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CN207097810U - Packaging device and its substrate structure - Google Patents

Packaging device and its substrate structure Download PDF

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Publication number
CN207097810U
CN207097810U CN201721071416.8U CN201721071416U CN207097810U CN 207097810 U CN207097810 U CN 207097810U CN 201721071416 U CN201721071416 U CN 201721071416U CN 207097810 U CN207097810 U CN 207097810U
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substrate
dielectric layer
patterned dielectric
packaging device
disposed
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李宗翰
刘智文
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Phoenix Pioneer Technology Co Ltd
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Phoenix Pioneer Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18High density interconnect [HDI] connectors; Manufacturing methods related thereto

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Abstract

本实用新型提供一种载板结构。载板结构包括一基板以及多个连接垫。基板具有一下表面及多个第一开口。这些第一开口分别位于基板的一周缘的下表面上。连接垫分别设置于基板的这些第一开口中。各连接垫具有一凹部,其形成于连接垫靠近基板的周缘的一侧。另外,本实用新型也提供一种具有上述载板结构的封装装置。

The utility model provides a carrier structure. The carrier structure includes a substrate and a plurality of connection pads. The substrate has a lower surface and a plurality of first openings. The first openings are respectively located on the lower surface of a peripheral edge of the substrate. The connection pads are respectively arranged in the first openings of the substrate. Each connection pad has a recessed portion formed on one side of the connection pad close to the peripheral edge of the substrate. In addition, the utility model also provides a packaging device having the above-mentioned carrier structure.

Description

封装装置及其载板结构Packaging device and its substrate structure

技术领域technical field

本实用新型涉及一种封装装置,且特别是关于一种应用于覆晶封装的封装装置及其载板结构。The utility model relates to a packaging device, in particular to a packaging device and a carrier plate structure applied to flip-chip packaging.

背景技术Background technique

在现行的封装装置中,例如覆晶芯片级封装(Flip chip-Chip scale package,FC-CSP),是将芯片的正面翻转,以凸块直接连接承载基板,并加以封装以形成封装装置。此承载基板即称为覆晶基板,用以作为芯片与电路板间电性连接与信号传输的缓冲接口。In the current packaging devices, such as Flip chip-Chip scale package (FC-CSP), the front side of the chip is turned over, and the bumps are directly connected to the carrier substrate, and then packaged to form a packaging device. The carrier substrate is called a flip-chip substrate, and is used as a buffer interface for electrical connection and signal transmission between the chip and the circuit board.

封装装置借由承载基板与电路板电性连接组装,且还借由锡球将封装装置与电路板电性连接。一般而言,在借由锡球连接后,封装装置与电路板之间的高度约为20微米至30微米。换言之,封装装置与电路板之间的距离实际上十分的狭小。The packaging device is electrically connected to the circuit board through the carrier substrate and assembled, and the packaging device is also electrically connected to the circuit board through solder balls. Generally speaking, the height between the packaged device and the circuit board is about 20 microns to 30 microns after being connected by solder balls. In other words, the distance between the packaging device and the circuit board is actually quite narrow.

为了确保产品的质量,封装装置与电路板在组装后,都需要进行许多的检测之后,才可将此组装产品出厂。通常,针对封装装置与电路板的焊接状况检测,其检测的方式可以是利用CCD摄影机,或利用检测人员以目测的方式来观察封装装置与电路板之间的焊料是否连接完整,也就是检测封装装置与电路板之间的焊锡情形,确认其爬锡状况是否完全。In order to ensure the quality of the product, after the packaged device and the circuit board are assembled, many inspections are required before the assembled product can be shipped out of the factory. Usually, for the inspection of the soldering status of the packaging device and the circuit board, the detection method can be to use a CCD camera, or use the inspector to visually observe whether the solder connection between the packaging device and the circuit board is complete, that is, to inspect the package. Check the soldering condition between the device and the circuit board, and confirm whether the soldering condition is complete.

然而,封装装置与电路板在组装后,由于受到封装装置本身防焊层的阻挡,且封装装置与电路板之间的距离十分的狭小,事实上,CCD摄影机或检测人员难以利用目测的方式观察封装装置与电路板之间的连接状况,更难以判断当下的爬锡状况是否完全。因此往往造成组装后的产品,有电性功能测试不良及因质量异常而报废的情形,如此一来,将会降低了产品的质量且提高了成本。However, after the packaging device and the circuit board are assembled, due to the obstruction of the solder mask of the packaging device itself, and the very narrow distance between the packaging device and the circuit board, in fact, it is difficult for CCD cameras or inspectors to observe visually. The connection status between the packaging device and the circuit board makes it even more difficult to judge whether the current soldering situation is complete. Therefore, the assembled products often have poor electrical function tests and are scrapped due to abnormal quality. In this way, the quality of the products will be reduced and the cost will be increased.

因此,亟需提出一种新的封装装置及其载板结构,可以在产品组装后轻易地观察产品的封装装置与电路板之间的连接状况,以降低不合格率而可提升产品质量。Therefore, there is an urgent need to propose a new packaging device and its carrier structure, which can easily observe the connection status between the packaging device and the circuit board of the product after the product is assembled, so as to reduce the defective rate and improve product quality.

实用新型内容Utility model content

有鉴于此,本实用新型的一目的在于提供一种封装装置及其载板结构,可轻易观察产品组装后的焊料连接状况,以确保产品质量。In view of this, an object of the present invention is to provide a packaging device and its carrier structure, which can easily observe the solder connection status of the product after assembly, so as to ensure product quality.

为达上述目的,本实用新型提供一种载板结构,其包括一基板以及多个连接垫。基板具有一下表面及多个第一开口。这些第一开口分别位于基板的一周缘的下表面上。连接垫分别设置于基板的这些第一开口中。各连接垫具有一凹部,其形成于连接垫靠近基板的周缘的一侧。To achieve the above purpose, the utility model provides a carrier structure, which includes a substrate and a plurality of connection pads. The substrate has a lower surface and a plurality of first openings. The first openings are respectively located on the lower surface of the peripheral edge of the substrate. The connection pads are respectively disposed in the first openings of the substrate. Each connection pad has a recess formed on a side of the connection pad close to the periphery of the substrate.

根据本实用新型的一实施例,各连接垫的该凹部暴露于该基板的该周缘外。According to an embodiment of the present invention, the concave portion of each connection pad is exposed outside the peripheral edge of the substrate.

根据本实用新型的一实施例,这些连接垫的该凹部的一内顶面至该基板的该下表面的一垂直距离是该基板的厚度的30%至80%。According to an embodiment of the present invention, a vertical distance from an inner top surface of the concave portion of the connection pads to the lower surface of the substrate is 30% to 80% of the thickness of the substrate.

根据本实用新型的一实施例,基板还包括一第一图案化介电层及一第二图案化介电层。第一图案化介电层具有这些第一开口及至少一第二开口。第二图案化介电层设置于该第一图案化介电层上,并具有至少一第三开口。According to an embodiment of the present invention, the substrate further includes a first patterned dielectric layer and a second patterned dielectric layer. The first patterned dielectric layer has the first openings and at least one second opening. The second patterned dielectric layer is disposed on the first patterned dielectric layer and has at least one third opening.

根据本实用新型的一实施例,载板结构还包括至少一导电柱及一图案化导电层。导电柱设置于第一图案化介电层的第二开口中。图案化导电层设置于第二图案化介电层的第三开口中,并设置于部分第一图案化介电层、导电柱与这些连接垫之上。According to an embodiment of the present invention, the carrier structure further includes at least one conductive column and a patterned conductive layer. The conductive column is disposed in the second opening of the first patterned dielectric layer. The patterned conductive layer is disposed in the third opening of the second patterned dielectric layer, and disposed on part of the first patterned dielectric layer, the conductive pillars and the connection pads.

另外,为达上述目的,本实用新型提供一种封装装置,其包括一基板、多个连接垫、至少一芯片以及一封装材料。基板具有一上表面、一下表面及多个第一开口。上表面与下表面相对设置。各第一开口分别位于基板的一周缘的下表面上。各连接垫分别设置于基板的各第一开口中。各连接垫具有一凹部,其形成于各连接垫靠近基板的该周缘的一侧。芯片设置于基板的上表面上。封装材料设置于基板的上表面及芯片上。In addition, to achieve the above purpose, the present invention provides a packaging device, which includes a substrate, a plurality of connection pads, at least one chip, and a packaging material. The substrate has an upper surface, a lower surface and a plurality of first openings. The upper surface is set opposite to the lower surface. Each first opening is respectively located on the lower surface of a peripheral edge of the substrate. Each connection pad is respectively disposed in each first opening of the substrate. Each connection pad has a recess formed on a side of each connection pad close to the peripheral edge of the substrate. The chip is disposed on the upper surface of the substrate. The encapsulation material is arranged on the upper surface of the substrate and the chip.

根据本实用新型的一实施例,各连接垫的凹部暴露于基板的周缘外。According to an embodiment of the present invention, the concave portion of each connection pad is exposed outside the periphery of the substrate.

根据本实用新型的一实施例,这些连接垫的凹部的一内顶面至基板的下表面的一垂直距离是基板的厚度的30%至80%。According to an embodiment of the present invention, a vertical distance from an inner top surface of the concave portion of the connection pads to the lower surface of the substrate is 30% to 80% of the thickness of the substrate.

根据本实用新型的一实施例,基板还包括一第一图案化介电层及一第二图案化介电层。第一图案化介电层具有这些第一开口及至少一第二开口。第二图案化介电层设置于该第一图案化介电层上,并具有至少一第三开口。According to an embodiment of the present invention, the substrate further includes a first patterned dielectric layer and a second patterned dielectric layer. The first patterned dielectric layer has the first openings and at least one second opening. The second patterned dielectric layer is disposed on the first patterned dielectric layer and has at least one third opening.

根据本实用新型的一实施例,封装装置还包括至少一导电柱及一图案化导电层。导电柱设置于第一图案化介电层的第二开口中。图案化导电层设置于第二图案化介电层的第三开口中,并设置于部分第一图案化介电层、导电柱与这些连接垫之上。According to an embodiment of the present invention, the packaging device further includes at least one conductive column and a patterned conductive layer. The conductive column is disposed in the second opening of the first patterned dielectric layer. The patterned conductive layer is disposed in the third opening of the second patterned dielectric layer, and disposed on part of the first patterned dielectric layer, the conductive pillars and the connection pads.

承上所述,本实用新型的一种封装装置及其载板结构是利用在靠近基板周缘的连接垫上设置凹部,使得在经过回焊工艺后,能够清楚明确地观察到连接垫的爬锡状况,以正确地判断连接质量,进而提高产品合格率及质量。Based on the above, a packaging device and its carrier structure of the present invention is to use a concave part on the connection pad close to the periphery of the substrate, so that after the reflow process, the solder climbing condition of the connection pad can be clearly observed , to correctly judge the connection quality, and then improve the product qualification rate and quality.

附图说明Description of drawings

图1绘示本实用新型的一实施例的封装装置示意图;FIG. 1 shows a schematic diagram of a packaging device according to an embodiment of the present invention;

图2绘示图1的封装装置沿线段A-A’的剖面示意图;Fig. 2 depicts a schematic cross-sectional view of the packaging device of Fig. 1 along the line segment A-A';

图3A绘示本实用新型的一实施例的载板结构的半成品设置于一附加电路板,并设置有一阻绝层的结构示意图;FIG. 3A shows a schematic view of the structure of a semi-finished carrier board structure set on an additional circuit board and provided with an insulating layer according to an embodiment of the present invention;

图3B绘示图3A在连接垫上形成凹部的载板结构半成品的结构示意图;FIG. 3B is a schematic structural view of the carrier structure semi-finished product in which recesses are formed on the connection pads in FIG. 3A;

图3C绘示本实用新型的一实施例的载板结构示意图;以及FIG. 3C is a schematic diagram of the structure of the carrier board according to an embodiment of the present invention; and

图4绘示本实用新型的一实施例的封装装置设置在电路板的结构示意图。FIG. 4 is a schematic structural diagram of a packaging device disposed on a circuit board according to an embodiment of the present invention.

附图标记说明Explanation of reference signs

100 载板结构100 carrier structure

110 基板110 Substrate

111 上表面111 upper surface

112 下表面112 lower surface

1101 第一图案化介电层1101 First patterned dielectric layer

1102 第二图案化介电层1102 second patterned dielectric layer

120、410 连接垫120, 410 connection pad

120c 凹部120c concave

130 导电柱130 conductive column

140 图案化导电层140 patterned conductive layer

200 载板结构半成品200 Semi-finished Carrier Structures

210 附加电路板210 Additional Circuit Board

220 阻绝层220 barrier layer

300 封装装置300 Packaged Devices

310 芯片310 chips

320 封装材料320 Packaging material

400 电路板400 circuit board

50 导电块50 conductive block

h 第一高度h first height

H 第二高度H second height

OP1 第一开口OP1 first opening

OP2 第二开口OP2 second opening

OP3 第三开口。OP3 Third opening.

具体实施方式Detailed ways

以下将详述本实用新型的各实施例,并配合附图作为例示。除了这些详细描述之外,本实用新型还可以广泛地施行在其他的实施例中,任何所述实施例的轻易替代、修改、等效变化都包含在本实用新型的范围内,并以之后的专利保护范围为准。在说明书的描述中,为了使读者对本实用新型有较完整的了解,提供了许多特定细节;然而,本实用新型可能在省略部分或全部这些特定细节的前提下,仍可实施。此外,众所周知的步骤或组件并未描述于细节中,以避免造成本实用新型不必要的限制。附图中相同或类似的组件将以相同或类似符号来表示。特别注意的是,附图仅为示意之用,并非代表组件实际的尺寸或数量,除非有特别说明。Various embodiments of the present invention will be described in detail below, and the accompanying drawings are used as examples. In addition to these detailed descriptions, the utility model can also be widely implemented in other embodiments, and any easy replacement, modification, and equivalent changes of any of the embodiments are included in the scope of the utility model, and are described in the following The scope of patent protection shall prevail. In the description of the specification, many specific details are provided in order to enable readers to have a more complete understanding of the utility model; however, the utility model may still be implemented under the premise of omitting some or all of these specific details. Also, well-known steps or components have not been described in detail in order to avoid unnecessarily limiting the invention. The same or similar components will be denoted by the same or similar symbols in the drawings. It should be noted that the drawings are for illustrative purposes only, and do not represent the actual size or quantity of components, unless otherwise specified.

图1绘示本实用新型的一实施例的一封装装置300的示意图。图2绘示图1的封装装置300沿线段A-A’的剖面示意图。请参照图1及图2所示,封装装置300包括一载板结构100、一芯片310以及一封装材料320。其中,芯片310设置于载板结构100上,而封装材料320设置于载板结构100以及芯片310上,以封围芯片310。在本实施例中,封装材料320可以选自高分子树脂材料或陶瓷材料,或在树脂中添加有二氧化硅粉、氧化铝粉、氮化硼粉或石墨纤维等,在此不加以限定。FIG. 1 is a schematic diagram of a packaging device 300 according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of the packaging device 300 in FIG. 1 along the line segment A-A'. Referring to FIG. 1 and FIG. 2 , the packaging device 300 includes a carrier structure 100 , a chip 310 and a packaging material 320 . Wherein, the chip 310 is disposed on the carrier structure 100 , and the packaging material 320 is disposed on the carrier structure 100 and the chip 310 to enclose the chip 310 . In this embodiment, the encapsulation material 320 can be selected from polymer resin material or ceramic material, or silicon dioxide powder, alumina powder, boron nitride powder or graphite fiber are added to the resin, which is not limited here.

载板结构100包括一基板110、多个连接垫120、至少一导电柱130以及一图案化导电层140。The carrier structure 100 includes a substrate 110 , a plurality of connection pads 120 , at least one conductive pillar 130 and a patterned conductive layer 140 .

基板110具有一上表面111、一下表面112以及多个第一开口OP1。这些第一开口OP1位于基板110的一周缘的下表面112上。更进一步说明,基板110还包括一第一图案化介电层1101及一第二图案化介电层1102。其中,第一图案化介电层1101具有这些第一开口OP1及多个第二开口OP2。第二图案化介电层1102设置于第一图案化介电层1101上,并具有多个第三开口OP3。在本实施例中,部分的第三开口OP3可与部分的第一开口OP1构成一贯孔,当然,部分的第三开口OP3也可与部分的第二开口OP2构成贯孔。The substrate 110 has an upper surface 111 , a lower surface 112 and a plurality of first openings OP1 . The first openings OP1 are located on the lower surface 112 of a peripheral edge of the substrate 110 . To further illustrate, the substrate 110 further includes a first patterned dielectric layer 1101 and a second patterned dielectric layer 1102 . Wherein, the first patterned dielectric layer 1101 has these first openings OP1 and a plurality of second openings OP2. The second patterned dielectric layer 1102 is disposed on the first patterned dielectric layer 1101 and has a plurality of third openings OP3. In this embodiment, part of the third opening OP3 may form a through hole with part of the first opening OP1, and of course, part of the third opening OP3 may also form a through hole with part of the second opening OP2.

在本实施例中,第一图案化介电层1101以及第二图案化介电层1102的材质可以为高填料含量介电材(High filler content dielectric material),例如为铸模化合物(Molding compound),其以环氧树脂(Epoxy)为主要基质,其占铸模化合物的整体比例约为8%~12%,并掺杂占整体比例约70%~90%的填充剂而形成。其中,填充剂可以包括二氧化硅及氧化铝,以达到增加机械强度、降低线性热膨胀系数、增加热传导、增加阻水及减少溢胶的功效。In this embodiment, the material of the first patterned dielectric layer 1101 and the second patterned dielectric layer 1102 may be a high filler content dielectric material, such as a molding compound, It uses epoxy resin (Epoxy) as the main matrix, which accounts for about 8% to 12% of the overall casting compound, and is formed by doping with a filler accounting for about 70% to 90% of the overall proportion. Wherein, the filler may include silicon dioxide and alumina, so as to achieve the effects of increasing mechanical strength, reducing linear thermal expansion coefficient, increasing heat conduction, increasing water resistance and reducing glue overflow.

各连接垫120分别设置于基板110的各第一开口OP1中,也就是即,连接垫120分别设置于基板110的第一图案化介电层1101的第一开口OP1中。各连接垫120具有一凹部120c,其形成于连接垫120靠近基板110的周缘的一侧,且暴露于基板110的周缘外。换言之,由载板结构100的侧面观之,可以观察到连接垫120的凹部120c。在本实施例中,连接垫120的凹部120c的表面依照加工方式的不同,可呈平面或弧形。加工方式可以是干式蚀刻、湿式蚀刻、镭射切割、高压液体切割或研磨等技术,但本实用新型不以此为限。The connection pads 120 are respectively disposed in the first openings OP1 of the substrate 110 , that is, the connection pads 120 are respectively disposed in the first openings OP1 of the first patterned dielectric layer 1101 of the substrate 110 . Each connection pad 120 has a recess 120 c formed on a side of the connection pad 120 close to the periphery of the substrate 110 and exposed outside the periphery of the substrate 110 . In other words, viewed from the side of the carrier structure 100 , the concave portion 120 c of the connection pad 120 can be observed. In this embodiment, the surface of the concave portion 120c of the connection pad 120 can be flat or arc-shaped according to different processing methods. The processing method can be techniques such as dry etching, wet etching, laser cutting, high-pressure liquid cutting or grinding, but the utility model is not limited thereto.

另外值得一提的是,各连接垫120的凹部120c的一内顶面至基板110的下表面112的一垂直距离为一第一高度h,而基板110的厚度为一第二高度H。为了保有连接垫120作为电性连接导电的功能,也为了能够由侧面清楚的观察,故在本实施例中,第一高度h是第二高度H的30%至80%。It is also worth mentioning that a vertical distance from an inner top surface of the concave portion 120c of each connection pad 120 to the lower surface 112 of the substrate 110 is a first height h, and the thickness of the substrate 110 is a second height H. In order to maintain the function of the connection pad 120 as an electrical connection and conduction, and to be able to observe clearly from the side, in this embodiment, the first height h is 30% to 80% of the second height H.

导电柱130设置于第一图案化介电层1101的第二开口OP2中,借以作为增强结构以及/或导通上下层电路之用,其材质可以是铜,但本实用新型不以此为限。The conductive column 130 is disposed in the second opening OP2 of the first patterned dielectric layer 1101, so as to serve as a reinforcement structure and/or to connect the upper and lower layers of the circuit. Its material can be copper, but the present invention is not limited thereto. .

图案化导电层140设置于第二图案化介电层1102的第三开口OP3中,并设置于部分的第一图案化介电层1101、导电柱130与这些连接垫120之上,以作为电性传导的电路。承上所述,芯片310即设置于载板结构100的图案化导电层140上,而封装材料320则设置于图案化导电层140、第二图案化介电层1102以及芯片310上。并且,上述所谓的基板110的上表面111即为由第二图案化介电层1102以及图案化导电层140所构成的一平面,而基板110的下表面112则为由连接垫120、第一图案化介电层1102以及导电柱130所构成的一平面。The patterned conductive layer 140 is disposed in the third opening OP3 of the second patterned dielectric layer 1102, and is disposed on part of the first patterned dielectric layer 1101, the conductive pillars 130 and the connection pads 120 to serve as electrical sexual conduction circuit. As mentioned above, the chip 310 is disposed on the patterned conductive layer 140 of the carrier structure 100 , and the packaging material 320 is disposed on the patterned conductive layer 140 , the second patterned dielectric layer 1102 and the chip 310 . Moreover, the upper surface 111 of the so-called substrate 110 is a plane formed by the second patterned dielectric layer 1102 and the patterned conductive layer 140, while the lower surface 112 of the substrate 110 is formed by the connection pads 120, the first A plane formed by the patterned dielectric layer 1102 and the conductive pillars 130 .

在此,要特别说明的是,上述的图案化介电层、图案化导电层、导电柱等组件,可依据实际设计需求而堆栈设置,而形成多层结构的载板结构(图未显示)。Here, it should be noted that the above-mentioned patterned dielectric layer, patterned conductive layer, conductive pillars and other components can be stacked according to actual design requirements to form a multi-layer carrier structure (not shown in the figure) .

图3A至图3B绘示本实用新型的一实施例的载板结构的制作的流程示意图。图3A绘示载板结构的半成品并具有一阻绝层的结构示意图。图3B绘示图3A的在连接垫上形成凹部的载板结构半成品的结构示意图。图3C绘示载板结构示意图。以下请参照图3A至图3C所示,以说明形成载板结构的连接垫的凹部的工艺。在本实施例中,是以湿式蚀刻制法为例说明。3A to 3B are schematic flow charts showing the manufacturing process of the carrier structure according to an embodiment of the present invention. FIG. 3A is a schematic structural diagram of a semi-finished product of the carrier structure with an insulating layer. FIG. 3B is a schematic structural view of the carrier structure semi-finished product in FIG. 3A with recesses formed on the connection pads. FIG. 3C is a schematic diagram of the structure of the carrier plate. Referring to FIG. 3A to FIG. 3C below, the process of forming the concave portion of the connection pad of the carrier structure will be described. In this embodiment, the wet etching method is taken as an example for illustration.

请参照图3A所示,载板结构半成品200包括基板110、连接垫120、导电柱130及图案化导电层140。基板110具有一上表面111、一下表面112、第一图案化介电层1101、第二图案化介电层1102、第一开口OP1、第二开口OP2及第三开口OP3。在此,除了上述的凹部120c未成形之外,其余组件及连接关系都如上所述。基板110的上表面111接触于一附加电路板210上,而在基板110的部分下表面上设置一阻绝层220。在此,阻绝层220暴露出部分的连接垫120。Referring to FIG. 3A , the carrier structure semi-finished product 200 includes a substrate 110 , a connection pad 120 , a conductive column 130 and a patterned conductive layer 140 . The substrate 110 has an upper surface 111 , a lower surface 112 , a first patterned dielectric layer 1101 , a second patterned dielectric layer 1102 , a first opening OP1 , a second opening OP2 and a third opening OP3 . Here, except that the above-mentioned concave portion 120c is not formed, other components and connections are as above. The upper surface 111 of the substrate 110 is in contact with an additional circuit board 210 , and an insulating layer 220 is disposed on a part of the lower surface of the substrate 110 . Here, the barrier layer 220 exposes a portion of the connection pad 120 .

请参照图3B所示,接着,由载板结构半成品200的阻绝层220的一侧对载板结构半成品200进行蚀刻工艺。借由控制蚀刻的时间,即可在未被阻绝层220覆盖的连接垫120上形成凹部120c。Referring to FIG. 3B , next, the semi-finished carrier structure 200 is etched from one side of the barrier layer 220 of the semi-finished carrier structure 200 . By controlling the etching time, the concave portion 120 c can be formed on the connection pad 120 not covered by the barrier layer 220 .

请再参照图3C所示,然后,先后或同时移除附加电路板210及阻绝层220,即可形成载板结构100。Please refer to FIG. 3C again. Then, the additional circuit board 210 and the insulating layer 220 are removed successively or simultaneously to form the carrier structure 100 .

在其他实施例中,倘若载板结构的连接垫的凹部是以例如镭射切割、高压液体切割或研磨等技术而形成,则可不需要设置阻绝层,仅需将基板设置在附加电路板上,并暴露出连接垫,接着,再在各连接垫上以镭射切割、高压液体切割或研磨形成凹部,最后再移除附加电路板,即可形成载板结构。In other embodiments, if the recesses of the connection pads of the carrier structure are formed by techniques such as laser cutting, high-pressure liquid cutting or grinding, it is not necessary to provide an insulating layer, only the substrate needs to be placed on the additional circuit board, and The connection pads are exposed, and then, laser cutting, high-pressure liquid cutting or grinding are used to form recesses on each connection pad, and finally the additional circuit board is removed to form a carrier structure.

图4绘示本实用新型的一实施例的一封装装置300设置在一电路板400上的结构示意图。其中,封装装置300与前述实施例的封装装置300相同,故在此不再赘述。FIG. 4 is a schematic structural diagram of a packaging device 300 disposed on a circuit board 400 according to an embodiment of the present invention. Wherein, the packaging device 300 is the same as the packaging device 300 of the foregoing embodiment, so it will not be repeated here.

如图4所示,封装装置300的各连接垫120分别借由一导电块50而设置于电路板400上。更进一步说明,电路板400也具有多个连接垫410,其对应于封装装置300的连接垫120而设置。导电块50例如为锡球或块状焊锡等,其借由焊接或回焊的方式使封装装置300与电路板400相互连接。由于连接垫120的凹部120c暴露于基板110的周缘外,因此可由封装装置300的侧面清楚地观察到导电块50的连接情形。另外,由于凹部120c增加了连接垫120的整体面积,因此可使得封装装置300与电路板400连接的更为稳固,以提升连接质量。As shown in FIG. 4 , the connection pads 120 of the packaging device 300 are respectively disposed on the circuit board 400 through a conductive block 50 . To further illustrate, the circuit board 400 also has a plurality of connection pads 410 disposed corresponding to the connection pads 120 of the packaging device 300 . The conductive block 50 is, for example, a solder ball or a bulk solder, which connects the packaging device 300 and the circuit board 400 to each other by soldering or reflowing. Since the concave portion 120 c of the connection pad 120 is exposed outside the periphery of the substrate 110 , the connection condition of the conductive block 50 can be clearly observed from the side of the package device 300 . In addition, since the recess 120 c increases the overall area of the connection pad 120 , it can make the connection between the package device 300 and the circuit board 400 more stable, so as to improve the connection quality.

综上所述,本实用新型的封装装置及其载板结构,其借由在连接垫上形成凹部,并使凹部暴露于基板的周缘外,当其制成封装装置且与电路板借由导电块相互连接后,可以由封装装置的侧面观察连接垫与导电块相互连接的情形,也即能够清楚明确地观察到连接垫的爬锡状况,以正确地判断连接质量,进而提高产品合格率及质量。To sum up, the packaging device and its carrier structure of the present invention form a concave part on the connection pad and expose the concave part to the periphery of the substrate. After mutual connection, the connection between the connection pad and the conductive block can be observed from the side of the packaging device, that is, the solder creeping condition of the connection pad can be clearly observed, so as to correctly judge the connection quality, thereby improving the product qualification rate and quality .

综上所述,虽然本实用新型已以较佳实施例公开如上,然其并非用以限定本实用新型。本领域技术人员在不脱离本实用新型的精神和范围内,当可作各种的更动与润饰。因此,本实用新型的保护范围当视前述的权利要求书所界定为准。To sum up, although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, the scope of protection of the present utility model should be defined by the preceding claims.

Claims (10)

1.一种载板结构,其特征在于,包括:1. A carrier structure, characterized in that, comprising: 一基板,具有一下表面及多个第一开口,这些第一开口分别位于该基板的一周缘的该下表面上;以及A substrate having a lower surface and a plurality of first openings respectively located on the lower surface of a peripheral edge of the substrate; and 多个连接垫,分别设置于该基板的这些第一开口中,且各连接垫具有一凹部,该凹部形成于该连接垫靠近该基板的该周缘的一侧。A plurality of connection pads are respectively arranged in the first openings of the substrate, and each connection pad has a recess formed on a side of the connection pad close to the peripheral edge of the substrate. 2.如权利要求1所述的载板结构,其特征在于,各连接垫的该凹部暴露于该基板的该周缘外。2. The carrier structure according to claim 1, wherein the concave portion of each connection pad is exposed outside the peripheral edge of the substrate. 3.如权利要求1所述的载板结构,其特征在于,这些连接垫的该凹部的一内顶面至该基板的该下表面的一垂直距离是该基板的厚度的30%至80%。3. The carrier structure according to claim 1, wherein a vertical distance from an inner top surface of the concave portion of the connection pads to the lower surface of the substrate is 30% to 80% of the thickness of the substrate . 4.如权利要求1所述的载板结构,其特征在于,该基板还包括:4. The carrier structure according to claim 1, wherein the substrate further comprises: 一第一图案化介电层,具有这些第一开口及至少一第二开口;以及a first patterned dielectric layer having the first openings and at least one second opening; and 一第二图案化介电层,设置于该第一图案化介电层上,并具有至少一第三开口。A second patterned dielectric layer is disposed on the first patterned dielectric layer and has at least one third opening. 5.如权利要求4所述的载板结构,其特征在于,还包括:5. The carrier structure according to claim 4, further comprising: 至少一导电柱,设置于该第一图案化介电层的该第二开口中;以及at least one conductive pillar disposed in the second opening of the first patterned dielectric layer; and 一图案化导电层,设置于该第二图案化介电层的该第三开口中,并设置于部分的该第一图案化介电层、该导电柱与这些连接垫之上。A patterned conductive layer is disposed in the third opening of the second patterned dielectric layer, and disposed on part of the first patterned dielectric layer, the conductive column and the connection pads. 6.一种封装装置,其特征在于,包括:6. A packaging device, characterized in that it comprises: 一基板,具有一上表面、一下表面及多个第一开口,这些第一开口分别位于该基板的一周缘的该下表面上,该上表面与该下表面相对设置;A substrate having an upper surface, a lower surface and a plurality of first openings, the first openings are respectively located on the lower surface of a peripheral edge of the substrate, the upper surface is opposite to the lower surface; 多个连接垫,分别设置于该基板的这些第一开口中,且各连接垫具有一凹部,该凹部形成于该连接垫靠近该基板的该周缘的一侧;A plurality of connection pads are respectively arranged in the first openings of the substrate, and each connection pad has a concave portion formed on a side of the connection pad close to the peripheral edge of the substrate; 至少一芯片,设置于该基板的该上表面;以及at least one chip disposed on the upper surface of the substrate; and 一封装材料,设置于该基板的该上表面及该芯片上。A packaging material is arranged on the upper surface of the substrate and the chip. 7.如权利要求6所述的封装装置,其特征在于,各连接垫的该凹部暴露于该基板的该周缘外。7. The packaging device of claim 6, wherein the concave portion of each connection pad is exposed outside the peripheral edge of the substrate. 8.如权利要求6所述的封装装置,其特征在于,这些连接垫的该凹部的一内顶面至该基板的该下表面的一垂直距离是该基板的厚度的30%至80%。8 . The packaging device of claim 6 , wherein a vertical distance from an inner top surface of the concave portion of the connection pads to the lower surface of the substrate is 30% to 80% of the thickness of the substrate. 9.如权利要求6所述的封装装置,其特征在于,该基板还包括:9. The packaging device according to claim 6, wherein the substrate further comprises: 一第一图案化介电层,具有这些第一开口及至少一第二开口;以及a first patterned dielectric layer having the first openings and at least one second opening; and 一第二图案化介电层,设置于该第一图案化介电层上,并具有至少一第三开口。A second patterned dielectric layer is disposed on the first patterned dielectric layer and has at least one third opening. 10.如权利要求9所述的封装装置,其特征在于,还包括:10. The packaging device according to claim 9, further comprising: 至少一导电柱,设置于该第一图案化介电层的该第二开口中;以及at least one conductive pillar disposed in the second opening of the first patterned dielectric layer; and 一图案化导电层,设置于该第二图案化介电层的该第三开口中,并设置于部分的该第一图案化介电层、该导电柱与这些连接垫之上。A patterned conductive layer is disposed in the third opening of the second patterned dielectric layer, and disposed on part of the first patterned dielectric layer, the conductive column and the connection pads.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109727933A (en) * 2018-12-24 2019-05-07 通富微电子股份有限公司 A kind of method for packaging semiconductor and semiconductor packing device
CN110610870A (en) * 2018-06-14 2019-12-24 通富微电子股份有限公司 Flip-chip method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110610870A (en) * 2018-06-14 2019-12-24 通富微电子股份有限公司 Flip-chip method
CN109727933A (en) * 2018-12-24 2019-05-07 通富微电子股份有限公司 A kind of method for packaging semiconductor and semiconductor packing device

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