CN207175782U - Anti reflection glass - Google Patents
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- CN207175782U CN207175782U CN201720993472.0U CN201720993472U CN207175782U CN 207175782 U CN207175782 U CN 207175782U CN 201720993472 U CN201720993472 U CN 201720993472U CN 207175782 U CN207175782 U CN 207175782U
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Abstract
本实用新型涉及一种减反射玻璃。一种减反射玻璃,包括依次层叠的玻璃基板、第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层;玻璃基材为钠钙玻璃、硼硅玻璃或铝硅玻璃;第一高折射率层为Si3N4层,厚度为12nm~30nm;第一低折射率层为SiO2层,厚度为20nm~40nm;第二高折射率层为Si3N4层,厚度为50nm~150nm;第二低折射率层为SiO2层,厚度为50nm~100nm;及保护层为ZrO2层、Si3N4层或SiC层。上述减反射玻璃可见光反射率≤5%,且膜层数量和厚度都有所减少,使得减反射玻璃的厚度更小,满足产品小型化的需求;同时,上述减反射玻璃具有耐磨性、耐划伤性能及良好的耐酸碱腐蚀性,使得减反射玻璃可户外使用。
The utility model relates to an anti-reflection glass. An anti-reflection glass, comprising a glass substrate, a first high-refractive-index layer, a first low-refractive-index layer, a second high-refractive-index layer, a second low-refractive-index layer and a protective layer laminated in sequence; the glass base material is sodium calcium Glass, borosilicate glass or aluminosilicate glass; the first high refractive index layer is Si 3 N 4 layers with a thickness of 12nm to 30nm; the first low refractive index layer is SiO 2 layer with a thickness of 20nm to 40nm; the second high refractive index layer The index layer is Si 3 N 4 layer with a thickness of 50nm-150nm; the second low refractive index layer is SiO 2 layer with a thickness of 50nm-100nm; and the protective layer is ZrO 2 layer, Si 3 N 4 layer or SiC layer. The visible light reflectance of the above-mentioned anti-reflection glass is ≤5%, and the number and thickness of the film layers are reduced, so that the thickness of the anti-reflection glass is smaller, which meets the needs of product miniaturization; at the same time, the above-mentioned anti-reflection glass is wear-resistant, durable Scratch performance and good acid and alkali corrosion resistance make the anti-reflection glass suitable for outdoor use.
Description
技术领域technical field
本实用新型涉及玻璃领域,特别是涉及减反射玻璃。The utility model relates to the field of glass, in particular to anti-reflection glass.
背景技术Background technique
众所周知,光在两种介质的界面上会发生反射现象,在当今以玻璃幕墙为外壳的建筑体上,当太阳光照射到玻璃表面时,其反射光会对环境形成严重的光污染。为了解决这些问题,通常在玻璃的表面镀上一定厚度的单层或多层薄膜,目的是为了减少玻璃表面的反射光,这样的光学膜就是减反膜(Anti-reflection film)。As we all know, light will reflect on the interface of two media. In today's buildings with glass curtain wall as the shell, when sunlight hits the glass surface, the reflected light will cause serious light pollution to the environment. In order to solve these problems, a single-layer or multi-layer film of a certain thickness is usually coated on the surface of the glass in order to reduce the reflected light on the glass surface. Such an optical film is an anti-reflection film (Anti-reflection film).
然而目前对于玻璃制品的轻质化有了更多要求,在达到玻璃制品使用需求的基础上也需要减反射玻璃的厚度更小,且对于户外使用的减反膜玻璃,对其耐划伤、耐研磨及耐腐蚀性也有了更高的要求。However, there are more requirements for the light weight of glass products at present. On the basis of meeting the requirements for the use of glass products, the thickness of anti-reflection glass is also required to be smaller, and for anti-reflection coated glass used outdoors, it is scratch-resistant, There are also higher requirements for abrasive resistance and corrosion resistance.
实用新型内容Utility model content
基于此,有必要针对减反射玻璃厚度和耐划伤、耐研磨及耐腐蚀性不足的问题,提供一种减反射玻璃。Based on this, it is necessary to provide an anti-reflection glass for the problems of anti-reflection glass thickness and insufficient scratch resistance, abrasion resistance and corrosion resistance.
一种减反射玻璃,所述减反射玻璃包括依次层叠的玻璃基板、第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层;An antireflection glass, the antireflection glass comprising a glass substrate, a first high refractive index layer, a first low refractive index layer, a second high refractive index layer, a second low refractive index layer and a protective layer laminated in sequence;
所述第一高折射率层为Si3N4层,所述第一高折射率层的厚度为12nm~30nm;The first high refractive index layer is a Si 3 N 4 layer, and the thickness of the first high refractive index layer is 12 nm to 30 nm;
所述第一低折射率层为SiO2层,所述第一低折射率层的厚度为20nm~40nm;The first low refractive index layer is a SiO 2 layer, and the thickness of the first low refractive index layer is 20nm to 40nm;
所述第二高折射率层为Si3N4层,所述第二高折射率层的厚度为50nm~150nm;The second high refractive index layer is a Si 3 N 4 layer, and the thickness of the second high refractive index layer is 50nm-150nm;
所述第二低折射率层为SiO2层,所述第二低折射率层的厚度为50nm~100nm;及The second low refractive index layer is a SiO 2 layer, and the thickness of the second low refractive index layer is 50nm-100nm; and
所述保护层为ZrO2层、Si3N4层或SiC层。The protection layer is a ZrO 2 layer, a Si 3 N 4 layer or a SiC layer.
在其中一个实施方式中,所述玻璃基板的厚度为3mm~19mm。In one embodiment, the glass substrate has a thickness of 3 mm to 19 mm.
在其中一个实施方式中,所述保护层的厚度为2nm~20nm。In one embodiment, the protective layer has a thickness of 2 nm to 20 nm.
在其中一个实施方式中,所述第一高折射率层的厚度为12nm~20nm。In one embodiment, the thickness of the first high refractive index layer is 12nm-20nm.
在其中一个实施方式中,所述第一低折射率层的厚度为20nm~35nm。In one embodiment, the thickness of the first low refractive index layer is 20nm-35nm.
在其中一个实施方式中,所述第二高折射率层的厚度为80nm~140nm。In one embodiment, the thickness of the second high refractive index layer is 80nm-140nm.
在其中一个实施方式中,所述第二低折射率层的厚度为50nm~90nm。In one embodiment, the thickness of the second low refractive index layer is 50nm-90nm.
在其中一个实施方式中,所述第一高折射率层为Si3N4层,所述第一高折射率层的厚度为14nm;所述第一低折射率层为SiO2层,所述第一低折射率层的厚度为29.6nm;所述第二高折射率层为Si3N4层,所述第二高折射率层的厚度为119.1nm;所述第二低折射率层为SiO2层,所述第二低折射率层的厚度为72nm。In one of the implementations, the first high refractive index layer is a Si 3 N 4 layer, and the thickness of the first high refractive index layer is 14nm; the first low refractive index layer is a SiO 2 layer, and the The thickness of the first low refractive index layer is 29.6nm; the second high refractive index layer is Si 3 N 4 layer, the thickness of the second high refractive index layer is 119.1nm; the second low refractive index layer is SiO 2 layer, the thickness of the second low refractive index layer is 72nm.
在其中一个实施方式中,所述第一高折射率层为Si3N4层,所述第一高折射率层的厚度为14nm;所述第一低折射率层为SiO2层,所述第一低折射率层的厚度为28nm;所述第二高折射率层为Si3N4层,所述第二高折射率层的厚度为113.5nm;所述第二低折射率层为SiO2层,所述第二低折射率层的厚度为63nm。In one of the implementations, the first high refractive index layer is a Si 3 N 4 layer, and the thickness of the first high refractive index layer is 14nm; the first low refractive index layer is a SiO 2 layer, and the The thickness of the first low refractive index layer is 28nm; the second high refractive index layer is Si 3 N 4 layer, the thickness of the second high refractive index layer is 113.5nm; the second low refractive index layer is SiO 2 layers, the thickness of the second low refractive index layer is 63nm.
上述减反射玻璃,由于包括依次层叠于玻璃基板的第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层,且对上述膜层的材料及厚度进行限定,使得上述减反射玻璃的可见光反射率≤5%,且上述减反射玻璃膜层数量和厚度都有所减少,使得减反射玻璃的厚度更小,满足产品小型化的需求;同时,上述减反射玻璃具有耐磨性、耐划伤性能及良好的耐酸碱腐蚀性,使得减反射玻璃可户外使用。The above-mentioned anti-reflection glass includes the first high-refractive index layer, the first low-refractive-index layer, the second high-refractive-index layer, the second low-refractive-index layer and the protective layer laminated in sequence on the glass substrate, and the above-mentioned film layer The material and thickness are limited so that the visible light reflectance of the above-mentioned anti-reflection glass is ≤5%, and the number and thickness of the above-mentioned anti-reflection glass film layers are reduced, so that the thickness of the anti-reflection glass is smaller to meet the needs of product miniaturization; At the same time, the above-mentioned anti-reflection glass has wear resistance, scratch resistance and good acid and alkali corrosion resistance, so that the anti-reflection glass can be used outdoors.
附图说明Description of drawings
图1为一实施方式的减反射玻璃的结构示意图;1 is a schematic structural view of an anti-reflection glass according to an embodiment;
图2为一实施方式的减反射玻璃的制备方法的工艺流程图。Fig. 2 is a process flow diagram of a method for preparing anti-reflection glass according to an embodiment.
具体实施方式Detailed ways
下面将结合具体实施方式及附图对减反射玻璃及其制备方法作进一步的详细说明。The anti-reflection glass and its preparation method will be further described in detail below in conjunction with specific embodiments and accompanying drawings.
请参阅图1,一实施方式的减反射玻璃100包括玻璃基板110、第一高折射率层120、第一低折射率层130、第二高折射率层140、第二低折射率层150及保护层160。Please refer to FIG. 1 , an anti-reflection glass 100 of an embodiment includes a glass substrate 110, a first high refractive index layer 120, a first low refractive index layer 130, a second high refractive index layer 140, a second low refractive index layer 150 and protective layer 160 .
在图示的实施方式中,玻璃基板110为经过清洗抛光处理后的玻璃基板。在其中一个实施方式中,玻璃基板110的厚度为3mm~19mm。优选的,玻璃基板的厚度为3mm、4mm、5mm、6mm、8mm、10mm、12mm、15mm或19mm。在其中一个实施方式中,玻璃基板110的最大玻璃尺寸为3300mm*6000mm。In the illustrated embodiment, the glass substrate 110 is a cleaned and polished glass substrate. In one embodiment, the thickness of the glass substrate 110 is 3mm˜19mm. Preferably, the thickness of the glass substrate is 3mm, 4mm, 5mm, 6mm, 8mm, 10mm, 12mm, 15mm or 19mm. In one embodiment, the maximum glass size of the glass substrate 110 is 3300mm*6000mm.
在其中一个实施方式中,玻璃基板110为钠钙玻璃、硼硅玻璃或铝硅玻璃。In one embodiment, the glass substrate 110 is soda lime glass, borosilicate glass or aluminosilicate glass.
在其中一个实施方式中,玻璃基板110的的折射率为1.47~1.55。In one embodiment, the refractive index of the glass substrate 110 is 1.47˜1.55.
在图示的实施方式中,第一高折射率层120层叠于玻璃基板110的表面。第一高折射率层120为Si3N4层。在其中一个实施方式中,第一高折射率层120的折射率为2.0~2.35。在其中一个实施方式中,第一高折射率层120的厚度为12nm~30nm。优选的,第一高折射率层120的厚度为12nm~20nm。更优选的,第一高折射率层120的厚度为12nm~18nm。第一高折射率层120主要起到和玻璃基板连接的作用,第一高折射率层120也能调节反射色性能,并阻挡玻璃中碱金属离子的扩散。In the illustrated embodiment, the first high refractive index layer 120 is laminated on the surface of the glass substrate 110 . The first high refractive index layer 120 is a Si 3 N 4 layer. In one embodiment, the refractive index of the first high refractive index layer 120 is 2.0-2.35. In one implementation manner, the thickness of the first high refractive index layer 120 is 12 nm˜30 nm. Preferably, the thickness of the first high refractive index layer 120 is 12nm-20nm. More preferably, the thickness of the first high refractive index layer 120 is 12nm-18nm. The first high refractive index layer 120 is mainly used to connect with the glass substrate. The first high refractive index layer 120 can also adjust the reflective color performance and block the diffusion of alkali metal ions in the glass.
在图示的实施方式中,第一低折射率层130层叠于第一高折射率层120远离玻璃基板110的表面。第一低折射率层130为SiO2层。在其中一个实施方式中,第一低折射率层130的折射率为1.47~1.53。在其中一个实施方式中,第一低折射率层130的厚度为20nm~40nm。优选的,第一低折射率层130的厚度为20nm~35nm。更优选的,第一低折射率层130的厚度为25nm~30nm。第一低折射率层130的主要作用是调节膜层的干涉及外观颜色。In the illustrated embodiment, the first low refractive index layer 130 is stacked on the surface of the first high refractive index layer 120 away from the glass substrate 110 . The first low refractive index layer 130 is a SiO 2 layer. In one embodiment, the refractive index of the first low refractive index layer 130 is 1.47˜1.53. In one implementation manner, the thickness of the first low refractive index layer 130 is 20 nm˜40 nm. Preferably, the thickness of the first low refractive index layer 130 is 20 nm˜35 nm. More preferably, the thickness of the first low refractive index layer 130 is 25nm-30nm. The main function of the first low refractive index layer 130 is to adjust the interference and appearance color of the film layer.
在图示的实施方式中,第二高折射率层140层叠于第一低折射率层130远离第一高折射率层120的表面。第二高折射率层140为Si3N4层。在其中一个实施方式中,第二高折射率层140的折射率为2.0~2.35。在其中一个实施方式中,第二高折射率层140的厚度为50nm~150nm。优选的,第二高折射率层140的厚度为80nm~140nm。更优选的,第二高折射率层140的厚度为100nm~120nm。第二高折射率层140的主要作用是调节膜层的干涉及外观颜色。In the illustrated embodiment, the second high refractive index layer 140 is stacked on the surface of the first low refractive index layer 130 away from the first high refractive index layer 120 . The second high refractive index layer 140 is a Si 3 N 4 layer. In one embodiment, the refractive index of the second high refractive index layer 140 is 2.0-2.35. In one implementation manner, the thickness of the second high refractive index layer 140 is 50 nm˜150 nm. Preferably, the thickness of the second high refractive index layer 140 is 80nm-140nm. More preferably, the thickness of the second high refractive index layer 140 is 100 nm˜120 nm. The main function of the second high refractive index layer 140 is to adjust the interference and appearance color of the film layer.
在图示的实施方式中,第二低折射率层150层叠于第二高折射率层140远离第一低折射率层130的表面。第二低折射率层150为SiO2层。在其中一个实施方式中,第二低折射率层150的折射率为1.47~1.53。在其中一个实施方式中,第二低折射率层150的厚度为50nm~100nm。优选的,第二低折射率层150的厚度为50nm~90nm。更优选的,第二低折射率层150的厚度为50nm~80nm。第二低折射率层150的主要作用是调节膜层的干涉及外观颜色。In the illustrated embodiment, the second low refractive index layer 150 is stacked on the surface of the second high refractive index layer 140 away from the first low refractive index layer 130 . The second low refractive index layer 150 is a SiO 2 layer. In one embodiment, the refractive index of the second low refractive index layer 150 is 1.47˜1.53. In one implementation manner, the thickness of the second low refractive index layer 150 is 50 nm˜100 nm. Preferably, the thickness of the second low refractive index layer 150 is 50nm-90nm. More preferably, the thickness of the second low refractive index layer 150 is 50nm-80nm. The main function of the second low refractive index layer 150 is to adjust the interference and appearance color of the film layer.
在图示的实施方式中,保护层160层叠于第二低折射率层150远离第二高折射率层140放入表面。在其中一个实施方式中,保护层160为ZrO2层、Si3N4层或SiC层。优选的,保护层160为ZrO2层或Si3N4层。更优选的,保护层160为Si3N4层。在其中一个实施方式中,保护层160的厚度为2nm~20nm。优选的,保护层160的厚度为4nm~15nm。更优选的,保护层160的厚度为5nm~8nm。保护层160是磁控溅射镀制的抗划伤性材料,具有耐划伤、耐研磨及耐腐蚀的效果。保护层160的主要功能是使减玻璃100能够暴露在户外环境使用,也可防止镀膜层出现划伤、化学腐蚀等缺陷,保证产品在运输、安装及使用过程中的整体性。In the illustrated embodiment, the protective layer 160 is stacked on the surface of the second low refractive index layer 150 away from the second high refractive index layer 140 . In one embodiment, the protection layer 160 is a ZrO 2 layer, a Si 3 N 4 layer or a SiC layer. Preferably, the protection layer 160 is a ZrO 2 layer or a Si 3 N 4 layer. More preferably, the protection layer 160 is a Si 3 N 4 layer. In one embodiment, the protective layer 160 has a thickness of 2 nm˜20 nm. Preferably, the thickness of the protection layer 160 is 4nm˜15nm. More preferably, the protective layer 160 has a thickness of 5nm˜8nm. The protection layer 160 is a scratch-resistant material plated by magnetron sputtering, which has effects of scratch resistance, abrasion resistance and corrosion resistance. The main function of the protective layer 160 is to enable the glass 100 to be exposed to outdoor environments, and to prevent scratches, chemical corrosion and other defects on the coating layer, so as to ensure the integrity of the product during transportation, installation and use.
上述减反射玻璃,由于包括依次层叠于玻璃基板的第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层,且对上述膜层的材料及厚度进行限定,使得上述减反射玻璃的可见光反射率≤5%,且上述减反射玻璃膜层数量和厚度都有所减少,使得减反射玻璃的厚度更小,满足产品小型化的需求;同时,上述减反射玻璃具有耐磨性、耐划伤性能及良好的耐酸碱腐蚀性,使得减反射玻璃可户外使用。上述减反射玻璃可以单片镀膜玻璃的形式应用于户外,也可以使减反射玻璃的减反射镀膜表面暴露于户外环境使用。The above-mentioned anti-reflection glass includes the first high-refractive index layer, the first low-refractive-index layer, the second high-refractive-index layer, the second low-refractive-index layer and the protective layer laminated in sequence on the glass substrate, and the above-mentioned film layer The material and thickness are limited so that the visible light reflectance of the above-mentioned anti-reflection glass is ≤5%, and the number and thickness of the above-mentioned anti-reflection glass film layers are reduced, so that the thickness of the anti-reflection glass is smaller to meet the needs of product miniaturization; At the same time, the above-mentioned anti-reflection glass has wear resistance, scratch resistance and good acid and alkali corrosion resistance, so that the anti-reflection glass can be used outdoors. The above-mentioned anti-reflection glass can be used outdoors in the form of a single piece of coated glass, or the anti-reflection coated surface of the anti-reflection glass can be exposed to the outdoor environment for use.
另外,上述减反射玻璃膜层厚度为纳米级,且膜层结构中不含有Ag、Au等贵金属,大大降低了生产成本;减反射玻璃具有可调的外观颜色效果,可根据客户需求进行调整,满足差异化需求;采用了固态纯无机材料,避免了有机化学生产原料对环境及人体的污染及损害;上述减反射玻璃可以大板进行销售,可实现产品外协厂的后续加工,带动了整个玻璃深加工企业,进一步整合并提高了生产效率及成本的降低。In addition, the thickness of the above-mentioned anti-reflection glass film layer is nano-scale, and the film layer structure does not contain precious metals such as Ag and Au, which greatly reduces the production cost; the anti-reflection glass has an adjustable appearance color effect, which can be adjusted according to customer needs. Meet the needs of differentiation; use solid pure inorganic materials to avoid pollution and damage to the environment and human body caused by organic chemical production raw materials; Glass deep-processing enterprises have further integrated and improved production efficiency and reduced costs.
请参阅图2,一实施方式的减反射玻璃的制备方法,包括以下步骤:Please refer to Fig. 2, the preparation method of the anti-reflection glass of an embodiment, comprises the following steps:
S110、对玻璃基板进行清洗处理。S110 , cleaning the glass substrate.
在其中一个实施方式中,玻璃基板为钠钙玻璃、硼硅玻璃或铝硅玻璃。In one embodiment, the glass substrate is soda lime glass, borosilicate glass or aluminosilicate glass.
在其中一个实施方式中,采用自动清洗机对玻璃基板进行清洗。In one of the embodiments, an automatic cleaning machine is used to clean the glass substrate.
S120、在玻璃基板上依次沉积第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层。S120, sequentially depositing a first high-refractive index layer, a first low-refractive-index layer, a second high-refractive-index layer, a second low-refractive-index layer, and a protective layer on the glass substrate.
在其中一个实施方式中,通过磁控溅射的方式在玻璃基板上依次沉积第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层。In one of the embodiments, the first high-refractive index layer, the first low-refractive-index layer, the second high-refractive-index layer, the second low-refractive-index layer, and the protective layer are sequentially deposited on the glass substrate by magnetron sputtering. .
在其中一个实施方式中,采用卧式镀膜工艺进行镀膜。In one of the implementation manners, a horizontal coating process is used for coating.
在其中一个实施方式中,磁控溅射的功率为15KW~75KW;磁控溅射的动态沉积率为1.2nm·(m/min)/KW~4.5nm·(m/min)/KW;磁控溅射的真空度为3*10-3mbar~8*10- 3mbar。In one of the embodiments, the power of magnetron sputtering is 15KW~75KW; the dynamic deposition rate of magnetron sputtering is 1.2nm·(m/min)/KW~4.5nm·(m/min)/KW; The vacuum degree of controlled sputtering is 3*10 -3 mbar~8*10 - 3 mbar.
在其中一个实施方式中,第一高折射率层的材料为Si3N4,第一高折射率层的厚度为12nm~30nm;第一低折射率层的材料为SiO2,第一低折射率层的厚度为20nm~40nm;第二高折射率层的材料为Si3N4,第二高折射率层的厚度为50nm~150nm;第二低折射率层的材料为SiO2,第二低折射率层的厚度为50nm~100nm;及保护层的材料选自ZrO2、Si3N4和SiC中的至少一种。In one embodiment, the material of the first high-refractive index layer is Si 3 N 4 , and the thickness of the first high-refractive index layer is 12 nm to 30 nm; the material of the first low-refractive index layer is SiO 2 , and the first low-refractive index layer is The thickness of the index layer is 20nm-40nm; the material of the second high-refractive-index layer is Si 3 N 4 , the thickness of the second high-refractive-index layer is 50nm-150nm; the material of the second low-refractive-index layer is SiO 2 , and the second The thickness of the low refractive index layer is 50nm-100nm; and the material of the protective layer is selected from at least one of ZrO 2 , Si 3 N 4 and SiC.
上述减反射玻璃的制备方法采用卧式镀膜工艺通过磁控溅射的方式进行镀膜处理,可以实现大批量大尺寸的生产,减反射玻璃的最大尺寸可达3300mm*5200mm,简化制备工艺及缩短生产周期,降低成本的同时生产效率得到极大的提高,更有利于实现工业化生产。The preparation method of the above-mentioned anti-reflection glass adopts the horizontal coating process to carry out coating treatment by means of magnetron sputtering, which can realize large-scale and large-scale production, and the maximum size of the anti-reflection glass can reach 3300mm*5200mm, simplifying the preparation process and shortening the production cycle, while reducing costs, the production efficiency has been greatly improved, which is more conducive to the realization of industrialized production.
下面是具体实施例的说明,以下实施例如无特殊说明,则不含有除不可避免的结构以外的其他未明确指出的结构。The following is the description of the specific embodiments. If there is no special description, the following embodiments do not contain other unspecified structures except unavoidable structures.
实施例1Example 1
对玻璃基板进行清洗处理,采用卧式镀膜工艺通过磁控溅射的方式在玻璃基板上依次沉积第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层。其中,玻璃基板为超白钠钙玻璃,玻璃基板的厚度为6mm;第一高折射率层为Si3N4层,膜层厚度为14nm;第一低折射率层为SiO2层,膜层厚度为29.6nm;第二高折射率层为Si3N4层,膜层厚度为119.1nm;第二低折射率层为SiO2层,膜层厚度为72nm;保护层为Si3N4层,膜层厚度为5nm。进行磁控溅射的功率为20KW~75KW;磁控溅射的动态沉积率为1.5nm·(m/min)/KW~4.5nm·(m/min)/KW;磁控溅射的真空度为3.5*10-3mbar~7.6*10-3mbar。The glass substrate is cleaned, and the first high-refractive index layer, the first low-refractive-index layer, the second high-refractive-index layer, the second low-refractive index layer, and rate layer and protection layer. Among them, the glass substrate is ultra-white soda lime glass, and the thickness of the glass substrate is 6mm; the first high refractive index layer is Si 3 N 4 layers, and the thickness of the film layer is 14nm; the first low refractive index layer is SiO 2 layer, and the film layer The thickness is 29.6nm; the second high refractive index layer is Si 3 N 4 layer, the film thickness is 119.1nm; the second low refractive index layer is SiO 2 layer, the film thickness is 72nm; the protective layer is Si 3 N 4 layer , the film thickness is 5nm. The power for magnetron sputtering is 20KW~75KW; the dynamic deposition rate of magnetron sputtering is 1.5nm·(m/min)/KW~4.5nm·(m/min)/KW; the vacuum degree of magnetron sputtering 3.5*10 -3 mbar ~ 7.6*10 -3 mbar.
实施例2Example 2
对玻璃基板进行清洗处理,采用卧式镀膜工艺通过磁控溅射的方式在玻璃基板上依次沉积第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层。其中,玻璃基板为超白钠钙玻璃,玻璃基板的厚度为6mm;第一高折射率层为Si3N4层,膜层厚度为14nm;第一低折射率层为SiO2层,膜层厚度为28nm;第二高折射率层为Si3N4层,膜层厚度为113.5nm;第二低折射率层为SiO2层,膜层厚度为63nm;保护层为Si3N4层,膜层厚度为6nm。进行磁控溅射的功率为20KW~70KW;磁控溅射的动态沉积率为1.5nm·(m/min)/KW~4.2nm·(m/min)/KW;磁控溅射的真空度为3.5*10-3mbar~7.6*10-3mbar。The glass substrate is cleaned, and the first high-refractive index layer, the first low-refractive-index layer, the second high-refractive-index layer, the second low-refractive index layer, and rate layer and protection layer. Among them, the glass substrate is ultra-white soda lime glass, and the thickness of the glass substrate is 6mm; the first high refractive index layer is Si 3 N 4 layers, and the thickness of the film layer is 14nm; the first low refractive index layer is SiO 2 layer, and the film layer The thickness is 28nm; the second high refractive index layer is Si 3 N 4 layer, the film thickness is 113.5nm; the second low refractive index layer is SiO 2 layer, the film thickness is 63nm; the protective layer is Si 3 N 4 layer, The film thickness is 6nm. The power of magnetron sputtering is 20KW~70KW; the dynamic deposition rate of magnetron sputtering is 1.5nm·(m/min)/KW~4.2nm·(m/min)/KW; the vacuum degree of magnetron sputtering 3.5*10 -3 mbar ~ 7.6*10 -3 mbar.
实施例3Example 3
对玻璃基板进行清洗处理,采用卧式镀膜工艺通过磁控溅射的方式在玻璃基板上依次沉积第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层。其中,玻璃基板为超白钠钙玻璃,玻璃基板的厚度为6mm;第一高折射率层为Si3N4层,膜层厚度为12nm;第一低折射率层为SiO2层,膜层厚度为25nm;第二高折射率层为Si3N4层,膜层厚度为108.9nm;第二低折射率层为SiO2层,膜层厚度为55nm;保护层为Si3N4层,膜层厚度为6nm。进行磁控溅射的功率为15KW~65KW;磁控溅射的动态沉积率为1.2nm·(m/min)/KW~4nm·(m/min)/KW;磁控溅射的真空度为3.5*10-3mbar~7.6*10-3mbar。The glass substrate is cleaned, and the first high-refractive index layer, the first low-refractive-index layer, the second high-refractive-index layer, the second low-refractive index layer, and rate layer and protection layer. Among them, the glass substrate is ultra-white soda-lime glass, and the thickness of the glass substrate is 6 mm; the first high refractive index layer is Si 3 N 4 layers, and the thickness of the film layer is 12 nm; the first low refractive index layer is SiO 2 layer, and the film layer The thickness is 25nm; the second high refractive index layer is Si 3 N 4 layer, the film thickness is 108.9nm; the second low refractive index layer is SiO 2 layer, the film thickness is 55nm; the protective layer is Si 3 N 4 layer, The film thickness is 6nm. The power of magnetron sputtering is 15KW~65KW; the dynamic deposition rate of magnetron sputtering is 1.2nm·(m/min)/KW~4nm·(m/min)/KW; the vacuum degree of magnetron sputtering is 3.5* 10-3 mbar~7.6* 10-3 mbar.
实施例4Example 4
对玻璃基板进行清洗处理,采用卧式镀膜工艺通过磁控溅射的方式在玻璃基板上依次沉积第一高折射率层、第一低折射率层、第二高折射率层、第二低折射率层及保护层。其中,玻璃基板为超白钠钙玻璃,玻璃基板的厚度为6mm;第一高折射率层为Si3N4层,膜层厚度为18nm;第一低折射率层为SiO2层,膜层厚度为25.5nm;第二高折射率层为Si3N4层,膜层厚度为102nm;第二低折射率层为SiO2层,膜层厚度为60nm;保护层为Si3N4层,膜层厚度为7.8nm。进行磁控溅射的功率为20KW~63KW;磁控溅射的动态沉积率为1.5nm·(m/min)/KW~4nm·(m/min)/KW;磁控溅射的真空度为3.5*10-3mbar~7.6*10-3mbar。The glass substrate is cleaned, and the first high-refractive index layer, the first low-refractive-index layer, the second high-refractive-index layer, the second low-refractive index layer, and rate layer and protection layer. Among them, the glass substrate is ultra-white soda lime glass, and the thickness of the glass substrate is 6mm; the first high refractive index layer is Si 3 N 4 layers, and the thickness of the film layer is 18nm; the first low refractive index layer is SiO 2 layer, and the film layer The thickness is 25.5nm; the second high refractive index layer is Si 3 N 4 layer, the film thickness is 102nm; the second low refractive index layer is SiO 2 layer, the film thickness is 60nm; the protective layer is Si 3 N 4 layer, The film thickness is 7.8nm. The power of magnetron sputtering is 20KW~63KW; the dynamic deposition rate of magnetron sputtering is 1.5nm·(m/min)/KW~4nm·(m/min)/KW; the vacuum degree of magnetron sputtering is 3.5* 10-3 mbar~7.6* 10-3 mbar.
对实施例1~4的减反射玻璃进行可见光反射率及透过率的测试,结果如表1所示。其中,进行可见光反射率测试采用datacolor厂家的650仪器测试得到,进行透过率测试采用datacolor厂家的650仪器测试得到。The visible light reflectance and transmittance tests were performed on the anti-reflection glasses of Examples 1-4, and the results are shown in Table 1. Among them, the visible light reflectance test is obtained by using the 650 instrument of datacolor manufacturer, and the transmittance test is obtained by using the 650 instrument of datacolor manufacturer.
表1Table 1
以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, should be considered as within the scope of this specification.
以上所述实施例仅表达了本实用新型的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对实用新型专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本实用新型构思的前提下,还可以做出若干变形和改进,这些都属于本实用新型的保护范围。因此,本实用新型专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only express several implementation modes of the utility model, and the description thereof is relatively specific and detailed, but it should not be interpreted as a limitation on the patent scope of the utility model. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the scope of protection of the utility model patent should be based on the appended claims.
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CN111153601A (en) * | 2020-01-16 | 2020-05-15 | 苏州胜利精密制造科技股份有限公司 | Anti-reflection curved glass cover plate and preparation method thereof |
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CN108441837A (en) * | 2018-06-13 | 2018-08-24 | 天津南玻节能玻璃有限公司 | An anti-reflection coating structure |
CN108441837B (en) * | 2018-06-13 | 2024-04-16 | 天津南玻节能玻璃有限公司 | Anti-reflection coating structure |
CN111153601A (en) * | 2020-01-16 | 2020-05-15 | 苏州胜利精密制造科技股份有限公司 | Anti-reflection curved glass cover plate and preparation method thereof |
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