[go: up one dir, main page]

CN210155406U - A three-dimensional head-mounted microscope - Google Patents

A three-dimensional head-mounted microscope Download PDF

Info

Publication number
CN210155406U
CN210155406U CN201921256738.9U CN201921256738U CN210155406U CN 210155406 U CN210155406 U CN 210155406U CN 201921256738 U CN201921256738 U CN 201921256738U CN 210155406 U CN210155406 U CN 210155406U
Authority
CN
China
Prior art keywords
lens
dimensional head
laser
dichroic mirror
microscope according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201921256738.9U
Other languages
Chinese (zh)
Inventor
不公告发明人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Yibolun Photoelectric Instrument Co Ltd
Original Assignee
Suzhou Yibolun Photoelectric Instrument Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Yibolun Photoelectric Instrument Co Ltd filed Critical Suzhou Yibolun Photoelectric Instrument Co Ltd
Application granted granted Critical
Publication of CN210155406U publication Critical patent/CN210155406U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/02Objectives
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Microscoopes, Condenser (AREA)
  • Endoscopes (AREA)

Abstract

本实用新型涉及光学显微成像技术领域,尤其涉及一种三维头戴式显微镜,包括透镜组件、物镜、扫描器组件,物镜上设有光电检测器,光电检测器包括保护元件、滤光片、光电敏感单元、驱动电路。本方案实现了对荧光收集的相关元件进行简化,使荧光收集的相关元件的体积更小的同时,并能够进行相关的实验操作和检测。

Figure 201921256738

The utility model relates to the technical field of optical microscopic imaging, in particular to a three-dimensional head-mounted microscope, comprising a lens assembly, an objective lens, and a scanner assembly, the objective lens is provided with a photoelectric detector, and the photoelectric detector Photosensitive unit, drive circuit. This scheme realizes the simplification of the relevant components for fluorescence collection, makes the volume of the relevant components for fluorescence collection smaller, and enables relevant experimental operations and detection.

Figure 201921256738

Description

一种三维头戴式显微镜A three-dimensional head-mounted microscope

技术领域technical field

本实用新型涉及光学显微成像技术领域,尤其涉及一种三维头戴式显微镜。The utility model relates to the technical field of optical microscopic imaging, in particular to a three-dimensional head-mounted microscope.

背景技术Background technique

在非线性光学成像显微镜,特别是多光子荧光显微镜中,近红外激光脉冲被显微物镜聚焦后在样品中激发出各向同性发射的荧光信号。生物组织通常表现出较强吸收和高散射的光学特性。对于落射式(Epifluorescence)荧光检测,同一个显微物镜既被用于聚焦激发光,又被用于收集荧光信号。被显微物镜收集的荧光信号的强度取决于显微物镜的数值孔径和物镜前孔径(Objective Front Aperture,OFA)(E.Beaurepaire,et.al,AppliedOptics,vol.41,no.25,pp.5376-5382,2002)。显微物镜的数值孔径和物镜前孔径越大,显微物镜能收集的荧光信号的强度越大。对于双光子荧光显微镜中常见的数值孔径为0.8,放大倍率为40X的显微物镜来说,高散射样品中只有不到10%的立体角内的荧光被显微物镜收集到。In nonlinear optical imaging microscopy, especially multiphoton fluorescence microscopy, a near-infrared laser pulse is focused by a microscope objective to excite an isotropically emitted fluorescence signal in the sample. Biological tissues usually exhibit strong absorption and high scattering optical properties. For epifluorescence detection, the same microscope objective is used to both focus the excitation light and collect the fluorescence signal. The intensity of the fluorescence signal collected by the microscope objective depends on the numerical aperture of the microscope objective and the Objective Front Aperture (OFA) (E.Beaurepaire, et.al, Applied Optics, vol.41, no.25, pp. 5376-5382, 2002). The larger the numerical aperture of the microscope objective and the front aperture of the objective, the greater the intensity of the fluorescent signal that the microscope objective can collect. For the 0.8 numerical aperture, 40X magnification microscope objective commonly found in two-photon fluorescence microscopy, less than 10% of the fluorescence within the solid angle of the highly scattering sample is collected by the microscope objective.

近年来出现了很多技术收集显微物镜无法收集到的荧光光子,2006年折返射显微物镜被提出(D.

Figure BDA0002156332240000011
et.al,Optics Letters,vol.31,no.16,pp.2447-2449,2006)。2007年采用抛物面镜和2011年采用圆柱面镜的发射检测技术被提出,仿真获得了10倍荧光收集效率增强,实验获得了8.9倍荧光收集效率增强(C.A.Combs,et.al,Journal fMicroscopy,vol.228,no.3,pp.330-337,2007和V.Crosignani,et.al,Journal ofBiophotonics,vol.4,no.9,pp.592-599,2011)。之后,上述技术分别经过改进后被用于落射式荧光检测(C.A.Combs,et.al,Journalof Microscopy,vol.241,no.2,pp.153-161,2011和V.Crosignani,et.al,Journal of Biomedical Optics,vol.17,no.11,pp.116023,2012)。最近报道了一种可用于直立双光子显微镜的紧凑的全发射检测器件(C.A.Combs,et.al,Journal of Microscopy,vol.253,no.2,pp.83-92,2014)。此外通过在显微物镜周围安排5-8根高数值孔径的光纤来收集显微物镜收集不到的荧光,可以在高数值孔径显微物镜获得2倍荧光收集效率增强,在低数值孔径显微物镜获得20倍荧光收集效率增强(C.J.Engelbrecht,et.al,Optics Express,vol.17,no.8,pp.6421-6435,2009和J.D.McMullen,et.al,Journal of Microscopy,vol.241,no.2,pp.119–124,2011)。2016年一种兼容商用双光子荧光显微镜的采用四分之一椭球反射镜的全发射检测技术被提出,在高数值孔径显微物镜获得了2.75倍荧光收集效率增强(Y.Xu,et.al,IEEE PhotonicsJournal,Vol.8,Issue 5,6901109,2016)。In recent years, many techniques have emerged to collect fluorescent photons that cannot be collected by microscope objectives, and in 2006, a refracting microscope objective was proposed (D.
Figure BDA0002156332240000011
et.al, Optics Letters, vol. 31, no. 16, pp. 2447-2449, 2006). In 2007, the emission detection technology using a parabolic mirror and a cylindrical mirror was proposed in 2011. The simulation obtained 10 times the fluorescence collection efficiency enhancement, and the experiment obtained 8.9 times the fluorescence collection efficiency enhancement (CACombs, et.al, Journal fMicroscopy, vol. 228, no. 3, pp. 330-337, 2007 and V. Crosignani, et. al, Journal of Biophotonics, vol. 4, no. 9, pp. 592-599, 2011). Afterwards, the above techniques were respectively improved and used for epifluorescence detection (CACombs, et.al, Journal of Microscopy, vol.241, no.2, pp.153-161, 2011 and V.Crosignani, et.al, Journal of Biomedical Optics, vol. 17, no. 11, pp. 116023, 2012). A compact all-emission detection device that can be used in upright two-photon microscopy was recently reported (CACombs, et. al, Journal of Microscopy, vol. 253, no. 2, pp. 83-92, 2014). In addition, by arranging 5-8 high numerical aperture optical fibers around the microscope objective to collect the fluorescence that cannot be collected by the microscope objective, the fluorescence collection efficiency can be enhanced by 2 times in the high numerical aperture microscope objective, and in the low numerical aperture microscope The objective lens obtains a 20-fold increase in fluorescence collection efficiency (CJEngelbrecht, et.al, Optics Express, vol.17, no.8, pp.6421-6435, 2009 and JDMcMullen, et.al, Journal of Microscopy, vol.241, no. 2, pp. 119–124, 2011). In 2016, a full-emission detection technique using a quarter ellipsoid mirror compatible with commercial two-photon fluorescence microscopes was proposed, which achieved a 2.75-fold fluorescence collection efficiency enhancement in a high numerical aperture microscope objective (Y.Xu, et. al, IEEE Photonics Journal, Vol. 8, Issue 5, 6901109, 2016).

以上用于增强荧光收集效率的技术均采用额外光学元件收集显微物镜无法收集到的荧光光子。由于荧光光子的散射角度离散性很大,进入额外收集光路后荧光光子多次反射路径复杂,损耗大,导致额外光学元件的实际收集效率受限。此外额外光学元件的形状复杂,加工难度很高,成本也较高。上述用于增强荧光收集效率的技术很多体积过大,都会遮挡成像区域,对同时进行的电生理实验操作造成阻碍。The above techniques for enhancing fluorescence collection efficiency all use additional optics to collect fluorescence photons that cannot be collected by microscope objectives. Due to the large dispersion of the scattering angle of fluorescent photons, the multiple reflection paths of fluorescent photons after entering the additional collection optical path are complex, and the loss is large, which limits the actual collection efficiency of the additional optical elements. In addition, the additional optical elements have complex shapes, which are difficult and expensive to process. Many of the above techniques for enhancing fluorescence collection efficiency are too bulky, which will block the imaging area and hinder simultaneous electrophysiological experiments.

另外,在小鼠实验中,常会使用显微镜对实验小鼠的活动、小鼠的生物组织的某些指标进行检测,但是根据上述所述可知,由于现目前的荧光收集的相关设备、元件的体积均比较大,故无法佩戴在小鼠的头部,无法对小鼠的活动和生物组织等某些指标进行实时检测,操作很是不便。In addition, in mouse experiments, microscopes are often used to detect the activities of experimental mice and some indicators of biological tissues of mice. However, according to the above, it can be seen that due to the current fluorescence collection related equipment and the volume of components Both are relatively large, so they cannot be worn on the head of the mouse, and cannot perform real-time detection of some indicators such as the activity and biological tissue of the mouse, which is very inconvenient to operate.

实用新型内容Utility model content

本实用新型的目的在于提供一种三维头戴式显微镜,以对荧光收集的相关元件进行简化,使荧光收集的相关元件的体积更小的同时,并能够进行相关的实验操作和检测。The purpose of the present invention is to provide a three-dimensional head-mounted microscope, which can simplify the relevant components of fluorescence collection, make the volume of the relevant components of fluorescence collection smaller, and can perform relevant experimental operations and detections.

为达到上述目的,本实用新型的技术方案是:一种三维头戴式显微镜,包括透镜组件、物镜、扫描器组件,物镜上设有光电检测器,光电检测器包括保护元件、滤光片、光电敏感单元、驱动电路。In order to achieve the above purpose, the technical scheme of the present utility model is: a three-dimensional head-mounted microscope, comprising a lens assembly, an objective lens, and a scanner assembly, the objective lens is provided with a photodetector, and the photodetector includes a protection element, a filter, Photosensitive unit, drive circuit.

本方案的工作原理和效果为:本方案中的扫描器组件用于将激光和非线性光学信号分开以及输出所述非线性光学信号,还用于改变激光的入射角角度让激光对活体样本内部组织的平面进行二维线扫描,同时还可进行远端Z轴扫描,实现三维成像,凡是能够实现三维扫描功能的扫描器,均可称之为扫描器组件,扫描器组件可根据不同的需求具体设置不同数量和类型的扫描器。物镜用于将来自扫描器组件的激光会聚到活体样本内部,以激发活体样本产生非线性光学信号以及用于输出非线性光学信号。透镜组件具有对光纤输出的激光进行准直、对不同频率的激光的色差减少、对激光进行聚焦等功能,根据每个显微镜的功能的不同和不同显微镜的具体差异,透镜组件可包括不同数量和类型的透镜。光电检测器用于收集物镜无法收集到的荧光光子。保护元件用于隔离外部实验样品,用于液浸的液体和光电检测器的滤光片,还用于电气隔离,防止光电检测器的光电敏感单元的高电压对样品和操作人员造成危险。光电检测器的滤光片用于滤出背向反射和背向散射的激发光。光电检测器的光电敏感单元用于将穿过滤光片的荧光光子转化为电信号,光电检测器的驱动电路用于对光电检测器的光电敏感单元提供高电压和驱动信号,并与外部放大电路和计算机相连。The working principle and effect of this solution are as follows: the scanner component in this solution is used to separate laser and nonlinear optical signals and output the nonlinear optical signal, and is also used to change the incident angle of the laser so that the laser can touch the interior of the living sample. Two-dimensional line scanning is performed on the plane of the tissue, and at the same time, the Z-axis scanning at the distal end can be performed to realize three-dimensional imaging. Any scanner that can realize the three-dimensional scanning function can be called a scanner assembly, and the scanner assembly can be based on different needs. Specific settings for different numbers and types of scanners. The objective lens is used to focus the laser light from the scanner assembly inside the living sample to excite the living sample to generate nonlinear optical signals and to output nonlinear optical signals. The lens assembly has the functions of collimating the laser output from the fiber, reducing the chromatic aberration of the laser with different frequencies, and focusing the laser. type of lens. Photodetectors are used to collect fluorescent photons that cannot be collected by the objective. The protection element is used to isolate the external experimental sample, the liquid used for immersion and the filter of the photodetector, and also used for electrical isolation to prevent the high voltage of the photosensitive unit of the photodetector from causing danger to the sample and the operator. The photodetector filter is used to filter out backreflected and backscattered excitation light. The photosensitive unit of the photodetector is used to convert the fluorescent photons passing through the filter into electrical signals, and the driving circuit of the photodetector is used to provide high voltage and driving signal to the photosensitive unit of the photodetector, and is used for external amplification. The circuit is connected to the computer.

本方案与现有技术相比,以常用的数值孔径为0.8,放大倍率为40X的液浸物镜为例说明,该液浸物镜的荧光发射半角为arcsin(0.8/1.33)=30度,可以计算出,本实用新型在同款显微物镜的前孔径周围布置宽度为1mm的环形光电检测器可以收集到荧光发射半角为30度至60度之间的荧光光子,相当于具有激发数值孔径为0.8,而收集数值孔径为1.0,因此大大提高了荧光收集效率,提高了成像的信噪比,提高了在高散射介质中的成像深度。Compared with the prior art, this solution is illustrated by taking a commonly used liquid immersion objective lens with a numerical aperture of 0.8 and a magnification of 40X as an example. It can be seen that the utility model arranges a ring photodetector with a width of 1 mm around the front aperture of the same microscope objective lens, which can collect fluorescent photons with a fluorescence emission half angle between 30 degrees and 60 degrees, which is equivalent to having an excitation numerical aperture of 0.8 , while the collection numerical aperture is 1.0, so the fluorescence collection efficiency is greatly improved, the signal-to-noise ratio of imaging is improved, and the imaging depth in high scattering media is improved.

并且,本方案中将光电检测器安装在物镜的周围即可实现了荧光的收集,相比现有的荧光收集设备、元件,体积大大减小,便于放置在动物的头部,对动物的活动和生物组织等某些指标进行实时检测,操作简单方便,且相比体积较大的荧光收集的设备和元件,成本大大降低。In addition, in this scheme, the photodetector is installed around the objective lens to realize the collection of fluorescence. Compared with the existing fluorescence collection equipment and components, the volume is greatly reduced, which is convenient to be placed on the head of the animal and has no effect on the activity of the animal. The real-time detection of certain indicators such as biological tissue is simple and convenient to operate, and the cost is greatly reduced compared to the larger-volume fluorescence collection equipment and components.

进一步,透镜组件包括准直透镜、柱状透镜、聚焦透镜、收集透镜的一种或者以上多种透镜的组合;准直透镜,用于准直来自激光输入光纤输出的激光以及减少不同频率激光之间的色差并输出激光信号;柱状透镜,用于形成线状焦点;聚焦透镜,用于激光聚焦;收集透镜,用于收集非线性光学信号并输入激光输出光纤。在实际生产、制作过程中,可根据使用的需求,根据每个显微镜的功能的不同和不同显微镜的具体差异,透镜组件可包括上述不同数量和类型的透镜。Further, the lens assembly includes a combination of one or more lenses including a collimating lens, a cylindrical lens, a focusing lens, and a collecting lens; the collimating lens is used for collimating the laser light output from the laser input fiber and reducing the difference between the laser light of different frequencies. chromatic aberration and output laser signal; cylindrical lens, used to form a linear focus; focusing lens, used for laser focusing; collection lens, used to collect nonlinear optical signals and input the laser output fiber. In the actual production and manufacturing process, according to the needs of use, according to the different functions of each microscope and the specific differences of different microscopes, the lens assembly can include the above-mentioned different numbers and types of lenses.

进一步,还包括波片,波片用于改变激光的偏振方向。Further, a wave plate is also included, and the wave plate is used to change the polarization direction of the laser light.

进一步,光电敏感单元为雪崩二极管、光电耦合器件、金属半导体氧化物器件、焦平面阵器件、光电倍增管器件、单光子计数器件中的一种或包含以上多种器件的混合器件。上述器件均为常见的光电敏感单元,便于购买和配置,成本较低。Further, the photosensitive unit is one of an avalanche diode, a photocoupler device, a metal semiconductor oxide device, a focal plane array device, a photomultiplier tube device, a single photon counting device, or a hybrid device including a plurality of the above devices. The above devices are all common photoelectric sensitive units, which are easy to purchase and configure, and have low cost.

进一步,扫描器组件包括二向色镜扫描器和垂直二向色镜扫描器。二向色镜扫描器,用于将激光和非线性光学信号分开以及输出所述非线性光学信号,还用于改变激光的入射角角度让激光对活体样本内部组织的平面进行二维线扫描。垂直二向色镜扫描器,用于进行远端Z轴扫描,实现三维成像。本方案在针对活动动物脑成像方面,本方案未设置扫描透镜(Scan lens)和镜筒透镜(Tube lens),通过将采用二向色镜扫描器,垂直二向色镜扫描器和透镜组件替代现有技术中二向色镜和微机电扫描仪,以达到在满足成像质量的前提下,大大提高成像速度,优化内部结构,减小自身重量的目的。在微型光学探头的重量减少的前提下,在进行活体样本的数据采集时,尤其是在进行活动动物脑成像方面,更方便佩戴在动物的头上,减小重量对动物活动的影响,进一步减少了检测误差。Further, the scanner assembly includes a dichroic mirror scanner and a vertical dichroic mirror scanner. The dichroic mirror scanner is used for separating the laser light from the nonlinear optical signal and outputting the nonlinear optical signal, and also for changing the incident angle of the laser light to allow the laser light to perform two-dimensional line scanning on the plane of the internal tissue of the living sample. Vertical dichroic mirror scanner for remote Z-axis scanning for 3D imaging. In the aspect of brain imaging of active animals, this solution does not provide a scan lens (Scan lens) and a tube lens (Tube lens), instead of using a dichroic mirror scanner, a vertical dichroic mirror scanner and a lens assembly The dichroic mirror and the micro-electromechanical scanner in the prior art can greatly improve the imaging speed, optimize the internal structure, and reduce the weight under the premise of satisfying the imaging quality. On the premise of reducing the weight of the miniature optical probe, it is more convenient to wear it on the animal's head when collecting data from living samples, especially in the area of brain imaging of active animals, reducing the impact of weight on animal activities and further reducing detection error.

进一步,二向色镜扫描器包括二向色镜片和可驱使二向色镜片改变角度的驱动器,二向色镜片覆盖于驱动器上。驱动器用于驱动二向色镜片转动,实现扫描。Further, the dichroic mirror scanner includes a dichroic mirror and a driver capable of driving the dichroic mirror to change the angle, and the dichroic mirror covers the driver. The driver is used to drive the dichroic lens to rotate to realize scanning.

现有的微机电扫描仪(MEMS)包括反射镜片和微机电驱动器,反射镜片覆盖于微机电驱动器上,其中,反射镜片有若干个,微机电驱动器可分别驱使反射镜片改变角度。在本方案中,用二向色镜片替换了反射镜片,且在本方案中驱动器不会影响到非线性光学信号的透射。另外,二向色镜片即起到了现有技术中的二向色镜的作用,也达到了让驱动器改变激光反射角度的效果,而且还能够达到减少元件数量,使得整个显微镜的体积更小、重量更轻。通过上述组装的方式,能够实现低成本获取到二向色镜扫描器。The existing MEMS scanner includes a reflective sheet and a MEMS driver. The reflective sheet is covered on the MEMS driver, wherein there are several reflective sheets, and the MEMS driver can respectively drive the reflective sheet to change the angle. In this solution, the reflective mirror is replaced with a dichroic mirror, and the driver does not affect the transmission of nonlinear optical signals in this solution. In addition, the dichroic lens not only plays the role of the dichroic mirror in the prior art, but also achieves the effect of allowing the driver to change the laser reflection angle, and can also reduce the number of components, making the entire microscope smaller in size and weight. lighter. Through the above assembly method, the dichroic mirror scanner can be obtained at low cost.

进一步,二向色镜扫描器的晶圆的背面设有用于非线性光学信号透射过的透射孔。由此,能够快速的获得较为成熟的产品。Further, the backside of the wafer of the dichroic mirror scanner is provided with a transmission hole through which the nonlinear optical signal is transmitted. As a result, more mature products can be obtained quickly.

进一步,光电敏感单元为光电耦合器件、金属半导体氧化物器件、焦平面阵器件、光电倍增管器件、单光子计数器件中的一种或包含以上多种器件的混合器件时,光电检测器的保护元件与的光电敏感单元相对的表面为微透镜阵列。由此,通过本方案实现了将荧光聚焦到光电敏感单元的每个像素上,提高了感光效率。Further, when the photosensitive unit is one of a photocoupler device, a metal semiconductor oxide device, a focal plane array device, a photomultiplier tube device, a single photon counting device, or a hybrid device including the above devices, the protection of the photodetector The surface opposite to the photosensitive unit of the element is a microlens array. Therefore, through this solution, the fluorescence is focused on each pixel of the photosensitive unit, and the photosensitive efficiency is improved.

进一步,还包括反射镜,反射镜包括透射面和反射面。反射将用于调整激光的照射的方向、入射角度等。通过透射面和反射面的设计能够达到较好的反射和透射的效果。Further, it also includes a reflection mirror, and the reflection mirror includes a transmission surface and a reflection surface. The reflection will be used to adjust the direction of irradiation of the laser light, the angle of incidence, and the like. Through the design of the transmission surface and the reflection surface, better reflection and transmission effects can be achieved.

进一步,保护元件的表面设有防反射光学镀膜。由此,提高了荧光光子的透射率。Further, the surface of the protection element is provided with an anti-reflection optical coating. Thereby, the transmittance of fluorescent photons is improved.

附图说明Description of drawings

图1为实施例1中一种三维头戴式显微镜的正向剖视图(同时公开了激光路线图);Fig. 1 is a front sectional view of a three-dimensional head-mounted microscope in Example 1 (a laser roadmap is disclosed at the same time);

图2为图1中显微镜的物镜的放大示意图;Fig. 2 is the enlarged schematic diagram of the objective lens of the microscope in Fig. 1;

图3为光电检测器的结构示意图;3 is a schematic structural diagram of a photodetector;

图4为实施例1中三维线扫描示意图;4 is a schematic diagram of a three-dimensional line scan in Example 1;

图5为二向色镜扫描器的结构示意图;5 is a schematic structural diagram of a dichroic mirror scanner;

图6为采用蚀刻的方式生产二向色镜扫描器的正剖图;Fig. 6 is the front sectional view that adopts the mode of etching to produce dichroic mirror scanner;

图7为本三维头戴式显微镜戴在小鼠头部时的示意图。FIG. 7 is a schematic diagram of the three-dimensional head-mounted microscope being worn on the head of a mouse.

具体实施方式Detailed ways

下面通过具体实施方式进一步详细说明:The following is further described in detail by specific embodiments:

说明书附图中的附图标记包括:准直透镜10、柱状透镜12、反射镜20、二向色镜扫描器30、物镜40、聚焦透镜50、波片60、垂直二向色镜扫描器70、收集透镜80、激光输入光纤90、激光输出光纤91、外壳100、基片11、驱动器22、二向色镜33、光电检测器2、保护元件2.1、滤光片2.2、光电敏感单元2.3、驱动电路2.4。Reference numerals in the drawings include: collimating lens 10 , cylindrical lens 12 , mirror 20 , dichroic mirror scanner 30 , objective lens 40 , focusing lens 50 , wave plate 60 , vertical dichroic mirror scanner 70 , collection lens 80, laser input fiber 90, laser output fiber 91, housing 100, substrate 11, driver 22, dichroic mirror 33, photodetector 2, protection element 2.1, filter 2.2, photosensitive unit 2.3, Driver circuit 2.4.

实施例1Example 1

基本如附图1所示:一种三维头戴式显微镜,包括方形的外壳100,外壳100为高分子聚合物的材料的密封结构,外壳100中安装有准直透镜10、柱状透镜12、反射镜20、二向色镜扫描器30、物镜40、聚焦透镜50,波片60、垂直二向色镜扫描器70以及收集透镜80,具体的,对于安装方式可通过键合、卡接、粘接或者焊接的方式。结合图5和图6所示,本实施例中的二向色镜扫描器30包括二向色镜33片和不影响非线性光学信号透射的微机电驱动器22,二向色镜33片覆盖于微机电驱动器22上,微机电驱动器22可驱使二向色镜33片改变角度。本实施例中物镜40为非球面透镜,结合图2所示,本方案中的物镜40的底部通过键合的方式固定有光电检测器2,当然也可通过其他的方式进行固定,如粘接、焊接和卡接等。结合图3所示,本实施例中的光电检测器2包括保护元件2.1,滤光片2.2,光电敏感单元2.3和驱动电路2.4,滤光片2.2位于最下方,光电敏感单元2.3位于滤光片2.2的上方,驱动电路2.4位于光电敏感单元2.3的上方。本实施例中光电检测器2的保护元件2.1的材质为可透射可见光波长的绝缘材料,光电检测器2的滤光片2.2的材质为可透射可见光波长的绝缘材料,介电强度大于5MV/mm。光电检测器2的滤光片2.2用于滤出长波长的激发光,透过短波长的荧光光子。本实施例中显微物镜40与光电检测器2的保护元件2.1的相贴,光电检测器2的保护元件2.1和光电检测器2的滤光片2.2的相贴,光电检测器2的滤光片2.2和光电检测器2的光电敏感单元2.3相贴,光电检测器的光电敏感单元2.3的输出端和光电检测器2的驱动电路2.4的输入端电连接,光电检测器2的驱动电路2.4的输出端和外部放大电路和计算机电连接。本实施例中物镜40用于收集孔径之内的荧光光子,而光电检测器2位于显微物镜40距离样品较近的一端,且呈环状位于显微物镜40的前孔径周围,光电检测器1的保护元件2.1用于隔离样品,用于液浸的液体和光电检测器2的滤光片2.2,光电检测器2的保护元件2.1还用于电气隔离,防止光电检测器2的光电敏感单元2.3的高电压对样品和操作人员造成危险,光电检测器2的保护元件2.1的表面还镀有防反射光学镀膜,用于提高荧光光子的透射率,光电检测器2的滤光片2.2用于滤出背向反射和背向散射的激发光,光电检测器2的光电敏感单元2.3用于将穿过滤光片2.2的荧光光子转化为电信号,光电检测器2的驱动电路2.4用于对光电检测器2的光电敏感单元2.3提供高电压和驱动信号,并与外部放大电路和计算机相连,光电检测器2用于收集显微物镜收集不到的荧光光子。本实施例中的保护元件2.1,滤光片2.2,光电敏感单元2.3和驱动电路2.4可通过键合的方式固定在一起,当然也可通过其他的方式进行固定,如卡接等。Basically as shown in FIG. 1: a three-dimensional head-mounted microscope, comprising a square housing 100, the housing 100 is a sealing structure made of high molecular polymer material, and the housing 100 is installed with a collimating lens 10, a cylindrical lens 12, a reflection Mirror 20, dichroic mirror scanner 30, objective lens 40, focusing lens 50, wave plate 60, vertical dichroic mirror scanner 70 and collecting lens 80. connection or welding. 5 and 6, the dichroic mirror scanner 30 in this embodiment includes 33 dichroic mirrors and a MEMS driver 22 that does not affect the transmission of nonlinear optical signals. The 33 dichroic mirrors cover the On the MEMS driver 22, the MEMS driver 22 can drive the dichroic mirror 33 to change the angle. In this embodiment, the objective lens 40 is an aspherical lens. As shown in FIG. 2 , the bottom of the objective lens 40 in this solution is fixed with the photodetector 2 by bonding. Of course, it can also be fixed by other methods, such as gluing , welding and snap connection, etc. 3, the photodetector 2 in this embodiment includes a protection element 2.1, a filter 2.2, a photosensitive unit 2.3 and a driving circuit 2.4, the filter 2.2 is located at the bottom, and the photosensitive unit 2.3 is located at the filter Above 2.2, the driving circuit 2.4 is located above the photosensitive unit 2.3. In this embodiment, the material of the protection element 2.1 of the photodetector 2 is an insulating material that can transmit visible light wavelengths, and the material of the optical filter 2.2 of the photodetector 2 is an insulating material that can transmit visible light wavelengths, and the dielectric strength is greater than 5MV/mm . The filter 2.2 of the photodetector 2 is used to filter out long-wavelength excitation light and transmit short-wavelength fluorescent photons. In this embodiment, the microscope objective lens 40 is attached to the protection element 2.1 of the photodetector 2, the protection element 2.1 of the photodetector 2 is attached to the filter 2.2 of the photodetector 2, and the filter of the photodetector 2 is attached. The chip 2.2 is attached to the photosensitive unit 2.3 of the photodetector 2. The output end of the photosensitive unit 2.3 of the photodetector is electrically connected to the input end of the drive circuit 2.4 of the photodetector 2. The drive circuit 2.4 of the photodetector 2 is electrically connected. The output end is electrically connected with the external amplifying circuit and the computer. In this embodiment, the objective lens 40 is used to collect fluorescent photons within the aperture, and the photodetector 2 is located at the end of the microscope objective lens 40 that is closer to the sample, and is annularly located around the front aperture of the microscope objective lens 40. Protection element 2.1 of 1 is used to isolate the sample, liquid for immersion and filter 2.2 of photodetector 2, protection element 2.1 of photodetector 2 is also used for electrical isolation, preventing the photosensitive unit of photodetector 2 The high voltage of 2.3 is dangerous to the sample and the operator. The surface of the protective element 2.1 of the photodetector 2 is also coated with an anti-reflection optical coating to improve the transmittance of fluorescent photons. The filter 2.2 of the photodetector 2 is used for The back-reflection and back-scattered excitation light is filtered out, the photosensitive unit 2.3 of the photodetector 2 is used to convert the fluorescent photons passing through the filter 2.2 into electrical signals, and the drive circuit 2.4 of the photodetector 2 is used to The photosensitive unit 2.3 of the photodetector 2 provides high voltage and driving signal, and is connected with an external amplifying circuit and a computer. The photodetector 2 is used to collect fluorescent photons that cannot be collected by the microscope objective lens. In this embodiment, the protection element 2.1, the optical filter 2.2, the photosensitive unit 2.3 and the driving circuit 2.4 can be fixed together by bonding, of course, they can also be fixed by other means, such as snap connection.

本实施例中光电检测器2的光电敏感单元2.3由单一的大面积雪崩二极管(LargeArea Avalanche Photo Diode,LAAPD)经过机械钻孔或腐蚀加工或采用透明材料而成,中央的孔或透明材料用于透过显微物镜40的激发光,大面积光电倍增管的其余环形部分用于接收显微物镜40接收不到的荧光光子。由于雪崩二极管需要工作在反向偏置模式下,阴极面对液浸液体和生物样品,驱动电压高达数百至2000伏特,因此光电检测器2的保护元件2.1可由透光的绝缘材料构成,如光学玻璃等,保护元件2.1数百微米级厚度足够承受雪崩二极管的高驱动电压,避免对样品,显微镜和操作人员造成伤害。另外,本实施例中的光电敏感单元2.3为光电耦合器件、金属半导体氧化物器件、焦平面阵器件、光电倍增管器件、单光子计数器件中的一种或基于任何以上多种光电转换原理的混合器件时,光电检测器2的保护元件2.1与光电敏感单元2.3相对的表面为微透镜阵列,用于将荧光聚焦到光电敏感单元2.3的每个像素,提高感光效率。In this embodiment, the photosensitive unit 2.3 of the photodetector 2 is made of a single Large Area Avalanche Photo Diode (LAAPD) through mechanical drilling or corrosion processing or is made of transparent materials, and the central hole or transparent material is used for The remaining annular portion of the large-area photomultiplier tube is used to receive fluorescence photons that are not received by the microscope objective 40 through the excitation light transmitted through the microscope objective 40 . Since the avalanche diode needs to work in reverse bias mode, the cathode faces the liquid immersion liquid and biological samples, and the driving voltage is as high as several hundreds to 2000 volts, so the protection element 2.1 of the photodetector 2 can be made of light-transmitting insulating materials, such as Optical glass, etc., the thickness of the protective element 2.1 hundreds of microns is enough to withstand the high driving voltage of avalanche diodes to avoid damage to samples, microscopes and operators. In addition, the photosensitive unit 2.3 in this embodiment is one of a photocoupling device, a metal semiconductor oxide device, a focal plane array device, a photomultiplier tube device, a single photon counting device, or one based on any of the above multiple photoelectric conversion principles. When mixing devices, the surface of the protection element 2.1 of the photodetector 2 opposite to the photosensitive unit 2.3 is a microlens array, which is used to focus the fluorescence to each pixel of the photosensitive unit 2.3 to improve the photosensitive efficiency.

结合图1所示,本实施例中的准直透镜10用于准直来自激光输入光纤90输出的激光以及减少不同频率激光之间的色差并输出激光信号至反射镜20。本实施例中的外壳100上设有使激光输入光纤90穿过的孔,激光输入光纤90卡接在孔上。另外,本实施例中的反射镜20的数量为三个,反射镜20上设有反射面,其中第一个反射镜20位于准直透镜10的下方,且反射面朝向右侧,第二个反射镜20位于第一个反射镜20的右侧,第二个反射镜20的反射面朝向左侧与第一个反射镜20的反射面相对,第三个反射镜20位于第二个反射镜20的下方,且第三个反射镜20的反射面也朝向左侧。本实施例中的非球面透镜的物镜40位于外壳100的底部上,外壳100的底部上设有用于安装物镜40的孔,物镜40的曲率半径随着中心轴而变化,用以改进光学品质,减少光学元件,降低设计成本。Referring to FIG. 1 , the collimating lens 10 in this embodiment is used to collimate the laser light output from the laser input fiber 90 , reduce the chromatic aberration between laser light of different frequencies, and output the laser signal to the mirror 20 . The housing 100 in this embodiment is provided with a hole through which the laser input optical fiber 90 passes, and the laser input optical fiber 90 is clamped on the hole. In addition, the number of the reflectors 20 in this embodiment is three, and the reflector 20 is provided with a reflecting surface, wherein the first reflector 20 is located below the collimating lens 10, and the reflecting surface faces the right side, and the second reflector 20 is located below the collimating lens 10. The reflecting mirror 20 is located on the right side of the first reflecting mirror 20, the reflecting surface of the second reflecting mirror 20 is opposite to the reflecting surface of the first reflecting mirror 20 towards the left, and the third reflecting mirror 20 is located at the second reflecting mirror 20, and the reflective surface of the third mirror 20 also faces to the left. The objective lens 40 of the aspherical lens in this embodiment is located on the bottom of the housing 100, and the bottom of the housing 100 is provided with a hole for installing the objective lens 40, and the curvature radius of the objective lens 40 changes with the central axis to improve the optical quality, Reduce optical components and reduce design costs.

本实施例中的柱状透镜12位于第三个反射镜20的左侧,柱状透镜12位于物镜40的右上方,二向色镜扫描器30位于物镜40的上方,且位于柱状透镜12的左侧,柱状透镜12用于将准直后的激光在二向色镜扫描器30表面的某一方向(此处称为X方向)上聚焦成线状焦点,即柱状透镜12的某一方向(X方向)的焦点位置在二向色镜表面,并且柱状透镜12的与某一方向(X方向)正交的另一方向(此处称为Y方向)的焦点位置不在二向色镜表面。In this embodiment, the lenticular lens 12 is located on the left side of the third reflecting mirror 20 , the lenticular lens 12 is located on the upper right of the objective lens 40 , and the dichroic mirror scanner 30 is located above the objective lens 40 and on the left side of the lenticular lens 12 , the cylindrical lens 12 is used to focus the collimated laser light into a linear focus in a certain direction (herein referred to as the X direction) on the surface of the dichroic mirror scanner 30, that is, a certain direction (X direction) of the cylindrical lens 12 The focal position of the dichroic mirror surface, and the focal position of the other direction (here referred to as the Y direction) orthogonal to a certain direction (X direction) of the lenticular lens 12 is not on the dichroic mirror surface.

本实施例中的反射镜20用于激光的照射角度并使激光通过柱状透镜12反射至二向色镜扫描器30上。另外,反射镜20可以为多片,用于平移光路,材料为光学玻璃或高分子聚合物,反射镜20上也可设有透射面和反射面,透射面有增强透射率的光学镀膜,反射面有增强反射率的光学镀膜,从而提高激光的反射和透射的效果。The mirror 20 in the present embodiment is used for the irradiation angle of the laser light and reflects the laser light onto the dichroic mirror scanner 30 through the cylindrical lens 12 . In addition, the reflector 20 can be multiple pieces for translating the optical path, and the material is optical glass or high molecular polymer. The reflector 20 can also be provided with a transmission surface and a reflection surface. The surface has an optical coating that enhances the reflectivity, thereby improving the effect of laser reflection and transmission.

本实施例中的聚焦透镜50位于二向色镜扫描器30的上方,二向色镜扫描器30用于将激光和非线性光学信号分开以及输出所述非线性光学信号,还用于改变激光的入射角角度,二向色镜扫描器30反射s型线偏振激光,然后聚焦透镜50将s型线偏振激光在X方向上准直并在与X方向垂直的另一方向(Y方向)上聚焦成线状,s型线偏振激光继续穿过位于聚焦透镜上方的波片60,s型线偏振的偏振方向旋转45度,然后激光在Y方向被聚焦在位于波片60上方的垂直二向色镜扫描器70的表面,垂直二向色镜扫描器70反射激光,反射后并发散的激光再次穿过波片60,激光的偏振方向再次同方向旋转45度,变成p型线偏振光,再次经过聚焦透镜50变成X方向聚焦而Y方向准直的光束投射在二向色镜扫描器30表面,二向色镜扫描器30透射同波长p型线偏振激光,二向色镜扫描器30位于物镜40的后焦平面,二向色镜扫描器30中的可动镜片沿与X轴平行的旋转轴进行旋转,最后p型线偏振光经过物镜40形成了位于样品内的X方向准直而Y方向聚焦的线状焦点,线状焦点沿X方向进行扫描,从而形成二维扫描轨迹,实现让激光对活体样本内部组织的平面进行二维线扫描,当二向色镜扫描器30完成一帧二维线扫描图像时,垂直二向色镜扫描器70上的可动二向色镜沿光轴(Z方向)移动一个距离,通过远端扫描(Remote Scanning)的原理,使活体样本内部组织的二维线扫描平面同样沿光轴移动一个距离,通过垂直二向色镜扫描器70上在Z方向上的扫描实现了三维线扫描,样品内被激发出非线性信号被物镜40收集,经过透射非线性信号波长的二向色镜扫描器30,聚焦透镜50,波片60,呈Y方向线状聚焦在垂直二向色镜扫描器70表面,垂直二向色镜扫描器70透射非线性信号波长,然后由位于垂直二向色镜扫描器70上方的收集透镜80将非线性信号呈X方向线状聚焦在位于收集透镜80上的激光输出光纤91表面,并最终传输至外部光电检测设备,其中,激光输入光纤90为大模场单模光纤或保偏光纤或光子晶体光纤,激光输出光纤91为光纤束,三维线扫描示意图详见图4;本实施例中的外壳100的顶部设有使激光输入光纤90的孔,激光输入光纤90卡接在孔上。In this embodiment, the focusing lens 50 is located above the dichroic mirror scanner 30, and the dichroic mirror scanner 30 is used for separating the laser light from the nonlinear optical signal and outputting the nonlinear optical signal, and also for changing the laser light The dichroic mirror scanner 30 reflects the s-type linearly polarized laser light, and then the focusing lens 50 collimates the s-type linearly polarized laser light in the X direction and in another direction (Y direction) perpendicular to the X direction Focused into a linear shape, the s-type linearly polarized laser continues to pass through the wave plate 60 located above the focusing lens, the polarization direction of the s-type linear polarization is rotated by 45 degrees, and then the laser is focused in the Y direction on the vertical di-directional above the wave plate 60 On the surface of the chromatic mirror scanner 70, the vertical dichroic mirror scanner 70 reflects the laser light, the reflected and scattered laser light passes through the wave plate 60 again, and the polarization direction of the laser light is rotated 45 degrees in the same direction again, becoming p-type linearly polarized light , again through the focusing lens 50, the beam focused in the X direction and collimated in the Y direction is projected on the surface of the dichroic mirror scanner 30. The dichroic mirror scanner 30 transmits the p-type linearly polarized laser with the same wavelength, and the dichroic mirror scans The detector 30 is located at the back focal plane of the objective lens 40, the movable mirror in the dichroic mirror scanner 30 rotates along the rotation axis parallel to the X axis, and finally the p-type linearly polarized light passes through the objective lens 40 to form the X direction in the sample The linear focus is collimated and focused in the Y direction, and the linear focus is scanned along the X direction, thereby forming a two-dimensional scanning trajectory, enabling the laser to perform two-dimensional line scanning on the plane of the internal tissue of the living sample. When the dichroic mirror scanner 30 When a frame of two-dimensional line scan image is completed, the movable dichroic mirror on the vertical dichroic mirror scanner 70 moves a distance along the optical axis (Z direction). The two-dimensional line scanning plane of the internal tissue of the living sample also moves a distance along the optical axis, and the three-dimensional line scanning is realized by scanning in the Z direction on the vertical dichroic mirror scanner 70, and the nonlinear signal excited in the sample is captured by the objective lens 40 collects, passes through the dichroic mirror scanner 30 that transmits the wavelength of the nonlinear signal, the focusing lens 50, the wave plate 60, and is linearly focused on the surface of the vertical dichroic mirror scanner 70 in the Y direction, and the vertical dichroic mirror scanner 70 70 transmits the wavelength of the nonlinear signal, and then the collection lens 80 located above the vertical dichroic mirror scanner 70 linearly focuses the nonlinear signal on the surface of the laser output fiber 91 located on the collection lens 80 in the X direction, and finally transmits it to External photoelectric detection equipment, wherein, the laser input fiber 90 is a large-mode field single-mode fiber or a polarization-maintaining fiber or a photonic crystal fiber, and the laser output fiber 91 is a fiber bundle, and the schematic diagram of the three-dimensional line scan is shown in Figure 4; The top of 100 is provided with a hole for the laser input fiber 90, and the laser input fiber 90 is clamped on the hole.

此外,由于本实用新型所采用的线扫描方式形成的线状焦点,物镜40所收集的荧光也是线状,并且随着二向色镜扫描器30的转动而在激光输出光纤91的端面平行移动,因此移动的线状荧光的检测是由具有可同步的滚动曝光快门技术的科学互补金属氧化物半导体(sCMOS)相机完成的,线状荧光的位置与sCMOS相机的滚动快门当前读出的某行光电检测单元严格同步,从而实现高速成像。In addition, due to the linear focus formed by the line scanning method adopted by the present invention, the fluorescence collected by the objective lens 40 is also linear, and moves parallel to the end face of the laser output fiber 91 with the rotation of the dichroic mirror scanner 30 , so the detection of the moving linear fluorescence is done by a scientific complementary metal oxide semiconductor (sCMOS) camera with a synchronizable rolling shutter technology, the position of the linear fluorescence corresponds to a certain line currently read out by the rolling shutter of the sCMOS camera The photoelectric detection units are strictly synchronized, enabling high-speed imaging.

具体使用时:本实施例的准直透镜10使用的是消色差准直透镜10(#65-286,Edmund Optics Inc.,Barrington,NJ,USA;直径:2mm,等效焦距:3mm,专用近红外光),能够准直输出激光器并减少飞秒激光器的不同频率分量之间的色差,这样有利于提高传输效率(从激光源到样本高达50%),光束聚焦和激发效率。当然也可以为消色差设计,设计波长为700nm至1600nm之间的任意2个波长,可以为817nm和1064nm,但不限于这两个波长,材料为光学玻璃或高分子聚合物,表面有增强透射率的光学镀膜,用于激光的准直。Specific use: the collimating lens 10 in this embodiment uses an achromatic collimating lens 10 (#65-286, Edmund Optics Inc., Barrington, NJ, USA; diameter: 2mm, equivalent focal length: 3mm, special near- Infrared light), can collimate the output laser and reduce the chromatic aberration between different frequency components of the femtosecond laser, which is beneficial to improve the transmission efficiency (up to 50% from the laser source to the sample), beam focusing and excitation efficiency. Of course, it can also be designed for achromatic design. The design wavelength is any two wavelengths between 700nm and 1600nm, which can be 817nm and 1064nm, but not limited to these two wavelengths. The material is optical glass or high molecular polymer, and the surface has enhanced transmission. High-efficiency optical coatings for laser collimation.

物镜40的数值孔径为0.7(水中),二向色镜扫描器30内可动二向色镜的直径为2mm,封装尺寸为5×5mm2,第一谐振频率为400Hz,其最大光学扫描角度为±15度,垂直二向色镜扫描器的Z方向移动范围为300um,此外考虑激光输出光纤91的实际单模纤芯最小为3um,支持帧大小为512×512×100最大视场为400×400×300um3的成像,以实现高速图像采集,所采用的日本滨松ORCA-FLASH 4.0CMOS相机可以达到512×512×300@4fps。The numerical aperture of the objective lens 40 is 0.7 (in water), the diameter of the movable dichroic mirror in the dichroic mirror scanner 30 is 2 mm, the package size is 5×5 mm 2 , the first resonance frequency is 400 Hz, and its maximum optical scanning angle is It is ±15 degrees, and the Z direction moving range of the vertical dichroic mirror scanner is 300um. In addition, considering that the actual single-mode core of the laser output fiber 91 is at least 3um, the supported frame size is 512×512×100 and the maximum field of view is 400 × 400 × 300um 3 imaging, to achieve high-speed image acquisition, the Japanese Hamamatsu ORCA-FLASH 4.0 CMOS camera can reach 512 × 512 × 300@4fps.

聚焦透镜50为消色差设计,设计波长为350nm至700nm之间的任意2个波长,通常为408nm和633nm,但不限于这两个波长,材料为光学玻璃或高分子聚合物,表面有增强透射率的光学镀膜,用于将接收到的非线性光学信号聚焦并耦合入收集光纤。The focusing lens 50 is achromatic design, the design wavelength is any two wavelengths between 350nm and 700nm, usually 408nm and 633nm, but not limited to these two wavelengths, the material is optical glass or high molecular polymer, and the surface has enhanced transmission High-efficiency optical coatings used to focus and couple the received nonlinear optical signal into the collection fiber.

具体的激光输入光纤90大模场单模光纤或保偏光纤或光子晶体光纤,设计波长为700nm至1600nm之间的任意波长,材料为光学玻璃,石英,塑料或高分子聚合物,用于传输外部激发光源产生的激光。The specific laser input fiber 90 large mode field single mode fiber or polarization maintaining fiber or photonic crystal fiber, the design wavelength is any wavelength between 700nm and 1600nm, the material is optical glass, quartz, plastic or polymer, used for transmission Laser generated by an external excitation light source.

本实施例中,如图5和图6所示,二向色镜扫描器30,为单轴结构,具体的包括镂空的基片11、驱动器22和镜面,驱动器22通过键合的方式固定在高分子聚合物制成的基片11上,驱动器22的两端设置扭转梁,扭转梁转动连接在基片11的内壁上,驱动器22用于根据指令改变镜面的角度,镜面包括若干二向色镜33,二向色镜33包括超薄片,超薄片上镀有二向色薄膜,二向色镜33片材料为光学玻璃或高分子聚合物,用于反射波长为700nm-1600nm的s型偏振激光并透射波长为700nm-1600nm的p型偏振激光以及波长为350nm-700nm的非线性光学信号,驱动器22包括若干可供非线性光学信号透射过的镜体,二向色镜33分别固定于镜体的表面上,镜体为环形,镜面的形状为圆盘形。本实施例中的驱动器22通常来说是采用静电驱动的,在驱动器22这块的设计上本实施例是采用现有的驱动器22设计,具体的可以采用MEMSCAP公司的表面微加工工艺SOIMUMPs。该技术为现有技术,在此不再赘述。In this embodiment, as shown in FIGS. 5 and 6 , the dichroic mirror scanner 30 is a uniaxial structure, and specifically includes a hollow substrate 11 , a driver 22 and a mirror surface, and the driver 22 is fixed on the On the substrate 11 made of high molecular polymer, the two ends of the driver 22 are provided with torsion beams, and the torsion beams are rotatably connected to the inner wall of the substrate 11. The driver 22 is used to change the angle of the mirror surface according to the instruction, and the mirror surface includes several dichroics. Mirror 33, the dichroic mirror 33 includes an ultra-thin sheet, and the ultra-thin sheet is coated with a dichroic film, and the material of the dichroic mirror 33 is optical glass or high molecular polymer, and is used for s-type reflection wavelengths of 700nm-1600nm. The polarized laser light transmits p-type polarized laser light with a wavelength of 700nm-1600nm and a nonlinear optical signal with a wavelength of 350nm-700nm. The driver 22 includes a number of mirrors for the nonlinear optical signal to pass through. The dichroic mirrors 33 are respectively fixed on On the surface of the mirror body, the mirror body is annular, and the shape of the mirror surface is disc. The driver 22 in this embodiment is generally driven by electrostatics. In the design of the driver 22, this embodiment uses the existing driver 22 design. Specifically, the surface micromachining process SOIMUMPs of MEMSCAP company can be used. This technology is the prior art, and details are not repeated here.

垂直二向色镜扫描器70,镜片为二向色镜44片,二向色镜44片材料为光学玻璃或高分子聚合物,用于反射波长为700nm-1600nm的激光并透射波长为350nm-700nm的非线性光学信号。Vertical dichroic mirror scanner 70, the lens is 44 dichroic mirrors, the material of the 44 dichroic mirrors is optical glass or high molecular polymer, which is used to reflect laser light with a wavelength of 700nm-1600nm and transmit a wavelength of 350nm- 700nm nonlinear optical signal.

物镜40为消色差设计,设计波长为700nm至1600nm之间的任意2个波长,通常为817nm和1064nm,但不限于这两个波长,材料为光学玻璃或高分子聚合物,表面有增强透射率的光学镀膜,结构可以为传统的折射透镜,梯度折射率透镜或具有曲面外形的梯度折射率透镜,用于将入射的激光聚焦在活体样本(或者人体)表面,激发出非线性光学信号。The objective lens 40 is achromatic design, the design wavelength is any two wavelengths between 700nm and 1600nm, usually 817nm and 1064nm, but not limited to these two wavelengths, the material is optical glass or polymer, and the surface has enhanced transmittance The structure of the optical coating can be a traditional refractive lens, a gradient index lens or a gradient index lens with a curved shape, which is used to focus the incident laser on the surface of a living sample (or human body) to excite nonlinear optical signals.

反射镜20呈45度放置,用于将激光(激光信号)反射90度至二向色镜扫描器30。The mirror 20 is placed at 45 degrees for reflecting the laser light (laser signal) at 90 degrees to the dichroic mirror scanner 30 .

本实施例中,外壳100的体积小于5mm*5mm*5mm,具体使用时,可以将本实用新型固定在小鼠的头顶(如图7所示),也可以安装于其他动物的头顶上,如狨猴、兔等。In this embodiment, the volume of the casing 100 is less than 5mm*5mm*5mm, and the utility model can be fixed on the top of the mouse’s head (as shown in FIG. 7 ) during specific use, or can be installed on the top of the head of other animals, such as Marmosets, rabbits, etc.

通过本实施例,本方案中将光电检测器2安装在物镜40的周围即可实现了被检测物体的荧光的收集,相比现有的荧光收集设备、元件,体积大大减小,便于放置在动物的头部,对动物的活动和生物组织等某些指标进行实时检测,操作简单方便,且相比体积较大的荧光收集的设备和元件,成本大大降低。与现有技术相比,本实施例具有以下优点:以常用的数值孔径为0.8,放大倍率为40X的液浸物镜40为例说明,该液浸物镜40的荧光发射半角为arcsin(0.8/1.33)=30度,可以计算出,本实用新型在同款显微物镜40的前孔径周围布置宽度为1mm的环形光电检测器2可以收集到荧光发射半角为30度至60度之间的荧光光子,相当于具有激发数值孔径为0.8,而收集数值孔径为1.0,因此大大提高了荧光收集效率,提高了成像的信噪比,提高了在高散射介质中的成像深度。Through this embodiment, in this solution, the photodetector 2 can be installed around the objective lens 40 to realize the collection of the fluorescence of the detected object. The head of the animal is used for real-time detection of some indicators such as animal activity and biological tissue. The operation is simple and convenient, and the cost is greatly reduced compared with the equipment and components of the larger fluorescence collection. Compared with the prior art, the present embodiment has the following advantages: taking the commonly used liquid immersion objective lens 40 with a numerical aperture of 0.8 and a magnification of 40X as an example, the fluorescence emission half-angle of the liquid immersion objective lens 40 is arcsin (0.8/1.33 )=30 degrees, it can be calculated that the annular photodetector 2 with a width of 1 mm arranged around the front aperture of the same microscope objective lens 40 in the present invention can collect fluorescence photons with a fluorescence emission half angle between 30 degrees and 60 degrees. , which is equivalent to having an excitation numerical aperture of 0.8 and a collection numerical aperture of 1.0, thus greatly improving the fluorescence collection efficiency, improving the signal-to-noise ratio of imaging, and improving the imaging depth in high scattering media.

实施例2Example 2

本实施例中光电检测器2的光电敏感单元2.3由多片的普通尺寸雪崩二极管(Avalanche Photo Diode,LAAPD)组成环形阵列,中央的孔或透明材料用于透过显微物镜的激发光,多片的普通尺寸雪崩二极管用于接收显微物镜接收不到的荧光光子。In this embodiment, the photosensitive unit 2.3 of the photodetector 2 is composed of a plurality of ordinary size avalanche diodes (Avalanche Photo Diode, LAAPD) to form an annular array. The regular size avalanche diode of the sheet is used to receive fluorescence photons that are not received by the microscope objective.

实施例3Example 3

本实施例中的光电检测器2的光电敏感单元2.3由二维像素光电传感器组成环形阵列,如CCD(光电耦合器件)器件,CMOS(金属半导体氧化物)器件,FPA(焦平面阵列)器件,PMT(光电倍增管)器件,单光子计数器件或基于任何以上多种光电转换原理的混合器件,如滨松公司混合光电探测器(HPD),中央的孔或透明材料用于透过显微物镜的激发光,二维像素光电传感器的环形阵列用于接收显微物镜接收不到的荧光光子。In this embodiment, the photosensitive unit 2.3 of the photodetector 2 is composed of a circular array of two-dimensional pixel photoelectric sensors, such as CCD (photocoupler) devices, CMOS (metal semiconductor oxide) devices, FPA (focal plane array) devices, PMT (photomultiplier tube) devices, single photon counting devices or hybrid devices based on any of the above multiple photoelectric conversion principles, such as Hamamatsu Hybrid Photodetectors (HPD), with a central hole or transparent material for transmission through the microscope objective The excitation light, a circular array of 2D pixel photosensors is used to receive fluorescence photons that are not received by the microscope objective.

以上所述的仅是本实用新型的优选实施方式,应当指出,对于本领域的技术人员来说,在不脱离本实用新型构思的前提下,还可以作出若干变形和改进,这些也应该视为本实用新型的保护范围,这些都不会影响本实用新型实施的效果和专利的实用性。本实用新型所省略描述的技术、形状、构造部分均为公知技术。The above are only the preferred embodiments of the present utility model. It should be pointed out that for those skilled in the art, some modifications and improvements can be made without departing from the concept of the present utility model. These should also be regarded as The protection scope of the present utility model will not affect the implementation effect of the present utility model and the practicability of the patent. The technologies, shapes and structural parts that are omitted from the description of the present invention are all known technologies.

Claims (10)

1.一种三维头戴式显微镜,包括透镜组件、物镜、扫描器组件,其特征在于:所述物镜上设有光电检测器,所述光电检测器包括保护元件、滤光片、光电敏感单元、驱动电路。1. a three-dimensional head-mounted microscope, comprising lens assembly, object lens, scanner assembly, it is characterized in that: described object lens is provided with photoelectric detector, described photoelectric detector comprises protection element, filter, photosensitive unit ,Drive circuit. 2.根据权利要求1所述的一种三维头戴式显微镜,其特征在于:所述透镜组件包括准直透镜、柱状透镜、聚焦透镜、收集透镜的一种或者以上多种透镜的组合;所述准直透镜,用于准直来自激光输入光纤输出的激光以及减少不同频率激光之间的色差并输出激光信号;所述柱状透镜,用于形成线状焦点;所述聚焦透镜,用于激光聚焦;所述收集透镜,用于收集非线性光学信号并输入激光输出光纤。2. A three-dimensional head-mounted microscope according to claim 1, wherein the lens assembly comprises a combination of one or more lenses of a collimating lens, a cylindrical lens, a focusing lens, and a collecting lens; The collimating lens is used for collimating the laser output from the laser input fiber and reducing the chromatic aberration between the lasers of different frequencies and outputting the laser signal; the cylindrical lens is used for forming a linear focus; the focusing lens is used for the laser Focusing; the collecting lens is used to collect nonlinear optical signals and input the laser output fiber. 3.根据权利要求1所述的一种三维头戴式显微镜,其特征在于:还包括波片,所述波片用于改变激光的偏振方向。3 . The three-dimensional head-mounted microscope according to claim 1 , further comprising a wave plate, wherein the wave plate is used to change the polarization direction of the laser light. 4 . 4.根据权利要求1-3任一所述的一种三维头戴式显微镜,其特征在于:所述光电敏感单元为雪崩二极管、光电耦合器件、金属半导体氧化物器件、焦平面阵器件、光电倍增管器件、单光子计数器件中的一种或包含以上多种器件的混合器件。4. A three-dimensional head-mounted microscope according to any one of claims 1-3, wherein the photosensitive unit is an avalanche diode, a photocoupler, a metal semiconductor oxide device, a focal plane array device, a photoelectric One of a multiplier tube device, a single-photon counting device, or a hybrid device comprising a plurality of the above devices. 5.根据权利要求1所述的一种三维头戴式显微镜,其特征在于:所述扫描器组件包括二向色镜扫描器和垂直二向色镜扫描器。5 . The three-dimensional head-mounted microscope according to claim 1 , wherein the scanner assembly comprises a dichroic mirror scanner and a vertical dichroic mirror scanner. 6 . 6.根据权利要求5所述的一种三维头戴式显微镜,其特征在于:所述二向色镜扫描器包括二向色镜片和可驱使二向色镜片改变角度的驱动器,所述二向色镜片覆盖于驱动器上。6 . The three-dimensional head-mounted microscope according to claim 5 , wherein the dichroic mirror scanner comprises a dichroic lens and a driver that can drive the dichroic lens to change the angle, and the dichroic lens can change its angle. 7 . The chromatic lens covers the driver. 7.根据权利要求5所述的一种三维头戴式显微镜,其特征在于:所述二向色镜扫描器的晶圆的背面设有用于非线性光学信号透射过的透射孔。7 . The three-dimensional head-mounted microscope according to claim 5 , wherein the back of the wafer of the dichroic mirror scanner is provided with a transmission hole for transmitting the nonlinear optical signal. 8 . 8.根据权利要求4所述的一种三维头戴式显微镜,其特征在于:当所述光电敏感单元为光电耦合器件、金属半导体氧化物器件、焦平面阵器件、光电倍增管器件、单光子计数器件中的一种或包含以上多种器件的混合器件时,所述的光电检测器的保护元件与所述的光电敏感单元相对的表面为微透镜阵列。8. A three-dimensional head-mounted microscope according to claim 4, characterized in that: when the photosensitive unit is a photoelectric coupling device, a metal semiconductor oxide device, a focal plane array device, a photomultiplier tube device, a single photon device When counting one of the devices or a hybrid device including the above multiple devices, the surface of the protection element of the photodetector opposite to the photosensitive unit is a microlens array. 9.根据权利要求1所述的一种三维头戴式显微镜,其特征在于:还包括反射镜,反射镜包括透射面和反射面。9 . The three-dimensional head-mounted microscope according to claim 1 , further comprising a reflection mirror, and the reflection mirror comprises a transmission surface and a reflection surface. 10 . 10.根据权利要求1所述的一种三维头戴式显微镜,其特征在于:所述保护元件的表面设有防反射光学镀膜。10 . The three-dimensional head-mounted microscope according to claim 1 , wherein the surface of the protection element is provided with an anti-reflection optical coating. 11 .
CN201921256738.9U 2019-03-18 2019-08-05 A three-dimensional head-mounted microscope Expired - Fee Related CN210155406U (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN2019102107307 2019-03-18
CN201910210730 2019-03-18

Publications (1)

Publication Number Publication Date
CN210155406U true CN210155406U (en) 2020-03-17

Family

ID=69448200

Family Applications (14)

Application Number Title Priority Date Filing Date
CN201921248598.0U Expired - Fee Related CN210155405U (en) 2019-03-18 2019-08-02 A microscope objective containing a photodetector
CN201910712514.2A Active CN111722388B (en) 2019-03-18 2019-08-02 A three-dimensional micro endoscope
CN201910712515.7A Active CN111722389B (en) 2019-03-18 2019-08-02 Miniature endoscope with high fluorescence collection rate
CN201921247896.8U Expired - Fee Related CN210155400U (en) 2019-03-18 2019-08-02 Miniature endoscope with high fluorescence collection rate
CN201921248381.XU Expired - Fee Related CN210166556U (en) 2019-03-18 2019-08-02 A three-dimensional miniature endoscope
CN201921248510.5U Expired - Fee Related CN210155403U (en) 2019-03-18 2019-08-02 A scanning device for microscope objective
CN201921248016.9U Expired - Fee Related CN210155402U (en) 2019-03-18 2019-08-02 Microscopic probe containing extended photoelectric detector
CN201921248596.1U Expired - Fee Related CN210166558U (en) 2019-03-18 2019-08-02 Microscope with high fluorescence collection rate
CN201910717814.XA Pending CN111722390A (en) 2019-03-18 2019-08-05 A head-mounted microscope with high fluorescence collection rate
CN201910718520.9A Pending CN111722391A (en) 2019-03-18 2019-08-05 Three-dimensional head-mounted microscope
CN201921258175.7U Expired - Fee Related CN210572988U (en) 2019-03-18 2019-08-05 Head-mounted microscope with high fluorescence collection rate
CN201921256738.9U Expired - Fee Related CN210155406U (en) 2019-03-18 2019-08-05 A three-dimensional head-mounted microscope
CN201922218716.XU Active CN211086789U (en) 2019-03-18 2019-12-11 A Handheld Microscope with High Fluorescence Collection Rate
CN201911268411.8A Pending CN110794563A (en) 2019-03-18 2019-12-11 A Handheld Microscope with High Fluorescence Collection Rate

Family Applications Before (11)

Application Number Title Priority Date Filing Date
CN201921248598.0U Expired - Fee Related CN210155405U (en) 2019-03-18 2019-08-02 A microscope objective containing a photodetector
CN201910712514.2A Active CN111722388B (en) 2019-03-18 2019-08-02 A three-dimensional micro endoscope
CN201910712515.7A Active CN111722389B (en) 2019-03-18 2019-08-02 Miniature endoscope with high fluorescence collection rate
CN201921247896.8U Expired - Fee Related CN210155400U (en) 2019-03-18 2019-08-02 Miniature endoscope with high fluorescence collection rate
CN201921248381.XU Expired - Fee Related CN210166556U (en) 2019-03-18 2019-08-02 A three-dimensional miniature endoscope
CN201921248510.5U Expired - Fee Related CN210155403U (en) 2019-03-18 2019-08-02 A scanning device for microscope objective
CN201921248016.9U Expired - Fee Related CN210155402U (en) 2019-03-18 2019-08-02 Microscopic probe containing extended photoelectric detector
CN201921248596.1U Expired - Fee Related CN210166558U (en) 2019-03-18 2019-08-02 Microscope with high fluorescence collection rate
CN201910717814.XA Pending CN111722390A (en) 2019-03-18 2019-08-05 A head-mounted microscope with high fluorescence collection rate
CN201910718520.9A Pending CN111722391A (en) 2019-03-18 2019-08-05 Three-dimensional head-mounted microscope
CN201921258175.7U Expired - Fee Related CN210572988U (en) 2019-03-18 2019-08-05 Head-mounted microscope with high fluorescence collection rate

Family Applications After (2)

Application Number Title Priority Date Filing Date
CN201922218716.XU Active CN211086789U (en) 2019-03-18 2019-12-11 A Handheld Microscope with High Fluorescence Collection Rate
CN201911268411.8A Pending CN110794563A (en) 2019-03-18 2019-12-11 A Handheld Microscope with High Fluorescence Collection Rate

Country Status (1)

Country Link
CN (14) CN210155405U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111722391A (en) * 2019-03-18 2020-09-29 苏州溢博伦光电仪器有限公司 Three-dimensional head-mounted microscope
CN115046975A (en) * 2022-06-27 2022-09-13 中国科学院苏州生物医学工程技术研究所 In-vivo fluorescence photon signal enhancement collector

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113552710B (en) * 2021-09-17 2022-01-18 清华大学 Multi-plane microscopic imaging system based on gradient variable refractive index lens
CN115128788B (en) * 2022-05-30 2023-11-28 中国人民解放军国防科技大学 Place the microscope device horizontally parallel to the observation object
CN115077872B (en) * 2022-06-27 2025-09-05 中国科学院苏州生物医学工程技术研究所 Resolution detection system and method suitable for annular scanning two-photon imaging

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897545A (en) * 1987-05-21 1990-01-30 Electroscan Corporation Electron detector for use in a gaseous environment
CA2318892A1 (en) * 1998-01-27 1999-07-29 Wisconsin Alumni Research Foundation Signal enhancement for fluorescence microscopy
WO1999047963A1 (en) * 1998-03-16 1999-09-23 Praelux Incorporated Confocal microscopy imaging system
US6781208B2 (en) * 2001-08-17 2004-08-24 Nec Corporation Functional device, method of manufacturing therefor and driver circuit
US8827899B2 (en) * 2004-09-24 2014-09-09 Vivid Medical, Inc. Disposable endoscopic access device and portable display
JP2007319396A (en) * 2006-05-31 2007-12-13 Olympus Medical Systems Corp Endoscope and endoscope system
DE102006042499A1 (en) * 2006-09-07 2008-03-27 Leica Microsystems Cms Gmbh Immersion objective for use in e.g. fluorescence microscope, has feed device with cover that forms gap e.g. annular gap, towards outer lens, and connection formed in cover for continuous supply with immersion liquid
CN201167945Y (en) * 2008-04-11 2008-12-24 中国科学院上海光学精密机械研究所 Device for Improving Tomographic Depth of Two-color Two-photon Fluorescence Imaging
JP5311196B2 (en) * 2008-09-16 2013-10-09 横河電機株式会社 Microscope equipment
KR101089292B1 (en) * 2009-05-20 2011-12-02 한국과학기술원 Biomedical Reflex / Fluorescent Compounds Conformal Laser Scanning Microscope
US8405027B2 (en) * 2010-07-14 2013-03-26 Fei Company Contrast for scanning confocal electron microscope
CN102095672B (en) * 2011-03-17 2012-06-27 上海理工大学 Multi-method combined particle size analyzer
US20130060106A1 (en) * 2011-09-06 2013-03-07 Medtronic Minimed, Inc. Optical sensing systems and methods
CN102621117B (en) * 2012-03-09 2014-03-12 福建师范大学 Living cell laser scanning co-focusing microscope imaging system
CN102818794B (en) * 2012-07-23 2016-01-27 苏州生物医学工程技术研究所 Biological fluorescence microscopic detection instrument
CN103335988B (en) * 2013-06-06 2016-12-07 西北大学 Line based on post lens focus scanning stimulated emission depletion microscopic imaging device
CN103336366B (en) * 2013-06-06 2016-04-20 西北大学 The device of uniform line laser beam is produced based on high-NA post lens focus
US10537235B2 (en) * 2014-08-12 2020-01-21 The University Of Akron Multimodal endoscope apparatus
CN106092972A (en) * 2015-04-27 2016-11-09 松下知识产权经营株式会社 Optical sensing means
CN106500837B (en) * 2016-09-26 2018-04-17 中国科学院苏州生物医学工程技术研究所 Imaging spectrometer
CN106770109A (en) * 2016-12-13 2017-05-31 上海科源电子科技有限公司 A kind of bioluminescence detecting system
CN107144955A (en) * 2017-05-15 2017-09-08 清华大学 The structure light micro imaging system that space-time is focused on is scanned based on line
US10777382B2 (en) * 2017-11-21 2020-09-15 Focus-Ebeam Technology (Beijing) Co., Ltd. Low voltage scanning electron microscope and method for specimen observation
CN107966799A (en) * 2017-12-27 2018-04-27 南方医科大学 A kind of miniature mating plate microscope of wear-type
CN107991769B (en) * 2018-01-12 2020-07-10 凝辉(天津)科技有限责任公司 Two-dimensional scanning device
CN108261179A (en) * 2018-01-12 2018-07-10 凝辉(天津)科技有限责任公司 Micro-optical is popped one's head in
CN108645831B (en) * 2018-06-14 2020-11-20 厦门大学 Multifunctional surface plasmon coupled emission fluorescence and Raman detector and detection method thereof
CN108957720B (en) * 2018-09-26 2019-12-10 中国科学院化学研究所 Stimulated radiation loss optical microscope and illumination system thereof
CN111474695A (en) * 2019-01-23 2020-07-31 苏州溢博伦光电仪器有限公司 Large-field microscope objective lens
CN210155405U (en) * 2019-03-18 2020-03-17 苏州溢博伦光电仪器有限公司 A microscope objective containing a photodetector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111722391A (en) * 2019-03-18 2020-09-29 苏州溢博伦光电仪器有限公司 Three-dimensional head-mounted microscope
CN115046975A (en) * 2022-06-27 2022-09-13 中国科学院苏州生物医学工程技术研究所 In-vivo fluorescence photon signal enhancement collector

Also Published As

Publication number Publication date
CN111722389B (en) 2025-07-29
CN111722388B (en) 2025-05-30
CN210155400U (en) 2020-03-17
CN210155403U (en) 2020-03-17
CN211086789U (en) 2020-07-24
CN210166556U (en) 2020-03-20
CN111722391A (en) 2020-09-29
CN210166558U (en) 2020-03-20
CN111722388A (en) 2020-09-29
CN111722390A (en) 2020-09-29
CN210155405U (en) 2020-03-17
CN110794563A (en) 2020-02-14
CN210155402U (en) 2020-03-17
CN111722389A (en) 2020-09-29
CN210572988U (en) 2020-05-19

Similar Documents

Publication Publication Date Title
CN210155406U (en) A three-dimensional head-mounted microscope
CN104597590B (en) A kind of super-resolution fluorescence light spectrum image-forming microscope
CN217279110U (en) Optical imaging system for confocal endoscope and confocal endoscope
TW201142352A (en) Fluorescence micro imaging system
CN210155407U (en) A head-mounted microscope with a large field of view
CN102818794B (en) Biological fluorescence microscopic detection instrument
CN113835208B (en) Large-view-field two-photon scanning and imaging device
CN211014821U (en) Microscope
CN108982443A (en) Two area's fluorescent scanning micro imaging system of near-infrared of multiphoton excitation
CN209661612U (en) Three-dimensional line scans micro-optical probe
CN210573035U (en) Miniature endoscope
CN110623636A (en) Three-dimensional scanning miniature optical probe
JP5704827B2 (en) Fluorescence observation equipment
CN211086791U (en) Handheld microscope
CN211862772U (en) Three-dimensional scanning optical microscope
US8393010B2 (en) Near-field scanning optical microscope
CN102692702A (en) Confocal microscope using laser interference fields
CN110623635A (en) Three-dimensional line scanning miniature optical probe
CN211086785U (en) Hand-held three-dimensional scanning microscope
JP2002040359A (en) Optical scanning optical system
CN209826672U (en) Three-dimensional scanning miniature optical probe
CN110780439A (en) A handheld three-dimensional scanning microscope
CN209770337U (en) line scanning miniature optical probe
CN211381246U (en) Multi-point scanning confocal endoscope
CN203241616U (en) Hand-held confocal optical endoscope

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20200317

CF01 Termination of patent right due to non-payment of annual fee