CN209401630U - Pixel substrate with quantum dots - Google Patents
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Abstract
Description
技术领域technical field
本实用新型关于一种量子点技术,特别关于一种具量子点的像素基板。The utility model relates to a quantum dot technology, in particular to a pixel substrate with quantum dots.
背景技术Background technique
量子点(Quantum Dots)作为平面显示器技术的应用材料已经成为下一代显示技术的显学。量子点有以下的特色,其转换光谱可随尺寸调整(通过调整量子点的奈米晶体大小,尺寸在1nm至20nm之间)、发光效率高、发光稳定性好等光学性能。并且,量子点大多为无机化合物,其性能稳定,具有耐久性佳的特色。使得量子点技术成为下一代显示技术的关注重点。Quantum dots (Quantum Dots) as the application material of flat-panel display technology have become the display technology of the next generation of display technology. Quantum dots have the following characteristics, their conversion spectrum can be adjusted with size (by adjusting the nanocrystal size of quantum dots, the size is between 1nm and 20nm), high luminous efficiency, good luminescence stability and other optical properties. In addition, most of the quantum dots are inorganic compounds, which have stable performance and excellent durability. This makes quantum dot technology the focus of next-generation display technology.
目前,已经有厂商发展出量子点发光二极管(Quantum Dots Light EmittingDiodes,QD-LEDs)、量子点有机发光二极管(Quantum Dots Organic Light EmittingDiodes,QD-LEDs)等显示技术。目前的发展,主要是利用发光二极管或有机发光二极管的发光来作为量子点的光源,让其转换到想要发光的频谱。无论是哪一种应用手段,由于量子点的制程技术与发光二极管或有机发光二极的制程大不相同,因此,由量子点所构成的像素基板的制作,目前尚须与两者的制程分开。At present, some manufacturers have developed display technologies such as Quantum Dots Light Emitting Diodes (QD-LEDs) and Quantum Dots Organic Light Emitting Diodes (QD-LEDs). The current development is mainly to use light emitting diodes or organic light emitting diodes as the light source of quantum dots, so that they can be converted to the desired spectrum of light. No matter which application method is used, since the process technology of quantum dots is very different from that of light-emitting diodes or organic light-emitting diodes, the production of pixel substrates composed of quantum dots must be separated from the two processes at present. .
因此,如何能够简化量子点所构成的像素基板的制程与其结构,成为目前量子点显示技术开发厂商所希求的发展方向。Therefore, how to simplify the process and structure of the pixel substrate formed by quantum dots has become a development direction that manufacturers of quantum dot display technology seek.
实用新型内容Utility model content
为达上述目的,本实用新型提供一种具量子点的像素基板,可达到最简易制程制作具量子点的像素基板,并让量子点灌注容易,生产良率提高,进一步可加速量子点运用于显示技术进程的特殊技术功效。In order to achieve the above-mentioned purpose, the present invention provides a pixel substrate with quantum dots, which can achieve the simplest manufacturing process to produce a pixel substrate with quantum dots, and facilitates the perfusion of quantum dots, improves the production yield, and further accelerates the application of quantum dots in the application of quantum dots. Shows the special technical effect of the technical process.
根据本实用新型的,提供了一种具量子点的像素基板,包含:一透明基板;一黑矩阵层,形成于该透明基板的表面,定义多个像素空间;多个量子点胶层,分别形成于该像素空间中;及其中,该黑矩阵层由负型光阻材料硬化制作而成,且该黑矩阵层与该透明基板形成一小于90度的夹角,而使该些像素空间构成一倒梯形的碗状结构。According to the present invention, a pixel substrate with quantum dots is provided, comprising: a transparent substrate; a black matrix layer formed on the surface of the transparent substrate to define a plurality of pixel spaces; a plurality of quantum dot glue layers, respectively is formed in the pixel space; and wherein, the black matrix layer is made of negative photoresist material, and the black matrix layer and the transparent substrate form an included angle less than 90 degrees, so that the pixel spaces are formed An inverted trapezoidal bowl-like structure.
为让本实用新型的上述和其他目的、特征、和优点能更明显易懂,下文特举数个较佳实施例,并配合所附图式,作详细说明如下。In order to make the above-mentioned and other objects, features, and advantages of the present invention more clearly understood, several preferred embodiments are given below, and are described in detail as follows in conjunction with the accompanying drawings.
附图说明Description of drawings
图1为本实用新型所揭示的一种具量子点的像素基板的制作方法的流程图;1 is a flowchart of a method for manufacturing a pixel substrate with quantum dots disclosed in the present invention;
图2A-2E为图3B图的局部2的剖面图的制作流程图;2A-2E are a flow chart for making a cross-sectional view of part 2 of FIG. 3B;
图3A为说明了本实用新型的具量子点的像素基板10及其所对应的发光基板20的示意图;FIG. 3A is a schematic diagram illustrating the pixel substrate 10 with quantum dots and the corresponding light-emitting substrate 20 of the present invention;
图3B为本实用新型的具量子点的像素基板10及其所对应的局部2的放大示意图;以及FIG. 3B is an enlarged schematic view of the pixel substrate 10 with quantum dots and the corresponding part 2 of the present invention; and
图3C为本实用新型的具量子点的像素基板10的局部2沿A-A剖面线的剖面示意图。FIG. 3C is a schematic cross-sectional view of part 2 of the pixel substrate 10 with quantum dots of the present invention along the section line A-A.
符号说明:Symbol Description:
2:局部;2: local;
10:具量子点的像素基板;10: a pixel substrate with quantum dots;
11:透明基板;11: transparent substrate;
12:光阻层;12: photoresist layer;
12-1:黑矩阵层;12-1: black matrix layer;
20:发光层;20: light-emitting layer;
30-1、30-2、30-3、30-4、30-5、30-6:量子点胶层;30-1, 30-2, 30-3, 30-4, 30-5, 30-6: quantum dot glue layer;
40:光罩;40: photomask;
80:紫外光;80: ultraviolet light;
90:光;90: light;
91:目标光。91: Target light.
具体实施方式Detailed ways
根据本实用新型的实施例,本实用新型运用曝光显影制程来制作具量子点的像素基板,借以制作出高精度的黑矩阵层,让量子点可准确地灌注于由黑矩阵层所定义的像素空间中,进而达到制程简易,高分辨率的下一代显示技术所需的具量子点的像素基板,以作为量子点显示器使用。According to an embodiment of the present invention, the present invention uses an exposure and development process to fabricate a pixel substrate with quantum dots, so as to fabricate a high-precision black matrix layer, so that the quantum dots can be accurately poured into the pixels defined by the black matrix layer. In the space, the pixel substrate with quantum dots required for the next-generation display technology with simple process and high resolution can be used as a quantum dot display.
请参考图1,本实用新型所揭示的一种具量子点的像素基板的制作方法的流程图,请同时参考图2A-2E(图3B的局部2的剖面图的制作流程),具量子点的像素基板的制作方法包含步骤S101至步骤S105。Please refer to FIG. 1 , which is a flowchart of a method for fabricating a pixel substrate with quantum dots disclosed in the present invention. Please also refer to FIGS. 2A-2E (the fabrication process of the cross-sectional view of part 2 of FIG. 3B ), which includes quantum dots. The manufacturing method of the pixel substrate includes steps S101 to S105.
步骤S101:于透明基板的表面形成一光阻层。例如,运用喷涂法,渐次形成厚度介于1.5um至20um的光阻;或者,形成厚度介于15um至20um的光阻。由于此光阻层后续会制作为永久材料层,因此,选用负型光阻来制作。此外,此光阻层将制作为黑矩阵层,因此,可选用掺杂黑色颜料的负型光阻材料。如图2A、2B所示,在放大的局部2的范围中,将透明基板11上以喷涂法制作出膜厚介于1.5um至20um之间的光阻层12。Step S101 : forming a photoresist layer on the surface of the transparent substrate. For example, using a spray coating method, a photoresist with a thickness of 1.5um to 20um is gradually formed; or, a photoresist with a thickness of 15um to 20um is formed. Since the photoresist layer will be subsequently fabricated as a permanent material layer, negative-type photoresist is selected for fabrication. In addition, the photoresist layer will be made as a black matrix layer, therefore, a negative photoresist material doped with black pigment can be selected. As shown in FIGS. 2A and 2B , in the scope of the enlarged part 2 , a photoresist layer 12 with a thickness between 1.5 μm and 20 μm is formed on the transparent substrate 11 by spraying.
步骤S102:以一光罩对该光阻层进行曝光。此光罩即为相对应于黑矩阵层的光罩图案,可以紫外光进行曝光。如图2C所示,以光罩40在紫外光80的曝光下,即可对光阻层12进行曝光。Step S102 : exposing the photoresist layer with a photomask. The mask is a mask pattern corresponding to the black matrix layer, which can be exposed to ultraviolet light. As shown in FIG. 2C , the photoresist layer 12 can be exposed by the photomask 40 under the exposure of the ultraviolet light 80 .
步骤S103:移除未被曝光的该光阻层,并将未被曝光的该光阻层制作为梯形结构的黑矩阵层,以定义多个像素空间,且该黑矩阵层与该透明基板形成一小于90度的夹角。由于所选用的光阻材料为负型光阻,因此,未被曝光的部分,将可被显影剂清除掉。而留下来的部分则为本实用新型所预留下来的黑矩阵层。此外,由于所欲形成的黑矩阵层与透明基板之间的夹角小于90度,且为梯形结构,可于显影的过程选择适当的显影剂与显影的时间来制作此梯形结构。该夹角的角度介于45至90度之间,或者,该夹角的角度介于60至85度之间。请参考图2D,未被曝光的部分,及构成黑矩阵层12-1。Step S103 : removing the unexposed photoresist layer, and making the unexposed photoresist layer into a black matrix layer with a trapezoidal structure to define a plurality of pixel spaces, and the black matrix layer and the transparent substrate are formed An included angle less than 90 degrees. Since the selected photoresist material is negative type photoresist, the unexposed part will be removed by the developer. The remaining part is the black matrix layer reserved for the utility model. In addition, since the angle between the black matrix layer to be formed and the transparent substrate is less than 90 degrees and has a trapezoidal structure, an appropriate developer and developing time can be selected to form the trapezoidal structure during the development process. The angle of the included angle is between 45 and 90 degrees, or the angle of the included angle is between 60 and 85 degrees. Please refer to FIG. 2D , the unexposed part forms the black matrix layer 12 - 1 .
步骤S104:固化该黑矩阵层。例如,通过热固化或光固化的方式来进一步让黑矩阵层固化为永久材料层。Step S104: curing the black matrix layer. For example, the black matrix layer is further cured into a permanent material layer by means of thermal curing or photo curing.
步骤S105:将该多个像素空间分别对应灌注相对应像素材料的量子点胶层。其中,量子点胶层的厚度小于黑矩阵层的厚度,且介于1um至15um之间。请参考图2E,量子点胶层30-1、30-2、30-3、30-4、30-5、30-6分别独立形成于黑矩阵层12-1所形成的像素空间中。Step S105 : each of the plurality of pixel spaces is filled with the quantum dot glue layer corresponding to the corresponding pixel material. Wherein, the thickness of the quantum dot glue layer is smaller than the thickness of the black matrix layer, and is between 1um and 15um. Referring to FIG. 2E , the quantum dot glue layers 30-1, 30-2, 30-3, 30-4, 30-5, and 30-6 are respectively independently formed in the pixel space formed by the black matrix layer 12-1.
其中,透明基板11可以是PET(聚对苯二甲酸乙二酯,Polyethyleneterephthalate,简称PET)基板、COP基板、PC基板、CPI基板、玻璃基板,聚乙烯醇缩丁醛树脂(Polyvinyl Butyral Resin简称PVB)基板等。透明基板10在可见光波段的光透度大于80%以上。The transparent substrate 11 may be a PET (polyethylene terephthalate, PET for short) substrate, a COP substrate, a PC substrate, a CPI substrate, a glass substrate, a polyvinyl butyral resin (PVB for short) ) substrate, etc. The light transmittance of the transparent substrate 10 in the visible light band is more than 80%.
本实用新型中的光阻使用负光阻,较佳地,本实用新型的光阻层是使用高分辨率负型光阻剂。光阻层的材料主要由高分子树脂(Resin)、感光起始剂(Photo initiator)、单体(Monomer)、溶剂(Solvent),以及添加剂(Additives)所组成。The photoresist of the present invention uses a negative photoresist. Preferably, the photoresist layer of the present invention uses a high-resolution negative photoresist. The material of the photoresist layer is mainly composed of polymer resin (Resin), photo initiator (Photo initiator), monomer (Monomer), solvent (Solvent), and additives (Additives).
其中在光阻层的材料中,高分子树脂(Resin)的功能在于附着性、显影性、颜料分散性、流动性、耐热性、耐化性、解析能力;感光起始剂(Photo initiator)的功能在于感光特性、解析能力;单体(Monomer)的功能在于附着性、显影性、解析能力;溶剂(Solvent)的功能在于黏度与涂布性质;添加剂(Additives)的功能则在于涂布性、流平性及起泡性。Among the materials of the photoresist layer, the functions of polymer resin (Resin) lie in adhesion, developability, pigment dispersion, fluidity, heat resistance, chemical resistance, and analytical ability; photo initiator (Photo initiator) The function of the solvent lies in the photosensitive characteristics and analytical ability; the function of the monomer (Monomer) is in the adhesion, developability and analytical ability; the function of the solvent (Solvent) is in the viscosity and coating properties; the function of the additive (Additives) is in the coating property. , leveling and foaming.
高分子树脂(Resin)可以为含羧酸基(COOH)的聚合物或共聚物,如压克力(Acrylic)树脂、压克力-环氧(Epoxy)树脂、压克力_美耐皿(Melamine)树脂、压克力-苯乙烯(Styrene)树脂、苯酚-酚醛(Phenolic Aldehyde)树脂等树脂,或以上树脂的任意混合,但不以此为限。树脂在光阻中的重量百分比范围可以是0.1%至99%。The polymer resin (Resin) can be a polymer or copolymer containing a carboxylic acid group (COOH), such as acrylic (Acrylic) resin, acrylic-epoxy (Epoxy) resin, acrylic _ melamine ( Melamine) resin, acrylic-styrene (Styrene) resin, phenol-phenolic (Phenolic Aldehyde) resin and other resins, or any mixture of the above resins, but not limited thereto. The weight percent of resin in the photoresist may range from 0.1% to 99%.
单体可分非水溶性及水溶性单体,其中,非水溶性单体(water-insolubleMonomer)可以为戊赤藻糖醇三丙烯酸酯、三甲基醚丙烷三丙烯酸酯、三甲基醚丙烷三甲基丙烯酸酯、三,二-乙醇异氰酸酯三丙烯酸酯,二,三甲醇丙烷四丙烯酸酯、二异戊四醇五丙烯酸酯、五丙烯酸酯、四乙酸异戊四醇;六乙酸二己四醇、六乙酸二异戊四醇,或为多官能基单体、树状/多丛族丙烯酸酯寡体、多丛蔟聚醚丙烯酸酯、氨甲酸乙酯。水溶性单体(water-soluble monomer)则可为Ethoxylated(聚氧乙烯)(简称EO)base和Propoxylated(聚氧丙烯)(简称PO)的单体(monomer);例如为:二-(二-氧乙烯氧乙烯)乙烯基丙烯酸酉旨、十五聚氧乙烯三甲醇丙烷三丙烯酸酯、三十氧乙烯二,二-双对酚甲烷二丙烯酸酯、三十个氧乙烯二,二-双对酚甲烷二甲基丙烯酸酉旨、二十氧乙烯三甲醇丙烷三丙烯酸酯、十五氧乙烯三甲醇丙烷三丙烯酸酯、甲基氧五百五十个氧乙烯单甲基丙烯酸酯、二百氧乙烯二丙烯酸酯、四百氧乙烯二丙烯酸酉旨、四百氧乙烯二甲基丙烯酸酯、六百氧乙烯二丙烯酸酯、六百氧乙烯二甲基丙烯酸酯、聚氧丙烯单甲基丙烯酸酯。当然亦可添加两种以上单体(monomer)混合成共单体(co-monomer)。单体或共单体在光阻中的重量百分比范围可以是0.1%至99%。Monomers can be divided into water-insoluble monomers and water-soluble monomers, wherein, water-insoluble monomers (water-insoluble Monomer) can be penerythritol triacrylate, trimethyl ether propane triacrylate, trimethyl ether propane Trimethacrylate, Tris, Di-ethanol Isocyanate Triacrylate, Di, Trimethanol Propane Tetraacrylate, Diisopentaerythritol Pentaacrylate, Pentaacrylate, Isopentaerythritol Tetraacetate; Dihexyltetraacetate Alcohol, diisopentaerythritol hexaacetate, or multifunctional monomer, dendrimer/multiplex acrylate oligomer, multiplex polyether acrylate, urethane. The water-soluble monomer can be a monomer of Ethoxylated (polyoxyethylene) (referred to as EO) base and Propoxylated (polyoxypropylene) (referred to as PO); for example: di-(di- Oxyethylene oxyethylene) vinyl acrylic acid unitary purpose, pentapolyoxyethylene trimethanol propane triacrylate, triatric oxide di, di-bis-p-phenol methane diacrylate, thirty oxyethylene di, di-bi-p Phenolmethane dimethacrylate unitary, eicosoxyethylene trimethanol propane triacrylate, pentadecyloxyethylene trimethanol propane triacrylate, methyloxy 550 oxyethylene monomethacrylate, 200 oxyethylene Ethylene Diacrylate, Tetrahexoxyethylene Diacrylate, Tetrahexoxyethylene Dimethacrylate, Hexaethylene Diacrylate, Hexaethylene Dimethacrylate, Polyoxypropylene Monomethacrylate . Of course, two or more monomers (monomers) can also be added and mixed to form a co-monomer (co-monomer). The weight percent of the monomer or comonomer in the photoresist can range from 0.1% to 99%.
光起始剂(Photo initiator),可以选自苯乙酮系化合物(acetophenone)、二苯甲酮(Benzophenone)系化合物或二咪唑系化合物(bis_imidazole)、苯偶姻系化合物(Benzoin),苯偶酰系化合物(Benzil)、α-氨基酮系化合物(α-amino ketone)、酰基膦氧化物系化合物(Acyl phosphine oxide)或苯甲酰甲酸酯系化合物以上光起始剂任意的混合,但不以此为限。光起始剂在光阻中的重量百分比范围可以是至0.1至10%。Photo initiator can be selected from acetophenone, benzophenone, bis_imidazole, benzoin, benzoin Acyl compound (Benzil), α-amino ketone compound (α-amino ketone), acyl phosphine oxide compound (Acyl phosphine oxide) or benzoyl formate compound, any combination of the above photoinitiators, but Not limited to this. The weight percent of the photoinitiator in the photoresist can range from 0.1 to 10%.
溶剂(Solvent)可以为乙二醇丙醚(ethylene glycol monopropylether)、二甘醇二甲醚(di-ethylene glycol dimethyl ether)、四氢呋喃、乙二醇甲醚(ethylene glycolmonomethyl ether)、乙二醇乙醚(ethyleneglycol monoethyl ether)、二甘醇一甲醚(di-ethylene glycol mono—methylether)、二甘醇一乙醚(di-ethylene glycol mono-ethylether)、二甘醇一丁醚(di-ethylene glycol mono-butyl ether)、丙二醇甲醚醋酸酯(propylene glycol mono-methyl ether acetate)、丙二醇乙醚醋酸酯(propyleneglycol mono—ethyl ether acetate)、丙二醇丙醚醋酸酯(propylene glycol mono-propyl ether acetate)、3-乙氧基丙酸乙酯(ethyl3_ethoxy propionate)等,或以上溶剂任意的混合,但不限于此。溶剂在光阻中的重量百分比范围可以是0.1%至99%。The solvent (Solvent) can be ethylene glycol monopropylether, di-ethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol ethyl ether ( ethyleneglycol monoethyl ether), diethylene glycol monomethyl ether (di-ethylene glycol mono-methylether), diethylene glycol monoethyl ether (di-ethylene glycol mono-ethylether), di-ethylene glycol monobutyl ether (di-ethylene glycol mono-butyl ether) ether), propylene glycol mono-methyl ether acetate, propylene glycol mono-ethyl ether acetate, propylene glycol mono-propyl ether acetate, 3-ethoxy Ethyl propionate (ethyl3_ethoxy propionate), etc., or any mixture of the above solvents, but not limited thereto. The weight percent of the solvent in the photoresist may range from 0.1% to 99%.
添加剂一般为颜料分散剂,此为含有颜料的光阻所必需加入的成份,一般为非离子型接口活性剂,举例如:Solsperse39000,Solsperse21000,此分散剂在光阻中的重量百分比范围可以是至0.1至5%。The additive is generally a pigment dispersant, which is a necessary ingredient for photoresist containing pigments. It is generally a non-ionic interface active agent, such as: Solsperse39000, Solsperse21000. The weight percentage of this dispersant in the photoresist can range from 0.1 to 5%.
在本实用新型的步骤S102中,进行曝光时,更包含:(1)基板洗净(SubstrateClean);(2)涂布(Coating);(3)软烤(pre-baking);(4)曝光(exposure);(5)显影(Developing)等加工步骤。In step S102 of the present invention, when exposing, it further includes: (1) Substrate Clean; (2) Coating; (3) Pre-baking; (4) Exposure (exposure); (5) processing steps such as developing.
接着,请参考图3A,其说明了本实用新型的具量子点的像素基板10及其所对应的发光基板20的示意图;图3B为本实用新型的具量子点的像素基板10及其所对应的局部2的放大示意图;图3C为本实用新型的具量子点的像素基板10的局部2沿A-A剖面线的剖面示意图。Next, please refer to FIG. 3A , which illustrates a schematic diagram of the pixel substrate 10 with quantum dots and the corresponding light-emitting substrate 20 of the present invention; FIG. 3B is the pixel substrate 10 with quantum dots of the present invention and its corresponding 3C is a schematic cross-sectional view of part 2 of the pixel substrate 10 with quantum dots of the present invention along the section line A-A.
图3A-3C揭露了本实用新型的具量子点的像素基板10,其包含了:透明基板11、黑矩阵层12-1与多个量子点胶层30-1、30-2、30-3、30-4、30-5、30-6。其中,黑矩阵层12-1形成于透明基板10的表面,定义多个像素空间;多个量子点胶层30-1、30-2、30-3、30-4、30-5、30-6则分别形成于像素空间中。其中,黑矩阵层12-1由负型光阻材料硬化制作而成,且与透明基板10形成一小于90度的夹角,而使该多个像素空间构成一倒梯形额碗状结构,如图3C所示。3A-3C disclose the pixel substrate 10 with quantum dots of the present invention, which includes: a transparent substrate 11, a black matrix layer 12-1 and a plurality of quantum dot adhesive layers 30-1, 30-2, 30-3 , 30-4, 30-5, 30-6. The black matrix layer 12-1 is formed on the surface of the transparent substrate 10 to define a plurality of pixel spaces; a plurality of quantum dot glue layers 30-1, 30-2, 30-3, 30-4, 30-5, 30- 6 are respectively formed in the pixel space. The black matrix layer 12-1 is made of hardened negative photoresist material, and forms an included angle of less than 90 degrees with the transparent substrate 10, so that the plurality of pixel spaces form an inverted trapezoidal bowl-shaped structure, such as shown in Figure 3C.
在图3A中,其为运用了发光层20的实施例。发光层20可以是LED发光层或者OLED发光层。控制发光层20所发出的光90,经由具量子点的像素基板10转换后,可转换为目标光91。In FIG. 3A, it is an example in which the light-emitting layer 20 is used. The light-emitting layer 20 may be an LED light-emitting layer or an OLED light-emitting layer. The light 90 emitted by the control light-emitting layer 20 can be converted into target light 91 after being converted by the pixel substrate 10 with quantum dots.
其中,黑矩阵层12-1的厚度介于1.5um至10um之间;就本实用新型的另一实施例而言,黑矩阵层的厚度介于10um至20um之间。其中,夹角的角度介于45度至90度之间;就本实用新型的另一实施例而言,夹角的角度介于60度至85度之间。其中,多个量子点胶层30-1、30-2、30-3、30-4、30-5、30-6的厚度小于黑矩阵层12-1的厚度,且介于1um至9um之间。Wherein, the thickness of the black matrix layer 12-1 is between 1.5um and 10um; in another embodiment of the present invention, the thickness of the black matrix layer is between 10um and 20um. Wherein, the angle of the included angle is between 45 degrees and 90 degrees; in another embodiment of the present invention, the angle of the included angle is between 60 degrees and 85 degrees. Among them, the thickness of the plurality of quantum dot glue layers 30-1, 30-2, 30-3, 30-4, 30-5, and 30-6 is smaller than the thickness of the black matrix layer 12-1, and is between 1um and 9um. between.
以上仅为本实用新型的优选实施例,并非因此限制本实用新型的专利范围,凡是利用本实用新型说明书及附图内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本实用新型的专利保护范围内。The above are only the preferred embodiments of the present utility model, and are not intended to limit the scope of the present utility model patent. Any equivalent structure or equivalent process transformation made by using the contents of the present utility model description and accompanying drawings, or directly or indirectly applied to other related The technical field of the present invention is similarly included in the scope of patent protection of the present invention.
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CN112542098A (en) * | 2019-09-23 | 2021-03-23 | 恒煦电子材料股份有限公司 | Pixel substrate with quantum dots and manufacturing method thereof |
CN112634766A (en) * | 2019-09-24 | 2021-04-09 | 恒煦电子材料股份有限公司 | Pixel substrate with quantum dots and manufacturing method thereof |
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CN112542098A (en) * | 2019-09-23 | 2021-03-23 | 恒煦电子材料股份有限公司 | Pixel substrate with quantum dots and manufacturing method thereof |
CN112634766A (en) * | 2019-09-24 | 2021-04-09 | 恒煦电子材料股份有限公司 | Pixel substrate with quantum dots and manufacturing method thereof |
CN112634766B (en) * | 2019-09-24 | 2023-04-07 | 恒煦电子材料国际有限公司 | Pixel substrate with quantum dots and manufacturing method thereof |
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