CN206990429U - A kind of microcell visible spectrophotometer - Google Patents

Abstract

The utility model discloses a micro-area visible spectrometer. The micro-area visible spectrometer comprises: two optical path supports: a horizontal optical path support and a vertical optical path support; and a transmission output module, a reflection output module, Microscopic module, imaging observation module, spectral measurement module, adjustable diaphragm and sample three-dimensional adjustment platform; among them, the horizontal optical path support and vertical optical path support connect the optical path through the mirror; the transmission output module, reflection output module and microscope module It is fixed on the vertical optical path support, and the imaging observation module, adjustable aperture and spectrum measurement module are fixed on the horizontal optical path support. The utility model can realize the microscopic observation of the sample, can carry out the transmission type and the reflection type visible spectrum measurement on the sample whose effective light-transmitting area is more than 5 microns × 5 microns, and has the advantages of simple structure, good stability, convenient adjustment and positioning. Accurate and easy to expand the advantages.

Description

A Micro-Zone Visible Spectrometer

technical field

The utility model relates to the technical field of micro-visible spectrometers, in particular to a multifunctional micro-region visible spectrometer with the advantages of low cost, easy expansion, simple operation and small sampling area.

Background technique

Today, with the rapid development of modern information technology, micro-nano optics, biology and other related disciplines, the requirements for device miniaturization and on-chip integration are getting higher and higher. The size of many micro-nano devices or biological samples has been reduced to the order of microns. Traditional microspectrometers have been difficult to meet the needs of spectral measurement in small sampling areas.

For traditional microspectrometers, when measuring the visible spectrum of a sample, it is necessary to focus and collimate the light beam so that the collimated parallel light irradiates the area to be measured of the sample, and then perform spectral analysis on the transmitted or reflected light. For samples with a size in the micron range, it is difficult for a micro-spectrometer to focus the light spot to such a small size that the invalid light that does not irradiate the sample interferes with the measurement results and causes errors. In addition, during the test, due to the small size of the sample, there will be problems such as difficulty in positioning and the influence of stray light.

To sum up, it is necessary to provide a multifunctional micro-area visible spectrometer with low cost, easy operation and reasonable optical path arrangement.

Contents of the invention

The main purpose of the utility model is to provide a visible spectrometer with low cost, easy expansion, simple operation, small sampling area down to micron level and reasonable arrangement of optical paths.

A micro-area visible spectrometer, comprising a horizontal optical path support and a vertical optical path support; and a transmission output module, a reflection output module, a microscope module, an imaging observation module, a spectral measurement module, and an adjustable diaphragm placed on the two optical path supports and the sample three-dimensional adjustment platform; the transmission output module, reflection output module and microscope module are fixed on the vertical light path support, and the imaging observation module, adjustable aperture and spectrum measurement module are fixed on the horizontal light path support; the reflector (8) is fixed At the connection between the horizontal optical path bracket and the vertical optical path bracket;

The transmission output module includes a first optical fiber halogen light source, a first transmission optical fiber, a first optical fiber adapter and a first collimating lens; wherein, the first optical fiber halogen light source is connected to the first transmission optical fiber; the other end of the first transmission optical fiber is connected to the first An optical fiber adapter; the exit port of the first optical fiber adapter is placed at the focal point of the first collimating lens; the output light of the first optical fiber halogen light source passes through the first transmission fiber and exits at the exit port of the first optical fiber adapter; And form parallel light through the first collimating lens;

The reflection output module includes a first beam splitter, a second fiber optic halogen light source, a second transmission fiber, a second fiber adapter and a second collimator lens; wherein, the second fiber optic halogen light source is connected to one end of the second transmission fiber; the second The other end of the transmission fiber is connected to the second fiber adapter; the output port of the second fiber adapter is placed at the focal point of the second collimator lens; the light emitted by the second optical fiber halogen light source passes through the second transmission fiber and is transferred to the second fiber The output port of the component exits; and forms parallel light through the second collimating lens; the first beam splitter is on the same optical axis as the transmission output module in the vertical direction, and is on the same optical axis as the second collimating lens in the horizontal direction;

The microscopic module includes a microscopic objective lens and a third collimating lens; wherein, the optical axis of the microscopic objective lens coincides with the third collimating lens and the focus coincides; the optical axis of the microscopic objective lens in the microscopic module, the third collimating lens and The optical axes in the transmission output module are coincident; the microscopic module is placed below the first collimating lens; the microscopic objective lens is placed below the first collimating lens and above the second beam splitter; the parallel light emitted by the first collimating lens, The beam is expanded by the microscope objective lens, and then collimated by the third collimating lens to emit parallel light;

The reflector is placed at the bottom of the vertical light path support, forming an angle of 45 degrees with the vertical light path support, so that the vertical light path exits horizontally through the reflector and enters the horizontal light path; the reflector is in the same direction as the vertical light path support in the vertical direction. The optical axis is the same as the optical axis of the horizontal optical path bracket in the horizontal direction;

The imaging observation module includes a second beam splitter and an image sensor; wherein the second beam splitter is placed at an angle of 45 degrees to the horizontal light path, so that the incident light is transmitted to the image sensor in the vertical direction on the horizontal plane while the image sensor receives the outgoing light ;

The adjustable aperture is placed behind the second beam splitter, on the same optical axis as the second beam splitter; and the distance between the adjustable aperture and the image sensor and the second beam splitter is the same, and the adjustable aperture and the image sensor are at the same time as the sample plane Conjugate; control the aperture of the outgoing beam in the optical path by adjusting the size of the adjustable diaphragm;

The spectrum measurement module includes a focusing lens, a third optical fiber adapter, a third transmission fiber, a third fiber optic spectrometer, and a third optical fiber halogen light source; the focusing lens is placed behind the adjustable diaphragm, and is connected with the adjustable diaphragm and the second light splitter. The mirror is on the same optical axis; the third optical fiber adapter is placed at the rear focal point of the focusing lens, so that the outgoing light is converged and coupled with the third optical fiber adapter; the third optical fiber halogen light source or the third optical fiber spectrometer is connected to the third optical fiber through the third transmission fiber Fiber optic adapters are connected through optical fibers.

Preferably, the optical path includes a sample three-dimensional adjustment platform for adjusting the position of the sample in the optical path; the sample three-dimensional adjustment platform has a clamping bracket for clamping or laying the sample on the clamped glass slide, Placed in the optical path; the sample is placed between the transmission output module and the microscopic observation module, and the center of the effective light-passing area of the sample is on the optical axis of the transmission output module and the microscopic observation module.

Further, the described microscopic eyepiece, if the magnification is too large, the luminous flux will be insufficient, and if the magnification is too small, the sampling area of the sample will be enlarged by the system. Considering the influence of the two, the microscopic eyepiece preferably adopts a magnification of 20 times microscope eyepiece.

Preferably, the minimum light-passing area of the adjustable diaphragm is 0.1×0.1 mm.

Preferably, the image sensor is connected to a computer for observing the sample.

As can be seen from the above scheme, the utility model can have the following advantages simultaneously:

1) Without changing the optical path, it can measure the transmission spectrum and reflection spectrum of the sample, and the switching is convenient and simple;

2) With the help of the microscope module, image sensor CCD and sample three-dimensional adjustment frame, the rapid positioning of the sample can be realized, and the operation is convenient and simple;

3) All optical components are placed on the vertical optical path bracket and the horizontal optical path bracket to facilitate the coaxial adjustment of the optical path;

4) Both the light source and the spectrometer are externally connected by optical fibers, which can be replaced at any time according to the measurement needs, and the expansion is convenient;

5) By adjusting the size of the aperture, it can adapt to the transmission/reflection spectrum measurement of samples of various sizes. When using a microscope objective lens with a magnification of 20 times, the minimum sampling area can reach 5 microns × 5 microns.

Description of drawings

Figure 1 is a front view of the structure of the micro-area visible spectrometer;

Fig. 2 is a top view of the horizontal optical path structure of the micro-area visible spectrometer;

Figure 3 is a schematic diagram of the optical path of the spectrometer when the aperture is adjusted before measurement; where a) is a schematic diagram of the optical path of the main view of the spectrometer, and b) is a schematic diagram of the top view of the horizontal optical path of the spectrometer;

Fig. 4 is a schematic diagram of the optical path of the spectrometer when measuring the transmission spectrum of the sample; wherein a) is a schematic diagram of the optical path of the main view of the spectrometer, and b) is a schematic diagram of the top view of the horizontal optical path of the spectrometer;

Fig. 5 is a schematic diagram of the optical path of the spectrometer when measuring the reflection spectrum of the sample; wherein a) is a schematic diagram of the optical path of the main view of the spectrometer, and b) is a schematic diagram of the top view of the horizontal optical path of the spectrometer;

Figure 6 is a self-made subwavelength microstructure color filter (purple) and its reflection spectrum measurement results; where a) is a scanning electron microscope partial image of a self-made subwavelength microstructure color filter (purple); b) is the filter Partial image of the optical microscope, its color is purple; c) is the result obtained by using the above-mentioned micro-area visible spectrometer to measure the reflection spectrum of the filter;

Figure 7 is a self-made subwavelength microstructure color filter (blue) and its transmission spectrum measurement results; where a) is a scanning electron microscope partial image of the self-made subwavelength microstructure color filter (blue); b) is the A partial image of the optical microscope of the filter, its color is blue; c) is the result obtained by measuring the transmission spectrum of the filter using the above-mentioned micro-area visible spectrometer.

In Fig. 1 to Fig. 5: 1-the first optical fiber adapter; 2-the first collimating lens; 3-microscopic objective lens; 4-the first beam splitter; 5-the second collimating lens; 6-the second optical fiber Adapter; 7-third collimating lens; 8-mirror; 9-second beam splitter; 10-image sensor; 11-adjustable diaphragm; 12-focusing lens; 13-third optical fiber adapter; 14-first transmission optical fiber; 15-first optical fiber halogen light source; 16-second transmission optical fiber; 17-second optical fiber halogen light source; 18-third transmission optical fiber; 19-fiber optic spectrometer; 20-sample three-dimensional adjustment table; 21 - A third fiber optic halogen light source.

detailed description

In order to make the purpose, technical solutions and advantages of the utility model clearer, the utility model will be further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

Fig. 1 is a structural front view of a multifunctional micro-region visible spectrometer provided by the utility model, and Fig. 2 is a structural top view of a horizontal optical path. The multifunctional micro-area visible spectrometer includes two optical path supports: a horizontal optical path support and a vertical optical path support; and a transmission output module, a reflection output module, a microscopic module, an imaging observation module, and a spectral measurement module placed on the two optical path supports. , an adjustable aperture and a sample three-dimensional adjustment platform; the transmission output module, the reflection output module and the microscope module are fixed on the vertical optical path support, and the imaging observation module, the adjustable aperture 11 and the spectrum measurement module are fixed on the horizontal optical path support; The reflector 8 is fixed at the connection between the horizontal optical path support and the vertical optical path support.

Wherein, the transmission output module, the microscope module and the reflection output module are fixed on the vertical optical path support.

The transmission output module includes a first optical fiber halogen light source 15, a first transmission optical fiber 14, a first optical fiber adapter 1 and a first collimating lens 2; wherein, the first optical fiber halogen light source 15 is connected to the first transmission optical fiber 14; the first The other end of the transmission fiber 14 is connected to the first optical fiber adapter 1; the exit port of the first optical fiber adapter 1 is placed at the focal point of the first collimator lens 2; the output light of the first optical fiber halogen light source 15 passes through the first transmission optical fiber 14 , exit at the exit port of the first optical fiber adapter 1 ; and pass through the first collimating lens 2 to form parallel light.

The reflection output module includes a first beam splitter 4, a second optical fiber halogen light source 17, a second transmission optical fiber 16, a second optical fiber adapter 6 and a second collimating lens 5; wherein, the second optical fiber halogen light source 17 is connected to the second transmission optical fiber One end of the optical fiber 16 is connected; the other end of the second transmission optical fiber 16 is connected to the second optical fiber adapter 6; the exit port of the second optical fiber adapter 6 is placed at the focal point of the second collimating lens 5; the second optical fiber halogen light source 17 emits light Through the second transmission optical fiber 16, exit at the exit port of the second optical fiber adapter 6; The direction is the same as the optical axis of the second collimating lens 5 .

The microscopic module includes a microscopic objective lens 3 and a third collimating lens 7; wherein, the optical axes of the microscopic objective lens 3 and the third collimating lens 7 are coincident and focus coincident, and the magnification of the microscopic objective lens 3 is 20 times; the microscopic module The optical axes of the microscopic objective lens 3 and the third collimating lens 7 coincide with the optical axis in the transmission output module; the microscopic module is placed below the first collimating lens 2; the microscopic objective lens 3 is placed under the first collimating lens 2, and above the second beam splitter 4; the parallel light emitted by the first collimator lens 2 is expanded by the microscope objective lens 3, and then collimated by the third collimator lens 7 to emit parallel light.

The reflector 8 is placed at the bottom of the vertical light path support, forming an angle of 45 degrees with the vertical light path support, so that the vertical light path exits horizontally through the reflector 8 and enters the horizontal light path. The mirror 8 is on the same optical axis as the vertical light path support in the vertical direction, and is on the same optical axis as the horizontal light path support in the horizontal direction.

The imaging observation module, the adjustable diaphragm 11 and the spectrum measurement module are fixed on the horizontal optical path support.

The imaging observation module includes a second spectroscope 9 and an image sensor 10; wherein the second spectroscope 9 is placed at an angle of 45 degrees to the horizontal optical path, so that the incident light is transmitted to the image sensor 10 in a vertical direction on the horizontal plane while the incident light is transmitted; The sensor 10 receives the emitted light, and is connected to a computer to observe the sample through software.

The adjustable aperture 11 is placed behind the second beam splitter 9, on the same optical axis as the second beam splitter 9; and the distance from the adjustable aperture 11 and the image sensor 10 to the second beam splitter 9 is the same, and the adjustable aperture 11 and the image sensor 10 are conjugate to the sample plane; by adjusting the size of the adjustable diaphragm 11, the aperture of the outgoing light beam in the optical path can be controlled, so that the adjustable diaphragm 11 blocks the light that does not pass through the effective sampling area of the sample; the adjustable diaphragm 11 The minimum light-transmitting area is 0.1×0.1 mm, and when using a microscope objective lens with a magnification of 20 times, the effective sampling area of the sample can be as small as 5 microns×5 microns.

The spectral measurement module includes a focusing lens 12, a third optical fiber adapter 13, a third transmission fiber 18, a third optical fiber spectrometer 19, and a third optical fiber halogen light source 21; wherein the focusing lens 12 is placed behind the adjustable diaphragm 11, and can Diaphragm 11, the second beam splitter 9 are on the same optical axis; the third optical fiber adapter 13 is placed at the rear focal point of the focusing lens 12, so that the outgoing light is converged and coupled with the third optical fiber adapter 13; the third optical fiber halogen light source 21 Or the third optical fiber spectrometer 19 may be connected to the third optical fiber adapter 13 through the third transmission optical fiber 18 .

Before measuring the spectrum, the components should be connected and placed according to the requirements in the scheme, and the optical path should be adjusted so that the optical path is coaxial. Among them, there are relatively strict requirements on the position of the adjustable aperture 11 , which is required to be conjugate to the image sensor 10 . Therefore, first perform the following debugging:

First, the sample three-dimensional adjustment table 20 should be adjusted so that the sample surface and the image sensor 10 form an object-image relationship, that is, the sample surface is clearly imaged on the image sensor 10, and the debugging process is as follows: as shown in Figure 4, the sample to be tested is placed on the sample three-dimensional adjustment table 20 Above, the first optical fiber halogen light source 15 is turned on, and the light emitted by the first optical fiber halogen light source 15 passes through the first collimating lens 2 to form parallel light and exits. After the parallel light passes through the sample, it passes through the microscope module and is reflected on the mirror 8 and enters the horizontal optical path. At the second beam splitter 9, the light beam is divided into two beams, and one beam is reflected and enters the image sensor 10. At this time, the image sensor 10 There should be an image of the sample on the image, adjust the sample three-dimensional adjustment stage 20 to change the spatial position of the sample, make the image of the sample on the image sensor 10 centered and clear, and mark the imaging area of the sample on the computer. Turn off the first fiber optic halogen light source 15.

Then adjust the position of the adjustable aperture 11 so that the position of the adjustable aperture 11 is conjugate to the sample surface. The debugging process is as follows: as shown in Figure 3, Figure 3 is the schematic diagram of the optical path of the spectrometer when the adjustable aperture 11 is adjusted before measurement, the left side of Figure 3 is the schematic diagram of the main view of the spectrometer, and the right side is the schematic diagram of the top view of the horizontal optical path. The sample is removed from the three-dimensional adjustment platform 20 of the sample, a reflector for debugging is placed on the three-dimensional adjustment platform 20 of the sample and the mirror is kept facing down, and the third optical fiber halogen light source 21 is passed through the third transmission optical fiber 18 and the third optical fiber The adapter 13 is connected. At this time, the light emitted by the third optical fiber halogen light source 21 is collimated by the focusing lens 12 to become parallel light, passes through the adjustable diaphragm 11 and the second beam splitter 9, and is reflected at the reflector 8 and enters the vertical beam. The light path enters the microscopic module and emits at the reflector used for debugging on the sample three-dimensional adjustment platform 20, returns along the original path, and when reflected back to the second beam splitter 9, the light is divided into two beams, one of which The reflection enters the image sensor 10 . Now on the image sensor 10 there should be an image of the adjustable diaphragm 11, adjust the front and rear positions of the adjustable diaphragm 11, when the image of the adjustable diaphragm 11 is clear, the adjustable diaphragm 11 and the image sensor 10 will move to the second The distance between the beam splitter 9 is the same, and the position of the adjustable aperture 11 and the position of the image sensor 10 are both conjugate to the object plane where the sample is located.

At this time, the image of the adjustable diaphragm 11 is adjusted by adjusting the aperture size of the adjustable diaphragm 11 to adjust the size of the image, so that the image of the adjustable diaphragm 11 is covered by the mark of the sample image, and the mark of the adjustable diaphragm 11 is marked. the boundary of the image; turn off the third optical fiber halogen light source 21.

For the measurement of the transmission spectrum, as shown in Figure 4, Figure 4 is a schematic diagram of the optical path of the spectrometer when measuring the transmission spectrum of the sample. At this time, the fiber optic spectrometer 19 is connected to the light path, and the first light halogen light source 15 is turned on. The light emitted by the first fiber optic halogen light source 15 passes through the first transmission fiber 14, and is collimated by the first collimating lens 2 to become parallel light. After passing through the sample, After entering the microscope module, after being enlarged by the microscope objective lens 3 and the third collimating lens 7, it is reflected at the mirror 8 and enters the horizontal optical path, and the light beam is divided into two beams at the second beam splitter 9, and one beam is reflected and enters the image sensor 10. A beam transmitted through the adjustable diaphragm 11 is converged by the focusing lens 12, coupled with the third optical fiber adapter 13, and enters the fiber optic spectrometer 19 through the third transmission optical fiber 18. Observe the sample through the image sensor 10 , adjust the sample three-dimensional adjustment table 20 to center the sample image and cover the image of the adjustable aperture 11 . At this time, although the diameter of the light irradiated on the sample is larger and the light spot is larger than the effective area of the sample, the image of the adjustable aperture 11 is smaller than that of the sample and is covered by the sample image. Because the adjustable aperture 11 is conjugate to the sample surface, light that does not pass through the effective area of the sample cannot pass through the aperture and is blocked by the aperture. Ineffective light that does not pass through the effective area of the sample cannot enter the fiber optic spectrometer 19 and will not affect the measurement results. At this time, all the light obtained by the fiber optic spectrometer 19 is transmitted through the effective area of the sample.

After adjusting the optical path, first turn off the first optical fiber halogen light source 15, and measure the dark spectrum through the optical fiber spectrometer 19, that is, the ambient light spectrum obtained when the light source does not emit light; then turn on the first optical fiber halogen light source 15 to obtain the sample transmission spectrum; remove the sample Obtain the bright spectrum, that is, the luminescence spectrum of the light source itself; make the difference between the transmission spectrum and the bright spectrum and the dark spectrum, and then compare the two to obtain the transmittance of the sample.

When measuring the reflectance spectrum, it is also necessary to make the sample surface and the image sensor 10 and the adjustable diaphragm 11 in an object-image conjugate relationship before the test, and mark the image of the sample and the image of the adjustable diaphragm 11. The specific debugging method is as follows :

As shown in Figure 5, the sample to be measured is placed on the sample three-dimensional adjustment table 20, the second optical fiber halogen light source 17 is turned on, the light emitted by the second optical fiber halogen light source 17 passes through the second transmission optical fiber 16, and is collimated by the second collimating lens 5 Become parallel light, reflect upward through the first beam splitter 4, reflect on the surface of the sample after passing through the microscope objective lens 3, pass through the microscope objective lens 3 again, and transmit downward at the first beam splitter 4, and pass through the third collimation After the lens 7, it is reflected on the surface of the mirror 8 and enters the horizontal optical path; the light is divided into two beams at the second beam splitter 9, and one beam is reflected and enters the image sensor 10. At this time, the image sensor 10 has the image of the sample on it, and the three-dimensional adjustment table 20 of the sample is adjusted. To change the spatial position of the sample, make the image of the sample centered and clear on the image sensor 10, and mark the imaging area of the sample on the computer; turn off the second optical fiber halogen light source 17;

As shown in Figure 3, place a reflector for debugging on the sample three-dimensional adjustment table and keep the mirror facing down, remove the fiber optic spectrometer 19 from the third transmission fiber 18, and pass the third fiber halogen light source 21 through the third transmission fiber 18 is connected with the third optical fiber adapter 13; at this time, the light emitted by the third optical fiber halogen light source 21 is collimated by the focusing lens 12 to become parallel light, passes through the adjustable diaphragm 11 and the second dichroic mirror 9, and passes through the reflector 8 Reflected at the vertical light path, enters the microscopic module and emits at the reflector used for debugging on the sample three-dimensional adjustment platform 20, returns along the original path, and when reflected back to the second beam splitter 9, the light is split into two Beams, one of which is reflected into the image sensor 10; at this time, the image of the adjustable diaphragm 11 is arranged on the image sensor 10, so that the image of the adjustable diaphragm 11 is covered by the mark of the sample image, and the mark of the adjustable diaphragm 11 is marked. the boundary of the image; turn off the third optical fiber halogen light source 21.

For the measurement of the reflectance spectrum, as shown in Figure 5, Figure 5 is a schematic diagram of the optical path of the spectrometer when measuring the reflectance spectrum of the sample. At this moment, the fiber optic spectrometer 19 is connected into the optical path. Turn on the second optical fiber halogen light source 17, the light emitted by the second optical fiber halogen light source 17 passes through the second transmission fiber 16, is collimated by the second collimating lens 5 and becomes parallel light, is reflected upwards through the first beam splitter 4, and passes through the microscope objective After 3, the light is reflected on the surface of the sample, passes through the microscope objective lens 3 again, and transmits downward at the first beam splitter 4, passes through the third collimator lens 7, reflects on the surface of the reflector 8 and enters the horizontal light path. The light is divided into two beams at the second beam splitter 9, one beam is reflected and enters the image sensor 10, and the other beam is transmitted through the adjustable diaphragm 11 and converged by the focusing lens 12, coupled with the third optical fiber adapter 13, and passed through the third transmission optical fiber 18 enters the fiber optic spectrometer 19. At this time, the image sensor 10 can receive the image of the sample. The positions of the image sensor 10 and the adjustable diaphragm 11 are all conjugate to the sample plane, and the position of the sample is adjusted so that it can cover the previously marked area when the image is clear. Image of dimmer diaphragm 11. At this time, although the diameter of the light irradiated on the sample is relatively large, and the light spot is larger than the effective area of the sample, the image of the adjustable diaphragm 11 is smaller than that of the sample and is covered by the sample image, because the adjustable diaphragm 11 and the sample surface share the same area. Because of the yoke, the light that is not reflected in the effective area of the sample cannot pass through the aperture and is blocked by the aperture. Ineffective light that does not pass through the effective area of the sample cannot enter the fiber optic spectrometer 19 and will not affect the measurement results. At this time, all the light obtained by the fiber optic spectrometer 19 is reflected back from the effective area of the sample.

After debugging, first turn off the second optical fiber halogen light source 17, measure the dark spectrum through the optical fiber spectrometer 19, that is, the ambient light spectrum obtained when the light source does not emit light; then turn on the second optical fiber halogen light source 17 to obtain the sample reflection spectrum; remove the sample to obtain The bright spectrum is the luminous spectrum of the light source itself; the reflectance spectrum and the bright spectrum are respectively compared with the dark spectrum, and then the reflectance of the sample can be obtained by comparing the two.

Figure 6 is a self-made subwavelength microstructure color filter (purple) and its reflection spectrum measurement results; where a) is a scanning electron microscope partial image of a self-made subwavelength microstructure color filter (purple); b) is the filter Partial image of the optical microscope, its color is purple; c) is the result obtained by measuring the reflection spectrum of the filter using the above-mentioned micro-area visible spectrometer, which is consistent with the observation result of the optical microscope.

Figure 7 is a self-made subwavelength microstructure color filter (blue) and its transmission spectrum measurement results; where a) is a scanning electron microscope partial image of the self-made subwavelength microstructure color filter (blue); b) is the The partial image of the optical microscope of the filter, its color is blue; c) is the result obtained by measuring the transmission spectrum of the filter using the above-mentioned micro-area visible spectrometer, which is consistent with the observation result of the optical microscope.

The above-mentioned embodiment is only a preferred solution of the present utility model, but it is not intended to limit the present utility model. Various changes and modifications can be made by those skilled in the art without departing from the spirit and scope of the present invention. Therefore, all technical solutions obtained by means of equivalent replacement or equivalent transformation fall within the protection scope of the present utility model.

Claims (5)

1. A micro-area visible spectrometer, characterized in that the visible spectrometer includes a horizontal optical path support and a vertical optical path support; and a transmission output module, a reflection output module, a microscopic module, an imaging observation module, Spectrum measurement module, adjustable aperture and sample three-dimensional adjustment table; transmission output module, reflection output module and microscope module are fixed on the vertical light path support, imaging observation module, adjustable aperture and spectrum measurement module are fixed on the horizontal light path support on; the reflector (8) is fixed at the connection between the horizontal optical path support and the vertical optical path support; The transmission output module includes a first optical fiber halogen light source (15), a first transmission optical fiber (14), a first optical fiber adapter (1) and a first collimating lens (2); wherein, the first optical fiber halogen light source (15) Connect with the first transmission fiber (14); the other end of the first transmission fiber (14) is connected to the first fiber adapter (1); the exit port of the first fiber adapter (1) is placed on the first collimator lens (2 ) at the focal point; the outgoing light of the first optical fiber halogen light source (15) passes through the first transmission optical fiber (14), and exits at the exit port of the first optical fiber adapter (1); and is formed by the first collimating lens (2) Parallel light; The reflection output module includes a first beam splitter (4), a second optical fiber halogen light source (17), a second transmission optical fiber (16), a second optical fiber adapter (6) and a second collimating lens (5); wherein, The second optical fiber halogen light source (17) is connected to one end of the second transmission optical fiber (16); the other end of the second transmission optical fiber (16) is connected to the second optical fiber adapter (6); the second optical fiber adapter (6) exit port Placed at the focal point of the second collimating lens (5); the second optical fiber halogen light source (17) exits the light through the second transmission optical fiber (16), and exits at the exit port of the second optical fiber adapter (6); and passes through the second Two collimating lenses (5) form parallel light; the first beam splitter (4) is on the same optical axis as the transmission output module in the vertical direction, and is on the same optical axis as the second collimating lens (5) in the horizontal direction; the microscopic module includes Microscopic objective lens (3) and the 3rd collimating lens (7); Wherein, microscopic objective lens (3) coincides with the optical axis of the 3rd collimating lens (7) and the focal point overlaps; Microscopic objective lens (3) in the microscopic module ), the optical axis of the third collimating lens (7) coincides with the optical axis in the transmission output module; the micro module is placed below the first collimating lens (2); the microscopic objective lens (3) is placed in the first collimating lens Below the lens (2), above the second beam splitter (4); the parallel light emitted by the first collimating lens (2) is expanded through the microscopic objective lens (3), and then collimated by the third collimating lens (7). Straight, emitting parallel light; The reflecting mirror (8) is placed at the bottom of the vertical optical path support, and forms an angle of 45 degrees with the vertical optical path support, so that the vertical optical path passes through the reflecting mirror (8) and exits horizontally, and is incident in the horizontal optical path; The optical axis is the same as that of the vertical optical path support in the vertical direction, and the same optical axis as that of the horizontal optical path support in the horizontal direction; The imaging observation module includes a second beamsplitter (9) and an image sensor (10); wherein the second beamsplitter (9) is placed at an angle of 45 degrees to the horizontal light path, so that the incident light is emitted in a vertical direction on the horizontal plane while being transmitted To the image sensor (10); the image sensor (10) receives the outgoing light; Adjustable aperture (11) is placed on the second beam splitter (9) rear, with the second beam splitter (9) optical axis; And adjustable aperture (11) and image sensor (10) to the second beam splitter ( 9) have the same distance, at this time the adjustable aperture (11) and the image sensor (10) are conjugate to the sample plane; the aperture of the outgoing light beam in the optical path is controlled by adjusting the size of the adjustable aperture (11); Spectral measurement module comprises focusing lens (12), the 3rd optical fiber adapter (13), the 3rd transmission optical fiber (18), the 3rd optical fiber spectrometer (19), the 3rd optical fiber halogen light source (21); Wherein focusing lens (12 ) is placed behind the adjustable diaphragm (11), on the same optical axis as the adjustable diaphragm (11) and the second beam splitter (9); the third optical fiber adapter (13) is placed at the rear focal point of the focusing lens (12) place, the outgoing light is converged and coupled with the third optical fiber adapter (13); the third optical fiber halogen light source (21) or the third optical fiber spectrometer (19) is connected to the third optical fiber adapter ( 13) Connected by optical fiber. 2. micro-region visible spectrometer as claimed in claim 1, is characterized in that, comprises a sample three-dimensional adjusting table in the optical path, is used to adjust the position of sample in the optical path; Sample three-dimensional adjusting table (20) has a clamping support, It is used to clamp or place the sample flat on the clamped glass slide and put it into the optical path; the sample is placed between the transmission output module and the microscopic observation module, and the center of the effective light-transmitting area of the sample is between the transmission output module and the display module. on the optical axis of the micro-observation module. 3. The micro-area visible spectrometer as claimed in claim 2, characterized in that, the magnification of the microscopic objective lens (3) is 20 times. 4. The micro-area visible spectrometer according to claim 1, characterized in that the minimum light-passing area of the adjustable diaphragm is 0.1×0.1 mm. 5. The micro-area visible spectrometer according to claim 1, characterized in that, the image sensor (10) is connected to a computer for observing samples.