CN207051150U - One kind pollution particle observation and test device - Google Patents
One kind pollution particle observation and test device Download PDFInfo
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- CN207051150U CN207051150U CN201721012834.XU CN201721012834U CN207051150U CN 207051150 U CN207051150 U CN 207051150U CN 201721012834 U CN201721012834 U CN 201721012834U CN 207051150 U CN207051150 U CN 207051150U
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- 238000012360 testing method Methods 0.000 title claims abstract description 30
- 239000002245 particle Substances 0.000 title claims abstract description 29
- 230000003287 optical effect Effects 0.000 claims abstract description 22
- 230000010287 polarization Effects 0.000 claims abstract description 21
- 238000005259 measurement Methods 0.000 claims abstract description 16
- 238000009825 accumulation Methods 0.000 claims abstract description 15
- 238000005286 illumination Methods 0.000 claims abstract description 14
- 238000012634 optical imaging Methods 0.000 claims abstract description 11
- 238000011109 contamination Methods 0.000 claims abstract description 6
- 238000012545 processing Methods 0.000 claims abstract description 6
- 238000001514 detection method Methods 0.000 claims abstract description 4
- 238000003384 imaging method Methods 0.000 claims description 5
- 239000000356 contaminant Substances 0.000 claims 3
- 238000000034 method Methods 0.000 abstract description 10
- 230000008569 process Effects 0.000 abstract description 8
- 230000013011 mating Effects 0.000 abstract 1
- 230000035508 accumulation Effects 0.000 description 9
- 238000009826 distribution Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000002313 adhesive film Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
A kind of pollution particle observation and test device are the utility model is related to, including：Optical imaging apparatus, lighting apparatus, polarization device, location equipment, detection device, processing display device, fixed equipment, motive power outputting apparatus, polarization device include electronics adjusting device.Lighting apparatus, at least a portion to particle accumulation thing are illuminated; form illumination measured zone; filter is provided with illumination measured zone; polarization device includes optical polarization mating plate and optical analyzer; optical analyzer is located at the front end of the lens barrel of reflected light stereoscope; location equipment, moved according to grid in the illumination measured zone of particle accumulation thing.The utility model can reduce the secondary pollution probability of test process, and whole observation and test process are realized by automating, and reduce the testing time, improve the reproducibility of measurement result and reduce artificial contamination's probability.
Description
Technical Field
The utility model relates to a surface pollution degree test technical field in kind especially relates to a pollution particles is observed and testing arrangement.
Background
In the field of automobile manufacturing, aviation, precision machinery, semiconductor manufacturing, food processing, health care or medicine, there is an increasing need to know the technical cleanliness of parts, devices, products, workpieces or contact surfaces that are sensitive to dust on the surfaces, for example in the field of automobile driving, and there is an increasing need to clearly know the degree of particulate contamination of fuel injection systems, brake systems, fluid systems or miniaturized and performance-intensive individual parts and complex components manufactured on the basis thereof. The surface of the sample to be tested is too large, or the surface is complicated and rugged, so that the sample cannot be observed and tested by a direct method, and the method is usually adopted to remove dust on the surface through an adhesive film or a cleaning liquid, and perform test analysis on the cleaning liquid or filter residue or the adhesive film according to particle size, distribution and chemical properties, so that the secondary pollution probability in the test process can be reduced. In order to reduce the testing time, improve the reproducibility of the measurement results and reduce the probability of human contamination, the whole observation and testing process is preferably automated.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides a pollution particle observing and testing device to solve the deficiencies in the prior art.
In order to achieve the above purpose, the purpose of the present invention is achieved by the following technical solutions:
there is provided a contamination particle observation and testing apparatus comprising:
the optical imaging equipment is used for imaging the particle accumulation distributed on the planar structure and comprises a reflected light stereomicroscope and an LED annular light source, wherein the reflected light stereomicroscope is provided with a digital CCD camera, and the LED annular light source is respectively positioned at two sides of a lens cone of the reflected light stereomicroscope;
an illumination device that illuminates at least a portion of the accumulation of particles to form an illuminated measurement area, the illuminated measurement area having a filter disposed therein;
the polarization equipment comprises an optical polarizer and an optical analyzer, and the optical analyzer is positioned at the front end of the lens cone of the reflected light stereomicroscope;
a positioning device moving in a grid within the illuminated measurement area of the particle accumulation;
a detection device receiving and evaluating imaging data from the optical imaging device within each of the illumination measurement areas;
the processing display equipment comprises a PC (personal computer) and a display, wherein the PC is respectively connected with the digital CCD camera and the positioning equipment;
the fixing device comprises a frame, wherein the frame is a rectangular frame with an opening on one side, the LED annular light source is positioned in the rectangular frame, and an illuminating light beam emitted by the LED annular light source is emitted from the opening of the rectangular frame;
the power output equipment comprises a servo motor, and the display, the PC, the servo motor and the frame are sequentially connected; wherein,
the polarization device comprises an electronic adjustment device, the optical polarizer and the optical analyzer respectively realize relative position adjustment between a first polarization position and a second polarization position through the electronic adjustment device, and the optical imaging device respectively generates images of the particle accumulation on the first polarization position and the second polarization position.
In the above device for observing and testing pollution particles, the optical polarizer is a polarizing film located in the illumination beam emitted from the LED ring light source, and the position of the polarizing film is adjusted by the electronic adjusting device.
The above-mentioned pollution particle observation and test device, wherein, the positioning apparatus is a multi-axial controller.
The above contamination particle observation and testing apparatus, wherein the illumination device comprises an auto-focusing system.
Compared with the prior art, the utility model has the advantages that:
the secondary pollution probability of the test process can be reduced, the whole observation and test process is realized automatically, the test time is reduced, the reproducibility of the measurement result is improved, and the artificial pollution probability is reduced.
Drawings
The accompanying drawings, which form a part hereof, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without undue limitation. In the drawings:
fig. 1 shows the structure diagram of the device for observing and testing pollution particles of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
Referring to fig. 1, the utility model discloses pollution particle is observed and testing arrangement includes optical imaging device, lighting apparatus, polarization equipment, positioning device, check out test set, processing display device, fixed equipment and power take off equipment, wherein optical imaging device images the granule accumulations of distribution on planar structure, including reverberation stereomicroscope 1 and LED annular light source 3, image the granule accumulations of distribution on planar structure, including reverberation stereomicroscope and LED annular light source, reverberation stereomicroscope 1 disposes digital CCD camera 2, LED annular light source 3 is located reverberation stereomicroscope 1's lens cone both sides respectively. The illumination device illuminates at least a part of the particle accumulation forming an illuminated measurement area 4, a filter 5 being arranged within the illuminated measurement area 4. The polarizing device includes an optical polarizer and an optical analyzer 6, and the optical analyzer 6 is located at the front end of the lens barrel of the reflected light stereomicroscope 1. The positioning device is moved in a grid within the illuminated measurement area of the particle accumulation. The detection device receives and evaluates the imaging data from the optical imaging device in each illuminated measurement area 4. The processing and displaying device comprises a PC (personal computer) 7 and a display 8, wherein the PC 7 is respectively connected with the digital CCD camera 2 and the positioning device. The fixing device comprises a frame 9, the frame 9 is a rectangular frame with an opening on one side, the LED annular light source 3 is positioned in the rectangular frame, and an illuminating light beam 10 emitted by the LED annular light source 3 is emitted from the opening of the rectangular frame. The power output device comprises a servo motor 11, a display 8, a PC 7, the servo motor 11 and a frame 9 which are connected in sequence. The polarizing device comprises an electronic adjustment device, an optical polarizationThe optical sheet and the optical analyzer respectively realize relative position adjustment between a first polarization position and a second polarization position through electronic adjusting equipment, and the optical imaging equipment respectively generates images of particle accumulation on the first polarization position and the second polarization position. In the present technical solution, the optical polarizer is a polarizing film 12 located in the illumination beam emitted by the LED ring light source 3, the position of the polarizing film 12 is adjusted by an electronic adjusting device, the positioning device is a multi-axial controller 13, an indication arrow 14 in the figure indicates the moving direction of the multi-axial controller 13, and the illumination device includes an auto-focusing system. Continuing to refer to the illustration, the filter 5 is placed on the slide 15 and the field of view of the reflected light stereomicroscope 1 is 1X1mm2To 5X5mm2The filter 5 is circular with a diameter of 26mm or 50 mm.
As can be seen from the above embodiments, the present invention has the advantages that:
the secondary pollution probability of the test process can be reduced, the whole observation and test process is realized automatically, the test time is reduced, the reproducibility of the measurement result is improved, and the artificial pollution probability is reduced.
The present invention has been described in detail with reference to the specific embodiments, but the present invention is not limited to the specific embodiments described above, and is only exemplary. Any equivalent modifications and substitutions are within the scope of the present invention for those skilled in the art. Accordingly, variations and modifications in equivalents may be made without departing from the spirit and scope of the invention, which is intended to be covered by the following claims.
Claims (4)
1. A contamination particle observation and testing apparatus, comprising:
the optical imaging equipment is used for imaging the particle accumulation distributed on the planar structure and comprises a reflected light stereomicroscope and an LED annular light source, wherein the reflected light stereomicroscope is provided with a digital CCD camera, and the LED annular light source is respectively positioned at two sides of a lens cone of the reflected light stereomicroscope;
an illumination device that illuminates at least a portion of the accumulation of particles to form an illuminated measurement area, the illuminated measurement area having a filter disposed therein;
the polarization equipment comprises an optical polarizer and an optical analyzer, and the optical analyzer is positioned at the front end of the lens cone of the reflected light stereomicroscope;
a positioning device moving in a grid within the illuminated measurement area of the particle accumulation;
a detection device receiving and evaluating imaging data from the optical imaging device within each of the illumination measurement areas;
the processing display equipment comprises a PC (personal computer) and a display, wherein the PC is respectively connected with the digital CCD camera and the positioning equipment;
the fixing device comprises a frame, wherein the frame is a rectangular frame with an opening on one side, the LED annular light source is positioned in the rectangular frame, and an illuminating light beam emitted by the LED annular light source is emitted from the opening of the rectangular frame;
the power output equipment comprises a servo motor, and the display, the PC, the servo motor and the frame are sequentially connected; wherein,
the polarization device comprises an electronic adjustment device, the optical polarizer and the optical analyzer respectively realize relative position adjustment between a first polarization position and a second polarization position through the electronic adjustment device, and the optical imaging device respectively generates images of the particle accumulation on the first polarization position and the second polarization position.
2. The contaminant particle viewing and testing device of claim 1, wherein the optical polarizer is a polarizing film positioned within the illumination beam from the LED ring light source, the position of the polarizing film being adjusted by the electronic adjustment device.
3. The contaminant particle viewing and testing apparatus of claim 2, wherein the positioning device is a multi-axial controller.
4. The contaminant particle viewing and testing apparatus of claim 1, wherein the illumination device comprises an auto-focusing system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721012834.XU CN207051150U (en) | 2017-08-14 | 2017-08-14 | One kind pollution particle observation and test device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721012834.XU CN207051150U (en) | 2017-08-14 | 2017-08-14 | One kind pollution particle observation and test device |
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| CN207051150U true CN207051150U (en) | 2018-02-27 |
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| CN201721012834.XU Active CN207051150U (en) | 2017-08-14 | 2017-08-14 | One kind pollution particle observation and test device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109387460A (en) * | 2017-08-14 | 2019-02-26 | 阅美测量系统（上海）有限公司 | A kind of observation of pollution particle and test device and analysis method |
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2017
- 2017-08-14 CN CN201721012834.XU patent/CN207051150U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109387460A (en) * | 2017-08-14 | 2019-02-26 | 阅美测量系统（上海）有限公司 | A kind of observation of pollution particle and test device and analysis method |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221227 Address after: No. 9, Lianxin Road, Taicang City, Suzhou City, Jiangsu Province 215488 Patentee after: Yuemei Measurement System (China) Co.,Ltd. Address before: 201807 Room 1011, 1013, 1015, Building A, No. 1355, Chengbei Road, Industrial Zone, Jiading District, Shanghai Patentee before: JOMESA MEASUREMENT SYSTEM (SHANGHAI) CO.,LTD. |
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| TR01 | Transfer of patent right |