CN208111390U - Ion source with novel temperature control function - Google Patents

Abstract

The utility model provides a kind of ion source with Novel temperature-controlled function, and the ion source includes high-field electrode；Gas pipeline, the gas pipeline have larger section of the internal diameter, changeover portion and the internal diameter that are arranged successively compared with segment, and one end of larger section of the internal diameter is fixed on first load-bearing part；Side far from the internal diameter larger section of the internal diameter compared with segment is arranged in the high-field electrode；Heating member, the heating member are arranged in the internal diameter compared in segment；Temperature-measuring part, the temperature-measuring part detect temperature of the internal diameter compared with gas in segment；Supply unit, the supply unit deliver gas to the outside of the changeover portion and internal diameter compared with the junction of segment.The utility model has many advantages, such as that simple structure, quick heating, cooling are fast.

Description

Ion source with novel temperature control function

technical field

The utility model relates to an ion source, in particular to an ion source with a novel temperature control function.

Background technique

During the working process of the open ion source, when the high-temperature sample is ionized, the temperature of the discharge gas should be raised in a sealed environment without electronic interference to increase the ion velocity intensity and ion beam energy of the gas, which is conducive to the ionization of the sample. . When analyzing samples with a lower ionization temperature, the ion source needs to be cooled rapidly in a sealed environment to reach the expected temperature range. Therefore, the rapid realization of the temperature control of the ion source is conducive to the orderly and rational conduct of the experiment.

The current open ion source technology mainly has the following deficiencies: the ion source heat transfer heating technology can quickly realize the heating of the equal-diameter space, and due to the use of hollow air and external sealing, the heat loss is large and the utilization rate is not high. , when rapid cooling is required, the cooling time is too long, which makes the waiting time of the experiment too long; the ion source fan cooling technology, due to the discharge characteristics of the ion source, placing a fan outside the good heat preservation device is effective for high temperature in a short time, but in the medium The effect of the temperature section is not obvious, and the cooling time is slow, which makes it impossible to meet the technical requirements for rapid heating and cooling.

Utility model content

In order to solve the shortcomings in the above-mentioned existing technical solutions, the utility model provides an ion source with a new temperature control function, which has a simple structure, rapid temperature rise and rapid temperature drop.

The purpose of this utility model is achieved by the following technical solutions:

An ion source with a novel temperature control function, the ion source includes a high-voltage electrode; the ion source with a novel temperature control function further includes:

A gas pipeline, the gas pipeline has a section with a larger inner diameter, a transition section, and a section with a smaller inner diameter arranged in sequence, one end of the section with a larger inner diameter is fixed on the first carrier; the high-voltage electrode is arranged on the the side of the smaller inner diameter section away from the larger inner diameter section;

a heating element, the heating element is arranged in the section with a smaller inner diameter;

a temperature measuring component, the temperature measuring component detects the temperature of the gas in the section with a smaller inner diameter;

A delivery unit that delivers gas to the outside of the junction of the transition section and the smaller inner diameter section.

Compared with the prior art, the utility model has the beneficial effects of:

1. The ion source heats up faster, and the temperature control is more accurate.

2. The cooling of the ion source is faster and more direct.

3. Simple and compact structure.

4. The formed ion beam is more stable. .

Description of drawings

With reference to the accompanying drawings, the disclosure of the present utility model will become easier to understand. Those skilled in the art can easily understand that: these drawings are only used to illustrate the technical solution of the utility model, and are not intended to limit the protection scope of the utility model. In the picture:

Fig. 1 is a schematic structural diagram of an ion source with a novel temperature control function according to Embodiment 1 of the present utility model.

Detailed ways

Figure 1 and the following description describe an alternative embodiment of the invention to teach those skilled in the art how to implement and reproduce the invention. In order to teach the technical solution of the utility model, some conventional aspects have been simplified or omitted. Those skilled in the art should understand that modifications or replacements from these embodiments will fall within the scope of the present invention. Those skilled in the art should understand that the following features can be combined in various ways to form multiple variations of the present invention. Accordingly, the present invention is not limited to the alternative embodiments described below, but only by the claims and their equivalents.

Example 1:

Fig. 1 schematically provides a structural diagram of an ion source with a novel temperature control function according to an embodiment of the present invention. As shown in Fig. 1, the ion source with a novel temperature control function includes:

A gas pipeline, the gas pipeline has a section 21 with a larger inner diameter, a transition section 22 and a section 23 with a smaller inner diameter arranged in sequence, and one end of the section with a larger inner diameter is fixed on the first bearing member;

a first section, the first section including the larger inner diameter section and a transition section;

The second part, the second part includes the section with a smaller inner diameter; the thermal conductivity of the first part is greater than that of the second part, for example, the first part is made of metal, and the second part is made of ceramics;

a connecting portion 24 connecting the first and second portions;

A heating element, the heating element is arranged in the section with a smaller inner diameter, and the heating element includes:

A base 31, the base is located in the gas pipeline, and one end is fixed on the first carrier, and the other end extends into the section with a smaller inner diameter;

heating wire 32, said heating wire is wound on the base in said smaller inner diameter section;

A temperature measuring component 41, such as a thermocouple, which detects the temperature of the gas in the section with a smaller inner diameter;

The conveying unit 71, such as an air suction pump, conveys gas to the outside of the connection between the transition section and the section with a smaller inner diameter.

The first carrier 11, the section of the first carrier with a larger inner diameter has a first through hole in the projection area on the first carrier, so that the gas passes through the first carrier and enters the gas pipeline;

The second carrier 12, one end of the smaller section of the inner diameter away from the larger section of the inner diameter is fixed on the second carrier, and the smaller section of the second carrier is on the second carrier There is a second through hole 13 in the projection area on the part; in the gas flow direction (gas enters the gas pipeline from the first through hole and is discharged from the second through hole), the aperture of the second through hole gradually become smaller;

A base 81, on which the first carrier and the second carrier are fixed;

a medium pipe 61, the medium pipe is fixed on the second carrier, and the gas discharged from the second through hole enters the medium pipe;

A high-voltage electrode 51, the high-voltage electrode is arranged on the outside of the medium pipe.

According to the working process of the above-mentioned ion source with novel temperature control function according to the embodiment of the utility model:

Closing the delivery unit, the gas enters the larger inner diameter section of the gas pipeline through the first through hole;

When the gas enters the transition section, the flow rate and density of the gas are increased;

The gas enters the section with smaller inner diameter and is heated;

Adjust the heating power according to the temperature output by the temperature measuring component and the temperature setting value;

The high-voltage electrode is discharged, so that the gas flowing out of the smaller inner diameter section is ionized to form an ion beam;

Turn off the heating element and turn on the conveying unit, the outside air blows the connection and takes away the heat; the heat from the section with a smaller inner diameter is conducted to the transition section;

The cooling gas enters into the larger inner diameter section;

The cooling gas enters the transition section, and the flow rate and density of the gas are increased;

Cooling gas exits the smaller ID section and carries away heat.

Example 2:

An application example of the ion source with the novel temperature control function described in Embodiment 1 of the present utility model.

In this application example, the first part is made of stainless steel or Kovar alloy; the angle of the cone formed by the transition section is 30-60°; the angle of the cone formed by the second through hole is 30-60°; the temperature measuring part adopts Thermocouple, thermistor or platinum resistance (RTD); the cooling gas uses nitrogen or argon or air or helium; the delivery unit uses an air pump to deliver the gas to the outside of the connection between the transition section and the inner diameter section , so as to take away heat; at the same time, the heat of the smaller inner diameter section is conducted to the transition section.

Claims (8)

1. a kind of ion source with Novel temperature-controlled function, the ion source include high-field electrode；It is characterized in that：It is described to have The ion source of Novel temperature-controlled function further comprises：

Gas pipeline, the gas pipeline have larger section of the internal diameter, changeover portion and the internal diameter that are arranged successively compared with segment, the internal diameter Larger section one end is fixed on the first load-bearing part；The internal diameter is arranged in compared with segment far from the internal diameter in the high-field electrode Larger section of side；

Heating member, the heating member are arranged in the internal diameter compared in segment；

Temperature-measuring part, the temperature-measuring part detect temperature of the internal diameter compared with gas in segment；

Supply unit, the supply unit deliver gas to the outside of the changeover portion and internal diameter compared with the junction of segment.

2. the ion source according to claim 1 with Novel temperature-controlled function, it is characterised in that：It is described that there is temperature controlling function Ion source further comprise：

First load-bearing part, first load-bearing part and larger section of internal diameter have in the view field on first load-bearing part First through hole；

Second load-bearing part, second load-bearing part are arranged between the gas pipeline and high-field electrode, and the internal diameter is compared with segment Be fixed on second load-bearing part far from one end of larger section of the internal diameter, second load-bearing part and internal diameter compared with segment There is the second through-hole in the view field on second load-bearing part.

3. the ion source according to claim 2 with Novel temperature-controlled function, it is characterised in that：In gas flow direction On, the aperture of second through-hole gradually becomes smaller.

4. the ion source according to claim 2 with Novel temperature-controlled function, it is characterised in that：The ion source is further Including：

Medium tube, the medium tube are fixed on second load-bearing part, and the outer of the medium tube is arranged in the high-field electrode Side.

5. the ion source according to claim 1 with Novel temperature-controlled function, it is characterised in that：The gas pipeline packet It includes：

First part, the first part include larger section of the internal diameter and changeover portion；

Second part, second part include the internal diameter compared with segment；The thermal conductivity of the first part is greater than the second part；

Coupling part, the coupling part connect the first part and second part.

6. the ion source according to claim 5 with Novel temperature-controlled function, it is characterised in that：The first part is gold Belong to pipe, second part is ceramic tube.

7. the ion source according to claim 2 with Novel temperature-controlled function, it is characterised in that：The heating member includes：

Pedestal, the pedestal is in the gas pipeline, and one end is fixed on first load-bearing part, and the other end is extend into The internal diameter is compared in segment；

Heater strip, the heater strip are wound in the internal diameter compared on the pedestal in segment.

8. the ion source according to claim 2 with Novel temperature-controlled function, it is characterised in that：The ion source is further Including：

Pedestal, first load-bearing part and the second load-bearing part are fixed on the base.