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CN209513049U - Spectrometer dispersive elements and spectrometer - Google Patents

Spectrometer dispersive elements and spectrometer Download PDF

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CN209513049U
CN209513049U CN201822216954.2U CN201822216954U CN209513049U CN 209513049 U CN209513049 U CN 209513049U CN 201822216954 U CN201822216954 U CN 201822216954U CN 209513049 U CN209513049 U CN 209513049U
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diffraction grating
spectrometer
dispersive elements
grating
diffraction
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秦嘉
吴小翠
安林
黄燕平
蓝公仆
谭海曙
陈国杰
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Guangdong Weiren Medical Technology Co ltd
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Foshan University
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Abstract

The utility model discloses a kind of spectrometer dispersive elements, the dispersive elements include diffraction grating one and diffraction grating two, the diffraction grating one is near-infrared transmission diffraction grating, the diffraction grating two is near-infrared reflection diffraction grating, and the limit that the limiting resolution of the diffraction grating one is less than the diffraction grating two divides ratio.Dispersive elements are by using double grating, incident directional light successively passes through the light splitting diffraction of diffraction grating one and diffraction grating two, can have stronger diffracting power, realizes more accurate wavelength measurement, to make spectrometer for the broadband light of bigger wave-length coverage, possess higher light splitting ability.

Description

光谱仪色散组件及光谱仪Spectrometer Dispersion Components and Spectrometers

技术领域technical field

本实用新型涉及光谱探测技术领域,具体涉及一种光谱仪色散组件及光谱仪。The utility model relates to the technical field of spectrum detection, in particular to a spectrometer dispersion component and a spectrometer.

背景技术Background technique

成像光谱仪是用来进行目标探测、识别和物质成分分析的主要仪器之一。它可以同时获取目标的几何特征分布和光谱特征信息,在地质勘察,环境监测、农林经济和科学研究等领域应用广泛。Imaging spectrometer is one of the main instruments used for target detection, identification and material composition analysis. It can obtain the geometric feature distribution and spectral feature information of the target at the same time, and is widely used in geological survey, environmental monitoring, agricultural and forestry economics, and scientific research.

成像光谱仪的分光功能由分光器件实现,其直接影响着光谱仪的分辨率等性能参数。分光器件通常由光栅、棱镜或者光栅-棱镜构成,各有优势。The spectroscopic function of the imaging spectrometer is realized by the spectroscopic device, which directly affects performance parameters such as the resolution of the spectrometer. Spectroscopic devices are usually composed of gratings, prisms, or grating-prisms, each with its own advantages.

专利文件CN201810184071.X《一种棱镜型空间外差光谱仪》,以及CN201711251506.X《一种双光栅共CCD光谱仪》中提到的利用两个色散元件对宽带光进行两次分光的光谱仪结构装置,其中《一种双光栅共CCD光谱仪》中提到的色散系统为两个光栅,该色散组在其装置系统中的功能主要是对两个谱段范围分别进行色散分光,对于需要对同一光源的宽带光进行高分辨成像需求是不能满足的。而《一种棱镜型空间外差光谱仪》专利文件中提到的色散系统为两个棱镜,系统具有超高的分辨率,适用探测大气遥感、天文观测等领域,然而空间外差光谱仪本身是一个干涉系统,对于复杂的相干光,其内部干涉信号变得复杂,其探测器的动态范围、精度、以及系统性能等将受到限制。The patent document CN201810184071.X "A Prism-Type Spatial Heterodyne Spectrometer" and CN201711251506.X "A Double Grating Co-CCD Spectrometer" mentioned in the spectrometer structure device that uses two dispersion elements to split the broadband light twice, Among them, the dispersion system mentioned in "A Double Grating Co-CCD Spectrometer" is two gratings. The function of the dispersion group in its device system is mainly to perform dispersion and splitting of the two spectral ranges. For the same light source The demand for high-resolution imaging with broadband light cannot be met. The dispersion system mentioned in the patent document "A Prism-Type Spatial Heterodyne Spectrometer" is two prisms. The system has ultra-high resolution and is suitable for detecting atmospheric remote sensing, astronomical observation and other fields. However, the space heterodyne spectrometer itself is a For an interference system, for complex coherent light, its internal interference signal becomes complex, and the dynamic range, precision, and system performance of its detector will be limited.

发明内容Contents of the invention

为解决现有技术存在的不足,本实用新型提供一种光谱仪色散组件及光谱仪。In order to solve the deficiencies in the prior art, the utility model provides a spectrometer dispersion component and a spectrometer.

解决其技术问题的解决方案是:一种光谱仪色散组件,所述色散组件包括衍射光栅一和衍射光栅二,所述衍射光栅一为近红外透射性衍射光栅,所述衍射光栅二为近红外反射性衍射光栅,所述衍射光栅一的极限分辨率小于所述衍射光栅二的极限分比率。The solution to solve its technical problem is: a spectrometer dispersion component, the dispersion component includes a diffraction grating one and a diffraction grating two, the diffraction grating one is a near-infrared transmissive diffraction grating, and the diffraction grating two is a near-infrared reflection grating diffraction grating, the limiting resolution of the first diffraction grating is smaller than the limiting resolution of the second diffraction grating.

进一步地,上述衍射光栅一为300刻线对的近红外透射性衍射光栅;所述衍射光栅二为1800刻线对的近红外反射性衍射光栅。Further, the first diffraction grating is a near-infrared transmissive diffraction grating with 300 rule pairs; the second diffraction grating is a near-infrared reflective diffraction grating with 1800 rule pairs.

进一步地,上述衍射光栅一和衍射光栅二的尺寸为20mm× 20mm—30mm×30mm。Further, the dimensions of the first diffraction grating and the second diffraction grating are 20mm×20mm-30mm×30mm.

本实用新型的另一方面还提供了一种包含上述色散组件的光谱仪。Another aspect of the utility model also provides a spectrometer comprising the above-mentioned dispersion component.

进一步地,上述光谱仪,还包括光纤接入模块、光聚焦模块、探测器模块。Further, the above-mentioned spectrometer also includes an optical fiber access module, a light focusing module, and a detector module.

进一步地,上述光纤接入模块包括光纤接入狭缝,光纤准直器。Further, the above fiber access module includes a fiber access slit and a fiber collimator.

进一步地,上述光聚焦模块为消色差聚焦柱透镜。Further, the above optical focusing module is an achromatic focusing cylindrical lens.

进一步地,上述消色差聚焦柱透镜的焦距为30-70mm。Further, the focal length of the achromatic focusing cylindrical lens is 30-70mm.

进一步地,上述探测器模块为线阵CCD。Further, the above-mentioned detector module is a linear array CCD.

进一步地,上述线阵CCD的像素点为4096。Further, the above linear CCD has 4096 pixels.

本实用新型的有益效果是:本实用新型的色散组件通过采用双光栅,可以具有更强的衍射本领,实现更准确的波长测量,从而是光谱仪对于更大波长范围的宽带光,拥有更高的分光本领。The beneficial effects of the utility model are: the dispersion component of the utility model can have stronger diffraction power by adopting double gratings, and realize more accurate wavelength measurement, so that the spectrometer has higher Spectroscopy.

附图说明Description of drawings

为了更清楚地说明本实用新型实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单说明。显然,所描述的附图只是本实用新型的一部分实施例,而不是全部实施例,本领域的技术人员在不付出创造性劳动的前提下,还可以根据这些附图获得其他设计方案和附图。In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following will briefly describe the accompanying drawings that are used in the description of the embodiments. Apparently, the drawings described are only some embodiments of the utility model, not all embodiments, and those skilled in the art can also obtain other designs and drawings according to these drawings without creative work.

图1是本实用新型实施例提供的色散组件示意图;Fig. 1 is a schematic diagram of a dispersion component provided by an embodiment of the present invention;

图2是本实用新型实施例提供的光谱仪结构示意图。Fig. 2 is a schematic structural diagram of a spectrometer provided by an embodiment of the present invention.

具体实施方式Detailed ways

以下将结合实施例和附图对本实用新型的构思、具体结构及产生的技术效果进行清楚、完整地描述,以充分地理解本实用新型的目的、特征和效果。显然,所描述的实施例只是本实用新型的一部分实施例,而不是全部实施例,基于本实用新型的实施例,本领域的技术人员在不付出创造性劳动的前提下所获得的其他实施例,均属于本实用新型保护的范围。本实用新型创造中的各个技术特征,在不互相矛盾冲突的前提下可以交互组合。The idea, specific structure and technical effects of the present utility model will be clearly and completely described below in conjunction with the embodiments and accompanying drawings, so as to fully understand the purpose, characteristics and effects of the present utility model. Apparently, the described embodiments are only some of the embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, other embodiments obtained by those skilled in the art without paying creative efforts, All belong to the protection scope of the utility model. Each technical feature in the invention of the utility model can be combined interactively under the premise of not conflicting with each other.

光栅是一种常见的分光元件,平行的单色光束照射到光栅上,会产生不同级次的衍射,平行的多色光光束照射到光栅上,会产生色散,以使不同波长均满足光栅方程。A grating is a common spectroscopic element. When a parallel monochromatic beam is irradiated on the grating, it will produce different orders of diffraction. When a parallel polychromatic beam is irradiated on the grating, it will cause dispersion, so that different wavelengths can satisfy the grating equation.

参考图1,本实用新型的光谱仪色散组件,包括衍射光栅一3和衍射光栅二4,衍射光栅一3为近红外透射性衍射光栅,衍射光栅二 4为近红外反射性衍射光栅,衍射光栅一3的极限分辨率小于衍射光栅二4的极限分比率。With reference to Fig. 1, the spectrometer dispersion assembly of the present utility model comprises diffraction grating one 3 and diffraction grating two 4, and diffraction grating one 3 is near-infrared transmissive diffraction grating, and diffraction grating two 4 is near-infrared reflective diffraction grating, and diffraction grating one The limit resolution of 3 is smaller than the limit ratio of diffraction grating 2 4.

各输出光线的衍射角是关于波长的线性分布,由于衍射光栅一3 光分辨率小于衍射光栅二,对于宽带光,其可连续经过衍射光栅一3 和衍射光栅二4从而实现高分辨率的分光。The diffraction angle of each output light is a linear distribution of the wavelength. Since the optical resolution of the diffraction grating 13 is smaller than that of the diffraction grating 2, for broadband light, it can continuously pass through the diffraction grating 1 3 and the diffraction grating 2 4 to achieve high-resolution light splitting .

在一实施例中,衍射光栅一3为300刻线对的近红外透射性衍射光栅;衍射光栅二4为1800刻线对的近红外反射性衍射光栅。In one embodiment, the first diffraction grating 3 is a near-infrared transmissive diffraction grating with 300 rule pairs; the second diffraction grating 4 is a near-infrared reflective diffraction grating with 1800 rule pairs.

光栅的极限分辨率:Δλ=λ/(mN),其中λ波长,m级次, N光束在光栅上覆盖的线数。因此同样条件下,刻线对越多,光栅分辨率越高。The limiting resolution of the grating: Δλ=λ/(mN), where λ wavelength, m order, and the number of lines covered by N beams on the grating. Therefore, under the same conditions, the more reticle pairs, the higher the grating resolution.

具体地,对该实施例的色散组件,准直后的平行光经过首先经过 300刻线对的近红外透射性衍射光栅一3,以光栅闪耀角度入射在光栅面,以固定角度发散,取一阶衍射,对应波长的衍射角度可以根据光栅方程计算得到,即衍射角θi可表示为:其中λ代表波长, d为光栅长度。其理论的光差分辨率定义为:其中N为照射的凹痕数量,m为衍射阶数,这样可以计算后准直后的光束的直径的理论值近似值。接着,来自衍射光栅一3的第一级衍射分光的各光线将以固定的衍射角射θi入,当光以一定方向射入衍射光栅二4时,其光栅表达式为:a[sin(θm)-sin(θi)]=mλ。其中a为1/1800,则经过第二级光栅后的宽带光的光差分辨率将增大,实现超大衍射角的光谱色散衍射图。Specifically, for the dispersion component of this embodiment, the collimated parallel light first passes through a near-infrared transmissive diffraction grating-3 with 300 reticle pairs, is incident on the grating surface at a grating blaze angle, and diverges at a fixed angle, taking a order diffraction, the diffraction angle corresponding to the wavelength can be calculated according to the grating equation, that is, the diffraction angle θ i can be expressed as: Where λ represents the wavelength and d is the grating length. Its theoretical light difference resolution is defined as: where N is the number of dents irradiated and m is the diffraction order, so that an approximation of the theoretical value of the post-collimated beam diameter can be calculated. Next, each ray of light from the first-order diffraction of the diffraction grating 1 3 will enter at a fixed diffraction angle θ i . When the light enters the diffraction grating 2 4 in a certain direction, its grating expression is: a[sin( θ m )-sin(θ i )]=mλ. Where a is 1/1800, the optical difference resolution of the broadband light after passing through the second-level grating will increase, and a spectral dispersion diffraction pattern with a super large diffraction angle will be realized.

衍射光栅一3和衍射光栅二4的尺寸通常为20mm×20mm— 30mm×30mm,如25mm×25mm,20mm×20mm等。The dimensions of the first diffraction grating 3 and the second diffraction grating 4 are usually 20mm×20mm-30mm×30mm, such as 25mm×25mm, 20mm×20mm and so on.

参考图2,为本实用新型的一包含上述色散组件的光谱仪结构示意图,其依次包括光纤接入模块、色散组件、光聚焦模块5、探测器 6。Referring to FIG. 2 , it is a schematic structural diagram of a spectrometer including the dispersion component of the present invention, which includes an optical fiber access module, a dispersion component, an optical focusing module 5, and a detector 6 in sequence.

其中,光纤接入模块包括光纤接入狭缝1,光纤准直器2。色散模块包括衍射光栅一3和衍射光栅二4,其中两光栅的参数分别为: 25毫米x25毫米尺寸大小的300刻线对的近红外透射性衍射光栅以及1800刻线对的近红外反射性衍射光栅。Wherein, the fiber access module includes a fiber access slit 1 and a fiber collimator 2 . The dispersion module includes a diffraction grating 1 3 and a diffraction grating 2 4, and the parameters of the two gratings are respectively: a near-infrared transmissive diffraction grating with 300 reticle pairs and a near-infrared reflective diffraction grating with 1800 reticle pairs in the size of 25 mm x 25 mm raster.

来自光纤接狭缝1的入射宽带光首先经过光纤准直器2进行准直,将入射的发散光准直为平行光,平行光首先经过300刻线对的衍射光栅3,接着,各不同波长的光将以固定的衍射角射出,然后射入 1800刻线对的衍射光栅4,光经过两个光栅后将实现在同一方向上的高精度分光,最后由光聚焦模块5将衍射光聚焦于探测器6上。The incident broadband light from the fiber optic slit 1 is first collimated by the fiber collimator 2, and the incident divergent light is collimated into parallel light. The parallel light first passes through the diffraction grating 3 with 300 reticle pairs, and then, each different wavelength The light will be emitted at a fixed diffraction angle, and then enter the diffraction grating 4 with 1800 reticle pairs. After the light passes through the two gratings, high-precision light splitting in the same direction will be realized. on detector 6.

光聚焦模块5可以为消色差聚焦柱透镜,优选地,消色差聚焦柱透镜的焦距为30-70mm,如30mm,40mm,45mm,50mm,55mm, 60mm,65mm,70mm等。The optical focusing module 5 can be an achromatic focusing cylindrical lens. Preferably, the focal length of the achromatic focusing cylindrical lens is 30-70mm, such as 30mm, 40mm, 45mm, 50mm, 55mm, 60mm, 65mm, 70mm, etc.

探测器6可以为线阵CCD,优选地,线阵CCD的像素点为4096。The detector 6 may be a linear CCD, preferably, the linear CCD has 4096 pixels.

进一步地,探测器6接收到的信号可以传输到计算机中进行成像。Further, the signal received by the detector 6 can be transmitted to a computer for imaging.

综上,本实用新型的色散组件通过采用双光栅,入射的平行光依次经过衍射光栅一和衍射光栅二的分光衍射,可以具有更强的衍射本领,实现更准确的波长测量,从而使光谱仪对于更大波长范围的宽带光,拥有更高的分光本领。In summary, the dispersion component of the present invention adopts double gratings, and the incident parallel light passes through the first diffraction grating and the second diffraction grating in turn, so that it can have stronger diffraction power and achieve more accurate wavelength measurement, so that the spectrometer can be used for Broadband light with a larger wavelength range has higher spectral power.

以上对本实用新型的较佳实施方式进行了具体说明,但本发明创造并不限于所述实施例,熟悉本领域的技术人员在不违背本发明精神的前提下还可作出种种的等同变型或替换,这些等同的变型或替换均包含在本申请权利要求所限定的范围内。The preferred embodiments of the present utility model have been specifically described above, but the present invention is not limited to the described embodiments, and those skilled in the art can also make various equivalent modifications or replacements without violating the spirit of the present invention. , these equivalent modifications or replacements are all included within the scope defined by the claims of the present application.

Claims (10)

1. a kind of spectrometer dispersive elements, it is characterised in that: the dispersive elements include diffraction grating one and diffraction grating two, institute Stating diffraction grating one is near-infrared transmission diffraction grating, and the diffraction grating two is near-infrared reflection diffraction grating, described The limit that the limiting resolution of diffraction grating one is less than the diffraction grating two divides ratio.
2. dispersive elements according to claim 1, which is characterized in that the diffraction grating one is the close red of 300 grooves pair Outer transmittance diffraction grating;The diffraction grating two is the near-infrared reflection diffraction grating of 1800 grooves pair.
3. dispersive elements according to claim 1 or 2, which is characterized in that the diffraction grating one and diffraction grating two Having a size of 20mm × 20mm -30mm × 30mm.
4. a kind of spectrometer, which is characterized in that including dispersive elements as described in any one of claims 1-3.
5. spectrometer according to claim 4, which is characterized in that further include intelligent acess module, light focus module, detection Device module.
6. spectrometer according to claim 5, which is characterized in that the intelligent acess module includes intelligent acess slit, Optical fiber collimator.
7. spectrometer according to claim 5, which is characterized in that the smooth focus module is achromatism focal lens.
8. spectrometer according to claim 7, which is characterized in that the focal length of the achromatism focal lens is 30- 70mm。
9. spectrometer according to claim 5, which is characterized in that detector module is line array CCD.
10. spectrometer according to claim 9, which is characterized in that the pixel of the line array CCD is 4096.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109682474A (en) * 2018-12-27 2019-04-26 佛山科学技术学院 Spectrometer dispersive elements and spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109682474A (en) * 2018-12-27 2019-04-26 佛山科学技术学院 Spectrometer dispersive elements and spectrometer

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