CN208346248U - A kind of graphite crucible for coating machine - Google Patents
A kind of graphite crucible for coating machine Download PDFInfo
- Publication number
- CN208346248U CN208346248U CN201820403366.7U CN201820403366U CN208346248U CN 208346248 U CN208346248 U CN 208346248U CN 201820403366 U CN201820403366 U CN 201820403366U CN 208346248 U CN208346248 U CN 208346248U
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- China
- Prior art keywords
- occlusal area
- coating machine
- evaporator
- graphite crucible
- circular ring
- Prior art date
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- 239000011248 coating agent Substances 0.000 title claims abstract description 47
- 238000000576 coating method Methods 0.000 title claims abstract description 47
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 35
- 239000010439 graphite Substances 0.000 title claims abstract description 35
- 238000001704 evaporation Methods 0.000 claims abstract description 37
- 230000008020 evaporation Effects 0.000 claims abstract description 32
- 238000010894 electron beam technology Methods 0.000 claims abstract description 19
- 239000003814 drug Substances 0.000 claims description 18
- 239000010432 diamond Substances 0.000 claims description 2
- 239000005416 organic matter Substances 0.000 abstract description 19
- 239000000463 material Substances 0.000 abstract description 17
- 238000010438 heat treatment Methods 0.000 abstract description 14
- 238000007747 plating Methods 0.000 abstract description 3
- 238000001771 vacuum deposition Methods 0.000 abstract description 3
- 238000001816 cooling Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 208000002193 Pain Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
When heated due to the existing vacuum coating equipment using electron beam heating, the temperature of the heating of electron beam is up to 1000 DEG C~3000 DEG C, and the volatilization temperature of organic matter is substantially between 400 DEG C~800 DEG C, therefore directly carry out heating to organic matter with electron beam and may result in have an opportunity to decompose.In order to use the existing commonly used vacuum evaporating coating machine heated using electron beam, the utility model proposes a kind of graphite crucibles for coating machine, the graphite crucible can be applied in the existing vacuum evaporating coating machine using electron beam heating, replace conventional crucible, in this way, the electron beam of high-energy beats the surface in the graphite crucible of the utility model, and graphite has cooling effect, the organic matter structural evaporation coating film material in crucible can be protected in this way, enable organic matter structural evaporation coating film material to begin to evaporation lower than electron beam heating temperature and guarantees that organic matter will not decompose during entire organic matter carries out vacuum vapor plating.
Description
Technical field
The utility model relates to arrive vacuum coating technology, particularly with regard to a kind of graphite crucible for coating machine.
Background technique
Evaporation coating techniques refer to that certain substance makes it be deposited on the surface of solids by heating evaporation, wherein there is a kind of heating
Mode is to be heated using electron beam heating, when being heated using electron beam heating, can make the temperature of heating
Degree reaches 1000 DEG C~3000 DEG C, and evaporation of metal Coating Materials is sufficiently evaporated and is deposited on the table of material to be coated
Face, therefore popularized at present by the way of electron beam heating.
With the development of evaporation coating techniques, it is mature to be evaporated coating technique under vacuum conditions, but basic
On be all that can only then be difficult to add by electron beam for the lower organic matter of volatilization temperature for the higher material of volatilization temperature
The mode of heat realizes that reason is that the volatilization temperature of substantially organic matter is relatively all relatively low using vacuum evaporation coating membrane technology,
Between 400 DEG C~800 DEG C, well below the heating temperature of electron beam, thus it can make organic matter may be in high temperature substantially
In the case where decompose, and these are not that we are happy to the phenomenon that seeing.
Utility model content
In view of this, in order to use the existing commonly used vacuum evaporating coating machine heated using electron beam,
The utility model proposes a kind of graphite crucible for coating machine, which can be applied to existing use electron beam and adds
In the vacuum evaporating coating machine of heat, replace conventional crucible, in this way, the electron beam of high-energy will not directly be beaten in evaporation coating material
The surface of material, but the surface in the graphite crucible of the utility model is beaten, and graphite has cooling effect, it in this way can be in crucible
Organic matter structural evaporation coating film material protected, enable organic matter structural evaporation coating film material lower than electron beam heating temperature
In the case of begin to evaporate, and be deposited on workpiece surface to be coated, guarantee to carry out vacuum vapor plating in entire organic matter
Organic matter will not decompose in the process.
A kind of graphite crucible for coating machine comprising upper cover 1 and lower cover 2；Contain evaporator 12 and occlusion in upper cover 1
Area's protruding circular ring 13, evaporator 12 is cylindrical, wherein there is an evaporation apertures 121 from top to bottom through whole on cylindrical upper surface
A evaporator 12, and there is a slope 122 in the position that evaporation apertures 121 are deviateed in the upper surface of evaporator 12, which is electricity
At beamlet sparking, the upper surface of the cylindrical lower flat 123 and occlusal area protruding circular ring 13 of evaporator 12 is integrally formed, and is stung
Close the cylindrical outer diameter of the outer diameter < evaporator 12 of area's protruding circular ring 13；Lower cover 2 contains edge lug boss 21, occlusal area recess base
Medicine platform 23 is set at seat 22 and center, and medicine platform 23 is set as circle in center, center set the external rings of medicine platform 23 around a circle be
Occlusal area concave base 22, the external rings of occlusal area concave base 22 around a circle be edge lug boss 21, wherein it is flat to set medicine for center
The bottom of platform 23, occlusal area concave base 22 and edge lug boss 21 is in same plane, and the height of edge lug boss 21 is higher than occlusion
The height of area's concave base 22, the height of occlusal area concave base 22 are higher than the height that medicine platform 23 is set at center；The occlusion of upper cover 1
Area's protruding circular ring 13 is matched with the occlusal area concave base 22 of lower cover 2 to coincide, the edge concave station 11 of upper cover 1 and the edge of lower cover 2
The matching of boss 21 coincide.
Further, the shape of evaporation apertures 121 is round, ellipse, square or diamond shape.
It is further preferred that evaporation apertures 121 are circle, and circular diameter is 1mm~2mm.
Further, the cylindrical diameter of evaporator 12 is 10mm~18mm, and the height of evaporator 12 is 2mm~5mm.
Further, the angle of slope 122 and horizontal plane is 10 °~30 °.
Further, evaporation apertures 121 are located at the position that slope 122 intersects with 12 top surface plane of evaporator.
Further, the height of the annulus of occlusal area protruding circular ring 13 is 1mm~3mm, the circle of occlusal area protruding circular ring 13
The outer diameter of ring is 1mm bigger than internal diameter.
Further, occlusal area concave base 22 is circular ring shape, and the outer diameter of the annulus of occlusal area concave base 22 compares internal diameter
Big 1mm can be matched with occlusal area protruding circular ring 13.
Further, the height of the edge lug boss 21 of lower cover 2 is 1mm~3mm.
In use, placement organic matter structural evaporation coating film material on medicine platform 23 can be set at the center of lower cover 2, then by upper cover
1 occlusal area protruding circular ring 13 is matched with the occlusal area concave base 22 of lower cover 2 to coincide, the edge concave station 11 and lower cover 2 of upper cover 1
Edge lug boss 21 matching coincide, the upper cover 1 of graphite crucible and lower cover 2 are closed, at this point, the evaporator 12 of upper cover 1
Cylindrical lower flat 123, the inner wall of occlusal area protruding circular ring 13, the center of lower cover 2 set stinging for medicine platform 23 and lower cover 2
The inner wall for closing area's concave base 22 forms chamber resettling, and organic matter structural evaporation coating film material is then located in chamber resettling.To organic matter
After structural evaporation coating film material is installed, vacuum coating equipment can start to work, using electron gun to this reality in the course of work
It is heated by the way of electron beam sparking with the slope 12 of the upper cover 1 of novel graphite crucible, organic matter steams after heating
Hair Coating Materials volatilizees out of chamber resettling, and is volatilized by the evaporation apertures 121 on evaporator 12, so that organic evaporating plates
Membrane material volatile matter smoothly volatilizees, and is deposited on the surface of workpiece to be coated.
Since the chemical property of graphite is stablized, and there are the characteristics such as high temperature resistant and heat absorption, so that the graphite of the utility model
Crucible can guarantee that the high temperature of electron gun during vacuum vapor plating will not damage internal organic matter evaporation coating material
Material, ensure that organic matter structural evaporation coating film material can be smooth deposit to workpiece surface to be coated, without decomposing.
Detailed description of the invention
Fig. 1 is the main view of the graphite crucible for coating machine.
Fig. 2 is the left view of the graphite crucible for coating machine.
Fig. 3 is the right view of the graphite crucible for coating machine.
Fig. 4 is the rearview of the graphite crucible for coating machine.
Fig. 5 is the top view of the graphite crucible for coating machine.
Fig. 6 is the bottom view of the graphite crucible for coating machine.
Fig. 7 is main view/left view/right view/rearview schematic diagram of lower cover.
Fig. 8 is lower cover top view.
Fig. 9 is upper cover main view.
Figure 10 is upper cover left view.
Figure 11 is upper cover right view.
Figure 12 is upper cover rearview.
Figure 13 is upper cover top view.
Figure 14 is upper cover bottom view.
Main element symbol description
| Upper cover | 1 |
| Edge lug boss | 11 |
| Evaporator | 12 |
| Evaporation apertures | 121 |
| Slope | 122 |
| Evaporator lower flat | 123 |
| Occlusal area protruding circular ring | 13 |
| Lower cover | 2 |
| Edge lug boss | 21 |
| Occlusal area concave base | 22 |
| Set medicine platform in center | 23 |
The following detailed description will be further explained with reference to the above drawings the utility model.
Specific embodiment
Case 1 is embodied:
It is as shown in Figure 1 the main view of the graphite crucible for coating machine, is illustrated in figure 2 the graphite earthenware for coating machine
The left view of crucible is illustrated in figure 3 the right view of the graphite crucible for coating machine, is illustrated in figure 4 the stone for coating machine
The rearview of black crucible is illustrated in figure 5 the top view of the graphite crucible for coating machine, is illustrated in figure 6 for coating machine
Graphite crucible bottom view comprising upper cover 1 and lower cover 2.
It is illustrated in figure 9 upper cover main view, is as shown in Figure 10 upper cover left view, is as shown in figure 11 upper cover right view,
It is as shown in figure 12 upper cover rearview, is as shown in figure 13 upper cover top view, is as shown in figure 14 upper cover bottom view, in upper cover 1
Containing evaporator 12 and occlusal area protruding circular ring 13, evaporator 12 is cylindrical, wherein having an evaporation on cylindrical upper surface
Entire evaporator 12 is run through in hole 121 from top to bottom, and there is a slope in the position that evaporation apertures 121 are deviateed in the upper surface of evaporator 12
122, which is the cylindrical lower flat 123 and occlusal area protruding circular ring 13 of evaporator 12 at electron beam sparking
Upper surface be integrally formed, the cylindrical outer diameter of the outer diameter < evaporator 12 of occlusal area protruding circular ring 13.
It is illustrated in figure 7 main view/left view/right view/rearview schematic diagram of lower cover, is illustrated in figure 8 lower cover
Top view, lower cover 2 set medicine platform 23 containing edge lug boss 21, occlusal area concave base 22 and center, and center sets medicine platform 23 and is
Circle, center set the external rings of medicine platform 23 around a circle be occlusal area concave base 22, occlusal area concave base 22 it is outer
The circular circle in portion is edge lug boss 21, and wherein the bottom of medicine platform 23, occlusal area concave base 22 and edge lug boss 21 is set at center
Portion is in same plane, and the height of edge lug boss 21 is higher than the height of occlusal area concave base 22, occlusal area concave base 22
Height is higher than the height that medicine platform 23 is set at center；The occlusal area protruding circular ring 13 of upper cover 1 and the occlusal area concave base 22 of lower cover 2
Matching coincide, and the edge concave station 11 of upper cover 1 is matched with the edge lug boss 21 of lower cover 2 to coincide.
Evaporation apertures 121 are circle, and circular diameter is 1.5mm, and the cylindrical diameter of evaporator 12 is 13mm, evaporation
The height of platform 12 is 3mm, and slope 122 and the angle of horizontal plane are 15 °, and evaporation apertures 121 are located at slope 122 and evaporator 12
The position of top surface plane intersection.The height of the annulus of occlusal area protruding circular ring 13 is 1.5mm, the circle of occlusal area protruding circular ring 13
The outer diameter of ring is 1mm bigger than internal diameter, and occlusal area concave base 22 is circular ring shape, in the outer diameter ratio of the annulus of occlusal area concave base 22
The big 1mm of diameter can be matched with occlusal area protruding circular ring 13, and the height of the edge lug boss 21 of lower cover 2 is 1.5mm.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it should not be understood as limiting the scope of the patent of the utility model.It should be pointed out that for the common of this field
For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to
In the protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (9)
1. a kind of graphite crucible for coating machine, it is characterised in that: it includes upper cover (1) and lower cover (2)；Upper cover contains on (1)
There are evaporator (12) and occlusal area protruding circular ring (13), evaporator (12) is cylindrical, wherein having one on cylindrical upper surface
Evaporation apertures (121) run through entire evaporator (12) from top to bottom, and the position of evaporation apertures (121) is deviateed in the upper surface of evaporator (12)
A slope (122) are equipped with, which is the cylindrical lower flat of evaporator (12) at electron beam sparking
(123) it is integrally formed with the upper surface of occlusal area protruding circular ring (13), the outer diameter < evaporator of occlusal area protruding circular ring (13)
(12) cylindrical outer diameter；Lower cover (2) sets medicine platform containing edge lug boss (21), occlusal area concave base (22) and center
(23), medicine platform (23) are set as circle in center, center set the external rings of medicine platform (23) around a circle be that occlusal area is recessed base
Seat (22), the external rings of occlusal area concave base (22) around a circle be edge lug boss (21), wherein center set medicine platform (23),
The bottom of occlusal area concave base (22) and edge lug boss (21) is in same plane, and the height of edge lug boss (21) is higher than and stings
The height of area's concave base (22) is closed, the height of occlusal area concave base (22) is higher than the height that medicine platform (23) are set at center；On
The occlusal area protruding circular ring (13) of lid (1) is matched with the occlusal area concave base (22) of lower cover (2) to coincide, the edge of upper cover (1)
Concave station (11) is matched with the edge lug boss (21) of lower cover (2) to coincide.
2. being used for the graphite crucible of coating machine as described in claim 1, it is characterised in that: the shape of evaporation apertures (121) is circle
Shape, ellipse, square or diamond shape.
3. being used for the graphite crucible of coating machine as described in claim 1, it is characterised in that: evaporation apertures (121) are circle, and round
The diameter of shape is 1mm~2mm.
4. being used for the graphite crucible of coating machine as described in claim 1, it is characterised in that: evaporator (12) it is cylindrical straight
Diameter is 10mm~18mm, and the height of evaporator (12) is 2mm~5mm.
5. being used for the graphite crucible of coating machine as described in claim 1, it is characterised in that: slope (122) and horizontal plane
Angle is 10 °~30 °.
6. being used for the graphite crucible of coating machine as described in claim 1, it is characterised in that: evaporation apertures (121) are located at slope
(122) position intersected with evaporator (12) top surface plane.
7. being used for the graphite crucible of coating machine as described in claim 1, it is characterised in that: the circle of occlusal area protruding circular ring (13)
The height of ring is 1mm~3mm, and the outer diameter of the annulus of occlusal area protruding circular ring (13) is 1mm bigger than internal diameter.
8. being used for the graphite crucible of coating machine as described in claim 1, it is characterised in that: occlusal area concave base (22) is circle
The outer diameter of annular, the annulus of occlusal area concave base (22) is 1mm bigger than internal diameter, can be with occlusal area protruding circular ring (13)
Match.
9. being used for the graphite crucible of coating machine as described in claim 1, it is characterised in that: the edge lug boss (21) of lower cover (2)
Height be 1mm~3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820403366.7U CN208346248U (en) | 2018-03-23 | 2018-03-23 | A kind of graphite crucible for coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820403366.7U CN208346248U (en) | 2018-03-23 | 2018-03-23 | A kind of graphite crucible for coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208346248U true CN208346248U (en) | 2019-01-08 |
Family
ID=64885407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820403366.7U Active CN208346248U (en) | 2018-03-23 | 2018-03-23 | A kind of graphite crucible for coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208346248U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114622169A (en) * | 2022-04-27 | 2022-06-14 | 华天慧创科技（西安）有限公司 | Antifouling film coating device and antifouling film coating method |
-
2018
- 2018-03-23 CN CN201820403366.7U patent/CN208346248U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114622169A (en) * | 2022-04-27 | 2022-06-14 | 华天慧创科技（西安）有限公司 | Antifouling film coating device and antifouling film coating method |
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