CN207051666U - Multistation 3D cover plate exposure machines - Google Patents
Multistation 3D cover plate exposure machines Download PDFInfo
- Publication number
- CN207051666U CN207051666U CN201720942776.4U CN201720942776U CN207051666U CN 207051666 U CN207051666 U CN 207051666U CN 201720942776 U CN201720942776 U CN 201720942776U CN 207051666 U CN207051666 U CN 207051666U
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- feeding
- workbench
- cover plate
- station
- exposure
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- 238000012937 correction Methods 0.000 claims abstract description 4
- 238000010521 absorption reaction Methods 0.000 claims description 11
- 238000013461 design Methods 0.000 claims description 9
- 230000006978 adaptation Effects 0.000 claims description 5
- 238000007781 pre-processing Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 abstract description 19
- 230000000694 effects Effects 0.000 abstract description 7
- 238000012545 processing Methods 0.000 abstract description 7
- 239000005357 flat glass Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 229920001621 AMOLED Polymers 0.000 description 1
- 230000003666 anti-fingerprint Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Multistation 3D cover plate exposure machines are the utility model is related to, there is support, support is provided with feeding platform, feeding station, discharge station, outfeed platforms and exposure station；And it is assembled in support upper table, feeding manipulator, blanking mechanical hand, exposure MASK, alignment system, exposure light source, workbench realizes multiple degrees of freedom adjustment, reach the cover plate on workbench and carry out correction contraposition, workbench moves back and forth between work initial bit and exposure station；Exposure light source exposes processing by exposing MASK to the cover plate on workbench.The utility model realizes that multistation exposes work, loading and unloading are convenient, contraposition and positioning are quick accurate, the linking that worked between station is compact, adapt to the exposure processing of 2D, 2.5D, 3D glass cover-plate, operating efficiency and work quality are lifted, operating cost is also saved, considerable lifting is brought to the productivity effect of enterprise.
Description
Technical field
Electronic product 3D cover plate technical fields are the utility model is related to, more particularly, to by exposing, developing and etching system
Make 2D, 2.5D, 3D glass cover-plate production technical field.
Background technology
The design concept and cooked mode of cover-plate glass, mainly use for reference the experience of watch or clock glass eyeglass deep processing industry.
Traditional 2D glass is flat, no matter selects any one point on glass, and it all should be same with other points on glass
In plane.2.5D screens refer to the radian of screen protection glass.2.5D glass is the area for having a plane at the center of glass
Domain, radian processing then is carried out to edge on the basis of flat glass.And 3D glass refers to that whole surface all possesses radian
Screen.It can be found that 3D bend glasses have preferably than 2D flat glass from the design and application of watch or clock glass eyeglass
Appearance pattern, and more preferably protection effect.Wherein hyperbolicity 3D bend glasses performance it is further preferred that, in anti-drop, anti-scratch
Hinder, do on static pressure test, hence it is evident that better than 2D flat glass.Particularly apply and produced in mobile terminals such as smart mobile phone, intelligent watch
In the protection of the flexible display screen of product, effect is best.
From the point of view of the Display Technique of the existing product of volume production, the display screen for being equipped with 3D curved surface cover-plate glass only has two kinds, and one
Kind is flexible Electronic Paper, and a kind of is flexible OLED display screen.The product of 3D curved surfaces cover-plate glass+flexible electronic paper, except
Only a few mobile phone shell on the back is outer as secondary screen use using this scheme, can typically be worn used in intelligent watch or Intelligent bracelet class
Wear in equipment.3D curved surfaces cover-plate glass+flexible OLED display is then except used in intelligent watch or Intelligent bracelet class is wearable sets
It is standby it is upper outside, main application is still on smart mobile phone, tablet personal computer and high-end TV, the most representative product of in the market
It is exactly the edge Series Intelligent mobile phones of Samsung, is equipped with 3D curved surfaces cover-plate glass+flexible AMOLED display screens, perfection is realized complete
Rimless effect is shown, applies also for wear-type VR equipment.
The curved surface characteristic of 3D glass meets 3C Product design requirement.3C Product design such as smart mobile phone, tablet PC, intelligence
There are 3D molded products successively in wearable intelligent artifact, the instrument boards such as energy wrist-watch etc., clearly guide 3D bend glasses hair
Open up direction.The advantages of possessing is that frivolous, transparent cleaning, anti-fingerprint, anti-dazzle, hard, scratch resistant, weatherability are good etc., can shape
Making 3D Multiple Shape outward appearances has product particular design novelty and good texture, can increase curved edge touch controllable function again and bring out
The touch-control feel of color, it can also improve out more preferable grip feeling experience.With Japanese silver-colored electrically（JDI）SID 2016 in may
In seminar, flexible TFT LCD is issued, apple is probably using flexibility in its trendy iPhone in 2017
On-cell displayers, this will drive application and the demand of more 3D protective glass.Therefore, the applicant proposes one kind
Multistation 3D cover plate exposure machines, contribute to the exposure production of 3D glass cover-plates, that is, propose this case application.
The content of the invention
The purpose of this utility model is to provide a kind of multistation 2D, 2.5D, 3D cover plate exposure machine, realizes that multistation exposes
Operation, loading and unloading are convenient, fast, ensure cover plate exposure quality and quality.
To reach above-mentioned purpose, the utility model adopts the following technical scheme that：
Multistation 3D cover plate exposure machines, it has：
Support, the support are provided with feeding platform, feeding station, discharge station, outfeed platforms and exposure station；
Workbench, the workbench are assembled on support, realize multiple degrees of freedom adjustment, and the adjustment control model of workbench covers
The modes such as U-V-W and X-Y- θ, workbench back and forth move by cylinder or electronic drive and between work initial bit and exposure station
It is dynamic；
Feeding platform sets vacuum absorption device, and cover plate is adsorbed above feeding platform, feeding platform by cylinder or
The cover plate of preprocessing is transplanted on feeding station by electronic drive, feeding platform；
Feeding manipulator, the feeding manipulator move between feeding station and the work initial bit of workbench, feeder
Work initial bit of the tool hand from feeding station movable cover plate to workbench；
Blanking mechanical hand, the blanking mechanical hand move between the work initial bit and discharge station of workbench, blanking machine
Tool hand is from the work initial bit movable cover plate of workbench to discharge station；
Outfeed platforms set vacuum absorption device, and cover plate is adsorbed on outfeed platforms, and outfeed platforms are by cylinder or electricity
Dynamic to drive, outfeed platforms remove the cover plate processed from discharge station；
MASK is exposed, exposure MASK is assembled on support, and exposure MASK is past above and below the same exposure station on support
It is multiple mobile；
Alignment system, the alignment system are assembled on support, and alignment system is past between the different exposure stations on support
It is multiple mobile；Alignment system carries out correction contraposition by exposing MASK target to the cover plate on workbench；
Exposure light source, the exposure light source are assembled on support, and exposure light source is past between the different exposure stations on support
It is multiple mobile；Exposure light source is exposed by exposing MASK to the cover plate on workbench.
The workbench has one, two or more, vacuum sucking holes of the workbench provided with absorption cover plate, more than two
Workbench is then disposed in parallel between feeding station and discharge station.
The feeding manipulator and blanking mechanical hand are supporting spring formula, and feeding manipulator has the feeding fork on the downside of holding cover plate
There is the blanking on the downside of holding cover plate to cup one hand in the other before the chest for hand, blanking mechanical hand；Feeding, which cups one hand in the other before the chest to cup one hand in the other before the chest with blanking, realizes oscilaltion；On described
Material manipulator and blanking mechanical hand laterally move linearly on support between feeding station and discharge station, workbench then phase
Longitudinal rectilinear movement is done in movement to feeding manipulator and blanking mechanical hand；There is adaptation feeding to cup one hand in the other before the chest on workbench to pitch with blanking
Room is avoided in hand oscilaltion；It is equipped with that adaptation feeding is cupped one hand in the other before the chest and blanking is cupped one hand in the other before the chest loading and unloading on feeding platform and outfeed platforms
Avoid breach.
The feeding manipulator and blanking mechanical hand can also be sucked type, and feeding manipulator and blanking mechanical hand are in support
Upper laterally to be moved linearly between feeding station and discharge station, workbench is then with respect to feeding manipulator and blanking mechanical hand
Longitudinal rectilinear movement is done in movement.
Such scheme is further：The alignment system is based on the contraposition principle design of CCD images, the quantity of corresponding workbench
Change, be designed as one or two alignment systems.
Such scheme is further：The exposure light source is single light source, double light sources or multiple light courcess form.
The beneficial effects of the utility model are embodied in：Designed by resulting structure, realize that multistation exposes work, loading and unloading
It is convenient, fast, help to align by alignment system, it is quick accurate to align and position, and precision is high, reduces unnecessary error, work
The linking that worked between position is compact, its operate easily, driving is simple, adapts to 2D, 2.5D, 3D cover plate great variety of models, be advantageous to 2D,
The exposure processing of 2.5D, 3D glass cover-plate, caters to the development of 2D, 2.5D, 3D glass cover-plate, realizes that fast setting meets production requirement
Positional parameter, it is uneven to avoid or reduce graph exposure, lifts operating efficiency and work quality, also saves operating cost, right
The productivity effect of enterprise brings considerable lifting.
Brief description of the drawings：
Accompanying drawing 1 is the utility model one example structure schematic diagram；
Accompanying drawing 2 is the side structure schematic view of Fig. 1 embodiments；
Accompanying drawing 3 is the overlooking the structure diagram of Fig. 1 embodiments.
Embodiment：
Design, concrete structure and caused technique effect of the present utility model are made furtherly below with reference to accompanying drawing
It is bright, to be fully understood from the purpose of this utility model, feature and effect.
Refering to shown in Fig. 1,2,3, being preferred embodiment schematic diagram of the present utility model, the utility model is about a kind of multiplexing
Position 3D cover plate exposure machines, it has support 1, workbench 2, feeding manipulator 3, blanking mechanical hand 8, exposure MASK4, alignment system
5 and exposure light source 6.Support 1 is provided with feeding platform 15, feeding station 12, discharge station 11, outfeed platforms 14 and exposure station
13.Workbench 2 is assembled on support 1, and workbench 2 realizes multiple degrees of freedom adjustment, and the adjustment control model of workbench 2 covers U-V-
The modes such as W and X-Y- θ, it is adapted to different operating control to require.Workbench 2 by cylinder or electronic drive and work initial bit with
Moved back and forth between exposure station 13, realize exposure process input and output material.Feeding platform 15 sets vacuum absorption device, and cover plate 7 is inhaled
It is attached to above feeding platform 15, feeding platform 15 is moved the cover plate 7 of preprocessing by cylinder or electronic drive, feeding platform 15
It is sent to feeding station 12.Feeding manipulator 3 moves between feeding station 12 and the work initial bit of workbench 2, feeding machinery
Work initial bit of the hand 3 from the movable cover plate 7 of feeding station 12 to workbench 2.Blanking mechanical hand 8 is initial in the work of workbench 2
Moved between position and discharge station 11, blanking mechanical hand 8 is from the work initial bit movable cover plate 7 of workbench 2 to discharge station 11.
Outfeed platforms 14 set vacuum absorption device, and cover plate 7 is adsorbed on outfeed platforms 14, and outfeed platforms 14 are by cylinder or electronic
Drive, outfeed platforms 14 remove the cover plate 7 processed from discharge station 11.Exposure MASK4 is assembled on support 1, is exposed
Same exposure stations 13 of the MASK4 on support 1 moves back and forth up and down.Alignment system 5 is assembled on support 1, and alignment system 5 exists
Moved back and forth between different exposure stations 13 on support 1；Alignment system 5 is based on the contraposition principle design of CCD images, realizes photoelectricity
Visual-alignment, MASK4 target is exposed by capturing, correction contraposition is carried out to the cover plate 7 on workbench 2.Alignment system 5 is existing
There is technology, the change of the quantity of corresponding workbench, be designed as one or two alignment systems, will not be repeated here its work original
Reason.Exposure light source 6 is assembled on support 1, and exposure light source 6 moves back and forth between the different exposure stations 13 on support 1；Exposure
Light source 6 is exposed by exposing MASK4 to the cover plate 7 on workbench 2, realizes that cover plate 7 obtains respective graphical, exposure light source 6 can be with
It is single light source, double light sources or multiple light courcess form, the number of cooperating platform 2 makees 2,3,4,6,8 and 9 change.
Shown in Fig. 1,2,3, in the present embodiment, the feeding manipulator 3 and blanking mechanical hand 8 are supporting spring formula, and feeding is mechanical
There is hand 3 feeding of the downside of holding cover plate 7 to cup one hand in the other before the chest 31, and there is blanking mechanical hand 8 blanking of the downside of holding cover plate 7 to cup one hand in the other before the chest 81；On
Material cup one hand in the other before the chest 31 and blanking cup one hand in the other before the chest and 81 realize oscilaltion.The feeding manipulator 3 and blanking mechanical hand 8 are on support 1 positioned at upper
Laterally moved linearly between material station 12 and discharge station 11, workbench 2 is then with respect to feeding manipulator 3 and blanking mechanical hand 8
Longitudinal rectilinear movement is done in movement.Have on workbench 2 adaptation feeding cup one hand in the other before the chest 31 and blanking cup one hand in the other before the chest 81 oscilaltions avoid room
21；Also be provided with being adapted on feeding platform 15 and outfeed platforms 14 feeding cup one hand in the other before the chest 31 and blanking cup one hand in the other before the chest 81 loading and unloading avoid breach
16.Simple in construction, the linking that worked between station is compact, and operation is easy, driving is simple, and cost of investment is low, and loading and unloading are convenient, fast
It is prompt.
Certainly, feeding manipulator 3 and blanking mechanical hand 8 of the present utility model can also be sucked type, the He of feeding manipulator 3
Blanking mechanical hand 8 laterally moves linearly on support 1 between feeding station 12 and discharge station 11, and workbench 2 is then relative
Longitudinal rectilinear movement is done in the movement of feeding manipulator 3 and blanking mechanical hand 8.It is compact equally to can reach the linking that works between station,
Operation is easy, driving is simple, and loading and unloading are convenient, fast.
Shown in Fig. 1,2,3, the workbench 2 of the present embodiment can have one, it is two or more, workbench 2 is provided with absorption
The vacuum sucking holes of cover plate 7, convenient, fast firm cover plate 7.More than two workbench 2 are then disposed in parallel in feeding work when designing
Between position 12 and discharge station 11, small volume, alignment system 5 and exposure light source 6 is facilitated to move operation.Disengaging of the present utility model
Material mode, which can be designed as a left side as needed, to be entered the right side and goes out, or the right side is entered a left side and gone out.
It is below that supporting spring formula narration job step is as follows with feeding manipulator 3 and blanking mechanical hand 8：
1. the cover plate 7 of preprocessing is placed on material loading platform 15, feeding station 12 is pushed to by cylinder after sucking.
2. control feeding manipulator 3 runs to the lower section of feeding station 12 from below, control feeding cup one hand in the other before the chest 31 cylinder on
Rise, feeding is cupped one hand in the other before the chest 31 picking-up cover plates 7, and is sent to above the workbench initial bit of workbench 2.
3. control feeding is cupped one hand in the other before the chest, 31 cylinder declines, and the cover plate 7 that feeding is cupped one hand in the other before the chest on 31 falls on workbench 2, controls feeding
Manipulator 3, which exits, returns to feeding station 12.
4. workbench 2 opens vacuum and sucks cover plate 7, then controls workbench 2 to run to exposure station 13 by initial bit, simultaneously
Control exposure MASK4 is moved to above cover plate 7, and drops to the gap of setting.
5. control alignment system 5 moves on to the top of exposure station 13, control on the cover plate 7 and exposure MASK4 above workbench 2
Alignment mark overlap, then remove alignment system 5.
6. control exposure light source 6 moves on to the top of exposure station 13, light source is opened, is closed after the time of setting, then remove
Exposure light source 6, while control exposure MASK4 to return to original position.
7. control workbench 2 moves on to workbench initial bit, and discharges vacuum.
8. control blanking mechanical hand 8 reach workbench 2 workbench initial bit below, control blanking cup one hand in the other before the chest 81 cylinder on
Rise, blanking is cupped one hand in the other before the chest the cover plate 7 that 81 picking-ups have exposed, and is sent to the top of discharging station 11, while controls the arrival blanking of outfeed platforms 14
Station 11.
9. control blanking is cupped one hand in the other before the chest, 81 cylinder declines, and the cover plate that blanking is cupped one hand in the other before the chest on 81 falls on outfeed platforms 14 and sucked,
Outfeed platforms 14 are controlled to reach original position again, release vacuum can take cover plate 7 away.
10. individual workbench 2 can use in turn more than, it is therefore an objective to improve productive temp.
The utility model is elaborated above in association with embodiment, is only to illustrate technical concept of the present utility model
And feature, can not be with this its object is to allow person skilled in the art to understand content of the present utility model and be carried out
Limit the scope of protection of the utility model, certainly, be used for the exposure processing of 3D cover plates except described above, can also be applied 2D,
The exposure processing of 2.5D cover plates, therefore all equivalent change or modifications done according to the utility model Spirit Essence, should all cover
In the scope of protection of the utility model.
Claims (6)
1. multistation 3D cover plate exposure machines, it is characterised in that：Have：
Support（1）, the support（1）It is provided with feeding platform（15）, feeding station（12）, discharge station（11）, outfeed platforms
（14）And exposure station（13）；
Workbench（2）, the workbench（2）It is assembled in support（1）On, realize multiple degrees of freedom adjustment, workbench（2）By cylinder or
Electronic drive and work initial bit with exposure station（13）Between move back and forth；
Feeding platform（15）Vacuum absorption device, cover plate are set（7）Absorption is in feeding platform（15）Above, feeding platform（15）
By cylinder or electronic drive, feeding platform（15）By the cover plate of preprocessing（7）It is transplanted on feeding station（12）；
Feeding manipulator（3）, the feeding manipulator（3）In feeding station（12）And workbench（2）Work initial bit between move
It is dynamic, feeding manipulator（3）From feeding station（12）Movable cover plate（7）To workbench（2）Work initial bit；
Blanking mechanical hand（8）, the blanking mechanical hand（8）In workbench（2）Work initial bit and discharge station（11）Between move
It is dynamic, blanking mechanical hand（8）From workbench（2）Work initial bit movable cover plate（7）To discharge station（11）；
Outfeed platforms（14）Vacuum absorption device, cover plate are set（7）Absorption is in outfeed platforms（14）Above, outfeed platforms（14）By
Cylinder or electronic drive, outfeed platforms（14）The cover plate that will be processed（7）From discharge station（11）Remove；
Expose MASK（4）, exposure MASK（4）It is assembled in support（1）On, expose MASK（4）In support（1）On same exposure
Station（13）Move back and forth up and down；
Alignment system（5）, the alignment system（5）It is assembled in support（1）On, alignment system（5）In support（1）On different exposures
Station（13）Between move back and forth；Alignment system（5）By exposing MASK（4）Target, to workbench（2）On cover plate（7）
Carry out correction contraposition；
Exposure light source（6）, the exposure light source（6）It is assembled in support（1）On, exposure light source（6）In support（1）On different exposures
Station（13）Between move back and forth；Exposure light source（6）By exposing MASK（4）To workbench（2）On cover plate（7）Exposure.
2. multistation 3D cover plate exposure machines according to claim 1, it is characterised in that：The feeding manipulator（3）With under
Expect manipulator（8）For supporting spring formula, feeding manipulator（3）With holding cover plate（7）The feeding of downside is cupped one hand in the other before the chest（31）, blanking mechanical hand
（8）With holding cover plate（7）The blanking of downside is cupped one hand in the other before the chest（81）；Feeding is cupped one hand in the other before the chest（31）Cupped one hand in the other before the chest with blanking（81）Realize oscilaltion；
The feeding manipulator（3）And blanking mechanical hand（8）In support（1）It is upper to be located at feeding station（12）And discharge station（11）Between
Laterally rectilinear movement, workbench（2）Then with respect to feeding manipulator（3）And blanking mechanical hand（8）Movement do longitudinal rectilinear movement；
Workbench（2）It is upper that there is adaptation feeding to cup one hand in the other before the chest（31）Cupped one hand in the other before the chest with blanking（81）Room is avoided in oscilaltion（21）；Feeding platform
（15）And outfeed platforms（14）On be equipped with adaptation feeding cup one hand in the other before the chest（31）Cupped one hand in the other before the chest with blanking（81）Breach is avoided in loading and unloading（16）.
3. multistation 3D cover plate exposure machines according to claim 1, it is characterised in that：The feeding manipulator（3）With under
Expect manipulator（8）For sucked type, feeding manipulator（3）And blanking mechanical hand（8）In support（1）It is upper to be located at feeding station（12）With
Discharge station（11）Between laterally move linearly, workbench（2）Then with respect to feeding manipulator（3）And blanking mechanical hand（8）Shifting
It is dynamic to do longitudinal rectilinear movement.
4. the multistation 3D cover plate exposure machines according to claim 1 or 2 or 3, it is characterised in that：The workbench（2）Have
One, two or more, workbench（2）It is provided with absorption cover plate（7）Vacuum sucking holes, more than two workbench（2）Then simultaneously
Row are arranged on feeding station（12）And discharge station（11）Between.
5. multistation 3D cover plate exposure machines according to claim 1, it is characterised in that：The alignment system（5）Based on CCD
Image contraposition principle design, corresponding workbench（2）Quantity change, be designed as one or two alignment systems.
6. multistation 3D cover plate exposure machines according to claim 1, it is characterised in that：The exposure light source（6）It is monochromatic light
Source, double light sources or multiple light courcess form.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720942776.4U CN207051666U (en) | 2017-07-31 | 2017-07-31 | Multistation 3D cover plate exposure machines |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720942776.4U CN207051666U (en) | 2017-07-31 | 2017-07-31 | Multistation 3D cover plate exposure machines |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207051666U true CN207051666U (en) | 2018-02-27 |
Family
ID=61499345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720942776.4U Expired - Fee Related CN207051666U (en) | 2017-07-31 | 2017-07-31 | Multistation 3D cover plate exposure machines |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207051666U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110297400A (en) * | 2019-06-19 | 2019-10-01 | 东莞市安达自动化设备有限公司 | Two-in two-out double-station exposure machine |
| CN112407841A (en) * | 2020-10-23 | 2021-02-26 | 江苏迪盛智能科技有限公司 | Automatic feeding and discharging system and method for exposure machine |
| CN115268235A (en) * | 2022-08-26 | 2022-11-01 | 上海图双精密装备有限公司 | Double-light-source exposure system of photoetching machine |
| CN118083639A (en) * | 2024-04-28 | 2024-05-28 | 广东科视光学技术股份有限公司 | Fully automatic exposure equipment |
| CN118083639B (en) * | 2024-04-28 | 2025-04-15 | 广东科视光学技术股份有限公司 | Fully automatic exposure equipment |
-
2017
- 2017-07-31 CN CN201720942776.4U patent/CN207051666U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110297400A (en) * | 2019-06-19 | 2019-10-01 | 东莞市安达自动化设备有限公司 | Two-in two-out double-station exposure machine |
| CN110297400B (en) * | 2019-06-19 | 2025-03-07 | 广东安达智能装备股份有限公司 | A two-input and two-output double-station exposure machine |
| CN112407841A (en) * | 2020-10-23 | 2021-02-26 | 江苏迪盛智能科技有限公司 | Automatic feeding and discharging system and method for exposure machine |
| CN115268235A (en) * | 2022-08-26 | 2022-11-01 | 上海图双精密装备有限公司 | Double-light-source exposure system of photoetching machine |
| CN115268235B (en) * | 2022-08-26 | 2023-03-14 | 上海图双精密装备有限公司 | Double-light-source exposure system of photoetching machine |
| CN118083639A (en) * | 2024-04-28 | 2024-05-28 | 广东科视光学技术股份有限公司 | Fully automatic exposure equipment |
| CN118083639B (en) * | 2024-04-28 | 2025-04-15 | 广东科视光学技术股份有限公司 | Fully automatic exposure equipment |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20180227 |