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CN208013060U - A kind of more gas detecting systems of wave-length coverage and wavelength continuously adjustable - Google Patents

A kind of more gas detecting systems of wave-length coverage and wavelength continuously adjustable Download PDF

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CN208013060U
CN208013060U CN201820508424.2U CN201820508424U CN208013060U CN 208013060 U CN208013060 U CN 208013060U CN 201820508424 U CN201820508424 U CN 201820508424U CN 208013060 U CN208013060 U CN 208013060U
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李国林
徐建龙
季文海
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China University of Petroleum East China
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Abstract

一种波长范围以及波长连续可调谐的多气体检测系统,包括光纤激光器、声光调制器、准直器、气体吸收池、光电探测器、光谱信号分析模块、激光驱动控制模块和射频驱动系统;光纤激光器、声光调制器、准直器、气体吸收池和光电探测器依次设置;光纤激光器与激光驱动控制模块的输出端连接,光电探测器与光谱信息分析模块相连;射频驱动系统与声光调制器和光谱信号分析模块连接;声光调制器与频率合成器产生,频率合成器与光谱信号分析模块中的微处理器连接。该系统分析速度快;转换速度快;检测激光波长可连续调谐;可实时在线检测,亦可远传分析监控;检测稳定性、准确性好;造价成本低,只需要一个可调谐激光器即可完成大多数气体成分的检测。

A multi-gas detection system with continuously tunable wavelength range and wavelength, including a fiber laser, an acousto-optic modulator, a collimator, a gas absorption cell, a photodetector, a spectral signal analysis module, a laser drive control module, and a radio frequency drive system; A fiber laser, an acousto-optic modulator, a collimator, a gas absorption cell and a photodetector are arranged in sequence; the fiber laser is connected to the output end of the laser drive control module, and the photodetector is connected to the spectral information analysis module; the radio frequency drive system is connected to the acousto-optic The modulator is connected with the spectral signal analysis module; the acousto-optic modulator is generated with the frequency synthesizer, and the frequency synthesizer is connected with the microprocessor in the spectral signal analysis module. The system has fast analysis speed; fast conversion speed; the detection laser wavelength can be continuously tuned; real-time online detection can also be used for remote analysis and monitoring; good detection stability and accuracy; low cost, only one tunable laser can be completed Detection of most gas components.

Description

一种波长范围以及波长连续可调谐的多气体检测系统A wavelength range and wavelength continuously tunable multi-gas detection system

技术领域technical field

本实用新型涉及一种用于多种气体检测的系统,采用一种波长范围可连续调谐光纤激光器以及光纤耦合声光调制器组合结构实现波长可连续调谐多气体检测,属于激光气体检测技术领域。The utility model relates to a system for detecting multiple gases, which adopts a combination structure of a continuously tunable fiber laser with a wavelength range and an optical fiber coupled acousto-optic modulator to realize multi-gas detection with a continuously tunable wavelength, and belongs to the technical field of laser gas detection.

背景技术Background technique

在气体光谱吸收领域,可调谐二极管激光吸收光谱分析(Tunable diode laserabsorption spectroscopy,TDLAS)是一种高灵敏度、高分辨率和快速响应的气体检测技术,广泛用于工业流程中的气体监控、环境大气检测以及科学研究等领域。In the field of gas spectral absorption, tunable diode laser absorption spectroscopy (Tunable diode laser absorption spectroscopy, TDLAS) is a high-sensitivity, high-resolution and fast-response gas detection technology, widely used in gas monitoring in industrial processes, ambient atmosphere Detection and scientific research and other fields.

在对多种气体成分的浓度进行检测时,都希望能够同时测量多种气体成分的光谱吸收线。现有的红外调谐激光器的缺点是调谐范围有限,一般在200cm-1的量级,快速电流调谐宽度约1-2cm-1,在实际的气体检测应用中,通常通过电流调谐方式实现对检测气体光谱吸收线进行快速检测,但是,在现有的可调谐激光器的调谐范围较小,通常不能覆盖所有气体吸收的激光波长;而由于温度调谐无法实现快速调谐,通过对半导体激光器进行温度调谐的方法实现对多条光谱吸收线的检测时,用时较长。实际应用中,一般需要为每种需要检测的气体同工作的多路技术,目前用于多组分检测技术的多路技术可以分为三种,分别是时分多路技术、波分多路技术和分频调制多路技术。When detecting the concentration of multiple gas components, it is desirable to be able to simultaneously measure the spectral absorption lines of multiple gas components. The disadvantage of existing infrared tuned lasers is that the tuning range is limited, generally on the order of 200cm -1 , and the fast current tuning width is about 1-2cm -1 . In actual gas detection applications, the detection of gas is usually achieved by current tuning. However, the tuning range of the existing tunable lasers is small, and usually cannot cover the laser wavelengths absorbed by all gases; and because the temperature tuning cannot achieve fast tuning, the method of temperature tuning the semiconductor laser It takes a long time to realize the detection of multiple spectral absorption lines. In practical applications, it is generally necessary to work with multiplex technology for each gas that needs to be detected. At present, the multiplex technology used for multi-component detection technology can be divided into three types, namely time division multiplex technology and wavelength division multiplex technology. And frequency division modulation multiplexing technology.

时分多路技术是最直接的方法,它是从一系列的激光器中选择出对应测量气体对应波长的测量光束导入到检测光路,顺序检测多种气体的浓度;波分多路技术是将不同波长的激光光束通过波分复用器或者光纤合束器进行组合,组合后的多光束沿相同的光路通过吸收池,初设光束利用分光光学元件进行分光,不同波长的光束在不同方向被探测器接收,实现多分组气体的同时检测;频调制技术就是利用相敏检测的窄带滤波特点,对多台激光器用不同频率的正弦电流信号进行调制,然后将激光束进行合束,沿相同的光路通过气体吸收池,最后聚焦在同一检测器上。再通过对信号在相应的频率上进行解调,即可从合束信号中提取额分离出各个波长激光器的贡献,从而分析出其对应气体成分的浓度大小。Time-division multiplexing technology is the most direct method. It selects the measurement beam corresponding to the wavelength of the measured gas from a series of lasers and introduces it into the detection optical path to sequentially detect the concentration of various gases; WDM technology is to combine different wavelengths The combined laser beams are combined by a wavelength division multiplexer or a fiber optic beam combiner, and the combined multiple beams pass through the absorption cell along the same optical path. Receiving, to realize simultaneous detection of multiple groups of gases; frequency modulation technology is to use the narrow-band filtering characteristics of phase-sensitive detection to modulate multiple lasers with sinusoidal current signals of different frequencies, and then combine the laser beams and pass along the same optical path The gas absorption cell is finally focused on the same detector. Then, by demodulating the signal at the corresponding frequency, the contribution of each wavelength laser can be extracted and separated from the combined beam signal, so as to analyze the concentration of the corresponding gas component.

波分多路技术解决了多组分气体同时检测的检测速度慢的问题,但实际此种方法与多套仪器检测系统相比并没有改善了很多,只不过是共用了一个气体吸收池和检测路线而已。而且,合束器或波分复用器和分离的分光元件也降低了系统的紧凑型和稳定性,衍射元件的使用还可能引入噪声和偏差。分频调制多路技术存在的主要问题是需要消除检测通道间的交叉干扰以及多路激光数目上受到限制。相比以上两种方法,时分多路技术在检测系统结构上十分简单,只需要一个探测器、一套检测装置和一套信号处理系统,检测气体多组分数量也没有限制。但是传统时分多路技术大多是机械结构进行光束光源的转换,这就使其测量的效率大大下降,且此种方法使光强的稳定性较差。而且,传统的时分多路技术因为激光源的限制并不能连续、快速且准确的检测某时刻的多组分气体浓度。Wavelength division multiplexing technology solves the problem of slow detection speed of simultaneous detection of multi-component gases, but in fact this method has not improved much compared with multiple sets of instrument detection systems, but only shares a gas absorption cell and detection Just the route. Moreover, beam combiners or wavelength division multiplexers and separate optical splitting elements also reduce the compactness and stability of the system, and the use of diffractive elements may also introduce noise and deviation. The main problems of the frequency division modulation multiplexing technology are the need to eliminate the cross-interference between the detection channels and the limitation of the number of multiple lasers. Compared with the above two methods, the time-division multiplexing technology is very simple in the detection system structure. It only needs one detector, one detection device and one signal processing system, and there is no limit to the number of multi-components in the detected gas. However, most of the traditional time division multiplexing technology uses a mechanical structure to convert the beam source, which greatly reduces the measurement efficiency, and this method makes the stability of the light intensity poor. Moreover, the traditional time-division multiplexing technology cannot continuously, quickly and accurately detect the multi-component gas concentration at a certain moment due to the limitation of the laser source.

现在大多采用的多组分气体检测技术是由若干个中心波长不同的DFB激光器(分布反馈激光器)构成组合式多波长光源,由该组合式多波长光源发射的多路检测激光经波分复用器或者光纤合束器合束后,由池前多模光纤将合束检测激光自入光口传播并导入装有被检测气体的气体吸收池中,合束检测激光在气体吸收池中经多次反射后自出光口射出,再由池后多模光纤导向探测器,探测器将各种气体吸收谱线光信号转换为电信号,经过前置放大器和锁相放大器的运算,获得气体吸收信号的一次和二次谐波,最后利用谐波强度实现气体浓度的测量。Most of the multi-component gas detection technologies currently used are composed of several DFB lasers (distributed feedback lasers) with different central wavelengths to form a combined multi-wavelength light source, and the multiple detection lasers emitted by the combined multi-wavelength light source are wavelength division multiplexed. After being combined by a fiber optic combiner or an optical fiber combiner, the multi-mode optical fiber in front of the pool transmits the beam-combining detection laser from the light entrance and introduces it into the gas absorption cell containing the gas to be detected. The beam-combining detection laser passes through multiple After the second reflection, it is emitted from the light outlet, and then guided by the multimode optical fiber behind the pool to the detector. The detector converts the optical signals of various gas absorption lines into electrical signals, and obtains the gas absorption signals through the operation of the preamplifier and lock-in amplifier. The first and second harmonics, and finally use the harmonic intensity to achieve the measurement of gas concentration.

上述现有多气体检测技术大多利用相同的原理,利用波分复用器或者光纤合束器将多光路耦合进一根单芯多模光纤,该光纤通向气体吸收池进行多波长激光同时吸收检测。Most of the above-mentioned existing multi-gas detection technologies use the same principle, using a wavelength division multiplexer or a fiber combiner to couple multiple optical paths into a single-core multi-mode optical fiber, and the optical fiber leads to a gas absorption cell for simultaneous absorption of multi-wavelength lasers. detection.

然而,上述方法在实现多气体同时检测时存在以下几种缺陷:However, the above method has the following defects when realizing multi-gas simultaneous detection:

1.多路不同波长检测激光通过波分复用器后,都会发生不同程度的衰减,而且,被耦合的波长不同的激光束数越多,衰减也就越严重;1. After multiple detection lasers with different wavelengths pass through the wavelength division multiplexer, they will be attenuated to varying degrees, and the more laser beams with different wavelengths to be coupled, the more serious the attenuation will be;

2.多个激光光源同时使用时,占用体积较大,对检测环境的要求较严苛;2. When multiple laser light sources are used at the same time, they occupy a large volume and have strict requirements on the detection environment;

3.受环境温度的影响较大,半导体激光器输出激光的波长亦受温度的影响,会造成一定的误差;3. It is greatly affected by the ambient temperature, and the wavelength of the semiconductor laser output laser is also affected by the temperature, which will cause certain errors;

4.检测激光波长不连续,在不改变仪器构件的基础上,可检测气体固定,仪器的可移植性差。4. The wavelength of the detection laser is discontinuous. On the basis of not changing the components of the instrument, it can detect gas fixation, and the portability of the instrument is poor.

实用新型内容Utility model content

本实用新型针对现有多气体组份检测技术存在的不足,提供一种结构简单、适应复杂测量环境、气体检测灵敏度高且灵活性强的波长范围以及波长连续可调谐的多气体检测系统。The utility model aims at the deficiencies in the existing multi-gas component detection technology, and provides a multi-gas detection system with simple structure, adaptable to complex measurement environment, high gas detection sensitivity and flexible wavelength range and continuously tunable wavelength.

本实用新型的波长范围以及波长连续可调谐的多气体检测系统,采用以下技术方案:The wavelength range of the utility model and the multi-gas detection system with continuously tunable wavelength adopt the following technical solutions:

该系统,包括光纤激光器、声光调制器、准直器、气体吸收池、光电探测器、光谱信号分析模块、激光驱动控制模块和射频驱动系统;光纤激光器、声光调制器、准直器、气体吸收池和光电探测器依次设置;光纤激光器与激光驱动控制模块的输出端连接,光电探测器与光谱信息分析模块相连;射频驱动系统与声光调制器和光谱信号分析模块连接;声光调制器与频率合成器产生,频率合成器与光谱信号分析模块中的微处理器连接。The system includes fiber laser, acousto-optic modulator, collimator, gas absorption cell, photodetector, spectral signal analysis module, laser drive control module and radio frequency drive system; fiber laser, acousto-optic modulator, collimator, The gas absorption cell and photodetector are arranged in sequence; the fiber laser is connected to the output end of the laser drive control module, and the photodetector is connected to the spectral information analysis module; the radio frequency drive system is connected to the acousto-optic modulator and the spectral signal analysis module; the acousto-optic modulation Generated by a frequency synthesizer and a frequency synthesizer, and the frequency synthesizer is connected with the microprocessor in the spectral signal analysis module.

激光驱动控制模块控制光纤激光器发出的激光波长范围,光纤激光器发出的激光经过声光调制器调制成气体成分对应的波长,然后经准直器导入气体吸收池,再被激光探测器接收,激光探测器将接受的光信号转换成电信号并将电信号传输给光谱信息分析模块,光谱分析模块对接受的电信号进行分析处理,得到与气体浓度相关的电信号,以此来表征气体吸收池中各种组份气体的浓度信息。The laser drive control module controls the wavelength range of the laser emitted by the fiber laser. The laser emitted by the fiber laser is modulated into the wavelength corresponding to the gas composition through the acousto-optic modulator, and then introduced into the gas absorption pool through the collimator, and then received by the laser detector. The detector converts the received optical signal into an electrical signal and transmits the electrical signal to the spectral information analysis module. The spectral analysis module analyzes and processes the received electrical signal to obtain an electrical signal related to the gas concentration, which is used to characterize the gas in the absorption cell. Concentration information for various component gases.

所述光纤激光器为波长范围可调谐激光器。The fiber laser is a wavelength range tunable laser.

所述激光驱动控制模块包括控制扫描电路、恒温电路和保护电路,控制扫描电路使输出激光的波长在波长范围内扫描,温控电路用于稳定激光器的温度,排除温度对输出激光的波长的影响。The laser drive control module includes a control scanning circuit, a constant temperature circuit and a protection circuit, the control scanning circuit makes the wavelength of the output laser scan within the wavelength range, the temperature control circuit is used to stabilize the temperature of the laser, and eliminate the influence of temperature on the wavelength of the output laser .

所述气体吸收池可调节光程,设有进气口和出气口。The gas absorption cell can adjust the optical path, and is provided with an air inlet and an air outlet.

所述光谱信号分析模块包括依次连接的前置放大器、锁相放大器、模数转换器和微处理器。The spectral signal analysis module includes a preamplifier, a lock-in amplifier, an analog-to-digital converter and a microprocessor connected in sequence.

本实用新型的多气体检测系统,还包括终端设备,光谱信号分析模块通过有线或无线方式将气体浓度数据远距离传输至终端设备。The multi-gas detection system of the present invention also includes terminal equipment, and the spectral signal analysis module transmits the gas concentration data to the terminal equipment remotely through wired or wireless means.

本实用新型采用快速的波长范围连续可调节的激光光源结合声光调制器对检测激光的波长进行调节,即可实现大范围波长连续可调谐,从而实现对大部分的气体成分进行检测的目的。波长调节的可连续性和超宽范围赋予了这种检测系统极强的灵活性与可移植性,可适应几乎所有组分气体的检测。The utility model adopts a fast wavelength range continuously adjustable laser light source combined with an acousto-optic modulator to adjust the wavelength of the detection laser, and can realize a wide range of wavelength continuously adjustable, thereby realizing the purpose of detecting most gas components. The continuity and ultra-wide range of wavelength adjustment endow this detection system with great flexibility and portability, which can be adapted to the detection of almost all component gases.

本实用新型提出的声光调制技术的分光原理与其他分光技术相比,具有分辨率高,全固化器件牢固,分光迅速及任意波长切换等优点。本实用新型的优点主要体现在:Compared with other light-splitting techniques, the light-splitting principle of the acousto-optic modulation technology proposed by the utility model has the advantages of high resolution, firm all-cured device, rapid light-splitting and arbitrary wavelength switching. The advantages of the utility model are mainly reflected in:

1.检测激光波长范围可连续调谐,覆盖了大部分气体对应波长;1. The detection laser wavelength range can be continuously tuned, covering the corresponding wavelengths of most gases;

2.分辨率高,全固化器件牢固,分光迅速及任意波长切换2. High resolution, strong all-cured device, rapid light splitting and arbitrary wavelength switching

3.采用AOTF技术进行波长选择,波长可任意选择、光谱扫描速度快;3. Using AOTF technology for wavelength selection, the wavelength can be selected arbitrarily, and the spectral scanning speed is fast;

4.分时复用同一光源同一气室的一个光程,不仅可缩小仪器体积,减少可动部件,降低了系统的复杂程度,实现更好的自动控制;。4. Time-sharing reuse of one optical path of the same light source and the same gas chamber can not only reduce the volume of the instrument, reduce moving parts, reduce the complexity of the system, and achieve better automatic control;

5.可实时在线检测,亦可远传分析监控;5. Real-time online detection, and remote analysis and monitoring;

6.检测稳定性、准确性好,避免了温度的影响;6. Good detection stability and accuracy, avoiding the influence of temperature;

7.造价成本低,减少光源数量,简化了气室设计与光路,缩小了分析仪的体积,降低了样气的消耗量和温控系统的能量消耗。7. The cost is low, the number of light sources is reduced, the design of the gas chamber and the optical path are simplified, the volume of the analyzer is reduced, and the consumption of sample gas and the energy consumption of the temperature control system are reduced.

附图说明Description of drawings

图1是本实用新型波长范围以及波长连续可调谐的多气体检测系统的原理图。Fig. 1 is a schematic diagram of the wavelength range and the multi-gas detection system with continuously tunable wavelength of the present invention.

图中:1.光谱信号分析模块,2.射频驱动系统,3.激光驱动控制模块,4.光纤激光器,5.声光调制器(AOTF),6.准直器(准直透镜),7.气体吸收池,8.光电探测器,9.前置放大器,10.锁相放大器,11.数模转换器,12.控制扫描电路,13.恒温电路,14.保护电路,15.微处理器,16.频率合成器。In the figure: 1. Spectral signal analysis module, 2. RF drive system, 3. Laser drive control module, 4. Fiber laser, 5. Acousto-optic modulator (AOTF), 6. Collimator (collimating lens), 7 .Gas absorption cell, 8. Photodetector, 9. Preamplifier, 10. Lock-in amplifier, 11. Digital-to-analog converter, 12. Control scanning circuit, 13. Constant temperature circuit, 14. Protection circuit, 15. Microprocessing 16. Frequency synthesizer.

具体实施方式Detailed ways

本实用新型的波长范围以及波长连续可调谐的多气体检测系统,如图1所示,包括波长范围可调谐的光纤激光器4、声光调制器5、准直器6、气体吸收池7、光电探测器8、光谱信号分析模块1、激光驱动控制模块3和射频驱动系统2。The wavelength range and wavelength continuously tunable multi-gas detection system of the present invention, as shown in Fig. A detector 8, a spectral signal analysis module 1, a laser drive control module 3 and a radio frequency drive system 2.

气体吸收池7设有进气口和出气口。气体吸收池7的前方设置有准直器6,准直器6的前方设置有声光调制器5,声光调制器5的前方设置有光纤激光器4,光纤激光器4与激光驱动控制模块3连接,声光调制器5与射频驱动系统2连接,气体吸收池7的后方设置有光电探测器8,光电探测器8与光谱信号分析模块1连接。The gas absorption pool 7 is provided with an air inlet and an air outlet. A collimator 6 is arranged in front of the gas absorption cell 7, an acousto-optic modulator 5 is arranged in front of the collimator 6, a fiber laser 4 is arranged in front of the acousto-optic modulator 5, and the fiber laser 4 is connected to the laser drive control module 3 , the acousto-optic modulator 5 is connected to the radio frequency drive system 2, a photodetector 8 is arranged behind the gas absorption cell 7, and the photodetector 8 is connected to the spectral signal analysis module 1.

光谱信号分析模块1包括依次连接的前置放大器10、锁相放大器11、模数转换器12和微处理器15。The spectral signal analysis module 1 includes a preamplifier 10 , a lock-in amplifier 11 , an analog-to-digital converter 12 and a microprocessor 15 connected in sequence.

激光驱动控制模块3用于控制光纤激光器4发出的激光波长范围,激光驱动控制模块3包括控制扫描电路(电流扫描电路)12、恒温电路13和保护电路14,其中的控制扫描电路12使输出激光的波长在发出的激光波长范围内扫描。恒温电路13用于稳定激光器4的温度,避免温度对输出激光的波长的影响。Laser drive control module 3 is used to control the laser wavelength range that fiber laser 4 sends, and laser drive control module 3 includes control scan circuit (current scan circuit) 12, constant temperature circuit 13 and protection circuit 14, and wherein control scan circuit 12 makes output laser The wavelength of the laser is scanned within the emitted laser wavelength range. The constant temperature circuit 13 is used to stabilize the temperature of the laser 4 and avoid the influence of the temperature on the wavelength of the output laser.

本实用新型在多气体组分分析中,影响检测光线频率的主要部件为射频驱动系统2,其主要包括射频发生通道、功率放大器和射频开关等。微处理器15接受控制、解译上位机下发的各种命令,并通过执行命令控制整个射频驱动系统2的工作状态。射频发生通道包括信号发生器、射频变压器、LC低通滤波器和低噪声放大器,信号发生器输出信号的开关、频率和幅度均由微处理器15控制。射频信号经滤波放大后输出,再由功率放大器放大至驱动声光调制器5所需的功率范围,通过切换射频开关选择合适的压电换能器,将射频信号加载至AOTF晶体中,完成对声光调制器5的控制,调制出所需波长的激光,用于气体成分浓度检测分析。In the multi-gas component analysis of the utility model, the main component affecting the frequency of the detected light is the radio frequency drive system 2, which mainly includes a radio frequency generation channel, a power amplifier and a radio frequency switch. The microprocessor 15 accepts control and interprets various commands issued by the host computer, and controls the working state of the entire radio frequency drive system 2 by executing the commands. The radio frequency generating channel includes a signal generator, a radio frequency transformer, an LC low-pass filter and a low noise amplifier, and the switching, frequency and amplitude of the output signal of the signal generator are all controlled by the microprocessor 15 . The radio frequency signal is filtered and amplified and output, and then amplified by the power amplifier to the power range required to drive the acousto-optic modulator 5. By switching the radio frequency switch to select a suitable piezoelectric transducer, the radio frequency signal is loaded into the AOTF crystal, and the pairing is completed. Controlled by the acousto-optic modulator 5, laser light with a required wavelength is modulated for detection and analysis of the concentration of gas components.

本实用新型主要部件为声光调制器(声光可调谐滤波器,AOTF)5。声光调制器5基于声光效应的原理,当一束宽光谱通过一个高频振动的具有光学弹性元件的晶体时,某一波长的单色光会在晶体内部产生衍射,以一定角度从晶体中透射出来。当晶体的振动频率发生改变时,衍射光的波长也随之改变。在实际应用中通过晶体表面的压电换能器将射频信号转换为晶体内部的超声波。The main component of the utility model is an acousto-optic modulator (acousto-optic tunable filter, AOTF) 5 . Acousto-optic modulator 5 is based on the principle of the acousto-optic effect. When a beam of wide spectrum passes through a crystal with optical elastic elements vibrating at high frequency, monochromatic light of a certain wavelength will be diffracted inside the crystal, and will be emitted from the crystal at a certain angle transmitted through. When the vibration frequency of the crystal changes, the wavelength of the diffracted light also changes. In practical applications, the radio frequency signal is converted into ultrasonic waves inside the crystal through the piezoelectric transducer on the surface of the crystal.

声光调制器5调制所用的信号由频率合成器16产生,频率合成器16与微处理器15连接。所述调制频率为气体吸收红外光最强的频率(f1、f2、……fk)为5KHz~40KHz。The signal used for modulation by the acousto-optic modulator 5 is generated by a frequency synthesizer 16 , and the frequency synthesizer 16 is connected with a microprocessor 15 . The modulation frequency is that the frequency (f1, f2, ... fk) at which the gas absorbs the infrared light most strongly is 5KHz-40KHz.

解调频率为nf1、nf2、nf3……nfk,优选n=2,即二次谐波解调技术。The demodulation frequencies are nf1, nf2, nf3...nfk, preferably n=2, that is, the second harmonic demodulation technology.

根据矢量合成关系,可以由以下关系:According to the vector composite relationship, the following relationship can be obtained:

式中:In the formula:

fe→o—入射e光衍射为出射o光的射频驱动频率f e→o — RF driving frequency of incident e light diffracted into outgoing o light

fo→e—入射o光衍射为出射e光的射频驱动频率f o→e — RF driving frequency of incident o light diffracted into outgoing e light

λ—衍射波长λ—diffraction wavelength

θi—入射光入射角θ i —Incident light angle

θa—超声波入射角θ a —Ultrasonic incident angle

no(λ)—o光的折射角n o (λ)—the refraction angle of o light

ne(λ,θ)—e光的折射率n e (λ, θ)—refractive index of e light

va—超声波速度,由AOTF材料决定v a — ultrasonic velocity, determined by AOTF material

推导得出AOTF射频驱动频率与衍射波长调谐关系:The tuning relationship between AOTF RF driving frequency and diffraction wavelength is derived:

θi—入射角度θ i —incident angle

θd—衍射角度θ d —Diffraction angle

V—声速V—speed of sound

ni—关于θi的函数n i — function about θ i

nd—关于θd的函数n d — a function of θ d

f—声频率f—sound frequency

λ—真空波长λ—vacuum wavelength

由上述公式可知当AOTF加工完成后,衍射波长仅受射频驱动频率控制。改变射频驱动频率即可改变响应的衍射波长。It can be seen from the above formula that after the AOTF processing is completed, the diffraction wavelength is only controlled by the RF driving frequency. Changing the RF drive frequency can change the response diffraction wavelength.

本实用新型的系统进行多气体检测的具体过程如下所述:The concrete process that the system of the present invention carries out multi-gas detection is as follows:

本实用新型使用不同的调制频率(f1、f2、……fk)进行激光器的驱动信号调制,并使用不同的解调频率(nf1、nf2、……nfk)作为参考信号在锁相放大器进行解调。k为k种气体组份。检测不同气体使用不同的调制频率,经AOTF筛选出特定波长光线,再通过准直器6进行准直,与气体吸收池7的光学模式匹配。The utility model uses different modulation frequencies (f1, f2, ... fk) to modulate the driving signal of the laser, and uses different demodulation frequencies (nf1, nf2, ... nfk) as reference signals to demodulate in the lock-in amplifier . k is k gas components. Different modulation frequencies are used to detect different gases, the light of a specific wavelength is screened out by the AOTF, and then collimated by the collimator 6 to match the optical mode of the gas absorption cell 7 .

利用波长扫描控制电路12使光纤激光器4可以在可调谐范围内进行波长的扫描,再利用声光调制器5的电调谐的方式从复杂的光纤激光器4光源宽光谱中滤出被测气体所需波长的光谱。将滤出气体特定吸收波长的光与被测气体相互作用,光强衰减,进而照射到光电探测器8上,将光电探测器8接收的光电信号依次经过前置放大器10、锁相放大器11和模数转换器12,进行前置放大滤波去噪和微弱信号处理(信号放大和模数转换),进而得到与气体浓度相关的电信号,以此来表征气体吸收池中各种组份气体的浓度信息。Use the wavelength scanning control circuit 12 to enable the fiber laser 4 to perform wavelength scanning within the tunable range, and then use the electrical tuning of the acousto-optic modulator 5 to filter out the required gas from the wide spectrum of the light source of the complex fiber laser 4. spectrum of wavelengths. The light of the specific absorption wavelength of the filtered gas interacts with the measured gas, the light intensity attenuates, and then irradiates the photodetector 8, and the photoelectric signal received by the photodetector 8 passes through the preamplifier 10, lock-in amplifier 11 and The analog-to-digital converter 12 performs pre-amplification filtering and denoising and weak signal processing (signal amplification and analog-to-digital conversion), and then obtains electrical signals related to gas concentration, so as to characterize the gas concentration of various components in the gas absorption cell concentration information.

光谱信号分析模块1中的微处理器15通过有线或无线方式将气体浓度数据远距离传输至终端设备,并进行下一种气体成分的频率调制。The microprocessor 15 in the spectral signal analysis module 1 transmits the gas concentration data to the terminal device remotely through wired or wireless means, and performs frequency modulation of the next gas component.

本实用新型采用快速的波长范围连续可调节的激光光源结合声光调制器对检测激光的波长进行调节,即可实现大范围波长连续可调谐,从而实现对大部分的气体成分进行检测的目的。波长调节的可连续性和超宽范围赋予了这种检测系统极强的灵活性与可移植性,可适应几乎所有组分气体的检测。The utility model adopts a fast wavelength range continuously adjustable laser light source combined with an acousto-optic modulator to adjust the wavelength of the detection laser, and can realize a wide range of wavelength continuously adjustable, thereby realizing the purpose of detecting most gas components. The continuity and ultra-wide range of wavelength adjustment endow this detection system with great flexibility and portability, which can be adapted to the detection of almost all component gases.

以某一调制频率(f1、f2、……fk)加载到激光驱动控制模块3上,让光路中心通过声光调制器5,给射频驱动系统2施加电信号,控制声光调制器5工作,即筛选所需工作红外基频,出射光束由准直器6耦合到气体吸收池7中,经过反射之后入射到光电探测器8上,将光电探测器8接收的光电信号进行前置放大滤波去噪,所得的透射信号传送到锁相放大器11。根据要检测的谐波次数,锁相放大器11依据调制频率选择不同解调频率nfk进行解调。解调之后的信号发经过三通道的ADC转换器12传送到微处理器15,由嵌入式的算法程序完成浓度反演,完成气体的浓度推演。当要检测其它气体组分时,通过调制不同的频率与筛选不同波长的红外光,分时复用同一检测通道,进行另一种气体组分的检测。Load the laser drive control module 3 with a certain modulation frequency (f1, f2, ... fk), let the center of the optical path pass through the acousto-optic modulator 5, apply an electrical signal to the radio frequency drive system 2, and control the acousto-optic modulator 5 to work, That is to screen the required working infrared fundamental frequency, the outgoing beam is coupled to the gas absorption cell 7 by the collimator 6, and after reflection, it is incident on the photodetector 8, and the photoelectric signal received by the photodetector 8 is pre-amplified and filtered. Noise, the resulting transmission signal is sent to the lock-in amplifier 11. According to the harmonic order to be detected, the lock-in amplifier 11 selects different demodulation frequencies nfk for demodulation according to the modulation frequency. The demodulated signal is sent to the microprocessor 15 through the three-channel ADC converter 12, and the embedded algorithm program completes the concentration inversion and completes the deduction of the gas concentration. When other gas components are to be detected, the same detection channel is time-divisionally multiplexed by modulating different frequencies and screening infrared light of different wavelengths to detect another gas component.

本实用新型具有以下特点:The utility model has the following characteristics:

1.采用波长范围连续可调谐的光纤激光器配合声光激光器提供检测激光,波长覆盖范围宽,可检测气体的种类多;1. Using a fiber laser with continuously tunable wavelength range and acousto-optic laser to provide detection laser, the wavelength coverage is wide, and there are many types of gases that can be detected;

2.激光光源有温控系统,使激光光源的温度保持在某一合适温度,避免了温度对光谱波长的影响,且本实用新型缩小了分析仪的体积,温控系统的能量消耗减少,温度控制也更均匀稳定。2. The laser light source has a temperature control system, which keeps the temperature of the laser light source at a certain suitable temperature, avoids the influence of temperature on the spectrum wavelength, and the utility model reduces the volume of the analyzer, reduces the energy consumption of the temperature control system, and the temperature Control is also more even and stable.

3.本实用新型大幅简化光学系统设计。传统的TDLAS分析仪一种分析物使用一个气室或一个光程。本实用新型使用一个光程,无需多个光源,也无须转动部件,降低了系统的机械复杂程度;节省了气室个数,简化了气室设计。3. The utility model greatly simplifies the design of the optical system. Traditional TDLAS analyzers use one gas cell or one optical path for one analyte. The utility model uses one light path, does not need multiple light sources, and does not need rotating parts, which reduces the mechanical complexity of the system, saves the number of air chambers, and simplifies the design of the air chamber.

4.气室采用多反射原理增加光程,从而提高了系统检测的灵敏度,更换气室或改变气室长度,可实现不同的量程和灵敏度的要求;4. The gas chamber adopts the multi-reflection principle to increase the optical path, thereby improving the detection sensitivity of the system. Replacing the gas chamber or changing the length of the gas chamber can achieve different range and sensitivity requirements;

5.系统采用AOTF技术进行波长选择,只要其气体特征吸收谱线再AOTF可选择的波长范围内均可检测,不针对某一固定气体成分,可移植性强。5. The system uses AOTF technology for wavelength selection, as long as its gas characteristic absorption line can be detected within the wavelength range selectable by AOTF, it does not target a certain fixed gas component and has strong portability.

6.加快了检测的速度;6. Speed up the detection;

7.采用调制解调和锁相放大的微弱信号处理技术,实现降低闪烁噪声(1/f噪声)的效果。7. The weak signal processing technology of modulation and demodulation and phase-locked amplification is used to achieve the effect of reducing flicker noise (1/f noise).

Claims (5)

1.一种波长范围以及波长连续可调谐的多气体检测系统,其特征是:包括光纤激光器、声光调制器、准直器、气体吸收池、光电探测器、光谱信号分析模块、激光驱动控制模块和射频驱动系统;光纤激光器、声光调制器、准直器、气体吸收池和光电探测器依次设置;光纤激光器与激光驱动控制模块的输出端连接,光电探测器与光谱信息分析模块相连;射频驱动系统与声光调制器和光谱信号分析模块连接;声光调制器与频率合成器产生,频率合成器与光谱信号分析模块中的微处理器连接。1. A multi-gas detection system with continuous tunable wavelength range and wavelength, characterized in that it includes a fiber laser, an acousto-optic modulator, a collimator, a gas absorption cell, a photodetector, a spectral signal analysis module, and a laser drive control Module and radio frequency drive system; fiber laser, acousto-optic modulator, collimator, gas absorption cell and photodetector are arranged in sequence; the fiber laser is connected to the output end of the laser drive control module, and the photodetector is connected to the spectral information analysis module; The radio frequency driving system is connected with the acousto-optic modulator and the spectral signal analysis module; the acousto-optic modulator is generated with a frequency synthesizer, and the frequency synthesizer is connected with the microprocessor in the spectral signal analysis module. 2.根据权利要求1所述的波长范围以及波长连续可调谐的多气体检测系统,其特征是:所述光纤激光器为波长范围可调谐激光器。2. The wavelength range and wavelength continuously tunable multi-gas detection system according to claim 1, characterized in that: the fiber laser is a wavelength range tunable laser. 3.根据权利要求1所述的波长范围以及波长连续可调谐的多气体检测系统,其特征是:所述激光驱动控制模块包括控制扫描电路、恒温电路和保护电路,控制扫描电路使输出激光的波长在波长范围内扫描,温控电路用于稳定激光器的温度,排除温度对输出激光的波长的影响。3. The wavelength range and wavelength continuously tunable multi-gas detection system according to claim 1, characterized in that: the laser drive control module includes a control scanning circuit, a constant temperature circuit and a protection circuit, and the control scanning circuit makes the output laser The wavelength is scanned in the wavelength range, and the temperature control circuit is used to stabilize the temperature of the laser and eliminate the influence of temperature on the wavelength of the output laser. 4.根据权利要求1所述的波长范围以及波长连续可调谐的多气体检测系统,其特征是:所述光谱信号分析模块包括依次连接的前置放大器、锁相放大器、模数转换器和微处理器。4. The wavelength range and wavelength continuously tunable multi-gas detection system according to claim 1 is characterized in that: the spectral signal analysis module includes a preamplifier, a lock-in amplifier, an analog-to-digital converter and a micro processor. 5.根据权利要求1至4任一项所述的波长范围以及波长连续可调谐的多气体检测系统,其特征是:还包括终端设备。5. The wavelength range and wavelength continuously tunable multi-gas detection system according to any one of claims 1 to 4, characterized in that it also includes terminal equipment.
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Publication number Priority date Publication date Assignee Title
CN109211825A (en) * 2018-10-10 2019-01-15 吉林大学 Solution gas infrared detecting device and method in a kind of water using acoustooptical effect collimated light path
CN109580585A (en) * 2019-01-07 2019-04-05 重庆大学 Characteristic of transformer gas Raman spectrum detection device and detection method
CN109580585B (en) * 2019-01-07 2021-07-23 重庆大学 Transformer characteristic gas Raman spectrum detection device and detection method
CN109612939A (en) * 2019-01-24 2019-04-12 中国科学院长春光学精密机械与物理研究所 Detection system and detection method of food deterioration degree based on infrared absorption spectrum
CN109612939B (en) * 2019-01-24 2020-08-21 中国科学院长春光学精密机械与物理研究所 Detection system and detection method of food deterioration degree based on infrared absorption spectrum
CN110160990A (en) * 2019-05-30 2019-08-23 深圳华领气体技术有限公司 Trace gas and its isotope real time on-line detection device
CN111948173A (en) * 2020-08-12 2020-11-17 电子科技大学 TDLAS signal processing system based on acousto-optic correlation technology
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