CN207362324U - High-frequency induction heating vaporising device - Google Patents
High-frequency induction heating vaporising device Download PDFInfo
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- CN207362324U CN207362324U CN201721163764.8U CN201721163764U CN207362324U CN 207362324 U CN207362324 U CN 207362324U CN 201721163764 U CN201721163764 U CN 201721163764U CN 207362324 U CN207362324 U CN 207362324U
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- crucible
- induction coil
- target
- vacuum chamber
- holder
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- Physical Vapour Deposition (AREA)
- General Induction Heating (AREA)
Abstract
The utility model provides a kind of high-frequency induction heating vaporising device, including：Multiple crucibles, crucible holder, induction coil, moving mechanism and sealing mechanism；Multiple crucibles, for holding Coating Materials；Crucible holder, for being supported to multiple crucibles；Moving mechanism, makes target crucible enter in the induction coil for driving the target crucible in multiple crucibles to move；Induction coil, for carrying out heating evaporation to the Coating Materials in target crucible by being passed through high frequency electric；Sealing mechanism, for forming sealing between moving mechanism and vacuum chamber.The advantages of high-frequency induction heating vaporising device provided by the utility model, is：(1) Coating Materials useful load is big, it is more to load species；(2) evaporation source position is fixed so that thickness has good uniformity；(3) crucible quantity can be increased and decreased according to the actual requirements, layout is convenient, it is high to customize degree；(4) heating system need not additionally be increased while increasing crucible quantity, it is cost-effective.
Description
Technical field
It the utility model is related to a kind of heating and evaporating unit, more particularly to a kind of high-frequency induction heating vaporising device.
Background technology
In order to make Coating Materials gasify, most of membrane materials all must be in 1000 DEG C to 2000 DEG C of evaporation under vacuum
At a temperature of be evaporated, it is therefore necessary to membrane material is heated to evaporating temperature using various heating means.Usually evaporation coating is set
The device heated in standby to membrane material is known as heating and evaporating unit.Heating and evaporating unit is widely used in electronics, semiconductor, light
In the gas-phase depositions of industry such as, building, packaging.
Fig. 1 is the cross-section structure signal of an embodiment of high-frequency induction heating vaporising device in the prior art
Figure.As shown in Figure 1, high-frequency induction heating vaporising device includes induction coil 1, crucible and base 2, wherein, crucible is arranged on
On base 2.Further, crucible includes interior crucible 3, outer crucible 4, heat insulation cylinder 5 and thermal insulation layer 6.Wherein, interior crucible 3
It is arranged in outer crucible 4, heat insulation cylinder 5 is arranged between interior 3 side wall of crucible and 4 side wall of outer crucible, and thermal insulation layer 6 is arranged on interior
Between 4 bottom surface of 3 bottom surface of crucible and outer crucible.
When carrying out coating process using the high-frequency induction heating vaporising device shown in Fig. 1, Coating Materials is put into first interior
In crucible 3；Then whole crucible is placed on to the center of induction coil 1, make the induction coil 1 around the earthenware for being contained with Coating Materials
Crucible crucible body, wherein, a crucible can only be placed in induction coil 1；Then, high frequency electric is passed through in induction coil 1, in high frequency
Induction coil 1 produces electromagnetic field of high frequency under the action of electric current, and Coating Materials produces powerful under the sensing of the electromagnetic field of high frequency
Vortex causes its heating evaporation；Finally, the Coating Materials of evaporation is deposited on the surface formation film of workpiece.Wherein, heat insulation cylinder 5
And thermal insulation layer 6 contributes to reduce hot loss of energy in interior crucible 3 in coating process, so as to ensure that effective profit of thermal energy
With.
It should be noted that during above-mentioned high-frequency induction heating vaporising device work, an induction coil is pointed to its center
Crucible carry out effect and evaporate Coating Materials in it being counted as an evaporation source.Quantity based on evaporation source, can incite somebody to action
The plated film mode of high-frequency induction heating vaporising device is divided into single evaporation source mode and multiple evaporation source modes.In the prior art,
Single evaporation source mode is realized by only configuring a crucible and an induction coil in high-frequency induction heating apparatus
's.The defects of this single evaporation source mode, is：Due to crucible limited volume, the capacity and species of Coating Materials are all subject to one
Fixed limitation, thus can not be suitable for that Coating Materials capacity requirement is big or Coating Materials species demand more than application scenarios.It is multiple
Evaporation source mode is realized by configuring multiple crucibles and multiple induction coils in high-frequency induction heating apparatus.It is this
The defects of multiple evaporation source modes, is：Although there is no the limitation to Coating Materials species, due to each evaporation source
Position has differences, therefore causes evaporation angle inconsistent, and then it is inconsistent to cause film thickness distribution to occur.In addition, to multiple
, it is necessary to which pitch problems between considering evaporation source are to prevent cross contamination when the position of evaporation source is laid out, it is desirable to vacuum
Room is bigger.Moreover, each evaporation source is required for a set of power-supply system for being used to provide high frequency electric of corresponding configuration, multiple evaporations
Source then needs to configure more set power-supply systems, consequently, it is possible to which the increase of high-frequency induction heating vaporising device cost can be caused.
Utility model content
In order to overcome drawbacks described above of the prior art, the utility model provides a kind of high-frequency induction heating evaporation dress
Put, which includes：
Multiple crucibles, crucible holder, induction coil, moving mechanism and sealing mechanism, wherein, the multiple crucible, institute
State crucible holder, induction coil setting in a vacuum chamber, the moving mechanism is arranged on outside the vacuum chamber；
The multiple crucible, for holding Coating Materials；
The crucible holder, for being supported to the multiple crucible；
The moving mechanism, extends in the vacuum chamber and is connected with the crucible holder, for driving the multiple earthenware
Target crucible movement in crucible makes the target crucible enter in the induction coil；
The induction coil, for carrying out heating steaming to the Coating Materials in the target crucible by being passed through high frequency electric
Hair；
The sealing mechanism, is arranged between the moving mechanism and the vacuum chamber, in the moving mechanism and
Sealing is formed between the vacuum chamber.
One side according to the present utility model, in the high-frequency induction heating vaporising device, the moving mechanism includes rising
Descending mechanism and rotating mechanism；The rotating mechanism is extended in the vacuum chamber and is connected with the crucible holder, for driving
Crucible holder rotation is stated to drive the target crucible rotation；The elevating mechanism is connected with the rotating mechanism, for passing through
The rotating mechanism lifting is driven to drive the crucible holder to lift and then drive the target crucible lifting, alternatively, described
Elevating mechanism is extended in the vacuum chamber, for driving the target crucible lifting；The rotating mechanism and the elevator
Structure cooperating makes the target crucible enter in the induction coil.
Other side according to the present utility model, in the high-frequency induction heating vaporising device, the crucible holder is in institute
State in vacuum chamber and be horizontally disposed with；The multiple crucible on the crucible holder circumferentially；The induction coil is arranged on
In the circumference location directly below；The elevating mechanism is connected with the rotating mechanism, for by driving the whirler
Structure rises makes the bottom of the target crucible be higher than the top of the induction coil to drive the crucible holder to rise；The rotation
Rotation mechanism, for drive crucible holder rotation make the target crucible along the circle rotation to the induction coil just
Top；The elevating mechanism, is additionally operable to described to drive the crucible holder decline to make by driving the rotating mechanism to decline
Target crucible enters in the induction coil.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, the rotating mechanism includes
Electric rotating machine and rotation axis；The electric rotating machine is arranged on the lower section of the vacuum chamber, one end of the rotation axis and the rotation
Rotating motor connection, the bottom plate of the other end through the vacuum chamber are extended in the vacuum chamber and are connected with the crucible holder, its
In, the electric rotating machine drives the rotation axis rotation to drive the crucible holder to rotate when working.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, the elevating mechanism includes
Lifting shaft, substrate, lifter plate and lifting cylinder；The lifter plate is connected with the electric rotating machine；The lifting shaft is coaxially set
Put outside the rotation axis, one end of the lifting shaft with the lifter plate is sealedly and fixedly connected, the other end passes through the sealing
Mechanism is formed with the vacuum chamber bottom plate and sealed；The substrate is connected with the sealing mechanism；The cylinder body of the lifting cylinder is consolidated
Determine on the substrate, the piston rod of the lifting cylinder is connected with the lifter plate；During the elevating mechanism work, the liter
Sending down abnormally ascending cylinder drives the raising and lowering of the lifter plate and the lifting shaft by the piston rod, and then the drive rotation
The raising and lowering of motor and the crucible holder.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, the elevating mechanism also wraps
Adjusting screw rod and the nut being used cooperatively with the adjusting screw rod are included, wherein, one end of the adjusting screw rod and the piston rod
Connection, the other end are connected by the nut with the lifter plate, and the lifter plate is adjusted by the position for adjusting the nut
Lifting distance.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, the elevating mechanism also wraps
The first guide rod is included, first guide rod is arranged between the substrate and the lifter plate, and the one of first guide rod
End with the substrate is fixed, the other end passes through the lifter plate, the described in drive lower edge of the lifter plate in the piston rod
One guide rod raising and lowering.
Another aspect according to the present utility model, the high-frequency induction heating vaporising device further include the first localization machine
Structure, is connected with the rotating mechanism, for detect the target crucible rotation to the induction coil surface when touch
Sending out rotating mechanism described is stopped.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, first detent mechanism
The multiple first photoelectricity position-sensing switches being equal including the first locating plate and with crucible quantity；First locating plate is arranged on institute
State in rotation axis, the rotation axis rotation drives the first locating plate rotation；The multiple first photoelectricity position-sensing switch and institute
Multiple crucibles to be stated to correspond, its position is configured as, when the surface of the target crucible rotation to the induction coil,
Rotation to the position where the first photoelectricity position-sensing switch corresponding with the target crucible, triggering should just for first locating plate
First photoelectricity position-sensing switch produces the control signal for being used for controlling the electric rotating machine to be stopped and sends the control signal
To the electric rotating machine.
Another aspect according to the present utility model, the high-frequency induction heating vaporising device further include antifouling board and second
Guide rod, the antifouling board and the second guide rod are arranged in the vacuum chamber；The antifouling board is arranged on the multiple crucible
Top, be flexibly connected with the crucible holder, wherein, antifouling board position corresponding with the induction coil is provided with out
Mouthful；One end of second guide rod is fixed on the bottom plate of the vacuum chamber, the other end passes through the antifouling board, described antifouling
Second guide rod raising and lowering described in drive lower edge of the plate in the crucible holder.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, the crucible holder is in institute
State in vacuum chamber and be horizontally disposed with；The multiple crucible on the crucible holder circumferentially；The induction coil is arranged on
On position directly over the circumference；The rotating mechanism, for driving the crucible holder rotation to make the target crucible edge
The circle rotation is to the underface of the induction coil；The elevating mechanism is from positioned at the induction coil location directly below
Extend in the vacuum chamber, the induction coil is ascended into for driving the target crucible to leave the crucible holder
The interior and driving target crucible is lowered away from the induction coil and returns on the crucible holder.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, the rotating mechanism includes
Electric rotating machine and rotation axis；The electric rotating machine is arranged on outside the vacuum chamber, one end of the rotation axis and the electric rotating
Machine connection, the other end are extended in the vacuum chamber and are connected with the crucible holder, wherein, the electric rotating machine drives when working
The rotation axis is rotated to drive the crucible holder to rotate.
Another aspect according to the present utility model, the high-frequency induction heating vaporising device further include the second localization machine
Structure, is connected with the rotating mechanism, for detect the target crucible rotation to the induction coil underface when touch
Sending out rotating mechanism described is stopped.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, second detent mechanism
The multiple second photoelectricity position-sensing switches being equal including the second locating plate and with crucible quantity；Second locating plate is arranged on institute
State in rotation axis, the rotation axis rotation drives the locating plate rotation；The multiple second photoelectricity position-sensing switch with it is described more
A crucible corresponds, its position is configured as, described when the underface of the target crucible rotation to the induction coil
Second locating plate just rotation to the position where the second photoelectricity position-sensing switch corresponding with the target crucible, trigger this second
Photoelectricity position-sensing switch produces the control signal for being used for controlling the electric rotating machine to be stopped and sends the control signal to institute
State electric rotating machine.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, the elevating mechanism includes
Lifting motor, elevating lever and crucible holder；The lifting motor is arranged on the lower section of the vacuum chamber, one end of the elevating lever
Be connected with the lifting motor, the other end is extended in the vacuum chamber, the crucible holder is arranged on the elevating lever and is located at institute
State on one end in vacuum chamber；During the elevating mechanism work, the lifting motor, which drives the elevating lever to rise, makes the earthenware
The crucible receptacle act target crucible leaves the crucible holder and enters in the induction coil and drive the elevating lever to decline
Make the crucible holder drive the target crucible to leave the induction coil to return on the crucible holder.
Another aspect according to the present utility model, the high-frequency induction heating vaporising device further include the 3rd localization machine
Structure, is connected with the elevating mechanism, for triggering the liter when detecting that the target crucible enters in the induction coil
Descending mechanism is stopped and is touched detecting that the target crucible is left when the induction coil is returned on the crucible holder
Sending out elevating mechanism described is stopped.
Another aspect according to the present utility model, in the high-frequency induction heating vaporising device, the 3rd detent mechanism
Including the 3rd locating plate, the 3rd photoelectricity position-sensing switch and the 4th photoelectricity position-sensing switch；3rd locating plate is arranged on the liter
Drop on bar, the elevating lever raising and lowering drives the locating plate raising and lowering；The 3rd photoelectricity position-sensing switch and
The position of the four photoelectricity position-sensing switches is configured as, when the target crucible enters in the induction coil, the described 3rd
Locating plate is moved to the position where the 3rd photoelectricity position-sensing switch just, triggers the generation of the 3rd photoelectricity position-sensing switch and is used for
Control the control signal that the lifting motor is stopped and send the control signal to the lifting motor, and when described
After target crucible is returned on the crucible holder, the 3rd locating plate is moved to where the 4th photoelectricity position-sensing switch just
Position, trigger the 4th photoelectricity position-sensing switch and produce and be used to controlling control signal that the lifting motor is stopped and should
Control signal is sent to the lifting motor.
Another aspect according to the present utility model, the high-frequency induction heating vaporising device further include antifouling board, fixed
Ground is arranged on the position above the multiple crucible in the vacuum chamber, and position corresponding with the induction coil is provided with
Opening.
High-frequency induction heating vaporising device provided by the utility model is by moving mechanism's driving on crucible holder
Multiple crucibles in target crucible enter be arranged in the induction coil on fixed position, and by the induction coil lead to
Enter high frequency electric and heating evaporation is carried out to the Coating Materials in the target crucible to realize coating process.Compared with prior art,
The advantages of high-frequency induction heating apparatus provided by the utility model, includes：(1) evaporation source only has one and position is fixed, but can
To configure multiple crucibles, wherein, evaporation source only has one and position fixation can ensure to evaporate the uniformity of angle so as to ensure
The uniformity of film thickness distribution, and then ensure the quality of coating process, and multiple crucibles then can effectively increase Coating Materials
The species of capacity and Coating Materials, makes high-frequency induction heating vaporising device provided by the utility model can be adapted for plating
The capacity and species of membrane material have the various application scenarios of different demands；(2) crucible quantity can in the range of allowing in space
Arbitrarily to increase or reduce according to specific requirements, layout is convenient, it is high to customize degree；(3) due to there was only an evaporation source, because
This needs a set of power-supply system for being used to provide high frequency electric, that is to say, that need not be extra while crucible quantity increase
Increase the quantity of power-supply system, so as to effectively save the cost of high-frequency induction heating vaporising device.
Brief description of the drawings
By reading the detailed description made to non-limiting example made with reference to the following drawings, the utility model
Other features, objects and advantages will become more apparent upon：
Fig. 1 is the cross-section structure signal of an embodiment of high-frequency induction heating vaporising device in the prior art
Figure；
Fig. 2 is the structural representation of an embodiment of high-frequency induction heating vaporising device according to the present utility model
Figure；
Fig. 3 is the schematic top plan view of antifouling board in high-frequency induction heating vaporising device shown in Fig. 2；
Fig. 4 to Fig. 6 is the course of work schematic diagram of high-frequency induction heating vaporising device shown in Fig. 2；
Fig. 7 is that the structure of the another embodiment of high-frequency induction heating vaporising device according to the present utility model is shown
It is intended to；
Fig. 8 is the schematic diagram that target crucible enters in induction coil in high-frequency induction heating vaporising device shown in Fig. 7.
The same or similar reference numeral represents the same or similar component in attached drawing.
Embodiment
In order to better understand with explaination the utility model, the utility model is made below in conjunction with attached drawing further detailed
Thin description.
The utility model provides a kind of high-frequency induction heating vaporising device, which includes：
Multiple crucibles, crucible holder, induction coil, moving mechanism and sealing mechanism, wherein, the multiple crucible, institute
State crucible holder, induction coil setting in a vacuum chamber, the moving mechanism is arranged on outside the vacuum chamber；
The multiple crucible, for holding Coating Materials；
The crucible holder, for being supported to the multiple crucible；
The moving mechanism, extends in the vacuum chamber and is connected with the crucible holder, for driving the multiple earthenware
Target crucible movement in crucible makes the target crucible enter in the induction coil；
The induction coil, for carrying out heating steaming to the Coating Materials in the target crucible by being passed through high frequency electric
Hair；
The sealing mechanism, is arranged between the moving mechanism and the vacuum chamber, in the moving mechanism and
Sealing is formed between the vacuum chamber.
In the following, the structure of high-frequency induction heating vaporising device provided by the utility model will be illustrated.
Specifically, in the utility model, multiple crucibles are that exponential quantity is two and more than two crucibles.The plurality of earthenware
Crucible is arranged in the vacuum chamber of coating machine, for holding Coating Materials.The particular number of crucible depends on the reality of coating process
The size of demand and vacuum chamber of film coating machine.It is directed to for each crucible, its Coating Materials specifically held depends on plated film
The actual demand of technique.That is, what is held in application scenes in the plurality of crucible is identical Coating Materials, and
What is held is then different Coating Materials in the plurality of crucible in other application scenarios.Herein for the concrete shape of crucible
Any restriction is not done with capacity.The material of crucible use with certain resistivity (ρ/n Ω m), high-temperature stability and not with plating
The material that membrane material reacts, wherein, the numerical value of resistivity is preferred between 50-100, such as graphite crucible, tungsten earthenware
Crucible, molybdenum crucible etc..In application scenes, it can be evaporated using identical crucible；In other application scenarios, steam
The Coating Materials for sending out different may need different crucibles.Therefore, used by the utility model is for high-frequency induction vaporising device
Whether multiple crucibles are identical not to be limited in any way.
Crucible holder is arranged in the vacuum chamber of coating machine, for being supported to multiple crucibles.Crucible holder is using exhausted
Edge heat-barrier material is made.In the present embodiment, the material of crucible holder is quartz.It will be appreciated by persons skilled in the art that
In other embodiments, the material of crucible holder is not restricted to quartz, and every possess high-temperature stability and can be to more
A crucible realizes that the material of load-bearing is each fallen within the range of the utility model protects, for brevity, herein no longer to earthenware
The all material that crucible stent may use is enumerated.The utility model does not make any limit to the concrete shape of crucible holder
System, all can be achieved on can also ensure that crucible crucible body can be entered in induction coil and make it while being supported to crucible
In Coating Materials be heated the crucible holder of evaporation, be included in the range of the utility model protects.
Moving mechanism is arranged on outside the vacuum chamber of coating machine, is extended in vacuum chamber and is connected with crucible holder, for driving
Crucible (hereinafter referred to as target crucible) movement where Coating Materials to be evaporated makes target crucible enter in induction coil.Its
In, moving mechanism can be such as elevating mechanism, rotating mechanism, transport mechanism, and correspondingly, moving mechanism drives crucible holder
Mobile mode includes rising, decline, translation, rotation etc..Moving mechanism can be only by driving crucible holder movement with band
The movement of moving-target crucible makes target crucible enter in induction coil, by the movement of driving crucible holder and can also directly drive
Target crucible mobile phase, which combines, makes target crucible enter in induction coil.The utility model to the concrete form of moving mechanism simultaneously
Any restriction is not done, it is every the movement in induction coil to be entered with moving-target crucible by driving crucible holder movement
Mechanism or by will driving crucible holder it is mobile and directly driving target crucible mobile phase and combining enters to target crucible
Moving mechanism in induction coil, is included in the range of the utility model protects.
Induction coil is arranged in the vacuum chamber of coating machine, for by being passed through high frequency electric to entering in the crucible in it
Coating Materials carry out heating evaporation.In the utility model, induction coil is set in a vacuum chamber on a fixed position.Appoint
Coating Materials in what crucible is heated before evaporation, which is required for entering in the induction coil, due to sensing
Coil is arranged on fixed position, therefore the Coating Materials in all crucibles is that evaporation is heated on same position,
That is only have an evaporation source and the position of the evaporation source in high-frequency induction heating vaporising device provided by the utility model
It is fixed, consequently, it is possible to can effectively ensure to evaporate the uniformity of angle and then ensure the uniformity of film thickness distribution.The line of induction
Circle be passed through high frequency electric after can generate heat, be burned in order to prevent, induction coil is preferably formed using hollow copper tubing coiling, by
The mode that coolant (such as water) is passed through inside it realizes cooling to induction coil.Further, since induction coil and crucible it
Between must have certain gap, therefore need when coiling induction coil is configured its coil diameter to ensure that crucible enters sense
It is not in contact after answering coil with induction coil.
Sealing mechanism is arranged between moving mechanism and vacuum chamber, close for being formed between moving mechanism and vacuum chamber
Envelope, to prevent extraneous air is entered in vacuum chamber with moving mechanism from being damaged to the vacuum environment needed for plated film.According to shifting
It whether there is relative motion between motivation structure and vacuum chamber, sealing mechanism accordingly uses static seal mode or dynamic sealing mode.
High-frequency induction heating vaporising device work when, after target crucible is determined, moving mechanism for example, by rise, under
Target crucible is moved in the induction coil of fixed position by the modes such as drop, rotation, translation, that is, makes line of induction ring
It is wound on around target crucible crucible body.After target crucible is entered in induction coil, moving mechanism is stopped.Next,
High frequency electric is passed through in induction coil, heating evaporation is carried out to the Coating Materials in target crucible.When plating membrane material in target crucible
After material is evaporated, determine the crucible of next thermal evaporation to be added as new target crucible.Determine new target crucible it
Afterwards, moving mechanism needs that the target crucible for having completed evaporation in induction coil is removed induction coil, Ran Houji first
It is continuous for example, by rising, declining, rotating, the mode such as translating and move into new target crucible in induction coil so as to this
Coating Materials in new target crucible carries out heating evaporation.Above-mentioned steps are repeated, until plating membrane material in the plurality of crucible
The whole heating evaporations of material finish, and coating process terminates.
Preferably, moving mechanism includes elevating mechanism and rotating mechanism, wherein, rotating mechanism extend in vacuum chamber with earthenware
Crucible stent connects, for driving crucible holder rotation with band moving-target crucible rotation；Elevating mechanism is connected with rotating mechanism, is used for
By driving rotating mechanism lifting to be extended to drive crucible holder to lift and then with moving-target crucible lifting, or elevating mechanism
In vacuum chamber, for driving target crucible lifting.Rotating mechanism and elevating mechanism cooperating make target crucible enter the line of induction
In circle.Specifically, be directed to for the mode that elevating mechanism is connected with rotating mechanism, rotating mechanism driving crucible holder rotation with
Band moving-target crucible rotation, elevating mechanism driving rotating mechanism lifting is so as to drive crucible holder to lift and then with moving-target crucible
Lifting, by the position of reasonable design crucible holder, induction coil, elevating mechanism and rotating mechanism can make target crucible into
Enter into induction coil；It is directed to elevating mechanism to extend to for the mode in vacuum chamber, rotating mechanism driving crucible holder rotation
Turn with band moving-target crucible rotation, elevating mechanism driving target crucible lifting, passes through reasonable design crucible holder, the line of induction
The position of circle, elevating mechanism and rotating mechanism can be such that target crucible enters in induction coil.In the following, with two specific implementations
Example respectively illustrates above two mode.
Please refer to Fig.2, Fig. 2 is an embodiment of high-frequency induction heating vaporising device according to the present utility model
Structure diagram.Wherein, in the high-frequency induction heating apparatus shown in Fig. 2, rotating mechanism and elevating mechanism cooperating, pass through
Driving crucible holder is entered to band moving-target crucible and heating evaporation is carried out in induction coil.
Specifically, as shown in the figure, in the present embodiment, holding Coating Materials using two identical crucibles, hereinafter
Two crucibles are represented with crucible 10a and crucible 10b respectively.It will be appreciated by persons skilled in the art that crucible quantity is equal to 2
Only schematic example, in other embodiments, the quantity of crucible can be with more than two, such as 3,4,5,6
Deng on the premise of the vacuum chamber space size of coating machine allows, crucible can be increased and decreased according to the actual demand of coating process
Quantity.In addition, those skilled in the art will also be appreciated that it is also only schematically to lift to carry out plated film using same crucible
Example, in other embodiments, can also hold Coating Materials using different crucibles.
Crucible holder 20 is horizontally set in the vacuum chamber of coating machine.In the present embodiment, crucible holder 20 is designed as justifying
Disk shape, offers the hole identical with crucible quantity above.Wherein, the shape in hole and the cross section of crucible are (i.e. parallel to crucible
The section of bottom surface) match but the size for being dimensioned slightly smaller than crucible opening in hole so that by crucible be put into hole with
Afterwards, crucible crucible body portion can not pass through the hole by the hole but crucible opening, that is to say, that crucible is suspended above earthenware
On crucible stent, consequently, it is possible to which the movement of one side crucible holder can drive crucible to move, on the other hand since crucible crucible body does not have
It is blocked so subsequently being entered easy to crucible in induction coil 30.Hole on crucible holder 20 is along using disc centre as the center of circle
Circle distribution.Preferably, the hole on crucible holder 20 is distributed along the even circumferential using disc centre as the center of circle.In the present embodiment
In, two holes on crucible holder 20 are respectively on two endpoints of a diameter of circumference.Due on crucible holder 20
Circumferentially, therefore crucible is placed on crucible holder 20 and also presents circumferentially in hole.In addition, in the present embodiment, earthenware
The material of crucible stent 20 is quartz.
Preferably, high-frequency induction heating vaporising device provided by the utility model further includes heat-insulating base 11, the heat-insulating base
11 are arranged between crucible holder 20 and crucible, wherein, the fusing point of heat-insulating base 11 is higher than the evaporating temperature of Coating Materials.Set every
The purpose of hot seat 11 is：Most of membrane materials must be all evaporated under 1000 DEG C to 2000 DEG C of evaporating temperature, work as plated film
When the evaporating temperature of material is higher than the fusing point of crucible holder 20, the place that is contacted with crucible where Coating Materials on crucible holder 20
Can melt, thus cause crucible holder 20 can not normal use, therefore, by being set between crucible and crucible holder 20
Dystectic heat-insulating base 11, can reach heat insulation so as to effectively prevent crucible holder 20 from melting.In the present embodiment
In, the material of heat-insulating base 11 can select ceramics or graphite.It will be appreciated by persons skilled in the art that the material of heat-insulating base 11
Material is not restricted to ceramics and graphite, and every fusing point is suitable for this practicality newly higher than the material of Coating Materials evaporating temperature
Type.In the present embodiment, the shape of heat-insulating base 11 matches with crucible shape, its size is slightly larger than the size of crucible, so that
Crucible can be placed in heat-insulating base 11 just.In use, the crucible for being cased with heat-insulating base 11 is placed on crucible holder 20, you can have
Effect ground is isolated crucible holder 20 with crucible.
The quantity of induction coil 30 is one, is arranged in circumference location directly below where crucible holder 20 opens up hole.
That is, crucible holder 20 is along during central shaft (i.e. perpendicular to disk and pass through disc centre axis) rotation, crucible branch
Kong Junhui on frame 20 passes through the surface of the induction coil 30.In the present embodiment, induction coil 30 is fixed on coating machine
On the bottom plate 40 of vacuum chamber.Induction coil 30 is formed by hollow copper tubing coiling, and two ports of hollow copper tubing are from the true of coating machine
Extended in empty room outside vacuum chamber, two ports respectively as coolant input port and output port, it is cold for being passed through
But liquid cools down the induction coil 30 in work.In addition, the port of hollow copper tubing outside vacuum chamber also with for sensing
Coil 30 provides the connection of high frequency electric power supply.
Preferably, high-frequency induction heating vaporising device provided by the utility model further includes heat insulation cylinder 12, wherein, sensing
Coil 30 is looped around on the outer surface of 12 side wall of heat insulation cylinder.Heat insulation cylinder 12 is using the insulated heat such as ceramics, quartz glass
Material is made.The size of heat insulation cylinder 12 is more than the size of crucible, so as to ensure that crucible can be entered in heat insulation cylinder 12.Work as sensing
Coil 30 produces electromagnetic field of high frequency after being passed through high frequency electric, and the Coating Materials under the sensing of the electromagnetic field of high frequency in crucible produces
Powerful vortex causes its heating evaporation, since heat insulation cylinder 12 is centered around outside crucible, can effectively prevent in crucible
Heat distributes, and is conducive to the heating evaporation of Coating Materials.
Moving mechanism further comprises elevating mechanism and rotational structure, wherein, elevating mechanism is connected with rotational structure, rotation
Structure is extended in vacuum chamber and is connected with crucible holder 20.Elevating mechanism is used for by driving rotating mechanism to rise to drive crucible
Stent 20 rises and then drives the bottom of the target crucible on crucible holder 20 to be higher than the top of induction coil 30, rotation
Mechanism is used to drive the rotation of crucible holder 20 to make target crucible lift along circle rotation where it to the surface of induction coil 30
Mechanism is additionally operable to by driving rotating mechanism to decline to drive crucible holder 20 to decline, drop to entrance and then with moving-target crucible
In induction coil 30.
As shown in Fig. 2, rotating mechanism further comprises electric rotating machine 60 and rotation axis 61.Electric rotating machine 60 is arranged on vacuum
The lower section of room, one end of rotation axis 61 are connected with electric rotating machine 60, and the bottom plate 40 of the other end through vacuum chamber extends to vacuum chamber
In be connected with crucible holder 20, consequently, it is possible to electric rotating machine 60 work when driving rotation axis 61 rotate and then drive crucible holder
20 rotations.In the present embodiment, crucible holder 20 is designed as disc-shape, and rotation axis 61 is connected with the center of crucible holder 20,
Crucible holder 20 is driven to be rotated along central shaft when rotation axis 61 rotates, so that the crucible on crucible holder 20 divides along it
The circular motion of cloth.In the present embodiment, electric rotating machine 60 can be using the high-precision electric rotating machine such as servomotor come real
It is existing.
As shown in Fig. 2, elevating mechanism further comprises lifting shaft 70, substrate 71, lifter plate 72 and lifting cylinder 73.Tool
Body, in the present embodiment, lifting shaft 70 is co-axially located at outside rotation axis 61, wherein, upper end and the vacuum chamber bottom of lifting shaft 70
Sealing mechanism 50 (hereinafter referred to as the first sealing mechanism 50) is provided between plate 40, which uses dynamic sealing side
Formula, is specially linear reciprocating motion sealing means, the lower end of lifting shaft 70 is fixedly connected with lifter plate 72.Rotation axis 61, which passes through, to be risen
Axis 70 drops, wherein, sealing mechanism is provided between rotation axis 61 and lifting shaft 70, and (not shown in figure, hereinafter referred to as second seals
Mechanism), which uses dynamic sealing mode, is specially rotatory sealing mode.Due to the first sealing mechanism 50 and
The presence of two sealing mechanisms so that lifting shaft 70 is in lifting process and the air in rotary course of rotation axis 61 will not enter
Into vacuum chamber, so as to ensure that plated film can carry out in vacuum environment.Electric rotating machine 60 is for example, by fixed knots such as stents
Structure is fixed with lifter plate 72.Substrate 71 is fixed with the first sealing mechanism 50, positioned at the top of lifter plate 72.Lifting cylinder 73
Cylinder body be fixed on substrate 71, the piston rod 74 of lifting cylinder 73 is connected with lifter plate 72.In the present embodiment, lifting cylinder
73 bottom is fixed on substrate 71, and the piston rod 74 of lifting cylinder 73 is connected through substrate 71 with lifter plate 72.In other realities
To apply in example, lifting cylinder 73 can also be arranged between substrate 71 and lifter plate 72, wherein, the top of lifting cylinder 73 and substrate
71 fix, and the piston rod 74 of lifting cylinder 73 is connected with lifter plate 72.When elevating mechanism works, lifting cylinder 73 passes through piston rod
74 drive the raising and lowering of lifter plate 72 and lifting shaft 70, the raising and lowering drive rotation of lifter plate 72 and lifting shaft 70
The raising and lowering of rotating motor 60, the raising and lowering of electric rotating machine 60 drive the raising and lowering of runing rest 20, rotation branch
The raising and lowering of frame 20 drives the raising and lowering positioned at crucible.Specifically, during 73 protruding piston rod 74 of lifting cylinder,
Piston rod 74 promotes lifter plate 72 to do descending motion, and at this time, lifter plate 72 is moved away from the direction of substrate 71, electric rotating machine
60 accordingly decline with the decline of lifter plate 72, and the decline of electric rotating machine 60 drives crucible holder 20 and crucible disposed thereon to do
Descending motion；When lifting cylinder 73 is to contract piston rod 74, piston rod 74 pulls lifter plate 72 to do ascending motion, at this time, rises
Drop plate 72 to move towards close to the direction of substrate 71, electric rotating machine 60 accordingly rises with the rising of lifter plate 72, electric rotating machine 60
Rising drive crucible holder 20 and crucible disposed thereon to do ascending motion.It should be noted that when lifting cylinder 73
When piston rod 74 is fully extended, under lifter plate 72 stops declining, and then electric rotating machine 60, crucible holder 20 and crucible also stop
Drop；When piston rod 74, which pulls lifter plate 72 to rise to, touches 73 bottom of lifting cylinder, (in the present embodiment, lifter plate 72 connects
Stop rising after contacting substrate 71, since the bottom of lifting cylinder 73 is fixed on substrate 71, connect equivalent to lifter plate 72
Contact the bottom of lifting cylinder 73), lifter plate 72 stops rising, and then electric rotating machine 60, crucible holder 20 and crucible also stop
Only rise.In the present embodiment, by the lifting distance of lifter plate 72 be defined as lifter plate 72 stop decline when its position with
When the distance between its position when stopping rising due to the position of 73 bottom of lifting cylinder is that lifter plate 72 stops rising
The position at place, therefore, lifter plate 72 and lifting cylinder 73 when the lifting distance of lifter plate 72 is fully extended equal to piston rod 74
The distance between bottom.
Preferably, in order to make the lifting distance of lifter plate 72 can flexible modulation to adapt to plurality of application scenes, elevating mechanism
Further comprise adjusting screw rod 75 and nut 76, the adjusting screw rod 75 and nut 76 are used cooperatively to realize to lifter plate 72
The adjusting of lifting distance.Specifically, one end of adjusting screw rod 75 is connected with piston rod 74, and the other end passes through nut 76 and lifter plate
72 connections, can change the link position between lifter plate 72 and adjusting screw rod 75, so as to change piston by adjusting nut 76
The distance between lifter plate 72 and 73 bottom of lifting cylinder when bar 74 is fully extended, and then change the lifting distance of lifter plate 72.
In practical applications, length that can be according to the specific requirements of 72 lifting distance scope of lifter plate to piston rod 74 in lifting cylinder 73
The length of degree and adjusting screw rod 75 is correspondingly set.
Preferably, elevating mechanism further includes guide rod 77 (hereafter being represented with the first guide rod 77), first guide rod 77
Be arranged between substrate 71 and lifter plate 72, one end of first guide rod 77 with substrate 71 is fixed, the other end passes through lifter plate
72, drive lower edge first guide rod 77 raising and lowering of the lifter plate 72 in piston rod 74.Specifically, in this embodiment, first
The quantity of guide rod 77 is one.The utility model for the first guide rod 77 setting position and any restriction is not present,
In the present embodiment, the first guide rod 77 and lifting shaft 70 are distributed in the both sides of piston rod 74.When elevating mechanism works, lifter plate 72
Also moved while following piston rod 74 to move along the first guide rod 77, lifter plate 73 is played in the presence of the first guide rod 77
Guiding role well, is effectively guaranteed the vertical lift of lifter plate 72, so that ensure that the vertical lift of lifting shaft 70,
And then it ensure that the vertical lift of crucible holder 20 and crucible.
Preferably, high-frequency induction heating vaporising device provided by the utility model further includes the first detent mechanism, this
One detent mechanism is connected with rotating mechanism, for detect target crucible rotation to induction coil 30 surface when triggering rotation
Rotation mechanism is stopped.Specifically, in the present embodiment, the first detent mechanism includes the first locating plate and multiple first photoelectricity
Position-sensing switch, wherein, the quantity of the first photoelectricity position-sensing switch it is equal with crucible quantity (crucible quantity is equal to 2 in the present embodiment, the
The quantity of one photoelectricity position-sensing switch is also equal in 2, Fig. 2 represent with reference numeral 81a and 81b respectively).In the present embodiment,
One locating plate is realized using positioning pointer 80.Positioning pointer 80 is fixed in rotation axis 61, and it is fixed to be driven when rotation axis 61 rotates
80 synchronous rotary of bit pointer；Multiple first photoelectricity position-sensing switches are corresponded with multiple crucibles, are arranged circumferentially at rotation axis 61
Around, wherein, the position of the plurality of first photoelectricity position-sensing switch is configured as：When target crucible rotation to induction coil 30 just
During top, rotation to the position where the first photoelectricity position-sensing switch corresponding with target crucible, triggering should just for positioning pointer 80
First photoelectricity position-sensing switch produce be used to controlling control signal that electric rotating machine 60 is stopped and by the control signal send to
Electric rotating machine 60, electric rotating machine 60 are stopped after receiving control signal, so that target crucible stops at induction coil 30
Surface.In a kind of allocation plan, the angle formed between any crucible in positioning pointer 80 and multiple crucibles is equal to
The angle formed between the first photoelectricity position-sensing switch and induction coil 30 corresponding to any crucible, consequently, it is possible to when fixed
It is proper with the crucible corresponding to the first photoelectricity position-sensing switch when bit pointer 80 is rotated to certain first photoelectricity position-sensing switch position
It is good to rotate to the surface of induction coil 30.That is, once positioning pointer 80 has blocked certain first photoelectricity position-sensing switch hair
Light path between emitter and receiver, then explanation and the corresponding crucible rotation of the first photoelectricity position-sensing switch have arrived induction coil
30 surface.It will be appreciated by persons skilled in the art that the first locating plate is not restricted to the form of positioning pointer,
In another embodiment, the first locating plate can also be realized using the catch with opening, wherein, opening in catch with it is more
The angle formed between any crucible in a crucible is equal to the first photoelectricity position-sensing switch and sense corresponding to any crucible
The angle formed between coil 30 is answered, consequently, it is possible to where the opening in catch is rotated to certain first photoelectricity position-sensing switch
During position, rotated just to the surface of induction coil 30 with the crucible corresponding to the first photoelectricity position-sensing switch.That is,
Once light path is established between first its transmitter of photoelectricity position-sensing switch and receiver in multiple first photoelectricity position-sensing switches,
Then explanation has arrived the surface of induction coil 30 with the corresponding crucible rotation of the first photoelectricity position-sensing switch, and at this time, this first
Photoelectricity position-sensing switch produces the control signal for being used for controlling electric rotating machine 60 to be stopped and sends the control signal to rotation
Motor 60, electric rotating machine 60 are stopped after receiving control signal, so that target crucible is stopping at induction coil 30 just
Top.Target crucible, which is positioned, using the first locating plate and the first photoelectricity position-sensing switch is advantageous in that：High-precision rotary
Motor (such as servomotor) can ensure that target crucible is rotated to the surface of induction coil 30 exactly, but high accuracy rotation
Rotating motor is often expensive, can directly result in the raising of high-frequency induction heating vaporising device holistic cost, and uses first to determine
Bit slice and the first photoelectricity position-sensing switch exactly can also position target crucible, with common electric rotating machine with the use of i.e. reachable
To the effect as high-precision rotary motor, but but well below high-precision rotary motor in cost, therefore substantially reduce
The holistic cost of high-frequency induction heating vaporising device.Those skilled in the art will also be appreciated that above-mentioned first locating plate
Be merely a preferred embodiment with multiple first photoelectricity position-sensing switches, in other embodiments, it is every can to target crucible into
The detent mechanism that row is accurately positioned is included in the range of the utility model protects, for brevity, not another herein
One enumerates.
Preferably, high-frequency induction heating vaporising device provided by the utility model further includes antifouling board 90 and guide rod 91
(hereafter being represented with the second guide rod 91), in other crucibles during for preventing the Coating Materials heating evaporation in target crucible
Coating Materials pollutes.Specifically, 90 and second guide rod 91 of antifouling board is respectively provided with a vacuum chamber.Antifouling board 90 is arranged on
The top of multiple crucibles, is flexibly connected for example, by bearing 92 with crucible holder 20.One end of second guide rod 91 is fixed on very
On empty room bottom plate 40, the other end pass through antifouling board 90.Herein any restriction is not done to the quantity of the second guide rod 91, can be one
Root can also be more.In the present embodiment, the quantity of the second guide rod is 2.On the one hand, since antifouling board 90 passes through bearing
92 and crucible holder 20 be flexibly connected, therefore antifouling board 90 simply with 20 raising and lowering of crucible holder, without with crucible branch
Frame 20 rotates；On the other hand, rotation of the presence of the second guide rod 91 further to antifouling board 90 plays restriction effect, with this
It can also ensure the vertical lift of antifouling board 90 at the same time.30 corresponding position of induction coil is provided with opening on antifouling board 90
(please referring to Fig.3), consequently, it is possible in the high-frequency induction heating vaporising device course of work, the Coating Materials in target crucible is sudden and violent
Reveal in a vacuum chamber, and other crucibles outside target crucible are blocked by antifouling board 90, so as to efficiently avoid target earthenware
The Coating Materials in other crucibles is polluted during Coating Materials heating evaporation in crucible.
In the following, the course of work of the high-frequency induction heating vaporising device shown in Fig. 2 will be illustrated with reference to Fig. 4 to Fig. 6.
Specifically, the high-frequency induction heating vaporising device shown in Fig. 2 includes crucible 10a and crucible 10b, crucible 10a and earthenware
Crucible 10b circumferentially, is particularly located at the both ends of the circle diameter on crucible holder 20.Crucible 10a is positioned at sensing in Fig. 2
In coil 30, that is to say, that current target crucible is crucible 10a.Here it is assumed that the Coating Materials in crucible 10a is evaporated
Finish, next the Coating Materials in crucible 10b will be evaporated, i.e. crucible 10b is using as new target crucible.First light
Electric position-sensing switch 81a and the first photoelectricity position-sensing switch 81b correspond respectively to crucible 10a and crucible 10b, at this time, positioning pointer 80
It is located exactly between the first photoelectricity position-sensing switch 81a transmitters and receiver.In the present embodiment, positioning pointer 80, the first light
Position between electric position-sensing switch 81a, the first photoelectricity position-sensing switch 81b, crucible 10a, crucible 10b and induction coil 30 by with
It is set to：The angle that positioning pointer 80 and crucible 10a is formed is equal to 180 °, the first photoelectricity position-sensing switch 81a and induction coil 30
Between the angle that is formed be equal to 180 °；The angle that positioning pointer 80 and crucible 10b is formed is equal to 0 °, and the positioning of the first photoelectricity is opened
Close the angle formed between 81b and induction coil 30 and be equal to 0 °.In addition, when crucible 10a is located in induction coil 30, lifting
The piston rod 74 of cylinder 73 is fully extended, and lifter plate 72 drops to extreme lower position.
Please refer to Fig.4, it is determined that after new target crucible is crucible 10b, it is necessary first to by crucible 10a from induction coil 30
Middle removal.As shown in figure 4, lifting cylinder 73 shrink piston rod 74, piston rod 74 pull lifter plate 72 rise, lifter plate 72 it is upper
Rise drive electric rotating machine 60 to rise, the rising of electric rotating machine 60 drives crucible holder 20 and crucible disposed thereon to rise, and works as liter
When dropping the bottom of the arrival lifting cylinder 73 of plate 72, lifter plate 72 stops rising, and the bottom of the crucible on crucible holder 20 is high at this time
In the top of induction coil 30, crucible 10a is completely removed from induction coil 30.Then, Fig. 5, electric rotating machine 60 be refer to
Start to work, drive crucible holder 20 and positioning pointer 80 to rotate by rotation axis 61, the crucible 10a on crucible holder 20 and
Crucible 10b is also rotated with.Positioning pointer 80 reaches the first photoelectricity position-sensing switch 81b positions after have rotated 180 °, and first
Light path between photoelectricity position-sensing switch 81b transmitters and receiver is positioned pointer 80 and blocks, at this time, triggering the first photoelectricity positioning
Switch 81b produces the control signal for being used for controlling electric rotating machine 60 to be stopped and sends the control signal to electric rotating machine
60, electric rotating machine 60 is stopped after receiving control signal.While positioning pointer 80 rotates 180 °, crucible 10b is also corresponding
180 ° are have rotated, reaches the surface of induction coil 30 just, therefore, crucible 10b is stopped at when electric rotating machine 60 is stopped
The surface of induction coil 30.Then, Fig. 6 is refer to, lifting cylinder 73 stretches out piston rod 74, and piston rod 74 promotes lifter plate 72
Decline, the decline of lifter plate 72 drives electric rotating machine 60 to decline, and the decline of electric rotating machine 60 drives crucible holder 20 and positioned at it
On crucible decline, crucible 10 steps into induction coil 30 in the process, when the piston rod 74 of lifting cylinder 73 is complete
Full lifter plate 72 reaches its extreme lower position and no longer declines when stretching out, and the crucible body of crucible 10b is completely into induction coil 30 at this time
In.Induction coil 30 is passed through high frequency electric and carries out heating evaporation to the Coating Materials in crucible 10b.Crucible quantity in the present embodiment
For two, if crucible quantity more than two in other embodiment, repeat the above steps up to the Coating Materials in all crucibles
Whole heating evaporations finish, and coating process terminates.
Fig. 7 is refer to, Fig. 7 is another specific embodiment party of high-frequency induction heating vaporising device according to the present utility model
The structure diagram of formula.Wherein, in the high-frequency induction heating apparatus shown in Fig. 7, rotating mechanism is by driving crucible holder with band
Moving-target crucible is moved to the underface of induction coil, and then elevating mechanism directly drives target crucible and rises in induction coil
Carry out heating evaporation.
Specifically, in the present embodiment, still illustrated so that two identical crucibles hold Coating Materials as an example.Such as Fig. 7
Shown, which is represented with crucible 10a' and crucible 10b' respectively.Wherein, in crucible 10a' and crucible 10b' and Fig. 2
Crucible 10a and crucible 10b corresponds to identical or essentially identical respectively, and for brevity, description to crucible 10a' and 10b' please
With reference to the associated description for being hereinbefore directed to crucible 10a and crucible 10b, details are not described herein.
Crucible holder 20' is horizontally set in the vacuum chamber of coating machine, for propping up crucible 10a' and crucible 10b'
Support.Wherein, crucible holder 20' and the crucible holder 20 in Fig. 2 are corresponding identical or essentially identical, for brevity, to crucible
The description of stent 20' refer to the associated description for being hereinbefore directed to crucible holder 20, and details are not described herein.
The quantity of induction coil 30' is one, is arranged on the position of the surface of circumference where crucible holder 20' opens up hole
On.That is, crucible holder 20' is along during central shaft (i.e. perpendicular to disk and pass through disc centre axis) rotation, earthenware
Kong Junhui on crucible stent 20' passes through the underface of induction coil 30'.In the present embodiment, induction coil 30' is fixed on
On the side wall 41 of vacuum chamber of film coating machine.
Moving mechanism includes rotating mechanism and elevating mechanism, wherein, rotational structure extend in vacuum chamber with crucible holder
20' connections, elevating mechanism are extended in vacuum chamber from positioned at induction coil 30' location directly below.It is first when moving mechanism works
First rotating mechanism is by driving crucible holder 20', to the underface of induction coil 30', then to be lifted with moving-target crucible rotation
Mechanism, which directly drives target crucible, to be left crucible holder 20' and ascends into induction coil, and after evaporation, elevating mechanism drives
Moving-target crucible is lowered away from induction coil 30' and returns on crucible holder 20'.
As shown in fig. 7, rotating mechanism further comprises electric rotating machine 60' and rotation axis 61'.Electric rotating machine 60' is arranged on
The lower section of vacuum chamber, one end of rotation axis 61' are connected with electric rotating machine 60', and the bottom plate 40 of the other end through vacuum chamber extends to
It is connected in vacuum chamber with crucible holder 20', consequently, it is possible to drive rotation axis 61' rotations and then band when electric rotating machine 60' works
Dynamic crucible holder 20' rotations.Wherein, sealing mechanism 52'(is provided between rotation axis 61' and vacuum chamber bottom plate 40 hereinafter referred to as
3rd sealing mechanism 52'), the 3rd sealing mechanism 52' uses dynamic sealing mode, is specially rotatory sealing mode.Due to the 3rd
The presence of sealing mechanism 52' so that rotation axis 61' air in rotary course will not be entered in vacuum chamber, so as to ensure that
Plated film can carry out in vacuum environment.In the present embodiment, fixed plate 63', electric rotating are provided with the 3rd sealing mechanism 52'
Machine 60' is fixed on fixed plate 63'.Elevating mechanism further comprises lifting motor 100', elevating lever 101' and crucible holder
102'.Lifting motor 100' is arranged on the lower section of vacuum chamber, and one end of elevating lever 101' is connected with lifting motor 100', the other end
Extend in vacuum chamber, crucible holder 102' is arranged on one end that elevating lever 101' is located in vacuum chamber.Wherein, elevating lever 101'
The 4th sealing mechanism (not shown) is provided between vacuum chamber bottom plate 40, the 4th sealing mechanism uses dynamic sealing mode, tool
Body is linear reciprocating motion sealing means.Due to the presence of the 4th sealing mechanism so that elevating lever 101' is hollow in lifting process
Gas will not be entered in vacuum chamber.Crucible holder 102' can select the heat-resisting materials such as tungsten, molybdenum or graphite to realize.Elevating mechanism
During work, lifting motor 100' drives elevating lever 101' risings crucible holder 102' is lifted target crucible and leaves crucible holder 20'
In into induction coil 30' and the 101' declines of driving elevating lever make crucible holder 102' band moving-target crucibles leave induction coil
30' is returned on crucible holder 20'.In the present embodiment, lifting motor 100' can use the high accuracy rotation such as servomotor
Rotating motor.The convert rotational motion of lifting motor 100' is the linear motion of elevating lever 101' when elevating mechanism works, so that real
Now drive the raising and lowering of crucible holder.In other embodiments, lifting motor 100' can also use stepper motor to realize.
Preferably, high-frequency induction heating vaporising device provided by the utility model further includes the second detent mechanism, this
Two detent mechanisms are connected with rotating mechanism, for detect target crucible rotation to induction coil 30' underface when trigger
Rotating mechanism is stopped.Specifically, in the present embodiment, the second detent mechanism includes the second locating plate and multiple second light
Electric position-sensing switch, wherein, the quantity of the second photoelectricity position-sensing switch it is equal with crucible quantity (crucible quantity is equal to 2 in the present embodiment,
The quantity of second photoelectricity position-sensing switch is also equal in 2, Fig. 7 represent with reference numeral 81a' and 81b' respectively).Second locating plate is set
Put on rotation axis 61', rotation axis 61' rotations drive the rotation of the second locating plate.Second photoelectricity position-sensing switch and multiple crucibles one
One corresponds to, its position is configured as, when the underface on the target crucible rotation to induction coil 30', the second locating plate
Just rotation triggers the second photoelectricity position-sensing switch generation to the position where the corresponding second photoelectricity position-sensing switch of target crucible
For controlling control signal that electric rotating machine 61' is stopped and sending the control signal to electric rotating machine 60'.In this implementation
In example, the second locating plate is realized using positioning pointer 80'.Wherein, in the second locating plate, the second photoelectricity position-sensing switch and Fig. 2
The first locating plate, the first photoelectricity position-sensing switch correspond to respectively it is identical or essentially identical, for brevity, to the second locating plate
The descriptions such as set-up mode, the course of work with the second photoelectricity position-sensing switch, which refer to, is hereinbefore directed to the first locating plate and first
The related content of photoelectricity position-sensing switch, details are not described herein.
Preferably, high-frequency induction heating vaporising device provided by the utility model further includes the 3rd detent mechanism, this
Three detent mechanisms are connected with elevating mechanism, for detecting that target crucible stops into induction coil 30' internal trigger elevating mechanisms
Only work and elevating mechanism stopping is triggered after induction coil 30' is returned on crucible holder 20' detecting that target crucible leaves
Work.Specifically, in the present embodiment, the 3rd detent mechanism include the 3rd locating plate, the 3rd photoelectricity position-sensing switch 104' and
4th photoelectricity position-sensing switch 105'.In the present embodiment, the 3rd locating plate is realized using positioning pointer 103'.Positioning pointer
103' is arranged on elevating lever 101', and elevating lever 101' raising and lowerings drive positioning pointer 103' raising and lowerings.3rd light
The position of electric position-sensing switch 104' and the 4th photoelectricity position-sensing switch 105' are configured as, when target crucible enters in induction coil
During 30', positioning pointer 103' is moved to the position where the 3rd photoelectricity position-sensing switch 104' just, triggers the positioning of the 3rd photoelectricity
Switch 104' produces the control signal for being used for controlling lifting motor 100' to be stopped and sends the control signal to lifting electricity
Machine 100', and when target crucible is returned on crucible holder and crucible holder 102' drops to and do not influence crucible holder and continue to rotate
When, positioning pointer 103' is moved to the position where the 4th photoelectricity position-sensing switch 105' just, triggers the 4th photoelectricity and determines
Bit switch 105' produces the control signal for being used for controlling lifting motor 100' to be stopped and sends the control signal to lifting
Motor 100'.In a kind of allocation plan, the 3rd photoelectricity position-sensing switch 104' and the 4th photoelectricity position-sensing switch 105' are arranged on flat
For row on the straight line of elevating lever 101', the distance between the 3rd photoelectricity position-sensing switch 104' and the 4th photoelectricity position-sensing switch 105' are proper
It is equal to the distance that target crucible is moved to from crucible holder 20' in induction coil 30' well, moreover, when positioning pointer 103' is located at
When between the transmitter and receiver of the 3rd photoelectricity position-sensing switch 104', target crucible is located exactly in induction coil 30', when fixed
When bit pointer 103' is located between the transmitter and receiver of the 4th photoelectricity position-sensing switch 105', target crucible has returned to crucible
On stent 20'.Consequently, it is possible to when target crucible is ascended into induction coil 30', positioning pointer 103' blocks just
Light path between three photoelectricity position-sensing switch 104' transmitters and receiver, lifting motor 100', which is stopped, at this time no longer drives liter
Drop bar 101' continues to rise；After target crucible is returned on crucible holder 20', the lucky 4th photoelectricity positioning of positioning pointer 103'
Switch the light path between 105' transmitters and receiver, at this time lifting motor 100' be stopped no longer drive elevating lever 101' after
It is continuous to decline.Target crucible is positioned using the 3rd locating plate, the 3rd photoelectricity position-sensing switch and the 4th photoelectricity position-sensing switch
It is advantageous in that：High-precision motor (such as servomotor or stepper motor) can ensure that target crucible rises to sensing exactly
In coil 30', but high-precision rotary motor is often expensive, can directly result in high-frequency induction heating vaporising device integral into
This raising, and use the 3rd locating plate, the 3rd photoelectricity position-sensing switch and the 4th photoelectricity position-sensing switch can also be right exactly
Target crucible positions, with common electric rotating machine with the use of the effect that can reach as high-precision rotary motor, but into
But well below high-precision rotary motor in sheet, therefore greatly reduce the holistic cost of high-frequency induction heating vaporising device.This
Field technology personnel will also be appreciated that above-mentioned 3rd locating plate, the 3rd photoelectricity position-sensing switch and the positioning of the 4th photoelectricity are opened
Pass is merely a preferred embodiment, in other embodiments, every detent mechanism that target crucible can be accurately positioned
It is included in the range of the utility model protects, for brevity, will not enumerate herein.
Preferably, high-frequency induction heating vaporising device provided by the utility model further includes antifouling board 90', for preventing
The Coating Materials in other crucibles is polluted during Coating Materials heating evaporation in target crucible.Specifically, antifouling board 90'
It is fixedly provided in the position above multiple crucibles, position corresponding with induction coil 30' in vacuum chamber and is provided with opening,
The size of opening needs to ensure that target crucible can be smoothly through.Wherein, antifouling board 90' and 90 corresponding phase of antifouling board in Fig. 3
Same or essentially identical, therefore, the structure of antifouling board 90' may be referred to the structure of antifouling board 90 in Fig. 3.The utility model will be to that will prevent
The mode that dirty plate 90' is fixed above multiple crucibles is not intended to be limited in any.In the present embodiment, will by fixed column 93'
Antifouling board 90' is fixed on above multiple crucibles, as shown in fig. 7, fixed column 93' is also provided with a vacuum chamber, the one of fixed column 93'
End is fixed on vacuum chamber bottom plate 40, the other end and antifouling board 90' are fixed.The quantity of fixed column 93' is not appointed herein
What is limited, and it can also be more that can be one.The utility model is to the solid connections between crucible holder 20' of antifouling board 90'
Mode is not limited in any way, both it between can be flexibly connected for example, by bearing 92', any connection can not also be made.It is anti-
Position corresponding with induction coil 30' is provided with opening on dirty plate 90', consequently, it is possible in high-frequency induction heating vaporising device work
During work, target crucible is risen in induction coil 30' by the opening, and Coating Materials therein exposes in a vacuum chamber,
And the lower section that other crucibles outside target crucible are respectively positioned on antifouling board 90' is blocked by it, so as to efficiently avoid target earthenware
The Coating Materials in other crucibles is polluted during Coating Materials heating evaporation in crucible.
In the following, the course of work of the high-frequency induction heating vaporising device shown in Fig. 7 is illustrated using Fig. 7 and Fig. 8, its
In, Fig. 8 is the schematic diagram that target crucible enters in induction coil in high-frequency induction heating vaporising device shown in Fig. 7.
Specifically, the high-frequency induction heating vaporising device shown in Fig. 7 includes crucible 10a' and crucible 10b', crucible 10a' and
Crucible 10b' circumferentially, is particularly located at the both ends of the circle diameter on crucible holder 20'.It is assumed that crucible 10a' is mesh
Crucible is marked, and crucible 10a' has been rotated into the underface of induction coil 30'.Please with reference first to Fig. 7, lifting motor in Fig. 7
100' driving elevating levers 101' rises so that crucible holder 102' lifts crucible 10a' and leaves crucible holder 20', correspondingly, positioned at liter
The positioning pointer 103' dropped on bar 101' rises also with elevating lever 101'.Please continue to refer to Fig. 8, as shown in the figure, when positioning refers to
When pin 103' rises to the 3rd photoelectricity position-sensing switch 104' positions, shelter from the 3rd photoelectricity position-sensing switch 104' transmitters and
Light path between receiver, triggering lifting motor 100' are stopped, and the crucible body of crucible 10a' is completely into the line of induction at this time
Enclose in 30'.Induction coil 30' is passed through high frequency electric and carries out heating evaporation to the Coating Materials in crucible 10a'.
Heating evaporation finishes, and lifting motor 100' driving elevating levers 101' declines so that crucible holder 102' lifts crucible 10a'
Induction coil 30' is left, correspondingly, the positioning pointer 103' on elevating lever 101' declines also with elevating lever 101'.When
When positioning pointer 103' drops to the 4th photoelectricity position-sensing switch 105' positions, the 4th photoelectricity position-sensing switch 105' hairs are sheltered from
Light path between emitter and receiver, triggering lifting motor 100' are stopped, and crucible 10a' returns to crucible holder 20' at this time
On.Next, crucible 10b' to be set as to new target crucible, repeat the above steps and the Coating Materials in crucible 10b' is carried out
Heating evaporation.Crucible quantity is two in the present embodiment, if crucible quantity more than two in other embodiment, repeats above-mentioned step
The rapid Coating Materials whole heating evaporation up in all crucibles finishes, and coating process terminates.
It is obvious to a person skilled in the art that the utility model is not limited to the details of above-mentioned one exemplary embodiment, and
And in the case of the spirit or essential attributes without departing substantially from the utility model, it can realize that this practicality is new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this practicality is new
The scope of type is indicated by the appended claims rather than the foregoing description, it is intended that the equivalency fallen in claim is contained
All changes in justice and scope are included in the utility model.Any reference numeral in claim should not be considered as limitation
Involved claim.Furthermore, it is to be understood that one word of " comprising " is not excluded for miscellaneous part, unit or step, odd number is not excluded for plural number.
Multiple components, unit or the device stated in system claims can also by a component, unit or device by software or
Person hardware is realized.
High-frequency induction heating vaporising device provided by the utility model is by moving mechanism's driving on crucible holder
Multiple crucibles in target crucible enter be arranged in the induction coil on fixed position, and by the induction coil lead to
Enter high frequency electric and heating evaporation is carried out to the Coating Materials in the target crucible to realize coating process.Compared with prior art,
The advantages of high-frequency induction heating apparatus provided by the utility model, includes：(1) evaporation source only has one and position is fixed, but can
To configure multiple crucibles, wherein, evaporation source only has one and position fixation can ensure to evaporate the uniformity of angle so as to ensure
The uniformity of film thickness distribution, and then ensure the quality of coating process, and multiple crucibles then can effectively increase Coating Materials
The species of capacity and Coating Materials, makes high-frequency induction heating vaporising device provided by the utility model can be adapted for plating
The capacity and species of membrane material have the various application scenarios of different demands；(2) crucible quantity can in the range of allowing in space
Arbitrarily to increase or reduce according to specific requirements, layout is convenient, it is high to customize degree；(3) due to there was only an evaporation source, because
This needs a set of power-supply system for being used to provide high frequency electric, that is to say, that need not be extra while crucible quantity increase
Increase the quantity of power-supply system, so as to effectively save the cost of high-frequency induction heating vaporising device.
Above disclosed is only some preferred embodiments of the utility model, cannot limit this reality with this certainly
With new interest field, therefore the equivalent variations made according to the utility model claims, still belong to the utility model and covered
Scope.
Claims (18)
1. a kind of high-frequency induction heating vaporising device, which includes：
Multiple crucibles, crucible holder, induction coil, moving mechanism and sealing mechanism, wherein, the multiple crucible, the earthenware
Crucible stent, the induction coil are set in a vacuum chamber, and the moving mechanism is arranged on outside the vacuum chamber；
The multiple crucible, for holding Coating Materials；
The crucible holder, for being supported to the multiple crucible；
The moving mechanism, extends in the vacuum chamber and is connected with the crucible holder, for driving in the multiple crucible
Target crucible movement make the target crucible enter the induction coil in；
The induction coil, for carrying out heating evaporation to the Coating Materials in the target crucible by being passed through high frequency electric；
The sealing mechanism, is arranged between the moving mechanism and the vacuum chamber, in the moving mechanism and described
Sealing is formed between vacuum chamber.
2. high-frequency induction heating vaporising device according to claim 1, it is characterised in that：
The moving mechanism includes elevating mechanism and rotating mechanism；
The rotating mechanism is extended in the vacuum chamber and is connected with the crucible holder, for driving the crucible holder to rotate
To drive the target crucible rotation；
The elevating mechanism is connected with the rotating mechanism, for by driving the rotating mechanism lifting to drive the crucible
Stent lifts and then drives the target crucible lifting；Alternatively, the elevating mechanism is extended in the vacuum chamber, for driving
The target crucible lifting；
The rotating mechanism and the elevating mechanism cooperating make the target crucible enter in the induction coil.
3. high-frequency induction heating vaporising device according to claim 2, it is characterised in that：
The crucible holder is horizontally disposed with the vacuum chamber；
The multiple crucible on the crucible holder circumferentially；
The induction coil is arranged in the circumference location directly below；
The elevating mechanism is connected with the rotating mechanism, for by driving the rotating mechanism to rise to drive the crucible
Stent rises the top for making the bottom of the target crucible be higher than the induction coil；
The rotating mechanism, for driving crucible holder rotation to make the target crucible along the circle rotation to the sense
Answer the surface of coil；
The elevating mechanism, is additionally operable to make the mesh by driving the rotating mechanism to decline to drive the crucible holder to decline
Crucible is marked to enter in the induction coil.
4. high-frequency induction heating vaporising device according to claim 3, it is characterised in that：
The rotating mechanism includes electric rotating machine and rotation axis；
The electric rotating machine is arranged on the lower section of the vacuum chamber, and one end of the rotation axis is connected with the electric rotating machine, is another
The bottom plate of one end through the vacuum chamber is extended in the vacuum chamber to be connected with the crucible holder, wherein, the electric rotating
Machine drives the rotation axis rotation to drive the crucible holder to rotate when working.
5. high-frequency induction heating vaporising device according to claim 4, it is characterised in that：
The elevating mechanism includes lifting shaft, substrate, lifter plate and lifting cylinder；
The lifter plate is connected with the electric rotating machine；
The lifting shaft is co-axially located at outside the rotation axis, one end of the lifting shaft and the fixed company of lifter plate sealing
Connect, the other end is formed by the sealing mechanism and the vacuum chamber bottom plate and sealed；
The substrate is connected with the sealing mechanism；
The cylinder body of the lifting cylinder is fixed on the substrate, and the piston rod of the lifting cylinder is connected with the lifter plate；
During the elevating mechanism work, the lifting cylinder drives the lifter plate and the lifting shaft by the piston rod
Raising and lowering so that drive the raising and lowering of the electric rotating machine and the crucible holder.
6. high-frequency induction heating vaporising device according to claim 5, it is characterised in that the elevating mechanism further includes：
Adjusting screw rod and the nut being used cooperatively with the adjusting screw rod, wherein, one end of the adjusting screw rod and the piston
Bar connection, the other end are connected by the nut with the lifter plate, and the lifting is adjusted by the position for adjusting the nut
The lifting distance of plate.
7. high-frequency induction heating vaporising device according to claim 5, it is characterised in that the elevating mechanism further includes：
First guide rod, first guide rod are arranged between the substrate and the lifter plate, first guide rod
One end with the substrate is fixed, the other end passes through the lifter plate, described in drive lower edge of the lifter plate in the piston rod
First guide rod raising and lowering.
8. the high-frequency induction heating vaporising device according to any one of claim 3 to 7, it is characterised in that the high frequency
Sensing heating vaporising device further includes：
First detent mechanism, is connected with the rotating mechanism, for detecting the target crucible rotation to the line of induction
The rotating mechanism is triggered during the surface of circle to be stopped.
9. high-frequency induction heating vaporising device according to claim 8, it is characterised in that the first detent mechanism bag
Include：
First locating plate and the multiple first photoelectricity position-sensing switches being equal with crucible quantity；
First locating plate is arranged in the rotation axis, and the rotation axis rotation drives the first locating plate rotation；
The multiple first photoelectricity position-sensing switch is corresponded with the multiple crucible, its position is configured as, when the target
Crucible rotation to the induction coil surface when, first locating plate just rotation to corresponding with the target crucible
Position where first photoelectricity position-sensing switch, triggers the first photoelectricity position-sensing switch and produces for controlling the electric rotating machine to stop
The control signal of work simultaneously sends the control signal to the electric rotating machine.
10. the high-frequency induction heating vaporising device according to any one of claim 3 to 7, it is characterised in that the high frequency
Sensing heating vaporising device further includes：
Antifouling board and the second guide rod, the antifouling board and the second guide rod are arranged in the vacuum chamber；
The antifouling board is arranged on the top of the multiple crucible, is flexibly connected with the crucible holder, wherein, the antifouling board
Position corresponding with the induction coil is provided with opening；
One end of second guide rod is fixed on the bottom plate of the vacuum chamber, the other end passes through the antifouling board, described anti-
Second guide rod raising and lowering described in drive lower edge of the dirty plate in the crucible holder.
11. high-frequency induction heating vaporising device according to claim 2, it is characterised in that：
The crucible holder is horizontally disposed with the vacuum chamber；
The multiple crucible on the crucible holder circumferentially；
The induction coil is arranged on the position directly over the circumference；
The rotating mechanism, for driving crucible holder rotation to make the target crucible along the circle rotation to the sense
Answer the underface of coil；
The elevating mechanism is extended in the vacuum chamber from positioned at the induction coil location directly below, described for driving
Target crucible leaves the crucible holder and ascends into the induction coil and drive the target crucible to be lowered away from institute
Induction coil is stated to return on the crucible holder.
12. high-frequency induction heating vaporising device according to claim 11, it is characterised in that：
The rotating mechanism includes electric rotating machine and rotation axis；
The electric rotating machine is arranged on outside the vacuum chamber, and one end of the rotation axis is connected with the electric rotating machine, the other end
Extend in the vacuum chamber and be connected with the crucible holder, wherein, the electric rotating machine drives the rotation axis to revolve when working
Turn to drive the crucible holder to rotate.
13. the high-frequency induction heating vaporising device according to claim 11 or 12, it is characterised in that the high-frequency induction adds
Heat evaporating device further includes：
Second detent mechanism, is connected with the rotating mechanism, for detecting the target crucible rotation to the line of induction
The rotating mechanism is triggered during the underface of circle to be stopped.
14. high-frequency induction heating vaporising device according to claim 13, it is characterised in that the second detent mechanism bag
Include：
Second locating plate and the multiple second photoelectricity position-sensing switches being equal with crucible quantity；
Second locating plate is arranged in the rotation axis, and the rotation axis rotation drives the locating plate rotation；
The multiple second photoelectricity position-sensing switch is corresponded with the multiple crucible, its position is configured as, when the target
Crucible rotation to the induction coil underface when, second locating plate just rotation to corresponding with the target crucible
Position where second photoelectricity position-sensing switch, triggers the second photoelectricity position-sensing switch and produces for controlling the electric rotating machine to stop
The control signal of work simultaneously sends the control signal to the electric rotating machine.
15. high-frequency induction heating vaporising device according to claim 11, it is characterised in that：
The elevating mechanism includes lifting motor, elevating lever and crucible holder；
The lifting motor is arranged on the lower section of the vacuum chamber, and one end of the elevating lever is connected with the lifting motor, is another
One end is extended in the vacuum chamber, and the crucible holder is arranged on one end that the elevating lever is located in the vacuum chamber；
During the elevating mechanism work, the lifting motor, which drives the elevating lever to rise, makes the crucible holder lift the target
Crucible leaves the crucible holder and enters in the induction coil and drive the elevating lever decline to drive the crucible holder
The target crucible leaves the induction coil and returns on the crucible holder.
16. high-frequency induction heating vaporising device according to claim 15, it is characterised in that the high-frequency induction heating is steamed
Transmitting apparatus further includes：
3rd detent mechanism, is connected with the elevating mechanism, for detecting that the target crucible enters the induction coil
Triggered when interior the elevating mechanism be stopped and detect the target crucible leave the induction coil return to it is described
The elevating mechanism is triggered when on crucible holder to be stopped.
17. high-frequency induction heating vaporising device according to claim 16, it is characterised in that：
3rd detent mechanism includes the 3rd locating plate, the 3rd photoelectricity position-sensing switch and the 4th photoelectricity position-sensing switch；
3rd locating plate is arranged on the elevating lever, the elevating lever raising and lowering drive the locating plate rise and
Decline；
The position of the 3rd photoelectricity position-sensing switch and the 4th photoelectricity position-sensing switch is configured as, when the target crucible into
When entering in the induction coil, the 3rd locating plate is moved to the position where the 3rd photoelectricity position-sensing switch just, touches
Send out the 3rd photoelectricity position-sensing switch and produce and be used to controlling control signal that the lifting motor is stopped and by the control signal
Send to the lifting motor, and after the target crucible is returned on the crucible holder, the 3rd locating plate is lucky
The position being moved to where the 4th photoelectricity position-sensing switch, triggers the 4th photoelectricity position-sensing switch and produces for controlling the liter
Drop the control signal that motor is stopped and send the control signal to the lifting motor.
18. high-frequency induction heating vaporising device according to claim 11, it is characterised in that the high-frequency induction heating is steamed
Transmitting apparatus further includes：
Antifouling board, is fixedly provided in the position above the multiple crucible in the vacuum chamber, with the induction coil
Corresponding position is provided with opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721163764.8U CN207362324U (en) | 2017-09-08 | 2017-09-08 | High-frequency induction heating vaporising device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721163764.8U CN207362324U (en) | 2017-09-08 | 2017-09-08 | High-frequency induction heating vaporising device |
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| Publication Number | Publication Date |
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| CN207362324U true CN207362324U (en) | 2018-05-15 |
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| CN201721163764.8U Expired - Fee Related CN207362324U (en) | 2017-09-08 | 2017-09-08 | High-frequency induction heating vaporising device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107400860A (en) * | 2017-09-08 | 2017-11-28 | 霍尔果斯迅奇信息科技有限公司 | High-frequency induction heating vaporising device |
| CN110715843A (en) * | 2018-07-11 | 2020-01-21 | 四川赛恩思仪器有限公司 | Automatic sample feeding mechanism for metal material detection |
-
2017
- 2017-09-08 CN CN201721163764.8U patent/CN207362324U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107400860A (en) * | 2017-09-08 | 2017-11-28 | 霍尔果斯迅奇信息科技有限公司 | High-frequency induction heating vaporising device |
| CN110715843A (en) * | 2018-07-11 | 2020-01-21 | 四川赛恩思仪器有限公司 | Automatic sample feeding mechanism for metal material detection |
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Effective date of registration: 20180720 Address after: 065201 Hebei Xingyuan Nonferrous Metal Material Co., Ltd. in Yanjiao High-tech Zone of Sanhe City, Langfang City, Hebei Province Patentee after: SANHE HENG YUE VACUUM EQUIPMENT Co.,Ltd. Address before: 835221 Holzer, Kazakhstan Autonomous Prefecture, the Xinjiang Uygur Autonomous Region, 1 1-110-577, European classic residential quarter, Yili. Patentee before: HORGOS XUNQI INFORMATION TECHNOLOGY CO.,LTD. |
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