CN207850721U - A kind of vacuum equipment external environment simulator - Google Patents
A kind of vacuum equipment external environment simulator Download PDFInfo
- Publication number
- CN207850721U CN207850721U CN201820358860.6U CN201820358860U CN207850721U CN 207850721 U CN207850721 U CN 207850721U CN 201820358860 U CN201820358860 U CN 201820358860U CN 207850721 U CN207850721 U CN 207850721U
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- China
- Prior art keywords
- vacuum
- external environment
- metal cap
- vacuum equipment
- equipment external
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- 239000002184 metal Substances 0.000 claims abstract description 66
- 229910052751 metal Inorganic materials 0.000 claims abstract description 66
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 35
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 27
- 229910052757 nitrogen Inorganic materials 0.000 claims description 16
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 abstract description 15
- 238000004088 simulation Methods 0.000 description 22
- 238000000034 method Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 239000008236 heating water Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The utility model discloses a kind of vacuum equipment external environment simulators, include metal cap, vacuum tank, steam evaporator, dry air generator and the vacuum pump assembly for placing the vacuum equipment, the device can produce the pressure of 0 to 1.3 atmospheric pressure outside vacuum equipment, 0 DEG C to 90 DEG C of environment temperature, the ambient humidity of 0%RH to 100%RH, and ensure stablizing relatively for environmental condition.
Description
Technical field
The utility model belongs to external environment analogue technique field, and in particular to a kind of vacuum equipment external environment simulation dress
It sets.
Background technology
Vacuum equipment is under atmospheric environment, and the parameters such as temperature, humidity, air pressure in atmospheric environment are variables, these changes
Amount can generate vacuum equipment certain influence.To study the temperature in ambient enviroment, humidity, pressure and other parameters to vacuum equipment
It influences, needs to simulate true vacuum equipment external environment.Although current environment simulator be widely used to aerospace,
The engineering fields such as ship, but these field institute simulated environments, usually vacuum environment or hydraulic pressure environment etc., i.e., be placed in envelope by object
It closes in container, using vacuum pump depletion or utilizes the inside water pressure generation of water pump, carry out environmental simulation.In the prior art, without similar
It is related to the simulator of vacuum equipment external pressure, three temperature, humidity variables while the present apparatus.
Utility model content
To realize that the simulation of vacuum equipment external environment, the utility model provide a kind of suitable for vacuum equipment external environment
The device of simulation can realize the simulation of the practical external environment of vacuum equipment, including environmental pressure, environment temperature, ambient humidity
Deng.
The utility model is achieved through the following technical solutions：
A kind of vacuum equipment external environment simulator includes the metal cap for placing the vacuum equipment, voltage stabilizing
Tank, steam evaporator, dry air generator and vacuum pump assembly are provided with the first film pressure gauge and on metal cap
One Hygrothermograph, metal cap are connected to circulation, and metal cap is connected by pipeline with vacuum tank, and metal cap passes through pipeline
It is connected to steam evaporator, metal cap is connected to by pipeline with vacuum pump assembly.
In the above-mentioned technical solutions, the metal cap surface is provided with the first observation window.
In the above-mentioned technical solutions, the first intake valve is provided on the pipeline that the metal cap is connected to vacuum tank.
In the above-mentioned technical solutions, the dry air generator includes high pure nitrogen container and third intake valve, high-purity
Nitrogen gas purity in nitrogen gas container is more than 99.9%.
In the above-mentioned technical solutions, the second air inlet is provided on the pipeline that the metal cap is connected to steam evaporator
Valve.
In the above-mentioned technical solutions, the steam evaporator includes water-level gauge, water container, heater and drain valve,
Heater is set to the bottom of water container, and the side of water container is provided with water-level gauge, on the discharge pipe line of water container
It is provided with drain valve.
In the above-mentioned technical solutions, the surge tank surface is provided with the second observation window.
In the above-mentioned technical solutions, the second diaphragm gauge and the second Hygrothermograph on the vacuum tank, the second film pressure
The range of power meter is 1000torr, and the temperature range of precision 0.5%, the second Hygrothermograph is -20 DEG C~100 DEG C, and precision is
± 0.5 DEG C, humidity range is 0~100%RH, and precision is ± 3%RH.
In the above-mentioned technical solutions, the range of the first film pressure gauge is 1000torr, precision 0.5%.
In the above-mentioned technical solutions, the temperature range of first Hygrothermograph is -20 DEG C~100 DEG C, and precision is ± 0.5
DEG C, humidity range is 0~100%RH, and precision is ± 3%RH.
In the above-mentioned technical solutions, the end vacuum of the vacuum pump assembly is better than 0.1Pa.
A kind of vacuum equipment external environment analogy method, carries out according to the following steps：
Step 1: vacuum equipment is put into metal cap；
Step 2: being vacuumized to metal cap by vacuum pump assembly, system pressure is made to be down to 1Pa or less；
Step 3: by circulation to being passed through recirculated water outside metal cap, by the first Hygrothermograph measuring temperature,
Metal case temperature is set to keep environment analog temperature；
Step 4: feeding high pure nitrogen to metal cap by high pure nitrogen container, pressure is monitored by diaphragm gauge, is made
Metal cap internal pressure ring border reaches environmental simulation air pressure；
Step 5: heating water container by heater, 100 DEG C are reached, opens the second intake valve, third valve successively
Door, and ensure the 4th valve opening, so that vapor is entered metal cap, makes to reach environmental simulation barometric pressure humidity in metal cap.
Step 6: in simulation process, when pressure decreases by high pure nitrogen container, third intake valve, the 4th valve into
Row ftercompction carries out pumpdown by vacuum pump assembly, the 4th valve, so that environmental pressure is met the requirements, match when pressure rise
The second intake valve, third valve are closed, vapor is supplemented into metal cap, realizes the fine tuning of humidity so that keeps pressure in metal cap
Force environment simulated pressure, temperature and humidity.
In the above-mentioned technical solutions, the environmental simulation pressure is 0 to 1.3 atmospheric pressure.
In the above-mentioned technical solutions, the environmental simulation temperature is 0 DEG C to 90 DEG C.
In the above-mentioned technical solutions, the environmental simulation humidity is 0%RH to 100%RH.
The beneficial effects of the utility model are as described below：The device can produce 0 to 1.3 big outside vacuum equipment
The pressure of air pressure, 0 DEG C to 90 DEG C of environment temperature, the ambient humidity of 0%RH to 100%RH, and ensure the opposite of environmental condition
Stablize.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model.
Wherein：1 is the first valve, and 2 be the first film pressure gauge, and 3 be the first observation window, and 4 be the first Hygrothermograph, and 5 are
Vacuum equipment, 6 be metal cap, and 7 be the first intake valve, and 8 be circulation, and 9 be vacuum tank, and 10 be the second observation window, and 11 are
Second Hygrothermograph, 12 be the second valve, and 13 be third valve, and 14 be the second intake valve, and 15 be water-level gauge, and 16 be the appearance that is filled with water
Device, 17 be heater, and 18 be drain valve, and 19 be vacuum pump assembly, and 20 be third intake valve, and 21 be high pure nitrogen container, and 22 are
Second diaphragm gauge, 23 be the 4th valve.
It for those of ordinary skill in the art, without creative efforts, can be according to above attached
Figure obtains other relevant drawings.
Specific implementation mode
In order to make those skilled in the art more fully understand the utility model, with reference to specific embodiment into one
Step illustrates the technical solution of the utility model.
The utility model is described in further details below by embodiment.
Embodiment 1：
External environment simulator described in the utility model (is capable of providing the water of 100% humidity by steam evaporator
Steam), dry air (high pure nitrogen) generator (purity be more than 99.9%), the first film pressure gauge (range 1000torr, essence
Degree 0.5%), the second diaphragm gauge (range 1000torr, precision 0.5%), the first Hygrothermograph (- 20 DEG C of temperature range~
100 DEG C, precision ± 0.5 DEG C, 0~100%RH of humidity range, precision ± 3%RH), the second Hygrothermograph (- 20 DEG C of temperature range
~100 DEG C, precision ± 0.5 DEG C, 0~100%RH of humidity range, precision ± 3%RH), (0 DEG C of controllable temperature is extremely for circulation
100 DEG C), metal cap, vacuum tank, vacuum pump assembly (end vacuum be better than 0.1Pa) and connecting line, valve composition.
Wherein, steam evaporator is by the second intake valve 14, water-level gauge 15, water container 16, heater 17, drain valve 18
Composition.Dry air high pure nitrogen generator is made of third intake valve 20, high pure nitrogen container 21.
The inside of metal cap 6 is equipped with the first observation window 3 for placing vacuum equipment 5 on metal cap 6, in the first observation window 3
Hygrothermograph 4 is placed, for detecting temperature, humidity in metal cap 6.The first film pressure gauge 2 is laid on metal cap 6, is used
In detection pressure.Metal cap 6 connects circulation 8, and 0 DEG C of temperature is passed through extremely outside metal cap 6 by circulation 8
100 DEG C of recirculated water so that the temperature-controllable in metal cap 6 is adjustable.Vacuum is set by the first valve 1 and vacuum pump assembly 19
Standby 5 evacuate, and realize pressure control in vacuum equipment 5.
Vacuum tank 9 is equipped with the second observation window 10, and the second Hygrothermograph 11 is placed in the second observation window 10, steady for detecting
Press temperature, the humidity in tank 9.
When actual environment is simulated, pure water will be first injected in water container 16, then by vacuum pump assembly 19 to entirely filling
It sets and is evacuated.Wait for that system pressure is down to 1Pa hereinafter, stopping evacuating at this time, locking device can carry out vacuum equipment external rings
It simulates in border.The simulation of environment temperature：Temperature as needed is passed through 0 DEG C of temperature extremely by circulation 8 outside metal cap
100 DEG C of recirculated water so that the temperature in metal cap 6 reaches required temperature.Maintain stablizing for 8 temperature of circulation real at this time
The simulation of existing temperature environment.The simulation of pressure environment：Pass sequentially through high pure nitrogen container 21, third intake valve 20, the 4th valve
23 feed specified pressure to metal cap 6, and pressure is monitored by diaphragm gauge 2.After pressure environment is met the requirements, third is closed
Intake valve 20.In pressure control procedure, when pressure is higher than specified pressure, pumpdown is carried out by vacuum pump assembly 19.Ring
The simulation of border humidity：Water container 16 is heated using heater 17, reaches 100 DEG C, opens the second intake valve 14, the successively
Three valves 13, and ensure that the 4th valve 23 is opened, so that vapor is entered metal cap 6, after reaching required humidity environment, closes the
Two intake valves 14, third valve 13.
The fine tuning of pressure, humidity：In simulation process, when pressure decreases, pass through high pure nitrogen container 21, third intake valve
20, the 4th valve 23 carries out ftercompction, when pressure rise, carries out pumpdown by vacuum pump assembly 19, the 4th valve 23, makes
Pressure environment is met the requirements.Coordinate the second intake valve 14, third valve 13, supplements vapor into metal cap 6, realize humidity
Fine tuning.
It, at this time can be by the above metal when pressure, humidity environment cannot keep stable in metal cap 6 under normal temperature condition
The adjusting method of internal mask pressure, humidity adjusts consistent in pressure, humidity and metal cap 6 in vacuum tank 9, the first intake valve of unlatching
7, so that metal cap 6 is connected to vacuum tank 9, uses 9 stable metal cover of vacuum tank, 6 internal environment.
Embodiment 2：
1. pressing Fig. 1 attachment devices, vacuum equipment 5 is put into metal cap 6.
2. being vacuumized to metal cap 6 by vacuum pump assembly 19, wait for that system pressure is down to 1Pa hereinafter, stopping at this time
It evacuates, locking device proceeds by environmental simulation, and specific environment is that simulated pressure is 1.1 atmospheric pressure, and 40 DEG C of environment temperature is wet
Degree 60%.
3. being passed through the recirculated water of 40 DEG C of temperature outside metal cap by circulation 8, seen by the first Hygrothermograph 4
Temperature in metal cap 6 is examined, after the temperature in metal cap 6 is close to 40 DEG C and stablizes.Adjust circulation slightly upward at this time
Temperature realize environment temperature simulation until the temperature of the first Hygrothermograph 4 display is stable and is 40 DEG C.
4. opening third intake valve 20 and the 4th valve 23,1.1 are fed to metal cap 6 greatly by high pure nitrogen container 21
Air pressure monitors pressure by diaphragm gauge 2.After pressure environment reaches 1.1 atmospheric pressure, third intake valve 20 is closed.
5. heating water container 16 using heater 17,100 DEG C are reached, opens the second intake valve 14, third successively
Valve 13, and ensure that the 4th valve 23 is opened, so that vapor is entered metal cap 6, after reaching required humidity and reaching 50%, slightly
Adjusting the 4th valve 23 makes vapor ingress rate decline, until 4 humidity display 60% of the first Hygrothermograph, closes the second air inlet
Valve 14, third valve 13.
6. in simulation process, when pressure decreases by high pure nitrogen container 21, third intake valve 20, the 4th valve 23 into
Row ftercompction carries out pumpdown by vacuum pump assembly 19, the 4th valve 23, environmental pressure satisfaction is made to want when pressure rise
It asks.Coordinate the second intake valve 14, third valve 13, vapor is supplemented into metal cap 6, realizes the fine tuning of humidity so that pressure
1.1 atmospheric pressure, temperature are kept to keep 40 DEG C, humidity holding 60%.
Embodiment 3：
1. pressing Fig. 1 attachment devices, vacuum equipment is put into metal cap.
2. being evacuated to metal cap 6 by vacuum pump assembly 19, wait for that system pressure is down to 1Pa hereinafter, stopping taking out at this time
Sky, locking device proceed by environmental simulation, and specific environment is that simulated pressure is 0.9 atmospheric pressure, 20 DEG C of environment temperature, humidity
30%.
3. being passed through the recirculated water of 20 DEG C of temperature outside metal cap by circulation 8, seen by the first Hygrothermograph 4
Temperature in metal cap 6 is examined, after the temperature in metal cap 6, which connects, to be stablized.At this time gently towards the temperature for adjusting circulation, until
The temperature of first Hygrothermograph 4 display is stable and is 20 DEG C, realizes environment temperature simulation.
4. pass sequentially through high pure nitrogen container 21, third intake valve 20, the 4th valve 23 feeds 0.9 greatly to metal cap 6
Air pressure monitors pressure by diaphragm gauge 2.After pressure environment reaches 0.9 atmospheric pressure, third intake valve 20 is closed.
5. heating water container 16 using heater 17,100 DEG C are reached, opens the second intake valve 14, third successively
Valve 13, and ensure that the 4th valve 23 is opened, so that vapor is entered metal cap 6, after reaching required humidity and reaching 10%, slightly
Adjusting the 4th valve 23 makes vapor ingress rate decline, until 4 humidity display 30% of the first Hygrothermograph, closes the second air inlet
Valve 14, third valve 13.
6. in simulation process, when pressure is higher than 0.9 atmospheric pressure, being carried out by vacuum pump assembly 19, the 4th valve 23
Pumpdown, when pressure be less than 0.9 atmospheric pressure when, by high pure nitrogen container 21, third intake valve 20, the 4th valve 23 into
Row ftercompction, makes environmental pressure meet the requirements.Coordinate the second intake valve 14, third valve 13, vapor supplemented into metal cap 6,
Realize the fine tuning of humidity so that pressure keeps 0.9 atmospheric pressure, temperature to keep 20 DEG C, humidity holding 30%.
7. observing the first Hygrothermograph 4, pressure decrease speed is 100Pa/h in metal cap 6, and fall is very fast, at this time
Vacuum tank 9, which is adjusted, by opening the second valve 12 makes itself and environmental pressure, ambient humidity one (in gas piping) in metal cap 6
It causes, closes the second valve 12 at this time, open the first intake valve 7, metal cap 6 is made to be connected to vacuum tank 9.The pressure range of decrease drops after connection
To 20Pa/h, play the role of stable vacuum equipment external environment.
Illustrative description has been done to the utility model above, it should explanation, in the core for not departing from the utility model
In the case of the heart, it is any it is simple deformation, modification or other skilled in the art can not spend creative work etc.
The scope of protection of the utility model is each fallen with replacing.
Claims (11)
1. a kind of vacuum equipment external environment simulator, it is characterised in that：It include the gold for placing the vacuum equipment
Belong to cover, vacuum tank, steam evaporator, dry air generator and vacuum pump assembly, the first film is provided on metal cap
Pressure gauge and the first Hygrothermograph, metal cap are connected to circulation, and metal cap is connected by pipeline with vacuum tank, metal
Cover is connected to by pipeline with steam evaporator, and metal cap is connected to by pipeline with vacuum pump assembly.
2. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：In the metal cap
Surface is provided with the first observation window.
3. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：In the metal cap
The first intake valve is provided on the pipeline being connected to vacuum tank.
4. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：The dry air
Generator includes high pure nitrogen container and third intake valve, and the nitrogen gas purity in high pure nitrogen container is more than 99.9%.
5. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：In the metal cap
The second intake valve is provided on the pipeline being connected to steam evaporator.
6. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：The vapor hair
Raw device includes water-level gauge, water container, heater and drain valve, and heater is set to the bottom of water container, water container
Side is provided with water-level gauge, and drain valve is provided on the discharge pipe line of water container.
7. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：The vacuum tank table
Face is provided with the second observation window.
8. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：On the vacuum tank
Second diaphragm gauge and the second Hygrothermograph, the range of the second diaphragm gauge are 1000torr, precision 0.5%, second
The temperature range of Hygrothermograph be -20 DEG C~100 DEG C, precision be ± 0.5 DEG C, humidity range be 0~100%RH, precision be ±
3%RH.
9. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：The first film
The range of pressure gauge is 1000torr, precision 0.5%.
10. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：First temperature
The temperature range of hygrometer is -20 DEG C~100 DEG C, and precision is ± 0.5 DEG C, and humidity range is 0~100%RH, and precision is ± 3%
RH。
11. a kind of vacuum equipment external environment simulator according to claim 1, it is characterised in that：The vacuum pump
The end vacuum of unit is better than 0.1Pa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820358860.6U CN207850721U (en) | 2018-03-15 | 2018-03-15 | A kind of vacuum equipment external environment simulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820358860.6U CN207850721U (en) | 2018-03-15 | 2018-03-15 | A kind of vacuum equipment external environment simulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207850721U true CN207850721U (en) | 2018-09-11 |
Family
ID=63424582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820358860.6U Expired - Fee Related CN207850721U (en) | 2018-03-15 | 2018-03-15 | A kind of vacuum equipment external environment simulator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207850721U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108254211A (en) * | 2018-03-15 | 2018-07-06 | 核工业理化工程研究院 | A kind of vacuum equipment external environment simulator and method |
-
2018
- 2018-03-15 CN CN201820358860.6U patent/CN207850721U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108254211A (en) * | 2018-03-15 | 2018-07-06 | 核工业理化工程研究院 | A kind of vacuum equipment external environment simulator and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180911 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |