CN209903638U - A sticky rod tooling for silicon wafer slicer - Google Patents
A sticky rod tooling for silicon wafer slicer Download PDFInfo
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- CN209903638U CN209903638U CN201920270395.5U CN201920270395U CN209903638U CN 209903638 U CN209903638 U CN 209903638U CN 201920270395 U CN201920270395 U CN 201920270395U CN 209903638 U CN209903638 U CN 209903638U
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 57
- 239000010703 silicon Substances 0.000 title claims abstract description 57
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 56
- 239000011347 resin Substances 0.000 claims abstract description 40
- 229920005989 resin Polymers 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000001514 detection method Methods 0.000 claims abstract description 19
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 12
- 239000010959 steel Substances 0.000 claims abstract description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 239000003292 glue Substances 0.000 claims 2
- 238000005520 cutting process Methods 0.000 abstract description 19
- 229910003460 diamond Inorganic materials 0.000 abstract description 9
- 239000010432 diamond Substances 0.000 abstract description 9
- 229910021422 solar-grade silicon Inorganic materials 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 16
- 238000000034 method Methods 0.000 description 10
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
技术领域technical field
本实用新型涉及太阳能级硅片切割技术领域,尤其涉及一种具有检测硅棒切片到位功能的硅片切片机粘棒工装。The utility model relates to the technical field of solar-grade silicon wafer cutting, in particular to a sticking rod tooling for a silicon wafer slicing machine with the function of detecting that the silicon rod is sliced in place.
背景技术Background technique
随着我国经济社会的发展,能源需求紧张、能源安全局势日益紧迫,加速了以太阳能、风能等可再生能源来调整我国能源结构,推动了能源的可持续发展,其中太阳能的运用普及性相对广泛,其中太阳能领域中切片机也是不可忽略的设备。With the development of my country's economy and society, the energy demand is tense and the energy security situation is becoming more and more urgent. It has accelerated the use of solar energy, wind energy and other renewable energy sources to adjust my country's energy structure and promoted the sustainable development of energy. Among them, the use of solar energy is relatively widespread. , in which the slicer is also a non-negligible device in the field of solar energy.
硅片切片环节一直是光伏产业中关键一环,切片技术也不断的向细线化、高效率、清洁化发展,无论从普通钢线还是树脂线还是金刚线均采取一致的切割形式,均由切割线高速运转,硅棒垂直进给来完成切割,硅棒采取胶粘的形式固定到树脂基板上,树脂基板再胶粘到钢托上,在切割过程中由于切割张力存在,切割线会存在一定的弧度,为保证硅棒完全切投,目前均采取前期多次实验,通过反复的停机观察,多次微量加切的方式,确定最终的切割尺寸进给量,多次停机会造成硅片的切割面出线痕和色差,影响产品质量,同时也增加断线的风险,无法通过快速有效的检测来判断是否已切割到位。Silicon wafer slicing has always been a key part of the photovoltaic industry, and the slicing technology is constantly developing towards thin lines, high efficiency and cleanliness. Whether it is ordinary steel wire, resin wire or diamond wire, the same cutting form is adopted. The cutting line runs at high speed, and the silicon rod is fed vertically to complete the cutting. The silicon rod is fixed to the resin substrate by gluing, and the resin substrate is then glued to the steel support. During the cutting process, due to the existence of cutting tension, the cutting line will exist. For a certain arc, in order to ensure the complete cutting of the silicon rod, several experiments are carried out in the early stage. Line marks and color difference on the cutting surface will affect product quality and increase the risk of wire breakage. It is impossible to judge whether the cutting is in place through fast and effective detection.
实用新型内容Utility model content
本实用新型克服现有技术存在的不足,提供了一种具有检测硅棒切片到位功能的硅片切片机粘棒工装。有效解决了不能及时快速检测硅棒切片是否加工到位所带来的影响产品质量的问题。The utility model overcomes the deficiencies of the prior art, and provides a sticking tool for a silicon wafer slicer with the function of detecting the in-position of silicon rods. It effectively solves the problem of affecting product quality caused by not being able to quickly and quickly detect whether the silicon rod slices are processed in place.
本实用新型是通过如下技术方案实现的。The utility model is realized through the following technical solutions.
一种硅片切片机粘棒工装,所述的粘棒工装包括钢托、树脂基板和硅棒,所述的树脂基板粘结在所述的钢托上,所述的硅棒粘结在所述的树脂基板上,其特征在于,所述的树脂基板内设置有电阻丝,所述的电阻丝与一通断检测设备相串联,所述的通断检测设备设置在所述树脂基板的外部,所述的通断检测设备具有报警结构。A sticking rod tooling for a silicon wafer slicing machine, the sticking rod tooling comprises a steel support, a resin substrate and a silicon rod, the resin substrate is bonded on the steel support, and the silicon rod is bonded on the The resin substrate is characterized in that a resistance wire is arranged in the resin substrate, the resistance wire is connected in series with an on-off detection device, and the on-off detection device is arranged outside the resin substrate, The on-off detection device has an alarm structure.
进一步优选的,所述的电阻丝为铜电阻丝。Further preferably, the resistance wire is a copper resistance wire.
进一步优选的,所述的树脂基板内设置有两根电阻丝,所述的两根电阻丝分别与所述的通断检测设备相串联。Further preferably, the resin substrate is provided with two resistance wires, and the two resistance wires are respectively connected in series with the on-off detection device.
进一步优选的,所述的电阻丝设置在距离树脂基板表面1-1.5mm处。Further preferably, the resistance wire is arranged at a distance of 1-1.5 mm from the surface of the resin substrate.
一种检测硅棒切片到位的方法,包括以下步骤:A method for detecting that a silicon rod is sliced in place, comprising the following steps:
a)在硅片切片机的树脂基板内部预埋电阻丝,并将所述的电阻丝串联在一具有报警功能的通断检测设备上,所述的通断检测设备设置在所述的树脂基板外部。a) Pre-embed a resistance wire inside the resin substrate of the silicon wafer slicing machine, and connect the resistance wire in series with an on-off detection device with an alarm function, and the on-off detection device is arranged on the resin substrate external.
b)将所述的树脂基板粘结在硅片切片机的钢托上,再将待切割的硅棒粘结在所述的树脂基板上。b) Bonding the resin substrate on the steel support of the silicon wafer slicing machine, and then bonding the silicon rod to be cut on the resin substrate.
c)开启硅片切片机,使金刚线切割硅棒,当通断检测设备发出报警提示,则说明硅棒切片加工完成,再停机下料。c) Turn on the silicon wafer slicing machine, so that the diamond wire cuts the silicon rod. When the on-off detection equipment issues an alarm prompt, it means that the silicon rod slicing process is completed, and then the machine is stopped and unloaded.
检测硅棒切片到位的方法中所述的电阻丝为铜电阻丝。The resistance wire described in the method for detecting that the silicon rod is sliced in place is a copper resistance wire.
检测硅棒切片到位的方法中所述的树脂基板内设置有两根电阻丝,所述的两根电阻丝分别与所述的通断检测设备相串联。In the method for detecting that the silicon rod is sliced in place, the resin substrate is provided with two resistance wires, and the two resistance wires are respectively connected in series with the on-off detection device.
检测硅棒切片到位的方法中所述的电阻丝设置在距离树脂基板表面1-1.5mm处。The resistance wire described in the method for detecting the silicon rod sliced in place is set at a distance of 1-1.5 mm from the surface of the resin substrate.
本实用新型提供了一种硅片切片环节是否加工到位的检查方式,取代通过人为经验和肉眼观察的来判断是否加工到位的一种快捷方式,当加工到树脂板内所预埋的电阻丝处,电阻丝会被金刚线切断,与电阻丝相串联的通断检测设备会发出报警,确定已完全切断硅棒。The utility model provides a method for checking whether the silicon wafer slicing link is processed in place, instead of a quick way of judging whether the processing is in place through human experience and naked eye observation. , the resistance wire will be cut off by the diamond wire, and the on-off detection equipment connected in series with the resistance wire will issue an alarm to confirm that the silicon rod has been completely cut off.
当金刚线切割到树脂基板时说明硅棒已加工完成,当金刚线切割到电阻丝后,由于电阻丝的硬度远小于金刚线的硬度,因此电阻丝会很快被切断,通断检测仪器在检测到电阻丝切断时会马上发出报警提示,生产者可根据该报警确定硅棒加工已完成,可以停机下料,避免由于硅棒尺寸变动或导轮尺寸变动等因素导致的一次性切割不到位,通过反复加切导致硅片质量下降。When the diamond wire is cut to the resin substrate, it means that the silicon rod has been processed. When the diamond wire is cut to the resistance wire, since the hardness of the resistance wire is much smaller than that of the diamond wire, the resistance wire will be cut off quickly. When it is detected that the resistance wire is cut, an alarm prompt will be issued immediately. According to the alarm, the manufacturer can determine that the processing of the silicon rod has been completed, and can stop the cutting to avoid the one-time cutting due to the change of the size of the silicon rod or the size of the guide wheel. , resulting in a decrease in the quality of the silicon wafer through repeated cutting.
本实用新型相对于现有技术所产生的有益效果为。The beneficial effects of the present invention relative to the prior art are as follows.
本实用新型通过设计一种新的树脂板方式,实现硅棒加工后期对加工是否结束的快速判断,避免人为判断造成的质量事故,提高准确性和及时性。避免由于硅棒尺寸变动或导轮尺寸变动等因素导致的一次性切割不到位,通过反复加切导致硅片质量下降。By designing a new resin plate method, the utility model realizes the rapid judgment on whether the processing is finished in the later stage of the processing of the silicon rod, avoids the quality accident caused by human judgment, and improves the accuracy and timeliness. Avoid the one-time cutting is not in place due to factors such as changes in the size of the silicon rod or the size of the guide wheel, and the quality of the silicon wafer is reduced by repeated cutting.
附图说明Description of drawings
图1为本实用新型结构示意图。Figure 1 is a schematic structural diagram of the utility model.
图2为图1中的A处局部放大图。FIG. 2 is a partial enlarged view of part A in FIG. 1 .
其中,1为钢托,2为树脂基板,3为硅棒,4为通断检测设备,5为铜电阻丝。Among them, 1 is a steel bracket, 2 is a resin substrate, 3 is a silicon rod, 4 is an on-off detection device, and 5 is a copper resistance wire.
具体实施方式Detailed ways
为了使本实用新型所要解决的技术问题、技术方案及有益效果更加清楚明白,结合实施例和附图,对本实用新型进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本实用新型,并不用于限定本实用新型。下面结合实施例及附图详细说明本实用新型的技术方案,但保护范围不被此限制。In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer, the present utility model will be further described in detail with reference to the embodiments and the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not intended to limit the present invention. The technical solutions of the present utility model will be described in detail below with reference to the embodiments and the accompanying drawings, but the protection scope is not limited by this.
如图1-图2所示,是一种硅片切片机粘棒工装,所述的粘棒工装包括钢托1、树脂基板2和硅棒3,树脂基板2粘结在钢托1上,硅棒3粘结在树脂基板2上,树脂基板2长度为650毫米,宽度为157毫米,厚度为15毫米,在距离树脂基板2上表面1.5毫米处的水平位置,预埋两根0.5毫米直径的铜电阻丝5。铜电阻丝5串联一个5V的具有报警功能的通断检测设备4,通断检测设备4设置在树脂基板2的外部。As shown in Figures 1-2, it is a sticking tool for a silicon wafer slicing machine. The sticking tool includes a steel support 1, a
所述的通断检测设备4是以JL系列电量隔离变送器为基础,由基准电压设定电路、输出驱动电路组成,用来隔离监测主回路中的交流或直流电流,电流继电器报警输出是电流继电器和电流互感器组成的一个二次控制回路;当主回路电流切段时,就会产生报警提示。The on-off detection device 4 is based on the JL series power isolation transmitter, and is composed of a reference voltage setting circuit and an output drive circuit, which is used to isolate and monitor the AC or DC current in the main circuit. The current relay alarm output is A secondary control loop composed of current relays and current transformers; when the main loop current is cut to sections, an alarm prompt will be generated.
具体使用这种硅片切片机粘棒工装来检测硅棒切片到位的方法,包括以下步骤:Specifically, the method of using this silicon wafer slicing machine sticking rod tool to detect the position of the silicon rod slicing includes the following steps:
将上述这种预埋了铜电阻丝5的树脂基板2粘结在硅片切片机的钢托1上,再将待切割的硅棒3粘结在树脂基板2上;开启硅片切片机,使金刚线切割硅棒3,当通断检测设备4发出报警提示,则说明硅棒切片加工完成,再停机下料。The above-mentioned
本实施例对现有的树脂基板进行改进设计,设计了一种内部自带电阻丝的树脂基板,充分利用金刚线硬度大于铜金属硬度的特性,实现切断后电阻值的变化实现快速报警功能,可提高加工准确性判断,杜绝了由于人为经验和设备参数或硅棒尺寸变化引起的不能一次性切投情况的发生,避免硅片由于多次停机引起的质量事故。In this embodiment, the existing resin substrate is improved and designed, and a resin substrate with internal resistance wires is designed, which makes full use of the hardness of the diamond wire that is greater than that of copper metal, and realizes the change of the resistance value after cutting and realizes the rapid alarm function. It can improve the judgment of processing accuracy, eliminate the situation that cannot be cut at one time due to changes in human experience and equipment parameters or the size of silicon rods, and avoid quality accidents caused by multiple shutdowns of silicon wafers.
以上内容是结合具体的优选实施方式对本实用新型所做的进一步详细说明,不能认定本实用新型的具体实施方式仅限于此,对于本实用新型所属技术领域的普通技术人员来说,在不脱离本实用新型的前提下,还可以做出若干简单的推演或替换,都应当视为属于本实用新型由所提交的权利要求书确定专利保护范围。The above content is a further detailed description of the present invention in conjunction with the specific preferred embodiments, and it cannot be considered that the specific embodiments of the present invention are limited to this. Under the premise of a utility model, some simple deductions or substitutions can also be made, which should be regarded as belonging to the utility model and the scope of patent protection determined by the submitted claims.
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