CN206685346U - A kind of high current low energy cluster ions beam guider - Google Patents

Abstract

The utility model provides a high-current low-energy cluster ion beam guiding device, which includes a pair of electrodes distributed at intervals and a pair of magnets arranged around the electrodes. The electrodes are fixed by a pair of insulators and are isolated from the magnets. The area between the ion beams constitutes the channel of the ion beam; the magnet and the insulator are fixed by a pair of pole pieces located at both ends of the magnet, and the two magnets are permanent magnets or electromagnets; The strength can adjust the transport direction of the cluster ion beam. The magnet and the electrode are fixed by the pole piece and the insulator, so that the magnet will not repel or attract each other and deviate from the fixed position, ensuring the flexibility and safety of the magnet installation. The insulator isolates the magnet And electrodes, to ensure that the positions of the magnets and electrodes are fixed to ensure that the respective magnetic and electric field distributions are relatively uniform, and to ensure that the beam current direction is adjusted. It has important practical application value in high-current and low-energy cluster ion beam nanoprocessing equipment.

Description

A high-current low-energy cluster ion beam guiding device

technical field

The utility model relates to a beam guide device in high-current low-energy cluster ion beam nano-processing equipment, which belongs to the technical field of ion beam nano-processing.

Background technique

In today's high-tech era led by information technology, integrated circuits are ubiquitous, and its research and development and production have become an important pillar industry in a country, and every integrated circuit is inseparable from the ion implantation process. With the further improvement of the integration level, the further reduction of the MOSFET scale (32 to 22nm), and the shallower and shallower junction depth of the device, it is necessary to adopt an ultra-low energy ion implantation process, and the ion beam current must be reduced under low energy conditions, and the single atom Ion channeling is unavoidable, so cluster ion beam technology must be used. The basis of this technology is cluster ion source and cluster ion beam processing equipment.

The complete set of high-current and low-energy cluster ion beam nanoprocessing equipment can generate cluster ion beams ranging from tens to thousands of atoms, which can meet the needs of manufacturing 10nm ultra-shallow junctions of silicon-based integrated circuits, flattening semiconductor surfaces, and preparing ultra-thin nanomaterials. aspects of demand. The establishment of a cluster ion beam equipment R&D and manufacturing system is conducive to the formation of ion beam nanoprocessing extreme manufacturing technology with independent intellectual property rights.

The beam guiding device has an important application position in the complete set of equipment for high-current and low-energy cluster ion beam nanoprocessing, and its main structure is an electromagnetic field control unit. The deflection and guidance devices relying on a single electric field or magnetic field in traditional ion beam processing equipment have certain limitations. Because the general energy-carrying ion beam guiding device has a parallel-plate electrostatic device and an electromagnetic field device, it has great advantages for the deflection and guidance of the light-mass energy-carrying charged particle beam, but it has little effect on the heavy-mass cluster ions.

Contents of the invention

The purpose of this utility model is to address the deficiencies in the prior art, and propose a safe and convenient electromagnetic field beam guide device in the high-current low-energy cluster ion beam nano-processing equipment, through the generated orthogonal cross electric field and magnetic field, so that The energy-carrying particles with a certain speed pass through smoothly, which plays the role of screening the cluster size and guiding and transporting the cluster ions.

The technical solution adopted to realize the purpose of the utility model is a high-current low-energy cluster ion beam guiding device, which at least includes a pair of electrodes distributed at intervals and a pair of magnets arranged around the electrodes, and the electrodes are fixed by a pair of insulators. And it is isolated from the magnet, and the area between the two electrodes forms an ion beam channel; the magnet and the insulator are fixed by a pair of pole pieces located at both ends of the magnet, and the magnet is located outside the electrode, and both magnets are permanent magnets or electromagnets.

The middle part of the inner side of the insulator protrudes upwards to form a slot, the slots of the two insulators face each other, the two electrodes are respectively fixed in the slots of the two insulators, and the magnet contacts the outer side of the insulator.

The middle part of the pole piece protrudes upwards to form a limit boss, which is pressed against the groove wall of the insulator slot, and the pole shoe is provided with holes matching the shape of the end of the magnet on both sides of the limit boss. The two ends of the magnet are respectively embedded in the grooves where the two pole pieces are located on the same side.

The root of the limiting boss is provided with a step, and the insulator is fixed in the area defined by the stepped surfaces of the two pole pieces and the limiting boss.

The step surface of the step is higher than the groove bottom of the groove.

The opposite surfaces of the two electrodes are mirror surfaces.

The insulator is in close contact with both the magnet and the electrodes.

The insulator is polytetrafluoroethylene insulator.

The electromagnet is composed of an iron core and a wound coil.

The permanent magnet is made of SmCo ₅ rare earth permanent magnet material.

It can be seen from the above technical solution that in the high-current low-energy cluster ion beam guiding device provided by the utility model, the magnet and the electrode are separated by a high-voltage polytetrafluoroethylene insulator (under standard conditions, the withstand voltage is 5kV). After the insulator separates the magnet from the electrode, at the same time the electrode is fixed by a card slot of appropriate size set on it. The magnet is installed and fixed by a pair of pole shoes at its two ends, which is convenient for installation and operation. The magnet is located on the outside of the electrode. Two The region between the electrodes constitutes the ion beam channel through which the cluster ion beam passes.

According to different magnetic field modes, two orthogonal cross electromagnetic fields are provided: one is the constant and stable magnetic field mode, which uses high-strength permanent magnets to provide a constant and stable magnetic field with a magnetic field strength of about 1000 Gauss, and the electrodes can provide electric fields when they are energized. Electromagnetic field, the magnetic field generated by the high-strength permanent magnet is orthogonal to the electric field between the poles, allowing single ions or small cluster ions with faster speed and lower mass to pass through, and deflect and guide the beam of single ions or small cluster ions Function; the second is the adjustable magnetic field mode, which adopts a wound coil-iron core electromagnet to ensure that a variable magnetic field with a magnetic field strength of 8000-15000 Gauss can be generated after the DC power of a suitable size is connected. The magnetic field is orthogonal to the electric field between the poles. It can allow cluster ions with slow speed and high mass to pass through, and play a role in regulating the beam current of cluster ions with a certain size (1000-3000atoms/cluster).

Therefore, the utility model can provide two kinds of magnetic field modes: stable and variable; by changing the electric field strength, the transport direction of the cluster ion beam can be adjusted, and the voltage of the plate can be adjusted according to the speed of the positive ion beam passing through the electromagnetic field , so that the cooperative force on the ions is balanced, so that the energy-carrying ions with a certain speed can pass through the electromagnetic field smoothly; the opposite surfaces of the two electrodes are mirror surfaces to avoid the tip discharge between the electrodes that may be caused by pollutants such as burrs.

The high-current low-energy cluster ion beam guiding device provided by the utility model provides two kinds of magnetic field modes, stable and variable, through high-strength permanent magnets and electromagnets, and can adjust the transport direction of the cluster ion beam by changing the electric field intensity , through a pair of pole shoes and a pair of insulators to fix the magnet and the electrode, to ensure that the magnets will not repel or attract each other and deviate from the fixed position, to ensure the flexibility and safety of the magnet installation, and the insulator isolates the magnet and the electrode to ensure the position of the magnet and the electrode It is fixed to ensure that the distribution of the respective magnetic and electric fields is relatively uniform, and to ensure that the beam direction is adjusted; the device has a simple structure and is easy to operate, and has important practical application value in high-current and low-energy cluster ion beam nanoprocessing equipment.

Description of drawings

Fig. 1 is an overall structural diagram of the high-current low-energy cluster ion beam guiding device provided by the utility model.

Figure 2 is a schematic structural view of the pole piece.

Among them, 1-pole piece, 2-magnet, 3-electrode, 4-insulator, 5-ion beam channel, 6-card slot, 7-limiting boss, 8-groove, 9-step.

detailed description

The utility model is described in detail below in conjunction with the accompanying drawings and embodiments, and the content of the utility model is not limited to the following embodiments.

Referring to Fig. 1, the high-current low-energy cluster ion beam guiding device provided by the utility model includes a pair of pole pieces 1, a pair of magnets 2, a pair of electrodes 3 distributed at intervals and a pair of insulators 4, between the two electrodes 3 The area constitutes the ion beam channel 5, and the opposite surfaces of the positive and negative plates of the two electrodes 3 need to be mechanically polished to a mirror surface to avoid the tip discharge between the poles that may be caused by pollutants such as burrs; in the constant magnetic field mode, the two magnets 2 Both are permanent magnets made of SmCo ₅ rare earth permanent magnet materials. In the adjustable magnetic field mode, the two magnets 2 are electromagnets composed of iron cores and wound coils;

The electrodes 3 are fixed by the insulator 4, the middle part of the inner surface of the insulator 4 protrudes upwards to form a slot 6, the notches of the slots 6 of the two insulators 4 are opposite, and the two electrodes 3 are respectively fixed in the slots 6 of the two insulators 4 , the magnet 2 is distributed on the outside of the electrode 3 and is in contact with the outer surface of the insulator 4, the insulator 4 is in close contact with the magnet 2 and the electrode 3, the electrode 3 and the magnet 2 are isolated from each other by the insulator 4, and the insulator 4 is preferably a polytetrafluoroethylene insulator;

Both the magnet 2 and the insulator 4 are fixed by a pair of pole shoes 1 located at both ends of the magnet. Referring to FIG. On the groove wall of the clamping groove 6, the pole piece 1 is provided with a groove 8 matching the shape of the end of the magnet 2 at the position on both sides of the limit boss 7, and the two ends of the magnet 2 are embedded in the two pole pieces 1 respectively In the groove 8 on the same side, the root of the limiting boss 7 is provided with a step 9, and the insulator 4 is fixed in the area defined by the step 9 surface of the two pole pieces 1 and the limiting boss 7. Since the electrode size is far Smaller than the magnet, the step surface of the step is higher than the groove bottom of the groove, that is, the size of the insulator 4 is smaller than that of the magnet, and the volume of the insulator can be reduced as much as possible under the condition of ensuring the isolation effect.

In actual use, after installing the magnets (permanent magnets or electromagnets) on both sides first, it is ensured that the magnets will not repel or attract each other and deviate from the fixed position. Then install the PTFE insulator, and finally install the positive and negative electrode plates and lead wires. The opposite surfaces of the positive and negative plates need to be mechanically polished to a mirror surface to avoid tip discharges between electrodes that may be caused by pollutants such as burrs. When installing, it is necessary to make the contact surfaces of the magnet, the insulator and the electrode plate have no gaps, so as to ensure that the positions of the three are relatively fixed to ensure that the respective magnetic and electric fields are distributed evenly. Connect an adjustable dual-channel DC voltage source at both ends of the lead, and reduce the beam transmission envelope by adjusting the voltage between the plates, so that the beam is always transported along the axis of the ion beam channel, and the deflection and guidance are small. The role of the cluster beam, and to ensure the normal operation of the cluster ion beam equipment.

Claims (10)

1. a kind of high current low energy cluster ions beam guider, including at least a pair of electrodes being spaced apart and is arranged at electricity a pair Magnet around pole, it is characterised in that：The electrode is fixed by a pair of insulators and, two electrodes mutually isolated with magnet Between region form ion beam path；The magnet and insulator are fixed by a pair of pole shoes positioned at magnet both ends, magnet position On the outside of electrode, two magnet are permanent magnet or electromagnet.

2. high current low energy cluster ions beam guider according to claim 1, it is characterised in that：The inside insulator Composition neck is projected upwards in the middle part of face, the neck notch of two insulators is relative, and two electrodes are individually fixed in two insulation In the neck of body, magnet is in contact with the lateral surface of insulator.

3. high current low energy cluster ions beam guider according to claim 2, it is characterised in that：The middle part of the pole shoe Raise up form positive stop lug boss, positive stop lug boss push against insulator neck cell wall, pole shoe positioned at the portion of positive stop lug boss both sides Position offers the groove to match with magnet end shape, and the both ends of magnet are located at the groove of homonymy embedded in two pole shoes respectively In.

4. high current low energy cluster ions beam guider according to claim 3, it is characterised in that：The positive stop lug boss Root is provided with step, and insulator is fixed in the region that the step terrace of two pole shoes and positive stop lug boss are limited.

5. high current low energy cluster ions beam guider according to claim 4, it is characterised in that：The terrace of the step Higher than the bottom land of groove.

6. high current low energy cluster ions beam guider according to claim 1, it is characterised in that：Two electrodes are relative Surface is minute surface.

7. high current low energy cluster ions beam guider according to claim 1, it is characterised in that：The insulator and magnetic Iron and electrode are in close contact.

8. high current low energy cluster ions beam guider according to claim 1, it is characterised in that：The insulator is poly- Tetrafluoroethene insulator.

9. high current low energy cluster ions beam guider according to claim 1, it is characterised in that：The electromagnet is by iron Core and enwinding type coil are formed.

10. high current low energy cluster ions beam guider according to claim 1, it is characterised in that：The permanent magnet by SmCo₅Rare earth permanent-magnetic material is formed.