CN208488564U - A kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group - Google Patents
A kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group Download PDFInfo
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Abstract
本实用新型公开了一种基于部分透射式角反射镜组的片上集成部分反射器。包括输入波导、输出波导以及连接在输入波导和输出波导之间的部分透射式角反射镜组，部分透射式角反射镜组由第一反射镜、中心透射区域和第二反射镜组成，第一反射镜和第二反射镜的反射面朝向输入波导，组成90度或其它角度的角反射镜；部分透射式角反射镜组输入端经通过扩束器与输入波导连接，部分透射式角反射镜组输出端经能量耦合器与输出波导连接，输入波导和输出波导可取任意宽度。本实用新型用于集成光学芯片，可以实现宽波长范围内的任意透射率和反射率分配。结构简单，损耗低，具有较大的制作容差。
The utility model discloses an on-chip integrated partial reflector based on a partially transmissive corner reflector group. It includes an input waveguide, an output waveguide, and a partially transmissive corner mirror group connected between the input waveguide and the output waveguide. The partially transmissive corner mirror group consists of a first reflection mirror, a central transmission area and a second reflection mirror. The reflecting surfaces of the reflector and the second reflector face the input waveguide, forming a 90-degree or other angle reflector; the input end of the partially transmissive angle reflector group is connected to the input waveguide through a beam expander, and the partially transmissive angle reflector The output end of the group is connected to the output waveguide through an energy coupler, and the input waveguide and the output waveguide can have any width. The utility model is used for integrating an optical chip, and can realize any distribution of transmittance and reflectivity in a wide wavelength range. The structure is simple, the loss is low, and the manufacturing tolerance is large.
Description
Technical field
The utility model relates to a kind of on piece integration section reflectors in integrated optics chip field, more particularly, to one kind
On piece integration section reflector based on fractional transmission formula corner reflection microscope group.
Background technique
Integrated optics technique is one of the cutting edge technology of current optics development.With the fast development of Internet industry, city
To with high bandwidth, high flexibility, low cost optic communication device demand it is growing.Large-scale integrated optical chip
(photonic integrated circuit, PIC) technology is to meet the feasible program of this demand.By by active device,
Such as laser, modulator, amplifier, detector and passive device, such as splitter, attenuator, isolator, wavelength-division multiplex/demultiplex
Integrated on the same chip with device etc., integrated optics chip can provide higher bandwidth in minimum size, have simultaneously
Lower cost and higher flexibility ratio.For integrated optics field, on piece integration section reflector is a connecting laser
With the important feature of other devices, which can be reflected back laser by a part of light and be used to form resonant cavity, while will be another
A part of light is transmitted into other devices as output light.
At present on integrated optics chip platform available part reflector part be divided into it is following several: first is that being patted based on solution
Face or deep etching plane, second is that based on the distributed Bragg grating reflector that deep etching or light engraving lose, third is that being based on deep etching
Slot.These devices have its advantage, but also all have the defects that certain.
Based on the part reflector of cleavage surface by the way that waveguide material cleavage is formed nature reflecting surface, production is the simplest,
By in cleavage surface plated film also may be implemented required transmissivity and reflectivity, but the formation of cleavage surface relies on cleavage essence
Degree, the chamber that the error (generally 10 μm or so) when cleavage will affect laser is long, causes the unstable of laser output mode.
Deep etching plane is by forming similar reflecting surface on piece deep etching, it is possible to prevente effectively from the error that cleavage generates, so often
For discrete laser as output end face.But these two types of part reflectors, emergent light come into air, very
It is difficult to be coupled on chip, so being generally not used on integrated optics chip.
Part reflector based on distributed Bragg grating (distributed Bragg reflector, DBR) is also
A kind of common on piece integration section reflector, as shown in Figure 1, this class formation is by having periodically knot along wave guide direction production
The diffraction grating of structure realizes that light is fed back, while emergent light still can be transmitted on piece.The periodic structure can be by shallow
Etching or deep etching are formed.The periodic refractive index difference that light engraving loses the formation of DBR grating is smaller, and reflection bandwidth is relatively narrow, has very strong
Mode selective, therefore be not suitable for some structures for requiring broadband reflection.Deep etching DBR grating can be used as broadband reflection
Device, and can accomplish the size (the general period is μm magnitude) of very little, structure is as shown in Figure 1.But the production of DBR grating
High-precision photoetching is needed, the quality of photoetching influences the performance of structure greatly, to make tolerance very little.Meanwhile the production of grating
Process is generally not used for other structures, therefore introduces additional manufacturing process, increases manufacture difficulty and cost.
Another common on piece integration section reflector is realized by deep etching air groove.Pass through two deep etching faces
A compound reflecting surface is constituted with intermediate the air gap, due to the interference effect of light between two reflectings surface, the width of regulating tank
Different transmissivity and reflectivity may be implemented.But in order to reduce diffraction loss, the width of etching groove cannot be too big, generally with
Wavelength is in the same magnitude, and the etching quality of narrow deep etching slot not can guarantee, will if deep etching face is excessively coarse
Introduce significant losses.In addition, the transmissivity and reflectivity of deep etching slot are very sensitive to the width of slot, it is difficult to protect in actual fabrication
Card production precision.Meanwhile the structure for realizing part reflecting effect using etching groove, transmissivity and reflectivity only with it is deep
The width for losing slot is related, only one parameter can change when design, and limitation is larger.
Utility model content
In view of the deficiencies of the prior art, the purpose of this utility model is to provide one kind to be based on fractional transmission formula corner reflector
The on piece integration section reflector of group.
The technical solution adopted in the utility model is:
The utility model include an input waveguide, an output waveguide and be connected to input waveguide and output waveguide it
Between a fractional transmission formula corner reflection microscope group, fractional transmission formula corner reflection microscope group by the first reflecting mirror, central homology region and
Second reflecting mirror is arranged successively composition, and the reflecting surface of the first reflecting mirror and the second reflecting mirror is towards input waveguide.External input light
Enter from the input port of the fractional transmission formula corner reflection microscope group, a part is finally transmitted from output waveguide, a part reflection
Return input waveguide.
The fractional transmission formula corner reflection microscope group input terminal is connected with input waveguide, and output end is connected with output waveguide, defeated
Enter duct width greater than output waveguide width；The width ratio of the input waveguide width and output waveguide width is according to described
Transmissivity needed for upper integration section reflector and reflectivity value；Width than it is fixed when, the first reflecting mirror and second reflection
The reflection angle alpha of mirror transmissivity according to needed for the on piece integration section reflector and reflectivity value.
The fractional transmission formula corner reflection microscope group input terminal, which is passed through, to be connect by beam expander with input waveguide, fractional transmission formula angle
Reflection microscope group output end is connect through energy coupler with output waveguide, and input waveguide and output waveguide take any width.
The energy coupler uses tapered transmission line, is able to achieve transmitted light between central homology region and output waveguide
Low-loss coupling.The width of the tapered transmission line of energy coupler can be set between width and length along length direction change
It is set to different functional relations.
The beam expander uses tapered transmission line, of same size, output end width and the portion of input terminal width and input waveguide
Divide the input terminal of transmission-type corner reflection microscope group of same size.
The beam expander is made of multiple-mode interfence Coupled Passive Waveguide Structure and waveguide spot converter, multiple-mode interfence coupled waveguide
The input terminal of structure is connect to reduce reflection loss with input waveguide through waveguide spot converter, and waveguide spot converter is using cone
The output end of shape waveguide, multiple-mode interfence Coupled Passive Waveguide Structure is connect with fractional transmission formula corner reflection microscope group input terminal, multiple-mode interfence
Coupled Passive Waveguide Structure width and the input terminal of fractional transmission formula corner reflection microscope group are of same size.
The reflection angle alpha of first reflecting mirror and the second reflecting mirror is 45 °, i.e. the first reflecting mirror and the second reflecting mirror it is anti-
Penetrate the transmission direction angle at 45 ° in face and central homology region.
The reflecting surface of first reflecting mirror and the second reflecting mirror is formed by deep etching.
All devices of the on piece integration section reflector are all made of silica, silicon-on-insulator (SOI), polymerization
The production of the passive optical waveguides materials such as object, III-V race's semiconducting compound.
All devices of the on piece integration section reflector are all made of active semi-conductor compound-material and make, and on
Face covers electrode, provides the gain of light by Injection Current to make up device loss.
In technical solutions of the utility model, the input waveguide and fractional transmission formula corner reflection microscope group input port, output
The connection of the output port of waveguide and fractional transmission formula corner reflection group is mainly the following embodiment:
The first embodiment is: the input waveguide and fractional transmission formula corner reflection microscope group input port are directly connected to,
The output port of the output waveguide and fractional transmission formula corner reflection group is directly connected to.Input waveguide width should be with fractional transmission formula
The input port of corner reflection microscope group is of same size, and output waveguide width should be with the output end mouth width of fractional transmission formula corner reflection microscope group
It spends identical.Input waveguide width should be greater than output waveguide.The incident light entered from input waveguide, marginal portion will be by successively
It is reflected back input waveguide by two reflecting mirrors, the center portion thereof point is directly entered output waveguide.
The transmissivity and reflectivity of the embodiment are mainly determined by the ratio of input waveguide width and output waveguide width.
The ratio is bigger, and ratio shared by transmitted light is higher, and transmissivity is bigger, and reflectivity is smaller.
On integrated optics chip, input waveguide width and output waveguide width are usually fixation, in this case,
Different transmissivity and reflectivity can be realized by changing the reflection angle of the first reflecting mirror and the second reflecting mirror.When two angles
When degree is 45 °, which has minimum loss, reduces the angle, and transmissivity increases, and reflectivity reduces, but meeting is lost simultaneously
Increase.
Second of embodiment is: the input waveguide and fractional transmission formula corner reflection microscope group input port pass through an expansion
The connection of beam device, the output waveguide are connected with fractional transmission formula corner reflection microscope group output port by an energy coupler.Expand
Beam device and energy coupler pass through the realization of gradual change type tapered transmission line structure.The beam expander input port width and input waveguide
Of same size, output port and fractional transmission formula corner reflector input port are of same size.The energy coupler input port
Of same size with fractional transmission formula corner reflector output port, output port is of same size with output waveguide.
After beam expander, mould field size gradually increases the incident light entered from input waveguide.Incident light after expanding into
After entering fractional transmission formula corner reflection microscope group, marginal portion successively will be reflected back beam expander by two reflecting mirrors, and gradually coupling
Input waveguide is closed back, the center portion thereof point will enter energy coupler and gradually be coupled into output waveguide.
Transmissivity and reflectivity are mainly determined by fractional transmission formula corner reflection microscope group left and right ends width ratio in the embodiment
It is fixed, therefore, for the input waveguide and output waveguide of any width, it can pass through design fractional transmission formula corner reflection group input
The width of end and output end realizes any required transmissivity and reflectivity distribution under low-loss.It, can be with two in actual design
The width of dimension sweep test transmission-type corner reflection group input terminal and output end obtains different transmissivity and reflectivity, thus with back
Scape technology is compared, and above there are two freedom degrees in design parameter selection for the embodiment, has higher flexibility.Due to no longer needing
Change the reflection angle of the first reflecting mirror and the second reflecting mirror to realize different transmissivity and reflectivity, in present embodiment
The angle is fixed as 45 ° to obtain lowest loss.
The third embodiment is: the input waveguide and fractional transmission formula corner reflection microscope group input port pass through an expansion
The connection of beam device, the output waveguide are connected with fractional transmission formula corner reflection microscope group output port by an energy coupler.Institute
Beam expander is stated to realize by a multiple-mode interfence coupled waveguide with waveguide spot converter.The beam expander input terminal mouth width
Degree is of same size with input waveguide, and output port width is identical as fractional transmission formula corner reflector input port.The energy coupling
Clutch input port and fractional transmission formula corner reflector output port are of same size, and output port is of same size with output waveguide.
By multiple-mode interfence coupled waveguide by from input waveguide transmission come light beam widen and be divided into three parts, wherein two sides
Part successively will be reflected back beam expander by two reflecting mirrors, and be gradually coupled back into input waveguide, central part will enter energy
Amount coupler is simultaneously gradually coupled into output waveguide.According to optics invertibity, upper and lower two parts reflected light will be again in incoming wave
It leads and is concentrated around, but due to the missing of central part energy, mode is no longer matched with input waveguide, in order to reduce loss, most
Fortunately a spot-size converter is added between multiple-mode interfence coupled waveguide and input waveguide.
Mainly following two parts determine for transmissivity and reflectivity in the utility model embodiment, first is that fractional transmission formula angle
Microscope group left and right ends width ratio is reflected, second is that the length and width of multiple-mode interfence coupled waveguide.Therefore, for the defeated of any width
Enter waveguide and output waveguide, it can be real by the size of design fractional transmission formula corner reflection group, beam expander and energy coupler
Any required transmissivity and reflectivity distribution under existing low-loss.Compared with second of embodiment, which is being designed
One degree of freedom is increased in the selection of parameter again, it can change multiple-mode interfence coupled waveguide length and fractional transmission formula angle is anti-
These three parameters of microscope group left and right ends width are penetrated to obtain accurate transmissivity and reflectivity.Meanwhile for the embodiment, arrive
The energy of two parts up and down for expanding light up to fractional transmission formula corner reflection microscope group input terminal concentrates near mirror center, for
Reflecting mirror production required precision further decreases.Further, since no longer needing to change the anti-of the first reflecting mirror and the second reflecting mirror
Firing angle degree is to realize different transmissivity and reflectivity, and the angle is fixed as 45 ° to obtain lowest loss in present embodiment.
The utility model structure is as shown in Fig. 2, form narrow slot by etching relative to existing on piece integration section reflector
Come realize part reflection and fractional transmission function mode, do not need by high-precision technique etch grooving, avoid as
The drawbacks of existing structure shown in FIG. 1, reduces the difficulty of technique, there are more design parameters to choose freedom degree, and to wave
Length is insensitive.
The utility model compared with the background art, has the beneficial effect that
1, structure is simple, is easy and other devices are integrated.
2, it only needs two step of the depth to etch in technique, does not need additional technique, can be used for all integrated optics chips
Platform.
3, the selection of its design parameter has more freedom degrees, can obtain under low-loss any required transmissivity and
Reflectivity distribution.
4, insensitive to wavelength, very little is fluctuated in wide spectral range internal transmission factor and reflectivity.
5, production tolerance is big, low to the required precision of photoetching and etching.
Detailed description of the invention
Fig. 1 is in background technique based on deep etching distributed Bragg grating (distributed Bragg
Reflector, DBR) on piece integration section reflector three dimensional structure diagram.
Fig. 2 is the three dimensional structure diagram of the utility model third embodiment.
Fig. 3 is the planar structure schematic diagram of the utility model one embodiment.
Fig. 4 is the variation relation figure of the utility model one embodiment transmissivity and reflectivity with wavelength.
Fig. 5 is the utility model one embodiment transmissivity and reflectivity with input waveguide and output waveguide width ratio
Variation relation figure
Fig. 6 is that the utility model one embodiment transmissivity and reflectivity are closed with the variation of two reflecting mirror reflection angles
System's figure.
Fig. 7 is the planar structure schematic diagram of second embodiment of the utility model.
Fig. 8 is that second embodiment transmissivity of the utility model and reflectivity are defeated in different piece transmission-type corner reflection microscope group
With the variation schematic diagram of input port width under exit port width.
Fig. 9 is the planar structure schematic diagram of the utility model third embodiment.
Figure 10 is second embodiment of the utility model and third embodiment input light in fractional transmission formula corner reflector
The comparison diagram of Energy distribution at group input port.
Figure 11 is the utility model third embodiment transmissivity and reflectivity in different piece transmission-type corner reflection microscope group
With the variation schematic diagram of input port width under output port width.
Figure 12 is the change of the utility model third embodiment transmissivity and reflectivity with multiple-mode interfence coupled waveguide length
Change relational graph.
Figure 13 is the variation relation figure of the utility model third embodiment transmissivity and reflectivity with fabrication error.
Figure 14 is on piece integration section reflector transmissivity in background technique based on deep etching slot and reflectivity with production
The variation relation figure of error.
In figure: input waveguide 101, output waveguide 102, fractional transmission formula corner reflection microscope group 2, the first reflecting mirror 201, second
Reflecting mirror 202, central homology region 203, beam expander 3, multiple-mode interfence Coupled Passive Waveguide Structure 301, waveguide spot converter 302,
Energy coupler 4.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.
As shown in figure 3, the specific structure of the utility model should include at least 101, output waveguides of an input waveguide
102 and a fractional transmission formula corner reflection microscope group 2 being connected between input waveguide 101 and output waveguide 102, an input
Waveguide 101, for importing input light and receiving reflected light；One output waveguide 102, for receiving transmitted light；One part is saturating
Formula corner reflection microscope group 2 is penetrated, for realizing the transmission of part light and the reflection of part light.
Fractional transmission formula corner reflection microscope group 2 by the first reflecting mirror 201, central homology region 203 and the second reflecting mirror 202 according to
Secondary to rearrange, the first reflecting mirror 201 and the second reflecting mirror 202 are arranged in 203 two sides of central homology region, the first reflection
The reflecting surface of mirror 201 and the second reflecting mirror 202 is towards input waveguide 101, and two reflecting mirrors are by entering part transmission-type corner reflection
For light near microscope group both sides of the edge along backtracking after two secondary reflections, central homology region can make the light of immediate vicinity straight
It connects through output waveguide is entered, part light is realized with this and is reflected back input waveguide, some light transmission enters the effect of output waveguide.
In order to improve the flexibility of device design and application, input waveguide 101 and fractional transmission formula corner reflection microscope group 2 it
Between be added beam expander 3, between fractional transmission formula corner reflection microscope group 2 and output waveguide 102 be added energy coupler 4.Energy coupling
Clutch 4 can be realized by the tapered transmission line structure of a tapered waveguide width.In one embodiment, beam expander 3 passes through cone
Shape waveguide is realized.In another embodiment, beam expander 3 is converted by multiple-mode interfence Coupled Passive Waveguide Structure 301 and wave guide mode spot
Device 302 is realized.
In actual fabrication, input waveguide 101, output waveguide 102, beam expander 3, multiple-mode interfence Coupled Passive Waveguide Structure 301,
Waveguide spot converter 302, energy coupler 4 can be realized by light engraving etching technique.The reflection of first reflecting mirror 201, second
Mirror 202 can be realized by the air reflection face that a deep etching process process is formed.Preferably, in order to obtain minimum damage
Consumption, the first reflecting mirror 201, the second reflecting mirror 202 reflection angle should be 45 °.
The utility model implementation principle is as follows:
For planar optical waveguide, the mode allowed be it is discrete and limited, in actual design, generally allow optical waveguide only
Allow mode (i.e. basic mode) transmission.For the optical waveguide of symmetrical structure, basic mode be also it is symmetrical, Gaussian field can be used
Carry out approximate description, i.e. waveguide center section energy is most strong, and energy gradually reduces outward from center.
In order to realize that a part transmission, a simple method is by two border area of waveguide by a part reflection of incident light
Domain is directly made into deep etching face and the light for being located at waveguide edge is reflected back former waveguide, and the continuation of the light of central part is propagated forward.
But according to fresnel formula, the light of air surface, reflectivity R=(n-1) ^2/ are impinged perpendicularly on from the material that refractive index is n
(n+1) ^2, for common optical waveguide material, such as silicon, silica, III-V race's semiconducting compound, the reflectivity is smaller
(< 30%), most of light all enter in air, thus introduce great loss.A kind of settling mode is in material table
High-reflecting film is plated in face, but can thus introduce additional technique, increases the difficulty of structure fabrication, and the process of plated film is same
In the presence of very big error.
The method that reflection is effectively reduced in another kind is the full transmitting principle using light, i.e., when by optically denser medium, (i.e. light exists light
Refractive index in this medium is big) when being mapped to the interface of optically thinner medium (i.e. light refractive index in this medium is small), if incident
Angle is greater than critical angle, and light will be all reflected back toward in former medium.In space optics, it is often used total reflection prism and realizes optical path
Deviation, for interface be isosceles right triangle prism, when light is perpendicular to bottom edge incidence, by being totally reflected twice, entirely
Portion's light will be along backtracking.
The utility model applies same theory on integrated optics chip, the difference is that, due in planar light
In waveguide, the Energy distribution of light field in a certain range, therefore can be by being added a central homology region and two upper and lower
Reflecting mirror component part transmission-type corner reflection microscope group, so that a part of light is transmitted from central area, the light at edge passes through twice
It is reflected back former waveguide, thereby realizes the function of part reflector.
The material for being n for refractive index, the cirtical angle of total reflection with air interface are C=arcsin (1/n), this reality
In novel, as long as the angle of reflection of reflecting mirror is greater than this critical angle, the non-lossy portions reflection of incident light may be implemented.
In practical applications, reflected light back is generally required to return input waveguide, so two reflecting mirrors are preferably 45 degree anti-
Mirror is penetrated, 180 ° of deflections of incident light may be implemented in this way, there is minimum loss.But in incident waveguide and outgoing duct width
In the case where fixation, transmissivity and reflectivity can only be changed by changing the angle of reflecting mirror, but a setting loss can be introduced in this way
Consumption.
In order to increase the flexibility of structure design, can be added between input waveguide and fractional transmission formula corner reflection microscope group
Energy coupler is added between fractional transmission formula corner reflection microscope group and output waveguide in beam expander.Beam expander can be by incident light
Mould field broadening, the mould field intermediate portion after broadening transmitted by central homology region, and transmitted light passes through energy coupler again
Into outgoing waveguide.In this way, fractional transmission formula corner reflection microscope group left and right ends width can be arbitrarily arranged in reasonable interval, with
Realize different transmissivity and reflectivity.The reflection angle of reflecting mirror does not need to change simultaneously, can be fixed as 45 °.
Energy coupler can realize that conical gradual change waveguide is that one section of width gradually becomes with length by conical gradual change waveguide
The waveguide of change, during conical gradual change waveguide transmission, mode can be gradually changed and be damaged with the variation of duct width light
Consumption is very low, in this way, the energy coupling between different in width optical waveguide may be implemented in conical gradual change waveguide.Based on same principle, cone
Shape tapered waveguide can also be used as beam expander use.In practical applications, according to different demands, tapered transmission line width becomes with length
Change desirable different functions type, such as linear, exponential type, parabolic type, Gaussian.
Another beam expander is achieved in that light beam passes through multimode waveguide, due to more based on multiple-mode interfence coupled waveguide
Interfering with each other between a guided mode, along the direction of propagation of waveguide, periodic interval will appear one of input field or
The image of multiple duplications.Multiple-mode interfence coupled waveguide is used generally as beam splitter, but actually also may be implemented incident light
The effect that mode expands, within the scope of certain length, incident light can be divided into three parts, and three by multiple-mode interfence coupled waveguide
The allocation proportion divided is related with the length and width of multiple-mode interfence coupled waveguide, in this way in fractional transmission formula corner reflection microscope group or so
Except the width of both ends, multiple-mode interfence coupled waveguide increases a parameter again can control the transmissivity and reflectivity of device, into
One step increases the flexibility of design.
The utility model specific embodiment is as follows:
Embodiment 1
As shown in figure 3, on piece integration section reflector includes 101, transmission-type corner reflection microscope groups 2 of an input waveguide
With an output waveguide 102.Part of transmission-type corner reflection microscope group 2 is by the first reflecting mirror 201,203 and of central homology region
Second reflecting mirror 202 is arranged successively composition, and the reflecting surface of the first reflecting mirror 201 and the second reflecting mirror 202 is towards input waveguide
101,2 input terminal of fractional transmission formula corner reflection microscope group is connected with input waveguide 101, and output end is connected with output waveguide 102, input
101 width of waveguide is greater than 102 width of output waveguide；The input terminal width and input waveguide 101 of fractional transmission formula corner reflection microscope group 2
Identical, output end width is identical as output waveguide 102.
The incident light entered from input waveguide, upper and lower two parts are in fractional transmission formula corner reflection microscope group by complete twice
Reflective returns input waveguide, and intermediate portion enters output waveguide by central homology region.Two reflecting mirrors are by entrance
It is divided to the light near transmission-type corner reflection microscope group both sides of the edge after two secondary reflections along backtracking, central homology region can make
The light of immediate vicinity is directed through into output waveguide, is realized part light with this and is reflected back input waveguide, some light transmission enters
The effect of output waveguide.
Fractional transmission formula corner reflection microscope group has complete wavelength insensitivity, its transmissivity and reflectivity under different wave length
Variation as shown in figure 4, in 300nm wave-length coverage, transmissivity and reflectivity changes are respectively less than 0.05.
In the case where requiring to be lost minimum, the angle of reflection of the first reflecting mirror 201 and the second reflecting mirror 202 is both designed as
45°.The width of input waveguide and output waveguide be can change at this time than distributing to obtain different transmissivity and reflectivity.Fig. 5
It is transmissivity and reflectivity with the variation relation figure of input waveguide and output waveguide width ratio, increases as width compares, transmissivity
Reduce, reflectivity increases, and transmissivity and reflectivity are interior adjustable on a large scale, while loss is also increased slightly, but maximum loss is still
Less than 30%.
It, can be by changing the first reflecting mirror 201 and second in the case where fixed input waveguide and output waveguide width
The reflection angle of reflecting mirror 202 obtains different transmissivity and reflectivity.Fig. 6 is transmissivity and reflectivity with the reflection angle
Variation relation figure.When reflection angle deviates 45 °, transmissivity is increased slightly, and reflectivity declines to a great extent.Which is adjustable
Transmissivity and reflectivity range it is limited, and a large amount of loss can be introduced.
Embodiment 2
As shown in fig. 7, on piece integration section reflector includes 101, the fractional transmission formula corner reflections of an input waveguide
The beam expander 3 of output waveguide 102, one of microscope group 2, one and an energy coupler 4.Part of transmission-type corner reflection microscope group 2
It is rearranged from top to bottom by the first reflecting mirror 201, central homology region 203 and the second reflecting mirror 202, beam expander 3 and energy
Coupler 4 is tapered transmission line structure.
Consider that it is linear with waveguide length to be all made of duct width for tapered transmission line structure in the present embodiment from simplifying in design
The form of variation.3 input terminal of beam expander and input waveguide 101 are of same size, output end and fractional transmission formula corner reflection microscope group 2
Input terminal is of same size, and 4 input terminal of energy coupler and the output end of fractional transmission formula corner reflection microscope group 2 are of same size, output
It holds of same size with output waveguide.The incident light entered from input waveguide, after beam expander expands, upper and lower two parts are in part
Pass through in transmission-type corner reflection microscope group such as embodiment 1 and be reflected back input waveguide twice, intermediate portion is by center
Transmission region enters output waveguide.
The wavelength insensitivity of the embodiment is same as Example 1, but transmissivity and reflectivity are no longer by incident waveguide
It is determined with outgoing duct width, but depends on fractional transmission formula corner reflection group left and right ends width.In order to obtain lowest loss,
The reflection angle of reflecting mirror is fixed as 45 °.Fig. 8 is under fixed input waveguide and output waveguide width, and transmissivity and reflectivity exist
With the variation schematic diagram of output port width under different piece transmission-type corner reflection microscope group input port width.Therefore, the implementation
There are two the parameters of size to change in design for example, the two parameters of two-dimensional scanning can obtain any required transmissivity
And reflectivity, and embodiment loss is smaller, maximum loss is less than 0.15, and lowest loss is less than 0.05.
Embodiment 3
As shown in figure 9, on piece integration section reflector includes 101, the fractional transmission formula corner reflections of an input waveguide
The beam expander 3 of output waveguide 102, one of microscope group 2, one and an energy coupler 4.Part of transmission-type corner reflection microscope group 2
By the first reflecting mirror 201, central homology region 203 and the second reflecting mirror 202 are sequentially connected composition, and energy coupler 4 is taper
Waveguiding structure, beam expander 3 are made of multiple-mode interfence Coupled Passive Waveguide Structure 301 and waveguide spot converter 302.Beam expander 3 inputs
End is of same size with input waveguide 101, and output end and the input terminal of fractional transmission formula corner reflection microscope group 2 are of same size, energy coupling
4 input terminal of clutch and the output end of fractional transmission formula corner reflection microscope group 2 are of same size, and output end is of same size with output waveguide.
From input waveguide enter incident light, after beam expander expands, upper and lower two parts in fractional transmission formula corner reflection microscope group such as
Enter output waveguide by central homology region by being reflected back input waveguide, intermediate portion twice with embodiment 1.
Same as Example 1, which equally has wavelength insensitivity.It is same as Example 2, transmissivity and reflection
Rate is similarly dependent on fractional transmission formula corner reflection group left and right ends width.In order to obtain lowest loss, the reflection angle of reflecting mirror
It is fixed as 45 °.But its beam expander to expand effect different from embodiment 2, Figure 10 is embodiment 2 and embodiment under same length
3 beam expander output end Light Energy distribution maps, for embodiment 2, light field is still approximately Gaussian, and the light field of embodiment 3
It is divided into three parts.The energy of its upper and lower two parts light is generally within mirror center, shadow of the reflection loss by etching quality in this way
Sound is smaller.In addition, for multiple-mode interfence coupled waveguide, it is also related with waveguide length to expand effect, and Figure 11 is transmissivity and anti-
Rate is penetrated under different piece transmission-type corner reflection microscope group output port width with the variation schematic diagram of input port width.Figure 12 is
Transmissivity and reflectivity with multiple-mode interfence coupled waveguide length variation relation figure.Therefore in design, there are three the embodiments
Parameter can scan: multiple-mode interfence coupled waveguide length and fractional transmission formula corner reflection group left and right ends width, the embodiment exist
There is most freedom degrees in design, the ginseng with lowest loss can be chosen while obtaining required transmissivity and reflectivity
Number.
Compared with the deep etching slot in background technique, the utility model another advantage is that have higher production appearance
Difference.On the make main error etches the error of position during deep etching, and Figure 13 is the utility model embodiment 3
Middle transmissivity and reflectivity with fabrication error variation relation figure.Figure 14 is that the on piece based on deep etching slot is integrated in background technique
The transmissivity of part reflector and reflectivity with the etching position fabrication error of deep etching variation relation figure.With background technique phase
There is great advantage in production tolerance than, the utility model, etch 1 μm of position deviation, transmissivity and reflectivity almost without
Variation, and this error is easily controlled in actual fabrication.
The above measure is descriptive nature, any protection scope that patent is belonged to its similar scheme of spirit.
Claims (10)
1. a kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group, it is characterised in that:
Including an input waveguide (101), an output waveguide (102) and it is connected to input waveguide (101) and output waveguide
(102) a fractional transmission formula corner reflection microscope group (2) between, fractional transmission formula corner reflection microscope group (2) is by the first reflecting mirror
(201), central homology region (203) and the second reflecting mirror (202) are arranged successively composition, and the first reflecting mirror (201) and second is instead
The reflecting surface of mirror (202) is penetrated towards input waveguide (101).
2. a kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group according to claim 1,
Be characterized in that: fractional transmission formula corner reflection microscope group (2) input terminal is connected with input waveguide (101), output end and output wave
It leads (102) to be connected, input waveguide (101) width is greater than output waveguide (102) width；Input waveguide (101) width and
The width of output waveguide (102) width is than the transmissivity according to needed for the on piece integration section reflector and reflectivity value；
Width than it is fixed when, the reflection angle alpha of the first reflecting mirror (201) and the second reflecting mirror (202) is according to the on piece integration section
Transmissivity needed for reflector and reflectivity value.
3. a kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group according to claim 1,
Be characterized in that: fractional transmission formula corner reflection microscope group (2) input terminal, which is passed through, to be connect by beam expander (3) with input waveguide (101),
Fractional transmission formula corner reflection microscope group (2) output end is connect through energy coupler (4) with output waveguide (102), input waveguide (101)
Any width is taken with output waveguide (102).
4. a kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group according to claim 3,
Be characterized in that: the energy coupler (4) uses tapered transmission line, is able to achieve transmitted light in central homology region (203) and output
Coupling between waveguide (102).
5. a kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group according to claim 3,
Be characterized in that: the beam expander (3) uses tapered transmission line, of same size, the output end of input terminal width and input waveguide (101)
Width and the input terminal of fractional transmission formula corner reflection microscope group (2) are of same size.
6. a kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group according to claim 3,
Be characterized in that: the beam expander (3) is made of multiple-mode interfence Coupled Passive Waveguide Structure (301) and waveguide spot converter (302), more
The input terminal of Mode interference Coupled Passive Waveguide Structure (301) is connect through waveguide spot converter (302) with input waveguide (101), waveguide
Spot-size converter (302) uses tapered transmission line, and the output end of multiple-mode interfence Coupled Passive Waveguide Structure (301) and fractional transmission formula angle are anti-
Penetrate the connection of microscope group (2) input terminal, multiple-mode interfence Coupled Passive Waveguide Structure (301) width and fractional transmission formula corner reflection microscope group (2)
Input terminal is of same size.
7. being reflected according to a kind of any on piece integration section based on fractional transmission formula corner reflection microscope group of claim 3-6
Device, it is characterised in that: the reflection angle alpha of first reflecting mirror (201) and the second reflecting mirror (202) is 45 °.
8. -6 any a kind of on piece integration section reflection based on fractional transmission formula corner reflection microscope group according to claim 1
Device, it is characterised in that: the reflecting surface of first reflecting mirror (201) and the second reflecting mirror (202) is formed by deep etching.
9. -6 any a kind of on piece integration section reflection based on fractional transmission formula corner reflection microscope group according to claim 1
Device, it is characterised in that: all devices of the on piece integration section reflector be all made of silica, silicon-on-insulator (SOI),
The production of the passive optical waveguide material of polymer or III-V race's semiconducting compound.
10. a kind of -6 any on piece integration sections based on fractional transmission formula corner reflection microscope group are anti-according to claim 1
Emitter, it is characterised in that: all devices of the on piece integration section reflector are all made of active semi-conductor compound-material system
Make, and covers electrode above.
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| CN201820486160.5U CN208488564U (en) | 2018-04-08 | 2018-04-08 | A kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group |
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| CN201820486160.5U CN208488564U (en) | 2018-04-08 | 2018-04-08 | A kind of on piece integration section reflector based on fractional transmission formula corner reflection microscope group |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108333681A (en) * | 2018-04-08 | 2018-07-27 | 浙江大学 | On piece integration section reflector based on fractional transmission formula corner reflection microscope group |
| CN110231678A (en) * | 2019-06-25 | 2019-09-13 | 深圳先进技术研究院 | A kind of unidirectional phasmon Bragg waveguide reflector |
-
2018
- 2018-04-08 CN CN201820486160.5U patent/CN208488564U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108333681A (en) * | 2018-04-08 | 2018-07-27 | 浙江大学 | On piece integration section reflector based on fractional transmission formula corner reflection microscope group |
| CN108333681B (en) * | 2018-04-08 | 2023-10-13 | 浙江大学 | On-chip integrated partial reflector based on partial transmission type angular reflector group |
| CN110231678A (en) * | 2019-06-25 | 2019-09-13 | 深圳先进技术研究院 | A kind of unidirectional phasmon Bragg waveguide reflector |
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Inventor after: Guo Jia Inventor after: He Jianjun Inventor before: Guo Jia Inventor before: He Jianjun Inventor before: Gao Yu |
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Granted publication date: 20190212 |