CN208235031U - A kind of water cooling seed rod - Google Patents

Abstract

The utility model relates to a water-cooled seed crystal rod, and the technical problem to be solved is to provide a water-cooled seed crystal rod capable of increasing heat dissipation at the lower end of the seed crystal. The water-cooled seed rod includes: a lower block (1), an upper support block (6), a hollow support ring (2) connected between the lower block (1) and the upper support block (6), and the solid column (3) located in the support ring (2); the cavity between the lower block (1), support ring (2), solid column (3) and upper support block (6) is formed It is a cooling cavity through which cooling water circulates.

Description

A water-cooled seed rod

technical field

The utility model belongs to the field of laser crystal growth equipment, in particular to a water-cooled seed rod.

Background technique

The water-cooled seed rods currently used in temperature gradient method and descending method crystal growth equipment are all metal parts, and the internal water cooling structure is that the cooling water is drained from the stainless steel hollow tube in the middle of the seed rod to the upper end of the seed rod. However, this device has a relatively large defect: the water-cooled structure has better heat transfer due to the metal itself. When the cooling water reaches the upper end of the seed rod, the water temperature has already been heated, and the area of the upper end surface of the seed rod is limited. Therefore, the existing water-cooling structure can only ensure that the seed rod does not melt, and cannot effectively take away the heat at the lower end of the seed crystal. This is very unfavorable to the release of the latent heat of crystallization in the early stage of crystal growth, especially when growing crystals with low thermal conductivity, polycrystalline growth is particularly prone to occur in the shouldering stage. As the crystal growth height increases, it becomes more difficult to release the latent heat of crystallization, and the growth interface tends to reverse from a "convex" interface to a "concave" interface accompanied by large temperature fluctuations, which seriously affects the crystallization quality of the crystal.

Utility model content

In order to overcome the deficiencies in the prior art, the technical problem to be solved by the utility model is to provide a water-cooled seed crystal rod capable of increasing heat dissipation at the lower end of the seed crystal.

In order to solve the above technical problems, the water-cooled seed rod of the present invention includes: a lower block, an upper support block, a hollow support ring connected between the lower block and the upper support block, and a The inner solid column; the cavity between the lower sealing block, the support ring, the solid column and the upper support block is formed as a cooling cavity through which cooling water circulates.

According to the water-cooled seed rod of the utility model, it can be applied to support the crucible when growing single crystals by the descending method and the temperature gradient method, and can solve the problem of crystal growth through the temperature difference between the upper and lower end surfaces of the solid column itself and its increased contact with cooling water. During the process, the lower surface of the seed crystal dissipates heat slowly. details as follows:

1. The seed rod adopts a solid column to connect the bottom of the seed crystal and the outside world, so that a large gradient is generated between the bottom of the seed crystal and the outside world, thereby solving the problem of slow heat dissipation of the seed crystal;

2. The seed rod adopts a solid column, so that the crucible and the seed rod are not only in contact with a supporting surface but also include the solid column. At this time, the heat at the bottom of the crucible can be better taken away by water cooling, thereby further solving the slow heat dissipation of the seed crystal. The problem.

In the utility model, a water inlet pipe and a water outlet pipe connected with the cooling inner cavity may also be included. Thereby, the cooling water can enter from the water inlet pipe and come out from the water outlet pipe to achieve the cooling effect.

In the present utility model, it may also include a partition connected to the surface of the solid column and separate the cooling inner chamber, and the separated two parts of the cooling inner chamber are connected with the water inlet pipe and the water outlet pipe respectively. There is also a passage for cooling water to circulate between the two parts. Thus, the inside of the seed rod can be divided into left and right cavities for cooling water to enter and exit respectively, and a channel can also be reserved inside the seed rod to guide the cooling water.

In the present utility model, it may also include a support platform provided on the outer wall of the support ring. Therefore, it is convenient to fix the seed rod and adjust the levelness of the seed rod relative to the equipment (such as a high-temperature vacuum furnace).

In the present utility model, the upper surface of the upper support block is flush with the upper surface of the solid column, and the lower surface of the lower sealing block is flush with the lower surface of the solid column. Therefore, the upper surface is flush to facilitate the complete bonding of the bottom of the crucible and the seed rod, and the lower surface is flush to facilitate welding.

In the present invention, the upper surface of the supporting ring coincides with the lower surface of the upper supporting block, and the lower surface of the supporting ring coincides with the upper surface of the lower sealing block. Thus, the levelness and verticality between the surfaces of the seed rod can be guaranteed.

In the present invention, the support platform is parallel to the upper support block, and the support platform is perpendicular to the support ring.

In the utility model, the solid column is a solid metal piece. The metal thermal conductivity is high, which can facilitate the dissipation of heat at the upper end of the seed rod.

In the utility model, the water inlet pipe and the water outlet pipe are connected to the middle and lower part of the support ring. Because most of the seed rods are inside the equipment, the position where the water enters and exits is preferably in the middle and lower parts.

In the utility model, all components in the water-cooled seed rod are connected by welding. The airtightness can be effectively guaranteed by welding, and there is no gap, so as to ensure that there is no water leakage in the seed rod.

Description of drawings

Fig. 1 is a schematic structural view of a water-cooled seed rod of an embodiment of the present invention;

Fig. 2 is the A-A cross-sectional view of the water-cooled seed rod shown in Fig. 1;

Fig. 3 is the B-B sectional view of the water-cooled seed rod shown in Fig. 1;

Reference signs:

1. Lower block;

2. Support ring;

3. Solid column;

4. Water inlet pipe;

5. Outlet pipe;

6. Upper support block;

7. Partition;

8. Support the table.

Detailed ways

The utility model will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the following embodiments are only used to illustrate the utility model, rather than limit the utility model.

Aiming at the defects of the seed rods in the prior art, the utility model provides a water-cooled seed rod, including: a lower sealing block, an upper supporting block, and a connecting rod between the lower sealing block and the upper supporting block A hollow support ring, and a solid column located in the support ring; the cavity between the lower block, the support ring, the solid column and the upper support block is formed as a cooling cavity through which cooling water circulates. The water-cooled seed crystal rod of the utility model can be used to support the crucible when growing single crystals by the descending method and the temperature gradient method, and can solve the crystal growth process through the temperature difference between the upper and lower end surfaces of the solid column itself and its increased contact with cooling water. In the middle, the problem of slow heat dissipation on the lower surface of the seed crystal.

Specifically, Fig. 1 to Fig. 3 show a water-cooled seed rod according to an embodiment of the present invention. As shown in Figures 1 to 3, the water-cooled seed rod of the present embodiment includes: a lower block 1, an upper support block 6, a hollow support ring 2 connected between the lower block 1 and the upper support block 6, and A solid column 3 located inside said support ring 2 . The cavity among the lower sealing block 1 , the supporting ring 2 , the solid column 3 and the upper supporting block 6 is formed as a cooling cavity through which cooling water circulates.

In this embodiment, preferably, the upper surface of the upper support block 6 is flush with the upper surface of the solid column 3 , and the lower surface of the lower sealing block 1 is flush with the lower surface of the solid column 3 . In addition, the upper surface of the support ring 2 coincides with the lower surface of the upper support block 6 , and the lower surface of the support ring 2 coincides with the upper surface of the lower block 1 . In addition, the above-mentioned solid column 3 may be a solid metal piece.

Further, as shown in FIG. 1 and FIG. 2 , the water-cooled seed rod of this embodiment further includes a water inlet pipe 4 and a water outlet pipe 5 connected to the aforementioned cooling inner cavity. The cooling water enters from the water inlet pipe 4 and goes out from the water outlet pipe 5. Specifically, in this embodiment, the water inlet pipe 4 and the water outlet pipe 5 can be connected to the middle and lower part of the support ring 2 .

In addition, as shown in FIG. 3 , the water-cooled seed rod of this embodiment further includes a partition 7 connected to the surface of the solid column 3 and separating the cooling cavity. As shown in FIG. 3 , in this embodiment, the cooling cavity between the support ring 2 and the solid column 3 can be divided into two parts by a partition 7 . The aforementioned water inlet pipe 4 and water outlet pipe 5 can communicate with the separated two parts of the cooling inner cavity respectively, and there is also a passage for cooling water circulation between the two parts of the cooling inner cavity separated by the partition plate, for example, it can be located at Cool the upper part of the cavity. According to this structure, it is possible to guide the cooling water.

In addition, as shown in FIGS. 1 and 2 , the water-cooled seed rod of this embodiment further includes a support platform 8 provided on the outer wall of the support ring 2 . Specifically, the support platform 8 is parallel to the upper support block 6 , and the support platform 8 is perpendicular to the support ring 2 .

Furthermore, all components in the water-cooled seed rod of this embodiment are fixed by welding. For example, in this embodiment, the lower sealing block 1 is assembled and welded with the solid column 3, the upper support block 6 is assembled and welded with the solid column 3, the partition plate 7 is welded on the surface of the solid column 3, the support ring 2 is connected with the lower sealing plate 1, The upper support block 6 is assembled and welded, the water inlet pipe 4, the water outlet pipe 5 are assembled and welded with the support ring 2, the support ring 2 is assembled and welded with the support table 8, and the like. More specifically, the upper surface of the upper support block 6 and the upper surface of the solid column 3 are overlapped and welded in a flush manner, and the lower surface of the lower block 1 and the lower surface of the solid column 3 are overlapped and welded in a flush manner. The upper surface of the support ring 2 is overlapped and welded with the lower surface of the upper support block 6 , and the lower surface of the support ring 2 is overlapped and welded with the upper surface of the lower sealing block 1 .

In addition, in this embodiment, the materials of the lower sealing block 1 , the water inlet pipe 4 , the water outlet pipe 5 , the partition plate 7 and the supporting platform 8 can be stainless steel. The upper supporting block 6 can be made of stainless steel, tungsten material, molybdenum material or tungsten-molybdenum alloy. The supporting ring 2 and the solid column 3 can be made of stainless steel, tungsten material, molybdenum material, or tungsten-molybdenum alloy, or the solid column 3 can be formed as a special material such as tungsten and molybdenum at the upper end and stainless steel at the lower end. The material in the utility model needs to withstand the high temperature of 2000°C-2500°C.

When working, the upper end surface of the solid column 3 is located in the high temperature zone of the equipment (for example, a high-temperature vacuum furnace), and the lower end surface of the solid column 3 is located in direct contact with the outside world. Cooling water enters from the water inlet pipe 4 and flows out from the water outlet pipe 5 to cool the solid column 3, thereby circulating.

Under the aim of not departing from the essential features of the present utility model, the utility model can be embodied in various forms, so the implementation form in the utility model is for illustration rather than limitation, because the scope of the utility model is limited by the claims All changes that are not limited by the description, but fall within the range defined by the claims, or the range equivalent to the range defined by them, should be understood as being included in the claims.

Claims (10)

1. A water-cooled seed rod, characterized in that it includes: a lower block (1), an upper support block (6), and a hollow space connected between the lower block (1) and the upper support block (6). The support ring (2), and the solid column (3) located in the support ring (2); the lower block (1), support ring (2), solid column (3) and upper support block (6 ) is formed as a cooling cavity through which cooling water circulates. 2 . The water-cooled seed rod according to claim 1 , further comprising a water inlet pipe ( 4 ) and a water outlet pipe ( 5 ) connected to the cooling inner cavity. 3 . 3. The water-cooled seed rod according to claim 2, characterized in that it further comprises a partition (7) connected to the surface of the solid column (3) and separating the cooling cavity, the The two separated parts of the cooling inner cavity are respectively communicated with the water inlet pipe (4) and the water outlet pipe (5), and there is also a passage for cooling water to circulate between the two parts. 4. The water-cooled seed rod according to claim 1, further comprising a support platform (8) provided on the outer wall of the support ring (2). 5. The water-cooled seed rod according to claim 1, characterized in that, the upper surface of the upper support block (6) is flush with the upper surface of the solid column (3), and the lower block ( The lower surface of 1) is flush with the lower surface of the solid column (3). 6. The water-cooled seed rod according to claim 1, characterized in that, the upper surface of the support ring (2) coincides with the lower surface of the upper support block (6), and the support ring (2) The lower surface coincides with the upper surface of the lower block (1). 7. The water-cooled seed rod according to claim 4, characterized in that, the support table (8) is parallel to the upper support block (6), and the support table (8) is parallel to the support ring (2 )vertical. 8. The water-cooled seed rod according to claim 1, characterized in that, the solid column (3) is a solid metal piece. 9. The water-cooled seed rod according to claim 2, characterized in that, the water inlet pipe (4) and the water outlet pipe (5) are connected to the middle and lower part of the support ring (2). 10. The water-cooled seed rod according to any one of claims 1 to 9, characterized in that, all components in the water-cooled seed rod are connected by welding.