[go: up one dir, main page]

CN208384435U - Tank door control system and vacuum equipment of vacuum equipment - Google Patents

Tank door control system and vacuum equipment of vacuum equipment Download PDF

Info

Publication number
CN208384435U
CN208384435U CN201820820757.9U CN201820820757U CN208384435U CN 208384435 U CN208384435 U CN 208384435U CN 201820820757 U CN201820820757 U CN 201820820757U CN 208384435 U CN208384435 U CN 208384435U
Authority
CN
China
Prior art keywords
air pressure
tank door
vacuum equipment
tank
control system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201820820757.9U
Other languages
Chinese (zh)
Inventor
丘福生
王松沛
陈秋景
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhongshan Kaixuan Vacuum Science and Technology Co Ltd
Original Assignee
Zhongshan Kaixuan Vacuum Science and Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhongshan Kaixuan Vacuum Science and Technology Co Ltd filed Critical Zhongshan Kaixuan Vacuum Science and Technology Co Ltd
Priority to CN201820820757.9U priority Critical patent/CN208384435U/en
Application granted granted Critical
Publication of CN208384435U publication Critical patent/CN208384435U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Manipulator (AREA)

Abstract

The utility model relates to a tank door control technology specifically discloses a vacuum apparatus's tank door control system, and this system includes: the air pressure detection device comprises a first power device, an air pressure sensor, an air break valve detection device, a starting device and a control device. The first power device is connected with the tank door; the air pressure sensor is positioned on the inner side of the tank body and used for generating an air pressure signal according to the air pressure on the inner side of the tank body; the air break valve detection device is used for generating a time signal according to the opening time of the air break valve; the starting device is connected with the air pressure sensor and the air break valve detection device and is used for outputting a starting signal when the air pressure is greater than or equal to the atmospheric pressure or the opening time of the air break valve is greater than or equal to a preset value; the control device is connected with the starting device and used for controlling the first power device according to the control signal when receiving the starting signal. The tank door control system provided by the disclosure improves the reliability of the system through the arrangement of the air break valve detection device and the air pressure sensor.

Description

The tank accelerator control system and vacuum equipment of vacuum equipment
Technical field
The utility model relates generally to tank door control technology, gates in particular to a kind of tank of vacuum equipment System processed and vacuum equipment.
Background technique
Vacuum equipment is the device of a kind of generation and maintenance vacuum, and vacuum equipment is generally included for generating vacuum state Vacuum evacuation device and tank body for maintaining vacuum state.Wherein, tank body is provided with for being connected to external tank door and for letting out The air valve of pressure, when needing to unclamp tank door, it is necessary first to open air valve so that air pressure on the inside of tank door is equal to atmospheric pressure, Then tank door could be carried out other operations such as unclamping.
In the related technology, usually tank door is controlled using tank accelerator control system, tank accelerator control system generally includes to set The baroceptor being placed on the inside of tank door, when the air pressure that baroceptor detects is greater than or equal to atmospheric pressure, tank gate The operation that system processed can unclamp tank door according to control signal.
However, in the related technology, on the one hand, Changes in weather can cause change of atmospheric pressure, the gas that baroceptor detects Pressure may may be because that Changes in weather cannot reach preset atmospheric pressure, thus tank door is caused to be unable to normal operating;Another party Face, since baroceptor failure also causes tank door to be unable to normal operating.
It should be noted that the information in above-mentioned background technology part utility model is only used for reinforcing to the utility model The understanding of background, therefore may include the information not constituted to the prior art known to persons of ordinary skill in the art.
Utility model content
One main purpose of the utility model is, overcome above-mentioned the relevant technologies due to weather variation or air pressure The problem of tank door caused by sensor failure is unable to normal operating.
To realize above-mentioned purpose of utility model, the utility model adopts the following technical solution: providing a kind of vacuum equipment Tank accelerator control system, the vacuum equipment include the air valve for tank body pressure release, which includes: the first power Device, baroceptor, air valve detection device, starter and control device.First power device and the tank door connect It connects, for providing the power of locking or release along first direction to the tank door;Baroceptor is located at the interior of the tank body Side generates air pressure signal for detecting the air pressure on the inside of the tank body, and according to the air pressure on the inside of the tank door;Air valve detection Device is used to detect the opening time of the air valve, and according to the air valve opening time generation timing signal;Starting dress It sets and is connect with the baroceptor, the air valve detection device, for receiving the air pressure signal and the time signal, It is greater than or equal in advance when the time that the air pressure that the air pressure signal indicates is greater than or equal to atmospheric pressure or time signal expression If exporting enabling signal when value;Control device is connect with the starter, for when receiving the enabling signal, according to It controls signal and controls first power device.
An embodiment according to the present utility model, the control device are programmable logic controller (PLC).
An embodiment according to the present utility model, first power device include: at least one bi-directional expansion cylinder, Pneumatic supply, 3 position-5 way solenoid valve.Bi-directional expansion cylinder includes the first air pressure input terminal and the second air pressure input terminal, is used for institute State the power that tank door provides locking or unclamps;Pneumatic supply is used to provide air pressure to the bi-directional expansion cylinder;3 position-5 way electromagnetism The first working end of valve is connect with the first air pressure input terminal of the bi-directional expansion cylinder, the second working end and the bi-directional expansion gas Second air pressure input terminal of cylinder connects, and inlet end is connect with the pneumatic supply, and control terminal is connect with the control device.
An embodiment according to the present utility model, first power device includes: the first electric cylinder group, second electronic Cylinder group and power supply module.First electric cylinder group is connect with the tank door, for providing the power of locking to the tank door;Second Electric cylinder group is connect with the tank door, for providing the power unclamped to the tank door;Power supply module is electric with described first respectively Dynamic cylinder group, the connection of the second electric cylinder group, under the control of the control device alternatively to the first electric cylinder group or Second electric cylinder group persistently provides electric energy.
An embodiment according to the present utility model, the power supply module include: that first voltage output end, second voltage are defeated Outlet, first contactor and second contactor.First voltage output end is connect with the first electric cylinder group;Second voltage is defeated Outlet is connect with the second electric cylinder group;The first end of first contactor is connect with the first voltage output end, second end It is connect with the first electric cylinder group, control terminal is connect with the control device;The first end of second contactor and described second Voltage output end connection, second end are connect with the second electric cylinder group, and control terminal is connect with the control device;The control Device alternatively persistently exports Continuity signal to the first contactor or the second contactor.
An embodiment according to the present utility model, the system also includes the second power device, the second power dress It sets for providing the power that side in a second direction is opened or side is closed to the tank door.
An embodiment according to the present utility model, the preset time are 2 minutes.
An embodiment according to the present utility model, the system also includes indicator light, the indicator light and the control Device connection.
The utility model also provides a kind of vacuum equipment, the tank accelerator control system including above-mentioned vacuum equipment.
The tank accelerator control system that the disclosure provides, while being provided with air valve detection device and baroceptor, air valve Detection device can detect the air valve opening time.It is more than or equal to preset time or air pressure when the air valve opening time When the air pressure that sensor detects is more than or equal to atmospheric pressure, tank accelerator control system can be grasped tank door according to control signal Make.On the one hand, the disclosure improves the reliability of tank accelerator control system, avoids the variation due to weather or baroceptor The problem of tank door caused by the factors such as failure is unable to normal operating;Another aspect disclosure structure is simple, and cost is relatively low.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not The utility model can be limited.
Detailed description of the invention
The drawings herein are incorporated into the specification and forms part of this specification, and shows and meets the utility model Embodiment, and be used to explain the principles of the present invention together with specification.It should be evident that the accompanying drawings in the following description is only It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of structural scheme of mechanism of exemplary embodiment of tank accelerator control system of disclosure vacuum equipment;
Fig. 2 is the structure of the first power device in a kind of exemplary embodiment of tank accelerator control system of disclosure vacuum equipment Schematic diagram;
Fig. 3 is the another of the first power device in a kind of exemplary embodiment of tank accelerator control system of disclosure vacuum equipment Kind structural schematic diagram;
Fig. 4 is a kind of exemplary embodiment structural schematic diagram of tank accelerator control system of disclosure vacuum equipment.
Specific embodiment
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be real in a variety of forms It applies, and is not understood as limited to example set forth herein;On the contrary, thesing embodiments are provided so that the utility model will be more complete Face and complete, and the design of example embodiment is comprehensively communicated to those skilled in the art.Identical appended drawing reference in figure Indicate same or similar structure, thus the detailed description that them will be omitted.
Although the term of relativity, such as "upper" "lower" is used to describe a component of icon for another in this specification The relativeness of one component, but these terms are in this manual merely for convenient, for example, with reference to the accompanying drawings described in show The direction of example.It is appreciated that, if making it turn upside down the device overturning of icon, the component described in "upper" will As the component in "lower".Term of other relativities, such as "high" " low " "top" "bottom" " left side " " right side " etc. are also made to have similar Meaning.When certain structure is at other structures "upper", it is possible to refer to that certain structural integrity is formed in other structures, or refer to certain structure It is " direct " to be arranged in other structures, or refer to that certain structure is arranged in other structures by the way that another structure is " indirect ".
Term "one", " one ", " described " to indicate there are one or more elements/component part/etc.;Term " packet Include " and " having " to indicate the open meaning being included and refer to that the element/component part/in addition to listing waits it Outside also may be present other element/component part/etc..
The present exemplary embodiment provides a kind of tank accelerator control system of vacuum equipment first, as shown in Figure 1, true for the disclosure A kind of structural scheme of mechanism of exemplary embodiment of the tank accelerator control system of null device.The vacuum equipment includes being used for tank body pressure release Air valve, the tank accelerator control system include: the first power device 1, baroceptor 2, air valve detection device 3, starting dress Set 4 and control device 5.First power device 1 is connect with the tank door, for providing the lock along first direction to the tank door Power that is tight or unclamping;Baroceptor 2 is located at the inside of the tank body, for detecting the air pressure on the inside of the tank body, and root Air pressure signal is generated according to the air pressure on the inside of the tank door;Air valve detection device 3 is used to detect the opening time of the air valve, And according to the air valve opening time generation timing signal;Starter 4 and the baroceptor, the air valve detect Device connection, for receiving the air pressure signal and the time signal, when the air pressure that the air pressure signal indicates is greater than or waits Enabling signal is exported when the time that atmospheric pressure or the time signal indicate being greater than or equal to preset value;Control device 5 and institute Starter connection is stated, for controlling first power device according to control signal when receiving the enabling signal.
In the present exemplary embodiment, air valve detection device 3 can be a kind of timer circuit plate, the timer circuit plate It can be connect with the control device of air valve, which can receive the air valve of air valve control device sending Open signal and the duration for calculating open signal.Starter 4 can be a kind of logic card.The logic card with The baroceptor, air valve detection device connection, can be greater than or equal to when the air pressure that the air pressure signal indicates The time that atmospheric pressure or the time signal indicate exports enabling signal when being greater than or equal to preset value.The control device 5 can Think programmable logic controller (PLC).Programmable logic controller (PLC) can be when receiving the enabling signal, according to control signal Control first power device.The preset time can be arranged according to the vacuum degree of air valve pressure relief capability and tank body, In the present exemplary embodiment, air valve can complete pressure release to tank body in 2 minutes.I.e. preset time can be 2 minutes.
The tank accelerator control system that the disclosure provides, while being provided with air valve detection device and baroceptor, air valve Detection device can detect the air valve opening time.It is more than or equal to preset time or air pressure when the air valve opening time When the air pressure that sensor detects is more than or equal to atmospheric pressure, tank accelerator control system can be grasped tank door according to control signal Make.On the one hand, the disclosure improves the reliability of tank accelerator control system, avoids the variation due to weather or baroceptor The problem of tank door caused by the factors such as failure is unable to normal operating;Another aspect disclosure structure is simple, and cost is relatively low.
In the present exemplary embodiment, as shown in Fig. 2, being a kind of exemplary reality of tank accelerator control system of disclosure vacuum equipment Apply the structural schematic diagram of the first power device in example.First power device may include: at least one bi-directional expansion cylinder 11, pneumatic supply 12,3 position-5 way solenoid valve 13.Bi-directional expansion cylinder 11 includes that the first air pressure input terminal and the second air pressure input End, the power for providing locking to the tank door or unclamping;Pneumatic supply 12 is used to provide air pressure to the bi-directional expansion cylinder; The first working end of 3 position-5 way solenoid valve is connect with the first air pressure input terminal of the bi-directional expansion cylinder, the second working end and institute The second air pressure input terminal connection of bi-directional expansion cylinder is stated, inlet end is connect with the pneumatic supply, and control terminal and the control fill Set connection.When the first air pressure input terminal of bi-directional expansion cylinder 11 is connected to pneumatic supply, the piston of bi-directional expansion cylinder 11 stretches out; When the second air pressure input terminal of bi-directional expansion cylinder 11 is connected to pneumatic supply, the piston of bi-directional expansion cylinder 11 is retracted.Control dress Setting can be by 11 first air pressure input terminal of 3 position-5 way solenoid valve control bi-directional expansion cylinder and the second air pressure input terminal and gas Potential source it is open close, and then control tank door release and locking.In the present exemplary embodiment, the air pressure inside of pneumatic supply 12 can be protected It holds within the scope of 0.4-0.6Mpa, to provide the power of enough releases or locking for tank door.In other exemplary embodiments In, pneumatic supply 12 can also provide the air pressure of other pressure according to the setting of tank door, these belong to the protection scope of the disclosure.
There are four kinds of control actions in control process for the tank door of vacuum equipment: unclamping, side is opened, side is closed and is locked.When Tank door progress side can just be opened when tank door unclamps in place or control is closed in side, tank door can just carried out when tank door side is closed in place Locking and release control.In the present exemplary embodiment, control device can continue to believe to 13 input control of 3 position-5 way solenoid valve Number with control bi-directional expansion cylinder 11 the first air pressure input terminal or the second air pressure input terminal and pneumatic supply it is normally opened.So that It is also ensured that tank door is unclamped in place or locked in place in the case of 11 gas leakage of bi-directional expansion cylinder.
In the above exemplary embodiments, there are the risks of gas leakage for bi-directional expansion cylinder 11, when 11 gas leakage of bi-directional expansion cylinder When will cause pneumatic supply 12 persistently burst pressure.In other exemplary embodiments, as shown in figure 3, being the tank of disclosure vacuum equipment Another structural schematic diagram of first power device in a kind of exemplary embodiment of accelerator control system.First power device 1 It may include: the first electric cylinder group 14, the second electric cylinder group 15 and power supply module 16.First electric cylinder group 14 and the tank door Connection, for providing the power of locking to the tank door;Second electric cylinder group 15 is connect with the tank door, is used for the tank door The power unclamped is provided;Power supply module 16 is connect with the first electric cylinder group, the second electric cylinder group respectively, in the control Electric energy is persistently alternatively provided to the first electric cylinder group or the second electric cylinder group under the control of device processed.
Wherein, power supply module 16 is under the control of the control device alternatively to the first electric cylinder group or the second electricity A kind of embodiment that dynamic cylinder group persistently provides electric energy can be, and the power supply module may include: first voltage output end, the Two voltage output ends, first contactor and second contactor.First voltage output end is connect with the first electric cylinder group;The Two voltage output ends are connect with the second electric cylinder group;The first end of first contactor and the first voltage output end connect It connects, second end is connect with the first electric cylinder group, and control terminal is connect with the control device;The first end of second contactor with The second voltage output end connection, second end are connect with the second electric cylinder group, and control terminal is connect with the control device; The control device alternatively persistently exports Continuity signal to the first contactor or the second contactor.First power Device 1 is avoided by the setting of the first electric cylinder group 14, the second electric cylinder group 15 and power supply module 16 using pneumatic supply 12 When existing routed pressure risk.It should be noted that control device can also be by intermediate relay to first contactor and The wire loop of two contactors is controlled, to realize control to first contactor and second contactor, this method can be with Control device is avoided to run in high current, to improve the service life of control device.
In the present exemplary embodiment, as shown in figure 4, being a kind of exemplary reality of tank accelerator control system of disclosure vacuum equipment Apply a structural schematic diagram.The system can also include the second power device 6, and second power device is used for the tank door The power that side in a second direction is opened or side is closed is provided.In the present exemplary embodiment, the second power device 6 may include three electricity Medium-voltage Motor, the transmission gear for being connected to three voltage motor output ends, tooth sector, tank chain.Three voltage motors and steering Gear is located at tank door along the second reversed two sides.Tank chain one end is connected to the one end of tank door far from tooth sector, another End is connected to tank door close to one end of tooth sector around transmission gear, tooth sector.When three voltage motors rotate forward, tank Men Xiangsan voltage motor sides are mobile, and when three voltage motors rotate backward, tank door is mobile to tooth sector side.Wherein, Three voltage motors can realize that two input voltage line exchanges are in three voltage motors to realize three electricity by contactor Medium-voltage Motor reversion.
In the present exemplary embodiment, the system can also include indicator light, and the indicator light and the control device connect It connects, when control device receives enabling signal, control device control instructions lamp illuminating is to prompt operator at this time can be with Tank door is operated.
The present exemplary embodiment also provides a kind of vacuum equipment, and vacuum equipment includes true for generating the pumping of vacuum state Empty device and tank body for maintaining vacuum state.Wherein, tank body is provided with for being connected to external tank door and for pressure release Air valve, the vacuum equipment further include the tank accelerator control system of above-mentioned vacuum equipment, for controlling the tank door.This The tank accelerator control system technical characteristic having the same and work of vacuum equipment and above-mentioned vacuum equipment that exemplary embodiment provides Make principle, above content has been described in detail, and details are not described herein again.
Those skilled in the art will readily occur to the disclosure after considering specification and practicing utility model disclosed herein Other embodiments.This application is intended to cover any variations, uses, or adaptations of the disclosure, these modifications, purposes Or adaptive change follow the general principles of this disclosure and including the disclosure it is undocumented in the art known in often Knowledge or conventional techniques.The description and examples are only to be considered as illustrative, and the true scope and spirit of the disclosure are by right It is required that pointing out.
It should be understood that the present disclosure is not limited to the precise structures that have been described above and shown in the drawings, and And various modifications and changes may be made without departing from the scope thereof.The scope of the present disclosure is only limited by the attached claims.

Claims (9)

1.一种真空设备的罐门控制系统,所述真空设备包括用于罐体泄压的破空阀,其特征在于,该罐门控制系统包括:1. a tank door control system of a vacuum equipment, the vacuum equipment comprises a break valve for tank body pressure relief, it is characterized in that, this tank door control system comprises: 第一动力装置,与所述罐门连接,用于向所述罐门提供沿第一方向的锁紧或松开的动力;a first power device, connected to the tank door, for providing the tank door with power for locking or unlocking in a first direction; 气压传感器,位于所述罐体的内侧,用于检测所述罐体内侧的气压,并根据所述罐门内侧的气压生成气压信号;an air pressure sensor, located inside the tank body, for detecting the air pressure inside the tank body, and generating an air pressure signal according to the air pressure inside the tank door; 破空阀检测装置,用于检测所述破空阀的开启时间,并根据所述破空阀开启时间生成时间信号;an air-breaking valve detection device, used for detecting the opening time of the air-breaking valve, and generating a time signal according to the opening time of the air-breaking valve; 启动装置,与所述气压传感器、所述破空阀检测装置连接,用于接收所述气压信号和所述时间信号,当所述气压信号表示的气压大于或等于大气压或所述时间信号表示的时间大于或等于预设值时输出启动信号;A starting device, connected with the air pressure sensor and the air-breaking valve detection device, for receiving the air pressure signal and the time signal, when the air pressure represented by the air pressure signal is greater than or equal to the atmospheric pressure or the time signal represented When the time is greater than or equal to the preset value, the start signal is output; 控制装置,与所述启动装置连接,用于在接收到所述启动信号时,根据控制信号控制所述第一动力装置。The control device is connected to the starting device, and is used for controlling the first power device according to the control signal when the starting signal is received. 2.根据权利要求1所述的真空设备的罐门控制系统,其特征在于,所述控制装置为可编程逻辑控制器。2 . The tank door control system for vacuum equipment according to claim 1 , wherein the control device is a programmable logic controller. 3 . 3.根据权利要求1所述的真空设备的罐门控制系统,其特征在于,所述第一动力装置包括:3. The tank door control system for vacuum equipment according to claim 1, wherein the first power unit comprises: 至少一个双向伸缩气缸,包括第一气压输入端和第二气压输入端,用于向所述罐门提供锁紧或松开的动力;at least one bidirectional telescopic cylinder, including a first air pressure input end and a second air pressure input end, used for providing locking or unlocking power to the tank door; 气压源,用于向所述双向伸缩气缸提供气压;an air pressure source for supplying air pressure to the bidirectional telescopic cylinder; 三位五通电磁阀,第一工作端与所述双向伸缩气缸的第一气压输入端连接,第二工作端与所述双向伸缩气缸的第二气压输入端连接,进气端与所述气压源连接,控制端与所述控制装置连接。Three-position five-way solenoid valve, the first working end is connected with the first air pressure input end of the two-way telescopic cylinder, the second working end is connected with the second air pressure input end of the two-way telescopic cylinder, and the intake end is connected with the air pressure The source is connected, and the control terminal is connected with the control device. 4.根据权利要求1所述的真空设备的罐门控制系统,其特征在于,所述第一动力装置包括:4. The tank door control system for vacuum equipment according to claim 1, wherein the first power unit comprises: 第一电动缸组,与所述罐门连接,用于向所述罐门提供锁紧的动力;a first electric cylinder group, connected with the tank door, for providing locking power to the tank door; 第二电动缸组,与所述罐门连接,用于向所述罐门提供松开的动力;a second electric cylinder group, connected with the tank door, and used for providing the release power to the tank door; 电源组件,分别与所述第一电动缸组、第二电动缸组连接,用于在所述控制装置的控制下择一地向所述第一电动缸组或第二电动缸组持续提供电能。A power supply assembly, which is respectively connected to the first electric cylinder group and the second electric cylinder group, and is used to selectively continuously provide electric energy to the first electric cylinder group or the second electric cylinder group under the control of the control device . 5.根据权利要求4所述的真空设备的罐门控制系统,其特征在于,5. The tank door control system of vacuum equipment according to claim 4, is characterized in that, 所述电源组件包括:The power supply assembly includes: 第一电压输出端,与所述第一电动缸组连接;a first voltage output end, connected to the first electric cylinder group; 第二电压输出端,与所述第二电动缸组连接;a second voltage output end, connected to the second electric cylinder group; 第一接触器,第一端与所述第一电压输出端连接,第二端与所述第一电动缸组连接,控制端与所述控制装置连接;a first contactor, the first end is connected to the first voltage output end, the second end is connected to the first electric cylinder group, and the control end is connected to the control device; 第二接触器,第一端与所述第二电压输出端连接,第二端与所述第二电动缸组连接,控制端与所述控制装置连接;a second contactor, the first end is connected to the second voltage output end, the second end is connected to the second electric cylinder group, and the control end is connected to the control device; 所述控制装置择一地向所述第一接触器或所述第二接触器持续输出导通信号。The control device alternatively continuously outputs a conduction signal to the first contactor or the second contactor. 6.根据权利要求1所述的真空设备的罐门控制系统,其特征在于,所述系统还包括第二动力装置,所述第二动力装置用于向所述罐门提供沿第二方向的侧开或侧关的动力。6. The tank door control system for vacuum equipment according to claim 1, characterized in that the system further comprises a second power device, the second power device is used to provide the tank door with the pressure in the second direction. Power for side opening or side closing. 7.根据权利要求1所述的真空设备的罐门控制系统,其特征在于,7. The tank door control system of vacuum equipment according to claim 1, is characterized in that, 所述预设值为2分钟。The preset value is 2 minutes. 8.根据权利要求1所述的真空设备的罐门控制系统,其特征在于,所述系统还包括指示灯,所述指示灯与所述控制装置连接。8 . The tank door control system for vacuum equipment according to claim 1 , wherein the system further comprises an indicator light, and the indicator light is connected to the control device. 9 . 9.一种真空设备,其特征在于,包括权利要求1-8任一项所述的真空设备的罐门控制系统。9. A vacuum equipment, characterized in that, comprising the tank door control system of the vacuum equipment according to any one of claims 1-8.
CN201820820757.9U 2018-05-29 2018-05-29 Tank door control system and vacuum equipment of vacuum equipment Active CN208384435U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820820757.9U CN208384435U (en) 2018-05-29 2018-05-29 Tank door control system and vacuum equipment of vacuum equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820820757.9U CN208384435U (en) 2018-05-29 2018-05-29 Tank door control system and vacuum equipment of vacuum equipment

Publications (1)

Publication Number Publication Date
CN208384435U true CN208384435U (en) 2019-01-15

Family

ID=64969464

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820820757.9U Active CN208384435U (en) 2018-05-29 2018-05-29 Tank door control system and vacuum equipment of vacuum equipment

Country Status (1)

Country Link
CN (1) CN208384435U (en)

Similar Documents

Publication Publication Date Title
CN204705552U (en) A kind of Portable Automatic air pressure fatigue experimental device
CN101550900A (en) Valve control device and control method thereof
CN208384435U (en) Tank door control system and vacuum equipment of vacuum equipment
CN110296255B (en) Priority control device and control method suitable for fully-sealed electric valve
CN106402098A (en) Electromechanical static pressure control system
CN104234988B (en) Explosion-proof automatically controlled enclosed pump and use its moment to engine power keep high usage control method
CN104352344A (en) Improved limb-pressurization physical therapy instrument
CN212960900U (en) Safety automatic stop device for high-pressure air filling pump
CN106015123B (en) Quarry tipper accumulator pressure release control method
CN103287272A (en) Pantograph lift control device, processing method thereof and engine brake cabinet
CN103267425A (en) Method and device for solving condenser low vacuum in combined cycle unit starting process
CN206669326U (en) A kind of control device of hazardous gas source of the gas
CN102368671B (en) High voltage direct current transmission valve cooling system soft starting apparatus
CN106696740B (en) Lower electrical safety devices
CN201090557Y (en) Crawler loader operating oil way no-voltage protection system
CN110015203A (en) A kind of fuel cell car and its fuel gas pressure maintaining and displacement control system
CN110556263B (en) 40.5KV inflatable cabinet transmission mechanism
CN107401537A (en) A kind of dead electricity closes valve hydraulic station
US9916908B2 (en) Gas supply apparatus and air or nitrogen supply apparatus of nuclear plant
CN210738786U (en) Pump valve linkage integrated debugging control device
CN103763876B (en) Multifunctional positive pressure explosion prevention controls splicing cabinet
CN109398262A (en) A kind of double end drives the change inter-locking control system of function special vehicle
CN207920723U (en) A kind of vehicle pipeline disconnection detection system
CN203196578U (en) Mixed gas preparation device
CN113555898A (en) Island black start mode of high-voltage gas generator set

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant