CN206706203U - A kind of crystal oscillator probe control system - Google Patents
A kind of crystal oscillator probe control system Download PDFInfo
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- CN206706203U CN206706203U CN201720537630.1U CN201720537630U CN206706203U CN 206706203 U CN206706203 U CN 206706203U CN 201720537630 U CN201720537630 U CN 201720537630U CN 206706203 U CN206706203 U CN 206706203U
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- 239000013078 crystal Substances 0.000 title claims abstract description 59
- 239000000523 sample Substances 0.000 title claims abstract description 41
- 238000006243 chemical reaction Methods 0.000 claims abstract description 58
- 239000000126 substance Substances 0.000 claims abstract description 17
- 239000003990 capacitor Substances 0.000 claims description 42
- 230000003321 amplification Effects 0.000 claims description 24
- 238000001914 filtration Methods 0.000 claims description 24
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 24
- 230000011664 signaling Effects 0.000 claims description 16
- 230000005611 electricity Effects 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 8
- 241000607479 Yersinia pestis Species 0.000 claims description 3
- 230000010355 oscillation Effects 0.000 abstract description 20
- 238000001704 evaporation Methods 0.000 abstract description 14
- 230000008020 evaporation Effects 0.000 abstract description 14
- 239000011248 coating agent Substances 0.000 abstract description 10
- 238000000576 coating method Methods 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 9
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005055 memory storage Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
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Abstract
The utility model discloses a kind of crystal oscillator probe control system, and mainly by logic controller, the touch-screen being connected with logic controller, power supply, crystalline substance control calibrator and machine governor, and are formed with the signal processing unit that brilliant control calibrator is connected.The frequency of oscillation for the crystal-vibration-chip that the brilliant control calibrator that the utility model is set can pop one's head in crystal oscillator is acquired, and crystalline substance control calibrator is combined with logic control system, conversion that can be effectively to the crystal-vibration-chip of crystal oscillator probe is controlled, the frequency of oscillation of the crystal-vibration-chip detected to the evaporation capacity of target of crystal oscillator probe is set to be maintained in a stable value range, ensure that the crystal-vibration-chip frequency of oscillation for the crystal oscillator probe that the utility model is controlled is more accurate, effectively raise the accuracy to substrate coating Thickness sensitivity.
Description
Technical field
It the utility model is related to a kind of control system, in particular to a kind of crystal oscillator probe control system.
Background technology
For evaporation coating machine when to substrate coating, in order to can ensure that the accuracy of substrate coating thickness, people are more using crystalline substance
The probe that shakes detects to the evaporation capacity of target, is realized by the control of evaporation capacity to target to being spent after substrate coating
Control, so that substrate coating thickness is more accurate.
However, the conversion for the crystal-vibration-chip that existing crystal oscillator probe control system can not pop one's head in crystal oscillator and frequency of oscillation are entered
Row control, cause crystal oscillator probe not detected to the evaporation capacity of target accurately, cause the coating film thickness of substrate unstable,
So as to the serious coating quality that have impact on substrate.
Utility model content
The purpose of this utility model is the crystal oscillator for overcoming existing crystal oscillator probe control system to be popped one's head in crystal oscillator
A kind of the defects of conversion of piece and frequency of oscillation are controlled, there is provided crystal oscillator probe control system.
The purpose of this utility model passes through following technical proposals reality：A kind of crystal oscillator probe control system, mainly by patrolling
Controller, the touch-screen being connected with logic controller, power supply, brilliant control calibrator and machine governor are collected, and is controlled with crystalline substance
The signal processing unit composition that calibrator is connected；The power supply also controls thickness measuring with touch-screen and machine governor and crystalline substance respectively
Instrument is connected.
The signal processing unit includes signal amplification circuit, the high-pass filtering that input is connected with signal amplification circuit
Circuit, and the signal that input is connected with the output end of high-pass filtering circuit, output end is connected with brilliant control calibrator turn
Change circuit.
The signal amplification circuit is by amplifier P1, input, negative pole and amplifier of the positive pole as signal amplification circuit
The polar capacitor C1 that P1 positive pole is connected, positive pole is connected after resistance R1 with amplifier P1 positive pole, the pole of negative pole ground connection
Property electric capacity C2, the resistance R2 that one end is connected with amplifier P1 negative pole, the other end is connected with polar capacitor C2 positive pole, one
End is connected with amplifier P1 positive pole, the resistance R3 that the other end is connected with amplifier P1 output end, one end and amplifier
The resistance R4 that P1 positive electrode is connected, the other end is connected with polar capacitor C2 positive pole, and one end and polar capacitor C2
Positive pole be connected, resistance R5 that the other end is connected with polar capacitor C2 negative pole composition；The negative electrode of the amplifier P1
Ground connection, its output end as signal amplification circuit output end and be connected with high-pass filtering circuit.
Further, the high-pass filtering circuit is by amplifier P2, and positive pole is connected with amplifier P1 output end, negative pole
The polar capacitor C3 being sequentially connected after resistance R6 and resistance R7 with amplifier P2 positive pole, positive pole and resistance R6 and resistance R7
Tie point be connected, the polar capacitor C4 of negative pole ground connection, one end is connected with amplifier P2 positive pole, the other end and amplifier
The resistance R10 that P2 output end is connected, negative pole is connected with amplifier P2 output end, positive pole after resistance R9 with amplifier
The polar capacitor C5 that P2 negative pole is connected, and one end is connected with amplifier P2 negative pole, the resistance R8 of other end ground connection
Composition；The output end of the amplifier P2 as high-pass filtering circuit output end and be connected with signaling conversion circuit.
The signaling conversion circuit is by conversion chip U, and one end is connected with amplifier P2 output end, the other end and conversion
Resistance R11, the N pole that chip U INP pins are connected is connected after resistance R12 with conversion chip U VPSH pins, P poles warp
The diode D being connected after resistance R13 with conversion chip U PEST pins, and positive pole are connected with conversion chip U V- pins
Connect, the polar capacitor C6 compositions of negative pole ground connection；The V+ pins of the conversion chip U are connected with outside 12V power supplys, the conversion core
Piece U GND pins are connected with polar capacitor C6 negative pole, and the PSET pins of the conversion chip U are as signaling conversion circuit
Output end and with crystalline substance control calibrator be connected.
In order to ensure practical effect of the present utility model, the conversion chip U is AD8302 integrated chips.The crystalline substance
It is the brilliant control calibrators of XTC3 to control calibrator.
The utility model has advantages below and beneficial effect compared with prior art：
(1) frequency of oscillation for the crystal-vibration-chip that the brilliant control calibrator that the utility model is set can pop one's head in crystal oscillator is acquired,
And crystalline substance control calibrator is combined with logic control system, the conversion for the crystal-vibration-chip that effectively can be popped one's head in crystal oscillator and frequency of oscillation
Be controlled, make the crystal-vibration-chip detected to the evaporation capacity of target that crystal oscillator pops one's head in frequency of oscillation be maintained at one it is stable
In value range, ensure that the crystal-vibration-chip frequency of oscillation for the crystal oscillator probe that the utility model is controlled is more stable, effectively carry
The accuracy that high crystal oscillator probe detects to the evaporation capacity of target, so as to the serious coating quality that have impact on substrate.
(2) the utility model is provided with signal processing unit in the input of brilliant control calibrator, the signal processing unit bag
Signal amplification circuit and high-pass filtering circuit and signaling conversion circuit are included, wherein, signal processing unit can be to crystal oscillator probe institute
Small-signal in the signal of transmission is amplified, and makes rear portion circuit more stable to signal transacting；High-pass filtering circuit can be effective
The low frequency signal in the signal after amplification is eliminated or suppressed, make signal more accurate；And signaling conversion circuit can be to warp
Electric signal after signal amplification circuit and high-pass filtering circuit processing is converted to data-signal, so that signal processing unit is realized
The accuracy of processing to signal, brilliant control calibrator is set to receive accurate data-signal.
(3) conversion chip U of the present utility model is AD8302 integrated chips, and conversion chip U is mainly by precision-matched
Two wide band logarithmic wave detectors, a phase detector, output amplifier group, a bias unit and an output reference voltage
The part such as buffer is formed, and the Amplitude Ratio and phase difference of the input signal in 2.7GHz frequency ranges can be handled simultaneously,
So as to improve the accuracy of the frequency of oscillation for the crystal-vibration-chip that the utility model is popped one's head in crystal oscillator control.
(4) brilliant control calibrator of the present utility model is the brilliant control calibrators of XTC3, and the brilliant control calibrators of the XTC3 can be to input
Data-signal is accurately handled, and can obtain accurate frequency of oscillation value, ensures that the utility model can be visited to crystal oscillator
The stability of the frequency of oscillation control of the crystal-vibration-chip of head.
Brief description of the drawings
Fig. 1 is structured flowchart of the present utility model.
Fig. 2 is the electrical block diagram of signal processing unit of the present utility model.
Embodiment
The utility model is described in further detail with reference to embodiment, but embodiment of the present utility model is simultaneously
Not limited to this.
Embodiment
As shown in Figure 1, 2, the utility model discloses a kind of crystal oscillator probe control system, mainly by logic controller,
Touch-screen, power supply, brilliant control calibrator and the machine governor being connected with logic controller, and be connected with crystalline substance control calibrator
The signal processing unit composition connect.The power supply is also connected with touch-screen and machine governor respectively.Wherein, described signal
Processing unit is as shown in Fig. 2 it is made up of signal amplification circuit, high-pass filtering circuit, and signaling conversion circuit.And this practicality
New described crystal oscillator probe then as shown in figure 1, it is made up of crystal-vibration-chip and motor and encoder etc., pop one's head in by the crystal oscillator
Concrete structure to be existing, therefore the structure of crystal oscillator probe is not described in detail for the utility model.Described electricity
Source is that the 12V DC power supply power supply is whole control system power supply.
During implementation, described touch-screen is used as typing part of the utility model to the digit of crystal-vibration-chip, the touch-screen
In the digit of the crystal-vibration-chip of the crystal oscillator probe needed for people's input, the digit for the crystal-vibration-chip that touch-screen pops one's head in the crystal oscillator of typing passes
It is defeated by logic controller.The angle of rotation angle value of each crystal-vibration-chip is pre-entered in the logic controller, logic controller is connecing
When receiving the digit for the crystal-vibration-chip that touch-screen is inputted, logic controller then output control electric current to machine governor, the motor
The speed regulator motor that just output driving current is popped one's head in crystal oscillator when obtaining control electric current, motor start to drive crystal oscillator
The erecting bed of piece rotates, so that the crystal-vibration-chip positioned at the detection mouth of crystal oscillator probe carries out displacement, meanwhile, the volume in crystal oscillator probe
The rotational angle of the rotating shaft for the motor that code device is then collected is transferred to logic controller, and logic controller pops one's head in crystal oscillator
In the rotational angle that is transmitted of encoder compared with the rotational angle of the crystal-vibration-chip of logic controller memory storage pair, when crystal oscillator is visited
When the rotational angle that encoder in head is transmitted is consistent with the rotational angle of the crystal-vibration-chip of logic controller memory storage, logic control
It is machine governor output control electric current that device processed, which stops, and machine governor dead electricity, machine governor is not in the drive popped one's head in for crystal oscillator
Dynamic motor provides driving current, and motor stops operating, so that the required crystal-vibration-chip detected to target evaporation capacity is accurate
True is transformed at the detection mouth of crystal oscillator probe, crystal-vibration-chip is detected to the evaporation capacity of target.
Meanwhile the utility model is in order that the frequency of oscillation of the crystal-vibration-chip detected to the evaporation capacity of target can be maintained at
In one stable value range, to ensure accuracy of the crystal oscillator probe to the detection of target evaporation capacity, the utility model is provided with
The brilliant control calibrator being connected with logic controller.Crystalline substance control calibrator preferentially employs the brilliant control calibrators of XTC3, and crystalline substance control is surveyed
Thick instrument is used to detect the crystal oscillator frequency of the crystal-vibration-chip of crystal oscillator probe.The utility model prestores in crystalline substance control calibrator
One crystal-vibration-chip can use surge frequency range value.When the frequency of oscillation of the crystal-vibration-chip of crystal oscillator probe detected by brilliant control calibrator
During less than the surge frequency range value stored, crystalline substance control calibrator exports a pulse signal to logic controller, logic control
Then output control electric current to machine governor, the machine governor motor that then output driving current is popped one's head in crystal oscillator, makes device
The axis of rotation of motor, make the crystal-vibration-chip displacement of the detection mouth positioned at crystal oscillator probe, new crystal-vibration-chip is transformed into crystal oscillator
The detection mouth of probe, available model can be maintained at thereby using the frequency of oscillation in the crystal-vibration-chip detected to target evaporation capacity
In enclosing, the stability of the frequency of oscillation of the crystal-vibration-chip of crystal oscillator probe is effectively ensure that, improves crystal oscillator probe well to target
The accuracy of material evaporation capacity detection.
Logic controller and machine governor described in the utility model are existing, and therefore, the utility model is simultaneously
The structure of logic controller and machine governor is not described in detail.
Further, the utility model controls the accurate of the crystal-vibration-chip frequency of oscillation received by calibrator in order to ensure brilliant
Property, the utility model is provided with signal processing unit, the signal processing unit such as Fig. 2 institutes in the input of brilliant control calibrator
Show, it is by signal amplification circuit, high-pass filtering circuit, and signaling conversion circuit composition.The signal amplification circuit such as Fig. 2 institutes
Show, its by model OP364 amplifier P1, resistance be 9.1k Ω resistance R1, resistance be 10k Ω resistance R2, R4 and R5,
Resistance is 100k Ω resistance R3；And the polar capacitor C1 and C2 that capacitance is 5 μ F/25V are formed.
During connection, polar capacitor C1 positive pole as signal amplification circuit input and with the crystal-vibration-chip of crystal oscillator probe
Electrode tip is connected, and negative pole is connected with amplifier P1 positive pole.Polar capacitor C2 positive pole after resistance R1 with amplifier P1
Positive pole be connected, negative pole ground connection.Resistance R2 one end is connected with amplifier P1 negative pole, and the other end is with polar capacitor C2's
Positive pole is connected.Resistance R3 one end is connected with amplifier P1 positive pole, and the other end is connected with amplifier P1 output end.
Wherein, resistance R4 one end is connected with amplifier P1 positive electrode, the positive pole phase of the other end and polar capacitor C2
Connection.Resistance R5 one end is connected with polar capacitor C2 positive pole, and the other end is connected with polar capacitor C2 negative pole.It is described
Amplifier P1 negative electrode ground connection, its output end as signal amplification circuit output end and be connected with high-pass filtering circuit.
Further, the high-pass filtering circuit as shown in Fig. 2 its by model OP07 amplifier P2, resistance 1k
Ω resistance R6 and R7, resistance are 10k Ω resistance R8, and resistance is 0.5K Ω resistance R10；Capacitance is 5 μ F/25V polarity
Electric capacity C3, capacitance are 0.2 μ F/25V polar capacitor C4, and the polar capacitor C5 that capacitance is 0.1 μ F/25V is formed.
During connection, polar capacitor C3 positive pole is connected with amplifier P1 output end, and negative pole is sequentially through resistance R6 and electricity
It is connected after resistance R7 with amplifier P2 positive pole.Polar capacitor C4 positive pole is connected with resistance R6 with resistance R7 tie point,
Negative pole is grounded.Resistance R10 one end is connected with amplifier P2 positive pole, and the other end is connected with amplifier P2 output end.
Wherein, polar capacitor C5 negative pole is connected with amplifier P2 output end, positive pole after resistance R9 with amplifier
P2 negative pole is connected.Resistance R8 one end is connected with amplifier P2 negative pole, other end ground connection.The amplifier P2's is defeated
Go out end as the output end of high-pass filtering circuit and be connected with signaling conversion circuit.
Further, the signaling conversion circuit as shown in Fig. 2 its by model AD8302 conversion chip U, resistance
For 7.8k Ω resistance R11 and R12, resistance is 10k Ω resistance R13；Capacitance is 0.1 μ F/25V polar capacitor C6；Model
Formed for 1N4013 diode D.
During connection, resistance R11 one end is connected with amplifier P2 output end, and the INP of the other end and conversion chip U is managed
Pin is connected.Diode D N poles are connected after resistance R12 with conversion chip U VPSH pins, P poles after resistance R13 with
Conversion chip U PEST pins are connected.Polar capacitor C6 positive pole is connected with conversion chip U V- pins, negative pole ground connection.
The V+ pins of the conversion chip U are connected with outside 12V power supplys, the conversion chip U GND pins and polarity electricity
The negative pole for holding C6 is connected, the PSET pins of the conversion chip U as signaling conversion circuit output end and with brilliant control thickness measuring
Instrument is connected.
During operation, the polar capacitor C1 in signal amplification circuit is filter capacitor, and polar capacitor C1 exports to crystal-vibration-chip
Oscillator signal in interference signal eliminated, be transferred to amplifier P1 through the filtered oscillator signals of polar capacitor C1, put
Big device P1 is amplified to the small-signal frequency in the oscillator signal of input, and amplifier P1 is by the high-frequency in oscillator signal
Signal enters line frequency by resistance R2, resistance R4, resistance R5 and polar capacitor the C2 frequency stabilizer formed and adjusted, and makes oscillator signal
The bandwidth held stationary of high-frequency signal, negative input of the last oscillator signal through amplifier P1 turn again to amplifier P1
Interior, amplifier P1 carries out being transferred to high-pass filtering circuit after again amplifying to signal.
Wherein, the high stop band that the polar capacitor C3 in high-pass filtering circuit and resistance R6 and resistance R7 is formed, wherein electricity
Strengthen stopband ability after resistance R6 and resistance R7 series connection, the vibration that the high stop band makes to be transmitted by the amplifier P1 in stopband is believed
Number oscillating signal multiplication factor rapid decay, so as to which the oscillating signal for realizing to oscillator signal is eliminated or mistake
The effect of filter.The oscillator signal filtered by oscillating signal then passes through amplifier P2 and resistance R8~R10 and polar capacitor
The high frequency filter that C5 is formed eliminates to the oscillating signal remained in oscillator signal, makes oscillator signal more stable；It is high
Bandpass filter circuit is transferred to signal conversion electricity after finally the oscillator signal after filtering process is coupled by polar capacitor C5
Road.
In order to ensure practical effect of the present utility model, the conversion chip U in signaling conversion circuit is preferentially employed
AD8302 integrated chips realize, conversion chip U operating voltage is 12V DC voltage, AD8302 input reference signal
For -60~0dBm (50 Ω systems), input reference signal is low frequency to 2.7GHz, and input signal is after polar capacitor C5 couplings
By resistance R11 current limlitings, current-limiting resistance R11 is arranged to 7.8k Ω according to the frequency range of input signal.After resistance R11 current limlitings
The converted chip U of signal INP pins enter, into the conversion chip U converted chip U of oscillator signal precision amplification
Device MAX4108 is amplified to 2 times, forms 0~3.6V voltage signal, and the A/D converter part being then delivered in conversion chip U is carried out
Signal is changed.Conversion chip U VPSH pins are in the anti-interference electricity by resistance R12 and diode D and resistance R13 formation
Road, to strengthen conversion chip U peripheral antijamming capability.Conversion chip U is passed through after oscillator signal finally is converted into data-signal
PSET pins are transferred to brilliant control calibrator.
Signal processing unit of the present utility model includes signal amplification circuit and high-pass filtering circuit and signal conversion electricity
Road, wherein, the small-signal that signal processing unit is realized in transmitted signal of being popped one's head in crystal oscillator is amplified, and makes rear portion electric
Road is more stable to signal transacting.High-pass filtering circuit, which then realizes, to be eliminated or is pressed down to the low frequency signal in the signal after amplification
System, makes signal more accurate.And signaling conversion circuit is finally to the telecommunications after signal amplification circuit and high-pass filtering circuit processing
Number be converted to data-signal.The small-signal in signal is amplified so that signal processing unit realizes, to amplification
The low frequency signal in signal afterwards is eliminated or suppressed, and to after signal amplification circuit and high-pass filtering circuit processing
Electric signal is converted to the effect of data-signal, brilliant control calibrator is received accurate data-signal.
The frequency of oscillation for the crystal-vibration-chip that the brilliant control calibrator that the utility model is set can pop one's head in crystal oscillator is acquired, and
Crystalline substance control calibrator is combined with logic control system, and conversion that can be effectively to the crystal-vibration-chip of crystal oscillator probe is controlled, and makes crystalline substance
The frequency of oscillation of the crystal-vibration-chip detected to the evaporation capacity of target of probe of shaking is maintained in a stable value range, so as to
It ensure that the crystal-vibration-chip frequency of oscillation for the crystal oscillator probe that the utility model is controlled is more accurate, effectively raise to substrate coating
The accuracy of Thickness sensitivity.
As described above, the utility model can be realized well.
Claims (7)
- A kind of 1. crystal oscillator probe control system, it is characterised in that：Mainly by logic controller, it is connected with logic controller Touch-screen, power supply, brilliant control calibrator and machine governor, and the signal processing unit group being connected with brilliant control calibrator Into；The power supply is also connected with touch-screen and machine governor and brilliant control calibrator respectively.
- A kind of 2. crystal oscillator probe control system according to claim 1, it is characterised in that：The signal processing unit bag Include signal amplification circuit, the high-pass filtering circuit that input is connected with signal amplification circuit, and input and high-pass filtering The signaling conversion circuit that the output end of circuit is connected, output end is connected with brilliant control calibrator.
- A kind of 3. crystal oscillator probe control system according to claim 2, it is characterised in that：The signal amplification circuit by Amplifier P1, the polar capacitor C1 that positive pole is connected as input, the negative pole of signal amplification circuit with amplifier P1 positive pole, Positive pole is connected after resistance R1 with amplifier P1 positive pole, the polar capacitor C2 of negative pole ground connection, and one end is negative with amplifier P1's The resistance R2 that pole is connected, the other end is connected with polar capacitor C2 positive pole, one end are connected, separately with amplifier P1 positive pole The resistance R3 that one end is connected with amplifier P1 output end, one end is connected with amplifier P1 positive electrode, the other end and pole Property electric capacity C2 the resistance R4 that is connected of positive pole, and one end is connected with polar capacitor C2 positive pole, the other end and polarity electricity Hold the resistance R5 compositions that C2 negative pole is connected；The negative electrode ground connection of the amplifier P1, its output end amplify electricity as signal The output end on road is simultaneously connected with high-pass filtering circuit.
- A kind of 4. crystal oscillator probe control system according to claim 3, it is characterised in that：The high-pass filtering circuit by Amplifier P2, positive pole is connected with amplifier P1 output end, negative pole is sequentially after resistance R6 and resistance R7 with amplifier P2's The polar capacitor C3 that positive pole is connected, positive pole is connected with resistance R6 with resistance R7 tie point, the polar capacitor of negative pole ground connection C4, the resistance R10 that one end is connected with amplifier P2 positive pole, the other end is connected with amplifier P2 output end, negative pole with The polar capacitor C5 that amplifier P2 output end is connected, positive pole is connected after resistance R9 with amplifier P2 negative pole, and One end is connected with amplifier P2 negative pole, the resistance R8 compositions of other end ground connection；The output end of the amplifier P2 is as high The output end of bandpass filter circuit is simultaneously connected with signaling conversion circuit.
- A kind of 5. crystal oscillator probe control system according to claim 4, it is characterised in that：The signaling conversion circuit by Conversion chip U, the resistance that one end is connected with amplifier P2 output end, the other end is connected with conversion chip U INP pins R11, N pole are connected after resistance R12 with conversion chip U VPSH pins, PEST of the P poles after resistance R13 with conversion chip U The diode D that pin is connected, and positive pole is connected with conversion chip U V- pins, the polar capacitor C6 groups of negative pole ground connection Into；The V+ pins of the conversion chip U are connected with outside 12V power supplys, the conversion chip U GND pins and polar capacitor C6 Negative pole be connected, the PSET pins of the conversion chip U as signaling conversion circuit output end and control calibrator phase with crystalline substance Connection.
- A kind of 6. crystal oscillator probe control system according to claim 5, it is characterised in that：The conversion chip U is AD8302 integrated chips.
- A kind of 7. crystal oscillator probe control system according to claim 6, it is characterised in that：The crystalline substance controls calibrator The brilliant control calibrators of XTC3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720537630.1U CN206706203U (en) | 2017-05-15 | 2017-05-15 | A kind of crystal oscillator probe control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720537630.1U CN206706203U (en) | 2017-05-15 | 2017-05-15 | A kind of crystal oscillator probe control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206706203U true CN206706203U (en) | 2017-12-05 |
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ID=60463465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720537630.1U Expired - Fee Related CN206706203U (en) | 2017-05-15 | 2017-05-15 | A kind of crystal oscillator probe control system |
Country Status (1)
| Country | Link |
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| CN (1) | CN206706203U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106967959A (en) * | 2017-05-15 | 2017-07-21 | 成都西沃克真空科技有限公司 | A kind of crystal oscillator probe control system |
| CN111101098A (en) * | 2018-10-26 | 2020-05-05 | 合肥欣奕华智能机器有限公司 | Evaporation control method and evaporation control system |
-
2017
- 2017-05-15 CN CN201720537630.1U patent/CN206706203U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106967959A (en) * | 2017-05-15 | 2017-07-21 | 成都西沃克真空科技有限公司 | A kind of crystal oscillator probe control system |
| CN111101098A (en) * | 2018-10-26 | 2020-05-05 | 合肥欣奕华智能机器有限公司 | Evaporation control method and evaporation control system |
| CN111101098B (en) * | 2018-10-26 | 2021-11-16 | 合肥欣奕华智能机器有限公司 | Evaporation control method and evaporation control system |
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Granted publication date: 20171205 Termination date: 20200515 |
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| CF01 | Termination of patent right due to non-payment of annual fee |