CN207458906U - Donor handling device, donor element encapsulation sub-assembly and lining treatment system - Google Patents

Abstract

The utility model is related to a kind of donor handling device, donor element encapsulation sub-assembly and lining treatment systems.The donor handling device includes：Apparatus main body；Moveable arm extends to hold donor element on it from described device main body, and the donor element provides to be deposited on the material in target；And at least one of the following：Platform extends and adapted to house the donor element and measuring instrument when the donor element is not used from described device main body, is used to measure the distance between described device main body and the target.

Description

Donor handling device, donor element encapsulation sub-assembly and lining treatment system

Technical field

The utility model relates generally to the donor element for providing to be deposited on the material in target, and more clearly comes It says, is related to the packing forms of such donor element and the donor handling device suitable for being used together with the donor element.

Background technology

Various types of donor element encapsulation sub-assemblies and the device for carrying donor element known to fields.

Utility model content

The utility model presented below simplify general introduction in order to provide to the utility model donor handling device, for volume elements Part encapsulates the basic comprehension of sub-assembly and lining treatment system.

In one embodiment, a kind of donor handling device is disclosed.The donor handling device includes：Apparatus main body；It can Moving arm extends to hold donor element on it from described device main body, and the donor element provides to deposit In the material in target；And at least one of the following：Platform extends and adapted in institute from described device main body It states when donor element is not used and houses the donor element and measuring instrument, be used to measure described device main body and the mesh The distance between mark.

In another embodiment, a kind of donor element encapsulation sub-assembly is disclosed.The donor element encapsulation sub-assembly includes： Array holder is used to hold donor element array；At least one removable cap is used in the donor element array At least one donor element be not used when cover the donor element；And it by module, is operated to receive the battle array Row holder simultaneously cooperates therewith.

In another embodiment, a kind of lining treatment system is disclosed.The lining treatment system is included according to described above Donor handling device, the donor handling device is adapted to encapsulate sub-assembly to carry according to donor element described above.

Description of the drawings

From together with schema carry out it is described in detail below will be more fully understood and understand the utility model, wherein：

Fig. 1 is the donor element encapsulation sub-assembly and confession for constructing and operating with preferred embodiment according to the present utility model The simplified schematic explanation of the processing system of body handling device；

Fig. 2A and 2B is the type demonstrated in Figure 1 for constructing and operating for preferred embodiment according to the present utility model The corresponding top plan view explanation of simplified schematic and downside view explanation of donor handling device in processing system；

Fig. 3 A and 3B are the types demonstrated in Figure 1 for constructing and operating for preferred embodiment according to the present utility model The corresponding exploded view explanation of simplified schematic of donor element encapsulation sub-assembly in processing system and assembling figure explanation；

Fig. 3 C are the parts for the donor element encapsulation sub-assembly that type is shown in Fig. 3 A in partially assembled state Simplified schematic explanation；

Fig. 4 A, 4B and 4C are for institute's exhibition in another preferred embodiment construction according to the present utility model and Fig. 1 of operation Show the simplified schematic of the donor element encapsulation sub-assembly in the processing system of type accordingly unassembled figure explanation and first and the Two assembling figure explanations；

Fig. 5 A and 5B are the classes demonstrated in Figure 1 for another preferred embodiment construction according to the present utility model and operation The corresponding exploded view explanation of simplified schematic of donor element encapsulation sub-assembly in the processing system of type and assembling figure explanation；

Fig. 6 A, 6B and 6C are for institute according to the present utility model and another preferred embodiment construction and the Fig. 1 operated Show the simplified schematic of the donor element encapsulation sub-assembly in the processing system of type accordingly unassembled figure explanation and first and Second assembling figure explanation；

Fig. 7 A and 7B are constructed and operated demonstrated in Figure 1 for according to the present utility model and another preferred embodiment The simplified schematic of donor element encapsulation sub-assembly in the processing system of type accordingly unassembled figure explanation and assembling figure explanation；

Fig. 7 C are the orders that sub-assembly unloading donor element is encapsulated in the donor element that type is shown from Fig. 7 A and 7B Step simplifies explanation；And

Fig. 7 D be donor element is loaded into shown in Fig. 7 A to 7C type donor element encapsulation sub-assembly in it is suitable Sequence step simplifies explanation.

Specific embodiment

It is the donor element encapsulation for constructing and operating with preferred embodiment according to the present utility model referring now to Fig. 1 And the simplified schematic explanation of the processing system of donor handling device.

As seen in Figure 1, processing system 100 is provided, wherein processing system 100 is preferably operated to handle substrate, Such as (act non-limiting examples) glass, plastics or metal substrate.Processing system 100 preferably includes support chuck 102, excellent Selection of land has active vacuum area 104, it is necessary to which the substrate of processing can be fixed to by pull of vacuum on active vacuum area 104. The processing of substrate can include and material is printed onto on substrate.For the material that is printed onto on substrate preferably by including donor material Donor element provide.The special characteristic of the preferred embodiment of the utility model is：What such donor element can embody herein Diversified forms are packaged (as example) as the most clear annular donor element envelope seen at amplifier section 111 in fig. 1 Fill 106, linear donor component encapsulation 108 and vertical donor element encapsulation 110.Donor element encapsulation 106 to 110 can be positioned at branch On the Background Region 112 for supportting chuck 102, adjacent active regions domain 104.Hereafter, it will be provided with reference to figure 3A to 7D and be related to basis The preferred embodiment construction of the utility model and the donor element of operation encapsulate each of 106 to 110 preferred structure Further detail below.

It will be appreciated that although donor element encapsulation 106 to 110 is shown as being incorporated into processing system 100 and juxtaposition herein In in support chuck 102 therein, but in fact, all various donor elements encapsulation 106 to 110 not necessarily apply to list simultaneously In a processing system.In addition, donor element encapsulation 106 to 110 is not limited to apply in processing system 100, and can in addition or Alternatively apply to benefit from the other types of processing system for encapsulating donor element.

Another special characteristic of the preferred embodiment of the utility model is：Donor handling device 120 is preferably provided (attached Optimal finding at amplifier section 111 in Fig. 1) for carrying donor element, wherein donor element can be packaged in for volume elements In part encapsulation (such as donor element encapsulation 106 to 110).Donor handling device 120 can be by being bound in the processing head of door frame 132 130 accommodate, to be moveably positioned above the glass substrate held on active region 104.It will be appreciated, however, that by donor It is only exemplary that handling device 120, which is incorporated into processing first 130, and donor handling device 120 is alternatively embodied as individually Self-contained unit or be formed as in system element except processing first 130 in addition to component.

Processing first 130 preferably carries out being operable to move to the region 112 of chuck 102, so as in donor handling device 120 With the help of from donor element encapsulation any one of 106 to 110 collect donor elements.It is collected by donor handling device 120 After donor element, processing first 130 can be moved into the predetermined position compared with substrate, to promote material from for volume elements Part is printed onto on substrate.This printing can be by the implementation of one or more of various mechanism, it includes (but not limited to) by material from confession Volume elements part laser deposition, heating or sound wave are deposited on substrate.Processing first 130 can be moved along x, y compared with substrate and z-axis It is dynamic, so as to be positionable relative at any desired three-dimensional coordinate of substrate.During the substrate is managed at which in itself It is preferably held to be substantially static.

Collection and the donor element of the donor element carried out by donor handling device 120 are better understood with reference to figure 2A and 2B Holding at that.

It is for institute in preferred embodiment according to the present utility model construction and the Fig. 1 operated referring now to Fig. 2A and 2B Show the corresponding top plan view explanation of simplified schematic and downside view of the donor handling device in the processing system of type Explanation.

As seen in Fig. 2A and 2B, donor handling device 120 preferably includes apparatus main body 140, has from device master The moveable arm 142 that body 140 extends.Moveable arm 142 preferably includes terminal hand 144, adapted to hold on it Donor element, such as the most clear donor element 146 seen in fig. 2b.It will be appreciated that donor element 146 illustrated herein Particular configuration be only it is exemplary, and donor handling device 120 can it is easily adapted with with various shapes and size Donor element cooperates, and is described in detail as discussed further below.Donor element 146 can be raised and by true towards terminal hand 144 Suction power is fixed on terminal hand 144.This pull of vacuum is preferably generated by the vacuum pressure of terminal hand 144, described Vacuum pressure be attributable to through the inside pipe fitting (not showing) for being connected to moveable arm 142 air-flow or lead in other ways It crosses vacuum generator or vacuum pump generates.Alternatively, donor element can be mechanically held on terminal hand 144. After donor element 146 exhausts, donor element 146 can be disposed to terminal hand 144 by applying buffer brake, so as to cause Donor element 146 is popped up from terminal hand 144.

Moveable arm 142 can preferably move in a plurality of directions, so that donor element is promoted (such as to be served as a contrast compared with target Bottom) it is positioned at required position.Moveable arm 142 preferably has there are three translational motion axis, and wherein translational motion axis can be only Linear axes can be the combination of linear axes and rotation axis.Herein, as example, moveable arm 142 is preferably by θ axis electricity Motivation 150 moves on the θ directions such as indicated by first group of arrow 148；By z-axis motor 154 along such as by the second arrow The z-axis movement of 152 instructions；And it is moved by x-axis motor 158 along the x-axis such as indicated by the 3rd arrow 156.

It will be appreciated that θ, z and x-axis movement of moveable arm 142 are transported independently of x, y and z axis on head 130 mentioned above It is dynamic, and two x-axis that head 130 and moveable arm 120 are moved respectively along it can convert relative to each other.It answers further Solution, head 130 and the aggregate motion ability of moveable arm 142 allow when donor element 146 is immobilizated on moveable arm 142 Donor element 146 is made to be in any required three-dimensional coordinate compared with substrate.

Moveable arm 142 is preferably directly joined to θ axis motor 150, and wherein θ axis motor 150 is preferably located at On the forepart of apparatus main body 140.θ axis motor 150 is preferably connected to z-axis motor 154, whereby in addition moves z-axis Assign moveable arm 142.Z axis motor 154 is preferably located on the rear portion of apparatus main body 140.Z axis motor 154 is preferred Ground is further connected to x-axis motor 158, in addition moves x-axis assign moveable arm 142 whereby.X-axis motor 158 is excellent Selection of land is generally positioned with respect to θ axis motor 150, and the width of apparatus main body 140 is separately reached with θ axis motor 150.Therefore, It will be appreciated that θ, z and x-axis motor 150,154 and 158 are preferably connected in series with each other, so as to by θ, z and x-axis freedom of motion Assign moveable arm 142.

The terminal hand 144 of moveable arm 142 is preferably through moulding so as to compatible with the shape of donor element 146.At this Text, only as example, it can be seen that donor element 146 includes the square sliding part of the size with about 15mm × 15mm and warp pair The terminal hand 144 being sized with answering.It will be appreciated, however, that donor element 146 is not limited to planar square and can be configured to have There are many other shapes and surface topologies, and it includes circular, on-plane surface and nonlinear configurations.

Certain preferred embodiment according to the present utility model, moveable arm 142 includes more plane components 170, including most First elongated portion 172, the elongated portion are located in the first plane and are directly connected to the substrate 174 of θ axis motor 150, It is as most clear in seen in fig. 2b.Second short straight section 176 can be on the direction for be essentially perpendicular to elongated portion from elongate portion 172 are divided to expose.Second short straight section 176 can have chamfering upper surface 178, and that sees in fig. 2 is most clear.Part III 180 can Extended vertically from the second short straight section 176 and tapered compared with short straight section, Part III 180 be located at be substantially parallel to by In second plane of the first plane that the first elongated portion 172 defines.Part III 180 can include square end fragment 182, Frame 184 including defining inner cavity 186.It will be appreciated that square end fragment 182 includes the certain preferred embodiment of terminal hand 144.

Donor element 146 preferably includes the transparent element with the donor material layer being formed on its surface 190, such as Glass.Donor material can be for ink, metal or suitable for being deposited on any other material on substrate.Donor element 146 is preferably It is immobilizated on the bottom side 192 of terminal hand 144 so that the coated surface 190 of donor element 146 is away from terminal hand 144 Bottom side 192.Implement by laser deposition by material from the case of donor element 146 is printed onto on substrate, terminal hand 144 inner cavity 186, which is preferably adapted for use in, makes laser whereby laser be allowed to be irradiated to donor element 146 through its transmission Coated surface 190 on, so as to cause donor material from 146 laser deposition of donor element to target.Moveable arm 144 It is slightly shifted between each discrete step preferably in laser deposition, to ensure that laser is irradiated in shifted position Place, and on " new " donor material being therefore irradiated on coated surface 190.Moveable arm 144 preferably can be along z-axis 152 Vertical movement about 20mm；It is rotated by 360 ° along 156 transverse shift of x-axis about 40mm and on θ directions 148.

Apparatus main body 140, and therefore donor element 146 is preferably measured from the separation of target by measuring instrument 1100. The measuring instrument 1100 shown herein is presented as barometer 1100, though it will be appreciated that, alternately with allow directly progress or Export the other types of measuring instrument of range measurement.Barometer 1100 is preferably directly adjacent to the moveable arm in device 120 142 positioning.During by target of the donor material from 146 laser deposition of donor element to chuck 102, terminal hand 144 It is preferably retained on above target as by the distance in the range of 50 to 250 microns measured by barometer 1100.

When donor element 146 is not used, the terminal hand 144 of moveable arm 142 can be rested on through mobile from dress On the platform 1102 for putting the extension of main body 140.Platform 1102 is preferably adapted to house donor element 146 when unused, with Just prevent from making the donor material on coated surface 190 to deteriorate, such as ink donor material is made to be dried.Platform 1102 can include Sealing element 1104 prevents from exposing the donor material on coated surface 190 and therefore extends the service life of donor element 146.It is flat Platform 1102, so as to compatible with the shape of donor element 146, and herein shows platform 1102 only as example preferably through moulding To be square.

Certain preferred embodiment according to the present utility model, platform 1102 include general planar polygon table top 1105, It extends on the direction of extending direction for being substantially similar to moveable arm 142 from the substrate 1106 of apparatus main body 140.It is polygon Shape table top 1105 can include the first straight portion 1108 being connected with substrate 1106 and the second one-tenth angle part being connected with bar portion 1108 1110.Sealing element 1104 is preferably carried by the second one-tenth angle part 1110.It will be appreciated that platform 1102 described herein is specific Configuration and position are only that design exemplary and that donor handling device 120 can be depended on by those skilled in the art will It asks and easily changes.

It is for institute in preferred embodiment according to the present utility model construction and the Fig. 1 operated referring now to Fig. 3 A and 3B The corresponding exploded view explanation of simplified schematic and assembling figure for showing the encapsulation sub-assembly of the donor element in the processing system of type are said It is bright；And it is the donor element encapsulation sub-assembly that type is shown in Fig. 3 A in partially assembled state referring now to Fig. 3 C Partial rough schematic view.

As seen in Fig. 3 A to 3C, donor element encapsulation 300 is provided, is preferably substantially similar demonstrated in Figure 1 Annular donor element encapsulation 106 form.Donor element encapsulation 300 preferably includes to hold donor element array 304 Array holder 302.Array holder 302 can be embodied with various configurations, and array 304 is accordingly placed in wherein.At this Array holder 302 only as example, is shown as the ring-type element 306 of one circle donor element of carrying by text, each to supply volume elements Part is the type of substantially similar donor element 146.It is to be appreciated, however, that array holder 302 and array 304 alternately with A variety of other suitable form (it includes horizontal, linear and vertical in form, following articles to be illustrated with reference to figure 6A to 7D) bodies It is existing.

As most clear in seen in fig. 3 c, ring-type element 306 preferably includes a circle groove 310, adapted with receiving Indivedual donor elements 146 in donor element array 304.Herein, as example, it is seen that groove 310 is square, to accommodate Square donor element 146.It is to be appreciated, however, that groove 310 can according to by the donor element accommodated whereby be shaped so as to it is a variety of Other shapes.

Each groove 310 preferably by gasket seal and covers, to be protected before donor element 146 is used to it Shield.Herein, only as example, each groove 310 can be sealed by o ring sealing element 312 and by being latchable to corresponding indivedual door bolts Spring loads lid 314 in lock 316 individually covers.In order to accommodate spring loads lid 314 and breech lock 316, ring-type element 306 Inner periphery 318 and excircle 320 are preferably individually zigzag, and the hinge 322 of middle cover 314, which is inserted into, to be formed at outside In first group of notch 324 in crenel on circumference 320, and breech lock 316 is inserted into the crenel being formed on inner periphery 318 Second group of notch 326 in.It is to be understood that for purpose is clearly presented, single lid 314 and corresponding breech lock are only illustrated in Fig. 3 C 316.Ring-type element 306 may include any suitable hard material, such as plastics or metal, and can have 50 to 300mm models Internal diameter in enclosing and the outer diameter in the range of 100 to 400mm.

That is such as seen in Fig. 3 A and 3B is most clear, and array holder 302 is preferably mounted on by module 330, In preferably operated to receive array holder 302 and be cooperated therewith by module 330.It is preferably by module 330 Active component, and the turntable 332 driven by the motor 334 for being connected to it is presented as (as example) in this paper.Turntable 332 preferably include swivel plate 336, and it includes at least one positioning pins, and a pair of of positioning pin 338 is presented as herein, described Positioning pin is used to be inserted in a pair of of corresponding aperture (not showing) in housing 302 so that fixed shell 302 is compared with swivel plate 336 position is such as indicated by mark 340.

When donor encapsulation 300 is in its assembled state seen in Fig. 3 B, array holder 302 is placed in swivel plate On 336, wherein pin 338 is inserted in corresponding aperture so that the in rotary moving of upper swivel plate 336 assigns rotary motion to array fixing Device 302.In addition to the rotary motion of turntable 332, the height of turntable 332 can be adjusted or by making by manual leveling mechanism manual It is adjusted with the motor-driven levelling gear as known to fields.

In the operation by module 330, array holder 302 by swivel plate 336 it is in rotary moving and rotate, whereby Donor element in donor element array 304 is aligned with actuator component 350.Actuator component 350 can be latch actuator, Operation opens breech lock 316 and whereby release removable cap 314 to promote.Latch actuator 350 is preferably in the opening period of lid 314 Between slowly bounce back, the opening speed of lid 314 is controlled whereby, so as to too fast and donor element 146 the certainty for preventing lid 314 from opening Displacement.After release cap 314, the donor element being disposed below is exposed, and then can by donor handling device (such as Body handling device 120) pick up it is for further use.

It will be appreciated that annular array holder 302, by the particular configuration of module 330 and latch actuator 350 respectively all only It is exemplary and can be easily changed by those skilled in the art.As example, the inner periphery 318 of ring-type element 306 And excircle 320 can be smooth rather than zigzag, such as the donor of ring-type element 406 shown in including Fig. 4 A to 4C Finding in the case of component encapsulation 400.As seen in Fig. 4 A to 4C, each donor element in donor element array 304 can be by It is indivedual to be sealed from locking removable cap 414 and sealant 416 (rather than hinged cowl 314).The preferably tight seal donor of cap 414 Element 146 is to protect it before donor element 146 is used.

Ring-type element 400 is mountable to by module 430, described to be included by module around inner bearing 434 and center The shell 432 of main shaft 436.The electric rotating motivation 438 for being preferably by being connected to it by module 430 rotates.By module 430 also can move to allow to adjust by additional motor (not showing) donor element encapsulation in the z-axis direction compared with card The height of the upper surface of disk 102.As example, cap 414 can separate the distance of about 2mm with the upper surface of chuck 102.

In order to prepare the donor element encapsulation 400 for using, can locking cap 414 be released from by actuator component 450.As Example, actuator component 450 can extrude cap 414 to discharge cap 414, as seen in Fig. 4 B, and then remove cap from encapsulation 400 414, as seen in Fig. 4 C.After cap 414 is removed, the donor element being disposed below is exposed, and can then be removed by donor Shipping unit (such as donor handling device 120) picks up for further use.

It will be appreciated that although donor element encapsulation 300 and 400 in, by each donor element 146 in donor element array It is shown as being covered by indivedual lids 314 or 414, but the donor element of donor element array is alternately by sealing more than one donor At least one of element collectively covers object covering.As example, this arrangement is seen in Fig. 5 A and 5B.

As seen in Fig. 5 A and 5B, donor element encapsulation 500 is provided, preferably includes to hold donor element array 504 array holder 502.Herein, only as example, array holder 502 is shown as one circle donor element of carrying Automatic adjustment class sheet tray 506, each donor element are the types of substantially similar donor element 146.

In order to protect donor element array 504, pallet 506 when donor element array 504 is immobilizated on pallet 506 It can be covered by the common lid 514 comprising sealing element 516.Pallet 506 may include any suitable generally smooth hard material, example Such as PTFEAnd there can be the outer diameter in the range of 100 to 400mm.Lid 514 may include any conjunction Suitable generally smooth hard material, such as PTFEAnd there can be the size compatible with pallet 514.Lid 514 can Include recess portion 518.Recess portion 518 can be generally parabolic shape, and be preferably used for allowing the confession volume elements close to array 504 is included Part, as will hereinafter be described in detail.

Pallet 506 is preferably installed in by module 530, wherein preferably being operated to hold by module 530 Pallet 506 simultaneously assigns its movement.Active component is preferably by module 530, and is being used as example herein, is presented as by connecting The turntable 532 driven to its motor 534.Turntable 532 preferably include around bearing 538 outer retainer ring 536 and It is connected to the interior rotatable ring 540 of motor 534.Turntable 532 can also be by z-axis motor (not showing) in the z-axis direction Adjustment.

When donor encapsulation 500 is in its assembled state seen in Fig. 5 B, pallet cover 514 is preferably nibbled with outer shroud 536 It closes so that pallet cover 514 is discharged from pallet 506 and sealing element 516 fluffs.Therefore, pallet cover 514 becomes with outer retainer ring 536 is static.Pallet cover 514 can slightly be opened when being engaged by outer shroud 536 above pallet 506, to allow close to below Donor element.While pallet cover 514 is engaged with outer shroud 536, pallet 506 is preferably engaged with inner ring 540 so that pallet 506 can be rotated by the rotation of interior rotatable ring 540 without pallet 506 is made to contact lid 514 and sealing element 516.

Although releasing lid 514, the donor element array 504 being disposed below still is sealed by 514 appropriateness of lid.Ying Liao Solution, the sealing provided by lid 514 and sealing element 516 may be than the sealings that are provided by indivedual lids 314 and 414 in this state Pine.In the idle state of the array holder 502 generally indicated by the component symbol 550 in Fig. 5 B, donor element array 504 are sealed by the appropriateness of lid 514, and recess portion 518 it is located so as to will not exceedingly in overlying donor element array 504 confession volume elements Part.Therefore, in idle state 550, the donor element of donor element array 504 will not be exposed and therefore can not possibly be by donor Handling device (such as donor handling device 120) picks up.

In order to prepare the donor element encapsulation 500 for using, pallet 506 can be rotated by the rotation of inner ring 504 so that New donor element 146 is positioned at recess portion 518, and donor encapsulation 500 is in and is generally referred to by the component symbol 560 in Fig. 5 B The preparation state shown.In state 560 is prepared, donor element 146 is exposed, and then can by donor handling device (such as Body handling device 120) pick up it is for further use.

It is the suitable of according to the present utility model and another preferred embodiment construction and operation referring now to Fig. 6 A, 6B and 6C For the corresponding unassembled figure explanation and the of simplified schematic of the donor element encapsulation in the processing system of type demonstrated in Figure 1 One and the second assembling figure explanation.

As seen in Fig. 6 A to 6C, donor element encapsulation 600 is provided, is preferably substantially similar demonstrated in Figure 1 Horizontal linearity donor element encapsulation 108 form.Donor element encapsulation 600 preferably includes to hold donor element array 604 array holder 602.Array holder 602 can be embodied with various configurations, and array 604 is accordingly disposed therein. Herein, only as example, array holder 602 is shown as to the general planar bar 606 of one row donor element of carrying, each confession Volume elements part is the type of substantially similar donor element 146.

Bar 606 preferably includes a series of grooves 610, adapted to accommodate indivedual confessions in donor element array 604 Volume elements part 146.Herein, as example, it can be seen that groove 610 is square, to accommodate square donor element 146.However, It will be appreciated that the shape of the donor element accommodated whereby can be according to being formed as a variety of other shapes by groove 610.

Each groove 610 preferably by gasket seal and covers, to be protected before donor element 146 is used to it Shield.Herein, only as example, each groove 610 can be sealed by o ring sealing element 612, and by from locking cap 614 individually Covering.Bar 606 may include any suitable hard material, such as aluminium or stainless steel, and can have in the range of 100 to 500mm Length and the width in the range of 20 to 100mm.

Bar 606 is preferably installed in by module 630, and that sees in fig. 6 is most clear, wherein excellent by module 630 Selection of land is operated to hold bar 606 and cooperated therewith by assigning its movement.Active member is preferably by module 630 Part, and it is particularly preferred that Linear drive, example is being used as herein, is being presented as slip band sub-assembly, including with placement The general linear band actuator 632 of sliding part element 634 thereon.Sliding part element 634 can be pacified by interfacing with substrate 636 Loaded on band actuator 632.It will be appreciated that the particular configuration of Linear drive shown herein is only exemplary, and it is linear Actuator other forms can be embodied as known to fields, such as linear motor or screw rod and nut actuator.

It can also in the z-axis direction be moved by additional motor (not showing) by module 630, to allow to adjust donor Component encapsulation compared with the upper surface of chuck 102 height.As example, cap 614 can separate about with the upper surface of chuck 102 The distance of 2mm.

When donor encapsulation 600 is in its assembled state seen in Fig. 6 B, bar 606 is installed on sliding part element 634 On, assign linear movement to bar 606 whereby.In order to prepare the donor element encapsulation 600 for using, the donor element on bar 606 146 are preferably aligned with actuator component 650 so that can be discharged from locking cap 614 by actuator component 650.As example, cause Dynamic device element 650 can extrude cap 614 to discharge cap 614, as seen from fig. 5b, and then remove cap 614 from encapsulation 600, such as Seen in Fig. 6 C.Cap 614 can be placed in the disposal case 652 being incorporated into actuator component 650.After cap 614 is removed, position Donor element in below is exposed, and can then be picked up by donor handling device (such as donor handling device 120) for Further use.

It will be appreciated that although donor element encapsulation 600 in, by each donor element 146 in donor element array 604 It is shown as being covered by indivedual removable caps 614, but the donor element 146 in donor element array 604 is alternately by sealing one A Yi Shang donor element collectively covers object covering, and correspondingly changes structure and the operation of donor element sub-assembly 630.

It is the figure for constructing and operating for according to the present utility model and another preferred embodiment referring now to Fig. 7 A and 7B The simplified schematic of the donor element encapsulation sub-assembly in the processing system of type accordingly unassembled figure explanation and group are shown in 1 Dress figure explanation.

As seen in Fig. 7 A and 7B, donor element encapsulation sub-assembly 700 is provided, is preferably in substantially similar Fig. 1 The form of the donor element encapsulation 110 shown.Donor element encapsulation 700 preferably includes to hold donor element array 704 array holder 702.Array holder 702 can be embodied with various configurations and array 704 is accordingly disposed therein. Herein, array holder 702 is only shown as to straight housing 706, with containing component 708, the receiving as example Component accommodates a series of vertical stack donor element pallets 712, and donor element array 704 is preferably disposed at stack On donor element pallet 712.Therefore, donor element array 704 preferably includes hanging down for donor element (such as donor element 146) Straight to stack, each pallet 712 preferably carries single donor element.

It will be appreciated that pallet 712 is adapted to carry indivedual donor elements 146 in donor element array 704.Herein, As example, it is seen that pallet 712 is have central square protruding portion generally square, and array holder 702 has and corresponds to Generally square cavities so as to functionally compatible with square donor element 146.It is to be appreciated, however, that pallet 712 can be according to general The donor element accommodated whereby is shaped so as to a variety of other shapes.

Sub-assembly 700 is encapsulated further preferably comprising at least one removable cap, is used to be not used in donor element When cover at least one donor element in donor element array 704.Herein, as example, each donor element 146 Removable cap is formed by direct overlying pallet 712.The particularly advantageous characteristics of this embodiment of the utility model is：Support supplies Removable cap of each pallet 712 of volume elements part 146 simultaneously as the corresponding donor element being disposed below, so as to exclude to volume The needs of outer special cap.It needs additionally or alternatively to be incorporated into it is to be appreciated, however, that special cap may depend on its design and operation It encapsulates in sub-assembly 700.

Shell 708 preferably includes one group of top and stops jaw 720, against stopping jaw 720 preferably preloaded donor The most top tray 712 of array 704.Stop jaw 720 by opening and the availability of closing control top tray 712, following article will It is described in detail with reference to figure 7C.Stop jaw 720 and preferably include a pair of of stiff elongated member 724, each there is upper flange 726 It and is pivotly put into the top of shell 708 so that the longitudinal axis of element 724 is substantially parallel to the longitudinal axis of shell 708.Support Disk 712 can be by being sealed and the mechanism of such as preloaded spring 728 by compressing for volume array 704 is against stopping by shell 708 Jaw 720 and be preloaded with.

It encapsulates sub-assembly 700 further preferably to include by module 730, is operated to receive array holder It 702 and cooperates therewith.By module 730 be preferably active component, and herein be used as example, be presented as define it is adapted To receive the accumulator holder sub-assembly 732 of the inner shaft 733 of housing 706.Accumulator holder sub-assembly 732 preferably wraps Containing one group of accumulator jaw 734, the first accumulator jaw 736 and the second accumulator jaw of its opposite positioning are preferably included 738.Each of first accumulator jaw 736 and the second accumulator jaw 738, which preferably include, to be terminated at top edge 742 Back 740.

Accumulator jaw 734 is preferably placed in a pair of notches 744 in the side wall 746 for being formed at inner shaft 733, is made Proper encapsulation sub-assembly 700 be in its assembled state and when housing 706 is inserted into inner shaft 733, and described group of accumulator clamps Mouth 734 stops jaw 720 compared with described group of top and is generally vertically oriented, and top edge 742 is flushed with corresponding pallet 712, It is as most clear in seen in figure 7b.Accumulator jaw 734 is preferably used for controlling by promoting and reducing donor element array 704 The movement of donor element array 704 processed, following article will be described in detail with reference to figure 7C.

Multiposition material storage tube 750 is preferably additionally comprised by module 730, is directly adjacent to accumulator holder sub-assembly 732 position and are operated to cooperate to control release and the availability of the pallet in array 704 with accumulator jaw 734.It can Adjacent accumulator holder sub-assembly 732 provides pick device 760, and wherein pick device 760 can be operated emptying confession Most top tray 712 is removed after volume elements part 146 and disposes empty most top tray 712.Empty most top tray 712 can be placed in simultaneously Enter into the disposal case in by module 730, such as the back wall 764 above it is supported on from accumulator fixing sub-assembly 732 The disposal case 762 of extension.Pick device 760 can be activated by actuator component 766, so as to promote pick device 760 along its At least sliding motion.

As seen in fig. 7b, when pallet 712 is preloaded in housing 706, the most upper confession in donor element array 704 Volume elements part 146 is exposed and therefore prepares to pick up to use by donor handling device (such as donor handling device 120).With reference to Fig. 7 C more preferably understand that each donor element 146 in the vertical stacking of donor element can be so as to being used for by donor handling device (example Such as donor handling device 120) mechanism that picks up.As seen at the unloading step 1 in Fig. 7 C, accumulator jaw 734 can pass through storage Barrel 750 moves down, and reduces the stackable pallet 712 of empty 770 lower section of preloaded pallet in top whereby, and measures second from the bottom The distance of preloaded pallet 770 of the pallet 772 of a loading away from top sky simultaneously unclamps storing from the preloaded pallet 770 of top sky Device jaw 734.Stackable pallet 712 can move down the distance of about 0.5mm.

As seen at unloading step 2, after stackable pallet 712 is reduced, top stops jaw 720 and pivotly opens, It constrains, and can be removed and disposed by pick device 760 so that the pallet 770 of top sky is no longer stopped jaw 720 by top.Top Stopping jaw 720 can be by including any suitable mechanism opening of pneumatically or electrically mechanism of qi structure.

As seen at unloading step 3, after removing and disposing the empty pallet 770 in top, accumulator jaw 734 can pass through Material storage tube 750 moves up, and promotes stackable pallet 712 whereby.Stackable pallet 712, which can be promoted to top, stops the convex of jaw 720 The height of 716 lower section about 0.5mm of edge.

As seen at unloading step 4, after stackable pallet 712 is promoted, top stops jaw 720 and pivotly closes, So as to clamp the pallet 772 of loading, and stackable pallet 712 can be discharged by material storage tube 750 from accumulator jaw 734.Most upper confession Therefore volume elements part 146 is exposed, and prepare to be picked up by donor handling device.

It will be appreciated that during manufacture and loading pallet stack 712, unloading step 1 to 4 can be usually followed, but with opposite Order follow.Therefore, as seen at the sequence of the loading step 1 to 4 shown in Fig. 7 D, loading at step 1, top Stop jaw 720 to can be at initially opening orientation, and most top tray 770 can be deposited；It is loading at step 2, top stops pincers Mouth 720 is pivotly closed；It is loading at step 3, stackable pallet can be lowered；And loading at step 4, top stops jaw 720 can be again turned on, to prepare the additional components that encapsulation sub-assembly 700 is made to receive stackable pallet 712.

It will be understood by one of ordinary skill in the art that the unloading illustrated respectively in Fig. 7 C and 7D and the part or complete for loading sequence Portion unloads and loads step 1 to 4 and may depend on the operation of donor encapsulation 700 and requirement rearrangement, is replaced by other steps In generation, carries out in additional unloading or before or after loading step.

Those skilled in the art should be further appreciated that the utility model from the content limitation hereafter clearly advocated. But the scope of the utility model includes various combinations and the sub-portfolio of above-described feature, also includes such as fields Technical staff is after foregoing description is read with reference to schema by expect and not its modification and variation in the prior art.It is specific For, it should be understood that the detailed construction configuration of the various elements of the utility model as described above is merely illustrative and can root The requirement that processing system therein is incorporated with according to the utility model is modified.

Claims (48)

1. a kind of donor handling device, it is characterised in that the donor handling device includes：

Apparatus main body；

Moveable arm extends to hold donor element on it from described device main body, and the donor element provides use In the material being deposited in target；And at least one of the following：

Platform extends and adapted described for volume elements to be housed when the donor element is not used from described device main body Part and

Measuring instrument is used to measure the distance between described device main body and the target.

2. donor handling device according to claim 1, it is characterised in that the donor handling device includes multiple electronic Machine is connected in series to the moveable arm for assigning its movement.

3. donor handling device according to claim 2, it is characterised in that the multiple motor includes being connected to described First θ axis motor of moveable arm is connected to the second z-axis motor of the θ axis motor and to be connected to the z-axis electronic 3rd x-axis motor of machine.

4. the donor handling device according to any claim in claim 1-3, it is characterised in that the moveable arm Including terminal hand, the donor element is immobilizated on the terminal hand.

5. donor handling device according to claim 4, it is characterised in that the donor element is immobilizated in by pull of vacuum On the terminal hand.

6. donor handling device according to claim 4, it is characterised in that by apply pressure make the donor element from The terminal hand pop-up.

7. donor handling device according to claim 4, it is characterised in that the donor element includes surface, the material It is placed on the surface, when the donor element is immobilizated on the surface, the surface is away from the terminal hand.

8. donor handling device according to claim 4, it is characterised in that the terminal hand includes adapted with permission The inner cavity that laser extends there through.

9. the donor handling device according to any claim in Claim 1-3, it is characterised in that the measuring instrument Including barometer.

10. the donor handling device according to any claim in Claim 1-3, it is characterised in that the platform bag Include to seal the sealing element of the donor element.

11. donor handling device according to claim 3, it is characterised in that the moveable arm includes more plane components,

It includes：

First elongated portion is located in the first plane and is connected to the substrate of the θ axis motor；

Second short straight section is revealed on the direction of first elongated portion is essentially perpendicular to from first elongated portion Go out, second short straight section has chamfering upper surface；And

Part III extends vertically and tapered compared with its from second short straight section, and the Part III is located at big Parallel in the second plane of first plane on body, the Part III includes generally square end fragment.

12. donor handling device according to claim 10, it is characterised in that it is polygon that the platform includes general planar Shape table top prolongs on the direction of extending direction for being substantially parallel to the moveable arm from the substrate of described device main body It stretches, the polygon table top includes the bar portion being connected with the substrate and the second one-tenth angle part being connected with the bar portion, described Sealing element is positioned on the second one-tenth angle part.

13. a kind of donor element encapsulates sub-assembly, it is characterised in that the donor element encapsulation sub-assembly includes：

Array holder is used to hold donor element array；

At least one removable cap, at least one donor element being used in the donor element array cover when being not used The donor element；And

By module, operated to receive the array holder and be cooperated therewith.

14. donor element according to claim 13 encapsulates sub-assembly, it is characterised in that the array holder is annular 's.

15. donor element according to claim 14 encapsulates sub-assembly, it is characterised in that at least one removable cap Including more than first a removable caps, each lid more than described first in a removable cap covers single for volume elements in the array Part.

16. donor element according to claim 15 encapsulates sub-assembly, it is characterised in that each lid includes sealing element.

17. the donor element encapsulation sub-assembly according to claim 15 or 16, it is characterised in that each lid includes hinge Chain type spring loads lid.

18. donor element according to claim 17 encapsulates sub-assembly, it is characterised in that the donor element encapsulation combination Part includes more than second a breech locks, and a removable cap more than described first is closed by being latchable to more than described second in a breech lock.

19. donor element according to claim 18 encapsulates sub-assembly, it is characterised in that the annular array holder bag The substantially ring bodies of plane is included, with zigzag inner periphery and zigzag excircle, the breech lock divides along the inner periphery Cloth, the hinge type spring loads cover rim the excircle distribution.

20. donor element according to claim 17 encapsulates sub-assembly, it is characterised in that described to be included rotation by module Platform and the motor for being connected to it.

21. donor element according to claim 20 encapsulates sub-assembly, it is characterised in that the turntable includes upper rotation Plate, at least one positioning pin formed thereon, the positioning pin is adapted to be inserted into the array holder.

22. donor element according to claim 18 encapsulates sub-assembly, it is characterised in that more than described second in a breech lock Each breech lock is opened by actuator component.

23. donor element according to claim 22 encapsulates sub-assembly, it is characterised in that the actuator component is described It bounces back more than second during the opening of a breech lock, adjusts the speed of the opening whereby.

24. donor element according to claim 16 encapsulates sub-assembly, it is characterised in that each lid is included from locking Removable cap.

25. donor element according to claim 24 encapsulates sub-assembly, it is characterised in that described to lead to from locking removable cap Cross extruding release.

26. the donor element encapsulation sub-assembly according to claim 24 or 25, it is characterised in that described to be included by module Shell, by the circular inner bearing of the shell and the main shaft being centered about compared with the shell and the inner bearing.

27. donor element according to claim 13 encapsulates sub-assembly, it is characterised in that the array holder includes big Round tray on body.

28. donor element according to claim 27 encapsulates sub-assembly, it is characterised in that at least one removable cap Common lid including covering the donor element array.

29. donor element according to claim 28 encapsulates sub-assembly, it is characterised in that the common lid includes recess portion, institute Stating recess portion allows close to donor element below.

30. the donor element encapsulation sub-assembly according to claim 28 or 29, it is characterised in that described to be included by module：

Fixed outer shroud；

Bearing is surround by the outer shroud with circular manner；

Inner ring is surround by the bearing with circular manner；And

Motor is connected to the inner ring for assigning its rotary motion.

31. donor element according to claim 30 encapsulates sub-assembly, it is characterised in that the common lid and the outer shroud Engagement, the common lid becomes whereby as the outer shroud is static, and the pallet is engaged with the inner ring, and the pallet is whereby Becoming can be as the inner ring rotates.

32. donor element according to claim 13 encapsulates sub-assembly, it is characterised in that the array holder includes base Linear horizontal orientation element in sheet.

33. donor element according to claim 32 encapsulates sub-assembly, it is characterised in that described to be included linearly by module Actuator.

34. donor element according to claim 33 encapsulates sub-assembly, it is characterised in that the Linear drive includes sliding Dynamic band sub-assembly includes the linear tape actuator of the sliding part element with placement thereon, the array holder installation In on the sliding part element.

35. donor element according to claim 31 encapsulates sub-assembly, it is characterised in that the donor element encapsulation combination Part includes the disposal case for disposing at least one removable cap wherein.

36. donor element according to claim 13 encapsulates sub-assembly, it is characterised in that the donor element array includes The donor element array of vertical stacking, and the array holder includes the pen for accommodating the donor element array of the vertical stacking Straight housing.

37. donor element according to claim 36 encapsulates sub-assembly, it is characterised in that the array bag of the vertical stacking The pallet of multiple vertical stackings is included, the donor element is positioned on the pallet of the multiple vertical stacking.

38. the donor element encapsulation sub-assembly according to claim 37, it is characterised in that for covering at least one donor At least one removable cap of element includes the support of the donor element in the array of vertical stacking described in direct overlying Disk.

39. the donor element encapsulation sub-assembly according to claim 37 or 38, it is characterised in that the straight housing bag It includes one group of top and stops jaw, the donor element array of the vertical stacking stops jaw against described one group top and loads.

40. donor element according to claim 39 encapsulates sub-assembly, it is characterised in that one group of top stops jaw Including a pair of of stiff elongated member, it is put into upper flange and pivotly in the top of the housing, it is described elongated The longitudinal axis of element is substantially parallel to the longitudinal axis of the housing.

41. donor element according to claim 39 encapsulates sub-assembly, it is characterised in that the donor element encapsulation combination Part includes stopping the spring of the donor element array of the jaw loading vertical stacking against described one group top.

42. donor element according to claim 39 encapsulates sub-assembly, it is characterised in that described to be included fixing by module Device sub-assembly has and defines the side wall of inner shaft, and the inner shaft is adapted to receive the housing.

43. donor element according to claim 42 encapsulates sub-assembly, it is characterised in that the side wall includes being formed at it In notch, one group of accumulator jaw being placed in the notch, one group of accumulator jaw is compared with one group of top It is generallyperpendicular that portion stops jaw.

44. donor element according to claim 43 encapsulates sub-assembly, it is characterised in that in one group of accumulator jaw Each jaw include terminating at the planar backside of upper edge.

45. donor element according to claim 43 encapsulates sub-assembly, it is characterised in that described to be further included use by module In the multiposition material storage tube for the operation for controlling one group of accumulator jaw.

46. donor element according to claim 45 encapsulates sub-assembly, it is characterised in that the donor element encapsulation combination Part includes disposing after the donor element is removed from the pallet of each the multiple vertical stacking described each described The pick device of the pallet of multiple vertical stackings.

47. donor element according to claim 46 encapsulates sub-assembly, it is characterised in that from the donor element encapsulation group Component unloading donor element includes：

The pallet of the multiple vertical stacking is reduced by forcing down one group of accumulator jaw；

The most top tray in pallet by opening the multiple vertical stacking of one group of top stopping jaw release；

The most top tray described in pick device removal；

The pallet of the multiple vertical stacking is promoted by one group of accumulator jaw described in lifting；And

The pallet for stopping jaw by closing one group of top and fixing the multiple vertical stacking.

48. a kind of lining treatment system, it is characterised in that the lining treatment system is included according to any in claim 1 to 12 Donor handling device described in claim, the donor handling device is adapted to be appointed with carrying according in claim 13 to 47 Donor element encapsulation sub-assembly described in one claim.