CN206848297U - A kind of Michelson interference formula optical fiber acceleration transducer - Google Patents
A kind of Michelson interference formula optical fiber acceleration transducer Download PDFInfo
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Abstract
一种迈克尔逊干涉式光纤加速度传感器,包括筒体、上限位销、第一准直器、光耦合器、下限位销、质量块、第二准直器、环形磁体;光隔离器、激光光源、光电探测器和相位解调电路。本实用新型将质量块设计成迈克尔逊干涉仪自由空间光路的一部分,利用静磁排磁通效应将质量块置于悬浮状态,将外界加速度变化转化为质量块的微小位移,再通过差分式光纤迈克尔逊干涉装置检测质量块位移引起的相位变化,实时解调传感器的加速度变化。该传感器采用磁悬浮方式规避机械阻尼的影响,引入双反射法拉第旋光结构消除偏正衰落的影响,具有灵敏度高,稳定性好,体积小,制作简单等优点,具有较好的应用前景。
A Michelson interferometric optical fiber acceleration sensor, including a cylinder, an upper limit pin, a first collimator, an optical coupler, a lower limit pin, a quality block, a second collimator, a ring magnet; an optical isolator, and a laser light source , photodetector and phase demodulation circuit. In the utility model, the mass block is designed as a part of the free space optical path of the Michelson interferometer, and the mass block is placed in a suspended state by using the magnetostatic row magnetic flux effect, and the external acceleration change is converted into a small displacement of the mass block, and then through the differential optical fiber The Michelson interferometer detects the phase change caused by mass displacement and demodulates the acceleration change of the sensor in real time. The sensor uses magnetic levitation to avoid the influence of mechanical damping, and introduces a double-reflection Faraday rotation optical structure to eliminate the influence of polarization fading. It has the advantages of high sensitivity, good stability, small size, and simple fabrication, and has a good application prospect.
Description
技术领域technical field
本实用新型涉及加速度传感器,具体而言是一种迈克尔逊干涉式光纤加速度传感器。The utility model relates to an acceleration sensor, in particular to a Michelson interference optical fiber acceleration sensor.
背景技术Background technique
光纤加速度传感器与常规加速度传感器相比,在灵敏度、动态范围、可靠性等方面有明显的优势,广泛应用于国防、军事等领域。目前,大多数光纤加速度传感器是利用弹性元件和质量块将外界加速度转化为位移或应变,再将位移或者应变传导到传感光纤上,使传感光纤中信号的光波长、相位等参量发生变化,通过解调光学参量的变化,获取外界的加速度。如专利“一种悬臂梁式光纤光栅加速度计”(申请号:200710065321.X)、“基于悬臂梁挠度的光纤光栅加速度计”(申请号:200710065322.X)等采用了悬臂梁式的机械结构,将加速度转化为光栅的波长变化后再进行检测。而专利“一种光纤加速度计”(申请号:201510519101.4)、“一种基于迈克尔逊干涉仪垂直振动位移传感器”(申请号:201310018899.5)中虽然采用干涉型相位传感技术检测加速度或者位移,但仍然需要机械结构作为敏感元件,传感器的灵敏度不高,重复性差。因此,如何充分发挥干涉型相位传感器优势,降低机械结构的影响,是高灵敏度加速度传感器设计需要考虑的问题。Compared with conventional acceleration sensors, optical fiber acceleration sensors have obvious advantages in sensitivity, dynamic range, reliability, etc., and are widely used in national defense, military and other fields. At present, most fiber optic acceleration sensors use elastic elements and mass blocks to convert external acceleration into displacement or strain, and then transmit the displacement or strain to the sensing fiber to change the optical wavelength, phase and other parameters of the signal in the sensing fiber. , by demodulating the change of optical parameters to obtain the acceleration of the outside world. For example, the patents "A Cantilever Beam Type Fiber Bragg Grating Accelerometer" (Application No.: 200710065321.X), "Fiber Bragg Grating Accelerometer Based on Cantilever Beam Deflection" (Application No.: 200710065322.X) etc. adopt the cantilever beam mechanical structure , the acceleration is converted into the wavelength change of the grating before detection. However, although the patents "A Fiber Optic Accelerometer" (Application No.: 201510519101.4) and "A Vertical Vibration Displacement Sensor Based on Michelson Interferometer" (Application No.: 201310018899.5) use interferometric phase sensing technology to detect acceleration or displacement, but A mechanical structure is still required as a sensitive element, and the sensitivity of the sensor is not high and the repeatability is poor. Therefore, how to give full play to the advantages of the interferometric phase sensor and reduce the influence of the mechanical structure is a problem that needs to be considered in the design of a high-sensitivity acceleration sensor.
发明内容Contents of the invention
本实用新型所要解决的技术问题是提供一种迈克尔逊干涉式光纤加速度传感器,克服了传统光纤加速度传感器中机械结构对灵敏度的影响,将质量块设计成迈克尔逊干涉仪自由空间光路的一部分,采用静磁悬浮技术规避机械阻尼的影响,将加速度作用转换为干涉仪臂长的差动变化,降低外界环境的干扰,提高传感器的灵敏度。The technical problem to be solved by the utility model is to provide a Michelson interferometric optical fiber acceleration sensor, which overcomes the influence of the mechanical structure on the sensitivity of the traditional optical fiber acceleration sensor, and designs the mass block as a part of the free space optical path of the Michelson interferometer. The static magnetic levitation technology avoids the influence of mechanical damping, converts the acceleration effect into the differential change of the interferometer arm length, reduces the interference of the external environment, and improves the sensitivity of the sensor.
本实用新型采取的技术方案为:The technical scheme that the utility model takes is:
一种迈克尔逊干涉式光纤加速度传感器,其特征在于:包括筒体、上限位销、第一准直器、光耦合器、下限位销、质量块、第二准直器、环形磁体。A Michelson interference optical fiber acceleration sensor, characterized in that it includes a cylinder, an upper limit pin, a first collimator, an optical coupler, a lower limit pin, a quality block, a second collimator, and a ring magnet.
筒体正上方固定安装第一准直器,正下方固定安装第二准直器,质量块悬浮于筒体的内部,与第一准直器、第二准直器具有相等的距离。质量块用于调整加速度传感器的灵敏度和谐振频率,反射来自第一准直器、第二准直器入射光,并使光的偏振态顺时针旋转90°。The first collimator is fixedly installed directly above the cylinder, and the second collimator is fixedly installed directly below. The mass block is suspended inside the cylinder, and has an equal distance from the first collimator and the second collimator. The mass block is used to adjust the sensitivity and resonant frequency of the acceleration sensor, reflect the incident light from the first collimator and the second collimator, and rotate the polarization state of the light by 90° clockwise.
第一准直器、第二准直器连接光耦合器,光耦合器、第一准直器、质量块的上反射面以及两者之间的自由空间光路,构成第一迈克尔逊干涉臂;光耦合器、第二准直器、质量块的下反射面以及两者之间的自由空间光路,构成第二迈克尔逊干涉臂。The first collimator and the second collimator are connected to the optical coupler, and the optical coupler, the first collimator, the upper reflective surface of the proof mass and the free space optical path between them constitute the first Michelson interference arm; The optical coupler, the second collimator, the lower reflection surface of the proof mass and the free space optical path between them constitute the second Michelson interference arm.
筒体内设有环形磁体,环形磁体用于产生静态磁场,利用排磁通效应使质量块处于悬浮态。A ring magnet is arranged in the cylinder, and the ring magnet is used to generate a static magnetic field, and the mass block is in a suspended state by utilizing the magnetic flux removal effect.
筒体上设有上限位销,用于限制质量块向上运动的最大行程,筒体上设有下限位销,用于限制质量块向下运动的最大行程;There is an upper limit pin on the cylinder to limit the maximum stroke of the upward movement of the mass block, and a lower limit pin on the cylinder to limit the maximum stroke of the downward movement of the mass block;
优选地,质量块由磁环、第一法拉第旋光镜、第二法拉第旋光镜构成,法拉第旋光镜两侧面分别镀高反膜和增透膜,第一法拉第旋光镜高反膜面与第二法拉第旋光镜高反膜面叠装,再点胶固化在磁环内。法拉第磁环的双面反射结构设计,方便对迈克尔逊干涉仪的光程变化进行差分检测,与此同时,当光信号入射进法拉第旋光镜后,法拉第旋光镜的磁光效应使信号光的偏振态顺时针旋转45°,反射后再旋转45°,总计旋转90°。则正向入射光与反向反射光在坐标方向的偏振变化反向,产生的偏振衰落相互抵消,从而有效消除偏振衰落的影响,改善信噪比。Preferably, the mass block is composed of a magnetic ring, a first Faraday rotator, and a second Faraday rotator. The two sides of the Faraday rotator are respectively coated with a high-reflection film and an antireflection film. The high-reflection film surface of the first Faraday rotator and the second Faraday The high-reflection film surface of the optical mirror is stacked, and then glue is dispensed and solidified in the magnetic ring. The double-sided reflection structure design of the Faraday magnetic ring is convenient for differential detection of the optical path change of the Michelson interferometer. The state rotates 45° clockwise, and then rotates 45° after reflection, for a total of 90°. Then, the polarization changes of the forward incident light and the reverse reflected light in the coordinate direction are reversed, and the resulting polarization fading cancels each other out, thereby effectively eliminating the influence of the polarization fading and improving the signal-to-noise ratio.
优选地,磁环产生饱和磁场,保证法拉第旋光镜产生磁光效应,将入射并反射的光偏振态旋转90°,并与环形磁体产生排磁通效应,使所述质量块处于一维的自由悬浮状态。由于法拉第旋光镜需要在磁场的作用下才能产生磁光效应,且工作在饱和磁场区域,在传感器上设计环形磁体,利用排磁通效应使质量块处于悬浮状态,既不会影响旋光效果,又减小了质量块因机械接触导致的灵敏度降低。Preferably, the magnetic ring generates a saturated magnetic field to ensure that the Faraday rotator produces a magneto-optical effect, rotates the polarization state of incident and reflected light by 90°, and generates a magnetic flux rejection effect with the ring magnet, so that the mass is in a one-dimensional free suspended state. Since the Faraday rotator needs to be under the action of a magnetic field to produce the magneto-optical effect, and it works in the saturated magnetic field region, a ring magnet is designed on the sensor, and the mass block is suspended by using the magnetic flux removal effect, which will neither affect the optical rotation effect nor The reduction in sensitivity of the proof mass due to mechanical contact is reduced.
优选地,光耦合器连接光隔离器,光隔离器连接激光光源;光耦合器连接光电探测器,光电探测器连接相位解调电路。这种构成了一个双臂包含自由光路的迈克尔逊干涉仪,能更加灵敏的检测振动等参量。Preferably, the optical coupler is connected to the optical isolator, and the optical isolator is connected to the laser light source; the optical coupler is connected to the photodetector, and the photodetector is connected to the phase demodulation circuit. This kind of Michelson interferometer, which constitutes a double arm containing a free optical path, can detect vibration and other parameters more sensitively.
优选地,一种迈克尔逊干涉式光纤加速度传感器的加速度测量方法,激光光源的连续光信号经过光隔离器后进入光耦合器,被分成功率相等的两束光分别进入第一迈克尔逊干涉臂、第二迈克尔逊干涉臂,当加速度传感器的环境加速度恒定时,静磁作用力使得质量块处于磁悬浮状态,通过灵活调节的质量块处于平衡状态,干涉仪的两臂相差稳定;Preferably, a method for measuring the acceleration of a Michelson interference optical fiber acceleration sensor, the continuous optical signal of the laser light source enters the optical coupler after passing through the optical isolator, and is divided into two beams of light with equal power and enters the first Michelson interference arm, The second Michelson interference arm, when the environmental acceleration of the acceleration sensor is constant, the static magnetic force makes the mass block in a magnetic levitation state, the mass block is in a balanced state through flexible adjustment, and the phase difference between the two arms of the interferometer is stable;
当环境加速度变化时,质量块在上限位销和下限位销的范围内起振,质量块与两个准直器之间的距离发生变化,干涉仪的第一迈克尔逊干涉臂、第二迈克尔逊干涉臂反向差动变化,经过光电探测器探测后,采用3*3耦合器解调法或者PGC解调法实时解调传感系统的相位变化,即可获得质量块的加速度。When the environmental acceleration changes, the mass block vibrates within the range of the upper limit pin and the lower limit pin, the distance between the mass block and the two collimators changes, the first Michelson interference arm of the interferometer, the second Michaelson arm The reverse differential change of the inferior interference arm is detected by the photodetector, and the phase change of the sensing system is demodulated in real time by using the 3*3 coupler demodulation method or the PGC demodulation method to obtain the acceleration of the mass block.
优选地,一种迈克尔逊干涉式光纤加速度传感器的加速度测量方法,其特征在于:加速度引起质量块(6)的位移△x改变,进而产生的相差△φ为:Preferably, a method for measuring the acceleration of a Michelson interferometric optical fiber acceleration sensor is characterized in that: the acceleration causes the displacement Δx of the mass block (6) to change, and the resulting phase difference Δφ is:
其中,λ为激光光源的中心波长。Among them, λ is the central wavelength of the laser light source.
这种设计,使加速度产生的位移变化对光程的改变提升到传统干涉式传感器的4倍,且让迈克尔逊干涉仪的两臂同时参与传感,且通过调节质量块的配重,将迈克尔逊干涉仪的两臂长调节到相等,当加速度作用时,两臂长产生差分变化,有效减小温度、激光光源噪声等的影响,改善干涉仪的性能。This design increases the change of the optical path caused by the displacement change of the acceleration to four times that of the traditional interferometric sensor, and allows the two arms of the Michelson interferometer to participate in the sensing at the same time, and by adjusting the weight of the mass block, the Michaelson interferometer The two arm lengths of the interferometer are adjusted to be equal. When the acceleration acts, the two arm lengths produce a differential change, which effectively reduces the influence of temperature and laser source noise, and improves the performance of the interferometer.
本实用新型一种迈克尔逊干涉式光纤加速度传感器,技术效果如下:The utility model is a Michelson interference optical fiber acceleration sensor, and the technical effect is as follows:
(1)灵敏度高,稳定性好。采用静磁悬浮方式,使质量块处于重力和磁场悬浮力的平衡态,避免了传统加速度传感器机械摩擦对灵敏度的影响,提高了传感器的灵敏度;质量块中的两个法拉第旋光镜与准直器构成光纤迈克尔逊干涉仪的两臂,有效减小偏振衰落噪声的影响;与此同时,质量块引起干涉仪臂长差的差动变化,灵敏度提高2倍,也消除或减小了温度、光源噪声等的影响,稳定性好。相位检测可以采用成熟的3*3耦合器方法解调,技术成熟,频率检测范围宽。(1) High sensitivity and good stability. The static magnetic levitation method is used to make the mass block in the balance state of gravity and magnetic field levitation force, which avoids the influence of mechanical friction on the sensitivity of the traditional acceleration sensor and improves the sensitivity of the sensor; the mass block consists of two Faraday rotators and a collimator The two arms of the fiber optic Michelson interferometer effectively reduce the influence of polarization fading noise; at the same time, the mass block causes the differential change of the interferometer arm length difference, the sensitivity is increased by 2 times, and the temperature and light source noise are also eliminated or reduced And so on, the stability is good. The phase detection can be demodulated by the mature 3*3 coupler method, the technology is mature, and the frequency detection range is wide.
(2)体积小,结构简单。传感器直径可以做到几个mm,长度约20mm的管状结构,体积小,安装方便;环形磁体、法拉第旋光镜、磁环可以选用工业产品,组装方便。(2) Small size and simple structure. The diameter of the sensor can be several mm, and the tubular structure with a length of about 20mm is small in size and easy to install; the ring magnet, Faraday rotator, and magnetic ring can be selected from industrial products, which is easy to assemble.
(3)无源,方便远程检测。传感器无需供电,传感器灵敏度与传输光纤的长度相关性小,便于远程检测。(3) Passive, convenient for remote detection. The sensor does not need power supply, and the sensitivity of the sensor has little correlation with the length of the transmission fiber, which is convenient for remote detection.
附图说明Description of drawings
图1为本实用新型的结构示意图。Fig. 1 is the structural representation of the utility model.
图2为本实用新型的质量块的结构示意图。Fig. 2 is a structural schematic diagram of the mass block of the present invention.
具体实施方式detailed description
如图1、图2所示,一种迈克尔逊干涉式光纤加速度传感器,包括筒体1、上限位销2、第一准直器3、光耦合器4、下限位销5、质量块6、第二准直器7、环形磁体8。As shown in Figure 1 and Figure 2, a Michelson interference optical fiber acceleration sensor includes a cylinder 1, an upper limit pin 2, a first collimator 3, an optical coupler 4, a lower limit pin 5, a mass block 6, Second collimator 7, ring magnet 8.
筒体1正上方固定安装第一准直器3,正下方固定安装第二准直器7,质量块6悬浮于筒体1的内部,与第一准直器3、第二准直器7具有相等的距离。质量块6用于调整加速度传感器的灵敏度和谐振频率,反射来自第一准直器3、第二准直器7的入射光,并使光的偏振态顺时针旋转90°。The first collimator 3 is fixedly installed directly above the cylinder 1, and the second collimator 7 is fixedly installed directly below. have equal distances. The proof mass 6 is used to adjust the sensitivity and resonance frequency of the acceleration sensor, reflect the incident light from the first collimator 3 and the second collimator 7, and rotate the polarization state of the light by 90° clockwise.
第一准直器3、第二准直器7连接光耦合器4,光耦合器4、第一准直器3、质量块6的上反射面以及两者之间的自由空间光路,构成第一迈克尔逊干涉臂;光耦合器4、第二准直器7、质量块6的下反射面以及两者之间的自由空间光路,构成第二迈克尔逊干涉臂。The first collimator 3 and the second collimator 7 are connected to the optical coupler 4, and the optical coupler 4, the first collimator 3, the upper reflection surface of the proof mass 6 and the free space optical path between the two constitute the first A Michelson interference arm; the optical coupler 4 , the second collimator 7 , the lower reflection surface of the proof mass 6 and the free space optical path between them constitute the second Michelson interference arm.
筒体1内设有环形磁体8,环形磁体用于产生静态磁场,利用排磁通效应使质量块处于悬浮态。A ring magnet 8 is arranged inside the cylinder body 1, and the ring magnet is used to generate a static magnetic field, and the mass block is in a suspended state by utilizing the magnetic flux removal effect.
筒体1上设有上限位销2,用于限制质量块6向上运动的最大行程,筒体1上设有下限位销5,用于限制质量块6向下运动的最大行程;The cylinder body 1 is provided with an upper limit pin 2, which is used to limit the maximum stroke of the mass block 6 moving upward, and the cylinder body 1 is provided with a lower limit pin 5, which is used to limit the maximum stroke of the mass block 6 moving downward;
质量块6由磁环601、第一法拉第旋光镜602、第二法拉第旋光镜603构成,如图2所示,所述法拉第旋光镜两侧面分别镀高反膜和增透膜,第一法拉第旋光镜602高反膜面与第二法拉第旋光镜603高反膜面叠装,再点胶固化在磁环601内。法拉第旋光镜采用钇铁石榴石单晶制作,在饱和磁场的作用下,当光穿过法拉第旋光镜后,偏振态改变45°。本实用新型中光信号通过法拉第旋光镜的透射面(增透膜)入射,穿过法拉第旋光镜后再沿着原光路返回,再次旋转45°,保证光纤经过法拉第旋光镜反射光的偏振态旋转90°。磁环产生法拉第旋光镜所需的饱和磁场,并与环形磁体产生排磁通效应,使质量块6整体处于一维的自由悬浮状态。法拉第旋光镜的工作波长1550nm,两侧面分别镀高反膜和增透膜,高反膜的反射率大于99%,增透膜的透射率大于99.9%。第一法拉第旋光镜602高反膜面与第二法拉第旋光镜603高反膜面叠装,再点胶固化在磁环内实际制作中,当需要调制加速度传感器的固有频率和灵敏度时,可以在质量块6上嵌套金属进行配重,以满足不同传感器的设计需求。The proof mass 6 is composed of a magnetic ring 601, a first Faraday rotator 602, and a second Faraday rotator 603. As shown in FIG. The high-reflection film surface of the mirror 602 is stacked with the high-reflection film surface of the second Faraday rotation mirror 603 , and then glue is dispensed and solidified in the magnetic ring 601 . The Faraday rotator is made of yttrium iron garnet single crystal. Under the action of a saturated magnetic field, when the light passes through the Faraday rotator, the polarization state changes by 45°. In the utility model, the optical signal is incident through the transmission surface (anti-reflection film) of the Faraday rotator, returns along the original optical path after passing through the Faraday rotator, and rotates 45° again to ensure that the polarization state of the optical fiber reflected by the Faraday rotator rotates 90°. The magnetic ring generates the saturation magnetic field required by the Faraday rotator, and generates a magnetic flux rejection effect with the ring magnet, so that the mass block 6 as a whole is in a one-dimensional free suspension state. The working wavelength of the Faraday rotator is 1550nm, and the two sides are coated with high-reflection coating and anti-reflection coating. The reflectivity of the high-reflection coating is greater than 99%, and the transmittance of the anti-reflection coating is greater than 99.9%. The high-reflection film surface of the first Faraday rotator 602 and the high-reflection film surface of the second Faraday rotator 603 are stacked, and then glue is dispensed and solidified in the magnetic ring. In actual production, when the natural frequency and sensitivity of the acceleration sensor need to be modulated, it can be Metal is nested on the quality block 6 for counterweight, so as to meet the design requirements of different sensors.
光耦合器4分光比为1:1,工作波长1550nm,插入损耗小于3.3dB。The splitting ratio of the optical coupler is 1:1, the working wavelength is 1550nm, and the insertion loss is less than 3.3dB.
加速度传感器采用静磁排磁通效应使质量块6处于悬浮状态,当传感器所处环境的加速度改变后,质量块6的空间位置会发生变化,第一法拉第旋光镜602与第一准直器3、第二法拉第旋光镜603与第二准直器7之间的距离会发生反向变化,导致迈克尔逊干涉仪的臂长改变,进而引起传感光信号相位的变化,通过实时解调相位变化即可获取加速度。质量块6的位移△x与相差△φ的关系为:The acceleration sensor uses the magnetostatic row flux effect to keep the mass 6 in a suspended state. When the acceleration of the environment where the sensor is located changes, the spatial position of the mass 6 will change. The first Faraday rotator 602 and the first collimator 3 , The distance between the second Faraday rotator 603 and the second collimator 7 will reversely change, causing the arm length of the Michelson interferometer to change, thereby causing a change in the phase of the sensing light signal. By real-time demodulation of the phase change, the Acceleration is available. The relationship between the displacement Δx of the mass block 6 and the phase difference Δφ is:
其中,λ为激光光源的中心波长。Among them, λ is the central wavelength of the laser light source.
该传感器还包括光隔离器9、激光光源10、光电探测器11和相位解调电路12。激光光源10的连续光信号经过光隔离器9后进入光耦合器4,被分成功率相等的两束光分别进入第一迈克尔逊干涉臂、第二迈克尔逊干涉臂的光路。The sensor also includes an optical isolator 9 , a laser light source 10 , a photodetector 11 and a phase demodulation circuit 12 . The continuous optical signal of the laser light source 10 enters the optical coupler 4 after passing through the optical isolator 9, and is divided into two beams of light with equal power and enters the optical path of the first Michelson interference arm and the second Michelson interference arm respectively.
当加速度传感器的环境加速度恒定时,静磁作用力使得质量块6处于磁悬浮状态,此时质量块6处于平衡状态,干涉仪的两臂相差稳定。当环境加速度变化时,质量块6在上限位销2和下限位销5的范围内起振,质量块6与两个准直器之间的距离发生变化,干涉仪的第一迈克尔逊干涉臂、第二迈克尔逊干涉臂反向差动变化,即一个臂长增加,另一个臂长减小,且大小相当,引起光程差的变化是质量块6位移变化的4倍,这比经典迈克尔逊干涉式加速度传感器灵敏度增加一倍。光程差的变化将引起光强信号变化,经过光电探测11探测后,采用3*3耦合器解调法或者PGC解调法实时解调传感系统的相位变化,即可获得质量块6的加速度。When the environmental acceleration of the acceleration sensor is constant, the magnetostatic force makes the mass block 6 in a state of magnetic levitation. At this time, the mass block 6 is in a balanced state, and the phase difference between the two arms of the interferometer is stable. When the environmental acceleration changes, the mass block 6 vibrates within the range of the upper limit pin 2 and the lower limit pin 5, the distance between the mass block 6 and the two collimators changes, and the first Michelson interference arm of the interferometer , The reverse differential change of the second Michelson interference arm, that is, the length of one arm increases, the length of the other arm decreases, and the size is the same, the change of the optical path difference is 4 times of the displacement change of the mass block 6, which is more than the classic Michaelson The sensitivity of the inferior interferometric accelerometer is doubled. The change of the optical path difference will cause the change of the light intensity signal. After being detected by the photoelectric detection 11, the phase change of the sensing system can be demodulated in real time by using the 3*3 coupler demodulation method or the PGC demodulation method, and the phase change of the mass block 6 can be obtained. acceleration.
应当理解的是,对本领域普通技术人员来说,可以根据上述说明加以改进或变换,而所有这些改进和变换都应属于本实用新型所附权利要求的保护范围。It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should belong to the protection scope of the appended claims of the present utility model.
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CN106940387A (en) * | 2017-04-10 | 2017-07-11 | 三峡大学 | A kind of Michelson interference formula optical fiber acceleration transducer |
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CN108982912A (en) * | 2018-09-01 | 2018-12-11 | 哈尔滨工程大学 | A kind of miniature differential formula off-axis fiber optic Michelson extrinsic type accelerometer |
CN109298207A (en) * | 2018-09-01 | 2019-02-01 | 哈尔滨工程大学 | A miniature coaxial differential fiber Michelson extrinsic accelerometer |
CN110726862A (en) * | 2019-10-24 | 2020-01-24 | 贵州电网有限责任公司 | Integrated optical sensor probe for measuring broadband high-amplitude current |
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CN106940387A (en) * | 2017-04-10 | 2017-07-11 | 三峡大学 | A kind of Michelson interference formula optical fiber acceleration transducer |
CN106940387B (en) * | 2017-04-10 | 2023-10-27 | 三峡大学 | A kind of Michelson interference type fiber optic acceleration sensor |
CN108761127A (en) * | 2018-08-13 | 2018-11-06 | 湖南庄耀光电科技有限公司 | A kind of laser accelerometer |
CN108982914A (en) * | 2018-09-01 | 2018-12-11 | 哈尔滨工程大学 | A kind of mini-coax fiber optic Michelson extrinsic type accelerometer |
CN108982912A (en) * | 2018-09-01 | 2018-12-11 | 哈尔滨工程大学 | A kind of miniature differential formula off-axis fiber optic Michelson extrinsic type accelerometer |
CN109298207A (en) * | 2018-09-01 | 2019-02-01 | 哈尔滨工程大学 | A miniature coaxial differential fiber Michelson extrinsic accelerometer |
CN110726862A (en) * | 2019-10-24 | 2020-01-24 | 贵州电网有限责任公司 | Integrated optical sensor probe for measuring broadband high-amplitude current |
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