CN209055802U - A kind of exposure machine that the uniformity is high - Google Patents
A kind of exposure machine that the uniformity is high Download PDFInfo
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- CN209055802U CN209055802U CN201821679244.7U CN201821679244U CN209055802U CN 209055802 U CN209055802 U CN 209055802U CN 201821679244 U CN201821679244 U CN 201821679244U CN 209055802 U CN209055802 U CN 209055802U
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- uvled
- conveying device
- group
- resistance value
- light source
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- 238000001514 detection method Methods 0.000 claims abstract description 14
- 238000005286 illumination Methods 0.000 claims abstract description 9
- 230000008859 change Effects 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims description 3
- 239000000110 cooling liquid Substances 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
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- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 229910052753 mercury Inorganic materials 0.000 description 5
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- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The utility model discloses a kind of exposure machines that the uniformity is high, including organic frame, control system, glass objective table, UV-LED light source module group and UV optical detection apparatus, glass objective table is driven by conveying device, control system is and conveying device, UV-LED light source module group and UV optical detection apparatus are electrically connected, UV-LED light source module group includes the UVLED and compound eye lens group of more array arrangements, every UVLED is equipped with one group of collector lens group immediately ahead of it, plane light microscopic is installed in conveying device, the two sides up and down of glass objective table are symmetrically arranged with two groups of optical reflector of curved surface, UV optical detection apparatus includes testing agency and resistance value adjustment module, testing agency includes multiple photosensitive elements, it is detected to the illumination to UVLED；Resistance value adjustment module is to adjust the size with the UVLED resistance value being electrically connected.A kind of high exposure machine of uniformity provided by the utility model, can be improved the uniformity of exposure machine, achievees the purpose that meet user demand.
Description
Technical field
The utility model relates to exposure machine technical field more particularly to a kind of exposure machines that the uniformity is high.
Background technique
Traditional mercury lamp is replaced to bring into schedule using UVLED at present, the use of efficient energy conservation and 50 times of mercury lamps
Service life is its maximum advantage, but for now, using UVLED, there are technical immature namely uniform illuminations to ask
Topic, although traditional mercury lamp has shortcomings, but the principle that mercury lamp shines determines that its uniformity is high, fully meets PCB production
Requirement.And mercury lamp is replaced using the area array light source of more UVLED compositions, uniformity is greatly to challenge, if do not solved
The uniformity problems of light source, UVLED are impossible to obtain the popularization of large area in the exposure machine of PCB industry.
Utility model content
To solve the disadvantage that the prior art and deficiency, a kind of exposure machine that the uniformity is high is provided, to improve exposure machine
The uniformity achievees the purpose that meet user demand.
A kind of high exposure machine of the uniformity provided to realize the utility model aim, including organic frame, control system,
Glass objective table, UV-LED light source module group and UV optical detection apparatus, the glass objective table is driven by conveying device, described
Control system is electrically connected with the conveying device, UV-LED light source module group and UV optical detection apparatus, the UV-LED
Light source module group is located above conveying device and is fixedly mounted in the rack, and the UV-LED light source module group includes more
The UVLED and compound eye lens group, every UVLED of array arrangement are equipped with one group of collector lens group, institute immediately ahead of it
It states compound eye lens group to be placed in parallel by the similar fly's-eye lens of two plate shapes, every fly's-eye lens includes multiple groups array
Rectangular glass lens are equipped with plane light microscopic in the conveying device, plane light microscopic position are adjusted by the conveying device, to change
Become the direction of ultraviolet beam, the two sides up and down of the glass objective table are symmetrically arranged with two groups of optical reflector of curved surface, described in two groups
Optical reflector of curved surface to the reflection ultraviolet light beam of plane light microscopic and penetrates ultraviolet light beam progress angle adjustment respectively, to divide sector
The light beam of cloth is changed into collimated light beam, is reflected on glass objective table；The UV optical detection apparatus include testing agency with
And resistance value adjustment module, the testing agency and the resistance value adjustment module are electrically connected with the control system, the inspection
Surveying mechanism includes multiple photosensitive elements, and the photosensitive element is correspondingly arranged with the UVLED, respectively to the UVLED
Illumination detected；The resistance value adjustment module be provided with it is multiple, respectively with the UVLED be electrically connected, the resistance value tune
Section module is to adjust the size with the UVLED resistance value being electrically connected.
As a further improvement of the foregoing solution, one end of the UV-LED light source module group is provided with a coolant inlet,
The other end is provided with a cooling liquid outlet.
As a further improvement of the foregoing solution, the conveying device is mounted on machine frame inside, the rack be provided with into
Mouth and outlet, in inlet, the other end of the conveying device is arranged in exit for one end setting of the conveying device.
It as a further improvement of the foregoing solution, further include having thermostat, the thermostat includes temperature sensing
Device and heater, the temperature sensor are electrically connected at the control system, and the heater is electrically connected at the control
System.
As a further improvement of the foregoing solution, the UVLED of more array arrangement is rectangle or diamond array, is sent out
The ultraviolet light beam penetrated becomes parallel parallel light beam and the vertical or approach of perhaps leveling off to by collector lens group optically focused
In vertical irradiation in the compound eye lens group in front.
The beneficial effects of the utility model are:
Compared with prior art, the high exposure machine of a kind of uniformity provided by the utility model, by UV-LED light source module group
Be set as the UVLED of more array arrangement so that UV-LED light source module group has light projection to go out at various locations, work when
It waits, UV-LED light source module group launches the ultraviolet light beam of low-angle, is irradiated in the compound eye lens group in front, ultraviolet light beam warp
Compound eye lens group optical shaping is crossed, the uniformity of light beam effectively improves, and launches the uniform ultraviolet light beam of fan shape, passes through
The position of switching surface light microscopic can make ultraviolet light beam be respectively radiated to two groups symmetrically on large-scale curved reflective mirror, to purple
Outer light beam carries out angle adjustment, and the light beam of sector distribution is changed into collimated light beam, is reflected on glass objective table, realizes to glass
The pcb board front and back sides exposure for being equipped with film on glass objective table, realizes accurate influence transfer, in addition, the utility model
UV optical detection apparatus include testing agency and resistance value adjustment module, testing agency includes multiple photosensitive elements, sense
Optical element is correspondingly arranged with UVLED, is detected respectively to the illumination to UVLED, the result transmission that photosensitive element will test
To control system, control system controls resistance value adjustment module, adjusts the size with the UVLED resistance value being electrically connected, and then realize
Adjust the purpose of UVLED illumination.A kind of high exposure machine of uniformity provided by the utility model, can be improved the uniform of exposure machine
Degree, achievees the purpose that meet user demand.
Detailed description of the invention
Specific embodiment of the present utility model is described in further detail below in conjunction with attached drawing, in which:
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the organigram between the UVLED and lens of the utility model.
Specific embodiment
As shown in Figure 1 and Figure 2, the high exposure machine of a kind of uniformity provided by the utility model, including organic frame 1, control system
System 2, glass objective table 3, UV-LED light source module group 4 and UV optical detection apparatus, glass objective table 3 are driven by conveying device 5,
Control system 2 is electrically connected with conveying device 5, UV-LED light source module group 4 and UV optical detection apparatus, UV-LED light source die
Group 4 is located at 5 top of conveying device and is fixedly mounted in rack 1, and UV-LED light source module group 4 includes more array arrangements
UVLED and compound eye lens group 6, every UVLED one group of collector lens group, compound eye lens group 6 are installed immediately ahead of it
It is placed in parallel by the similar fly's-eye lens of two plate shapes, every fly's-eye lens includes that the rectangular glass of multiple groups array is saturating
Mirror is equipped with plane light microscopic 7 in conveying device 5,7 position of plane light microscopic is adjusted by the conveying device 5, to change ultraviolet
The direction of beam, the two sides up and down of glass objective table 3 are symmetrically arranged with two groups of optical reflector of curved surface 8, and two groups of optical reflector of curved surface 8 are right respectively
The reflection ultraviolet light beam of plane light microscopic 7 and penetrate ultraviolet light beam carry out angle adjustment, to by sector distribution light beam be changed into
Collimated light beam is reflected on glass objective table 3；UV optical detection apparatus includes testing agency and resistance value adjustment module, inspection
It surveys mechanism and resistance value adjustment module to be electrically connected with control system 2, testing agency includes multiple photosensitive elements, photosensitive element
It is correspondingly arranged with UVLED, is detected respectively to the illumination to UVLED；Resistance value adjustment module be provided with it is multiple, respectively with
UVLED is electrically connected, and resistance value adjustment module is to adjust the size with the UVLED resistance value being electrically connected.It is further improved, UV-
One end of LED light source mould group 4 is provided with a coolant inlet, and the other end is provided with a cooling liquid outlet, to UV-LED light source die
Group 4 is cooled down, is cooled down.It is further improved, conveying device 5 is mounted on inside rack 1, and rack 1 is provided with entrance and outlet, defeated
One end of device 5 is sent to be arranged in inlet, the other end of conveying device 5 is arranged in exit.In addition, the utility model further includes
There is thermostat, thermostat includes temperature sensor 9 and heater 10, and temperature sensor 9 is electrically connected at control system
2, heater 10 is electrically connected at control system 2, and the temperature that temperature sensor 9 will test passes to control system 2, control system
System 2 is compared with the temperature value of setting, is turned on or off heater 10.It is further improved, what more arrays arranged
UVLED is rectangle or diamond array, and the ultraviolet light beam emitted becomes parallel by collector lens group optically focused or levels off to
Parallel light beam, and it is vertical or level off to vertical irradiation in the compound eye lens group 6 in front.Compared with prior art,
UV-LED light source module group 4 is set more array arrangements by a kind of high exposure machine of uniformity provided by the utility model
UVLED, so that UV-LED light source module group 4 has light projection to go out at various locations, when work, UV-LED light source module group 4 is sent out
The ultraviolet light beam for projecting low-angle is irradiated in the compound eye lens group 6 in front, and ultraviolet light beam passes through 6 optics of compound eye lens group
The uniformity of shaping, light beam effectively improves, and launches the uniform ultraviolet light beam of fan shape, passes through switching surface light microscopic 7
Position, can make ultraviolet light beam be respectively radiated to two groups symmetrically on large-scale curved reflective mirror 8, carry out angle to ultraviolet light beam
The light beam of sector distribution is changed into collimated light beam, is reflected on glass objective table 3, realizes on glass objective table 3 by adjustment
The pcb board front and back sides exposure of film is installed, accurate influence transfer is realized, in addition, the UV optical detection of the utility model
Device includes testing agency and resistance value adjustment module, and testing agency includes multiple photosensitive elements, photosensitive element and UVLED
It is correspondingly arranged, is detected respectively to the illumination to UVLED, the result that photosensitive element will test is sent to control system 2, control
System 2 processed controls resistance value adjustment module, adjusts the size with the UVLED resistance value being electrically connected, and then realize and adjust UVLED illumination
Purpose.A kind of high exposure machine of uniformity provided by the utility model, can be improved the uniformity of exposure machine, reaches satisfaction and uses
The purpose of family demand.
Above embodiments are not limited to the technical solution of the embodiment itself, can be incorporated between embodiment new
Embodiment.Above embodiments are only to illustrate the technical solution of the utility model and are not intended to limit it, all without departing from this
Any modification of utility model spirit and scope or equivalent replacement should all cover the range in technical solutions of the utility model
It is interior.
Claims (5)
1. a kind of exposure machine that the uniformity is high, it is characterised in that: including organic frame, control system, glass objective table, UV-LED light
Source mould group and UV optical detection apparatus, the glass objective table are driven by conveying device, the control system with it is described defeated
Device, UV-LED light source module group and UV optical detection apparatus is sent to be electrically connected, the UV-LED light source module group is located at conveying dress
It sets top and is fixedly mounted in the rack, the UV-LED light source module group includes the UVLED of more array arrangement
And compound eye lens group, every UVLED are equipped with one group of collector lens group immediately ahead of it, the compound eye lens group is by two panels
The similar fly's-eye lens of shape is placed in parallel, and every fly's-eye lens includes the rectangular glass lens of multiple groups array, described
Plane light microscopic is installed in conveying device, plane light microscopic position is adjusted by the conveying device, to change the side of ultraviolet beam
To the two sides up and down of the glass objective table are symmetrically arranged with two groups of optical reflector of curved surface, and optical reflector of curved surface described in two groups is right respectively
The reflection ultraviolet light beam of plane light microscopic and penetrate ultraviolet light beam carry out angle adjustment, to by sector distribution light beam be changed into it is flat
Row light beam is reflected on glass objective table；The UV optical detection apparatus includes testing agency and resistance value adjustment module, institute
It states testing agency and the resistance value adjustment module to be electrically connected with the control system, the testing agency includes multiple senses
Optical element, the photosensitive element are correspondingly arranged with the UVLED, are detected respectively to the illumination to the UVLED；It is described
Resistance value adjustment module be provided with it is multiple, respectively with the UVLED be electrically connected, the resistance value adjustment module to adjust with it is described
The size for the resistance value that UVLED is electrically connected.
2. a kind of high exposure machine of uniformity according to claim 1, it is characterised in that: the UV-LED light source module group
One end is provided with a coolant inlet, and the other end is provided with a cooling liquid outlet.
3. a kind of high exposure machine of uniformity according to claim 1, it is characterised in that: the conveying device is mounted on machine
Inside frame, the rack is provided with entrance and outlet, and one end of the conveying device is arranged in inlet, the conveying device
The other end is arranged in exit.
4. a kind of high exposure machine of uniformity according to claim 1, it is characterised in that: it further include having thermostat, institute
Stating thermostat includes temperature sensor and heater, and the temperature sensor is electrically connected at the control system, described
Heater is electrically connected at the control system.
5. a kind of high exposure machine of uniformity according to claim 1, it is characterised in that: what more arrays arranged
UVLED is rectangle or diamond array, and the ultraviolet light beam emitted becomes parallel by collector lens group optically focused or levels off to
Parallel light beam, and it is vertical or level off to vertical irradiation in the compound eye lens group in front.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821679244.7U CN209055802U (en) | 2018-10-16 | 2018-10-16 | A kind of exposure machine that the uniformity is high |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821679244.7U CN209055802U (en) | 2018-10-16 | 2018-10-16 | A kind of exposure machine that the uniformity is high |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209055802U true CN209055802U (en) | 2019-07-02 |
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ID=67050714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821679244.7U Expired - Fee Related CN209055802U (en) | 2018-10-16 | 2018-10-16 | A kind of exposure machine that the uniformity is high |
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| Country | Link |
|---|---|
| CN (1) | CN209055802U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114325890A (en) * | 2021-12-30 | 2022-04-12 | 拓荆科技股份有限公司 | Optical lighting device and optical modification equipment |
-
2018
- 2018-10-16 CN CN201821679244.7U patent/CN209055802U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114325890A (en) * | 2021-12-30 | 2022-04-12 | 拓荆科技股份有限公司 | Optical lighting device and optical modification equipment |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190702 Termination date: 20191016 |
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| CF01 | Termination of patent right due to non-payment of annual fee |