CN209020201U - A kind of self-cleaning filter device of semiconductor water purification system - Google Patents
A kind of self-cleaning filter device of semiconductor water purification system Download PDFInfo
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- CN209020201U CN209020201U CN201821697076.4U CN201821697076U CN209020201U CN 209020201 U CN209020201 U CN 209020201U CN 201821697076 U CN201821697076 U CN 201821697076U CN 209020201 U CN209020201 U CN 209020201U
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Abstract
The utility model belongs to technical field of water treatment equipment, more particularly to a kind of self-cleaning filter device of semiconductor water purification system, including a filter, water inlet pipe and outlet pipe are connected separately on the filter, the water inlet pipe is equipped with first pressure test point, and the outlet pipe is equipped with second pressure test point；Electric three-way regulating valves are additionally provided on the water inlet pipe, the first water outlet of the electric three-way regulating valves is connected with the water inlet pipe of filter, and the second water outlet of electric three-way regulating valves is connected with the cleaning pipe of the filter；The utility model is monitored on-line by pressure and realizes real-time chain control to electric three-way regulating valves, adjusts water (flow) direction in time, timely cleans to filter realization, realizes automation control, save manpower, ensure that the precision of filtering；Pretreatment raw water is made full use of, does not need in addition to prepare cleaning main line and cleaning water source, does not influence to produce water water and water quality, save material.
Description
Technical field
The utility model belongs to technical field of water treatment equipment, and in particular to a kind of semiconductor water purification system from clear
Wash filter device.
Background technique
In semiconductor fabrication process, 80% or more process will be by chemical treatment, and the processing of each Dow Chemical is all
It is unable to do without ultrapure water.In the treatment process of silicon wafer, the process of more than half is just directly entered high temperature after ultrapure water cleans
Treatment process causes device performance to decline, yield rate is low at this time if will enter silicon wafer containing impurity in water.Electronics industry
The ultrapure water resistivity of proposition >=18M Ω cm (25 DEG C), extremely close to theory pure water water quality 18.3M Ω cm (25 DEG C).
To electrolyte, DO, TOC, SiO2, the technical indicators such as particle and bacterium propose requirements at the higher level, such as 256 megabits of dynamic randoms store
Device production technology, photoetching lines are wide up to 0.1 μm, it is ensured that and this index, particle size wants≤0.05 μm in ultrapure water, and
And partial size >=0.05 μm must not exceed 500/liter ultrapure waters.
Currently, in semiconductor ultra-pure-water treatment system need that water pre-process-filter, in filter progress,
The macromolecular substances such as suspended matter, colloid, particle, bacterium and the virus in water removal are removed in retention.In the prior art, it usually needs in mistake
Individual detergent line is matched on filter device, and filter device is cleaned by individually cleaning water source, it is not only unrestrained in this way
Take material, and large effect can be generated for producing water water and water quality.When on the other hand, for the cleaning of filter device
Machine is difficult to hold, and needs the production water to filter device to be timed sampling observation, then could feed back and clean to filter device
Operation, it is time-consuming and laborious.
Utility model content
For the problems of the prior art, the purpose of this utility model is to provide a kind of semiconductor water purification systems
Self-cleaning filter device makes full use of pretreatment raw water, realizes the automatic cleaning of filter device, improves water treatment efficiency, it is ensured that
The producing water water quality of water purification system.
To achieve the goals above, the utility model is achieved using following technical scheme:
A kind of self-cleaning filter device of semiconductor water purification system, including a filter, on the filter point
It is not connected with water inlet pipe and outlet pipe, the water inlet pipe is equipped with first pressure test point, and the outlet pipe is equipped with the
2 pressure detecting points；Electric three-way regulating valves, the first water outlet of the electric three-way regulating valves are additionally provided on the water inlet pipe
Mouth is connected with the water inlet pipe of filter, and the second water outlet of electric three-way regulating valves is connected with the cleaning pipe of the filter；
The pressure checking device of the first, second pressure detecting point is electrically connected with control unit respectively, the control
Unit processed collects the pressure value that pressure checking device detects and the water (flow) direction for controlling the electric three-way regulating valves.
Preferably, pipeline supercharging valve is serially connected in the cleaning pipe of the filter.
Preferably, dosing mouth is serially connected in the cleaning pipe of the filter.
Preferably, it is serially connected with valve respectively on the water inlet pipe and outlet pipe of the filter.
Preferably, the valvular sewage drainage pipe of the water outlet connecting band of the filter.
Compared with prior art, the utility model has following technical effect that
1, self-cleaning filter device provided by the utility model makes full use of pretreatment raw water, does not need in addition to prepare clear
Main line and cleaning water source are washed, does not influence to produce water water and water quality, saves material；
2, self-cleaning filter device provided by the utility model realizes electric three-way regulating valves by pressure on-line monitoring
Real-time chain control, adjusts water (flow) direction in time, timely cleans to filter realization, realizes automation control, save
Manpower ensure that the precision of filtering；
3, self-cleaning filter device provided by the utility model passes through setting for pipeline supercharging valve and electric three-way regulating valves
It sets, can moderately adjust aperture, it is ensured that the intensity of hydraulic pressure and backwash when cleaning filter is saved and cleans water tank in the prior art
With the investment of flushing water pump；
4, in the utility model, by the detergent line of filter reserve dosing mouth, visual filtrate pollution condition into
Row dosing, and the dosage of cleaning agent is adjusted, achieve the purpose that flexible dosing；
5, self-cleaning filter device provided by the utility model, has wide range of applications, and can be used for the ultrapure water process of semiconductor
Pretreatment filtration of system, including micro-filtration, ultrafiltration and active carbon filtering etc..
Detailed description of the invention
Fig. 1 is the schematic diagram of the self-cleaning filter device of semiconductor water purification system provided by the utility model；
Figure label explanation: 10- filter, 101- valve, 11- water inlet pipe, 12- outlet pipe, the detection of 13- first pressure
Point, 14- second pressure test point, 15- cleaning pipe, 16- sewage drainage pipe, 20- electric three-way regulating valves, the first water outlet of 21-,
The second water outlet of 22-, 30- pipeline supercharging valve, 40- dosing mouth.
Specific embodiment
In order to be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, under
Face combines specific attached drawing, furthers elucidate the utility model.
As shown in connection with fig. 1, the utility model provides a kind of self-cleaning filter device of semiconductor water purification system, packet
A filter 10 is included, water inlet pipe 11 and outlet pipe 12 are connected separately on the filter 10, is set on the water inlet pipe 11
There is first pressure test point 13, the outlet pipe 12 is equipped with second pressure test point 14；It is also set on the water inlet pipe 11
There are electric three-way regulating valves 20,11 phase of water inlet pipe of the first water outlet 21 and filter 10 of the electric three-way regulating valves 20
Even, the second water outlet 22 of electric three-way regulating valves 20 is connected with the cleaning pipe 15 of the filter 10；
The pressure checking device of the first, second pressure detecting point 13,14 is electrically connected with control unit respectively, described
Control unit collect the pressure value that detects of pressure checking device and control the water (flow) direction of the electric three-way regulating valves 20.
The working principle of the utility model are as follows:
When self-cleaning filter device of the present invention operates normally, raw water is pre-processed via electric three-way regulating valves 20
It enters in filter 10, is discharged by filtered pure water via outlet pipe 12, i.e., route 1 as shown in figure 1 with water inlet pipe 11
Shown in flow path；In this process, filter 10 is in filtration condition, and the rate of filtration meets the design ginseng of filter 10
Number；
It should be noted that being arranged in above-mentioned filter process in first pressure test point 13 and second pressure test point
Hydraulic pressure in 14 pressure checking device real-time monitoring water pipe, the hydraulic pressure difference on water inlet pipe 11 and outlet pipe 12 reflect filtering
Head loss in device 10 illustrates that filter 10 is dirty, is unable to satisfy filtering and wants when head loss reaches design critical point
It asks, is cleaned, at this point, control unit adjusts the water (flow) direction of electric three-way regulating valves 20, so that pretreatment raw water warp
It is entered in filter 10 by cleaning pipe 15, filter 10 is cleaned, the wastewater disposition generated after cleaning, i.e., as attached
Flow path shown in route 2 in Fig. 1.
The utility model realizes real-time chain control to electric three-way regulating valves 20 by pressure on-line monitoring, automatically adjusts
Whole water (flow) direction timely cleans filter 10, realizes automation control, saves manpower, ensure that filtering
Precision；Also, pretreatment raw water is adequately utilized in the utility model, does not need that cleaning main line is additionally arranged and introduces clear
Wash water source does not influence the quality and water quality that produce water, saves material, improve the cleaning efficiency of filter 10.
Further, according to the utility model, pipeline supercharging valve 30 is serially connected in the cleaning pipe 15 of the filter 10.Institute
It states and is serially connected with dosing mouth 40 in the cleaning pipe 15 of filter 10.
Under cleaning state, suitable cleaning agent is added by dosing mouth 40, helps the filtrate cleaned in filter 10
And better effects are obtained, by adjusting the aperture of electric three-way regulating valves 20, the flow of adjustable ejected wash water；Pass through regulation pipe
Road pressure charging valve 30 can be pressurized water flow, to guarantee that the flow intensity that cleans to filter 10 is met the requirements, reach compared with
Good cleaning effect.
Further, in the utility model, it is serially connected with valve respectively on the water inlet pipe 11 and outlet pipe 12 of the filter 10
Door 101, the water outlet connection of the filter 10 has the sewage drainage pipe 16 of valve 101, when carrying out cleaning state, cleaning
The water produced sewage of filter 10 can be discharged via independent pipeline, also, combine the design of valve 101, can be effective
It prevents the sewage of cleaning from entering in water inlet pipe 11 and outlet pipe 12, to avoid the influence to producing water water quality, completes to filter
After the cleaning of device 10, the production aqueous mode of filter 10, and the pure water met the requirements quickly can be switched to rapidly.
Self-cleaning filter device provided by the utility model, applicability is good, can satisfy the ultrapure water process of a variety of semiconductors
Pretreatment filtration of system, including micro-filtration, ultrafiltration and active carbon filtering etc..
The characteristics of basic principles and main features and the utility model of the utility model have been shown and described above.Current row
The technical staff of industry is described in above embodiments and description it should be appreciated that the present utility model is not limited to the above embodiments
Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also
It will have various changes and improvements, these changes and improvements are both fallen in the range of claimed invention.This is practical new
The claimed range of type is defined by the appending claims and its equivalent thereof.
Claims (5)
1. a kind of self-cleaning filter device of semiconductor water purification system, it is characterised in that: including a filter, the mistake
Water inlet pipe and outlet pipe are connected separately on filter, the water inlet pipe is equipped with first pressure test point, the outlet pipe
It is equipped with second pressure test point；Electric three-way regulating valves are additionally provided on the water inlet pipe, the electric three-way regulating valves
First water outlet is connected with the water inlet pipe of filter, the second water outlet of electric three-way regulating valves and the cleaning pipe of the filter
It is connected；
The pressure checking device of the first, second pressure detecting point is electrically connected with control unit respectively, the control list
Member collects the pressure value that pressure checking device detects and the water (flow) direction for controlling the electric three-way regulating valves.
2. the self-cleaning filter device of semiconductor water purification system according to claim 1, it is characterised in that: the mistake
Pipeline supercharging valve is serially connected in the cleaning pipe of filter.
3. the self-cleaning filter device of semiconductor water purification system according to claim 1, it is characterised in that: the mistake
Dosing mouth is serially connected in the cleaning pipe of filter.
4. the self-cleaning filter device of semiconductor water purification system according to claim 1, it is characterised in that: the mistake
It is serially connected with valve respectively on the water inlet pipe and outlet pipe of filter.
5. the self-cleaning filter device of semiconductor water purification system according to claim 1, it is characterised in that: the mistake
The valvular sewage drainage pipe of the water outlet connecting band of filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821697076.4U CN209020201U (en) | 2018-10-18 | 2018-10-18 | A kind of self-cleaning filter device of semiconductor water purification system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821697076.4U CN209020201U (en) | 2018-10-18 | 2018-10-18 | A kind of self-cleaning filter device of semiconductor water purification system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209020201U true CN209020201U (en) | 2019-06-25 |
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ID=66906838
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821697076.4U Active CN209020201U (en) | 2018-10-18 | 2018-10-18 | A kind of self-cleaning filter device of semiconductor water purification system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111732247A (en) * | 2020-07-07 | 2020-10-02 | 江苏源邦环境科技有限公司 | Semiconductor ultrapure water treatment system and process |
| CN114623988A (en) * | 2022-04-13 | 2022-06-14 | 深圳赛动智造科技有限公司 | Medicine partial shipment equipment and foaming leakproofness detection device of filter membrane thereof |
-
2018
- 2018-10-18 CN CN201821697076.4U patent/CN209020201U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111732247A (en) * | 2020-07-07 | 2020-10-02 | 江苏源邦环境科技有限公司 | Semiconductor ultrapure water treatment system and process |
| CN114623988A (en) * | 2022-04-13 | 2022-06-14 | 深圳赛动智造科技有限公司 | Medicine partial shipment equipment and foaming leakproofness detection device of filter membrane thereof |
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