CN209593183U - A kind of portable high acceleration macro/micromotion platform - Google Patents

Abstract

The utility model belongs to the technical field of microelectronics manufacturing, and specifically relates to a portable high-acceleration macro-micro motion platform, which includes a base, a platform base is arranged on the base, an X-axis platform is arranged on the platform base, and a Y-axis platform is arranged on the X-axis platform , the base is provided with a rotating motor, the output shaft of the rotating motor is fixedly provided with a gear, the bottom side of the X-axis platform is provided with an X-axis rack, the bottom side of the Y-axis platform is provided with a Y-axis rack, and the gear is simultaneously connected with the X-axis The rack and the Y-axis rack are meshed, the XY micro-motion platform is set above the Y-axis platform, the X-axis guide rail pair is set between the X-axis platform and the platform base, and the Y-axis guide rail is set between the X-axis platform and the Y-axis platform Vice, the portable macro-micro motion platform uses a rotating motor to simultaneously drive the X-axis platform and the Y-axis platform, which solves the problem that the traditional platform takes up a lot of space and cannot save the space and cost of the whole machine, and at the same time enables the X/Y-axis platform to accelerate linearly Movement, so that the platform can achieve rapid positioning.

Description

A portable high-acceleration macro-micro motion platform

technical field

The utility model belongs to the technical field of microelectronics manufacturing, in particular to a portable high-acceleration macro-micro motion platform.

Background technique

At present, the macro-micro motion platform as the key equipment has provided important technical support for the rapid development of the microelectronics industry and the improvement of productivity, especially in the field of microelectronics manufacturing such as wire bonding and lithography, and has provided a powerful support for its development. power support. At present, in order to achieve the goals of high-speed and ultra-precise positioning of the macro-micro motion platform, a relatively large-volume macro-motion motor is often provided to drive the target, and the parallel drive of two linear motors occupies a large space and cannot be reduced. This is often ignored. Considering the space resources of the equipment, the space layout is passive and unreasonable, and even low production efficiency and waste of resources occur.

Contents of the invention

The purpose of the utility model is to overcome the deficiencies of the prior art, and provide a portable high-acceleration macro-micro motion platform, which solves the problem that parallel drive motors take up a lot of space and cannot save the space and cost of the whole machine .

The utility model is realized in the following way: a portable high-acceleration macro-micro motion platform includes a base, a platform base is arranged on the base, an X-axis platform is arranged on the platform base, and a Y-axis platform is arranged on the X-axis platform, which is characterized in that : The middle position of the base is provided with a rotating motor, the output shaft of the rotating motor is fixedly provided with gears, the middle position of the platform base is provided with a platform base through hole, and the platform base is provided with steps running through the X-axis direction, and the X-axis platform The middle position of the X-axis platform is provided with a through hole for the X-axis platform. The bottom of the X-axis platform is provided with steps and grooves that run through the direction of the X-axis. The side of the groove of the X-axis platform is provided with an X-axis rack. The steps in the Y-axis direction, the steps and grooves running through the Y-axis direction are set under the Y-axis platform, the Y-axis rack is set on one side of the groove of the Y-axis platform, and the XY micro-motion platform is set above the Y-axis platform. The micro-motion platform is provided with an X-axis piezoelectric ceramic driver and a Y-axis piezoelectric ceramic driver. The X-axis piezoelectric ceramic driver and the Y-axis piezoelectric ceramic driver are connected to the XY micro-motion platform through a flexible hinge. The first guide rail pair of X axis and the second guide rail pair of X axis are arranged at the step between them, and the first guide rail pair of Y axis and the second guide rail pair of Y axis are arranged at the step between the X axis platform and the Y axis platform. Mesh with X-axis rack and Y-axis rack.

The through hole of the platform base and the through hole of the X-axis platform can be used for gears to pass through.

The two ends of the upper plane of the platform base along the X direction are provided with the first X-axis grating scale and the X-axis second grating scale, and the two ends of the upper plane of the X-axis platform along the Y direction are provided with the Y-axis first grating scale And Y-axis second grating ruler, the front and rear sides of the X-axis platform are centered with the X-axis first grating ruler read head and the X-axis second grating ruler read head, and the left and right sides of the Y-axis platform are centered with the Y-axis first The grating ruler reading head and the Y-axis second grating ruler reading head, each grating ruler corresponding to the grating ruler one by one.

The Y-axis platform is provided with a plurality of rectangular through holes.

The rotating motor can realize forward and reverse motion.

Each guide rail pair described is a sliding guide rail pair.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. The portable macro-micro motion platform uses a rotating motor to simultaneously drive the X-axis platform and the Y-axis platform, which solves the problem that the traditional platform takes up a lot of space and cannot save the space and cost of the whole machine;

2. The rotating motor is used to drive the gear and the rack to engage, so that the X/Y axis platform can move linearly with high acceleration, so that the platform can achieve rapid positioning;

3. The linkage between macro and micro platforms realizes ultra-precise positioning on the basis of precision error compensation.

Description of drawings

Figure 1 is a schematic structural diagram of a portable high-acceleration macro-micro motion platform

Figure 2 is a schematic diagram of the connection of the rotating motor

Figure 3 is a structural schematic diagram of the platform base

Figure 4 is a schematic structural diagram of the X-axis platform

Figure 5 is a schematic structural diagram of the Y-axis platform

In the figure: 1-rotating motor, 2-base, 3-platform base, 4-X-axis rack, 5-first guide rail pair of X-axis, 6-X-axis platform, 7-second guide rail pair of X-axis, 8- Y-axis platform, 9- X-axis piezoelectric ceramic driver, 10- XY micro-motion platform, 11- Y-axis piezoelectric ceramic driver, 12- Y-axis first guide rail pair, 13- Y-axis rack, 14- Y-axis first Two guide rail pairs, 15-gear, 16-output shaft, 17-first grating scale of X axis, 18-through hole of platform base, 19-second grating scale of X axis, 20-first grating scale of Y axis, 21-X The first grating head of the axis, 22- the X-axis platform through hole, 23- the second grating of the Y axis, 24- the second grating head of the X axis, 25- the first grating head of the Y axis, 26- the flexible hinge , 27- Y-axis second grating ruler reading head.

Detailed ways

Embodiment 1, as shown in the structure of Figures 1-5, a portable high-acceleration macro-micro motion platform includes a base 2, a platform base 3 is provided on the base 2, an X-axis platform 6 is provided on the platform base 3, and an X-axis platform 6 is provided on the platform base 3. The platform 6 is provided with a Y-axis platform 8, and the Y-axis platform 8 is provided with a plurality of rectangular through holes to reduce the weight of the Y-axis platform 8 and improve positioning accuracy. The middle position of the base 2 is provided with a rotating motor 1, which rotates The motor 1 can realize forward and reverse motion, the output shaft 16 of the rotating motor 1 is fixedly provided with a gear 15, the middle position of the platform base 3 is provided with a platform base through hole 18, and the platform base 3 is provided with a step running through the X-axis direction, The middle position of the X-axis platform 6 is provided with an X-axis platform through hole 22, the platform base through hole 18 and the X-axis platform through hole 22 can pass through the gear 15, and the X-axis platform 6 is provided with steps and recesses running through the X-axis direction. Groove, one side of the groove of the X-axis platform 6 is provided with an X-axis rack 4, the top of the X-axis platform 6 is provided with a step that runs through the Y-axis direction, and the bottom of the Y-axis platform 8 is provided with steps and grooves that run through the Y-axis direction , one side of the groove of the Y-axis platform 8 is provided with a Y-axis rack 13, an XY micro-motion platform 10 is provided above the Y-axis platform 8, and an X-axis piezoelectric ceramic driver 9 and a Y-axis The piezoelectric ceramic driver 11, the X-axis piezoelectric ceramic driver 9 and the Y-axis piezoelectric ceramic driver 11 are connected to the XY micro-motion platform 10 through a flexible hinge 26, and an X-axis is provided at the step between the X-axis platform 6 and the platform base 3 The first guide rail pair 5 and the X-axis second guide rail pair 7, the step between the X-axis platform 6 and the Y-axis platform 8 is provided with a Y-axis first guide rail pair 12 and a Y-axis second guide rail pair 14, and the gear 15 is simultaneously connected with the The X-axis rack 4 meshes with the Y-axis rack 13, and each guide rail pair is a sliding guide rail pair.

The two ends of the upper plane of the platform base 3 along the X direction are provided with the first X-axis grating scale 17 and the second X-axis grating scale 19, and the two ends of the upper plane of the X-axis platform 6 along the Y direction are provided with the Y-axis The first grating ruler 20 and the second grating ruler 23 of the Y axis, the front and rear sides of the X-axis platform 6 are centered with the first grating ruler read head 21 of the X axis and the second grating ruler read head 24 of the X axis, and the Y-axis platform 8 A Y-axis first grating ruler read head 25 and a Y-axis second grating ruler read head 27 are arranged in the middle of the left and right sides, and each grating ruler read head corresponds to the grating ruler one by one.

When the present invention is in use, the platform base through hole of the platform base ensures that the gear can be completely meshed with the X-axis rack; The reading head of the second grating ruler on the X-axis reads the nanometer-level precision readings on the second grating ruler on the X-axis. According to the micron and nanometer reading errors, the XY micro-motion platform is driven by the X-axis piezoelectric ceramic driver to perform error compensation in the X-axis direction and perform Nano-level precision positioning; the gear and the Y-axis rack are meshed and driven, the Y-axis first grating ruler reads the micron-level precision reading on the Y-axis first grating ruler, and the Y-axis second grating ruler reads the Y-axis Nano-level precision readings on the second grating ruler, according to the micron and nanometer reading errors, drive the XY micro-motion platform through the Y-axis piezoelectric ceramic driver to perform error compensation and nano-level precision positioning in the Y-axis direction, so as to realize the fast and accurate platform position.

The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. For those skilled in the art, the present invention can have various modifications and changes, all within the spirit and principles of the present utility model Any modifications, equivalent replacements, improvements, etc. made within the scope of the invention shall be included within the protection scope of the present utility model.

Claims (5)

1. a kind of portable height accelerates macro/micromotion platform, including pedestal, it is provided with platform base on pedestal, is set on platform base It is equipped with X-axis platform, Y-axis platform is provided on X-axis platform, it is characterised in that: the middle position of the pedestal is provided with electric rotating Machine is fixedly installed gear on the output shaft of rotating electric machine, and the middle position of platform base is provided with platform base through-hole, platform Submounts are provided with the step through X-direction, and the middle position of X-axis platform is provided with X-axis platform through-hole, X-axis platform The step and groove through X-direction is provided below, the groove one side of X-axis platform is provided with X-axis rack gear, X-axis platform It is provided with the step through Y direction above, step and groove through Y direction are provided with below Y-axis platform, Y-axis is flat The groove one side of platform is provided with Y-axis rack gear, and XY micromotion platform is provided with above Y-axis platform, is provided with X on XY micromotion platform Axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator, X-axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator pass through Flexible hinge is connect with XY micromotion platform, and the first guideway of X-axis and X are provided at the step between X-axis platform and platform base The second guideway of axis is provided with the second guideway of the first guideway of Y-axis and Y-axis at the step between X-axis platform and Y-axis platform, Gear is engaged with X-axis rack gear and Y-axis rack gear simultaneously；

The both ends of the upper plane of the platform base in X direction are provided with X-axis first grating scale and X-axis second grating scale, X-axis The upper plane of platform is provided with Y-axis first grating scale and Y-axis second grating scale, the front and back sides of X-axis platform along the both ends of Y-direction It is provided with X-axis first grating scale read head and X-axis second grating scale read head in, is provided with Y-axis in the left and right side pair of Y-axis platform First grating scale read head and Y-axis second grating scale read head, each grating ruler reading head and grating scale correspond.

2. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that: the platform bottom Block hole and X-axis platform through-hole pass through for gear.

3. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that: the Y-axis is flat Multiple rectangular through-holes are provided on platform.

4. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that: the electric rotating Machine can realize positive and negative movement.

5. the portable high acceleration macro/micromotion platform of one kind according to claim 1, it is characterised in that: each guide rail Pair is slide rail pair.