CN209435132U - power conversion device - Google Patents

Abstract

The utility model provides a power conversion device, which can not only ensure the necessary insulation distance, but also reduce the overall size of the power conversion device. The power conversion device includes: a switching element, one of which has a first electrode and a second electrode for inputting a driving signal; a first substrate, including a first conductive layer facing the first electrode, a first electrical insulating layer, and a second conductive layer arranged on the opposite side of the first conductive layer via the first electrically insulating layer; and a connection line connecting the second electrode and the drive signal input part, and the The first electrode is electrically connected to the first conductive layer of the first substrate, and the end of the first conductive layer on the side of the drive signal input part The end portion on the side of the drive signal input portion is located on a side away from the drive signal input portion.

Description

power conversion device

technical field

The utility model relates to a power conversion device.

Background technique

Conventionally, a hybrid vehicle including a hybrid power control unit is known (for example, refer to Patent Document 1). The hybrid power control unit includes: a power module internally provided with a chip that generates heat during operation; and a cooler that cools the heat from the power module. In the hybrid power supply control unit, there is provided a chip welding interface material for bonding the chip and the power module to form an internal solder layer. The lower temperature solder interface material bonds the power module and cooler to form the outer solder layer.

[Prior art literature]

[Patent Document]

Patent Document 1: Specification of US Patent Application Publication No. 2017/0096066

Utility model content

[Problems to be solved by the utility model]

However, in the above-mentioned hybrid vehicle, no sufficient attention has been paid to how to configure the member electrically connected to the first electrode on one side of the switching element and the second electrode connected to the input drive signal on one side of the switching element. Connecting wires to ensure the necessary insulation distance and reduce the size of the power module as a whole. Therefore, in the above-mentioned hybrid vehicle, the entire power module has not yet been sufficiently miniaturized.

In view of the above problems, an object of the present invention is to provide a power conversion device capable of reducing the size of the power conversion device while ensuring a necessary insulation distance.

[Technical means to solve the problem]

(1) A power conversion device according to an embodiment of the present invention includes: a switching element, a first electrode and a second electrode for inputting a driving signal are disposed on one side thereof; a first substrate includes a first electrode facing the first electrode. 1 conductive layer, a first electrically insulating layer, and a second conductive layer disposed on the opposite side of the first electrically insulating layer via the first electrically insulating layer; and a connecting line connecting the second electrode and the drive A signal input part, the first electrode of the switching element is electrically connected to the first conductive layer of the first substrate, and the end of the first conductive layer on the side of the drive signal input part is compared to An end portion of the second conductive layer on the side of the drive signal input portion is located on a side away from the drive signal input portion.

(2) In the power conversion device described in (1), a third electrode may be arranged on the other surface of the switching element, the power conversion device may further include a second substrate, and the second The substrate includes a third conductive layer facing the third electrode, a second electrical insulating layer, and a fourth conductive layer disposed on the opposite side of the third conductive layer via the second electrical insulating layer, so The third electrode is electrically connected to the third conductive layer, and the end of the third conductive layer on the side of the drive signal input part is compared with the end part of the fourth conductive layer on the side of the drive signal input part. The end portion is located on the side away from the drive signal input portion.

(3) In the power conversion device described in (2), the end portion of the first conductive layer on the side of the drive signal input unit may be smaller than the end portion of the third conductive layer. The end portion on the side of the drive signal input portion is located on the side away from the drive signal input portion.

(4) The power conversion device described in any one of (1) to (3) may further include: a spacer having one side electrically connected to the first conductive layer, and an electrically connected On the other surface of the first electrode, the end portion of the first conductive layer is more than the thickness of the first conductive layer, compared to the side of the drive signal input portion in the spacer. The end portion is located on the side of the drive signal input portion.

[effect of utility model]

In the power conversion device described in (1), the first substrate includes a first conductive layer, a first electrical insulating layer, and a second conductive layer disposed on the opposite side of the first conductive layer via the first electrical insulating layer. Floor. The first conductive layer is electrically connected to the first electrode arranged on one surface of the switching element. The drive signal input unit is connected to the second electrode arranged on one surface of the switching element through a connection line. An end of the first conductive layer on the drive signal input portion side is located farther from the drive signal input portion than an end of the second conductive layer on the drive signal input portion side.

Therefore, in the power conversion device described in (1), the end of the first conductive layer on the side of the drive signal input part is located at a distance from the end of the second conductive layer on the side of the drive signal input part. When the signal input parts are equidistant, the insulation distance between the first conductive layer and the connection wire can be ensured, and the size of the power conversion device can be reduced. Specifically, the size of the power conversion device can be reduced in the thickness direction of the switching element.

That is, in the power conversion device described in (1), the size of the power conversion device can be reduced while ensuring a necessary insulation distance.

In the power conversion device described in (2), the second substrate includes a third conductive layer, a second electrical insulating layer, and a fourth conductive layer disposed on the opposite side of the third conductive layer via the second electrical insulating layer. Floor. The third conductive layer is electrically connected to the third electrode arranged on the other surface of the switching element. An end of the third conductive layer on the drive signal input portion side is located farther from the drive signal input portion than an end of the fourth conductive layer on the drive signal input portion side.

Therefore, in the power conversion device described in (2), the end portion on the drive signal input portion side of the third conductive layer is located farther from the drive signal input portion side than the end portion of the fourth conductive layer on the drive signal input portion side. When the signal input parts are equidistant, the insulation distance between the third conductive layer and the connection wire can be ensured, and the size of the power conversion device can be reduced. Specifically, the size of the power conversion device can be reduced in the width direction of the switching element.

In the power conversion device described in (3), the end of the first conductive layer on the side of the drive signal input part is located farther from the drive signal input than the end of the third conductive layer on the side of the drive signal input part. side of the department.

Therefore, in the power conversion device described in (3), the end portion on the drive signal input portion side of the first conductive layer is located at a distance from the drive signal input portion side of the third conductive layer. When the signal input parts are equidistant, the insulation distance between the first conductive layer and the connecting wire can be ensured.

The power conversion device described in (4) further includes a spacer that electrically connects the first conductive layer and the first electrode. In the power conversion device described in (4), the end portion of the first conductive layer on the side of the drive signal input portion is equal to or greater than the thickness of the first conductive layer, compared to the end portion of the spacer portion on the side of the drive signal input portion. The end is located on the side of the drive signal input part.

Therefore, in the power conversion device described in (4), it is possible to suppress the possibility that the diffusion of heat generated by the switching element is hindered.

Description of drawings

FIG. 1 is a diagram showing an example of a schematic vertical cross-section of a main part of a power conversion device according to a first embodiment.

FIG. 2 is a diagram showing only switching elements in FIG. 1 .

FIG. 3 is a diagram for explaining features of the power conversion device according to the first embodiment.

4 is a vertical cross-sectional view of main parts of a power conversion device of a comparative example.

Fig. 5 is an exploded perspective view of an example of a power conversion device according to a second embodiment.

6(A) and 6(B) are diagrams showing an example of a schematic vertical cross-section of a main part of a power conversion device according to a second embodiment.

FIG. 7 is a diagram showing only the low-side switching elements in FIG. 6(B) extracted.

8 is a diagram showing an example of a schematic vertical cross-section of main parts on the high side of a power conversion device according to a third embodiment.

9 is a diagram showing an example of a schematic vertical cross-section of main parts on the lower side of a power conversion device according to a third embodiment.

FIG. 10 is a diagram showing an example of a part of a vehicle to which the power conversion devices of the first to third embodiments are applicable.

[explanation of the symbol]

1: Power conversion device

UH: switching element

UHA: face

UHA1: electrode

UHB: surface

UHB1: electrode

UHB2: electrode

UL: switching element

ULA: surface

ULA1: electrode

ULB: surface

ULB1: electrode

ULB2: electrode

SA: Substrate

SA1: electrical insulating layer

SA2A: Conductive layer

SA2A1: end

tSA2A: Thickness

X: amount of protrusion

PSA: upper position

SA2B: Conductive layer

SA2B1: end

SA3: Conductive layer

SA3A: end

SA3B: end

SB: Substrate

SB1: electrical insulating layer

SB2: conductive layer

SB2A: end

SB2B: end

SB3A: Conductive layer

SB3A1: end

SB3B: Conductive layer

SB3B1: end

SH: Drive signal input section

SL: Drive signal input section

SPUH: septal part

SUH1: end

PSP: upper position

SPUL: Partition

SPUL1: end

WH: connection line

WL: connection line

10: Vehicle

Detailed ways

Hereinafter, embodiments of the power conversion device of the present invention will be described with reference to the drawings.

<First Embodiment>

FIG. 1 is a diagram showing an example of a schematic vertical cross-section of a main part of a power conversion device 1 according to a first embodiment. FIG. 2 is a diagram showing only the switching element UH in FIG. 1 . FIG. 3 is a diagram illustrating features of the power conversion device 1 according to the first embodiment. FIG. 4 is a vertical cross-sectional view of main parts of a power conversion device 1 of a comparative example.

In the example shown in FIGS. 1 to 3 , the power conversion device 1 includes a switching element UH, a substrate SA, a substrate SB, a drive signal input portion SH, a spacer portion SPUH, and a connection wire WH.

The switch element UH is, for example, an insulated gate bipolar transistor (Insulated Gate Bipolar Transistor, IGBT), a metal oxide semiconductor field effect transistor (Metal Oxide Semi-conductor Field Effect Transistor, MOSFET) and the like.

As shown in FIG. 2 , on one (upper side in FIG. 2 ) surface UHB of the switching element UH, an electrode UHB1 and an electrode UHB2 for inputting a drive signal are disposed. On the other (lower side in FIG. 2 ) surface UHA of switching element UH, electrode UHA1 is arranged.

In the example shown in FIGS. 1 to 3 , the substrate SA includes a conductive layer SA2A facing the electrode UHB1 of the switching element UH, an electrical insulating layer SA1 , and a conductive layer SA1 arranged on the opposite side of the conductive layer SA2A through the electrical insulating layer SA1. Layer SA3. The electrode UHB2 of the switching element UH is connected to the drive signal input part SH via a connection wire WH such as a bonding wire, for example. Electrode UHB1 of switching element UH is electrically connected to conductive layer SA2A of substrate SA via spacer SPUH formed of a conductor.

In the example shown in FIGS. 1 to 3 , the substrate SB includes a conductive layer SB3A facing the electrode UHA1 of the switching element UH, an electrical insulating layer SB1 , and a conductive layer SB3A arranged on the opposite side of the conductive layer SB3A through the electrical insulating layer SB1 . Layer SB2. The electrode UHA1 of the switching element UH is electrically connected to the conductive layer SB3A of the substrate SB.

Each of the substrate SA and the substrate SB is, for example, a direct copper bonding (DCB) substrate. That is, the DCB substrate includes a ceramic substrate and copper plates provided on both sides in the thickness direction of the ceramic substrate. The two copper plates sandwich the ceramic substrate from both sides in the thickness direction, and are electrically insulated by the ceramic substrate.

Heat sinks (not shown) are disposed on the outer sides of the substrate SA (upper side in FIG. 1 ) and the outer side of the substrate SB (lower side in FIG. 1 ), respectively, and the switching elements UH are cooled by the heat sinks.

In the examples shown in FIGS. 1 to 3, the electrode UHA1 of the switching element UH is electrically connected to the conductive layer SB3A of the substrate SB having the electrically insulating layer SB1, the conductive layer SB3A, and the conductive layer SB2, but in other examples, the electrode UHA1 of the switching element The object to which the electrode UHA1 of the UH is electrically connected may not have an electrically insulating layer such as the electrically insulating layer SB1 and a conductive layer such as the conductive layer SB2 that is not electrically connected to the electrode UHA1 of the switching element UH.

In the examples shown in FIGS. 1 to 3 , the end portion SA2A1 on the drive signal input portion SH side (the right side of FIG. 1 ) in the conductive layer SA2A of the substrate SA is compared with the drive signal input portion SA3 in the conductive layer SA3 of the substrate SA. The end portion SA3A on the SH side (the right side in FIG. 1 ) is located on the side away from the drive signal input portion SH (the left side in FIG. 1 ). Therefore, as indicated by the double-headed arrow in FIG. 1 , the insulation distance between the conductive layer SA2A of the substrate SA and the connection wire WH is ensured in the width direction of the switching element UH (left-right direction in FIG. 1 ).

On the other hand, in the comparative example shown in FIG. 4 , the end portion SA2A1 on the side of the drive signal input portion SH (the right side of FIG. 4 ) in the conductive layer SA2A of the substrate SA is connected to the drive signal in the conductive layer SA3 of the substrate SA. End SA3A on the side of input portion SH (right side in FIG. 4 ) is located equidistant from drive signal input portion SH in the width direction (left-right direction in FIG. 4 ) of switching element UH. Therefore, as shown by the double-headed arrow in FIG. 4 , it is necessary to ensure an insulating distance between the conductive layer SA2A of the substrate SA and the connection wire WH in the thickness direction of the switching element UH (up-and-down direction in FIG. 4 ). Furthermore, in the comparative example shown in FIG. 4 , since the spacer portion SPUH is thick, the inductance Ls of the power conversion device 1 increases.

As described above, in the examples shown in FIGS. 1 to 3 , the insulation distance between the conductive layer SA2A of the substrate SA and the connection wire WH is ensured in the width direction of the switching element UH (left-right direction in FIG. 1 ), so Compared with the comparative example shown in FIG. 4 , the overall size of the power conversion device 1 can be downsized in the thickness direction of the switching element UH (vertical direction in FIG. 1 ). Furthermore, in the examples shown in FIGS. 1 to 3 , since the spacer portion SPUH is thinner than the comparative example shown in FIG. 4 , the inductance Ls of the power conversion device 1 can be suppressed.

That is, in the examples shown in FIGS. 1 to 3 , the insulation distance between the conductive layer SA2A of the substrate SA and the connection wire WH can be ensured, and the overall power conversion device 1 can be reduced compared to the comparative example shown in FIG. 4 . Miniaturized size.

Furthermore, in the examples shown in FIGS. 1 to 3 , the end portion SA3A of the conductive layer SA3 of the substrate SA can be extended to the drive signal input portion SH side (right side in FIG. 1 ), thereby ensuring high cooling performance.

In the example shown in FIGS. 1 to 3 , one (upper side in FIG. 1 ) surface of the spacer SPUH is electrically connected to the conductive layer SA2A of the substrate SA. The other (lower side in FIG. 1 ) surface of the spacer SPUH is electrically connected to the electrode UHB1 of the switching element UH.

As shown in FIG. 3 , the end portion SA2A1 on the drive signal input portion SH side (right side in FIG. 3 ) in the conductive layer SA2A of the substrate SA is compared to the end portion SA2A1 on the drive signal input portion SH side (right side in FIG. 3 ) in the spacer SPUH. The end SPUH1 on the side) is located on the side of the drive signal input part SH (the right side in FIG. 3 ). That is, the end portion SA2A1 of the conductive layer SA2A of the substrate SA protrudes toward the drive signal input portion SH side (the right side in FIG. 3 ) rather than the end portion SPUH1 of the spacer portion SPUH.

After intensive research by the creators, it was found that if the end portion SA2A1 of the conductive layer SA2A of the substrate SA protrudes toward the side of the drive signal input portion SH (right side of FIG. 3 ) with respect to the end portion SPUH1 of the spacer SPUH, , the thermal resistance becomes large, and as a result, the diffusion of the heat generated by the switching element UH is hindered.

In view of this, in the examples shown in FIGS. 1 to 3 , the end portion SA2A1 of the conductive layer SA2A of the substrate SA faces the drive signal input portion SH side (the right side in FIG. 3 ) with respect to the end portion SPUH1 of the spacer portion SPUH. The protrusion amount X is set to a value equal to or greater than the thickness tSA2A of the conductive layer SA2A. That is, end SA2A1 of conductive layer SA2A of substrate SA is located on the drive signal input portion SH side (right side in FIG. 3 ) than end SPUH1 of spacer SPUH by thickness tSA2A or more of conductive layer SA2A. That is, the angle θ formed by the straight line connecting the upper end position PSP of the end portion SPUH1 of the spacer SPUH in FIG. ° below the value.

Therefore, in the examples shown in FIGS. 1 to 3 , it is possible to suppress the possibility that the diffusion of the heat generated by the switching element UH is hindered. In the examples shown in FIGS. 1 to 3 , the heat generated by the switching element UH is diffused through the spacer SPUH and the substrate SA.

When the power conversion device 1 shown in FIGS. 1 to 3 is applied to the high side (for example, U is equal), the conductive layer SB3A of the substrate SB is electrically connected to the positive side conductor (P bus bar), and the conductive layer SB3A of the substrate SA Layer SA2A is electrically connected to the output-side conductor (output bus bar).

In the case where the power conversion device 1 shown in FIGS. 1 to 3 is applied to the low side (for example, U is equal), the conductive layer SB3A of the substrate SB is electrically connected to the output-side conductor (output bus bar), and the conductive layer SB3A of the substrate SA Layer SA2A is electrically connected to the negative electrode side conductor (N bus bar).

<Second Embodiment>

Hereinafter, a second embodiment of the power conversion device 1 of the present invention will be described.

The power conversion device 1 of the second embodiment is configured in the same manner as the power conversion device 1 of the first embodiment except for points described later. Therefore, according to the power conversion device 1 of the second embodiment, the same effects as those of the power conversion device 1 of the first embodiment are exhibited except for the points described later.

FIG. 5 is an exploded perspective view of an example of the power conversion device 1 according to the second embodiment.

In the example shown in FIG. 5 , the power conversion device 1 includes a high-side switching element UH, a low-side switching element UL, a substrate SA, a substrate SB, a high-side drive signal input part SH, a low-side drive signal input part SL, a high-side spacer part SPUH, the low-side spacer part SPUL, the high-side connecting line WH (see FIG. 6(A)), and the low-side connecting line WL (see FIG. 6(B)).

6(A) and 6(B) are diagrams showing an example of a schematic vertical cross-section of a main part of the power conversion device 1 according to the second embodiment. In detail, FIG. 6(A) is a diagram showing a vertical cross-section of main parts on the high side of the power conversion device 1 . FIG. 6(B) is a diagram showing a vertical cross-section of main parts on the lower side of the power conversion device 1 . FIG. 7 is a diagram showing only the low-side switching element UL in FIG. 6(B) extracted.

In the examples shown in FIGS. 5 to 7 , the switching element UL is the same as the switching element UH, for example, an insulated gate bipolar transistor (Insulated Gate Bipolar Transistor, IGBT), a metal oxide semiconductor field effect transistor (Metal Oxide Semi-conductor) Field Effect Transistor, MOSFET) and other switching elements.

As shown in FIG. 7 , on one (upper side in FIG. 7 ) surface ULB of the switching element UL, an electrode ULB1 and an electrode ULB2 for inputting a drive signal are arranged. On the other (lower side in FIG. 7 ) surface ULA of the switching element UL, an electrode ULA1 is arranged.

In the examples shown in FIGS. 5 to 7, the substrate SA includes a conductive layer SA2A facing the electrode UHB1 of the switching element UH, a conductive layer SA2B facing the electrode ULB1 of the switching element UL, an electrical insulating layer SA1, and an electrically insulating layer SA1. Conductive layer SA3 is disposed on the opposite side of conductive layers SA2A and SA2B from layer SA1.

The electrode UHB2 of the switching element UH is connected to the drive signal input part SH via a connection wire WH such as a bonding wire, for example. Electrode UHB1 of switching element UH is electrically connected to conductive layer SA2A of substrate SA via spacer SPUH.

The electrode ULB2 of the switching element UL is connected to the drive signal input part SL through, for example, a connection wire WL such as a bonding wire. Electrode ULB1 of switching element UL is electrically connected to conductive layer SA2B of substrate SA via spacer SPUL.

In the examples shown in FIGS. 5 to 7 , the substrate SB includes a conductive layer SB3A facing the electrode UHA1 of the switching element UH, a conductive layer SB3B facing the electrode ULA1 of the switching element UL, an electrical insulating layer SB1, and an electrically insulating layer SB1. Conductive layer SB2 is disposed on the opposite side of conductive layers SB3A and SB3B from layer SB1.

The electrode UHA1 of the switching element UH is electrically connected to the conductive layer SB3A of the substrate SB. The electrode ULA1 of the switching element UL is electrically connected to the conductive layer SB3B of the substrate SB.

The conductive layer SA2A of the substrate SA and the conductive layer SB3B of the substrate SB are electrically connected through a connection part (not shown).

In the examples shown in FIGS. 5 to 7 , the end portion SA2A1 on the drive signal input portion SH side (the right side in FIG. 6(A)) in the conductive layer SA2A of the substrate SA is smaller than the end portion SA2A1 in the conductive layer SA3 of the substrate SA. End SA3A on the drive signal input portion SH side (right side in FIG. 6(A) ) is located away from the drive signal input portion SH side (left side in FIG. 6(A) ). Therefore, as shown by the double-headed arrow in FIG. 6(A), the insulation distance between the conductive layer SA2A of the substrate SA and the connection wire WH is ensured in the width direction of the switching element UH (left-right direction in FIG. 6(A) ). .

The end portion SA2B1 of the drive signal input portion SL side (the left side of FIG. 6(B)) in the conductive layer SA2B of the substrate SA is compared to the end portion SA2B1 of the drive signal input portion SL side in the conductive layer SA3 of the substrate SA (FIG. 6(B) ) on the left side) end SA3B is located on the side away from the drive signal input portion SL (right side in FIG. 6(B) ). Therefore, as shown by the double-headed arrow in FIG. 6(B), the insulation distance between the conductive layer SA2B of the substrate SA and the connection wire WL is ensured in the width direction of the switching element UL (left-right direction in FIG. 6(B) ). .

As described above, in the examples shown in FIGS. 5 to 7 , the insulation distance between the conductive layer SA2A of the substrate SA and the connection wire WH is ensured in the width direction of the switching element UH (left-right direction in FIG. 6(A) ). Since the insulation distance between the conductive layer SA2B of the substrate SA and the connecting wire WL is ensured in the width direction of the switching element UL (left-right direction in FIG. The thickness direction of UH and UL (up-and-down direction in FIG. 6(A) and FIG. 6(B) ) is miniaturized.

In the examples shown in FIGS. 5 to 7 , one (upper side in FIG. 6(B) ) surface of the spacer SPUL is electrically connected to the conductive layer SA2B of the substrate SA. The other (lower side in FIG. 6(B) ) surface of spacer SPUL is electrically connected to electrode ULB1 of switching element UL.

As shown in FIG. 6(B), the end portion SA2B1 on the side of the drive signal input portion SL (the left side of FIG. 6(B)) in the conductive layer SA2B of the substrate SA is smaller than the end portion SA2B1 of the drive signal input portion SL in the spacer SPUL. The end portion SPUL1 on the side (the left side of FIG. 6(B) ) is located on the drive signal input portion SL side (the left side of FIG. 6(B )). That is, the end portion SA2B1 of the conductive layer SA2B of the substrate SA protrudes toward the drive signal input portion SL side (the left side in FIG. 6(B) ) rather than the end portion SPUL1 of the spacer portion SPUL.

In the examples shown in FIGS. 5 to 7 , the end portion SA2B1 of the conductive layer SA2B of the substrate SA faces the drive signal input portion SL side (the left side of FIG. 6(B) ) with respect to the end portion SPUL1 of the spacer portion SPUL. The protrusion amount is set to a value equal to or greater than the thickness of the conductive layer SA2B. That is, the end portion SA2B1 of the conductive layer SA2B of the substrate SA is located on the drive signal input portion SL side (left side in FIG. 6(B) ) than the end portion SPUL1 of the spacer SPUL by the thickness of the conductive layer SA2B.

Therefore, in the examples shown in FIGS. 5 to 7 , it is possible to suppress the possibility that the diffusion of the heat generated in the switching element UL is hindered.

In the examples shown in FIGS. 5 to 7 , the conductive layer SB3A of the substrate SB is connected to the positive electrode side conductor (P bus bar). The conductive layer SA2A of the substrate SA and the conductive layer SB3B of the substrate SB are electrically connected to an output-side conductor (output bus bar). The conductive layer SA2A of the substrate SA is electrically connected to the negative electrode side conductor (N bus bar).

<Third embodiment>

Hereinafter, a third embodiment of the power conversion device 1 of the present invention will be described.

The power conversion device 1 of the third embodiment is configured in the same manner as the power conversion device 1 of the second embodiment except for points described later. Therefore, according to the power conversion device 1 of the third embodiment, the same effects as those of the power conversion device 1 of the second embodiment are exhibited except for the points described later.

FIG. 8 is a diagram showing an example of a schematic vertical cross-section of main parts on the high side of the power conversion device 1 according to the third embodiment. FIG. 9 is a diagram showing an example of a schematic vertical cross-section of main parts on the lower side of the power conversion device 1 according to the third embodiment.

In the power conversion device 1 according to the second embodiment shown in FIG. The positions of the right end portions of the conductive layer SB2 are identical.

On the other hand, in the power conversion device 1 of the third embodiment shown in FIG. 8 , the position of the right end portion SB3A1 of the conductive layer SB3A of the substrate SB in the width direction of the switching element UH (left-right direction in FIG. 8 ) and the conductive The position of the right end portion SB2A of the layer SB2 is different.

In detail, in the example shown in FIG. 8 , the end portion SB3A1 on the drive signal input portion SH side (the right side of FIG. 8 ) in the conductive layer SB3A of the substrate SB is smaller than the end portion SB3A1 of the drive signal input portion SH in the conductive layer SB2. The end portion SB2A on the side (the right side of FIG. 8 ) is located on the side away from the drive signal input portion SH (the left side of FIG. 8 ).

Therefore, in the example shown in FIG. 8 , the position of the right end portion of the conductive layer SB3A of the substrate SB in the width direction of the switching element UH (the left-right direction of FIG. 6(A) ) is compared with the position of the right end portion of the conductive layer SB2 . The example shown in FIG. 6(A) with consistent positions can not only ensure the insulation distance between the conductive layer SB3A of the substrate SB and the connecting wire WH, but also make the switching element UH in the width direction (the left-right direction of FIG. 8 ) The overall size of the power conversion device 1 is reduced. That is, in the example shown in FIG. 8 , the drive signal input portion SH can be brought closer to the electrode UHB2 of the switching element UH than in the example shown in FIG. 6(A).

Moreover, in the example shown in FIG. 8 , the end portion SA2A1 on the drive signal input portion SH side (the right side of FIG. 8 ) in the conductive layer SA2A of the substrate SA is compared with the drive signal input portion in the conductive layer SB3A of the substrate SB. The end SB3A1 on the SH side (right side in FIG. 8 ) is located on the side away from the drive signal input portion SH (left side in FIG. 8 ).

Therefore, compared with the case where the position of the right end portion of the conductive layer SA2A of the substrate SA in the width direction (left-right direction of FIG. 8 ) of the switching element UH coincides with the position of the right end portion of the conductive layer SB3A of the substrate SB, it is possible to ensure that the substrate The insulation distance between the conductive layer SA2A of SA and the connecting wire WH.

In the power conversion device 1 according to the second embodiment shown in FIG. The positions of the left end portions of the conductive layer SB2 are identical.

On the other hand, in the power conversion device 1 of the third embodiment shown in FIG. 9 , the position of the left end portion SB3B1 of the conductive layer SB3B of the substrate SB in the width direction of the switching element UL (left-right direction in FIG. 9 ) and the conductive The position of the left end portion SB2B of the layer SB2 is different.

In detail, in the example shown in FIG. 9 , the end portion SB3B1 on the side of the drive signal input portion SL (the left side in FIG. 9 ) in the conductive layer SB3B of the substrate SB is smaller than the end portion SB3B1 of the drive signal input portion SL in the conductive layer SB2. The end portion SB2B on the side (left side in FIG. 9 ) is located on the side (right side in FIG. 9 ) away from the drive signal input portion SL.

Therefore, in the example shown in FIG. 9 , compared with the position of the left end portion of the conductive layer SB3B of the substrate SB in the width direction of the switching element UL (the left-right direction of FIG. 6(B) ) and the position of the left end portion of the conductive layer SB2 The example shown in FIG. 6(B) with consistent positions can not only ensure the insulation distance between the conductive layer SB3B of the substrate SB and the connecting wire WL, but also make the width direction of the switching element UL (the left-right direction of FIG. 9 ) The overall size of the power conversion device 1 is reduced. That is, in the example shown in FIG. 9 , compared with the example shown in FIG. 6(B), it is possible to bring the drive signal input portion SL closer to the electrode ULB2 of the switching element UL.

Moreover, in the example shown in FIG. 9 , the end portion SA2B1 on the drive signal input portion SL side (the left side in FIG. 9 ) in the conductive layer SA2B of the substrate SA is compared to the drive signal input portion in the conductive layer SB3B of the substrate SB. The end SB3B1 on the SL side (left side in FIG. 9 ) is located away from the drive signal input portion SL side (right side in FIG. 9 ).

Therefore, compared with the case where the position of the left end portion of the conductive layer SA2B of the substrate SA in the width direction (left-right direction of FIG. 9 ) of the switching element UL coincides with the position of the left end portion of the conductive layer SB3B of the substrate SB, it is possible to ensure that the substrate The insulation distance between the conductive layer SA2B of SA and the connecting wire WL.

＜Application example＞

Hereinafter, an application example of the power conversion device 1 of the present invention will be described with reference to the drawings.

FIG. 10 is a diagram showing an example of a part of a vehicle 10 to which the power conversion device 1 according to the first to third embodiments is applicable.

In the case where the power conversion device 1 of the first embodiment is applied to the example shown in FIG. 10 , fourteen power conversion devices 1 of the first embodiment are used in the vehicle 10 shown in FIG. 10 .

When applying the power conversion device 1 of the second embodiment or the third embodiment to the example shown in FIG. 10, seven power conversion devices 1 of the second embodiment or the third embodiment are used in the example shown in FIG. The vehicle 10 shown.

In the example shown in FIG. 10 , a vehicle 10 includes, in addition to the power conversion device 1 , a battery 11 (BATT), a first motor 12 (MOT) for driving, and a second motor 13 (GEN) for power generation. .

The battery 11 includes a battery case and a plurality of battery modules accommodated in the battery case. The battery module includes a plurality of battery cells connected in series. The battery 11 includes a positive terminal PB and a negative terminal NB connected to the DC connector 1 a of the power conversion device 1 . The positive terminal PB and the negative terminal NB are connected to positive terminals and negative terminals of a plurality of battery modules connected in series in the battery case.

The first motor 12 generates rotational driving force (power running operation) by electric power supplied from the battery 11 . The second motor 13 generates generated electric power by the rotational driving force input to the rotary shaft. Here, the second motor 13 is configured to be able to transmit the rotational power of the internal combustion engine. For example, each of the first motor 12 and the second motor 13 is a three-phase AC brushless (brushless) DC (Direct Current, DC) motor. The three phases are U phase, V phase and W phase. Each of the first motor 12 and the second motor 13 is an inner rotor type. The first motor 12 and the second motor 13 each include: a rotor having permanent magnets for excitation; and a stator having three-phase stator windings for generating a rotating magnetic field for rotating the rotors. Three-phase stator windings of the first motor 12 are connected to a first three-phase connector 1 b of the power converter 1 . The three-phase stator windings of the second motor 13 are connected to the second three-phase connector 1 c of the power conversion device 1 .

The power conversion device 1 shown in FIG. 10 includes a power module (power module) 21, a reactor (reactor) 22, a capacitor unit (condenser unit) 23, a resistor 24, a first current sensor 25, a second current sensor 26, a 3 Current sensor 27, electronic control unit 28 (MOT GEN ECU) and gate drive unit (gate drive unit) 29 (G/DVCU ECU).

The power module 21 includes a first power conversion circuit unit 31 , a second power conversion circuit unit 32 , and a third power conversion circuit unit 33 .

When fourteen power conversion devices 1 of the first embodiment are used in the vehicle 10 shown in FIG. 10 , the first power conversion circuit unit 31 includes six power converters 1 of the first embodiment shown in FIGS. Power conversion device 1.

When seven power conversion devices 1 according to the second embodiment or the third embodiment are used in the vehicle 10 shown in FIG. The power conversion device 1 of the second embodiment or the third embodiment. Specifically, one power conversion device 1 of the second embodiment or the third embodiment shown in FIGS. 5 to 9 constitutes the U-phase of the first power conversion circuit unit 31 . Another power conversion device 1 according to the second embodiment or the third embodiment shown in FIGS. 5 to 9 constitutes the V-phase of the first power conversion circuit unit 31 . The remaining one of the power conversion devices 1 of the second embodiment or the third embodiment shown in FIGS. 5 to 9 constitutes the W phase of the first power conversion circuit unit 31 .

The output-side conductor (output bus bar) 51 of the first power conversion circuit unit 31 collectively connects the three phases of the U phase, the V phase, and the W phase to the first three-phase connector 1b. That is, the output-side conductor 51 of the first power conversion circuit unit 31 is connected to the three-phase stator windings of the first motor 12 via the first three-phase connector 1b.

The positive electrode side conductor (P bus bar) PI of the first power conversion circuit unit 31 is connected to the positive electrode terminal PB of the battery 11 by collecting three phases of the U phase, the V phase, and the W phase.

The negative electrode side conductor (N bus bar) NI of the first power conversion circuit unit 31 is connected to the negative electrode terminal NB of the battery 11 by collecting the three phases of the U phase, the V phase, and the W phase.

That is, the first power conversion circuit unit 31 converts the DC power input from the battery 11 via the third power conversion circuit unit 33 into three-phase AC power.

When fourteen power conversion devices 1 of the first embodiment are used in the vehicle 10 shown in FIG. 10 , the second power conversion circuit unit 32 includes six power conversion devices 1 of the first embodiment shown in FIGS. Power conversion device 1.

When seven power conversion devices 1 according to the second embodiment or the third embodiment are used in the vehicle 10 shown in FIG. The power conversion device 1 of the second embodiment or the third embodiment. Specifically, one power conversion device 1 of the second embodiment or the third embodiment shown in FIGS. 5 to 9 constitutes the U-phase of the second power conversion circuit unit 32 . Another power conversion device 1 of the second or third embodiment shown in FIGS. 5 to 9 constitutes the V-phase of the second power conversion circuit unit 32 . The remaining one of the power conversion devices 1 of the second embodiment or the third embodiment shown in FIGS. 5 to 9 constitutes the W phase of the second power conversion circuit unit 32 .

The output-side conductor (output bus bar) 52 of the second power conversion circuit unit 32 is connected to the second three-phase connector 1c by collecting three phases of the U phase, the V phase, and the W phase. That is, the output-side conductor 52 of the second power conversion circuit unit 32 is connected to the three-phase stator windings of the second motor 13 via the second three-phase connector 1c.

The positive electrode side conductor (P bus bar) PI of the second power conversion circuit part 32 is connected to the positive electrode terminal PB of the battery 11 and the positive electrode side of the first power conversion circuit part 31 by collecting the three phases of the U phase, the V phase, and the W phase. Conductor PI.

The negative side conductor (N bus bar) N1 of the second power conversion circuit unit 32 is connected to the negative terminal NB of the battery 11 and the negative side of the second power conversion circuit unit 32 by combining the three phases of the U phase, the V phase, and the W phase. Conductor NI.

The second power conversion circuit unit 32 converts the three-phase AC power input from the second motor 13 into DC power. The DC power converted by the second power conversion circuit unit 32 can be supplied to at least one of the battery 11 and the first power conversion circuit unit 31 .

When fourteen power conversion devices 1 according to the first embodiment are used in the vehicle 10 shown in FIG. A switching element UH of the power conversion device 1 of the first embodiment shown in FIGS. 1 to 3 is provided.

When seven power conversion devices 1 according to the second embodiment or the third embodiment are used in the vehicle 10 shown in FIG. As far as the switching elements UH and UL of the power conversion device 1 according to the second or third embodiment shown in FIG. The switching elements UH, UL of the power conversion device 1 shown in the second embodiment or the third embodiment, and the switching elements WH, WL of the first power conversion circuit part 31 include the third one shown in FIGS. 5 to 9. The switching elements UH, UL of the power conversion device 1 of the embodiment or the third embodiment.

In the example shown in FIG. 10 , the U-phase switching element UH, V-phase switching element VH, and W-phase switching element WH of the first power conversion circuit section 31 and the U-phase switching element UH, V-phase switching element of the second power conversion circuit section 32 Switching element VH and W-phase switching element WH are connected to positive electrode side conductor PI. The positive electrode side conductor PI is connected to the positive electrode bus bar 50 p of the capacitor unit 23 .

The U-phase switching element UL, V-phase switching element VL, and W-phase switching element WL of the first power conversion circuit unit 31 and the U-phase switching element UL, V-phase switching element VL, and W-phase switching element of the second power conversion circuit unit 32 WL is connected to negative electrode side conductor NI. The negative electrode side conductor N1 is connected to the negative electrode bus bar 50n of the capacitor unit 23 .

In the example shown in FIG. 10 , the connection point TI between the U-phase switching element UH and the U-phase switching element UL, the connection point TI between the V-phase switching element VH and the V-phase switching element VL, and the W-phase A connection point TI between the switching element WH and the W-phase switching element WL is connected to the output-side conductor 51 .

The connection point TI between the U-phase switching element UH and the U-phase switching element UL, the connection point TI between the V-phase switching element VH and the V-phase switching element VL, and the W-phase switching element WH and the W-phase switching element of the second power conversion circuit unit 32 The connection point TI of WL is connected to the output-side conductor 52 .

In the example shown in FIG. 10 , the output-side conductor 51 of the first power conversion circuit unit 31 is connected to the first input/output terminal Q1 . The first input/output terminal Q1 is connected to the first three-phase connector 1b. The connection point TI of each phase of the first power conversion circuit unit 31 is connected to the stator winding of each phase of the first motor 12 via the output side conductor 51 , the first input/output terminal Q1 , and the first three-phase connector 1 b.

The output-side conductor 52 of the second power conversion circuit unit 32 is connected to the second input/output terminal Q2. The second input/output terminal Q2 is connected to the second three-phase connector 1c. The connection point TI of each phase of the second power conversion circuit unit 32 is connected to the stator winding of each phase of the second motor 13 via the output side conductor 52 , the second input/output terminal Q2 and the second three-phase connector 1c.

In the example shown in FIG. 10 , each of the switching elements UH, UL, VH, VL, WH, and WL of the first power conversion circuit unit 31 includes a flywheel diode.

Similarly, the switching elements UH, UL, VH, VL, WH, and WL of the second power conversion circuit unit 32 each include a freewheel diode.

In the example shown in FIG. 10 , the gate drive unit 29 inputs a gate signal to each of the switching elements UH, UL, VH, VL, WH, and WL of the first power conversion circuit unit 31 .

Similarly, the gate drive unit 29 inputs a gate signal to each of the switching elements UH, UL, VH, VL, WH, and WL of the second power conversion circuit unit 32 .

The first power conversion circuit unit 31 converts the DC power input from the battery 11 via the third power conversion circuit unit 33 into three-phase AC power, and supplies AC U-phase current to the three-phase stator windings of the first motor 12 . V-phase current and W-phase current. The second power conversion circuit unit 32 is turned on/off by switching elements UH, UL, VH, VL, WH, and WL of the second power conversion circuit unit 32 synchronized with the rotation of the second motor 13 ( (blocking) drive to convert the three-phase AC power output from the three-phase stator windings of the second motor 13 into DC power.

When fourteen power conversion devices 1 according to the first embodiment are used in the vehicle 10 shown in FIG. 10 , the switching elements S1 and S2 of the third power conversion circuit unit 33 include two The switching element UH of the power conversion device 1 of the first embodiment.

When seven power conversion devices 1 according to the second embodiment or the third embodiment are used in the vehicle 10 shown in FIG. 10 , the switching elements S1 and S2 of the third power conversion circuit part 33 include one The switching elements UH, UL of the power conversion device 1 of the second embodiment or the third embodiment shown in 9 .

The third power conversion circuit unit 33 is a voltage control unit (VCU). The third power conversion circuit unit 33 includes a high-side switching element S1 and a low-side switching element S2 of one phase.

The electrode on the positive electrode side of the switching element S1 is connected to the positive electrode bus PV. The positive bus PV is connected to the positive bus 50 p of the capacitor unit 23 . The negative electrode of switching element S2 is connected to negative bus NV. The negative bus NV is connected to the negative bus 50 n of the capacitor unit 23 . The negative bus bar 50 n of the capacitor unit 23 is connected to the negative terminal NB of the battery 11 . The electrode on the negative side of the switching element S1 is connected to the electrode on the positive side of the switching element S2. The switching element S1 and the switching element S2 include freewheeling diodes.

A bus bar 53 constituting a connection point between switching element S1 and switching element S2 of third power conversion circuit unit 33 is connected to one end of reactor 22 . The other end of the reactor 22 is connected to the positive terminal PB of the battery 11 . Reactor 22 includes a coil and a temperature sensor that detects the temperature of the coil. The temperature sensor is connected to the electronic control unit 28 through a signal line.

The third power conversion circuit unit 33 switches on (conduction) of the switching element S1 and the switching element S2 based on the gate signal input from the gate driving unit 29 to the gate of the switching element S1 and the gate of the switching element S2 /disconnect (block).

When boosting the voltage, the third power conversion circuit unit 33 is in the first state where the switching element S2 is turned on (conducting) and the switching element S1 is turned off (blocking), and the switching element S2 is turned off. The switching element S1 is switched alternately between the second state in which it is set to off (blocking) and the switching element S1 is set to on (conduction). In the first state, current flows sequentially through the positive terminal PB of the battery 11, the reactor 22, the switching element S2, and the negative terminal NB of the battery 11, and the reactor 22 receives DC excitation to store magnetic energy. In the second state, an electromotive force (induced voltage) is generated between both ends of the reactor 22 so as to prevent a change in magnetic flux caused by blocking the current flowing to the reactor 22 . The induced voltage due to the magnetic energy accumulated in the reactor 22 is superimposed on the battery voltage, and a boosted voltage higher than the voltage between the terminals of the battery 11 is applied between the positive busbar PV and the negative busbar NV of the third power conversion circuit part 33 .

The third power conversion circuit unit 33 alternately switches between the second state and the first state during regeneration. In the second state, current flows sequentially through the positive bus PV of the third power conversion circuit unit 33 , the switching element S1 , the reactor 22 , and the positive terminal PB of the battery 11 , and the reactor 22 receives DC excitation to store magnetic energy. In the first state, an electromotive force (induced voltage) is generated between both ends of the reactor 22 so as to prevent a change in magnetic flux caused by blocking the current flowing to the reactor 22 . The induced voltage due to the magnetic energy accumulated in the reactor 22 is stepped down, and the step-down voltage lower than the voltage between the positive busbar PV and the negative busbar NV of the third power conversion circuit part 33 is applied to the positive terminal PB and the positive terminal PB of the battery 11. between negative terminals NB.

The capacitor unit 23 includes a first smoothing capacitor 41 , a second smoothing capacitor 42 , and a noise filter (noise filter) 43 .

The first smoothing capacitor 41 is connected between the positive terminal PB and the negative terminal NB of the battery 11 . The first smoothing capacitor 41 smoothes voltage fluctuations that occur during the on/off switching operation of the switching element S1 and the switching element S2 during regeneration of the third power conversion circuit unit 33 .

The second smoothing capacitor 42 is connected between the positive electrode side conductor PI and the negative electrode side conductor N1 of the first power conversion circuit part 31 and the second power conversion circuit part 32, respectively, and the positive electrode bus PV and the third power conversion circuit part 33. Negative busbar NV. The second smoothing capacitor 42 is connected to a plurality of positive-side conductors PI and negative-side conductors NI, the positive bus PV and the negative bus NV via the positive bus 50p and the negative bus 50n. The second smoothing capacitor 42 responds to the voltage generated when the switching elements UH, UL, VH, VL, WH, and WL of the first power conversion circuit unit 31 and the second power conversion circuit unit 32 are switched on/off. The changes are smoothed. The second smoothing capacitor 42 smoothes a voltage fluctuation that occurs during the on/off switching operation of the switching element S1 and the switching element S2 when the third power conversion circuit unit 33 boosts the voltage.

The noise filter 43 is connected between the positive electrode side conductor PI and the negative electrode side conductor N1 of the first power conversion circuit part 31 and the second power conversion circuit part 32, respectively, and the positive busbar PV and the negative electrode of the third power conversion circuit part 33. Bus NV room. The noise filter 43 includes two capacitors connected in series. The connection point of the two capacitors is connected to a body ground of the vehicle 10 or the like.

The resistor 24 is connected between the positive-side conductor PI and the negative-side conductor NI of the first power conversion circuit part 31 and the second power conversion circuit part 32, respectively, and the positive busbar PV and the negative busbar of the third power conversion circuit part 33. Between NV.

The first current sensor 25 is disposed on the output-side conductor 51 that constitutes the connection of the phases of the first power conversion circuit unit 31 to detect the currents of the U-phase, V-phase, and W-phase. Point TI, and connected to the first input/output terminal Q1. The second current sensor 26 is disposed on the output-side conductor 52 that constitutes the connection of the phases of the second power conversion circuit unit 32 to detect the currents of the U-phase, V-phase, and W-phase. Point TI, and connect to the second input/output terminal Q2. The third current sensor 27 is arranged on the bus bar 53 which constitutes the connection point of the switching element S1 and the switching element S2 and is connected to the reactor 22 , and detects the current flowing to the reactor 22 .

Each of the first current sensor 25 , the second current sensor 26 and the third current sensor 27 is connected to the electronic control unit 28 through a signal line.

The electronic control unit 28 controls the respective operations of the first motor 12 and the second motor 13 . For example, the electronic control unit 28 is a software (software) function unit that functions when a processor such as a central processing unit (Central Processing Unit, CPU) executes a predetermined program. The software function part is composed of processors such as CPU, read-only memory (Read Only Memory, ROM) for storing programs, random access memory (Random Access Memory, RAM) for temporarily storing data, and electronic circuits such as timers. Electronic Control Unit (ECU). In addition, at least a part of the electronic control unit 28 may also be an integrated circuit such as a large scale integrated circuit (Large Scale Integration, LSI). For example, the electronic control unit 28 performs current feedback control using the current detection value of the first current sensor 25 and the current target value corresponding to the torque (torque) command value for the first motor 12, etc., and generates a current input to the gate. The control signal of the drive unit 29. For example, the electronic control unit 28 executes current feedback control using the current detection value of the second current sensor 26 and the current target value corresponding to the regeneration command value for the second motor 13, etc., and generates a control signal input to the gate driving unit 29. . The control signal indicates turning on (conducting)/off (blocking) each of the switching elements UH, UL, VH, VL, WH, and WL of the first power conversion circuit unit 31 and the second power conversion circuit unit 32 Timing signal for the drive. For example, the control signal is a pulse width modulated signal or the like.

The gate drive unit 29 generates switching elements UH, UL, VH, VL, WH, and WL for switching elements UH, UL, VH, VL, WH, and WL of the first power conversion circuit unit 31 and the second power conversion circuit unit 32 based on the control signal received from the electronic control unit 28 . Each gate signal actually performs on (conduction)/off (blocking) driving. For example, the gate driving unit 29 executes amplification, level shift, and the like of a control signal to generate a gate signal.

The gate drive unit 29 generates a gate signal for on (conducting)/off (blocking) driving each of the switching element S1 and the switching element S2 of the third power conversion circuit section 33 . For example, the gate drive unit 29 generates a gate signal having a duty ratio corresponding to a boost voltage command for boosting by the third power conversion circuit unit 33 or a step-down voltage command for regeneration of the third power conversion circuit unit 33 . . The duty ratio is the ratio of the switching element S1 to the switching element S2.

In the example shown in FIG. 10 , the power conversion device 1 of the first to third embodiments is applied to a vehicle 10 , but in other examples, the power conversion device 1 of the first to third embodiments may be applied to The device 1 is applicable to equipment other than the vehicle 10 such as elevators, pumps, fans, railway vehicles, air conditioners, refrigerators, and washing machines.

The embodiments of the present invention are merely examples, and are not intended to limit the scope of the present invention. These embodiments can be implemented in other various forms, and various omissions, substitutions, and changes can be made without departing from the scope of the invention. These embodiments and modifications are included in the scope or gist of the invention, and are also included in the invention described in the claims and their equivalents.

Claims (4)

1. A power conversion device, characterized in that, comprising: a switch element, one of which is provided with a first electrode and a second electrode for inputting a driving signal; The first substrate includes a first conductive layer facing the first electrode, a first electrical insulating layer, and a second conductive layer disposed on the opposite side of the first conductive layer via the first electrical insulating layer. layers; and a connection line connecting the second electrode and the drive signal input part, The first electrode of the switching element is electrically connected to the first conductive layer of the first substrate, The end portion of the first conductive layer on the side of the drive signal input portion is located farther from the drive signal input portion than the end portion of the second conductive layer on the side of the drive signal input portion. side. 2. The power conversion device according to claim 1, wherein: On the other side of the switching element, a third electrode is arranged, The power conversion device further includes a second substrate, the second substrate includes a third conductive layer facing the third electrode, a second electrical insulating layer, and is disposed on the second electrical insulating layer through the second electrical insulating layer. The fourth conductive layer on the opposite side of the third conductive layer, The third electrode is electrically connected to the third conductive layer, The end of the third conductive layer on the side of the drive signal input part is located one side away from the drive signal input part than the end of the fourth conductive layer on the side of the drive signal input part. side. 3. The power conversion device according to claim 2, wherein: An end of the first conductive layer on the side of the drive signal input part is located one side away from the drive signal input part than an end of the third conductive layer on the side of the drive signal input part. side. 4. The power conversion device according to any one of claims 1 to 3, further comprising: a spacer having one surface electrically connected to the first conductive layer and the other surface electrically connected to the first electrode, The end portion of the first conductive layer is located in the drive signal input portion more than the end portion of the spacer on the drive signal input portion side by a thickness of the first conductive layer or more. side.