CN207824206U - A kind of laser mark printing device based on frequency sweep OCT - Google Patents
A kind of laser mark printing device based on frequency sweep OCT Download PDFInfo
- Publication number
- CN207824206U CN207824206U CN201721739164.1U CN201721739164U CN207824206U CN 207824206 U CN207824206 U CN 207824206U CN 201721739164 U CN201721739164 U CN 201721739164U CN 207824206 U CN207824206 U CN 207824206U
- Authority
- CN
- China
- Prior art keywords
- marking
- laser
- frequency
- sweeping
- marking laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010408 sweeping Methods 0.000 claims abstract description 38
- 230000003287 optical effect Effects 0.000 claims abstract description 21
- 238000010330 laser marking Methods 0.000 claims abstract description 18
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
Abstract
本实用新型公开了一种基于扫频OCT的激光打标装置,包括:打标激光头、升降机构、打标工作台,所述升降机构与所述打标激光头连接,所述打标激光头内设有:打标激光系统,所述打标工作台位于所述打标激光头下方,所述打标激光头内还设有:扫频OCT系统,所述扫频OCT系统的样品臂与所述打标激光系统具有重合的光路。本装置利用在打标激光头内设置扫频OCT系统,并且扫频OCT系统的样品臂与打标激光系统具有重合的光路,不需要添加额外的光路空间,利用扫频OCT系统的特征减低了对工件平面反射能力的要求,该装置简单可靠,可广泛应用于激光打标作业。
The utility model discloses a laser marking device based on frequency-sweeping OCT, comprising: a marking laser head, a lifting mechanism, and a marking workbench, the lifting mechanism is connected with the marking laser head, and the marking laser The head is equipped with: a marking laser system, the marking workbench is located under the marking laser head, and the marking laser head is also equipped with: a frequency-sweeping OCT system, the sample arm of the frequency-sweeping OCT system It has a coincident optical path with the marking laser system. This device uses a frequency-sweeping OCT system installed in the marking laser head, and the sample arm of the frequency-sweeping OCT system and the marking laser system have a coincident optical path, without adding additional optical path space, and the characteristics of the frequency-sweeping OCT system reduce The device is simple and reliable, and can be widely used in laser marking operations.
Description
技术领域technical field
本发明创造涉及激光打标机技术领域,特别涉及一种基于扫频OCT的激光打标装置。The invention relates to the technical field of laser marking machines, in particular to a laser marking device based on frequency-sweeping OCT.
背景技术Background technique
激光打标是利用激光的高能量作用于工件表面,使工件表面达到瞬间气化,并按预定的轨迹,刻写出具有一定深度的文字、图案。现有的激光打标机一般采用红外线反射测距来确定焦点,将外加的红外线发射器与红外线接收器安装在激光打标头上,红外线发射器发射出的红外光在样品表面反射,红外线接收器接收反射回来的红外光信号,结合计算机数据处理,从而计算出激光打标头头与样品之间的距离。然后以激光焦点距离为标准,判断打标激光的焦点是否在样品表面上;若激光焦点不处于工件表面,利用升降系统调节激光打标头的高度,进行对焦。Laser marking is to use the high energy of the laser to act on the surface of the workpiece, so that the surface of the workpiece can be vaporized instantly, and the characters and patterns with a certain depth can be written according to the predetermined trajectory. Existing laser marking machines generally use infrared reflection distance measurement to determine the focal point. An additional infrared emitter and infrared receiver are installed on the laser marking head. The infrared light emitted by the infrared emitter is reflected on the surface of the sample, and the infrared receiver The infrared light signal reflected back by the detector is combined with computer data processing to calculate the distance between the laser marking head and the sample. Then use the laser focus distance as a standard to judge whether the focus of the marking laser is on the surface of the sample; if the laser focus is not on the surface of the workpiece, use the lifting system to adjust the height of the laser marking head to focus.
但是该装置需要样品拥有良好的平面反射表面才能精准控制系统对焦,否则对焦精度大幅下降。并且该装置在激光打标头外外加光路,添加额外的光路空间,如果工件挡住红外光就无法实现对焦,装置的局限性非常大。However, this device requires the sample to have a good planar reflective surface in order to accurately control the focus of the system, otherwise the focus accuracy will be greatly reduced. Moreover, the device adds an optical path outside the laser marking head to add additional optical path space. If the workpiece blocks the infrared light, the focus cannot be achieved, and the limitation of the device is very large.
实用新型内容Utility model content
本实用新型解决的技术问题是:现有的激光打标机存在对工件平面反射能力要求高和需要添加额外的光路空间。The technical problem solved by the utility model is: the existing laser marking machine has high requirements on the reflection ability of the workpiece plane and needs to add additional optical path space.
本实用新型解决其技术问题的解决方案是:一种基于扫频OCT的激光打标装置,包括:打标激光头、升降机构、打标工作台,所述升降机构与所述打标激光头连接,所述打标激光头内设有:打标激光系统,所述打标工作台位于所述打标激光头下方,所述打标激光头内还设有:扫频OCT系统,所述扫频OCT系统的样品臂与所述打标激光系统具有重合的光路。The solution of the utility model to solve the technical problem is: a laser marking device based on frequency-sweeping OCT, including: a marking laser head, a lifting mechanism, a marking workbench, the lifting mechanism and the marking laser head connection, the marking laser head is equipped with: a marking laser system, the marking workbench is located under the marking laser head, and the marking laser head is also equipped with: a frequency-sweeping OCT system, the The sample arm of the frequency-swept OCT system has a coincident optical path with the marking laser system.
进一步,所述打标激光系统包括:打标激光器、单向透镜、二维扫描振镜系统、平场透镜,所述打标激光器用于发出打标激光,所述打标激光依次通过单向透镜、二维扫描振镜系统、平场透镜,所述扫频OCT系统包括:计算机、点探测器、扫频激光器、分光镜,所述计算机分别与所述升降机构和所述点探测器电连,所述扫频激光器用于发出扫频激光,所述扫频激光通过分光镜分为两束激光,第一束激光透过所述分光镜到达所述参考镜并反射,再经所述分光镜反射进入所述点探测器,第二束激光依次通过所述单向透镜、二维扫描振镜系统、平场透镜。Further, the marking laser system includes: a marking laser, a one-way lens, a two-dimensional scanning galvanometer system, and a flat-field lens. The marking laser is used to emit marking laser, and the marking laser passes through the one-way lens, a two-dimensional scanning galvanometer system, and a flat-field lens. The frequency-sweeping OCT system includes: a computer, a point detector, a frequency-sweeping laser, and a beam splitter. The computer is electrically connected to the lifting mechanism and the point detector respectively. In addition, the frequency-sweeping laser is used to emit frequency-sweeping laser, and the frequency-sweeping laser is divided into two laser beams through the beam splitter. The beam splitter is reflected into the point detector, and the second laser beam passes through the one-way lens, the two-dimensional scanning galvanometer system, and the flat-field lens in sequence.
进一步,所述升降机构包括:滚珠丝杆、步进电机、升降臂,所述步进电机的驱动端与所述滚珠丝杆连接,所述滚珠丝杆与所述升降臂连接,所述升降臂与所述打标激光头连接。Further, the lifting mechanism includes: a ball screw, a stepping motor, and a lifting arm, the driving end of the stepping motor is connected to the ball screw, the ball screw is connected to the lifting arm, and the lifting arm The arm is connected with the marking laser head.
本实用新型的有益效果是:本装置利用在打标激光头内设置扫频OCT系统,并且扫频OCT系统的样品臂与打标激光系统具有重合的光路,不需要添加额外的光路空间,利用扫频OCT系统的特征减低了对工件平面反射能力的要求,该装置简单可靠,可广泛应用于激光打标作业。利用扫频OCT系统、计算机、升降机构对打标激光的焦点进行追踪,利用计算机、升降机构的结合使得打标激光的焦点一直落在工件平面上,确保在雕刻过程中,打标激光不会离焦。The beneficial effects of the utility model are: the device utilizes the frequency-sweeping OCT system set in the marking laser head, and the sample arm of the frequency-sweeping OCT system and the marking laser system have overlapping optical paths, and no additional optical path space needs to be added. The characteristics of the frequency-sweeping OCT system reduce the requirement for the reflection ability of the workpiece plane. The device is simple and reliable, and can be widely used in laser marking operations. The focus of the marking laser is tracked by the frequency-sweeping OCT system, computer, and lifting mechanism. The combination of the computer and the lifting mechanism makes the focus of the marking laser always fall on the workpiece plane, ensuring that the marking laser will not out of focus.
附图说明Description of drawings
为了更清楚地说明本实用新型实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单说明。显然,所描述的附图只是本实用新型的一部分实施例,而不是全部实施例,本领域的技术人员在不付出创造性劳动的前提下,还可以根据这些附图获得其他设计方案和附图。In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following will briefly describe the accompanying drawings that are used in the description of the embodiments. Apparently, the drawings described are only some embodiments of the utility model, not all embodiments, and those skilled in the art can also obtain other designs and drawings according to these drawings without creative work.
图1是本发明创造装置的结构示意图。Fig. 1 is a structural schematic diagram of the inventive device.
具体实施方式Detailed ways
以下将结合实施例和附图对本实用新型的构思、具体结构及产生的技术效果进行清楚、完整地描述,以充分地理解本实用新型的目的、特征和效果。显然,所描述的实施例只是本实用新型的一部分实施例,而不是全部实施例,基于本实用新型的实施例,本领域的技术人员在不付出创造性劳动的前提下所获得的其他实施例,均属于本实用新型保护的范围。另外,文中所提到的所有联接/连接关系,并非单指构件直接相接,而是指可根据具体实施情况,通过添加或减少联接辅件,来组成更优的联接结构。本发明创造中的各个技术特征,在不互相矛盾冲突的前提下可以交互组合。The idea, specific structure and technical effects of the present utility model will be clearly and completely described below in conjunction with the embodiments and accompanying drawings, so as to fully understand the purpose, characteristics and effects of the present utility model. Apparently, the described embodiments are only some of the embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, other embodiments obtained by those skilled in the art without paying creative efforts, All belong to the protection scope of the utility model. In addition, all the connection/connection relationships mentioned in this article do not refer to the direct connection of components, but mean that a better connection structure can be formed by adding or reducing connection accessories according to specific implementation conditions. The various technical features in the invention can be combined interactively on the premise of not conflicting with each other.
实施例1,参考图1,一种基于扫频OCT的激光打标装置,包括:打标激光头14、升降机构、打标工作台7,所述升降机构与所述打标激光头14连接,所述打标激光头14内设有:打标激光系统、扫频OCT系统,所述打标工作台7位于所述打标激光头14下方。所述打标激光系统包括:打标激光器2、单向透镜4、二维扫描振镜系统5、平场透镜6。所述扫频OCT系统包括:计算机11、点探测器10、扫频激光器1、分光镜9,所述计算机11分别与所述升降机构和所述点探测器10电连。Embodiment 1, referring to FIG. 1, a laser marking device based on frequency-sweeping OCT, including: a marking laser head 14, a lifting mechanism, and a marking workbench 7, and the lifting mechanism is connected to the marking laser head 14 , the marking laser head 14 is equipped with: a marking laser system and a frequency-sweeping OCT system, and the marking workbench 7 is located below the marking laser head 14 . The marking laser system includes: a marking laser 2 , a one-way lens 4 , a two-dimensional scanning galvanometer system 5 , and a flat-field lens 6 . The frequency-sweeping OCT system includes: a computer 11, a point detector 10, a frequency-sweeping laser 1, and a beam splitter 9. The computer 11 is electrically connected to the lifting mechanism and the point detector 10, respectively.
该装置工作时,将工件放置在所述打标工作台7上,所述打标激光器2发出打标激光,所述打标激光依次通过单向透镜4、二维扫描振镜系统5、平场透镜6,照射到工件上。所述扫频激光器1发出扫频激光,所述扫频激光在分光镜9上分成两束光,第一束光透过分光镜9并到达参考镜8,所述参考镜8将该束光反射回分光镜9,并经过所述分光镜9再次反射到点探测器10中。可知,分光镜9、参考镜8之间的光路形成了扫频OCT系统的参考臂,为了满足光程需求,所述分光镜9与所述参考镜8之间可设有光路模块(未画出)。第二束光在分光镜9表面反射,经所述单向透视镜4反射进入二维扫描振镜系统5,然后进入平场透镜6和打标工作台7,在打标工作台7上的工件表面反射,反射光原路返回到所述分光镜9,并透过所述分光镜9进入所述点探测器10。可知,所述单向透视镜4、二维扫描振镜系统5、平场透镜6、打标工作台7之间的光路形成了扫频OCT系统的样品臂。When the device works, the workpiece is placed on the marking table 7, the marking laser 2 emits a marking laser, and the marking laser passes through the one-way lens 4, the two-dimensional scanning galvanometer system 5, the flat The field lens 6 illuminates the workpiece. The frequency-sweeping laser 1 emits a frequency-sweeping laser, and the frequency-sweeping laser is divided into two beams of light on the beam splitter 9, the first beam of light passes through the beam splitter 9 and reaches the reference mirror 8, and the reference mirror 8 divides the beam of light It is reflected back to the beam splitter 9 and through said beam splitter 9 again into the point detector 10 . It can be seen that the optical path between the beam splitter 9 and the reference mirror 8 forms the reference arm of the frequency-swept OCT system. In order to meet the optical distance requirements, an optical path module (not shown) can be provided between the beam splitter 9 and the reference mirror 8 out). The second beam of light is reflected on the surface of the beam splitter 9, and enters the two-dimensional scanning vibrating mirror system 5 through the reflection of the one-way mirror 4, and then enters the flat-field lens 6 and the marking workbench 7, and the light on the marking workbench 7 The surface of the workpiece is reflected, and the reflected light returns to the beam splitter 9 through the original path, and enters the point detector 10 through the beam splitter 9 . It can be seen that the optical path between the one-way mirror 4, the two-dimensional scanning galvanometer system 5, the flat-field lens 6, and the marking table 7 forms the sample arm of the frequency-sweeping OCT system.
两束进入点探测器10的光形成干涉信号。所述计算机11从点探测器10接收到所述干涉信号,计算出参考臂与样品臂存在的光程差,若存在光程差,表示打标激光焦点不在打标平面上;如果不存在光程差,则表示打标激光焦点位于打标平面上。根据是否存在光程差,所述计算机11控制升降机构上的步进电机12旋转,进而带动滚珠丝杆13旋转,使升降臂15升降,改变打标激光头14的高度,最终调节打标激光头14与打标工作台7上工件之间距离,使参考臂与样品臂的光程相等,使得打标激光的焦点位于工件的表面上,确保不离焦。The two beams of light entering the point detector 10 form an interference signal. The computer 11 receives the interference signal from the point detector 10, and calculates the optical path difference between the reference arm and the sample arm. If there is an optical path difference, it means that the focus of the marking laser is not on the marking plane; If the distance difference is small, it means that the focus of the marking laser is on the marking plane. According to whether there is an optical path difference, the computer 11 controls the stepping motor 12 on the lifting mechanism to rotate, and then drives the ball screw 13 to rotate, so that the lifting arm 15 rises and falls, changes the height of the marking laser head 14, and finally adjusts the marking laser The distance between the head 14 and the workpiece on the marking table 7 is such that the optical paths of the reference arm and the sample arm are equal, so that the focus of the marking laser is located on the surface of the workpiece to ensure that it does not go out of focus.
在该装置中:所述单向透视镜4、二维扫描振镜系统5、平场透镜6、打标工作台7之间的光路均为打标激光系统的系统光路和扫频OCT系统的样品臂,因此该装置不需要增加额外的光路空间,结构简单。同时,在激光打标的过程中扫频OCT系统与计算机11处于工作状态,实时调节打标激光头14高度,实现激光焦点的实时追踪。In this device: the optical path between the one-way perspective mirror 4, the two-dimensional scanning galvanometer system 5, the flat-field lens 6, and the marking workbench 7 is the system optical path of the marking laser system and the frequency-sweeping OCT system. The sample arm, so the device does not need to add additional space for the optical path, and the structure is simple. At the same time, during the laser marking process, the frequency-sweeping OCT system and the computer 11 are in working condition, and the height of the marking laser head 14 is adjusted in real time to realize real-time tracking of the laser focus.
以上对本实用新型的较佳实施方式进行了具体说明,但本发明创造并不限于所述实施例,熟悉本领域的技术人员在不违背本实用新型精神的前提下还可做出种种的等同变型或替换,这些等同的变型或替换均包含在本申请权利要求所限定的范围内。The preferred embodiments of the present utility model have been specifically described above, but the present invention is not limited to the described embodiments, and those skilled in the art can also make various equivalent modifications without violating the spirit of the present utility model Or replacement, these equivalent modifications or replacements are all included in the scope defined by the claims of the present application.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201721739164.1U CN207824206U (en) | 2017-12-12 | 2017-12-12 | A kind of laser mark printing device based on frequency sweep OCT |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201721739164.1U CN207824206U (en) | 2017-12-12 | 2017-12-12 | A kind of laser mark printing device based on frequency sweep OCT |
Publications (1)
Publication Number | Publication Date |
---|---|
CN207824206U true CN207824206U (en) | 2018-09-07 |
Family
ID=63386136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201721739164.1U Expired - Fee Related CN207824206U (en) | 2017-12-12 | 2017-12-12 | A kind of laser mark printing device based on frequency sweep OCT |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN207824206U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107931850A (en) * | 2017-12-12 | 2018-04-20 | 佛山科学技术学院 | A kind of laser mark printing device based on frequency sweep OCT |
-
2017
- 2017-12-12 CN CN201721739164.1U patent/CN207824206U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107931850A (en) * | 2017-12-12 | 2018-04-20 | 佛山科学技术学院 | A kind of laser mark printing device based on frequency sweep OCT |
CN107931850B (en) * | 2017-12-12 | 2024-03-26 | 佛山科学技术学院 | Laser marking device based on sweep OCT |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN208358035U (en) | A kind of laser marking machine of auto-focusing | |
TW436356B (en) | Method and arrangement for the calibration of a laser processing machine for the process of the workpieces | |
CN103913294B (en) | A kind of cross curve increment scaling method for laser galvanometer system | |
CN107931850A (en) | A kind of laser mark printing device based on frequency sweep OCT | |
CN205989122U (en) | A kind of 3D dynamic focusing laser marking machine | |
US11955454B2 (en) | Wafer bonding apparatus and method | |
US20230135060A1 (en) | Method and apparatus for wafer bonding | |
CN107702664A (en) | A kind of reflective system for detecting verticality and method based on semiconductor laser alignment | |
CN107953037A (en) | A kind of high-precision laser three dimensional sculpture device and method based on frequency sweep OCT | |
CN207787974U (en) | A kind of laser processing and focus fixing device based on CCD imagings | |
CN207824206U (en) | A kind of laser mark printing device based on frequency sweep OCT | |
TW201929117A (en) | Laser engraving device | |
CN105717499B (en) | Laser range finder deflects angular measurement and correction system and method | |
CN209969856U (en) | Novel laser unsealing machine | |
CN216900911U (en) | Laser receiving and transmitting different-side device, laser receiving and transmitting module and laser radar | |
CN103792070A (en) | Semiconductor laser array optical characteristic detection device | |
WO2020107336A1 (en) | Welding trajectory tracking method, method and system | |
WO2018201566A1 (en) | Laser detection device, and application method thereof | |
US20210008663A1 (en) | Laser marking system and method for laser marking a workpiece | |
CN203460554U (en) | High-power laser marking machine capable of focusing rapidly | |
CN203198410U (en) | Laser mark device | |
CN107243702B (en) | A precise laser-assisted focusing device based on micro-textured tool preparation | |
CN108655596A (en) | A kind of laser-beam welding machine offset galvanometer coordinate positioning | |
JP7517595B2 (en) | Distance measuring device, control method for distance measuring device, and distance measuring system | |
CN210587635U (en) | A laser-assisted focusing system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180907 Termination date: 20201212 |