CN207816294U - With the sensor pressed with ultrasound functions - Google Patents
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- CN207816294U CN207816294U CN201820070970.2U CN201820070970U CN207816294U CN 207816294 U CN207816294 U CN 207816294U CN 201820070970 U CN201820070970 U CN 201820070970U CN 207816294 U CN207816294 U CN 207816294U
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Abstract
The utility model discloses it is a kind of have press sensor with ultrasound functions, including substrate and form ultrasonic detecting unit on substrate and press detection unit；Ultrasonic detecting unit includes the first ultrasound detection electrode layer of the lower surface for being formed in substrate and is sequentially formed at the first elastic membrane and the second ultrasound detection electrode layer of the upper surface of substrate；It presses detection unit includes the lower surface for being formed in substrate first and presses detecting electrode layer and be sequentially formed at the second elastic membrane of the upper surface of substrate and second and press detecting electrode layer；Further include contact layer, contact layer with press that detection unit is corresponding, and be formed in second and press the side that detecting electrode layer deviates from substrate, contact layer includes contact projection, and contact projection presses detecting electrode layer towards second.When there is external force to act on the sensor, external force preferably can be transferred to the second elastic membrane by contact projection, so that the second elastic membrane generates the deformation of bigger, and then promote the sensitivity of sensor.
Description
Technical field
The utility model is related to sensor technical fields, and in particular to a kind of to have the sensor pressed with ultrasound functions.
Background technology
The most popular method that the mankind check body surface and accessible tissue is palpation.Utilize array of pressure sensors
Simulation is arranged in the corpusculum tactus in human skin and carries out bionical palpation, you can realization carries out examination inspection to the exception of tissue to be checked
The process of survey.
The static characteristics such as long-term reliability, temperature and humidity stability, repeatability, the null offset of pressure sensor, sensor
The mechanical property of thickness and its force-sensitive material is all an important factor for influencing pressure sensor performance.Detect elastic pressure point
Cloth just needs the array that identical single pressure sensor is constituted to complete, and the homogenieity and sensor of each pressure sensor
The factors such as the homogeneity of spacing, the laminate structures preload of array can all influence the application effect of array of pressure sensors.For waiting for
Examine the difference of the shape and elasticity modulus of object, it is also necessary to handling flexibly be carried out to array of pressure sensors, and to realize pressure and pass
The flexibility of sensor array, the laminate structures preload of the homogenieity of each pressure sensor, the homogeneity of sensor spacing, array
Etc. factors on conventional flex array of pressure sensors embody the problem of it is very much.
Based on MEMS (MEMS, Micro-Electro-Mechanical System) technique, it is thus proposed that
CMUT (Capacitive micro-machined ultrasound transducer/ capacitance type micromachined ultrasonic transducers).
Mems thin film is prepared using micro fabrication, the transmitting and reception of ultrasonic wave are realized using meagre vibration of membrane and oar song.With
Conventional ultrasound probe is compared, and CMUT eliminates necessary matching layer and backing in structure, is more suitable for array；Functionally
Improve more flexible frequency bandwidth, FREQUENCY CONTROL, sensitivity higher, the power higher of transmitting.
But in actual clinical work, for the lesion of accessible tissue, it is most convenient and effective method to carry out palpation.Profit
With ultrasound to accessible lesion tissue, especially entity tumor, being detected can occur that susceptibility is bad, local ultrasound heat production
Problem.The lesion that pair can touch tissue diagnoses, and ideal method is first to carry out palpation, waits laying one's hand on and lump and need
When further appreciating that the information such as its capsule, real property or depth within the organization, then combined echocardiography is detected, and can be obtained more
Diagnostic message.Once it is determined that the information such as hardness, size, shape, depth of lump in tissue, then be focused ultrasound in time and control
It treats, can more efficiently solve effects of clinic diagnosis.
Therefore, how to design a kind of more delicately sensor becomes this field technical problem urgently to be resolved hurrily.
Utility model content
The utility model aims to solve at least one of the technical problems existing in the prior art, it is proposed that one kind, which has, to be pressed
With the sensor of ultrasound functions.
To achieve the goals above, the utility model provides a kind of sensor for having and pressing with ultrasound functions, described
Sensor includes substrate and forms ultrasonic detecting unit over the substrate and press detection unit；
The ultrasonic detecting unit include the lower surface for being formed in the substrate the first ultrasound detection electrode layer and according to
First elastic membrane of the secondary upper surface for being formed in the substrate and the second ultrasound detection electrode layer；
It is described press detection unit includes the lower surface for being formed in the substrate first press detecting electrode layer and according to
Second elastic membrane of the secondary upper surface for being formed in the substrate and second presses detecting electrode layer；
The sensor further includes contact layer, and the contact layer is corresponding with the detection unit that presses, and is formed in institute
It states second and presses the side that detecting electrode layer deviates from the substrate, the contact layer includes contact projection, the contact projection court
Detecting electrode layer is pressed to described second.
Preferably, the upper surface of the substrate be also formed with the first cavity corresponding with the ultrasonic detecting unit and
Corresponding second cavity of detection unit is pressed with described；
First elastic membrane is covered on first cavity, and second elastic membrane is covered in second cavity
On；
The contact projection is corresponding with second cavity, and the contact projection can be along the shape of second elastic membrane
It changes direction movement, so that second elastic membrane is concaved towards on the inside of second cavity or removed on the inside of second cavity.
Preferably, multiple first through hole through its thickness, the first through hole are additionally provided in second elastic membrane
Orthographic projection in second cavity is at least partly fallen in second cavity.
Preferably, described second multiple second through-holes that its thickness is provided through in detecting electrode layer, Mei Gesuo are pressed
It states the second through-hole and corresponds to a first through hole.
Preferably, any one in the circular in cross-section, ellipse and rectangle of the first through hole；And/or
Any one in the circular in cross-section of second through-hole, ellipse and rectangle.
Preferably, the sensor include it is multiple it is described press detection unit, the multiple detection unit that presses is in array
Arrangement；And/or
The sensor includes multiple ultrasonic detecting units, and multiple ultrasonic detecting units are arranged in array.
Preferably, first elastic membrane and second elastic membrane are integrally formed, the second ultrasound detection electrode layer
It is integrally formed that detecting electrode layer is pressed with described second.
Preferably, the sensor further includes insulating layer and focus layer；
The insulating layer be located at the second ultrasound detection electrode layer and described second press detecting electrode layer deviate from institute
State the side of substrate；
The focus layer is corresponding with the ultrasonic detecting unit, and the focus layer is formed in deviating from for the insulating layer
The side of the substrate.
Preferably, the contact projection is in cylindrical structure.
Preferably, the height of the contact projection is 80~120 μm, a diameter of 80~120 μm of the contact projection.
Preferably, the making material of the contact layer includes silica gel, first elastic membrane and/or second elastic membrane
For the composite membrane of silicon, silicon nitride and silica.
Having for the utility model presses sensor with ultrasound functions, to ultrasonic detecting unit and described can press inspection
The two electrode layers realization surveyed in unit controls respectively, in this way, can make sensor according to actual needs, shows ultrasonic work(
It can or press detection function.Therefore, the sensor of the structure can be used for detecting and treat the exception of accessible tissue, passes through
Hardness, size, shape of interior tumour of abnormal structure etc. can be determined by pressing detection unit, later by ultrasonic detecting unit,
The problems such as judging the global shape of tumour depth within the organization, the capsule of tumour or entity property, tumour.In addition, the sensing
Device further includes and presses the contact layer corresponding to detection unit, and the contact layer includes contact projection, the contact projection direction
Described second presses detecting electrode layer.Therefore, when there is external force to act on the sensor, contact projection can preferably will be outer
Power is transferred to the second elastic membrane, so that the second elastic membrane generates the deformation of bigger, and then promotes the sensitive of sensor
Degree.Meanwhile the sensor of the structure, there is no the complexities and difficulty that increase production, have good exploitativeness.
Description of the drawings
Attached drawing is to be used to provide a further understanding of the present invention, an and part for constitution instruction, and following
Specific implementation mode be used to explain the utility model together, but do not constitute limitations of the present invention.In the accompanying drawings：
Fig. 1 is the structural schematic diagram of sensor in the utility model first embodiment；
Fig. 2 is the partial schematic diagram of sensor in the utility model second embodiment；
Fig. 3 is the partial sectional view of sensor in the utility model 3rd embodiment；
Fig. 4 is the structural schematic diagram of power sensitivity test device in the utility model 3rd embodiment；
Fig. 5 is the capacitance change and application pressure that sensor presses in detection unit in the utility model fourth embodiment
Graph of relation.
Reference sign
100：Sensor；
110：Substrate；
111：First cavity；
112：Second cavity；
120：Ultrasonic detecting unit；
121：First ultrasound detection electrode layer；
122：First elastic membrane；
123：Second ultrasound detection electrode layer；
130：Press detection unit；
131：First presses detecting electrode；
132：Second elastic membrane；
133：Second presses detecting electrode；
140：Contact layer；
141：Contact projection；
150：Insulating layer；
160：Focus layer；
200：Human skin；
300：Power sensitivity test device；
310：Pressure adjustment knob；
320：Pressure test workbench；
330：Press ball；
340：Local terminal.
Specific implementation mode
Specific embodiment of the present utility model is described in detail below in conjunction with attached drawing.It should be understood that herein
Described specific implementation mode is only used for describing and explaining the present invention, and is not intended to limit the utility model.
With reference to figure 1, the utility model is related to it is a kind of have press and the sensor of ultrasound functions 100, the sensor 100
Including substrate 110 and the ultrasonic detecting unit being formed on the substrate 110 120 and press detection unit 130.
Above-mentioned ultrasonic detecting unit 120 includes the first ultrasound detection electrode layer of the lower surface for being formed in the substrate 110
121 and be sequentially formed at the substrate 110 upper surface the first elastic membrane 122 and the second ultrasound detection electrode layer 123.
The above-mentioned detection unit 130 that presses includes being formed in the lower surface of the substrate 110 first to press detecting electrode layer
It 131 and is sequentially formed at the second elastic membrane 132 and second of upper surface of the substrate 110 and presses detecting electrode layer 133.
Wherein, the sensor 100 further includes contact layer 140, and the contact layer 140 presses detection unit 130 with described
It is corresponding, and be formed in described second and press the side that detecting electrode layer 133 deviates from the substrate 110, the contact layer 140 wraps
Contact projection 141 is included, the contact projection 141 presses detecting electrode layer 133 towards described second.
In the sensor 100 of the practical application structure, to ultrasonic detecting unit 120 and described detection unit can be pressed
Two electrode layers realization in 130 controls respectively, in this way, can make sensor 100 according to actual needs, shows ultrasonic work(
It can or press detection function.Therefore, the sensor 100 of the structure, can be used for detecting and treat the exception of accessible tissue, lead to
It crosses and presses detection unit 130 and can determine hardness, size, shape of interior tumour of abnormal structure etc., pass through ultrasound detection later
Unit 120, the problems such as judging the global shape of tumour depth within the organization, the capsule of tumour or entity property, tumour.
Specifically, when the abnormal structure to human body carries out pressing detection, tissue, which acts on, presses detection unit 130
The region at place, that is to say, that tissue acts on second and presses the top of detecting electrode 133 (it should be understood that second
Press detecting electrode 133 should between tissue mutually insulated).In this way, when the second elastic membrane 132 is by ambient pressure
When under effect, deformation is will produce, so as to influence to press detecting electrode 131 by first, the second elastic membrane 132 and second presses
Detecting electrode 133 is formed by the size of the capacitance of capacitance harden structure.Therefore, exception group can be determined by the capacitance variable
The lesion situation knitted, for example, the hardness of interior tumour, size, shape etc..
Specifically, when the abnormal structure to human body carries out ultrasound detection, tissue acts on ultrasonic detecting unit 120
The region at place, that is to say, that tissue acts on the top of the second ultrasound detection electrode 123 (it should be understood that second
Ultrasound detection electrode 123 should between tissue mutually insulated).The ultrasonic detecting unit 120 is for emitting and receiving super
Acoustical signal determines the lesion situation of abnormal structure according to the variation of ultrasonic signal, for example, depth, the tumour of tumour within the organization
Capsule or entity property, tumour global shape the problems such as.
In addition, due in the sensor 100 of the present embodiment structure, further includes and press corresponding to detection unit 130
Contact layer 140, and the contact layer 140 includes contact projection 141, and the contact projection 141 presses detection towards described second
Electrode layer 133.Therefore, when there is external force to act on the sensor 100, contact projection 141 can preferably transmit external force
To the second elastic membrane 132, so that the second elastic membrane 132 generates the deformation of bigger, and then the spirit of sensor 100 is promoted
Sensitivity.Meanwhile the sensor 100 of the structure, there is no the complexities and difficulty that increase production, have good implement
Property.
It is substituted it should be noted that ripe piezoelectric supersonic detection unit also can be used in above-mentioned ultrasonic detecting unit.
Preferably, as shown in Figure 1, the upper surface of the substrate 110 is also formed with the ultrasonic detecting unit 120 relatively
The first cavity 111 for answering and press corresponding second cavity of detection unit 130 112 with described.
Wherein, first elastic membrane 122 is covered on first cavity 111, and second elastic membrane 132 is covered in
On second cavity 112.
Above-mentioned contact projection 141 is corresponding with second cavity 112, and the contact projection 141 can be along described second
The deformation direction of elastic membrane 132 is moved, so that second elastic membrane 132 concaves towards second cavity, 112 inside or from institute
112 inside of the second cavity is stated to remove.
Specifically, the mode of vacuum bonding may be used in above-mentioned second elastic membrane 132 and the second cavity 112 is partially attached to
One.In this way, when bonding finishes, the second cavity 112 is in vacuum state, so cause the second elastic membrane 132 to second
112 direction of cavity is recessed, and leads to the sensitivity decrease of sensor 100, still, since the sensor 100 of the present embodiment structure is gone back
It is provided with above-mentioned contact projection 141, the contact projection 141 is corresponding with second cavity 112, the contact projection 141
It can be moved along the deformation direction of second elastic membrane 132, so that second elastic membrane 132 concaves towards second cavity
112 insides are removed from second cavity, 112 inside.Therefore, when there is external force to act on the sensor 100, contact is convex
Play 141 preferably can be transferred to the second elastic membrane 132 by external force, so that the second elastic membrane 132 generates bigger
Deformation, and then promote the sensitivity of sensor 100.
For traditional pressure sensor, since traditional pressure sensor stress area includes substrate
On chamber portion and substrate on non-chamber portion, since substrate is generally silicon materials, because its design feature leads to elastic system
Number is larger, its deformation is small under the action of outer plus-pressure, that is, causes sensor that the external force of certain deformation occurs greatly
There to be the non-chamber portion of substrate to undertake, and greatly reduce the susceptibility of pressure sensor.But the sensor of the present embodiment structure
100,112 corresponding region of the second cavity is provided with the second elastic membrane 132, therefore, if external force all act on this second
132 top of elastic membrane, the deformation bigger of second elastic membrane 132 equally under outer force effect, therefore caused capacitance change
It is bigger, and then the sensitivity of sensor can be improved.
Preferably, as shown in figure 3, being additionally provided with multiple first through hole through its thickness in second elastic membrane 132
The orthographic projection of 132a, the first through hole 132a in second cavity 112 is at least partly fallen in second cavity 112
It is interior.That is, first through hole 132a's is at least partly interconnected with second cavity 112.
The sensor 100 of the present embodiment structure is provided with multiple through multiple the of its thickness in the second elastic membrane 132
One through-hole 132a, in this way, can be in the case where not reducing the area of capacitance of sensor 100 so that the second elastic membrane 132
Rigidity reduces, so as to further such that the sensitivity of sensor 100 increases.
The manufacture craft for forming above-mentioned multiple first through hole 132a can press detecting electrode layer 133 second to deposit
Before, shown through-hole 132a is formed in the second elastic membrane 132 using the technique of etching.Deposition second presses inspection on third backing
Electrode layer 133 is surveyed, then presses detecting electrode layer 133 in the second elastic membrane by complete second by the way of electrode transfer
It is formed on 132.
Preferably, as shown in figure 3, described second presses and be provided through multiple the of its thickness in detecting electrode layer 133
Two through-hole 133a, each second through-hole 133a correspond to a first through hole 132a.That is, each first through hole
132a corresponds to a second through-hole 133a.
Due at least partly falling in second cavity for orthographic projections of the first through hole 132a in second cavity 112
In 112.Therefore, first through hole 132a, the second through-hole 133a are interconnected with second cavity 112.
The sensor 100 of the present embodiment structure can make the second sky by first through hole 132a and the second through-hole 133a
Chamber 112 and extraneous unicom, eliminate the vacuum environment brought by bonding technology so that the second elastic membrane 132 is more preferable under natural conditions
Open and flat come.In addition, set first through hole 132a and the second through-hole 133a can make the second elastic membrane 132 certain
External force under preferably to 112 side of the second cavity move, and then make capacitance pole span change bigger.Secondly, first through hole 132a
With the second through-hole 133a on the periphery of the second cavity 112, in this way, under the effect of external force, the movement on periphery can be made small
In central area, and the electrode area occupied by first through hole 132a and the second through-hole 133a is smaller, therefore, this structure
Sensor 100 so that its sensitivity further increases.Finally, because there are the first through hole 132a and the second through-hole 133a,
Second, which presses detecting electrode layer 133, almost can integrally move to 112 side of the second cavity, as a result, 100 meeting of sensor
More there are the better linearity, testing result more accurate.
Preferably, in order to further increase the sensitivity of sensor 100, the cross section of the first through hole 132a can be in
Any one in round, ellipse and rectangle.Certainly, first through hole 132a can also be the pore structure of other shapes.Phase
The cross section of Ying Di, the second through-hole 133a can also be in rounded, oval and rectangle any one, certainly, this
Two through-hole 133a can also be the pore structure of other shapes.
Preferably, in order to further increase the sensitivity of sensor 100, above-mentioned multiple first through hole 132a can be second
It is uniformly distributed in elastic membrane 132, multiple second through-hole 133a can be pressed second and are uniformly distributed in detecting electrode layer 133.
When forming the first through hole 132a and the second through-hole 133a of above structure, detection electricity can be pressed forming second
After pole layer 133, presses to be formed in detecting electrode layer 133 and the second elastic membrane 132 second successively using the technique of etching and run through
Second presses the through-hole of detecting electrode layer 133 and the second elastic membrane 132 namely first through hole 132a and the second through-hole 133a.Or
Person forms first through hole using the technique of etching before second presses the deposition of detecting electrode layer 133 in the second elastic membrane 132
132a, then carries out the second deposition for pressing detecting electrode layer 133, and self-assembling formation second presses the second of detecting electrode layer 133
Through-hole 133a.
Preferably, as shown in Figure 1, the sensor 100 include it is multiple it is described press detection unit 130, it is the multiple to touch
Pressure detection unit 130 is arranged in array.
Preferably, as shown in Figure 1, the sensor 100 includes multiple ultrasonic detecting units 120, and it is multiple described
Ultrasonic detecting unit 120 is arranged in array.
The sensor 100 of the present embodiment structure, be provided be arranged in array press detection unit 130 and array arrangement
Ultrasonic detecting unit 120, further can effectively promote the sensitivity of sensor 100.
Preferably, as shown in Figure 1, first elastic membrane 122 and second elastic membrane 132 are integrally formed, described the
Two ultrasound detection electrode layers 123 and described second to press detecting electrode layer 133 integrally formed.
That is, as shown in Figure 1, the first elastic membrane 122 and 132 same layer of the second elastic membrane setting, and pass through a structure
Figure technique is formed.Second ultrasound detection electrode layer 123 and described second presses the setting of 133 same layer of detecting electrode layer, and passes through one
Secondary patterning processes are formed.In this way, the manufacture craft of entire sensor 100 can be simplified so that the structure of sensor 100 is more stepped up
It gathers, reduces the cost of manufacture of sensor 100.
Preferably, as shown in Figure 1, the sensor 100 further includes insulating layer 150, the insulating layer 150 is located at described the
Two ultrasound detection electrode layers 123 and described second press detecting electrode layer 133 away from the side of the substrate 110.
That is, as shown in Figure 1, insulating layer 150 is in a flood structure, which covers second ultrasound
Detecting electrode layer 123 and described second presses detecting electrode layer 133, in this way, can make sensor 100 and external insulation, from
And the application experience of the sensor 100 can be promoted.
Preferably, as shown in Figure 1, in order to further increase the accuracy for detecting abnormal structure of ultrasonic detecting unit 120,
The sensor 100 further includes focus layer 160, and the focus layer 160 is corresponding with the ultrasonic detecting unit 120, and described
Focus layer 160 be formed in the insulating layer 150 away from the side of the substrate 110.
Preferably, as shown in Figure 1, in order to further increase the sensitivity of sensor 100, the contact projection 141 is in circle
Rod structure.
Preferably, as shown in Figure 1, in order to further increase the sensitivity of sensor 100, the height of the contact projection 141
Degree is 80~120 μm, a diameter of 80~120 μm of the contact projection 141.
Preferably, in order to further increase the sensitivity of sensor 100, the making material of the contact layer 140 includes silicon
Glue, first elastic membrane 122 and/or second elastic membrane 132 are the composite membrane of silicon, silicon nitride and silica.
In addition, in the present embodiment, second elastic membrane 132 is the composite membrane of silicon, silicon nitride and silica, can be ensured
The spreading of second elastic membrane 132 when not applying pressure can correct its second elastic membrane caused by key vacuum with caused by
132 bend to 112 direction of the second cavity, so that the stress area for pressing detection unit 130 in array is more complete
Exposure.
Certainly, it in order to be further simplified the structure of sensor 100, is formed as shown in Fig. 2, deposition etch technique may be used
Graphical contact projection 141.It may be selected not cover any material and directly contact with human skin 200 thereon so that touch pressure
It is greatly transferred in the second elastic membrane 132 by 141 structure of contact projection, and then generates a greater degree of deformation and carry
The sensibility of high sensor 100.
In order to test test of the sensor 100 of the utility model to pressure sensibility, as shown in figure 4, it is power sensitivity
The structural schematic diagram of test device.The power sensitivity test device 300 includes pressure test workbench 320, is mounted on pressure test
Pressure adjustment knob 310 on workbench 320, the pressure ball 330 for pressing to sensor 100 and acquisition capacitance change
Local terminal 340.
When in use, sensor 100 can be placed on pressure test workbench 320, and is set relatively with pressure ball 330
It sets, adjusting pressure ball 330 by operating pressure adjusting knob 310 is applied to the pressure of sensor 100, and passes through local terminal
340 (personal PC) detect capacitance change.
Wherein, as shown in table 1 below between pressure applied and capacitance change：
| Apply pressure/N | 0.06 | 0.12 | 0.18 | 0.24 | 0.3 |
| Capacitance change/PF | 0.205 | 0.403 | 0.709 | 1.001 | 1.428 |
Table 1
As shown in figure 5, for the graph of relation of pressure applied and the capacitance change of sensor.It can by table 1 and Fig. 5
Know, the sensor 100 of the utility model, due to being provided with contact projection 141, the sensor 100 is acted on when there is external force
When upper, external force preferably can be transferred to the second elastic membrane 132 by contact projection 141, so that the second elastic membrane 132
The deformation of bigger is generated, and then promotes the sensitivity of sensor 100, accuracy in detection can be greatlyd improve.
It is understood that embodiment of above is merely to illustrate that the principles of the present invention and uses exemplary
Embodiment, however the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case of the spirit and essence of utility model, various changes and modifications can be made therein, these variations and modifications are also considered as this reality
With novel protection domain.
Claims (10)
1. a kind of having the sensor pressed with ultrasound functions, which is characterized in that the sensor includes substrate and is formed in
Ultrasonic detecting unit on the substrate and press detection unit；
The ultrasonic detecting unit includes the first ultrasound detection electrode layer and shape successively for the lower surface for being formed in the substrate
At the first elastic membrane and the second ultrasound detection electrode layer in the upper surface of the substrate；
It is described to press detection unit includes the lower surface for being formed in the substrate first and press detecting electrode layer and successively shape
Detecting electrode layer is pressed in the second elastic membrane of the upper surface of the substrate and second；
The sensor further includes contact layer, and the contact layer is corresponding with the detection unit that presses, and is formed in described
Two press the side that detecting electrode layer deviates from the substrate, and the contact layer includes contact projection, and the contact projection is towards institute
It states second and presses detecting electrode layer.
2. sensor according to claim 1, which is characterized in that the upper surface of the substrate is also formed with and the ultrasound
Corresponding first cavity of detection unit and press corresponding second cavity of detection unit with described；
First elastic membrane is covered on first cavity, and second elastic membrane is covered on second cavity；
The contact projection is corresponding with second cavity, and the contact projection can be along the deformation side of second elastic membrane
To movement, so that second elastic membrane is concaved towards on the inside of second cavity or is removed on the inside of second cavity.
3. sensor according to claim 2, which is characterized in that be additionally provided with through its thickness in second elastic membrane
Multiple first through hole, orthographic projection of the first through hole in second cavity at least partly fall in second cavity
It is interior.
4. sensor according to claim 3, which is characterized in that described second presses and be provided through in detecting electrode layer
Multiple second through-holes of its thickness, each second through-hole correspond to a first through hole.
5. sensor according to claim 4, which is characterized in that circular in cross-section, the ellipse of the first through hole
With any one in rectangle；And/or
Any one in the circular in cross-section of second through-hole, ellipse and rectangle.
6. sensor as claimed in any of claims 1 to 5, which is characterized in that the sensor includes multiple institutes
It states and presses detection unit, the multiple detection unit that presses is arranged in array；And/or
The sensor includes multiple ultrasonic detecting units, and multiple ultrasonic detecting units are arranged in array.
7. sensor as claimed in any of claims 1 to 5, which is characterized in that first elastic membrane and described
Second elastic membrane is integrally formed, the second ultrasound detection electrode layer and described second to press detecting electrode layer integrally formed.
8. sensor according to claim 7, which is characterized in that the sensor further includes insulating layer and focus layer；
The insulating layer be located at the second ultrasound detection electrode layer and described second press detecting electrode layer deviate from the lining
The side at bottom；
The focus layer is corresponding with the ultrasonic detecting unit, and the focus layer be formed in the insulating layer away from described
The side of substrate.
9. sensor as claimed in any of claims 1 to 5, which is characterized in that the contact projection is in cylinder knot
Structure.
10. sensor according to claim 9, which is characterized in that the height of the contact projection is 80~120 μm, institute
State contact projection a diameter of 80~120 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820070970.2U CN207816294U (en) | 2018-01-16 | 2018-01-16 | With the sensor pressed with ultrasound functions |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820070970.2U CN207816294U (en) | 2018-01-16 | 2018-01-16 | With the sensor pressed with ultrasound functions |
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| Publication Number | Publication Date |
|---|---|
| CN207816294U true CN207816294U (en) | 2018-09-04 |
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ID=63325993
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107957273A (en) * | 2018-01-16 | 2018-04-24 | 北京先通康桥医药科技有限公司 | With the sensor pressed with ultrasound functions |
| CN112556894A (en) * | 2020-11-24 | 2021-03-26 | 四川省机械技术服务中心 | MEMS depth force vector and position sensor |
-
2018
- 2018-01-16 CN CN201820070970.2U patent/CN207816294U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107957273A (en) * | 2018-01-16 | 2018-04-24 | 北京先通康桥医药科技有限公司 | With the sensor pressed with ultrasound functions |
| CN107957273B (en) * | 2018-01-16 | 2024-05-03 | 北京先通康桥医药科技有限公司 | Sensor with touch-press and ultrasonic functions |
| CN112556894A (en) * | 2020-11-24 | 2021-03-26 | 四川省机械技术服务中心 | MEMS depth force vector and position sensor |
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