CN209055652U - A kind of laser radar scanning system and laser radar - Google Patents
A kind of laser radar scanning system and laser radar Download PDFInfo
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- CN209055652U CN209055652U CN201821461235.0U CN201821461235U CN209055652U CN 209055652 U CN209055652 U CN 209055652U CN 201821461235 U CN201821461235 U CN 201821461235U CN 209055652 U CN209055652 U CN 209055652U
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Abstract
The utility model embodiment provides a kind of laser radar scanning system and laser radar, wherein laser radar scanning system includes laser, beam splitter, beam direction unit and MEMS scanning mirror；Laser is for issuing first laser signal；Beam splitter issues multi beam second laser signal for being split to first laser signal；Beam direction unit is used to whole second laser signals being focused at MEMS scanning mirror；MEMS scanning mirror is scanned for reflecting whole second laser signals.A kind of laser radar scanning system provided by the embodiment of the utility model and laser radar, multi-thread scanning is realized under the premise of not increasing laser, the design angle for significantly reducing MEMS scanning mirror reduces the producting process difficulty and production cost of MEMS scanning mirror.And opposite traditional type multi-line laser radar reduces the cost of laser radar with the combination of laser plus beam splitter instead of the combination of multiple lasers.
Description
Technical field
The utility model embodiment is related to laser beam scanning technique field more particularly to a kind of laser radar scanning system
And laser radar.
Background technique
Laser radar detects the information such as target bearing, speed by transmitting laser beam, has range accuracy height, direction
Property it is strong, response is fast, the advantages such as is not influenced by ground clutter, has been widely used social every field.And laser radar can be with
It forms precision and is up to the other steric environment map datum of Centimeter Level, therefore in advanced driving assistance system (ADAS) and unmanned
There is important application in system.
MEMS, that is, microcomputer electric control system, MEMS technology provide scanning module for laser radar, and traditional navigation is swashed
Rotating device chip in optical radar has the advantages such as high-resolution, high reliability, low cost, small size, easy of integration, quilt
The company of field of radar and personnel are good.
But since the angle of MEMS scanning mirror can not accomplish very greatly, to be based on simultaneously in two orthogonal directions of X and Y
The scanning range of the laser radar of MEMS technology is restricted.
Utility model content
The utility model embodiment provides a kind of laser radar scanning system and laser radar, to solve existing MEMS
The limited problem of laser radar scanning range.
On the one hand, the utility model embodiment provides a kind of laser radar scanning system, including laser, beam splitter, light
Beam pilot unit and MEMS scanning mirror；Wherein, laser is for issuing first laser signal；Beam splitter is used for first laser
Signal is split, and issues multi beam second laser signal；Whole second laser signals for being focused at by beam direction unit
On MEMS scanning mirror；MEMS scanning mirror is scanned for reflecting whole second laser signals.
It preferably, further include shaping collimation unit；Shaping collimation unit is set in the optical path of first laser signal, is used for
Shaping and collimation are carried out to first laser signal.
Preferably, beam splitter is diffraction grating, for first laser signal to be split according to wavelength, issues multi beam not
The second laser signal of co-wavelength.
Preferably, beam direction unit includes the first guidance mirrors and the second guidance mirrors；Wherein, the first guidance mirrors are for will be complete
Portion's second laser signal is converted to one group of collimated light beam；Second guidance mirrors are used to collimated light beam being focused at MEMS scanning mirror
On.
Preferably, shaping collimation unit includes the first collimation lens, the second collimation lens, the first shaping cylindrical mirror and second
Shaping cylindrical mirror；After first laser signal is collimated by the first collimation lens, the first shaping cylindrical mirror and second whole is passed sequentially through
Shape cylindrical mirror carries out shaping, is radiated on beam splitter after collimating finally by the second collimation lens；First shaping cylindrical mirror and
The shaping direction of two shaping cylindrical mirrors is mutually perpendicular to.
Preferably, MEMS scanning mirror is two dimension MEMS scanning mirror.
Preferably, beam splitter is set on the front focal plane of the first guidance mirrors, and MEMS scanning mirror is set to the second guiding
On the back focal plane of mirror.
Preferably, the first guidance mirrors and the second guidance mirrors are cylindrical mirror.
Preferably, laser is ASE light source, SLED light source or mode-locked laser.
On the other hand, the utility model embodiment provides a kind of laser radar, including above-mentioned laser radar scanning system.
A kind of laser radar scanning system provided by the embodiment of the utility model and laser radar are generated more by beam splitter
Beam laser signal, and be radiated on MEMS scanning mirror by beam direction unit with different angle, do not increasing laser
Under the premise of realize multi-thread scanning, significantly reduce the design angle of MEMS scanning mirror in a single direction, reduce MEMS
The producting process difficulty and production cost of scanning mirror.And opposite traditional type multi-line laser radar, with laser plus beam splitter
Combination reduces the cost of laser radar instead of the combination of multiple lasers.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is
Some embodiments of the utility model, for those of ordinary skill in the art, without creative efforts,
It is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of laser radar scanning system provided by the embodiment of the utility model；
Fig. 2 is the structural schematic diagram of shaping collimation unit provided by the embodiment of the utility model；
Fig. 3 is the structural schematic diagram of beam direction unit provided by the embodiment of the utility model；
Fig. 4 is the structural schematic diagram for the laser radar scanning system that another embodiment of the utility model provides；
Description of symbols:
101- laser；102- beam splitter；103- beam direction unit；
104-MEMS scanning mirror；105- first laser signal；106- second laser signal；
201- shaping collimation unit；The first collimation lens of 202-；The second collimation lens of 203-；
204- the first shaping cylindrical mirror；205- the second shaping cylindrical mirror；The first guidance mirrors of 301-；
The second guidance mirrors of 302-.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model
Example, every other embodiment obtained by those of ordinary skill in the art without making creative efforts belong to
The range of the utility model protection.
It can not accomplish very greatly, to cause based on MEMS simultaneously in two orthogonal directions of X and Y for the angle of MEMS scanning mirror
The problem of scanning range of the laser radar of technology is restricted, Fig. 1 are that laser radar provided by the embodiment of the utility model is swept
The structural schematic diagram of system is retouched, as shown in Figure 1, a kind of laser radar scanning system, including laser 101, beam splitter 102, light
Beam pilot unit 103 and MEMS scanning mirror 104；Wherein, laser 101 is for issuing first laser signal 105；Beam splitter
102, for being split to first laser signal 105, issue multi beam second laser signal 106；Beam direction unit 103 is used for
Whole second laser signals 106 are focused on MEMS scanning mirror 104；MEMS scanning mirror 104 is for reflecting whole second
Laser signal 106 is scanned.
Specifically, the first laser signal 105 that laser 101 issues is beam of laser, and first laser signal 105 is by dividing
Beam device 102 is split, and generates multi beam second laser signal 106, herein, second laser signal 106 has multi beam, in different hairs
Firing angle degree is issued from beam splitter 102, and injects light beam pilot unit 103.Beam direction unit 103 is by the multi beam of above-mentioned incidence
The second laser signal 106 of different angle is assembled, and multi beam second laser signal 106 is radiated at from different perspectives
On the same position of MEMS scanning mirror 104.MEMS scanning mirror 104 can turn according to different angle is radiated at MEMS scanning
Second laser signal 106 on mirror 104 is reflected, and multi beam second laser signal 106 is carried out at different angles
Scanning.Due to producing multi beam second laser signal 106 by beam splitter 102, and second laser signal 106 passes through beam direction
It is radiated on MEMS scanning mirror 104, is realized under the premise of not increasing laser 101 more with different angle after unit 103
Line scanning, the angle for effectively compensating for MEMS scanning mirror 104 in two orthogonal directions of X and Y while can not accomplish very big ask
Topic, expands the scanning range of the laser radar based on MEMS technology.
Herein, beam splitter 102 can be the device that can be arbitrarily split to first laser signal 105, such as different
The reflective gratings beam splitter or polygon prism reflector in period etc., beam direction unit 103 can be arbitrarily can be realized it is more
The device that beam second laser signal 106 is assembled, such as the lens group that single lens or multiple lens are constituted, the utility model
Embodiment is not especially limited this.
Laser radar scanning system provided by the embodiment of the utility model generates multiple laser signal by beam splitter 102,
And be radiated on MEMS scanning mirror 104 by beam direction unit 103 with different angle, under the premise of not increasing laser
Multi-thread scanning is realized, significantly reduces the design angle of MEMS scanning mirror 104 in a single direction, reduces MEMS scanning
The producting process difficulty and production cost of tilting mirror 104.And opposite traditional type multi-line laser radar, with laser 101 plus beam splitter
102 combination reduces the cost of laser radar instead of the combination of multiple lasers.
It based on the above embodiment, further include shaping collimation unit；Shaping collimation unit is set to first laser signal 105
In optical path, for carrying out shaping and collimation to first laser signal 105.
Specifically, the light that first laser signal 105 is injected beam splitter 102 by laser 101 is arranged in shaping collimation unit
On the road.Laser 101 issues first laser signal 105, and first laser signal 105 injects shaping collimation unit, and shaping collimation is single
Member carries out shaping and collimation to first laser signal 105, and the first laser signal 105 after shaping and collimation is from shaping collimation unit
It projects, injects in beam splitter 102 and be split.Herein, shaping collimation unit by the device for beam shaping and can be used for
The device of beam collimation, which combines, to be constituted, and is also possible to be provided simultaneously with the device of beam shaping and beam collimation function, has light beam
The device of shaping feature can be non-spherical lens group, microlens array, diffraction optical element, birefringent lens group or circular cone
Mirror etc., the device for having beam collimation function can be laser transit or Laser alignment system etc., this is practical new
Type embodiment is not especially limited this.
Based on any of the above-described embodiment, Fig. 2 is the structural representation of shaping collimation unit provided by the embodiment of the utility model
Figure, as shown in Fig. 2, further, shaping collimation unit 201 includes the first collimation lens 202, the second collimation lens 203, first
Shaping cylindrical mirror 204 and the second shaping cylindrical mirror 205；After first laser signal 105 is collimated by the first collimation lens 202, according to
It is secondary to pass through the first shaping cylindrical mirror 204 and the progress shaping of the second shaping cylindrical mirror 205, finally by 203 standard of the second collimation lens
It is radiated on beam splitter 102 after straight；The shaping direction of first shaping cylindrical mirror 204 and the second shaping cylindrical mirror 205 is mutually perpendicular to.
Specifically, the first collimation lens 202 is with the second collimation lens 203 for collimating to first laser signal 105
It expands, the first shaping cylindrical mirror 204 and the second shaping cylindrical mirror 205 are used for the ellipse light spot shaping first laser signal 105
For circular light spot.Herein, the shaping direction of the first shaping cylindrical mirror 204 and the second shaping cylindrical mirror 205 is mutually perpendicular to, respectively from
Both direction is modified the ellipse light spot of first laser signal 105.
Based on any of the above-described embodiment, beam splitter 102 is diffraction grating, is used for first laser signal 105 according to wavelength
It is split, issues the second laser signal 106 of multi beam different wave length.
Specifically, diffraction grating is one kind of grating, by regular structure, make incident light amplitude or phase (or
The two is simultaneously) it is modulated by periodic spatial.The most important application of diffraction grating optically is as light-splitting device, Chang Beiyong
In on monochromator and spectrometer.In the utility model embodiment, first laser signal 105 is incident upon beam splitter 102 i.e. diffraction
Grating, diffraction grating is for the laser signal of different wave length in first laser signal 105, and the angle of diffraction is different, and wavelength is bigger,
The angle of diffraction is bigger.Diffraction grating is split first laser signal 105, and by different wavelength lights according to the corresponding angle of diffraction
It is distributed.Herein, the different wavelength lights of the correspondence different angle of diffraction by diffraction grating beam splitting, i.e. second laser signal
106.The laser signal for the wavelength that the corresponding first laser signal 105 of each second laser signal 106 is generated by beam splitting.
Based on any of the above-described embodiment, Fig. 3 is that the structure of beam direction unit 103 provided by the embodiment of the utility model is shown
It is intended to, as shown in figure 3, beam direction unit 103 includes the first guidance mirrors 301 and the second guidance mirrors 302；Wherein, the first guiding
Mirror 301 is used to whole second laser signals 106 being converted to one group of collimated light beam；Second guidance mirrors 302 are used for collimated light beam
It is focused on MEMS scanning mirror 104.
Specifically, the first guidance mirrors 301 are for assembling the whole second laser signals being radiated on the first guidance mirrors 301
106, by changing the propagation angle of second laser signal 106, so that multi beam second laser signal 106 is along generally parallel orientation
It propagates, and the second guidance mirrors 302 of vertical injection.Herein, it is propagated after the first guidance mirrors 301 along generally parallel orientation more
Beam second laser signal 106 is one group of collimated light beam.Second guidance mirrors 302 are radiated on the second guidance mirrors 302 for assembling
One group of collimated light beam, by changing the propagation angle of each light beam in collimated light beam, so that one group of collimated light beam is assembled and is incident upon
The same position of MEMS scanning mirror 104 forms a hot spot.Herein, the first guidance mirrors 301 and the second guidance mirrors 302 can be with
It is the convex lens or cylindrical mirror for having convergence function, the utility model embodiment is not especially limited this.
Preferably, the first guidance mirrors 301 and the second guidance mirrors 302 are cylindrical mirror.Cylindrical mirror is non-spherical lens, can
To effectively reduce spherical aberration and color difference, there is one-dimensional enlarging function.Realize that light beam is led using cylindrical mirror in the utility model embodiment
To, only the hot spot formed by multi beam second laser signal 106 is compressed in one dimension, compared to traditional convex lens,
It can be effectively reduced the power density of hot spot, while reducing the high power failure risk of laser radar scanning system.
Based on any of the above-described embodiment, beam splitter 102 is set on the front focal plane of the first guidance mirrors 301, MEMS scanning
Tilting mirror 104 is set on the back focal plane of the second guidance mirrors 302.
Wherein, the front focal plane of the first guidance mirrors 301 referred to 301 front focus of the first guidance mirrors and perpendicular to the first guiding
The plane of 301 primary optical axis of mirror, the back focal plane of the second guidance mirrors 302 referred to the rear focus of the second guidance mirrors 302 and perpendicular to
The plane of the primary optical axis of second guidance mirrors 302.Beam splitter 102 is set on the front focal plane of the first guidance mirrors 301, MEMS is swept
It retouches tilting mirror 104 to be set on the back focal plane of the second guidance mirrors 302, offer beam direction unit 103 progress second is provided and is swashed
The accuracy that optical signal 106 is assembled.
Based on any of the above-described embodiment, MEMS scanning mirror 104 is two dimension MEMS scanning mirror.Two-dimentional MEMS scanning mirror
It is a kind of micro-reflector of deflection scanning, compared with one-dimensional MEMS scanning mirror 104, the reflection mask of two-dimentional MEMS scanning mirror
There are two freedom degrees, can constantly be changed according to the reflective operation principle of light by the position of reflecting surface, change incident light
Direction, to a certain region carry out two-dimensional scanning.
Based on any of the above-described embodiment, laser 101 is ASE light source, SLED light source or mode-locked laser.
Based on any of the above-described embodiment, the utility model embodiment provides a kind of laser radar, the scanning of laser radar
System is the laser radar scanning system of any of the above-described embodiment.
In order to better understand with application the utility model proposes a kind of laser radar scanning system and laser radar, this
Utility model carries out following example, and the utility model is not only limited to following example.
A kind of laser radar, including laser radar scanning system.Fig. 4 is the laser that another embodiment of the utility model provides
The structural schematic diagram of radar scanning system, as shown in figure 4, laser radar scanning system includes laser 101, shaping collimation unit
201, beam splitter 102, beam direction unit 103 and MEMS scanning mirror 104.
Wherein, laser 101 is for generating high power pulsed laser signal, predominantly wideband light source, such as ASE light source,
SLED light source or mode-locked laser.Herein, laser 101 is for issuing first laser signal 105, and it is single to inject shaping collimation
Member 201.Herein, first laser signal 105 is multiwavelength laser signal.
Shaping collimation unit 201 includes the first collimation lens 202, the second collimation lens 203, the first shaping cylindrical mirror 204
With the second shaping cylindrical mirror 205.After first laser signal 105 is collimated by the first collimation lens 202, the first shaping is passed sequentially through
Cylindrical mirror 204 and the second shaping cylindrical mirror 205 carry out shaping, are radiated at beam splitting after collimating finally by the second collimation lens 203
On device 102.Herein, the first shaping cylindrical mirror 204 is with the second shaping cylindrical mirror 205 respectively for the ellipse of first laser signal 105
Circle hot spot is modified in X-direction and Y direction.
Beam splitter 102 is diffraction grating, for dividing by the first laser signal 105 of shaping collimation unit 201
Light, first laser signal 105 occur diffraction and are separated at an angle.Herein, first laser signal 105 and diffraction grating
It is divided into 3 wavelength (λ1、λ2And λ3), that is, form 3 beam second laser signals 106.
Beam direction unit 103 includes the first guidance mirrors 301 and the second guidance mirrors 302, herein, 301 He of the first guidance mirrors
Second guidance mirrors 302 are cylindrical lens, and the first guidance mirrors 301 are used to 3 beam second laser signals 106 being converted to one group of directional light
Beam, the second guidance mirrors 302 are used to this group of collimated light beam being focused at MEMS scanning mirror 104.
MEMS scanning mirror 104 is two dimension MEMS scanning mirror 104, and when rotation around Y-axis, the second of 3 wavelength swashs
Optical signal 106 is rotated in XZ plane simultaneously, realizes wide-angle scanning.
The laser radar scanning system and laser radar that this example provides, wherein MEMS scanning mirror 104 is a two dimension
Reflecting mirror can be rotated independently about two quadrature axis.By n length scanning (in this example n be 3, but not limited to this),
MEMS scanning mirror 104 is rotated around Y-axis, identical tilting mirror angle, can increase rotating mirror scanning range with n times of ground.MEMS scanning turns
Mirror 104 is rotated around X-axis, and multiple wire system laser radar scanning may be implemented.It is significantly dropped in one direction by multi-wavelength design
The low design angle of MEMS scanning mirror 104, reduces the producting process difficulty and production cost of MEMS scanning mirror 104.
Opposite traditional type multi-line laser radar, with the combination of laser 101 (being herein wideband light source) and beam splitter 102 instead of multiple
The combination of laser reduces the cost of laser radar.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the embodiments of the present invention, and
It is non-that it is limited；Although the embodiments of the present invention are described in detail referring to foregoing embodiments, this field
Those of ordinary skill is it is understood that it is still possible to modify the technical solutions described in the foregoing embodiments or right
Some or all of the technical features are equivalently replaced；And these are modified or replaceed, and do not make corresponding technical solution
Essence is detached from the range of each embodiment technical solution of the embodiments of the present invention.
Claims (10)
1. a kind of laser radar scanning system, which is characterized in that swept including laser, beam splitter, beam direction unit and MEMS
Retouch tilting mirror；
Wherein, the laser is for issuing first laser signal；
The beam splitter issues multi beam second laser signal for being split to the first laser signal；
The beam direction unit is used to all second laser signals being focused at the MEMS scanning mirror；
The MEMS scanning mirror is scanned for reflecting all second laser signals.
2. laser radar scanning system according to claim 1, which is characterized in that further include shaping collimation unit；
The shaping collimation unit is set in the optical path of the first laser signal, for carrying out to the first laser signal
Shaping and collimation.
3. laser radar scanning system according to claim 1, which is characterized in that the beam splitter is diffraction grating, is used
In the first laser signal to be split according to wavelength, the second laser signal of multi beam different wave length is issued.
4. laser radar scanning system according to claim 1, which is characterized in that the beam direction unit includes first
Guidance mirrors and the second guidance mirrors；
Wherein, first guidance mirrors are used to all second laser signals being converted to one group of collimated light beam；
Second guidance mirrors are used to the collimated light beam being focused at the MEMS scanning mirror.
5. laser radar scanning system according to claim 2, which is characterized in that the shaping collimation unit includes first
Collimation lens, the second collimation lens, the first shaping cylindrical mirror and the second shaping cylindrical mirror；
After the first laser signal is collimated by first collimation lens, the first shaping cylindrical mirror and institute are passed sequentially through
It states the second shaping cylindrical mirror and carries out shaping, be radiated on the beam splitter after being collimated finally by second collimation lens；Institute
The shaping direction for stating the first shaping cylindrical mirror and the second shaping cylindrical mirror is mutually perpendicular to.
6. laser radar scanning system according to claim 4, which is characterized in that the beam splitter is set to described first
On the front focal plane of guidance mirrors, the MEMS scanning mirror is set on the back focal plane of second guidance mirrors.
7. laser radar scanning system according to claim 4, which is characterized in that first guidance mirrors and described second
Guidance mirrors are cylindrical mirror.
8. laser radar scanning system according to claim 1, which is characterized in that the MEMS scanning mirror is two dimension
MEMS scanning mirror.
9. laser radar scanning system according to claim 1, which is characterized in that the laser is ASE light source, SLED
Light source or mode-locked laser.
10. a kind of laser radar, which is characterized in that swept including laser radar described in any claim in claim 1 to 9
Retouch system.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110398752A (en) * | 2019-08-05 | 2019-11-01 | 昂纳信息技术（深圳）有限公司 | A kind of laser radar system of more visual fields |
| CN110716190A (en) * | 2019-09-27 | 2020-01-21 | 深圳奥锐达科技有限公司 | A transmitter and distance measurement system |
| CN110806639A (en) * | 2019-12-19 | 2020-02-18 | 成都英飞睿技术有限公司 | A miniature projection scanning system |
| CN110967680A (en) * | 2019-12-18 | 2020-04-07 | 中国科学院半导体研究所 | Composite Structure Rotating Mirror for 3D Scanning and Lidar Using It |
| CN112327310A (en) * | 2020-10-13 | 2021-02-05 | 浙江光珀智能科技有限公司 | Laser radar and two-dimensional scanning method of laser radar |
| CN113985420A (en) * | 2021-12-28 | 2022-01-28 | 四川吉埃智能科技有限公司 | Method for compensating scanning light path error of laser radar inclined by 45 degrees |
| CN115144842A (en) * | 2022-09-02 | 2022-10-04 | 深圳阜时科技有限公司 | Transmitting module, photoelectric detection device, electronic equipment and three-dimensional information detection method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110398752A (en) * | 2019-08-05 | 2019-11-01 | 昂纳信息技术（深圳）有限公司 | A kind of laser radar system of more visual fields |
| CN110716190A (en) * | 2019-09-27 | 2020-01-21 | 深圳奥锐达科技有限公司 | A transmitter and distance measurement system |
| CN110967680A (en) * | 2019-12-18 | 2020-04-07 | 中国科学院半导体研究所 | Composite Structure Rotating Mirror for 3D Scanning and Lidar Using It |
| CN110806639A (en) * | 2019-12-19 | 2020-02-18 | 成都英飞睿技术有限公司 | A miniature projection scanning system |
| CN112327310A (en) * | 2020-10-13 | 2021-02-05 | 浙江光珀智能科技有限公司 | Laser radar and two-dimensional scanning method of laser radar |
| CN113985420A (en) * | 2021-12-28 | 2022-01-28 | 四川吉埃智能科技有限公司 | Method for compensating scanning light path error of laser radar inclined by 45 degrees |
| CN113985420B (en) * | 2021-12-28 | 2022-05-03 | 四川吉埃智能科技有限公司 | Method for compensating scanning light path error of laser radar inclined by 45 degrees |
| CN115144842A (en) * | 2022-09-02 | 2022-10-04 | 深圳阜时科技有限公司 | Transmitting module, photoelectric detection device, electronic equipment and three-dimensional information detection method |
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