CN209323003U - A kind of screening arrangement for cathodic arc discharge - Google Patents
A kind of screening arrangement for cathodic arc discharge Download PDFInfo
- Publication number
- CN209323003U CN209323003U CN201822034632.6U CN201822034632U CN209323003U CN 209323003 U CN209323003 U CN 209323003U CN 201822034632 U CN201822034632 U CN 201822034632U CN 209323003 U CN209323003 U CN 209323003U
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- target
- arc discharge
- screening arrangement
- shielding case
- cathodic arc
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- 238000010891 electric arc Methods 0.000 title claims abstract description 41
- 238000012216 screening Methods 0.000 title claims abstract description 31
- 238000007733 ion plating Methods 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 9
- 239000002245 particle Substances 0.000 abstract description 6
- 238000004140 cleaning Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
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- Electron Sources, Ion Sources (AREA)
Abstract
The utility model provides a kind of screening arrangement for cathodic arc discharge, is related to arc ion plating (aip) field.Comprising: target, surface is for generating arc discharge；Shielding case, the shielding case include horn mouth and shielding cover main body；The shielding case main ring is around the periphery of the fenced setting target, and there is predetermined gap with the target, the horn mouth and the shielding cover main body junction, which are equipped with, to be stretched out with the extension of the target surface of target described in covering part, has predetermined gap between the extension and the target surface of the target；Bracket, for installing the shielding case to the chamber of arc ion plating apparatus, the shielding case is installed on the bracket.The utility model provides a kind of screening arrangement for cathodic arc discharge, to shield to the electronics in discharge process, effectively increases the movement travel of electronics, promotes plasma density, improves the ionization level of arc ion plating particle.
Description
Technical field
The utility model relates to arc ion plating (aip) fields, more particularly to a kind of shielding for cathodic arc discharge
Device.
Background technique
Multi-arc ion coating membrane technology is under vacuum conditions, by control electric arc in target material surface movement, to evaporate target
Metal, and apply a high bias on substrate, so that the target particle high speed that arc evaporation comes out bombards on substrate, formed
The process of film.Due to the electric arc on target material surface be low-voltage, high current DC power supply supply, so itself is only
Can pilot arc cannot spontaneous generation electric arc, generate electric arc when need individual arc-striking structure.When striking, pass through striking needle
Apply anode electricity, target applies cathode electricity, and the of short duration contact target of striking needle makes the very short short circuit of yin-yang, then striking needle from
When opening target material surface, there is breakdown arc in yin-yang polar circuit, is providing stable low-voltage, a high current by arc power
Output, realizes the self―sustaining of electric arc.
Shielding (arc extinguishing) cover of cathodic arc discharge, mainly plane at this stage at present, are lower than target surface 2-5mm, current potential
It suspends (ground connection), reduces arc spot and moved toward far from target surface direction.Its disadvantage, a large amount of electronics are directly made by electric field after target surface spilling
With returning on cavity (ground terminal), cannot effectively carry out the ionization of the particle in arc evaporation process, arc discharge ionization level
Low, the bulky grain in the discharge process of arc source cannot be blocked effectively after overflowing, and be deposited on substrate, influenced quality of forming film.Meanwhile
Its arc quenching effect is poor, and arc light is higher far from the risk that target surface direction moves, the short circuit be easy to causeing between anode and cathode, and tears open
It is more difficult to unload cleaning.
Utility model content
One purpose of the utility model is to provide for a kind of screening arrangement for cathodic arc discharge, can be effectively
Arc extinguishing is carried out to the electric arc on cathode targets surface and side.
Another purpose of the utility model is to provide for a kind of screening arrangement for cathodic arc discharge, to electric discharge
Electronics in the process is shielded, and the movement travel of electronics is effectively increased, and promotes plasma density, improves arc ion plating grain
The ionization level of son.
Particularly, the utility model provides a kind of screening arrangement for cathodic arc discharge, comprising: target, table
Face is for generating arc discharge；
Shielding case, the shielding case include horn mouth and shielding cover main body；The shielding case main ring is around fenced setting institute
The periphery of target is stated, and there is predetermined gap with the target, the horn mouth is equipped with the shielding cover main body junction to be stretched
Out with the extension of the target surface of target described in covering part, there is predetermined gap between the extension and the target surface of the target；
Bracket, for installing the shielding case to the chamber of arc ion plating apparatus, the shielding case is installed on institute
It states on bracket.
Optionally, the target is cylinder, and the shielding cover main body is the hollow cylinder being adapted with the target
Shape.
Optionally, the target is rectangle, and the shielding cover main body is the hollow rectangle cylindricality being adapted with the target
Shape.
Optionally, it is separate to be less than the horn mouth for length/diameter of the horn mouth close to target surface one end of the target
The length/diameter of target surface one end of the target.
Optionally, the shielding case and the bracket bite type assemble.
Optionally, L shape card slot is provided on the bracket, the outer surface of the shielding cover main body is provided with and the L shape
Card slot is raised accordingly.
Optionally, the shielding case and the bracket detachable connection.
Optionally, the shielding case and the bracket pass through screw thread/be bolted.
Optionally, the predetermined gap is 1-5mm.
The bracket is installed on the indoor anode seat of chamber of arc ion plating apparatus by the bolt fastening with insulation sleeve.
A kind of screening arrangement for cathodic arc discharge provided by the utility model, by using including horn mouth and screen
Cover the shielding case of cover main body；Shielding case main ring around the periphery of the fenced setting target, and with the target have it is predetermined between
Gap, the horn mouth and the shielding cover main body junction, which are equipped with, to be stretched out with the extension of the target surface of target described in covering part,
There is predetermined gap between the extension and the target surface of the target；Predetermined gap between the shielding cover main body and the target
And the predetermined gap between the extension and the target surface of the target is connected to and L-shaped, is allowed to effectively to the target
Periphery and the extension at electric arc carry out arc extinguishing, shield horn mouth can to the electronics in discharge process, can have
Effect increases the movement travel of electronics, promotes plasma density, improves the ionization level of arc ion plating particle.
A kind of screening arrangement for cathodic arc discharge provided by the utility model, is assembled using bite type, structure letter
Single, maintenance is convenient.
According to the accompanying drawings to the detailed description of the utility model specific embodiment, those skilled in the art will be more
Add the above-mentioned and other purposes, advantages and features of clear the utility model.
Detailed description of the invention
Some specific realities of the utility model are described in detail by way of example and not limitation with reference to the accompanying drawings hereinafter
Apply example.Identical appended drawing reference denotes same or similar part or part in attached drawing.It should be appreciated by those skilled in the art that
The drawings are not necessarily drawn to scale.In attached drawing:
Fig. 1 is according to a kind of the schematic of screening arrangement for cathodic arc discharge of the utility model one embodiment
Main view；
Fig. 2 is the schematic elevational view of screening arrangement according to figure 1；
Fig. 3 is the schematic plan of screening arrangement according to figure 1；
Fig. 4 is the schematic cross sectional views of screening arrangement according to figure 1.
Specific embodiment
Fig. 1 is according to a kind of the schematic of screening arrangement for cathodic arc discharge of the utility model one embodiment
Main view.Fig. 2 is the schematic elevational view of screening arrangement according to figure 1.Fig. 3 is screening arrangement according to figure 1
Schematic plan.Fig. 4 is the schematic cross sectional views of screening arrangement according to figure 1.As Figure 1-Figure 4, one kind is used for
The screening arrangement of cathodic arc discharge generally may include: target 1, shielding case 2 and bracket 3.Target 1 is mounted on electric arc
On the indoor cathode of the chamber of ion plating equipment, the surface of target 1 is for generating arc discharge.Shielding case 2 includes horn mouth 21
With shielding cover main body 22.Shielding cover main body 22 has predetermined gap around the periphery of fenced setting target 1, and with target 1.Loudspeaker
Mouth 21 is equipped with shielding 22 junction of cover main body to be stretched out with the extension 23 of the target surface of covering part target 1.Extension 23 and target
There is predetermined gap between the target surface of material 1.Shield the target of the predetermined gap and extension 23 and target 1 between cover main body 22 and target 1
Between face predetermined gap connection and it is L-shaped on the whole, allow to the electric arc at the effectively periphery to target 1 and extension 23
Carry out arc extinguishing.Bracket 3 is used for will be in the installation to the chamber of arc ion plating apparatus of shielding case 2.Bracket 3 is by having insulation sleeve
Bolt fastening is installed on the indoor anode seat of chamber of arc ion plating apparatus, so that screening arrangement is outstanding in current potential on the whole
Floating state.
Specifically, shielding case 2 and 3 detachable connection of bracket.In a specific embodiment, shielding case 2 and branch
Frame 3 is assembled by bite type, in order to disassembly, cleaning (or cleaning).It is provided with L shape card slot 31 on bracket 3, shields cover main body 22
Outer surface be provided with it is corresponding with L shape card slot 31 protrusion 24 so that can will shielding cover main body 22 connect and fix.In another tool
In the embodiment of body, shielding case 2 and bracket 3 pass through screw thread/be bolted.Shielding case 2 is consistent with the current potential of bracket 3.
Specifically, it shields and makes a reservation between predetermined gap and extension 23 and the target surface of target 1 between cover main body 22 and target 1
Gap connection, and the size of its predetermined gap is service condition and plated film of the those skilled in the art according to arc ion plating apparatus
What material was adjusted.Optionally, shielding the predetermined gap between cover main body 22 and target 1 is 1-5mm.Extension 23 and target 1
Target surface between predetermined gap be 1-5mm.
In a specific embodiment, the shape of target 1 is cylindrical, and shielding cover main body 22 is and 1 phase of target
The hollow-cylindrical shape of adaptation.In another particular embodiment of the invention, target 1 is rectangle, and shielding cover main body 22 is and target
The adaptable hollow rectangle post shapes of material 1.Of course, target 1 can also be designed to other shapes, shield the shape of cover main body 22
It is adapted with the shape of target 1, and there are L-shaped predetermined gaps in the peripheral side of target 1.Horn mouth 21 is close to target 1
Target surface one end length/diameter be less than the target surface one end of horn mouth 21 far from the target 1 length/diameter.Horn mouth 21
Design, shield horn mouth can to the electronics in discharge process, can effectively increase the movement travel of electronics, promoted etc. from
Daughter concentration improves the ionization level of arc ion plating particle.
A kind of screening arrangement for cathodic arc discharge provided by the utility model, by using including horn mouth and screen
Cover the shielding case of cover main body；Shielding case main ring around the periphery of the fenced setting target, and with the target have it is predetermined between
Gap, the horn mouth and the shielding cover main body junction, which are equipped with, to be stretched out with the extension of the target surface of target described in covering part,
There is predetermined gap between the extension and the target surface of the target；Predetermined gap between the shielding cover main body and the target
And the predetermined gap between the extension and the target surface of the target is connected to and L-shaped, is allowed to effectively to the target
Periphery and the extension at electric arc carry out arc extinguishing, shield horn mouth can to the electronics in discharge process, can have
Effect increases the movement travel of electronics, promotes plasma density, improves the ionization level of arc ion plating particle.
A kind of screening arrangement for cathodic arc discharge provided by the utility model, is assembled using bite type, structure letter
Single, maintenance is convenient.
So far, although those skilled in the art will appreciate that the more of the utility model have been shown and described in detail herein
A exemplary embodiment still, still can be according to the utility model public affairs in the case where not departing from the spirit and scope of the utility model
The content opened directly determines or derives many other variations or modifications for meeting the utility model principle.Therefore, this is practical new
The range of type is understood that and regards as to cover all such other variations or modifications.
Claims (10)
1. a kind of screening arrangement for cathodic arc discharge characterized by comprising
Target, surface is for generating arc discharge；
Shielding case, the shielding case include horn mouth and shielding cover main body；The shielding case main ring is around the fenced setting target
The periphery of material, and there is predetermined gap with the target, the horn mouth and the shielding cover main body junction be equipped with stretching with
The extension of the target surface of target described in covering part has predetermined gap between the extension and the target surface of the target；
Bracket, for installing the shielding case to the chamber of arc ion plating apparatus, the shielding case is installed on the branch
On frame.
2. the screening arrangement according to claim 1 for cathodic arc discharge, which is characterized in that the target is cylinder
Shape, the shielding cover main body is the hollow-cylindrical shape being adapted with the target.
3. the screening arrangement according to claim 1 for cathodic arc discharge, which is characterized in that the target is square
Shape, the shielding cover main body is the hollow rectangle post shapes being adapted with the target.
4. the screening arrangement according to claim 1 for cathodic arc discharge, which is characterized in that the horn mouth is close
The length/diameter of target surface one end of the target is less than the length/diameter of the target surface one end of the horn mouth far from the target.
5. the screening arrangement according to claim 1 for cathodic arc discharge, which is characterized in that the shielding case and institute
State the assembly of bracket bite type.
6. the screening arrangement according to claim 5 for cathodic arc discharge, which is characterized in that be arranged on the bracket
There is L shape card slot, the outer surface of the shielding cover main body is provided with corresponding raised with the L shape card slot.
7. the screening arrangement according to claim 1 for cathodic arc discharge, which is characterized in that the shielding case and institute
State bracket detachable connection.
8. the screening arrangement according to claim 7 for cathodic arc discharge, which is characterized in that the shielding case and institute
It states bracket and passes through screw thread/be bolted.
9. the screening arrangement according to claim 1 for cathodic arc discharge, which is characterized in that the predetermined gap
For 1-5mm.
10. the screening arrangement according to claim 1 for cathodic arc discharge, which is characterized in that the bracket passes through
Bolt fastening with insulation sleeve is installed on the indoor anode seat of chamber of arc ion plating apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822034632.6U CN209323003U (en) | 2018-12-05 | 2018-12-05 | A kind of screening arrangement for cathodic arc discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822034632.6U CN209323003U (en) | 2018-12-05 | 2018-12-05 | A kind of screening arrangement for cathodic arc discharge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209323003U true CN209323003U (en) | 2019-08-30 |
Family
ID=67712874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822034632.6U Active CN209323003U (en) | 2018-12-05 | 2018-12-05 | A kind of screening arrangement for cathodic arc discharge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209323003U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110846625A (en) * | 2019-12-09 | 2020-02-28 | 北京师范大学 | A long high vacuum cathode arc target device |
| CN112048701A (en) * | 2020-07-28 | 2020-12-08 | 温州职业技术学院 | Multi-magnetic field integrated cathode arc source |
-
2018
- 2018-12-05 CN CN201822034632.6U patent/CN209323003U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110846625A (en) * | 2019-12-09 | 2020-02-28 | 北京师范大学 | A long high vacuum cathode arc target device |
| CN112048701A (en) * | 2020-07-28 | 2020-12-08 | 温州职业技术学院 | Multi-magnetic field integrated cathode arc source |
| CN112048701B (en) * | 2020-07-28 | 2022-11-29 | 温州职业技术学院 | Multi-magnetic field integrated cathode arc source |
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