CN206567609U - The automatic compensation adjustment device of the workpiece amount of feeding in saw blade cutting processing - Google Patents
The automatic compensation adjustment device of the workpiece amount of feeding in saw blade cutting processing Download PDFInfo
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Abstract
一种线锯切割加工中工件进给量自动补偿调节装置,包括进给工作台和载料台,进给工作台中设置有定位通孔,载料台的底部设置有导向柱,载料台通过底部导向柱与定位通孔的配合安装在进给工作台上,载料台与进给工作台之间设置有弹簧装置。该装置通过进给工作台与载料台的弹性连接,根据锯切力的变化通过弹簧使载料台相对于进给工作台沿进给方向产生移动,并通过定位导向装置实现了载料台在其他方向的定位,在切割过程中可自行根据锯丝与工件的接触状态使锯丝的切割能力与工作台进给量相匹配,避免因锯丝的弯曲过大带来严重磨损或切片表面质量变差。
An automatic compensation and adjustment device for workpiece feed during wire saw cutting, including a feed table and a loading table, where a positioning through hole is provided in the feed table, and a guide column is provided at the bottom of the loading table, and the loading table passes through The cooperation between the bottom guide column and the positioning through hole is installed on the feed table, and a spring device is arranged between the loading table and the feed table. Through the elastic connection between the feed table and the loading table, the device moves the loading table relative to the feeding table along the feeding direction through the spring according to the change of the sawing force, and realizes the loading table through the positioning guide device. Positioning in other directions, during the cutting process, the cutting ability of the saw wire can be matched with the feed rate of the worktable according to the contact state between the saw wire and the workpiece, so as to avoid severe wear or slicing surface caused by excessive bending of the saw wire The quality deteriorates.
Description
技术领域technical field
本实用新型涉及一种在线锯切割棒料过程中用于进给量自动调节的工件进给装置,属于切割加工技术领域。The utility model relates to a workpiece feeding device used for automatic adjustment of feeding amount in the process of cutting bar material by a wire saw, which belongs to the technical field of cutting processing.
背景技术Background technique
碳化硅(Sic)单晶、硅(Si)等硬脆材料因具有优良稳定的物理、化学性能被广泛应用于各个学科领域。而固结磨料金刚石线锯切片技术由于在硬脆材料切片加工的过程中具有切缝窄、物料去除率高、切片表面质量好、环境友好等优点在晶体切片行业中应用越来越广泛。Silicon carbide (Sic) single crystal, silicon (Si) and other hard and brittle materials are widely used in various disciplines due to their excellent and stable physical and chemical properties. The bonded abrasive diamond wire saw slicing technology is more and more widely used in the crystal slicing industry due to its advantages of narrow kerf, high material removal rate, good surface quality and environmental friendliness in the slicing process of hard and brittle materials.
现有的线锯机床设备一般是将待切割加工工件装夹于进给工作台上,锯丝往复运转,通过进给工作台运动带动待加工材料沿垂直于锯丝的方向进给,或是通过锯丝在保持往复走丝的同时沿垂直于加工材料的方向进给,完成切割。对于单晶SiC、单晶Si等硬脆材料而言,其工件形状一般为圆形棒状,切割时切口长度会随加工过程的进行而发生改变。同时,金刚石锯丝基体本身具有长度很长、直径很小的特点,极易发生弯曲变形。The existing wire saw machine tool equipment generally clamps the workpiece to be cut and processed on the feed worktable, and the saw wire reciprocates, and the movement of the feed worktable drives the material to be processed to feed in a direction perpendicular to the saw wire, or Cutting is accomplished by feeding the wire in a direction perpendicular to the material being processed while maintaining reciprocating wire travel. For hard and brittle materials such as single crystal SiC and single crystal Si, the shape of the workpiece is generally round and rod-shaped, and the length of the incision will change with the process of cutting. At the same time, the diamond wire matrix itself has the characteristics of long length and small diameter, so it is easy to bend and deform.
如在切割的过程中采取进给速度恒定的方式进行加工,当切口长度较大或锯丝已磨损时,由于进给速度恒定,进给量无法被及时切去会造成锯丝的严重弯曲,过度的弯曲变形会加大锯丝与工件之间的摩擦力、加重锯丝的磨损,甚至出现断丝现象,且会使切片的表面质量大大降低。当切口长度较小时,由于锯切力较小,锯丝一般不发生弯曲,其切削性能也没有充分发挥。If the feed rate is constant during the cutting process, when the incision length is large or the saw wire is worn, due to the constant feed rate, the feed cannot be cut in time, which will cause severe bending of the saw wire. Excessive bending deformation will increase the friction between the saw wire and the workpiece, increase the wear of the saw wire, and even cause wire breakage, and will greatly reduce the surface quality of the slice. When the incision length is small, due to the small sawing force, the saw wire generally does not bend, and its cutting performance is not fully exerted.
为了解决这个问题,有切割技术采取在整个切割过程中根据锯切区度采用变进给速度的工艺,但这对线锯床的控制系统要求比较高,大幅提高了锯床的成本和对操作人员技术的要求。有的锯床增加了锯丝摇摆装置,锯丝切割过程中往复摇摆来保持锯切圆形棒状硬脆材料时切割长度的不变,但增加锯丝摇摆装置大幅提高了锯床的制造成本和控制系统的复杂性。In order to solve this problem, there is a cutting technology that adopts a process of changing the feed speed according to the sawing area during the entire cutting process, but this requires relatively high requirements for the control system of the wire sawing machine, which greatly increases the cost of the sawing machine and the technical requirements for the operator. requirements. Some sawing machines have added a saw wire swing device, which swings back and forth during the saw wire cutting process to keep the cutting length constant when sawing round rod-shaped hard and brittle materials, but adding the saw wire swing device greatly increases the manufacturing cost and control system of the saw machine complexity.
实用新型内容Utility model content
本实用新型针对目前采用线锯切割加工圆形晶体棒料时,由于切割过程中切口长度变化或锯丝切割能力发生变化,同时进给速度恒定而存在的进给量无法被及时切去而造成的锯丝弯曲严重的问题,提供一种线锯切割加工中工件进给量自动补偿调节装置。The utility model aims at cutting and processing circular crystal rods with a wire saw at present, due to the change of the length of the incision or the change of the cutting ability of the saw wire during the cutting process, and at the same time the feed rate is constant and the existing feed cannot be cut off in time. To solve the serious problem of wire saw wire bending, an automatic compensation and adjustment device for workpiece feed during wire saw cutting is provided.
本实用新型的线锯切割加工中工件进给量自动补偿调节装置,采用以下技术方案:The automatic compensation and adjustment device for workpiece feed in the wire saw cutting process of the utility model adopts the following technical solutions:
该装置,包括进给工作台和载料台,进给工作台中设置有定位通孔,载料台的底部设置有导向柱,载料台通过底部导向柱与定位通孔的配合安装在进给工作台上,载料台与进给工作台之间设置有弹簧装置。The device includes a feed table and a loading table. A positioning through hole is arranged in the feeding table, and a guide column is provided at the bottom of the loading table. On the working table, a spring device is arranged between the loading table and the feeding table.
所述导向柱的截面呈矩形,相应地定位通孔也为矩形。The section of the guide column is rectangular, and the positioning through hole is also rectangular accordingly.
所述导向柱与定位通孔之间设置有定位导向装置,在每个定位通孔中相对设置两个。A positioning guide device is arranged between the guide column and the positioning through hole, two of which are oppositely arranged in each positioning through hole.
所述定位导向装置呈弓形,上下端带有安装孔,外侧面设置有弧形凸起。The positioning and guiding device is bow-shaped, with installation holes at the upper and lower ends, and arc-shaped protrusions on the outer surface.
所述弹簧装置为压缩弹簧。The spring device is a compression spring.
锯切前,锯丝张紧,产生弯曲,通过工件压在载料台上,弹簧装置产生预压缩;当切割工件切口深度L为L≤d/4时,如果切割量大于进给量,弹簧装置的预压缩量就会减少,载料台相对进给工作台向锯丝方向进一步进给,对进给量进行补偿,使锯丝弯曲角增大至5~10°以保持锯丝的切割能力,其中d为被加工晶体棒料的直径;当工件切口深度L为3d/4≤L≤d,或者是锯丝磨损,导致进给量大于切割量,使弯曲角大于10°时,沿工件进给方向产生的锯切压力使进给工作台与载料台之间的弹簧装置产生压缩,载料台相对于锯丝自动退让,减小锯丝的弯曲,以保证锯丝的弯曲角≤10°,消除进给量过大无法被及时切去导致锯丝弯曲量过大的现象。Before sawing, the saw wire is tensioned and bent, and the spring device generates pre-compression when the workpiece is pressed on the loading table; when the cutting depth L of the workpiece is L≤d/4, if the cutting amount is greater than the feeding amount, the spring The pre-compression amount of the device will be reduced, and the loading table will be further fed towards the direction of the wire relative to the feed table, and the feed amount will be compensated to increase the bending angle of the wire to 5-10° to maintain the cutting of the wire. capacity, where d is the diameter of the crystal bar to be processed; when the incision depth L of the workpiece is 3d/4≤L≤d, or the saw wire is worn, causing the feed rate to be greater than the cutting amount, so that the bending angle is greater than 10°, along the The sawing pressure generated in the feeding direction of the workpiece compresses the spring device between the feeding table and the loading table, and the loading table automatically retreats relative to the saw wire to reduce the bending of the saw wire to ensure the bending angle of the saw wire ≤10°, eliminating the phenomenon that the wire cannot be cut off in time due to excessive feed rate, resulting in excessive bending of the saw wire.
本实用新型通过进给工作台与载料台的弹性连接,根据锯切力的变化通过弹簧使载料台相对于进给工作台沿进给方向产生移动,并通过定位导向装置实现了载料台在其他方向的定位,在切割过程中可自行根据锯丝与工件的接触状态使锯丝的切割能力与工作台进给量相匹配,避免因锯丝的弯曲过大带来严重磨损或切片表面质量变差。The utility model makes the material loading table move relative to the feeding table along the feeding direction through the spring according to the change of the sawing force through the elastic connection between the feeding table and the loading table, and realizes the material loading through the positioning guide device. The positioning of the table in other directions can match the cutting ability of the saw wire with the feed rate of the worktable according to the contact state of the saw wire and the workpiece during the cutting process, so as to avoid serious wear or slicing caused by excessive bending of the saw wire Surface quality deteriorates.
附图说明Description of drawings
图1是本实用新型线锯切割加工中工件进给量自动补偿调节装置的结构示意图。Fig. 1 is a structural schematic diagram of the automatic compensation and adjustment device for workpiece feed in the wire saw cutting process of the utility model.
图2是图1中B-B剖视图。Fig. 2 is a B-B sectional view in Fig. 1 .
图3是本实用新型中定位导向装置的结构示意图。Fig. 3 is a structural schematic diagram of the positioning and guiding device in the utility model.
图中:1、进给工作台,2、压缩弹簧,3、载料台,4、工件,5、锯丝,6、导轮,7、定位导向装置,8、安装孔,9、弧形凸起。In the figure: 1. Feed table, 2. Compression spring, 3. Loading table, 4. Work piece, 5. Saw wire, 6. Guide wheel, 7. Positioning guide device, 8. Mounting hole, 9. Arc raised.
具体实施方式detailed description
如图1和图2所示,本实用新型的线锯切割加工中工件进给量自动补偿调节装置,包括进给工作台1和载料台3。载料台3底部设置有四个矩形的导向柱,进给工作台1上开设有与导向柱位置对应的四个矩形的定位通孔,载料台3底部的导向柱插入定位通孔中,每个导向柱与定位通孔之间设置有定位导向装置7。As shown in Fig. 1 and Fig. 2, the automatic compensation and adjustment device for the workpiece feed amount in the wire saw cutting process of the present utility model includes a feed table 1 and a loading table 3. Four rectangular guide posts are arranged at the bottom of the loading table 3, and four rectangular positioning through holes corresponding to the positions of the guiding posts are provided on the feed table 1, and the guiding posts at the bottom of the loading table 3 are inserted into the positioning through holes. A positioning guide device 7 is arranged between each guide column and the positioning through hole.
每个进给工作台1的定位通孔中设置相对布置的两个定位导向装置7。单个定位导向装置7的结构如图3所示,呈弓形,上下端带有安装孔8,安装孔8为长槽形。定位导向装置7与载料台3底部的导向柱接触的侧面设置有两道弧形凸起9。每两个定位导向装置7通过其上的安装孔8用螺栓对应安装于进给工作台1的一个通孔中。Two positioning guides 7 arranged oppositely are arranged in the positioning through holes of each feeding workbench 1 . The structure of a single positioning guide 7 is shown in Fig. 3, which is bow-shaped, with mounting holes 8 at the upper and lower ends, and the mounting holes 8 are in the shape of a long groove. Two arc-shaped protrusions 9 are provided on the side of the positioning guide device 7 that contacts the guide post at the bottom of the loading platform 3 . Every two positioning guides 7 are correspondingly installed in a through hole of the feed table 1 through the mounting holes 8 thereon.
定位导向装置7安装过程如下:在进给工作台1的每个定位通孔中置入两个定位导向装置7,两个定位导向装置7上的弧形凸起9相对,由安装孔8插入螺栓,螺栓呈半拧紧状态;将载物台3的四个定位柱对应插入定位通孔中,调节靠近进给工作台1内侧(每个定位通孔中里侧)的四个定位导向装置,使其弧形凸起9与定位柱的侧壁贴紧,拧紧其上螺栓;调节另外四个靠近进给工作台外侧的定位导向装置7使其弧形凸起9与定位柱的侧壁贴紧,拧紧螺栓,完成安装。切割过程中载物台3可相对于进给工作台1运动,定位导向装置7上的弧形凸起9与定位柱侧壁间是高副线接触,加入润滑油可保证定位柱能在进给方向上自由滑动。The installation process of the positioning guide device 7 is as follows: two positioning guide devices 7 are placed in each positioning through hole of the feed table 1, and the arc-shaped protrusions 9 on the two positioning guide devices 7 are opposite to each other, and are inserted through the installation hole 8 Bolts, the bolts are in a half-tightened state; insert the four positioning columns of the stage 3 into the positioning through holes correspondingly, and adjust the four positioning guides close to the inner side of the feed table 1 (the inner side of each positioning through hole), so that The arc-shaped protrusion 9 is close to the side wall of the positioning column, and the upper bolt is tightened; adjust the other four positioning guide devices 7 close to the outside of the feed table so that the arc-shaped protrusion 9 is close to the side wall of the positioning column , Tighten the bolts to complete the installation. During the cutting process, the stage 3 can move relative to the feed table 1, and the arc-shaped protrusion 9 on the positioning guide device 7 is in high secondary line contact with the side wall of the positioning column. Give directions to slide freely.
载料台3与进给工作台1之间设置有弹簧装置,具体是在载料台3的每个导向柱上套装压缩弹簧2。进给工作台1的四个矩形通孔的上下两端面沿工件放置轴向方向设有凹槽,定位导向装置7安装在凹槽上。A spring device is provided between the loading table 3 and the feeding table 1 , specifically, a compression spring 2 is set on each guide column of the loading table 3 . The upper and lower end surfaces of the four rectangular through holes of the feed table 1 are provided with grooves along the axial direction of the workpiece, and the positioning guide device 7 is installed on the grooves.
上述装置在使用时,将工件4固定在载料台3上,载料台3在进给工作台1上沿工件4的进给方向移动。锯丝5产生弯曲张紧,给载料台3一个适当的向下的预压力,使压缩弹簧2产生压缩。设定恒定的进给速度后进给工作台1向垂直于锯丝5方向运动(参见图1),锯丝5张紧在导轮6上并往复运动,开始切割工件4。When the above device is in use, the workpiece 4 is fixed on the loading platform 3 , and the loading platform 3 moves along the feeding direction of the workpiece 4 on the feeding table 1 . The saw wire 5 is bent and tensioned, and an appropriate downward preload is given to the loading table 3, so that the compression spring 2 is compressed. After setting a constant feed speed, the feed table 1 moves in a direction perpendicular to the saw wire 5 (see FIG. 1 ), and the saw wire 5 is tensioned on the guide wheel 6 and reciprocates to start cutting the workpiece 4 .
在切口深度L较小(L≤d/4,d为被加工晶体棒料的直径)或锯丝5的磨损程度较小(锯丝5的寿命的前3/4时间段)时,锯丝5的切割能力良好,如果切割量大于进给量,压缩弹簧2的压缩量会减少,载料台3相对于进给工作台1向锯丝5方向进一步进给,以充分发挥锯丝5的切割能力。When the incision depth L is small (L≤d/4, d is the diameter of the crystal bar to be processed) or the wear degree of the saw wire 5 is small (the first 3/4 period of the life of the saw wire 5), the saw wire 5 has a good cutting ability, if the cutting amount is greater than the feeding amount, the compression amount of the compression spring 2 will be reduced, and the loading table 3 will be further fed in the direction of the saw wire 5 relative to the feed table 1, so as to fully exert the power of the saw wire 5 cutting ability.
在切割的切口深度L较长(3d/4≤L≤d),或者是锯丝5因磨损程度较大(锯丝5的寿命的后1/4时间段)导致切割能力下降,当切割量小于进给量时,由于锯丝5产生较大的弯曲(锯丝的弯曲角大于10°),使其产生的对载料台3垂直方向的锯切压力加大,而此时压缩弹簧2就会进一步压缩,使载料台3相对于进给工作台1远离锯丝5方向退让(锯丝退让距离为0~30mm),使锯丝5的弯曲角保持在≤10°(5~10°为佳),避免锯丝5磨损过大或拉断,以保持锯丝的切割能力,实现切割能力与进给量匹配的效果,消除进给量过大无法被及时切去导致锯丝弯曲量过大的现象,并保证切片的表面质量。When the cutting depth L is longer (3d/4≤L≤d), or the cutting ability of the saw wire 5 decreases due to greater wear (the last 1/4 of the service life of the saw wire 5), when the cutting amount When it is less than the feed rate, because the saw wire 5 has a large bend (the bending angle of the saw wire is greater than 10°), the sawing pressure generated by it on the vertical direction of the loading table 3 increases, and at this time the compression spring 2 It will be further compressed, so that the loading table 3 is retreated away from the direction of the saw wire 5 relative to the feed table 1 (the saw wire retreat distance is 0-30mm), so that the bending angle of the saw wire 5 is kept at ≤10° (5-10mm) ° is better), to avoid the saw wire 5 from being too worn or broken, so as to maintain the cutting ability of the saw wire, realize the effect of matching the cutting ability with the feed rate, and eliminate the bending of the saw wire caused by excessive feed rate that cannot be cut off in time The phenomenon of excessive amount, and ensure the surface quality of the slice.
如图1所示,锯丝5的弯曲角是指锯丝5切割工件4时受力弯曲状态与锯丝5初始未受力状态之间的夹角A。As shown in FIG. 1 , the bending angle of the saw wire 5 refers to the angle A between the bent state of the saw wire 5 when cutting the workpiece 4 and the initial unstressed state of the saw wire 5 .
本实用新型中涉及的进给工作台1的进给驱动方式以及工件在载料台3上的固定方式等可采用现有技术实现。The feed driving mode of the feed table 1 involved in the utility model and the fixing mode of the workpiece on the loading table 3 can be realized by using the prior art.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106735562A (en) * | 2017-03-20 | 2017-05-31 | 山东大学 | The automatic compensation adjustment method and device of the workpiece amount of feeding in saw blade cutting processing |
CN110153778A (en) * | 2018-02-06 | 2019-08-23 | 重庆熵臻科技有限公司 | A kind of dust protected cutter device for building that effects of energy conservation and environmental protection is good |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106735562A (en) * | 2017-03-20 | 2017-05-31 | 山东大学 | The automatic compensation adjustment method and device of the workpiece amount of feeding in saw blade cutting processing |
CN106735562B (en) * | 2017-03-20 | 2019-01-04 | 山东大学 | The automatic compensation adjustment method and device of the workpiece amount of feeding in saw blade cutting processing |
CN110153778A (en) * | 2018-02-06 | 2019-08-23 | 重庆熵臻科技有限公司 | A kind of dust protected cutter device for building that effects of energy conservation and environmental protection is good |
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Granted publication date: 20171020 Termination date: 20190320 |