CN207946368U - Infrared optical material microdefect detection device and far infrared microlens - Google Patents
Infrared optical material microdefect detection device and far infrared microlens Download PDFInfo
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- CN207946368U CN207946368U CN201820346664.7U CN201820346664U CN207946368U CN 207946368 U CN207946368 U CN 207946368U CN 201820346664 U CN201820346664 U CN 201820346664U CN 207946368 U CN207946368 U CN 207946368U
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- 239000000463 material Substances 0.000 title claims abstract description 102
- 230000003287 optical effect Effects 0.000 title claims abstract description 70
- 238000001514 detection method Methods 0.000 title claims abstract description 42
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 10
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000005387 chalcogenide glass Substances 0.000 claims abstract description 7
- 239000011521 glass Substances 0.000 claims abstract description 6
- 238000003331 infrared imaging Methods 0.000 claims description 22
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 18
- 238000009835 boiling Methods 0.000 claims description 12
- 238000003384 imaging method Methods 0.000 claims description 9
- 238000003491 array Methods 0.000 claims description 2
- 230000007547 defect Effects 0.000 abstract description 11
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000009738 saturating Methods 0.000 abstract description 4
- 208000037656 Respiratory Sounds Diseases 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 238000007689 inspection Methods 0.000 description 5
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 239000005864 Sulphur Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 238000004971 IR microspectroscopy Methods 0.000 description 1
- 208000003464 asthenopia Diseases 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000000887 face Anatomy 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011895 specific detection Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The utility model is related to a kind of infrared optical material microdefect detection device and for the far infrared microlens of the device, far infrared microlens include：The first lens, the second lens, the third lens and the 4th lens being arranged in order from object side to image side along optical axis；First lens, the third lens and the 4th lens are germanium system glass, and second lens are chalcogenide glass；The object side of first lens and the third lens is spherical surface, image side surface is aspherical；The aspherical of the third lens has diffraction ring band；The object side and image side surface of second lens and the 4th lens are spherical surface.The microdefect that the infrared optical material (silicon, germanium or chalcogenide glass etc.) for the saturating far infrared that far infrared microlens according to the present utility model can not observe naked eyes is internal is observed, and the different types of defect such as bubble, impurity and/or crackle can be clearly observed.
Description
Technical field
A kind of far infrared the utility model is related to infrared optical material microdefect detection device and for the device is aobvious
Micro lens.The infrared ray sent out using infrared light supply passes through infrared microscopy through infrared optical material, the infrared ray of transmission is tested
The infrared imaging signal received is converted into converting by computer after electronic signal by camera lens amplification imaging, infrared detector
At figure, material internal microdefect is observed to realize.
Background technology
Light microscope is to utilize one or a set of lens, a set of optical amplification system is formed, by microcosmic object or figure
As zooming into the image that human eye can be differentiated, so that people observe microcosmos.Light microscope generally uses visible light
As light source, working method is mostly reflective, is used for the subtle situation in surface of human eye observation's object, can also utilize transmission-type
Working method observes the details of pattern inside transparent object.Light microscope is in addition to can be direct by optical eyepiece with human eye
Observation is outer, can also be equipped with electronic eyepiece, by opto-electronic conversion and signal processing, the figure for being seen light microscope by software
Piece is shown on computer screen, for eye-observation, reduces eye fatigue.
But for saturating infrared optical material, such as monocrystalline germanium, monocrystalline silicon etc., due to being not through to visible light, normal light
The inside microdefect of such material can not be observed by learning microscope, lead to not to judge whether the quality of material meets to make
With requiring.
Invention content
Purpose of the utility model is to solve the above problems and provide one kind, can accurately to detect infrared optical material microcosmic
The infrared optical material microdefect detection device of defect and far infrared microlens for the device.
For achieving the above object, the utility model provides a kind of infrared optical material including far infrared microlens
Microdefect detection device, including：
Adjustment unit is clamped in material, for infrared optical material to be clamped and adjusts the position of infrared optical material；
Infrared imaging unit is located at the side of material clamping adjustment unit, for being focused into infrared optical material
Picture；
Infrared light unit is located at the other side of material clamping adjustment unit, for providing infrared ray；
Bearing unit, for supporting the material clamping adjustment unit, infrared imaging unit and infrared light unit；
The infrared imaging unit includes the far infrared microlens.
One side according to the present utility model further includes being located at material clamping adjustment unit and the infrared light list
The diaphragm of adjustable diaphragm between member, the adjustable diaphragm adjusts bore ranging from 5-80mm.
One side according to the present utility model, the material clamping adjustment unit includes for infrared optical material to be clamped
Grain-clamping table, the bearing grain-clamping table adjustment platform and be used to drive the adjustment platform on the adjustment platform
Mobile adjusting knob.
One side according to the present utility model, the infrared imaging unit further include micro- for adjusting the far infrared
The focusing handwheel of the focal length of camera lens, the far infrared deterctor being electrically connected with the far infrared microlens.
One side according to the present utility model, the infrared light unit include for provide the infrared light supply of infrared ray,
Infrared light supply intensity adjustment knob for adjusting the infrared light supply intensity and the power supply powered for the infrared light supply.
One side according to the present utility model, the infrared light supply are electric boiling plate, and the electric boiling plate is available
Temperature range is 50-120 DEG C.
One side according to the present utility model, the bearing unit include supporting the material clamping adjustment unit and institute
State pedestal, the bearing holder on the base of infrared light unit, and bearing is on the bracket and can be along institute
It states holder and moves up and down bearing support for supporting the infrared imaging unit.
One side according to the present utility model, the pedestal have the groove for installing the infrared light supply；
The infrared light supply intensity adjustment knob and the power supply are installed on the side of the pedestal.
For achieving the above object, the utility model provides a kind of far infrared microlens, including：
The first lens, the second lens, the third lens and the 4th lens being arranged in order from object side to image side along optical axis；
First lens, the third lens and the 4th lens are germanium system glass, and second lens are sulphur system
Glass；
The object side of first lens and the third lens is spherical surface, image side surface is aspherical；
The aspherical of the third lens has diffraction ring band；
The object side and image side surface of second lens and the 4th lens are spherical surface.
The far infrared microlens of a scheme according to the present utility model, the utility model can not observe naked eyes
The internal microdefect of infrared optical material (silicon, germanium or chalcogenide glass etc.) of saturating far infrared observed, can be clear
The different types of defect such as bubble, impurity and/or crackle is observed on ground, and is demarcated to flaw size, and defect picture is preserved,
So that it is determined that the quality of infrared optical material.
A scheme according to the present utility model, the infrared optical material microdefect structure of the detecting device of the utility model
Simply, there is far infrared microlens itself focusing handwheel can focus, and in addition to this, infrared imaging unit can also be with
It bearing support to move up and down along holder, therefore considerably increases the imaging model of the far infrared microlens in infrared imaging unit
It encloses so that detection range greatly increases, and testing result is more accurate.
A scheme according to the present utility model, material clamping adjustment unit clamping need the infrared optical material detected can
To do the two-dimensional position adjustment on front and back and left and right directions on pedestal, thus so that the detection of infrared optical material has more
Flexibility, test position is flexible and changeable, and material clamp can be made to hold the infrared optical material of each position in adjustment unit
It can accurately be photographed by far infrared microlens so that detect no dead angle, ensure the precision of batch detection.
A scheme according to the present utility model heats offer infrared ray using electric boiling plate and makes cost reduction, simultaneously
Electric boiling plate is arranged in the groove that pedestal opens up, and greatly reduced the volume of device so that and the structure of device is simpler,
Repair is also more convenient.
A scheme according to the present utility model, infrared optical material microdefect detection dress according to the present utility model
It sets, operation wavelength is 7~14 microns, can be anti-reflection to common infrared optical material, such as chalcogenide glass, silicon, germanium, and plating
Such material after film carries out interior microscopic defect inspection, and interior microscopic defect inspection can not be carried out to such material before solving
The problem looked into.
Detection method according to the present utility model, Er Qieneng simple and fast to the detection of infrared optical material microdefect
It enough realizes batch detection, and dead angle is not present in detection process, ensures to improve detection efficiency while accuracy of detection.
Description of the drawings
Fig. 1 schematically shows a kind of infrared optical material microdefect detection dress of embodiment according to the present utility model
The stereogram for the structure arrangement set；
Fig. 2 schematically shows a kind of structure arrangement of the far infrared microlens of embodiment according to the present utility model
Figure.
Specific implementation mode
It, below will be to implementing in order to illustrate more clearly of the utility model embodiment or technical solution in the prior art
Attached drawing needed in mode is briefly described.It should be evident that the accompanying drawings in the following description is only that this practicality is new
Some embodiments of type for those of ordinary skills without creative efforts, can be with
Obtain other attached drawings according to these attached drawings.
When the embodiment for the utility model is described, term " longitudinal direction ", " transverse direction ", "upper", "lower",
"front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", the orientation or positional relationship expressed by "outside" are
Based on orientation or positional relationship shown in relevant drawings, it is merely for convenience of describing the present invention and simplifying the description, without
It is instruction or implies that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore on
Term is stated to should not be understood as limiting the present invention.
The utility model is described in detail with reference to the accompanying drawings and detailed description, embodiment cannot herein one
One repeats, but therefore the embodiment of the utility model is not defined in following implementation.
Fig. 1 schematically shows a kind of infrared optical material microdefect detection dress of embodiment according to the present utility model
The stereogram for the structure arrangement set.As shown in Figure 1, infrared optical material microdefect detection device packet according to the present utility model
Include material clamping adjustment unit 1, infrared imaging unit 2, infrared light unit 3 and bearing unit 4.In the present embodiment, material
Clamping adjustment unit 1 is used to that infrared optical material to be clamped and adjusts the specific test position of infrared optical material.Infrared imaging
Unit 2 is located at the side of material clamping adjustment unit 1, for infrared optical material focal imaging.Infrared light unit 3 is located at object
The other side of material clamping adjustment unit 1, for providing infrared ray.In the present invention, it is sent out by infrared light unit 3 infrared
Line can penetrate tested infrared optical material, then carry out shooting imaging by infrared imaging unit 2.Bearing unit 4 is for branch
Hold material clamping adjustment unit 1, infrared imaging unit 2 and infrared light unit 3.
In addition, as shown in Figure 1, in the present embodiment, infrared optical material microdefect according to the present utility model is examined
It further includes adjustable diaphragm 5 to survey device.As shown in Figure 1, adjustable diaphragm 5 be located at material clamping adjustment unit 1 and infrared light unit 3 it
Between.In the present embodiment, the adjustable range of the diaphragm bore of adjustable diaphragm 5 is 5-80mm.
A kind of embodiment according to the present utility model, as shown in Figure 1, material clamping adjustment unit 1 includes grain-clamping table
101, platform 102 and adjusting knob 103 are adjusted.In the present embodiment, grain-clamping table 101 for be clamped need be detected it is red
Outer optical material, grain-clamping table 101 are Three-claw type holding structure, can be the detected sample of 5-80mm with clamping dimension.Adjustment is flat
Platform 102 adjusts for supporting grain-clamping table 101 and is provided with adjusting knob 103 on platform 102, can be adjusted by adjusting knob 103
Adjust the position of platform 102.In the present embodiment, adjustment platform 102 is two-dimension adjustment platform, passes through adjusting knob 103
The adjusting that can be set with the enterprising line position of left and right directions before and after Fig. 1, and the amplitude (moving range) adjusted is 0-25mm.
In present embodiment, because the clamping of grain-clamping table 101 needs the infrared optical material being detected to be supported on adjustment platform 102,
Therefore adjustment platform 102 can drive grain-clamping table 101 and infrared optical material to be detected to be moved, infrared to adjust with this
The test position of optical material.
A kind of embodiment according to the present utility model, as shown in Figure 1, infrared imaging unit (2) includes that far infrared is micro-
Camera lens 201, focusing handwheel 202 and far infrared deterctor 203.In the present embodiment, focusing handwheel 202 is for adjusting far infrared
The focal length of microlens 201.Far infrared deterctor 203 is electrically connected with far infrared microlens 201, by far infrared microlens
The picture signal of 201 shootings is converted into electronic signal and is transmitted.In the present invention, far infrared deterctor 203 passes through electricity
Line 6 and computer, image processor or video converter etc. are connect, and electronic signal is thus passed to the equipment such as computer,
Electronic signal image is converted to by video software to show.In the present embodiment, far infrared deterctor 203 is
The LWIR Uncooled type detector of 640x480 arrays, 17 microns of pixel spacing.
Fig. 2 schematically shows a kind of structure arrangement of the far infrared microlens of embodiment according to the present utility model
Figure.As shown in Fig. 2, far infrared microlens 201 according to the present utility model include four lens, respectively along optical axis from object
The first lens 2011, the second lens 2012, the third lens 2013 and the 4th lens 2014 that side to image side is arranged in order.In this reality
It applies in mode, the first lens 2011, the third lens 2013 and the 4th lens 2014 are germanium system glass, and the second lens 2012 are sulphur system
Glass.
In the present embodiment, the object side of the first lens 2011 and the third lens 2013 is spherical surface, image side surface is aspheric
Face；The aspherical diffraction surfaces constituted with DOE with diffraction ring of the third lens 2013；Second lens 2012 and the 4th lens 2014
Object side and image side surface be spherical surface.
In the present embodiment, the NA of far infrared microlens 201 is equal to 0.5, and minimum resolution is 6.8 microns, minimum
Operating distance is 18.8 millimeters, and operation wavelength is 7~14 μm.
A kind of embodiment according to the present utility model, as shown in Figure 1, infrared light unit 3 includes infrared light supply 301, red
Outer light source intensity adjustment knob 302 and power supply 303.In the present embodiment, infrared light supply 301 is infrared for providing infrared ray
Line is imaged through infrared optical material by infrared imaging unit 2.Infrared light supply intensity adjustment knob 302 is red for adjusting
The intensity for the infrared ray that outer light source 301 provides.Power supply 303 is used to power for infrared light supply 301.In the present embodiment, infrared
Intensity of light source adjusting knob 302 is to be generated by adjusting the size for the electric current that power supply 303 provides to control in infrared light supply 301
The intensity size of infrared ray.
A kind of embodiment according to the present utility model, infrared light supply 301 use electric boiling plate, electric boiling plate that can provide
Temperature range be 50-120 DEG C.In the present embodiment, electric boiling plate generates infrared ray by generating high temperature, and temperature is higher
The intensity of infrared ray is bigger.Infrared light supply intensity adjustment knob 302 is controlled by adjusting the size for the electric current that power supply 303 provides
The temperature of electric boiling plate, to control generation infrared ray intensity.
A kind of embodiment according to the present utility model, as shown in Figure 1, bearing unit 4 includes pedestal 401,402 and of holder
Bearing support 403.In the present embodiment, pedestal 401 is used for support material clamping adjustment unit 1 and infrared light unit 3.Holder
402 are supported on pedestal 401.Bearing support 403 is supported on holder 402 and can be moved up and down along holder 402 for branch
Hold infrared imaging unit 2.In the present embodiment, position of the bearing support 403 on holder 402 is adjusted by screwing knob 404
It sets.
As shown in Figure 1, in the present embodiment, material clamping adjustment unit 1 is supported on the upper surface of pedestal 401.Bottom
The transverse center line position of seat 401 offers groove 4011, this groove 4011 faces material clamping adjustment unit 1, and ruler
The very little adjustment size of moving range of platform 102 being clamped in adjustment unit 1 with material is consistent.In the present embodiment, infrared
Light source 301 is mounted in groove 4011, and the shifting of the adjustment platform 102 in adjustment unit 1 is equally clamped in infrared light supply 301 with material
The size of dynamic range is consistent.Infrared light supply intensity adjustment knob 302 and power supply 303 are arranged on the side wall of pedestal 401, power supply
303 and infrared light supply intensity adjustment knob 302 be electrically connected with infrared light supply 301 by the way that the transmission line of electricity in pedestal 401 is arranged.
Above-mentioned setting according to the present utility model, the far infrared microlens 201 of the utility model can not to naked eyes
The microdefect that the infrared optical material (silicon, germanium or chalcogenide glass etc.) of the saturating far infrared of observation is internal is observed, can be with
It is clearly observed the different types of defect such as bubble, impurity and/or crackle, and flaw size is demarcated, preserves defect
Picture, so that it is determined that the quality of infrared optical material.
Above-mentioned setting according to the present utility model, the infrared optical material microdefect structure of the detecting device of the utility model
Simply, there is far infrared microlens 201 itself focusing handwheel 202 can focus, in addition to this, infrared imaging unit 2
It can also be moved up and down along holder 402 with bearing support 403, therefore considerably increase the far infrared in infrared imaging unit 2
The areas imaging of microlens 201 so that detection range greatly increases, and testing result is more accurate.
In addition, the material clamping clamping of adjustment unit 1 needs the infrared optical material detected that can be done on pedestal 401 such as figure
Two-dimensional position adjustment on front and back and left and right directions in 1, thus so that the detection of infrared optical material is more flexible,
Test position is flexible and changeable, and can make material clamp holds the infrared optical material of each position in adjustment unit 1 can
It was accurately photographed by far infrared microlens 201 so that detect no dead angle, ensure the precision of batch detection.
Make cost reduction in addition, being heated using electric boiling plate and providing infrared ray, while electric boiling plate is arranged in pedestal 401
In the groove opened up, the volume of device greatly reduced so that the structure of device is simpler, and repair is also more convenient.
Infrared optical material microdefect detection device according to the present utility model, operation wavelength are 7~14 microns, can
With to common infrared optical material, such as chalcogenide glass, silicon, such material after germanium, and plating anti-reflection film carries out interior microscopic
Defect inspection can not carry out interior microscopic defect inspection before solving the problems, such as to such material.
Above-mentioned setting according to the present utility model, it is actually detected infrared using infrared optical material microdefect detection device
The method of optical material includes the following steps：
A. the two-sided blocky infrared optical material for being processed into minute surface is positioned in grain-clamping table 101, and ensures infrared optics
The inspection surface of material is parallel with infrared light supply 301 and far infrared microlens 201；
B. power on 303, the size of electric current is controlled by infrared light supply intensity adjustment knob 302 to adjust infrared light supply
301 are capable of the intensity of infrared radiation；
C. computer video software is opened, the imaging contexts of detection device show completion on the computer screen.Pass through rotation
Button 404 adjusts the upper and lower position of far infrared microlens 201, while observing video and can find the position of imaging.It adjusts adjustable
The bore of diaphragm 5, the infrared spectral range for needing control infrared light supply 301 to send out according to the size of infrared optical material and detection are big
The small requirement for meeting observation.Diaphragm bore appropriate can ensure accuracy of detection to avoid light leakage.Focusing handwheel 202 is adjusted,
The observation position of mobile far infrared microlens 201；
D. the position that the infrared optical material on adjustment platform 102 in grain-clamping table 101 is adjusted by adjusting knob 103 carries out
The specific detection of different location imaging.
In the present invention, for the picture observed, computer video shows that the scale on software can be to finding
The size of defect is demarcated, and can be preserved in software to the microdefect image observed.
The above method according to the present utility model, Er Qieneng simple and fast to the detection of infrared optical material microdefect
It enough realizes batch detection, and dead angle is not present in detection process, ensures to improve detection efficiency while accuracy of detection.
The foregoing is merely an embodiments of the utility model, are not intended to limit the utility model, for
For those skilled in the art, various modifications and changes may be made to the present invention.All spirit and original in the utility model
Within then, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (10)
1. a kind of infrared optical material microdefect detection device, which is characterized in that including：
Adjustment unit (1) is clamped in material, for infrared optical material to be clamped and adjusts the position of infrared optical material；
Infrared imaging unit (2) is located at the side of material clamping adjustment unit (1), for being focused to infrared optical material
Imaging；
Infrared light unit (3) is located at the other side of material clamping adjustment unit (1), for providing infrared ray；
Bearing unit (4), for supporting the material clamping adjustment unit (1), infrared imaging unit (2) and infrared light unit
(3)；
The infrared imaging unit (2) includes far infrared microlens (201).
2. infrared optical material microdefect detection device according to claim 1, which is characterized in that further include being located at institute
State the adjustable diaphragm (5) between material clamping adjustment unit (1) and the infrared light unit (3), the light of the adjustable diaphragm (5)
Late bore adjustable range is 5-80mm.
3. infrared optical material microdefect detection device according to claim 1, which is characterized in that the material clamping
Adjustment unit (1) includes being put down for the adjustment of the grain-clamping table of infrared optical material (101), the bearing grain-clamping table (101) to be clamped
Platform (102) and the adjusting knob on the adjustment platform (102) for driving the adjustment platform (102) mobile
(103)。
4. infrared optical material microdefect detection device according to claim 1, which is characterized in that the infrared imaging
Unit (2) further include the focal length for adjusting the far infrared microlens (201) focusing handwheel (202), with it is described remote red
The far infrared deterctor (203) of outer microlens (201) electrical connection.
5. infrared optical material microdefect detection device according to claim 4, which is characterized in that the far infrared is visited
Survey the LWIR Uncooled type detector that device (203) is 640x480 arrays, 17 μm of pixel spacing.
6. infrared optical material microdefect detection device according to claim 1, which is characterized in that the infrared light list
First (3) include for providing the infrared light supply of infrared ray (301), the infrared light for adjusting the infrared light supply (301) intensity
Source strength adjusting knob (302) and the power supply (303) powered for the infrared light supply (301).
7. infrared optical material microdefect detection device according to claim 6, which is characterized in that the infrared light supply
(301) it is electric boiling plate, the available temperature range of electric boiling plate is 50-120 DEG C.
8. infrared optical material microdefect detection device according to claim 6, which is characterized in that the bearing unit
(4) include the pedestal (401) for supporting the material clamping adjustment unit (1) and the infrared light unit (3), be supported on the bottom
Holder (402) on seat (401), and be supported on the holder (402) and can back and forth be moved along the holder (402)
It employs in the bearing support (403) for supporting the infrared imaging unit (2).
9. infrared optical material microdefect detection device according to claim 8, which is characterized in that the pedestal
(401) there is the groove (4011) for installing the infrared light supply (301)；
The infrared light supply intensity adjustment knob (302) and the power supply (303) are installed on the side of the pedestal (401).
10. a kind of far infrared for the infrared optical material microdefect detection device described in any one of claim 1 to 9
Microlens (201), which is characterized in that including：
The first lens (2011) for being arranged in order from object side to image side along optical axis, the second lens (2012), the third lens
(2013) and the 4th lens (2014)；
First lens (2011), the third lens (2013) and the 4th lens (2014) are germanium system glass, described
Second lens (2012) are chalcogenide glass；
The object side of first lens (2011) and the third lens (2013) is spherical surface, image side surface is aspherical；
The aspherical of the third lens (2013) has diffraction ring band；
The object side and image side surface of second lens (2012) and the 4th lens (2014) are spherical surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820346664.7U CN207946368U (en) | 2018-03-14 | 2018-03-14 | Infrared optical material microdefect detection device and far infrared microlens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820346664.7U CN207946368U (en) | 2018-03-14 | 2018-03-14 | Infrared optical material microdefect detection device and far infrared microlens |
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| Publication Number | Publication Date |
|---|---|
| CN207946368U true CN207946368U (en) | 2018-10-09 |
Family
ID=63697976
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820346664.7U Withdrawn - After Issue CN207946368U (en) | 2018-03-14 | 2018-03-14 | Infrared optical material microdefect detection device and far infrared microlens |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108375584A (en) * | 2018-03-14 | 2018-08-07 | 宁波舜宇红外技术有限公司 | Infrared optical material microdefect detection device and far infrared microlens |
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2018
- 2018-03-14 CN CN201820346664.7U patent/CN207946368U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108375584A (en) * | 2018-03-14 | 2018-08-07 | 宁波舜宇红外技术有限公司 | Infrared optical material microdefect detection device and far infrared microlens |
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