will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without any creative effort belong to the protection scope of the embodiments in the present application.
In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the embodiments of the present application and simplifying the description, but do not indicate or imply that the referred devices or elements must have specific orientations, be configured in specific orientations, and operate, and thus, should not be construed as limiting the embodiments of the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present application, it should be noted that the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected unless explicitly stated or limited otherwise; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. Specific meanings of the above terms in the embodiments of the present application can be understood in specific cases by those of ordinary skill in the art.
Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of a platform leveling control device according to an embodiment of the present disclosure; fig. 2 is a schematic diagram of a coordinate system of a platform leveling control device according to an embodiment of the present disclosure;
the application provides a platform leveling control device, includes:
the device comprises a reference light source, an image acquisition component, a microscope, a sample to be detected 4, a platform 5, a platform driving component and a control terminal;
the image acquisition component is connected with the outlet end of the microscope and is positioned on the same optical path with the interference objective lens 3 of the microscope;
the reference light source is connected with the inlet end of the microscope and is positioned on the same optical path with the interference objective lens 3 of the microscope;
the tested sample 4 is horizontally placed on the platform 5 and is positioned below the interference objective lens 3;
the platform driving part is positioned below the platform 5 and is connected with the platform driving part through a kinematic pair;
the control terminal is electrically connected with the platform driving part.
It should be noted that, the platform leveling control device provided in the embodiment of the present application may place the sample to be measured on the platform 5 before the white light interferometry is performed on the sample to be measured, and the platform 5 needs to be leveled. Firstly, a reference light source can be opened to generate a light path passing through a microscope, the light path passes through an interference objective lens 3 of the microscope to be irradiated on an object to be detected on a platform 5, light irradiated on the object to be detected is reflected on the object to be detected, reflected light interferes with reference light in the interference objective lens 3 and a light path system of the microscope, an interference fringe image of a detected sample 4 is acquired and obtained through an image acquisition device such as an industrial camera, the image fringe image is transmitted to a control terminal, and the control terminal extracts and obtains corresponding white light interference fringes from the white light interference fringe image through an image processing algorithm. And obtaining the direction angle of the corresponding tested sample 4 and the corresponding yaw angle of the direction angle through white light interference fringe calculation. And controlling a driving part of the corresponding platform 5 to adjust the platform 5 according to the corresponding offset displacement parameters through the different offset displacement parameters of the platform 5 corresponding to different conditions of the direction angle and the yaw angle.
Furthermore, the platform driving part comprises a first platform driving part, a second platform driving part and a third platform driving part, and the position points of the first platform driving part, the second platform driving part and the third platform driving part are connected in pairs to form a regular triangle.
It should be noted that the platform driving part has three driving parts, which are respectively a first platform driving part, a second platform driving part and a third platform driving part, and the positions of the three driving devices are connected to each other to form a regular triangle. According to the calculation relational expression of the inclination direction angle and the yaw angle of the tested sample 4 and the Z-direction deviation displacement corresponding to the three driving components below the platform 5, the deviation displacement of the three driving components can be respectively determined. The drive member is adjusted according to the corresponding offset displacement, so that the effect of adjusting the platform 5 can be achieved.
Before and after the white light interference fringe pattern of the detected sample 4 is obtained, the fringe pattern of the detected sample 4 without interference fringes before focusing can be obtained, and black fringes or white fringes are respectively extracted by combining a frame difference method and threshold segmentation. The frame difference method is to perform a difference between two (frame) images, and then set a corresponding threshold value according to the difference image and perform binarization processing to extract black stripes or white stripes.
After the white light interference fringes are extracted, a fringe direction angle and a fringe width are obtained, a direction angle α of the inclination of the measured sample 4 is obtained through the fringe direction angle, and a yaw angle theta of the measured sample 4 is obtained through the fringe width.
The specific process of obtaining the direction angle of the stripes is as follows: edge detection can be performed on the extracted white light interference fringes by using a Canny edge detection algorithm, straight lines corresponding to the white light interference fringes are extracted through Hough line transformation, and angle information of the straight lines, namely direction angles of the interference fringes, is obtained.
The method of least square fitting can also be used for carrying out straight line fitting on the extracted white light interference fringes and obtaining the direction angle of the interference fringes.
The process of obtaining the stripe width is as follows: and obtaining the distance of two adjacent parallel fringes in the extracted white light interference fringes in the X direction or the Y direction, and then calculating the vertical distance of the two adjacent parallel fringes by combining the direction angles of the fringes, wherein the vertical distance is the width of the fringes.
Specifically, the process of obtaining the direction angle at which the sample 4 to be measured is inclined and the yaw angle at the direction angle by using the stripe direction angle and the stripe width information is as follows:
the direction perpendicular to the direction angle of the stripes is taken, and the direction angle of the inclination of the tested sample 4 can be obtained;
the calculation formula of the yaw angle of the measured sample 4 is obtained by the width of the stripe as follows:
where λ represents the center wavelength of the white light source 1 and d represents the fringe width.
According to the direction angle and the yaw angle, calculating the offset displacement parameter of the platform 5 by an offset displacement formula:
z1＝x1cosαtanθ；
z2＝-x1cosαtanθ；
z3＝y1sinαtanθ；
wherein α is direction angle, theta is yaw angle, z1For a deviation displacement of the first drive member 6 from the horizontal position, z2For the second, a deviation of the drive member from the horizontal position, z3For a deviation displacement of the third drive member 8 from the horizontal position, x1And y1For a fixed parameter determined by the mounting position of the three drive members, x1Is one half of the side length of the regular triangle, y1Is the height of a regular triangle; the first driving part 6, the second driving part 7 and the third driving part 8 are all positioned below the platform 5, and the positions of the first driving part, the second driving part and the third driving part form a regular triangle;
and respectively adjusting the driving parts according to the calculated deviation displacement parameters corresponding to the driving parts.
Further, the platform comprises a controller 9, and the controller 9 is electrically connected with the platform driving part and the control terminal respectively.
It should be noted that, the control terminal inputs a corresponding control instruction to the controller 9, so that the controller 9 controls the corresponding platform driving component to adjust according to the control instruction.
Further, the image acquisition means comprises a camera 11.
The image capturing means includes an image capturing device such as a camera 11.
Further, the reference light source includes a white light source 1.
It should be noted that the reference light source in the embodiment of the present application may be a white light source 1.
Further, the microscope includes a compact microscope 2.
It should be noted that the microscope in the embodiment of the present application may be a compact microscope 2.
Further, the control terminal includes a computer 10.
The control terminal in the embodiment of the present application may be a control device such as the computer 10 that can edit a control command.
The complete control flow of the embodiment of the application is as follows:
firstly), before the platform 5 is adjusted, an article to be measured needs to be placed above the platform 5 to be adjusted, subsequent specific parameters related to the offset of the platform 5 are obtained through obtaining the white light interference fringes of the article to be measured and analyzing the image of the white light interference fringes, and then adjustment is made according to the corresponding parameters.
And secondly) after the white light interference fringe image of the tested sample 4 is obtained, carrying out binarization threshold segmentation on the currently collected white light interference fringe image, namely setting a minimum threshold or a maximum threshold, and then carrying out binarization processing to extract black fringes or white fringes. For example, the process of setting the minimum threshold to extract the black stripe specifically includes: a threshold value, for example, 10 is set, then all the pixel values of the image with the pixel value greater than 10 are set to 255 (white), the pixel values of the image with the pixel value less than 10 are set to 0 (black), the resulting image is a black-and-white image, and the black stripe can be extracted. The same principle is that: the process of setting a minimum threshold value to extract the white stripes is as follows: a threshold value, for example 230, is set, and then all pixels in the image with pixel values less than 230 are set to 0 (black), and pixels with pixel values greater than 230 are set to 255 (white), and the resulting image is a black and white image, so that white stripes are extracted.
Or, before and after acquiring the white light interference fringe pattern of the sample 4, the fringe pattern of the sample 4 without interference fringes before focusing can be acquired, and the black fringe or the white fringe is respectively extracted by combining the frame difference method and the threshold segmentation. The frame difference method is to perform difference between two (frame) images, and then perform binarization processing to extract black stripes or white stripes according to the preset settings in the previous embodiment according to the obtained image after difference.
Thirdly), after white light interference fringes are extracted, a fringe direction angle and a fringe width are obtained, a direction angle α of the inclination of the measured sample 4 is obtained through the fringe direction angle, and a yaw angle theta of the measured sample 4 is obtained through the fringe width.
The specific process of obtaining the direction angle of the stripes is as follows: edge detection can be performed on the extracted white light interference fringes by using a Canny edge detection algorithm, straight lines corresponding to the white light interference fringes are extracted through Hough line transformation, and angle information of the straight lines, namely direction angles of the interference fringes, is obtained.
The method of least square fitting can also be used for carrying out straight line fitting on the extracted white light interference fringes and obtaining the direction angle of the interference fringes.
The process of obtaining the stripe width is as follows: and obtaining the distance of two adjacent parallel fringes in the extracted white light interference fringes in the X direction or the Y direction, and then calculating the vertical distance of the two adjacent parallel fringes by combining the direction angles of the fringes, wherein the vertical distance is the width of the fringes.
Specifically, the process of obtaining the direction angle at which the sample 4 to be measured is inclined and the yaw angle at the direction angle by using the stripe direction angle and the stripe width information is as follows:
the direction perpendicular to the direction angle of the stripes is taken, and the direction angle of the inclination of the tested sample 4 can be obtained;
the calculation formula of the yaw angle of the measured sample 4 is obtained by the width of the stripe as follows:
where λ represents the center wavelength of the white light source 1 and d represents the fringe width.
Fourthly) calculating the offset displacement parameter of the platform 5 according to the direction angle and the yaw angle, and the driving device for adjusting the platform 5 according to the offset displacement parameter comprises:
according to the direction angle and the yaw angle, calculating the offset displacement parameter of the platform 5 by an offset displacement formula:
z1＝x1cosαtanθ；
z2＝-x1cosαtanθ；
z3＝y1sinαtanθ；
wherein α is direction angle, theta is yaw angle, z1For a deviation displacement of the first drive member 6 from the horizontal position, z2For the second, a deviation of the drive member from the horizontal position, z3For a deviation displacement of the third drive member 8 from the horizontal position, x1And y1For a fixed parameter determined by the mounting position of the three drive members, x1Is one half of the side length of the regular triangle, y1Is the height of a regular triangle; the first driving part 6, the second driving part 7 and the third driving part 8 are all positioned below the platform 5, and the positions of the first driving part, the second driving part and the third driving part form a regular triangle;
adjusting the drive members, i.e. -z, in accordance with the calculated offset displacement parameters corresponding to the drive members1、-z2、-z3As input, three driving devices are respectively controlled to move corresponding displacements.
Fifthly), the method for controlling the three driving devices to move correspondingly comprises the following steps:
the first method is as follows: a is-z1、-z2、-z3As an input, three driving devices are controlled to move simultaneously, respectively. Presetting a yaw angle leveling threshold TθWhen theta is less than or equal to TθThe platform is considered to meet the leveling state. If the preset leveling state is met, leveling is finished. Otherwise, repeating all leveling operations in the previous embodiment, and adjusting according to the acquired direction angle and yaw angle feedback of the measured sample until a preset leveling state is met, and finishing leveling.
The second mode is that the X, Y direction is gradually leveled, when the inclination direction angle α of the platform meets the requirement that the angle is between 45 degrees and α and 90 degrees or between 90 degrees and α and 135 degrees, the X direction leveling is firstly carried out, namely the first driving device is controlled to move to the Z direction in small steps1Moving in the direction of-z while controlling the second driving means to move in small steps toward-z2The direction is moved, when α is equal to 90 degrees, the tested sample is leveled in the X direction, then the leveling in the Y direction is carried out, namely the third driving device is controlled to move to-z in small steps3Moving in the direction until a preset yaw angle theta leveling threshold value T is metθI.e. theta. ltoreq.TθAnd then the leveling of the tested sample in the Y direction is finished, and the leveling of the platform is finished.
Sixthly) after the three driving devices are driven to carry out leveling operation on the platform 5, judging whether the platform 5 meets a preset leveling state or not, if so, finishing leveling, and if not, continuing to carry out leveling operation until the preset leveling state is met.
The process of judging whether the platform 5 meets the preset leveling state is as follows:
and judging whether the yaw angle is less than or equal to a leveling threshold value.
To sum up, the platform leveling control device provided in the embodiment of the present application performs fringe extraction on the collected white light interference fringe pattern through a related image processing algorithm by using the computer 10, obtains the direction angle of the inclination of the measured sample 4 and the yaw angle of the measured sample 4 on the direction angle by using the extracted fringe direction and width information, performs one-time movement by controlling the driving part in a small increment, determines the positive and negative yaw angles according to the direction of the fringe movement, calculates the Z-directional deviation displacement of the three driving parts of the platform 5 according to the pre-established coordinate system and the direction angle and yaw angle of the inclination of the measured sample 4, and controls the driving part to adjust the measured sample 4 to the horizontal posture. The leveling device can be used for quickly and accurately leveling, the leveling efficiency is improved, and the leveling precision and consistency are ensured.
The above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions in the embodiments of the present application.
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